KR860001276B1 - Piezo electric resonance element its manufacturing method and its device - Google Patents

Abstract

The piezoelectric resonating element includes a piezoelectric plate(2) having an elongated rectangular shape with frist and second major flat surfaces. (2) is formed with an elongated groove(3) on the first major flat surface extending in a lengthwise direction from the piezoelectric plate(2). (3) separates the first major flat surface into first and second lands. A first electrode(6) is deposited on the first land, and a second electrode(7) is deposited on the second land. A third electrode (12) is deposited entirely on the second major flat surface. A dicing saw is used to form the groove and cut out the element from a mother piece.

Description

Piezoelectric resonator element, piezoelectric resonator using its manufacturing method and piezoelectric resonator element

1A is a perspective view of a piezoelectric resonator device according to a first embodiment of the present invention.

1B is a perspective view of a piezoelectric resonator device according to a second embodiment of the present invention.

2 is a simplified circuit diagram of the piezoelectric resonator device of FIGS. 1A and 1B.

3 is a plan view of a sintered ceramic plate arranged in a horizontal and vertical plate shape.

4 is a diagram illustrating a scene in which a sintered ceramic large plate is cut by a dicing saw.

5 is a plan view of a base supporting a piezoelectric resonator element and its accessories.

6 is a plan view partially removing the substrate cut in the direction of the arrow VI of FIG.

FIG. 7 is a side view of part of the substrate cut in the direction of FIG.

8 is a plan view of a terminal member.

9 is a plan view of a flexible anisotropic conduction sheet.

10 is a plan view of a ground terminal member.

FIG. 11 is a plan view of a ground terminal cut in the direction of the arrow of FIG.

12 is a side view of the ground terminal of FIG. 10 taken along the direction of XII.

13 is a plan view of a casing;

14 is a front view of the casing cut in the direction of the arrow XIV in FIG. 13;

FIG. 15 is a front view of the casing cut in the direction of the arrow of XV of FIG. 13; FIG.

Figure 16 is a perspective view of the internal cut of the piezoelectric resonator device of the present invention.

17 is a flatness of the piezoelectric resonator of the present invention.

18 is a perspective view of the internal incision cut in the X-ray direction of FIG.

FIG. 19 is a view showing a part of the piezoelectric resonator as viewed in the ⅩⅨ direction of FIG.

20 is a perspective view showing a deformation of the ground terminal.

21 and 24 are selectivity curves.

25 is a spurious special curve.

The present invention relates to a piezoelectric resonator using a piezoelectric resonator element and a piezoelectric resonator element, and a method of manufacturing the element. In general, the piezoelectric resonator element is composed of a body and an electrode attached to the body, and also is stacked on the casing, the terminal is connected to the electrode to be conducted to the outside.

Piezoelectric resonators include, for example, the center wave of a piezoelectric filter for AM receivers in the range of several hundred KH, for example, 450 kHz, and symmetrical. According to known techniques, the arrangement of piezoelectric filters is mass production. There are three types of the same.

The first type is a Zumann filter that requires an intermediate frequency transformer. I) Impedance matching between the IF transformer and the piezoelectric resonator is difficult, and ii) the IF transformer contains a coil, so the inductance Are rapidly changing and therefore low in reliability, i) IF transformers are rather large and costly to produce.

An example of a zhouman type filter is described in the specification of Japanese Utility Model Publication No. 72-40256, published December 6, 1972.

The second type is a three-terminal filter, which has a rectangular plate oscillating in expansion mode and a disc oscillating oscillating radial radial mode.

The three-terminal filter has a relatively large size, i.e., a third high frequency, especially in a disc filter, so that it is large in order to obtain a node point supporting the disc filter, and ii) a rectangular plate. In this case, unnecessary spurious vibrations are generated by the edge mode of vibration. Iii) IF transformers are rather large and costly to produce.

Examples of the Zumen type filter are described in the specification of Japanese Utility Model Publication No. 72-40256, published December 6, 1972.

The second type is a three-terminal filter, which has a rectangular plate that vibrates in expansion mode and a disk that vibrates in radial expansion mode.

The three-terminal filter is slightly larger in size, and is particularly large in order to obtain a node point for supporting the disc filter because a third high frequency is used in the disc filter, and ii) a rectangular plate. In this case, unnecessary spurious vibrations are generated by the edge mode of vibration.

The second form is detailed in the specification of US Pat. No. 4,360,754, published November 23, 1982.

The third form is a pair of elongated rectangular plates that are longitudinally vibrated in double mode, with slightly different vibration frequencies between the two plates.

In the filter of the above-mentioned type, i) it is difficult to match the vibration frequency of each rectangular plate with the coupling between the two rectangular plates, ii) the structure is complicated, and the manufacturing cost is expensive.

The third type of filter is described in the specification of Japanese Utility Model Publication No. 81-19465, published May 8, 1981. The present invention relates to a piezoelectric resonator having a structure that is quite different from the conventional one described above, and has the following object.

An object of the present invention is to provide a piezoelectric resonator device excellent in spurious vibration. Another object of the present invention is to provide a piezoelectric resonator device having excellent impedance characteristics. Another object of the present invention is to provide a small piezoelectric resonator device. Another object of the present invention is to provide an inexpensive piezoelectric resonator device. Another object of the present invention is to provide a piezoelectric resonator element with little deviation of each product. Another object of the present invention is to provide a piezoelectric resonator device having excellent manufacturing efficiency.

In addition, the method of manufacturing a piezoelectric resonator device having a high concentration can be mass produced in an automated assembly line.

FIG. 1A is a piezoelectric resonator element 1 according to the first embodiment of the present invention, in which 2 is a piezoelectric ceramic plate, and a groove 3 is provided on the main surface thereof in the length (l) direction. The main surface is divided into two in the length (l) direction. Moreover, the grooves 4 and 5 are provided in the position of 1 / 3l from the center of the length 1 direction in the direction which intersects the length 1 direction, respectively. Therefore, the grooves 4 and 5 are 2 / 3l apart from each other. Moreover, the main surface of the piezoelectric ceramic plate 2 is divided into six parts by the grooves 3, 4, and 5, in which six electrodes 6, 7, and 8 are formed. , (9), (10) and (11) are provided respectively.

The front electrode 12 is provided on the lower surface of the piezoelectric ceramic plate 2. Therefore, the longitudinal vibration mode that stretches in the length (l) direction is used, and each part dimension in the piezoelectric ceramic plate 2 is, for example, when the center frequency is 450 KH, the length l is 4.05 mm and the width 0.6 mm, The thickness is 0.3 mm, the depth of the grooves 3 is 0.15 mm, and the depths and widths of the grooves 4, 5 are the electrodes 6, 7 for the electrodes 8, 9, ( It is very suitable only to allow electrical separation from 10) or (11). The electrodes 8, 9, 10 and 11 are formed between the upper and lower surfaces of the piezoelectric ceramic plate 2 in the process of manufacturing the piezoelectric resonator element 1 to polarize the piezoelectric ceramic plate 2. It is installed to apply electric field in thickness direction and is not used in actual operation. The piezoelectric resonator element 1 vibrates in the longitudinal mode and expands and contracts in the longitudinal direction in an AM signal having a center frequency of 450 KHz.

Referring to FIG. 1B, the chopping resonator element 1 'shows a second embodiment.

Compared to the piezoelectric resonator element 1 of the first embodiment, the piezoelectric resonator element 1 'has no grooves 4 and 5 and the upper surface is divided into two parts by the electrodes 6 and 7. The piezoelectric resonators 1, 1 'can be used as filter elements because they vibrate in a single mode in the longitudinal direction.

2 is a simplified circuit diagram of the piezoelectric resonator elements 1 and 1 'of the present invention.

Next, the process of Jeju-making the piezoelectric resonator element 1 is related to FIG. 3, FIG. First, a rectangular shape sintered ceramic plate 101 of several centimeters in length is processed smoothly by a known method such as lapping.

The sintered ceramic plate 101 as described above becomes a matrix. Next, a thin film of a conductive crystal material is deposited on both surfaces of the matrix.

Next, an appropriate voltage is applied between the whole parts of the ceramic plate 101 in the thickness direction to become polarization. Next, the dicing saw 13 moves in the direction of arrow A as shown in FIG. 4 while the blade rotates at high speed, and although the thick material cannot be cut deeply, the thickness of the piezoelectric plate, which is the object of the invention, is very thin. Very good. In addition, the dicing saw 13 is moved in the direction indicated by the arrow B shown in FIG. 4 to be set to an appropriate value and cut. Alternatively, a groove can be formed at an arbitrary depth.

In order to improve the efficiency in the manufacturing process, several sintered ceramic plates 101 are arranged in a horizontal and vertical plate shape as shown in FIG. Therefore, the ceramic plate 101 is simultaneously grooved and divided into several chips 1 by the dicing saw 13. Since the dicing saw 13 has a high precision, the chip 1 cut to the required length l no longer needs to be touched, and the adjustment process for frequency selection is omitted in comparison with the conventional device manufacturing method.

For example, in the case of the chip 1 which makes a filter with a center frequency of 455 KHz, each chip shows good characteristics in frequency selection, and the frequency dispersion is 1.2 KHz or less. In addition, the grooves 3, 4, and 5 are formed by cutting, and the thin film forms the input / output electrodes 6 and 7 of the required size. According to the known technique, the input and output electrodes 6 and 7 are made by a process applied by a resist ink on a thin film, and the thin films forming the electrodes 6 and 7 Partially etched.

Compared to the above, the method according to the invention is much simpler. The grooves 4 and 5 for the electrodes 6 and 7 can be formed to the required length, that is, about 3/2 l. The third harmonic is limited because the electrodes 6, 7 are formed in the length of the plate 1 at about 3/2 l.

Next, a piezoelectric resonator in which the piezoelectric resonator element 1 is mounted will be described in detail. 5, 6, and 7 show bases and 14, and the mace 14 shows input and output terminal plates 15, coin-type rubber layers 16, and piezoelectric resonators (described later). 1) and the terminal portion 17 are mounted in a restricted position relationship with each other.

The electrically insulated base 14 is made of synthetic resin or the like, and includes a rectangular substrate or the like. In particular, the four corners of the substrate 19 were cut out to eliminate the pointed edges as shown in FIG. In the middle of the long side of the substrate 19 two walls 20a, 20b stand vertically facing each other.

A recess 201 is formed in the center of the upper end of each wall 20a, 20b. Similarly, along the opposite short side of the substrate 19, the two walls 21a, 21b stand vertically facing each other.

As shown in FIG. 6, walls 20a and 20b are larger than walls 21a and 21b. There is also a space between the tall and small walls. In the space resulting from the four walls 20a, 20b, 21a, 21b, six pins 22a, 22b, 23a, 23b extending vertically from the substrate 19 , 23c, 23d, and the pins 22a, 22b are adjacent to and positioned on the small walls 21a, 21b, respectively, while the pins 23a, 23b are the large walls 20a. Located near, pins 23c and 23d are located near large wall 20b.

As shown in Figs. 6 and 7, the heights of the pins 23a to 23d are the same as those of the large walls 20a and 20b, and the heights of the pins 22a and 22b are halfway between the large and small walls. . The uppermost portions of the large walls 20a and 20b and the uppermost portions of the large pins 22a and 23d are sharpened so that the accessory portions on the piezoelectric resonator element 1 and the substrate 19 can be positioned in the manner described below. One or the end is tapered.

As shown in FIG. 5, the substrate 14 is symmetrical in the assembly line, and the base 14 can also be placed in FIG. 5 or in an inverted position.

Referring to FIG. 8, there is an input and output terminal plate 15 consisting of a belt 15a and a pair of arms, 15b, 15c extending from the belt 15a. Arm 15b with beam 24 is longer than arm 15c and has a contact face 26 at the end of beam 24. Similarly the short arm 15c has a beam 25 and a contact surface 27 at its distal end. The contact surfaces 26, 27 lie at regular intervals. A similar pair of arms (not shown) is placed along the belt 15a at a constant pitch.

Since the input and output terminal plates 15 are in the base 14, a wide arm 15b is placed between the small wall 21b and the pin 22b, and the beam 25 is the large wall 20a and the pin. The contact surface 27 is located between the pins 23a and 23b because it lies between the 23a. In short, the input and output terminal plates 15 are fixed to the base 14 along the chain lines L1-L1 shown in FIG. 5.

The reduced width of the arms 15b and 15c is bitten by the wall 20a so that the input and output terminal plates 15 can be properly positioned within the base 14.

Next, a flexible anisotropic conductive layer, such as, for example, the lead rubber gun 16 shown in FIG. 9, is placed on the input and output terminal plates 15 over the contact surfaces 26, 27. As shown in FIG. The rubber layer 16 is rectangular in shape and sized to fit within the space determined by the pins 26a, 23b, 23b, 23d. The conductive rubber layer 16 is arranged in the thickness direction of the rubber layer so as to contain silicon rubber and particles of conductive wire material such as, for example, graphite fibers and fine metallic leads, and only to be conductive in the thickness direction. In the conductive rubber layer 16, the piezoelectric resonator element 1 (FIG. 1) is fixed so that the electrodes 6 and 7 face down and are connected with the rubber layer 16. As shown in FIG. Therefore, the electrodes 6 and 7 are electrically connected to the contact surfaces 26 and 27 through the rubber layers 16 each having a good insulating layer between the electrodes 6 and 7, respectively. Above the ruler 1 is a ground terminal plate 17 as shown in FIGS. 10, 11 and 12.

The ground terminal plate 17 is composed of a belt 17a and an arm 17b extending from the belt 17a. The arm 17b has a bent portion 30 in the shape of an “S” as shown in FIG. 12, and the arm continues from the S portion 30 to the point indicated by reference numeral 28. Arms 17b and 28 are acute angles of, for example, approximately 10 degrees, as shown in FIG. At the distal end of the arm 28 is an H-shaped bar, 29.

As shown in Fig. 10, the " H " shaped bar 29 has an arc shape as shown in Fig. 11. There is also a projection 291 at the connection between the arm 28 and the "H" shaped bar 29. When the ground terminal plate 17 is placed, the protrusions are brought into contact with and fixed to the electrodes 12 of the element 1.

In the assembly line, the belt 17a is firmly fixed to the belt 15a by a suitable device as shown in FIG. 16 so that the rubber layer 16 and the piezoelectric element 1 are terminated by the elasticity of the arm 28. It is temporarily fixed between the plates 15 and 17. The substrate 14, the rubber layer 16, the element 1 and the terminal plate 15, 17 are assembled by the above-described method (see Assembled Body), and the assembled body is inserted into the casing 18.

13, 14, and 15, the casing 18 is rectangular and made of an insulating material such as synthetic resin, for example. The casing 18 is held by the top and bottom walls 18a, 18b and the opposite front walls 18c, 18d and the bottom wall 18e, and there is an opening 32, the casing 18 There is a cavity 33 inside.

The cutting structure of the cavity 33 is similar to that of the opening 32, the center portion is the same height as the side walls opposite to the large walls 20a, 20b, and the wing portion is the height of the small walls 21a, 21b. Is the same. In particular, the opening 32 is tapered by an inclined wall 34 in the same way as a wedge to facilitate insertion into the assembly body described above.

It also has an inclined surface 31 on the outside of the casing 18 so that the top and bottom walls 18a, 18b can be easily found when used or in the manufacturing process. Inserting the assembly body into the casing 18 is carried out in the same manner as above and the substrate 19 of the body 14 is the lower wall 18b of each H-shaped bar 29 of the casing 18. And each two parallel portions are placed on the top wall 18a of the casing 18.

The parallel portions of the H-shaped bars 29 are inclined at an angle θ, and the protrusions of the two parallel portions can be easily fitted into the casing 18.

During insertion, the H-shaped bar 29 is pushed down and oriented parallel to the top wall 18a, so that the projection 291 is pushed down by the spring action of the H-shaped bar 29. Pushed to Thus, the piezoelectric resonator element 1 and the conductive rubber layer 16 are fixed between the terminal plates 15 and 17, and in particular between the contact surfaces 26, 27 and the projection 29 at a constant pressure. .

The above pressure is generated when inserted by the elasticity of the arm 28 and increases as it is inserted. When the assembly body is completely inserted into the casing 18, there is a constant pressure determined by the spring action of the H-shaped bar 29 and the elasticity of the rubber layer 16. Therefore, the piezoelectric resonator element 1 and the rubber layer 16 are fixed between the terminal plates 15 and 17 not only when they are completely inserted into the casing 18 but also during fixing to be inserted into the casing 18. In addition, the piezoelectric resonator element 1 and the rubber layer 16 do not erroneously enter the insert.

17, 18, and 19, the assembled piezoelectric device can be seen. When the assembly body is completely inserted into the casing 18, the pressure 28 of the terminal plate 17 is caught by the recess 201 formed in the large wall 20a. A sealant 35, such as, for example, a resin, is also drawn from the opening 32 into the casing 14 to completely seal the casing 18. Also, since the large wall 20a almost completely separates the cavity 33, the sealing material 35 is filled to only one side of the cavity 33 to a certain thickness, and the sealing material 35 extends beyond the large wall 20a. Cannot enter the other side of 33). In addition, only a small amount of sealant is required for sealing. Generally it can be done with high reliability since the area of the opening is small when sealing the opening. However, in this case it is difficult to insert the body through the opening if the opening is too small.

According to the present invention, this problem is solved by making the assembly body in a shape similar to a wedge in order to facilitate the insertion of the assembly into the casing 18 having a small opening. Thus, the process of injecting the sealing material 35 as well as the process of inserting the assembly body into the casing 18 to the assembling person can be automatically performed with high elongation. Although similar devices are described in the specification of Japanese Utility Model Publication (Kikkaisho) 52-82343, the sealing material differs not only in forming the large wall 20a but also in forming an assembly body in a shape similar to a wedge. In order to separate each piezoelectric resonator from the belts 15a and 17a, the arm is cut along the L2-L2 direction in FIG.

Referring to FIG. 20, a modification of the terminal plate 17 is shown. The illustrated terminal plate 17 is bent in a U-shape so that the arm 28 escapes the large wall 20a and is also parallel to the arm 17b and extends toward the H-shaped bar 29. The H-shaped bar 29 extends parallel to the arm 17b and the distal end is slightly bent downward to facilitate the insertion of the assembly body into the casing 18.

According to the terminal plate 17 shown in FIG. 16, the projection 291 pushes the piezoelectric notification element 1 downward by the angle θ, not directly downward.

According to the modification of the terminal plate 17 shown in FIG. 20, the projection 291 deforms the resonant element 1 when the piezoelectric resonator element 1 is directly pressed downward to insert the assembly body into the casing 18. Make as little as possible.

21-24 show graphs of selection characteristics of different filters using the piezoelectric resonator element 1 according to the present invention. In each graph, the vertical and horizontal axes represent frequency and attenuation, respectively.

The graph in FIG. 21 shows a selection characteristic curve of the filter using the piezoelectric resonator element 1 of the present invention.

The graph of FIG. 22 shows a selection characteristic curve of the filter in which the piezoelectric resonator element 1 of the present invention is combined with an IF transformer (not shown).

The graph of FIG. 23 is a selection characteristic curve of a filter used by connecting two piezoelectric resonators 1 of the present invention in series without inserting a coupling capacitor. 24 is a selection characteristic curve of a filter used by connecting two coupling capacitors and an IF transformer in series in the piezoelectric resonance device 1 of the present invention.

Referring to FIG. 25, it is a graph of the spurious characteristic curve of a filter used by connecting two piezoelectric resonators 1 and IF transformers in series.

The piezoelectric resonator device 1 according to the present invention has the following advantages. The piezoelectric resonator element 1 is vacuumed in the longitudinal mode, and is constituted by a single chip, so that the element itself can be made small. In particular, the width of the device 1 according to the present invention is not larger than 1/4 of the length l, and is about 1/4 the size of a known square 3-terminal-shaped resonant device having l on both sides. If two devices are used, the size can be reduced to 1/8 or even smaller. So increasing the number of devices can significantly reduce the size.

Each chip of the device 1 can be made small in size, can reduce the production cost, the chip of several devices can be embedded in one casing, and the output increase of the piezoelectric resonator using the chips of several devices This can be done without significantly increasing the manufacturing cost and the size of the casing. In addition, since the device 1 uses the longitudinal vibration mode, the device 1 does not generate another vibration mode, and the device 1 exhibits good spurious characteristics even in the long and medium wave bands (up to 2.5 MHz). Therefore, the piezoelectric notification element 1 of the present invention is particularly useful for, for example, a filter of an intermediate frequency circuit of an AM receiver. The piezoelectric resonator element 1 has a high impedance, and it is impossible to change the external circuit constant. In addition, since the element 1 is used in the longitudinal vibration mode, the impedance change becomes very small even if the element 1 is replaced to change the intermediate frequency.

Thus, even if the element 1 changes, there is no need to exchange the shape of the coupled IF transformer. Since two or more elements 1 can be directly coupled without coupling, there is no need to use a coupling capacitor. Thus, the coupling capacitor can be omitted, thus reducing the manufacturing cost and size. Since a large number of chips can be cut by cutting a single large plate, the device according to the present invention can save the basic raw material and thus the manufacturing cost, compared with other known methods using the longitudinal vibration mode.

In addition, the grooves 3 between the input and output electrodes 6 and 7 reduce stray capacitance, so the selection characteristics of the high and low frequency regions of the intermediate frequencies oscillate in expansion mode. It is almost symmetrical by a filter using the device.

The method of manufacturing the piezoelectric resonator device 1 according to the present invention has the following advantages.

Electrode attachment is easily accomplished by the process of applying electrodes on a large number of elements 1 on a single large plate by resist ink, and by removing the unnecessary portions of electrodes by etching, a single large plate 101 is provided. It is possible to cut a chip of a number of elements 1 from, to classify the cut elements in terms of intermediate frequency, and to adjust the intermediate frequency accurately, a groove is formed, and a chip is cut using a dicing saw. Made by the process.

The piezoelectric resonator device according to the present invention has the following advantages. The assembly body is easily written into the casing through a small opening, and after insertion of the assembly body, the opening can be sealed with high reliability without the saliva of the sealing material by the cavity in which the piezoelectric resonator element 1 is installed by the large wall 20a. have.

Although elements and embodiments according to the present invention have been described herein, various modifications may be made, and the embodiments and claims of the present invention do not limit the scope of the present invention.

Claims (15)

(1) A piezoelectric ceramic plate having a long rectangular main surface and two flat surfaces, a lower surface (2), and a piezoelectric ceramic plate (2) having an elongated groove in the longitudinal direction dividing the main surface into two parts (3) (2) The first electrode 6 is attached to one part of the main surface, (3) The second electrode 7 is attached to the other part, and (4) The electrode 12 is attached to the whole lower surface. Piezoelectric resonance element with). The piezoelectric resonator device according to claim 1, wherein the elongated grooves (3) are formed by dicing saws. (1) An elongated rectangular main surface and an elongated groove (3) formed in the longitudinal direction of the piezoelectric plate (2) and a piezoelectric ceramic plate (2) having a length of two flat surfaces, the lower surface of which is the length of the piezoelectric plate (2) and the major surface. Attached to the part formed by another groove (4), (5) and (2) another groove (4, (5)) formed 2/3 l from the center of the plane that divides the flat surface into six parts. The first electrode (6), (3) a second l electrode (7) attached to another portion formed by another groove (4), (5), and (4) attached to the entire lower flat surface Piezoelectric resonator device composed of a third electrode (12). 4. The piezoelectric resonator device according to claim 3, wherein the elongated grooves (3) and the other grooves (4) and (5) are formed in the dicing saw (13). A piezoelectric ceramic plate 2 having an elongated rectangular main surface and two flat surfaces that are lower surfaces, an elongated groove 3 for dividing the major surface formed in the longitudinal direction of the piezoelectric plate into two parts, and one part of the two parts. A first electrode 6 attached to the second electrode 7 attached to the other part and a third electrode 12 attached to the entire lower surface, and (1) a sintered ceramic plate which is a single large plate. (101) and (2) attaching first and second thin films of conductive material to the major and bottom surfaces, (3) applying a voltage to the first and second thin films, and (4) forming grooves on the major surfaces. 3) and as a result, the electrodes 6, 7 are formed by the dicing saw 13, and (5) the piezoelectric resonator element is formed by the dicing saw 13 for the ceramic plate 101. Of piezoelectric resonant elements formed by a chip cutting process Way. The method of manufacturing a piezoelectric resonator device according to claim 5, wherein the sintered ceramic plates (101) are manufactured and arranged on a flat surface. (1) a) a piezoceramic plate (2) having an elongated rectangular main surface and two flat surfaces that are lower surfaces, and an elongated groove for dividing the upper flat surface formed in the longitudinal direction of the piezoelectric plate into two parts ( 3) and b) a first electrode 6 attached to one part of the two, c) a second electrode 7 attached to the other part, and d) a third electrode attached to the entire lower surface thereof. A piezoelectric resonator element 1 consisting of 12), (2) a base 14 supporting the piezoelectric resonator element 1, and (3) connected to the first, second and third electrodes, respectively, and the other end is in the same direction. First, second and third terminal portions 17 extending outwards from the base 14, and (4) opposing top and bottom walls 18a, 18b and opposite side walls 18c, 18d and distal ends. There is a casing 18 held by the wall 18e and an opening 32 on the side of the casing There is a cavity 33 inside the casing 18, and a casing having a substrate 14, a piezoelectric resonator element 1, and a first, second and third terminals extending out from the casing through the opening 32 ( 18. A piezoelectric resonator comprising a first, second and third terminal portion within 18) and (5) a sealing material 35 filled in the opening 32 to seal the casing 18. The base 14 is composed of a substrate 19 on which the piezoelectric resonator element 1 is supported, and the wall separated from the substrate 19 has a large wall 20a, and has a large wall ( 20a) has a recessed portion for receiving the first, second and third terminal portions, and the large wall 20a separates the space between the cavity of the piezoelectric resonator element 1 of the cavity and the resonance for injecting the sealing material 35. Piezoelectric Resonator with Features. 8. The third terminal portion (17) according to claim 7, wherein the third terminal portion (17) is composed of a first portion (17b), a second portion (28) and a third portion (29) formed by combining with each other, and the first and second portions are bent portions (30). Since the first and second portions are acute before being inserted into the casing 18, since the third portion 29 is inclined, the third terminal portion 17, the substrate 14 and the piezoelectric resonance are operated in the same manner as the wedge. A piezoelectric resonator device which is easy to insert into the device 1 and the casings of the first and second parts. 10. The third portion 29 is retained by a beam extending vertically from the second portion 28 and bent in an arc to spring between the first top wall 18a and the third electrode 12 of the casing. Piezoelectric resonator that acts. 12. The piezoelectric resonator apparatus according to claim 10, wherein the third portion (29) is held by the projection (291) at the junction between the second and third portions (28, 29) to be electrically connected with the third electrode (12). 8. The third terminal portion (17) according to claim 7, wherein the third terminal portion (17) consists of a first portion (17b), a second portion (28) and a third portion (29) formed by combining with each other, and the first and second portions are the curved portions (30). The third part is held by a beam extending vertically from the second part 28, and the beam is inclined so that the third terminal part 17 and the base 14 and the piezoelectric resonator element 1 are operated in the same manner as the wedge. Piezoelectric resonator with easy insertion into the casing of the first and second terminals. 13. The piezoelectric resonator apparatus according to claim 12, wherein the beam extends vertically from the second portion (28) and is arcuately bent to spring between the first top wall (18a) and the third electrode (12). 14. A piezoelectric resonator element according to claim 13, wherein the third portion (29) is held by the projection (291) at the junction between the second and third portions (28, 29) to be electrically connected with the third electrode (12). 8. The piezoelectric resonator according to claim 7, wherein a flexible anisotropic conductive layer is formed between the first electrode (6) and the first terminal portion and the second electrode (7) and the second terminal portion.

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