KR20240043906A - Partial wet segment vibration isolation table joint structure - Google Patents

Abstract

The present invention includes a segmental vibration isolation table made of a plate shape; A plurality of structural nuts are provided on each surface facing each other for connection of the segmental vibration isolation tables, and the segmental vibration isolation tables are connected to each other by fastening a fixing bolt penetrating the channel located between the segmental vibration isolation tables to the structural nut. connection part; and a filling part filled in the connection portion of the segmental vibration isolation table where the connection part is located.
According to the present invention, the structural mechanics can be improved, bending rigidity can be increased, and various sizes can be easily manufactured.

Description

Partial wet segment vibration isolation table joint structure}

The present invention relates to a joint structure of a partially wet segmental vibration isolation zone, and more specifically, to a joint structure of a partially wet segmental vibration isolation zone that is excellent in structural mechanics and results in an increase in bending rigidity.

In general, the manufacturing process of a semiconductor device goes through various unit processes, including a photo process, an etching process, and a thin film deposition process, and for this purpose, various semiconductor manufacturing equipment is used.

Because these semiconductor manufacturing equipment perform precise processes, they are very vulnerable to vibrations transmitted from the outside. Therefore, in order to secure high quality and yield of semiconductor devices, there is a need to compensate for vulnerabilities caused by external vibrations, etc., resulting in vibration reduction. A price is being offered.

Conventional vibration isolation tables allow the semiconductor manufacturing device to be installed on the top surface so that the semiconductor manufacturing device is not installed directly on the floor, thereby absorbing and alleviating a certain portion of external vibration.

However, most of the conventional vibration isolation tables are composed of a single, integrated body, which has the problem of requiring a lot of space during insertion and installation and causing a lot of dust.

As a prior art to solve this problem, Korean Patent No. 10-2002804's "Separate Integrated Vibration Isolation Table with Same Structure Dynamic Characteristics" has been proposed, which is provided from the side of the casing forming a receiving space open at the top. A plurality of divided vibration isolation tables whose two sides and lower surfaces extend horizontally to form a connecting space, where reinforcing bars are placed in the receiving space and the connecting space, and where reinforced concrete is formed by pouring concrete into the receiving space; a form connection unit connecting the casings of each of the divided vibration isolation tables to each other to maintain the connection spaces of the divided vibration isolation tables connected to each other; A reinforcing bar connection part connecting the reinforcing bars exposed to each connection space of the divided vibration isolation table to each other; And a filler that is poured together with concrete in the connection spaces where the divided vibration isolation tables are connected to each other to form reinforced concrete, wherein the elastic modulus of the filler is 50 to 200% of the elastic modulus of the concrete poured in the receiving space. It is characterized by

However, as the precision of semiconductor device manufacturing has improved, this prior art has become necessary to achieve the same performance as an integrated vibration isolation table, while being superior in structural mechanics and increasing bending rigidity.

In addition, since the prior art is not easy to respond to production of various sizes, there is a need to improve it.

In order to solve the problems of the prior art as described above, the purpose of the present invention is to provide excellent structural mechanics, increase bending rigidity, and facilitate manufacturing of various sizes.

Other objects of the present invention may be easily understood through the description of the examples below.

In order to achieve the above-described object, according to one aspect of the present invention, a segmental vibration isolation table made of a plate shape; A plurality of structural nuts are provided on each surface facing each other for connection of the segmental vibration isolation tables, and the segmental vibration isolation tables are connected to each other by fastening a fixing bolt penetrating the channel located between the segmental vibration isolation tables to the structural nut. connection part; And a filling part filled in the connection portion of the segmental vibration isolation table where the connection part is located. A partially wet segmental vibration isolation table joint structure is provided, including a.

The connection part includes: a first connection part that connects the segmental vibration isolation tables to each other by a plurality of first channels provided horizontally on the upper side of the segmental vibration isolation tables on opposing sides; and a second connection part that connects the segmented vibration isolation tables to each other by a second channel extending horizontally downward from the side of the segmental vibration isolation tables facing each other.

The first connection part includes a first structural nut embedded so as to be exposed at the top on the side of the segmented vibration isolation table made of reinforced concrete; A first channel in the shape of “ㄷ” in which first connection holes are provided at both ends to match the first structural nut; And a first fixing bolt that penetrates the first connection hole and is fastened to the first structural nut, thereby fixing the first channel to the side of the segmental vibration isolation table, wherein the first channel is a standardized " It may be any one of a "ㄷ" shaped channel, a channel bent into a "ㄷ" shape, and a channel where the "L" shaped first connection channel located on both sides is connected to the first connection plate by the first fixing member.

The second connection part includes a plurality of second structural nuts embedded horizontally so as to be exposed to the lower part of the side of the segmented vibration isolation table made of reinforced concrete; A second channel in the shape of a "ㄷ" shape, which has a plurality of second connection holes along the longitudinal direction at both ends to match the second structural nut and serves as a lower formwork of the filling part; and a second fixing bolt that passes through the second connection hole and is fastened to the second structural nut, thereby fixing the second channel to the side of the segmental vibration isolation table. The second channel includes a standardized " It may be any one of a "ㄷ" shaped channel, a channel bent into a "ㄷ" shape, and a channel where the "L" shaped second connection channel located on both sides is connected to the second connection plate by a second fixing member.

It further includes a shear key that is provided to protrude from the side of the segmental vibration isolation table made of reinforced concrete and is embedded in the filling part, wherein the shear key includes a third structural nut that is embedded in the segmental vibration isolation table so as to be exposed to the side; A locking member attached to an end of the third structural nut, embedded in the segmental vibration isolation table, and hooked on the inside of the segmental vibration isolation table to prevent the third structural nut from being separated from the outside; a shear bolt fastened to the third structural nut and protruding outward from the segmental vibration isolation table; and a support washer fixed to the shear bolt with a fixing nut and having a diameter or width larger than the diameter of the shear bolt.

The segmental vibration isolation table is made of a plate-shaped structure of reinforced concrete, and a shear pocket is formed so that an anchor portion provided vertically on a support supporting the lower side is inserted and buried inward, and a chipping surface is formed on the side where the filling portion is filled. can be formed.

According to the partially wet segmented vibration isolation table joint structure according to the present invention, it is possible to improve structural mechanics, increase bending rigidity, and facilitate the manufacture of various sizes.

Figure 1 is a plan view showing the joint structure of a partially wet segmented vibration isolation table according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view taken along line A-A' in FIG. 1.
Figure 3 is an enlarged view of part a of Figure 2.
Figure 4 is an enlarged view of part b of Figure 2.
Figure 5 is a perspective view showing the main portion of the partially wet segmented vibration isolation table joint structure according to an embodiment of the present invention.
FIG. 6 is a cross-sectional view taken along line B-B' in FIG. 1.
Figure 7 is a side cross-sectional view for explaining the production of a segmented vibration isolation table with a partially wet segmental vibration isolation table joint structure according to an embodiment of the present invention.
Figure 8 is a side cross-sectional view showing another example of the first and second channels in the partially wet segmented vibration isolation table joint structure according to an embodiment of the present invention.

Since the present invention can be subject to various changes and can have various embodiments, specific embodiments will be illustrated in the drawings and described in detail. However, this is not intended to limit the present invention to specific embodiments, but should be understood to include all changes, equivalents, and substitutes included in the technical idea and scope of the present invention, and may be modified into various other forms. The scope of the present invention is not limited to the following examples.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the attached drawings, and identical or corresponding components will be assigned the same reference numerals regardless of reference numerals, and redundant description thereof will be omitted.

Figure 1 is a plan view showing the joint structure of a partially wet segmented vibration isolation table according to an embodiment of the present invention, Figure 2 is a cross-sectional view taken along line A-A' of Figure 1, and Figure 3 is an enlarged view of portion a of Figure 2. , FIG. 4 is an enlarged view of portion b of FIG. 2, FIG. 5 is a perspective view showing the main portion of the partial wet segmental damping band joint structure according to an embodiment of the present invention, and FIG. 6 is B-B of FIG. 1. 'It is a cross-sectional view along a line.

Referring to Figures 1 to 6, the partial wet segmental vibration isolation table joint structure 100 according to an embodiment of the present invention may include a segmental vibration isolation table 110, connection portions 120 and 130, and filling portion 150. .

The segmental vibration isolation table 110 is made of a plate shape and may be made of reinforced concrete as in this embodiment. The upper reinforcing bar 112 and the lower reinforcing bar 113 are installed inside the plate-shaped main body 111 made of concrete to maintain strength. It is well-established.

The segmental vibration isolation table 110 is made of a plate-shaped structure of reinforced concrete, and the anchor portion 11, which is provided vertically on the support 10 supporting the lower side, is inserted and a shear pocket 114 is formed to be buried inward. A chipping surface 115 may be formed on the side where the filling portion 150 is filled. The segmental vibration isolation table 110 is manufactured in large quantities using a separate mold for a form that can be demolded, as shown in FIG. 7 (a), or manufactured using a steel plate for a form, as shown in FIG. 7 (b). It is possible to eliminate the need for additional connecting holes and welding of plates. In addition, the segmental vibration isolation table 110 may use a separate mold plate that has been chipped to form a chipping surface 115 (see FIG. 5) to improve bonding performance, as shown in FIG. 7 (c).

The connection portions 120 and 130 are provided with a plurality of structural nuts 121 and 131 on each side of the segmental vibration isolation table 110 facing each other for connection, and are fixed bolts that penetrate the channels 122 and 132 located between the segmental vibration isolation tables 110. By fastening (123, 133) to the structural nuts (121, 131), the segmental vibration isolation table (110) is connected to each other, which may be in a single form, or with a first connection portion (120) provided at the upper and lower portions as in this embodiment. It may include a second connection portion 130.

The first connection portion 120 allows the segmental vibration isolation tables 110 to be connected to each other by a plurality of first channels 122 provided horizontally on the upper side of the segmental vibration isolation tables 110 facing each other. By using this first connection portion 120, the stability of the segmental vibration isolation table 110 with respect to the structural mechanics of the reinforcing bars can be improved, and the bending rigidity of the vibration isolation table 110 can be increased.

The first connection portion 120 is, for example, a first structural nut 121 embedded so as to be exposed at the top on the side of the segmental vibration isolation table 110 made of reinforced concrete, and a first connection to match the first structural nut 121. The hole 122a is fastened to the first structural nut 121 through the "L" shaped first channel 122 provided at both ends and the first connection hole 122a, thereby forming the first channel 122. It may include a first fixing bolt 123 that secures to the side of the segmental vibration isolation table 110. Here, the first channel 122 may be made of a standardized “ㄷ” shaped channel, as in this embodiment, or may be made of a channel in which the steel plate is bent into a “ㄷ” shape so that it can be manufactured in a non-standard size. 7, the first channel 122 has an “L” shaped first connection channel 222c located on both sides connected to the first connection plate 222d by a first fixing member 222e. It may be a suitable channel. The first channel 122 is made of a standardized “ㄷ” shaped channel, or when it is made of a channel bent into a “ㄷ” shape, a first reinforcement piece 122b may be provided on the inside of the bent portion by welding, etc. . The first structural nut 121 may be independently embedded in the segmental vibration isolation table 110, but is not limited to this, and may be configured to be inserted into the end of the upper reinforcing bar 112 to form an integral part with the upper reinforcing bar 112. .

The second connection portion 130 connects the segmental vibration isolation tables 110 to each other through a second channel 132 that extends horizontally from the opposite side of the segmental vibration isolation tables 110 to the lower side. This second connection portion 130 can increase the stability of the structural dynamics of the rebar of the segmental vibration isolation table 110, increase the bending rigidity of the vibration isolation table, and serve as the lower form of the filling part 150. can do.

The second connection portion 130 is formed to match the second structural nuts 131, which are embedded in a plurality horizontally so as to be exposed at the bottom on the side of the segmental vibration isolation table 110 made of reinforced concrete. 2 A plurality of connection holes (132a) are provided along the longitudinal direction at both ends, a “ㄷ” shaped second channel (132) that serves as the lower form of the filling portion (150), and a second connection hole (132a) It may include a second fixing bolt 133 that passes through and is fastened to the second structural nut 131 to secure the second channel 132 to the side of the segmental vibration isolation table 110. This second connection portion 130 can increase the stability of the structural dynamics of the segmented vibration isolation table 110 for reinforcing bars, increase the bending rigidity of the vibration isolation table, and also serve as a formwork, making it convenient for manufacturing. Raise your voice.

The second channel 132 may be made of a standardized “ㄷ” shaped channel, as in this embodiment, or may be made of a channel where the steel plate is bent into a “ㄷ” shape so that it can be manufactured in a non-standard size, and for this purpose, the second channel 132 may be made of a channel facing each other. A plurality of second connection holes 132a may be formed at intervals along the longitudinal direction of a pair of side plates 132c, and the lower ends of each side plate 132c may be connected to form a single body with a lower plate 132d. It can have a structure. The second channel 132 is made of a standardized “ㄷ” shaped channel, or when the steel plate is made of a channel bent into a “ㄷ” shape, a second reinforcement piece 132b is provided on the inside of the bent portion by welding, etc. It can be. The second channel 132 may have a plurality of openings 132e formed along its length in order to be fixed to the shear pocket or support 10. The second structural nut 131 may be independently embedded in the segmental vibration isolation table 110, but is not limited to this, and may be configured to be inserted into the end of the lower reinforcing bar 113 and form an integral part with the lower reinforcing bar 113. .

As shown in FIG. 8, the second channel 232 according to another example has an “L” shaped second connection channel 232c located on both sides connected to the second connection plate 232d by a second fixing member 232e. ) may be a channel connected to

The filling portion 150 is filled in the connecting portion of the segmental vibration isolation table 110 where the connecting portions 120 and 130 are located, and may be made of concrete. When pouring concrete to form the filling portion 150, the second connecting portion 130 is filled through each of the first connecting portions 120, thereby forming the second channel 232 of the second connecting portion 130 into the formwork. It can play a role as

The partially wet segmental vibration isolation table joint structure 100 according to an embodiment of the present invention is provided to protrude from the side of the segmental vibration isolation table 110 made of reinforced concrete, so that the shear key 140 embedded in the filling portion 150 is provided. More may be included.

For example, as in this embodiment, the shear key 140 is attached to the third structural nut 141 embedded in the segmental vibration isolation table 110 so as to be exposed to the side, and the end of the third structural nut 141 to form the segmental vibration isolation unit 110. ) is embedded in the third structural nut 141, and is fastened to the third structural nut 141 to engage the segmental vibration isolation table 110 from the inside of the segmental vibration isolation table 110 to prevent the outer separation of the third structural nut 141. A shear bolt 143 protruding outward from (110) and a support washer 145 fixed to the shear bolt 143 with a fixing nut 144 and having a diameter or width larger than the diameter of the shear bolt 143. It can be included. Here, the fixing nut 144 may be screwed to the shear bolt 143 so as to be located on both sides with the support washer 145 in between.

As shown in Figure 8, the first channel 222 is an "L" shaped first connection channel 222c located on both sides connected to the first connection plate 222d by a first fixing member 222e. In this case, as in the present embodiment, a pair of "L" shaped first connection channels 222c each having a first connection hole 222a are connected to the first fixing member 222e at both ends of the first connection plate 222d. ), and the first fixing member 222e may be made of bolts and nuts as in this embodiment. Therefore, the standard of the first channel 222 can be easily changed just by changing the width of the first connection plate 222d.

In addition, the second channel 232 is used in this embodiment when the “L” shaped second connection channel 232c located on both sides is connected to the second connection plate 232d by the second fixing member 232e. As in the example, a pair of “L” shaped second connection channels 232c each having a plurality of second connection holes 232a are connected to a plurality of second fixing members 232e at both ends of the second connection plate 232d. ), and the second fixing member 232e may be made of bolts and nuts as in this embodiment. Therefore, the standard of the second channel 232 can be easily changed just by changing the width of the second connection plate 232d.

According to the joint structure of the partially wet segmental vibration isolation table according to the present invention, it is possible to achieve excellent structural mechanics, increase bending rigidity, and facilitate the manufacture of various sizes.

Although the present invention has been described with reference to the accompanying drawings, it goes without saying that various modifications and variations can be made without departing from the technical spirit of the present invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined by the claims described below as well as equivalents to these claims.

10: support 11: anchor part
110: Segmental vibration isolation table 111: Main body
112: upper rebar 113: lower rebar
114: shear pocket 115: chipping surface
120: first connection 121: first structural nut
122,222: 1st channel 122a, 222a: 1st connection hole
122b: First reinforcement piece 123: First fixing bolt
130: second connection 131: second structural nut
132,232: 2nd channel 132a, 232a: 2nd connection hole
132b: Second reinforcement piece 132c: Side plate
132d: lower plate 132e: opening
133: second fixing bolt 140: shear key
141: Third structural nut 142: Locking member
143: shear bolt 144: fixing nut
145: support washer 150: filling part
222c: first connection channel 222d: first connection plate
222e: first fixing member 232c: second connection channel
232d: second connection plate 232e: second fixing member

Claims (6)

Segmental vibration isolation table made of plate shape;
A plurality of structural nuts are provided on each surface facing each other for connection of the segmental vibration isolation tables, and the segmental vibration isolation tables are connected to each other by fastening a fixing bolt penetrating the channel located between the segmental vibration isolation tables to the structural nut. connection part; and
A filling part filled in the connection part of the segmental vibration isolation table where the connection part is located;
Partially wet segmented vibration isolation zone joint structure including. In claim 1,
The connection part is,
A first connection part for connecting the segmented vibration isolation tables to each other by a plurality of first channels provided horizontally on the upper side of the segmental vibration isolation tables on opposite sides of the segmental vibration isolation tables; and
a second connection portion for connecting the segmental vibration isolation tables to each other by a second channel extending horizontally downward from a side of the segmental vibration isolation tables facing each other;
Partially wet segmented vibration isolation zone joint structure including. In claim 2,
The first connection part is,
A first structural nut embedded so as to be exposed at the top on the side of the segmental vibration isolation table made of reinforced concrete;
A first channel in the shape of “ㄷ” in which first connection holes are provided at both ends to match the first structural nut; and
It includes a first fixing bolt that penetrates the first connection hole and is fastened to the first structural nut, thereby fixing the first channel to the side of the segmental vibration isolation table,
The first channel is,
One of a standardized "ㄷ" shaped channel, a channel bent into a "ㄷ" shape, and a channel where the "L" shaped first connection channel located on both sides is connected to the first connection plate by a first fixing member, Partial wet segmental vibration isolation table joint structure. In claim 2,
The second connection part is,
A plurality of second structural nuts embedded horizontally so as to be exposed at the bottom of the side of the segmented vibration isolation table made of reinforced concrete;
A second channel in the shape of a "ㄷ" shape, which has a plurality of second connection holes along the longitudinal direction at both ends to match the second structural nut and serves as a lower formwork of the filling part; and
It includes a second fixing bolt that passes through the second connection hole and is fastened to the second structural nut, thereby fixing the second channel to the side of the segmental vibration isolation table,
The second channel is,
One of a standardized "ㄷ" shaped channel, a channel bent into a "ㄷ" shape, and a channel where an "L" shaped second connection channel located on both sides is connected to the second connection plate by a second fixing member, Partial wet segmental vibration isolation panel joint structure. The method according to any one of claims 1 to 4,
It is provided to protrude from the side of the segmental vibration isolation table made of reinforced concrete, and further includes a shear key embedded in the filling part,
The shear key is
a third structural nut embedded in the segmental vibration isolation table so as to be exposed laterally;
a locking member attached to an end of the third structural nut, embedded in the segmental vibration isolation table, and hooked on the inside of the segmental vibration isolation unit to prevent the third structural nut from being separated from the outside;
a shear bolt fastened to the third structural nut and protruding outward from the segmental vibration isolation table; and
a support washer fixed to the shear bolt with a fixing nut and having a diameter or width larger than the diameter of the shear bolt;
Partially wet segmented vibration isolation zone joint structure including. The method according to any one of claims 1 to 4,
The segmental vibration isolation table,
It is made of a plate-shaped structure of reinforced concrete, and a shear pocket is formed by inserting an anchor part provided perpendicularly on a support supporting the lower side to be buried inward, and a chipping surface is formed on the side where the filling part is filled. Resected zone junctional structure.

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