KR20240043511A - Diaphragm-typed micro pump - Google Patents

Abstract

The diaphragm-type micro pump includes a base having an inlet and an outlet that are spaced apart from each other and provided to allow fluid to flow, and is disposed on the base and formed to correspond to the inlet and outlet, and moves the inlet and the outlet through a lifting movement. A check valve unit including a first opening and closing unit and a second opening and closing unit, respectively, for opening and closing the outlet, and a magnetorheological material disposed on the upper part of the check valve unit and having a size that changes by an externally applied magnetic field, are raised and lowered. It includes a diaphragm having a central portion forming an accommodating space within which a pressure difference occurs, and an outer portion surrounding the central portion and selectively fixed along the outer edge of the check valve unit.

Description

Diaphragm type micro pump {DIAPHRAGM-TYPED MICRO PUMP}

Embodiments of the present invention relate to a diaphragm type micropump. More specifically, embodiments of the present invention relate to a diaphragm-type micropump that can transport fluid using the up and down vibration of the diaphragm.

Micropumps that transport small amounts of fluid are used in new technologies related to small and thin devices such as continuous injection of drugs or bioactive substances such as insulin, trace analysis, printing devices, small fuel cells, cooling devices, and vacuum devices.

When the micro pump drives the diaphragm in a rotating or lifting motion, a pressure difference occurs in the internal space of the pump. Fluid can be transported by the pressure difference. Until now, diaphragm-type micro pumps have been used in a variety of sizes and shapes.

Generally, the diaphragm micro pump includes a diaphragm and a driving source that drives the diaphragm.

The diaphragm may include an elastic sheet such as flexible rubber or silicon rubber. As the diaphragm moves up or down, a pressure difference may occur in the accommodation space inside the bump.

Meanwhile, the drive source may include an actuator such as a dielectric elestomer actuator or a piezo actuator. However, these drive sources have problems such as excessively high power consumption or manufacturing costs or limited capacity.

Embodiments of the present invention provide a diaphragm-type micro pump with improved power consumption and capacity range.

A diaphragm-type micro pump according to an embodiment of the present invention includes a base having an inlet and an outlet that are spaced apart from each other and provided to allow fluid to flow, disposed on the base, and formed to correspond to the inlet and outlet, A check valve unit including a first opening and closing unit and a second opening and closing unit, respectively, which open and close the inlet and the outlet through a lifting movement, and a magnetic device disposed on an upper part of the check valve unit and having a size that changes by a magnetic field applied from the outside. It includes a diaphragm having a central portion that forms an accommodating space in which a pressure difference is generated inside by rising and falling as it has a rheological material, and an outer portion that surrounds the central portion and is selectively fixed along the outer edge of the check valve unit.

In one embodiment of the present invention, the diaphragm is disposed on the first check valve, is selectively fixed along the outer edge of the first check valve, and is made of an elastic material, and the diaphragm seat. It is fixed on the bed and may include a magnetorheological sheet made of the magnetorheological material.

In one embodiment of the present invention, each of the pair of first and second openings and closing units may have a leaf spring structure.

In one embodiment of the present invention, the first check valve includes a first through hole communicating between the second opening and closing part and the receiving space, and the second check valve includes the first opening and closing part and the inlet. It may include a second through hole that communicates between the two.

Here, the first opening and closing part is elastically connected to a first plate on which an inlet groove corresponding to the inlet is formed and a side wall of the inlet groove, and can open and close the second through hole according to a change in pressure in the receiving space. It may include a first opening and closing plate provided so as to be provided.

In addition, the second opening and closing part is elastically connected to a second plate on which a discharge groove corresponding to the discharge hole is formed and a side wall of the discharge groove, and can open and close the first through hole according to a change in pressure in the receiving space. It may include a second opening and closing plate provided so as to be provided.

In one embodiment of the present invention, a magnetic field generator disposed adjacent to the diaphragm and provided to generate a magnetic field in the diaphragm may be additionally provided.

In one embodiment of the present invention, the check valve part is vertically stacked on the base, and is formed to correspond to the inlet and outlet, and a first opening and closing part that opens and closes the inlet and the outlet, respectively, through a lifting movement, and It may include a pair of first and second check valves each including a second opening and closing portion.

In one embodiment of the present invention, a first inlet groove that can be opened and closed with respect to the inlet by the first opening and closing part is formed on one side of the upper surface of the base, and on the other side, it is spaced apart from each other and is always open with the outlet. A pair of first discharge grooves that communicate with each other may be formed.

Here, the check valve part is disposed at the lower part of the diaphragm, and a plurality of second inlet grooves that are spaced apart from each other and are always open are formed on one side of the lower surface, and are opened and closed by the second opening and closing part on the other side of the lower surface, and the second inlet groove is formed on one side of the lower surface. 1 A second discharge groove that can communicate with the discharge groove is interposed between the valve body and the base and the valve body, and is simultaneously raised and lowered to alternately open and close the first inlet groove and the second discharge groove. It may include a check valve having one opening and closing part and a second opening and closing part.

The diaphragm type micro pump of the present invention configured as described above has a magneto-rheological material whose size changes by a magnetic field applied from the outside, and a central portion that forms an accommodating space where a pressure difference occurs inside by rising and falling. It includes a diaphragm surrounding the center and having an outer portion selectively fixed along the outer edge of the check valve portion and a check valve portion. Accordingly, a diaphragm-type micro pump with improved power consumption and capacity range can be implemented.

1 is a cross-sectional view illustrating a diaphragm-type micro pump according to an embodiment of the present invention.
Figure 2 is an exploded perspective view of the micro pump of Figure 1.
Figure 3a is a plan view for explaining the first opening and closing part included in the first check valve of Figure 1.
Figure 3b is a plan view for explaining the second opening and closing part included in the second check valve of Figure 1.
FIGS. 4A to 4C are cross-sectional views for explaining the operation of the micro pump of FIG. 1.
Figure 5 is a cross-sectional view for explaining a diaphragm type micro pump according to an embodiment of the present invention.
Figure 6 is an exploded perspective view of the micro pump of Figure 5.
Figure 7 is a plan view for explaining the first and second openings and closing parts included in the check valve of Figure 5.
Figures 8a and 8b are cross-sectional views for explaining the operation of the micro pump of Figure 5.

The terms used in this specification and claims are general terms selected in consideration of their functions in various embodiments of the present invention. However, these terms may vary depending on the intention of technicians working in the field, legal or technical interpretation, and the emergence of new technologies. Additionally, some terms may be terms arbitrarily selected by the applicant. These terms may be interpreted as defined in this specification, and if there is no specific term definition, they may be interpreted based on the overall content of this specification and common technical knowledge in the relevant technical field.

In addition, the same reference numerals or symbols in each drawing attached to this specification indicate parts or components that perform substantially the same function. For convenience of explanation and understanding, different embodiments will be described using the same reference numbers or symbols. That is, even if all components having the same reference number are shown in multiple drawings, the multiple drawings do not represent one embodiment.

Additionally, in this specification and claims, terms including ordinal numbers such as 'first', 'second', etc. may be used to distinguish between components. These ordinal numbers are used to distinguish identical or similar components from each other, and the meaning of the term should not be interpreted limitedly due to the use of these ordinal numbers. For example, components combined with these ordinal numbers should not be interpreted as having a limited order of use or arrangement based on the number. If necessary, each ordinal number may be used interchangeably.

In this specification, singular expressions include plural expressions, unless the context clearly dictates otherwise. In the present application, terms such as 'comprise' or 'constitute' are intended to designate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are intended to indicate the presence of one or more other It should be understood that this does not exclude in advance the possibility of the presence or addition of features, numbers, steps, operations, components, parts, or combinations thereof.

Additionally, in an embodiment of the present invention, when a part is connected to another part, this includes not only direct connection but also indirect connection through other media. Additionally, the fact that a part includes a certain component does not mean that other components are excluded, but that it may further include other components, unless specifically stated to the contrary.

1 is a cross-sectional view illustrating a diaphragm-type micro pump according to the present invention. Figure 2 is an exploded perspective view of the micro pump of Figure 1. Figure 3a is a plan view for explaining the first opening and closing part included in the first check valve of Figure 1. Figure 3b is a plan view for explaining the second opening and closing part included in the second check valve of Figure 1.

Referring to FIGS. 1 to 3B, the diaphragm type micro pump 100 according to the present invention includes a base 105, a first check valve 110, a second check valve 120, and a diaphragm 150. Includes. In particular, the micro pump 100 includes a diaphragm 150 made of a magnetorheological material whose size can be changed by an applied magnetic field. When the diaphragm 150 rises, an accommodation space 155 is formed between the lower surface of the diaphragm 150 and the upper surface of the first check valve 110. At this time, a pressure difference occurs inside the receiving space 155. Accordingly, fluid may flow into the receiving space 155 or fluid may be discharged from the receiving space 155 . At this time, examples of the fluid may include gas or liquid.

An inlet 101 and an outlet 106 are formed in the base 105 to allow the fluid to flow. The inlet 101 and the outlet 106 may be formed to be spaced apart from each other. The base 105 may be made of a metal material or an elastic material.

The first check valve 110 and the second check valve 120 may be vertically stacked on the base 105 sequentially from top to bottom.

The first check valve 110 is disposed at the top of the base 105. The first check valve 110 is provided to open and close the inlet 101.

The first check valve 110 is formed at a position corresponding to the inlet 101 and includes a first opening/closing part 115 that opens and closes the inlet through a lifting movement. That is, when the first opening/closing part 115 rises, the inlet 101 opens, and fluid can flow into the receiving space 155 formed above. On the other hand, when the first opening/closing part 115 descends and returns to the initial position, the inlet 101 is closed and fluid cannot flow from the inlet 101 into the receiving space 155. At this time, the first opening/closing unit 115 can be raised and lowered using the pressure difference between the receiving holes 115 as a driving force.

The second check valve 120 is disposed on the upper part of the base 105. For example, the second check valve 120 may be disposed between the base 105 and the first check valve 110. The second check valve 120 is provided to open and close the outlet 106.

The second check valve 120 is formed at a position corresponding to the outlet 106 and includes a second opening/closing part 125 that opens and closes the outlet 106 through a lifting movement. That is, when the second opening/closing part 125 descends, the discharge port 106 opens, and fluid can be discharged from the receiving space 155 formed above. On the other hand, when the second opening/closing part 125 rises and returns to its initial position, the outlet 106 is closed. With the outlet 106 closed, fluid may be received from the inlet 101 into the receiving space. At this time, the second opening/closing unit 125 can be raised and lowered using the pressure difference in the accommodation space 155 as a driving force.

The diaphragm 150 is disposed on the first check valve 110. The diaphragm 150 includes a central portion 151 and an outer portion 152 surrounding the central portion 151.

The central portion 151 has a magnetorheological material whose size changes depending on the magnetic field applied from the outside, and rises and falls to form an accommodation space 155 in which a pressure difference is generated inside.

That is, when a magnetic field is applied from the outside, the magnetorheological material is magnetized and aligned in one direction. Accordingly, the diaphragm 150 made of the magnetorheological material can have a variable size. For example, when the magnetorheological material is aligned in the vertical direction by a magnetic field applied from the outside, the central portion 151 of the magnetorheological material may have an increasing thickness.

Meanwhile, the outer portion 152 surrounds the central portion 151 and is selectively fixed along the outer edge of the first check valve 110. That is, the outer portion 152 is fixed to the outer upper surface of the first check valve 110, and thus the outer portion 152 functions as an anchor.

When the magnetorheological material is aligned along the vertical direction by a magnetic field applied from the outside, the central portion 151 of the magnetorheological material has an increasing thickness, while the outer portion 152 is the first check valve. It is fixed as an anchor on the outer upper surface of (110).

In this case, the center 151 changes from an initial flat shape to a convex dome shape, and the center 151 is spaced apart from the upper surface of the first check valve 110 to form an accommodation space 155. That is, the lower surface of the diaphragm 150, particularly the lower surface of the center 151, and the upper surface of the first check valve 110 define an accommodation space.

At this time, as the pressure inside the receiving space 155 decreases, the first opening and closing portion 115 of the first check valve 110 rises, thereby opening the inlet 101. Accordingly, fluid may flow into the receiving space 155 through the inlet 101.

On the other hand, when the magnetic field is released from the outside, the magnetorheological material is randomly distributed, and the central portion 151 of the magnetorheological material descends and recovers to its initial thickness, thereby taking on a flat shape. Accordingly, the volume of the accommodation space 155 gradually decreases.

At this time, the first opening/closing part 115 descends and returns to its initial flat shape to close the inlet 101. Meanwhile, as the volume of the accommodation space 155 decreases, the second opening and closing part 125 also descends, and the second opening and closing part 125 opens the outlet 106. Accordingly, fluid can be discharged from the receiving space 155 through the outlet 106.

In one embodiment of the present invention, the diaphragm 150 includes a diaphragm sheet 156 and a magnetorheological sheet 157.

The diaphragm seat 156 is disposed on the first check valve 110. The diaphragm seat 156 is selectively fixed along the outer edge of the first check valve 110. Accordingly, the outer portion of the diaphragm 150 may be fixed to the outer portion of the first check valve 110. The diaphragm sheet 156 is made of an elastic material. For example, the diaphragm sheet 156 may be made of rubber or silicone.

The magnetorheological sheet 157 is fixed on the diaphragm sheet 151. The magnetorheological sheet 157 is made of the magnetorheological material. Accordingly, when a magnetic field is applied adjacent to the magnetorheological sheet 157, the magnetorheological material forming the magnetorheological sheet 157 may have a size that changes as it is aligned.

The magnetorheological material may include a mixture containing silicone rubber, carbonyl iron particles, resin, etc. At this time, the carbonyl iron particles may have 10 to 40 wt%, the silicone rubber may have 45 to 80 wt%, and the remaining curing agent and remaining curing agent content may be present.

At this time, the carbonyl iron particles are composed of an iron component of 95% or more and may have a diameter of several to tens of microns.

In one embodiment of the present invention, each of the pair of first and second openings and closing units 115 and 125 may have a leaf spring structure.

More specifically, the first check valve 110 includes a first through hole 111 that communicates between the second opening and closing portion 125 and the receiving space 155. Meanwhile, the second check valve 120 may include a second through hole 121 communicating between the first opening and closing part 115 and the inlet 101.

Referring to FIG. 3A, the first opening/closing unit 115 may include a first plate 115b and a first opening/closing plate 115c.

An inlet groove 115a corresponding to the inlet 101 is formed in the first plate 115b. At this time, the inlet groove 115a may be formed at the same location as the inlet 101.

The first opening and closing plate 115c is elastically connected to the side wall of the inflow groove 115a. The first opening and closing plate 115c is provided to open and close the second through hole 121 according to a change in pressure in the receiving space 155.

For example, the first opening and closing plate 115c may have the same diameter as the second through hole 121. A first connection plate 115d may be provided to connect the first opening and closing plate 115c with the side wall of the inflow groove 115a. The first connection plate 115d may extend in a radial direction from the center of the first opening and closing plate 115c. The first connection plate 115d may have a meandering shape. Accordingly, the first opening and closing plate 115c can be raised and lowered by the pressure difference in the accommodation space.

Referring to FIG. 3B, the second opening/closing unit 125 may include a second plate 125b and a second opening/closing plate.

A discharge groove 125a corresponding to the discharge port 106 is formed in the second plate 125b.

The second opening and closing plate 125c is elastically connected to the side wall of the discharge groove 125a. The second opening and closing plate 125c is provided to open and close the first through hole 111 according to a change in pressure in the receiving space 155.

For example, the second opening and closing plate 125c may have the same diameter as the first through hole 111. A second connection plate 125d may be provided to connect the second opening and closing plate 125c with the side wall of the discharge groove 125a. The second connection plate 125d may extend in a radial direction from the center of the second opening and closing plate 12c. The second connection plate 125d may have a meandering shape. Accordingly, the second opening and closing plate 125d can be raised and lowered by the pressure difference in the accommodation space 155.

In one embodiment of the present invention, a magnetic field generator 160 disposed adjacent to the diaphragm 150 and provided to generate a magnetic field in the diaphragm 150 may be additionally provided.

The magnetic field generator 160 may include a core, a coil surrounding the core, and a power source connected to both ends of the coil. Accordingly, the magnetic field generator 160 can adjust the lifting height and lifting cycle of the diaphragm 150 by controlling the intensity of the power and the on/off of the power. That is, the magnetic field generator 160 may include an electromagnet.

FIGS. 4A to 4C are cross-sectional views for explaining the operation of the micro pump of FIG. 1.

Referring to FIGS. 4A to 4C , when the magnetic field generator (not shown) generates a magnetic field, the magnetorheological material included in the diaphragm 150 is aligned along the vertical direction. In this case, the central portion 151 forming the magnetorheological material has an increasing thickness, while the outer portion 152 is fixed to the outer upper surface of the first check valve 110 as an anchor.

Accordingly, as the center 151 changes from an initial flat shape to a convex dome shape, the center 151 is spaced apart from the upper surface of the first check valve 110, thereby forming an accommodation space. That is, the lower surface of the diaphragm 150, particularly the lower surface of the center 151, and the upper surface of the first check valve 110 define an accommodation space.

At this time, as the pressure inside the receiving space 155 decreases, the first opening/closing part 115 of the first check valve 110 rises, thereby opening the inlet 101. Accordingly, fluid may flow into the receiving space 155 through the inlet 101.

On the other hand, when the magnetic field is released from the outside, the magnetorheological material is randomly distributed, so that the center 151 of the magnetorheological material recovers to its initial thickness and has a flat shape, while the receiving space 155 The volume of decreases.

At this time, the first opening/closing part 115 descends and returns to its initial flat shape, thereby closing the inlet 101. Meanwhile, as the volume of the accommodation space decreases, the second opening and closing part 125 also descends, and the second opening and closing part 125 opens the outlet 106. Accordingly, fluid can be discharged from the receiving space 155 through the outlet 106.

Figure 5 is a cross-sectional view for explaining a diaphragm type micro pump according to an embodiment of the present invention. Figure 6 is an exploded perspective view of the micro pump of Figure 5. Figure 7 is a plan view for explaining the first and second openings and closing parts included in the check valve of Figure 5.

Referring to FIGS. 5 to 7, the diaphragm-type micro pump according to an embodiment of the present invention includes a check valve portion consisting of a base 205, a check valve 210, and a valve body 220, and a diaphragm ( 250).

An inlet 201 and an outlet 206 are formed in the base 205 to allow the fluid to flow. The inlet 201 and the outlet 206 may be formed to be spaced apart from each other. The base 205 may be made of a metal material or an elastic material.

On one side of the upper surface of the base 205, one first inlet groove is formed in communication with the inlet 201, and on the other side, a pair of first discharge grooves are formed in communication with the outlet 206 and are spaced apart from each other and are always open. is formed

Check valve 210 is disposed on top of the base 205. The check valve 210 is provided to alternately open and close the inlet 201 and the outlet 206.

The check valve 210 includes a first opening and closing part 211 and a second opening and closing part 216.

The first opening/closing part 211 is formed at a position corresponding to the inlet 201, and can open and close the inlet 201 through the first inlet groove through a lifting movement. That is, when the first opening and closing part 211 rises, the first inlet groove and the inlet 201 are opened, and fluid can flow into the receiving space formed above. On the other hand, when the first opening/closing part 211 descends and returns to the initial position, the first inlet groove is closed and fluid cannot flow from the inlet 201 into the receiving space. At this time, the first opening and closing part 211 can be raised and lowered using the pressure difference in the accommodation space as a driving force.

Meanwhile, the second opening/closing part 216 is formed at a position corresponding to the outlet 206, and can open and close the outlet 206 through a lifting movement. At this time, the first and second openings and closing units 211 and 216 may be raised and lowered simultaneously.

The valve body 220 is interposed between the diaphragm 250 and the check valve 210. On one side of the lower surface of the valve body 220, a pair of second inlet grooves 223 are formed that are spaced apart from each other, are always open, and can communicate with the inlet 201. Meanwhile, a second discharge groove 225 that can be opened and closed by the second opening and closing portion 216 is formed on the other side of the lower surface of the valve body 220. At this time, the second inlet grooves 223 are provided to face the first inlet groove, while the second outlet groove 225 is provided to face the first outlet holes.

Accordingly, when the second opening/closing part 206 descends, the second discharge groove 225 opens, and fluid can be discharged to the outside through the discharge port 206 from the receiving space formed in the upper portion. On the other hand, when the second opening/closing part 206 rises and returns to its initial position, the second discharge groove 225 is closed. When the second discharge groove 225 is closed, fluid can be received into the receiving space from the inlet 201.

Diaphragm 250 is disposed on valve body 120. The diaphragm may have a sheet shape. The diaphragm is made of magnetorheological material. At this time, the magnetorheological material may include silicone rubber, carbonyl iron particles, resin, etc.

In one embodiment of the present invention, a magnetic field generator 260 disposed adjacent to the diaphragm 250 and provided to generate a magnetic field in the diaphragm 250 may be additionally provided.

The magnetic field generator 260 may include a core, a coil surrounding the core, and a power source connected to both ends of the coil. Accordingly, the magnetic field generator 260 can adjust the lifting height and lifting cycle of the diaphragm 250 by controlling the intensity of the power and the on/off of the power. That is, the magnetic field generator 260 may include an electromagnet.

Figures 8a and 8b are cross-sectional views for explaining the operation of the micro pump of Figure 5.

Referring to FIGS. 8A to 8C , when the magnetic field generator 260 generates a magnetic field, the magnetorheological material included in the diaphragm 250 is aligned along the vertical direction. In this case, the central part of the magnetorheological material has an increasing thickness, while the outer part surrounding the central part is fixed as an anchor between the outer edge of the check body 220 and the outer edge of the magnetic field generator 260.

Accordingly, as the central portion changes from an initial flat shape to a convex dome shape, the central portion is spaced apart from the upper surface of the valve body 220, thereby forming an accommodation space. That is, the lower surface of the diaphragm 250, especially the central lower surface, and the upper surface of the valve body 210 define an accommodation space.

At this time, when the diaphragm 250 becomes convex into a dome shape, as the pressure inside the receiving space decreases, the first opening and closing part 211 rises, thereby opening the first inflow groove formed on the upper surface of the base 205. The inlet 201 is opened through. Accordingly, fluid may flow into the receiving space through the inlet 201. At this time, the second opening/closing part 216 also rises, thereby closing the second discharge groove 225.

On the other hand, when the magnetic field is released from the outside, the magnetorheological material is randomly distributed, so that the center of the magnetorheological material recovers to its initial thickness and has a flat shape, while the volume of the accommodation space is reduced. .

At this time, as the first opening and closing part 211 descends and returns to its initial flat shape, the first inlet groove formed on the upper surface of the base 205 and the inlet 201 are closed. Meanwhile, as the volume of the accommodation space decreases, the second opening and closing part 216 also descends, and the second opening and closing part 216 opens the discharge groove 225 formed on the lower surface of the valve block 220. Accordingly, fluid can be discharged from the receiving space through the discharge groove 225 and the discharge port 206.

The above-described diaphragm-type micropump is used in industrial fields requiring pumping of fluids such as gases or liquids, such as agricultural, medical, construction, fishery, water resource development, etc., as well as semiconductor, display, medical or It can be applied to new market sectors such as MEMS devices.

Although the present invention has been described above with reference to preferred embodiments, those skilled in the art may make various modifications and changes to the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. You will be able to understand that it exists.

100, 200: Micro pump 105, 205: Base
110, 210: first check valve 115, 211: first opening and closing part
120: second check valve 125, 216: second opening and closing part
150, 250: Diaphragm 151: Center
152: Outer part 155: Accommodating space
156: Diaphragm sheet 157: Magnetorheological sheet

Claims (10)

A base formed with an inlet and an outlet that are spaced apart from each other and are provided to allow fluid to flow;
a check valve unit disposed on the base, formed to correspond to the inlet and outlet, and including a first opening and closing part and a second opening and closing part, respectively, to open and close the inlet and the outlet through a lifting movement; and
A central portion disposed at the top of the check valve unit and forming an accommodating space in which a pressure difference is generated inside by rising and falling as it has a magnetorheological material whose size changes by a magnetic field applied from the outside, and a check valve surrounding the central portion, A diaphragm having an outer portion selectively fixed along the outer edge of the portion;
A diaphragm-type micro pump containing a. The method of claim 1, wherein the diaphragm is:
a diaphragm seat disposed on the first check valve, selectively fixed along an outer edge of the first check valve, and made of an elastic material; and
A diaphragm-type micro pump fixed on the diaphragm sheet and comprising a magnetorheological sheet made of the magnetorheological material. The diaphragm type micro pump according to claim 1, wherein each of the pair of first and second openings and closing units has a leaf spring structure. The method of claim 1, wherein the first check valve includes a first through hole communicating between the second opening and closing portion and the receiving space,
The second check valve is a diaphragm type micro pump, characterized in that it includes a second through hole communicating between the first opening and closing part and the inlet. The method of claim 4, wherein the first opening and closing unit,
a first plate having an inlet groove corresponding to the inlet; and
A diaphragm-type micro pump comprising a first opening and closing plate elastically connected to a side wall of the inlet groove and configured to open and close the second through hole according to a change in pressure in the receiving space. The method of claim 4, wherein the second opening and closing unit,
a second plate having a discharge groove corresponding to the discharge port; and
A diaphragm-type micro pump comprising a second opening and closing plate that is elastically connected to a side wall of the discharge groove and is provided to open and close the first through hole according to a change in pressure in the receiving space. The diaphragm-type micro pump according to claim 1, further comprising a magnetic field generator disposed adjacent to the diaphragm and provided to generate a magnetic field in the diaphragm. The method of claim 1, wherein the check valve part is vertically stacked on the base, is formed to correspond to the inlet and the outlet, and includes a first opening and closing part and a second opening and closing part that open and close the inlet and the outlet, respectively, through a lifting movement. A diaphragm-type micro pump comprising a pair of first and second check valves each including a. The method of claim 1, wherein on one side of the upper surface of the base, a first inlet groove is formed that can be opened and closed with respect to the inlet by the first opening and closing part, and on the other side, a first inlet groove is formed that is spaced apart from each other and communicates with the outlet in a always open state. A diaphragm-type micro pump, characterized in that a pair of first discharge grooves are formed. The method of claim 9, wherein the check valve unit,
It is disposed at the lower part of the diaphragm, and a plurality of second inflow grooves are formed on one side of the lower surface and are spaced apart from each other and are always open, and on the other side of the lower surface, they are opened and closed by the second opening and closing part, and may be in communication with the first discharge groove. a valve body having a second discharge groove; and.
a check valve interposed between the base and the valve body and having a first opening and closing portion and a second opening and closing portion to alternately open and close the first inlet groove and the second discharge groove by simultaneously lifting and lowering;
A diaphragm-type micro pump comprising a.