KR20240031829A - Droplet actuator and method for manipulating droplet thereof - Google Patents

Abstract

A droplet actuator and method of manipulating a droplet thereof are provided. A droplet actuator according to an embodiment of the present invention includes a first substrate including a plurality of electrodes for handling droplets, and a second substrate including a plurality of other electrodes distinct from the plurality of electrodes, The first substrate and the second substrate are spaced apart from each other to define a space for the liquid droplet to move between the first substrate and the second substrate, and the plurality of electrodes include a first electrode and a third electrode, The first electrode and the third electrode are spaced apart from each other with a first gap therebetween, the plurality of other electrodes include a second electrode, and the second electrode is located at a position facing the first gap. positioned, wherein the droplet is moved to a first location on the first electrode, a second location on the second electrode, and a third electrode in response to applying an actuation signal to the plurality of electrodes or to the plurality of other electrodes. It can be moved sequentially to a third position.

Description

Droplet actuator and its droplet manipulation method {DROPLET ACTUATOR AND METHOD FOR MANIPULATING DROPLET THEREOF}

The present invention relates to a droplet actuator and its droplet manipulation method using electrowetting. More specifically, it relates to a droplet actuator that can move, split, or merge droplets by applying an electrowetting signal to an electrode provided in the droplet actuator and a method of manipulating droplets thereof.

Electrowetting refers to a phenomenon in which the surface tension of a fluid changes due to an electric field applied to the fluid. For example, in a fluid whose surface tension has changed by electrowetting, the contact angle between the solid and liquid due to the potential difference may vary depending on the applied electric signal. For another example, a fluid whose surface tension has been changed by electrowetting may move on an electrode according to an applied electrical signal.

Attempts to utilize electrowetting are continuing in various technological fields. For example, attempts are continuing to use electrowetting to control the thickness of camera lenses or to commercialize electronic paper.

US Patent No. 9,638,662 (published on November 26, 2015)

The technical problem to be solved through some embodiments of the present invention is to provide a droplet actuator having a vertical electrode structure in which electrowetting electrodes are provided on an upper substrate and a lower substrate, respectively, and a method for manipulating a droplet thereof.

Another technical problem to be solved through some embodiments of the present invention is a droplet actuator and a method for manipulating droplets thereof that allow smooth movement of droplets between electrodes even if the substrate surface is not processed very smoothly or the gap between adjacent electrodes is not close. is to provide.

Another technical problem to be solved through some embodiments of the present invention is to provide a droplet actuator and a method of manipulating a droplet thereof that can reduce production costs by simplifying the production process for substrate processing.

The technical problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned can be clearly understood by those skilled in the art from the description below.

In order to solve the above technical problem, a droplet actuator according to an embodiment of the present invention includes a first substrate including a plurality of electrodes for handling droplets, and a second substrate including a plurality of other electrodes distinct from the plurality of electrodes. It includes a substrate, the first substrate and the second substrate are spaced apart from each other to define a space for the liquid droplet to move between the first substrate and the second substrate, and the plurality of electrodes include the first electrode and the second substrate. It includes three electrodes, the first electrode and the third electrode are spaced apart from each other with a first gap therebetween, and the plurality of other electrodes include a second electrode, and the second electrode is the first electrode. 1 disposed at a position facing the gap, wherein the droplet moves to a first position on the first electrode and a second position on the second electrode in response to applying an actuation signal to the plurality of electrodes or the plurality of different electrodes. , and may sequentially move to a third position on the third electrode.

In one embodiment, the first electrode and the third electrode may be electrodes adjacent to each other among the plurality of electrodes.

In one embodiment, the second electrode may overlap at least a portion of the first gap when viewed from above the second substrate.

In one embodiment, when viewed from above the second substrate, the second electrode may overlap at least a portion of the first electrode and at least a portion of the third electrode, respectively.

In one embodiment, the device may further include a switch circuit for selectively connecting the first electrode, the second electrode, or the third electrode to a signal line through which the operation signal is provided.

In one embodiment, the first electrode, the second electrode, and the third electrode are sequentially connected to the signal line by operation of the switch circuit, and the first electrode, the second electrode, and the While one of the third electrodes is connected to the signal line, a reference potential may be applied to the remaining electrodes.

In one embodiment, the plurality of other electrodes further include a fourth electrode, the second electrode and the fourth electrode are spaced apart from each other with a second gap therebetween, and the third electrode is spaced between the second gap. disposed in opposing positions, wherein at least a portion of the second gap, at least a portion of the second electrode, and at least a portion of the fourth electrode each overlap on the third electrode when viewed from above the second substrate. You can.

In one embodiment, the plurality of electrodes further include a fifth electrode and a sixth electrode, and the third electrode, the fifth electrode, and the sixth electrode are spaced apart from each other with a gap therebetween, and the third electrode 2 When viewed from above the substrate, the fourth electrode may at least partially overlap the third electrode, the fifth electrode, and the sixth electrode, respectively.

In one embodiment, the droplet moves from a third position on the third electrode to a fourth position on the fourth electrode in response to applying an actuation signal to the plurality of electrodes or the plurality of other electrodes, and then: (i) moved to a fifth position on the fifth electrode, (ii) moved to a sixth position on the sixth electrode, or (iii) split or spread (splitted or spread) into the fifth position and the sixth position. It can be spread.

In one embodiment, the first electrode may be a reservoir electrode, and the third electrode may be an electrode for dispensing the droplets from the reservoir to the fluid channel.

1 is an exemplary diagram of a droplet actuator according to one embodiment of the present invention.
FIG. 2 is an exemplary view of the upper part of the electrode plate described with reference to FIG. 1 .
FIG. 3 is an exemplary view of the lower part of the electrode plate described with reference to FIG. 1 .
FIG. 4 is an exemplary cross-sectional view of the electrode plate described with reference to FIG. 1 .
FIG. 5 is an exemplary diagram for explaining the housing and electrode plate described with reference to FIG. 1 in more detail.
FIG. 6 is an exemplary diagram for explaining in more detail the structure of the electrode described with reference to FIGS. 2 to 4.
FIG. 7 is an exemplary diagram for explaining in more detail the structure of the base plate described with reference to FIGS. 2 to 4 .
FIG. 8 is another exemplary view of the upper part of the electrode plate described with reference to FIG. 1 .
Figure 9 is a diagram illustrating a reservoir structure according to an embodiment of the present invention.
Figures 10 to 12 are drawings to explain in more detail the reservoir structure shown in Figure 9.
Figure 13 is a diagram showing an electrode structure that facilitates optical observation of droplets according to an embodiment of the present invention.
Figures 14 to 18 are diagrams to explain in more detail the electrode structure shown in Figure 13.
Figure 19 is an exploded perspective view showing an exemplary form of a droplet actuator with a parallel electrode structure, according to an embodiment of the present invention.
FIG. 20 is a cross-sectional view for explaining the detailed structure of the droplet actuator shown in FIG. 19 and the electrowetting operation thereof.
Figure 21 is an exploded perspective view showing an exemplary form of a droplet actuator with a temperature control unit, according to an embodiment of the present invention.
FIG. 22 is a cross-sectional view for explaining the detailed structure of the droplet actuator shown in FIG. 21 and the temperature control method thereof.
Figures 23 to 25 are diagrams for explaining a liquid droplet actuator with a cleaning function using magnetic force and a cleaning method using the same.
Figure 26 is a diagram illustrating the configuration of a signal reader that reads the results of testing a sample of the droplet actuator.
FIG. 27 is a diagram showing an exemplary configuration of the optical unit of FIG. 26.
FIGS. 28 to 31 are drawings to further explain the configuration and function of the main board of FIG. 26.
Figure 32 is a diagram showing a new layered structure of a droplet actuator as another embodiment of the present invention.
Figure 33 is a diagram showing a droplet actuator with a vertical electrode structure according to an embodiment of the present invention.
FIG. 34 is a diagram showing a side view and a top view of the droplet actuator described in FIG. 33.
FIG. 35 is a diagram showing a switch circuit of the droplet actuator described in FIG. 33.
Figures 36 and 37 are diagrams for explaining the operation of the electrowetting electrode and the movement of droplets according to the operation of the switch circuit of Figure 35.
Figures 38 and 39 illustrate example electrowetting electrode arrangements of the droplet actuator described in Figure 33.
FIG. 40 is a diagram illustrating an exemplary stacked structure of the droplet actuator described in FIG. 33.

Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. The advantages and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the accompanying drawings. However, the technical idea of the present invention is not limited to the following embodiments and may be implemented in various different forms. The following examples are merely intended to complete the technical idea of the present invention and to be used in the technical field to which the present invention pertains. It is provided to fully inform those skilled in the art of the scope of the present invention, and the technical idea of the present invention is only defined by the scope of the claims.

When adding reference numerals to components in each drawing, it should be noted that the same components are given the same reference numerals as much as possible even if they are shown in different drawings. Additionally, in describing the present invention, if it is determined that a detailed description of a related known configuration or function may obscure the gist of the present invention, the detailed description will be omitted.

Unless otherwise defined, all terms (including technical and scientific terms) used in this specification may be used with meanings that can be commonly understood by those skilled in the art to which the present invention pertains. Additionally, terms defined in commonly used dictionaries are not interpreted ideally or excessively unless clearly specifically defined. The terminology used herein is for describing embodiments and is not intended to limit the invention. As used herein, singular forms also include plural forms, unless specifically stated otherwise in the context.

Additionally, when describing the components of the present invention, terms such as first, second, A, B, (a), and (b) may be used. These terms are only used to distinguish the component from other components, and the nature, sequence, or order of the component is not limited by the term. When a component is described as being “connected,” “coupled,” or “connected” to another component, that component may be directly connected or connected to that other component, but there is another component between each component. It will be understood that elements may be “connected,” “combined,” or “connected.”

As used in the specification, “comprises” and/or “comprising” refers to the presence of one or more other components, steps, operations and/or elements. or does not rule out addition.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the attached drawings.

1 is an exemplary diagram of a droplet actuator according to an embodiment of the present invention. Figure 1 shows a droplet actuator including an electrode plate 10, a housing 20, and a substrate 30. However, Figure 1 only shows a preferred embodiment for achieving the purpose of the present invention and can be adjusted as necessary. Some components may be added or deleted.

For example, a reader (not shown) implemented as a computing device may be further provided, and at this time, the reader may generate and control an electrowetting signal (i.e., electrical signal) to guide the fluid accommodated in the housing to the target electrode. You can. In addition, it should be noted that the components of the exemplary droplet actuator shown in FIG. 1 represent functionally distinct functional elements, and a plurality of components may be implemented in an integrated form in an actual physical environment. Hereinafter, the components of the exemplary droplet actuator shown in FIG. 1 will be described in more detail.

Housing 20 can accommodate fluid. At this time, the housing 20 may include a fluid receiving portion for receiving fluid. For example, in order to perform polymerase chain reaction (PCR), a sample containing DNA may be accommodated in the fluid receiving portion of the housing 20. The scope of the present invention is not limited to this example.

In some embodiments, the structure of the housing 20 may further include components other than the fluid receiving portion depending on the application for which the droplet actuator is used. That is, the housing 20 may be configured to accommodate fluid and provide additional functions in addition to forming the appearance of the droplet actuator, and it should be noted that any known technology of the droplet actuator may be referenced.

Next, the electrode plate 10 can induce polarization in the droplets distributed from the fluid contained in the housing 20 through an electrowetting signal to move them to the location of the target electrode. At this time, the electrode plate 10 may include at least one electrode for conducting an electrowetting signal.

In some embodiments, the electrode plate 10 may include a base plate and at least one electrode formed through the base plate. Here, the base plate may be made of an insulator. According to this embodiment, electrowetting can be used to change the surface tension between the electrode and the droplet along the electrode formed by penetrating the electrically insulated base plate. Droplets can move between adjacent electrodes by using changes in the contact angle between the electrode and the droplet due to this change in surface tension. The structure of the electrode formed on the electrode plate 10 will be specified later through description in the specification.

Next, the substrate 30 can transmit an electrowetting signal to the electrode plate 10. For example, the substrate 30 may be any one of a glass substrate, a silicon substrate, a printed circuit board (PCB), and a thin film transistor (TFT). However, the scope of the present invention is not limited to these examples, and any known technology having a structure capable of transmitting an electrowetting signal transmitted by a reader (not shown) to the electrode plate 10 can be applied to the present invention. there is.

In some embodiments, a reader (not shown) implemented as a computing device may be included in the droplet actuator, but in an environment where the droplet actuator is manufactured for one-time use and multiple droplet actuators are connected to the reader with a connector and used one time, Not including a reader as in 1 can reduce the manufacturing cost of the droplet actuator.

According to the exemplary droplet actuator according to an embodiment of the present invention described so far with reference to FIG. 1, it is possible to distribute droplets from a fluid contained in the housing 20 and move the droplets to the location of the target electrode.

The droplet actuator described above can be used as a diagnostic device. For example, using the droplet actuator, cells can be extracted from sample samples such as animal blood, urine, feces, saliva, nasopharyngeal smear, nasal cavity, oropharyngeal smear, cerebrospinal fluid, skin tissue, hair, other body cells, body tissue, and semen. , vesicles, proteins and nucleic acids can be automatically extracted and purified, gene amplification, detoxification, synthesis and diagnosis can be performed, immunodiagnosis using antigen-antibody reactions can be performed, and compounds can be synthesized and manufactured. . Furthermore, heavy metals, substances hazardous to humans, and drugs can also be tested. It should be noted that the technical fields in which the above-described droplet actuator can be used are merely illustrative, and that the above-described droplet actuator can be used in various other technical fields.

Hereinafter, with reference to FIGS. 2 to 4 , the structure of the electrode plate 10 will be described in more detail. FIG. 2 is an exemplary view of the upper part of the electrode plate 10 illustrated with reference to FIG. 1 , FIG. 3 is an exemplary diagram of the lower part of the electrode plate 10 illustrated with reference to FIG. 1 , and FIG. 4 is an exemplary diagram of the upper part of the electrode plate 10 illustrated with reference to FIG. 1 This is an exemplary cross-sectional view of the electrode plate 10 described with reference.

FIG. 2 shows the structure of the top 11 of an exemplary electrode formed on the electrode plate 10. The upper part 11 of the electrode shown in FIG. 2 is formed in a square shape, but it should be noted that this is only an example and the structure of the upper part 11 of the electrode may vary.

FIG. 3 shows the structure of the lower part 12 of an exemplary electrode formed on the lower part of the electrode plate 10. The lower part 12 of the electrode shown in FIG. 3 is formed in a circle, but it should be noted that this is only an example and the structure of the lower part 12 of the electrode may vary.

Figure 4 shows the side structure of an exemplary electrode. Referring to FIG. 4, it can be understood that the electrode 13 may be formed penetrating the base plate. Regarding the electrode, in some embodiments, the electrode may be formed by injection molding, 3D printing, screen printing, laser patterning, or dispensing of a conductive polymer. The conductive polymer may include conductive plastic. According to this embodiment, the electrode of the droplet actuator can be manufactured through a simplified process without complex processes similar to semiconductor processes including photo processes and metal deposition processes.

Regarding the electrode, in some other embodiments, the conductive polymer that makes up the electrode may include a compound of polymer and metal. At this time, the polymer may include siloxane, epoxy, resin, ABS, PLA, TPU, HIPS, etc. Additionally, the metal may include gold (Au), silver (Ag), copper (Cu), or other conductive metal materials. At this time, the conductive polymer may include at least one of the metal and conductive materials such as carbon nanotubes (CNTs), carbon fibers, graphite, or graphene.

With regard to electrodes, in some other embodiments, the conductive plastics that make up the electrodes include polycarbonate (PC), poly methyl methacrylate (PMMA), cyclic olefin polymer (COP), cyclic olefin copolymer (COC), polyethylene terephthalate (PET), May contain mixtures of PI (Polyimide), PE (Polyethylene), Acrylic, ABS (Acrylonitrile butadiene styrene), PVDF (Polyvinylidene fluoride), PTFE (Polytetrafluoroethylene), PS (Polystyrene), PP (Polypropylene), and PVC (Polyvinyl chrloride). You can. At this time, the mixture may include at least one of the conductive materials such as carbon nanotubes, graphene, carbon fiber, gold, silver, and copper along with the polymers. In addition, it should be noted that all known mixtures for conducting electrical signals can be applied in the present invention to produce electrodes.

Regarding the base plate, in some embodiments, the insulator constituting the base plate may be polycarbonate (PC), poly methyl methacrylate (PMMA), cyclic olefin polymer (COP), cyclic olefin copolymer (COC), polyethylene terephthalate (PET), Contains at least one of PI (Polyimide), PE (Polyethylene), Acrylic, ABS (Acrylonitrile butadiene styrene), PVDF (Polyvinylidene fluoride), PTFE (Polytetrafluoroethylene), PS (Polystyrene), PP (Polypropylene), and PVC (Polyvinyl chrloride) This can be done. In addition, it should be noted that all known configurations, including thermoplastic resins for insulating electrical signals, can be applied to the present invention for producing an insulator.

Regarding the electrode and the base plate, in some embodiments, the base plate may be first formed first, and then secondarily formed by injecting a conductive polymer into the space of the base plate through an injection gate (or nozzle).

At this time, as an example, the base plate may be formed by injecting an insulator into a space of a mold to form an injection gate that is different from the injection gate.

Or, as another example, the base plate may be formed by press injection or flat drilling of an insulator.

Or, as another example, the base plate may be formed by 3D printing using siloxane, resin, ABS, PLA, TPU, Nylon, PETG, ASA, PEI, HIPS, etc.

Regarding the electrode and base plate, in some embodiments, the electrode and base plate may be formed by Double Shot Injection Molding. More specifically, the base plate is formed by injecting an insulator into the first space of the first injection gate (or nozzle), and the electrode is formed by injecting an insulator into the first space of the first injection gate (or nozzle). ) may be formed by injecting a conductive polymer into the second mold or the second space of the first mold. Here, the first injection gate and the second injection gate may be components included in an injector having two or more injection gates, but the scope of the present invention is not limited thereto and may be formed by different injection gates having a single injection gate. It may be a component included with the injector. According to this embodiment, electrodes and base plates made of different materials can be manufactured through a simplified process without complex processes similar to semiconductor processes including photo processes and metal deposition processes. In order to manufacture electrodes and base plates made of different materials, all known methods of performing double shot injection molding can be applied to the present invention.

Regarding the electrode and base plate, in some other embodiments, the electrode and base plate may be formed by insert injection molding or overmolding. More specifically, an electrode can be formed by injecting an insulator into a first mold to form a base plate, inserting the formed base plate into a second mold, and then injecting a conductive polymer into the second mold. Conversely, the base plate may be formed by first injecting a conductive polymer into a third mold to form an electrode, inserting the formed electrode into a fourth mold, and then injecting an insulator into the fourth mold. According to this embodiment, electrodes and base plates with different configurations can be manufactured through a simplified process without complex processes similar to semiconductor processes including photo processes and metal deposition processes.

It should be noted that in addition to the double shot injection molding, insert injection molding, and over molding described above, various techniques for injection molding different materials to create products composed of two or more different materials may be included within the scope of the present disclosure. do.

As shown in FIG. 5, the housing 20 may be coupled to the top of the electrode plate 10 formed according to the various methods described above. Here, the fluid contained in the fluid receiving portion (not shown) of the housing 20 may be distributed into droplets based on the electrowetting signal and move along the electrode 13 formed on the electrode plate 10. In some embodiments, the droplet moves through the space between the top surface of the electrode 13 formed on the electrode plate 10 and the bottom surface of the housing facing the top surface of the electrode to a position and/or direction guided by an electrowetting signal. It can be. Figure 5 shows an example of a liquid droplet 70 moving along the electrode 13 based on an electrowetting signal, and the liquid distributed from the fluid contained in the fluid receiving portion (not shown) of the housing 20. The enemy's movement will be explained in more detail later with reference to FIG. 8. Hereinafter, with reference to FIGS. 6 and 7 , the structures of the electrode and base plate included in the electrode plate 10 will be described in more detail. FIG. 6 is an exemplary diagram for explaining in more detail the structure of the electrode described with reference to FIGS. 2 to 4 , and FIG. 7 illustrates the structure of the base plate described with reference to FIGS. 2 to 4 in more detail. This is an exemplary drawing for the following. Note that the electrode shown in FIG. 6 and the base plate shown in FIG. 7 are each illustrative drawings for explaining some embodiments of the present invention, so the scope of the present disclosure is not limited to the structures shown in FIGS. 6 and 7. Should be.

Referring to FIG. 6, the upper width 14 of the electrode formed on the electrode plate 10 is larger than the central width 15 of the electrode by the first reference size, and the lower width 16 of the electrode is the central width of the electrode. It can be seen that the width is as large as the second standard size than (15). Here, the middle part of the electrode may mean any location between the upper and lower parts of the electrode. In some embodiments, the location of the center of the electrode may vary depending on the purpose of the droplet actuator, and the center width 15 of the electrode is smaller than the top width 14 of the electrode and the bottom width 16 of the electrode. The electrode should be construed as being included within the scope of the present invention. Additionally, it should be noted that the first reference size and the second reference size may vary depending on the purpose of the droplet actuator.

Regarding reference sizes, in some embodiments, the first reference size may be larger than the second reference size. Since the upper part of the electrode plate 10 is the part that contacts the droplet and the lower part of the electrode plate 10 is the part where the electric signal is conducted, it is preferable that the upper width 14 of the electrode is larger than the lower width 16 of the electrode. You can.

Regarding the electrode, in some embodiments, the width of the electrode may be tapering from the top toward the middle of the electrode and from the bottom toward the middle of the electrode. According to this embodiment, the adhesion between the electrode and the base plate composed of different structures is increased, thereby increasing the yield of the electrode plate 10 and lowering the defective rate.

Regarding the electrode, in some other embodiments, the electrode may be formed such that the top width is greater than or equal to the middle width of the electrode, and the middle width of the electrode is greater than or equal to the bottom width of the electrode. In some embodiments, the electrode may be formed in a shape that tapers from top to bottom.

So far, with reference to FIG. 6, the structure of electrodes according to some embodiments of the present invention has been described. However, it should be noted that, unlike what is shown in FIG. 6, the top width 14, middle width 15, and bottom width 16 of the electrode may each vary.

FIG. 7 shows an exemplary electrode spacing formed from two or more electrodes formed on the electrode plate 10. Here, the electrode gap may be a portion of the base plate made of an insulator.

Regarding the electrode gap, in some embodiments, the upper width 17 of the electrode gap may be smaller than the lower width 18 of the electrode gap. Here, the base plate of the electrode gap may be formed by placing an injection gate at the lower part 40 of the electrode gap and injecting an insulator. By forming the lower width 18 of the electrode gap to be larger than the upper width 17 of the electrode gap, the pressure generated when injecting the insulator constituting the base plate can be reduced. By reducing the pressure generated when injecting the insulator, the yield of the electrode plate 10 manufactured can be increased and the defect rate can be reduced.

Regarding the electrode gap, in some other embodiments, the width of the electrode gap may be tapered from the middle of the electrode gap toward the top, and tapered from the middle of the electrode gap toward the bottom. According to this embodiment, the adhesion between the electrode and the base plate composed of different structures is increased, thereby increasing the yield of the electrode plate 10 and lowering the defective rate.

Hereinafter, with reference to FIG. 8, the reservoir 19 and the electrodes 50a and 50b that may be included in the electrode plate 10 will be described in more detail. FIG. 8 is another exemplary view of the upper part of the electrode plate described with reference to FIG. 1 .

As shown in FIG. 8, the electrode plate 10 may further include a reservoir 19 that dispenses the fluid contained in the housing 20. According to this embodiment, the fluid contained in the housing 20 may primarily flow into the reservoir 19. In addition, the reservoir 19 of the present disclosure may be formed in various structures for dispensing fluid to adjacent electrodes, for example, a structure in which fluid flows directly into the reservoir 19 from the outside without passing through the housing 20. It should be noted that they are not excluded from the scope of the present disclosure.

Additionally, as shown in FIG. 8, the upper width of the adjacent electrode 50a formed adjacent to the reservoir 19 may be larger than the upper width of the other electrode 50b. Since the adjacent electrode 50a is located adjacent to the reservoir 19 compared to the other electrode 50b, it can be located on a path along which liquid droplets distributed from the fluid based on the electrowetting signal essentially move. Therefore, in order for the adjacent electrode 50a to accommodate a larger amount of droplets than the other electrode 50b or to induce electrowetting by applying voltage to a large amount of liquid droplets, the adjacent electrode 50a must be connected to an electrode 50b with a different size. It can be formed to be relatively larger than the size of .

Regarding adjacent electrodes, in some embodiments, the number of adjacent electrodes 50a may be determined based on the size of the reservoir 19. For example, as the size of the reservoir 19 increases, the number of adjacent electrodes 50a can be increased, and as the size of the reservoir 19 decreases, the number of adjacent electrodes 50a can be reduced. It should be noted that although the number of adjacent electrodes 50a shown in FIG. 8 is 5, this is only an example and does not limit the scope of the present invention.

So far, the droplet actuator according to an embodiment of the present invention has been described with reference to FIGS. 1 to 8. According to this embodiment, unlike the conventional droplet actuator in which metal electrodes are deposited, the droplet actuator can be manufactured through a simple process. By simplifying the manufacturing process of the droplet actuator according to this embodiment, the manufacturing cost of the droplet actuator can be reduced, and the manufacturing cost of the droplet actuator may be reduced to a manufacturing cost suitable for use as a disposable cartridge (or disposable kit). there is.

In addition, according to this embodiment, a droplet actuator with a structure that can increase yield and reduce defect rate through a very simple injection molding process compared to the conventional droplet actuator manufacturing process including a photo process, metal deposition process, etching process, etc. can be provided.

Furthermore, according to this embodiment, based on the electrowetting signal, it is possible to provide a droplet actuator with a structure that allows the liquid contained in the housing to move more smoothly along the reservoir and the electrode.

Below, a reservoir structure for increasing the injection productivity and further reducing the defect rate of the droplet actuator according to the present invention will be described.

Figure 9 is a diagram illustrating a reservoir structure according to an embodiment of the present invention. Referring to FIG. 9, the reservoir 100 according to the present embodiment includes a plurality of regions 111, 112, 113, 114, and 115 in which electrodes are formed, and the plurality of regions 111, 112, 113, and 114. , 115) and includes a plurality of walls 121, 122, 123, and 124 that separate each area.

Unlike the reservoir 19 shown in FIG. 8, the reservoir 100 according to this embodiment has at least one expansion portion 131, 132, and 133 formed on each wall 121, 122, 123, and 124.

This will be explained in more detail with reference to FIGS. 10 to 12.

FIG. 10 is a diagram illustrating a portion of the reservoir 100 shown in FIG. 9.

In FIG. 10, the reservoir 100 includes a first area 111, a second area 112 adjacent to the first area 111, and a first wall between the first area 111 and the second area 112. Includes (121).

As an example, a conductive polymer may be injected into the first region 111 and the second region 112 through injection molding to form an electrode.

In addition, the first wall 121 is formed along the longitudinal direction A of the first wall 121 and has at least one extension portion 131, 132 whose width is increased compared to the peripheral portions 141, 142, 143, and 144. 133).

Here, the peripheral portions 141, 142, 143, and 144 are parts of the first wall 121 and are formed adjacent to the expanded portions 131, 132, and 133.

In this way, when the expanded portions 131, 132, and 133 are formed on the first wall 121 with a width (w1) greater than the width (w2) of the peripheral portions (141, 142, 143, and 144), the first region ( 111) or when forming an electrode in the second area 112, the first wall 121 can better withstand the injection pressure caused by injection molding.

For example, in the structure of the reservoir 19 shown in FIG. 8, when a conductive polymer is injected to form an electrode, the wall between each region is bent due to the inability to withstand the injection pressure.

On the other hand, in the reservoir 100 of this embodiment, the expansion portions 131, 132, and 133 formed along the first wall 121 have an increased width w1 and more strongly resist injection pressure when injecting the conductive polymer. Therefore, the bending phenomenon of the first wall 121 is minimized.

Meanwhile, according to the structure of the reservoir 100 of this embodiment, in addition to reducing the defective rate of products by preventing bending of the first wall 121, it can also contribute to increasing product productivity.

For example, in the structure of the reservoir 19 in Figure 8, in order to prevent the wall from bending, the reservoir portion had to be injected more precisely from the injection stage of the base plate, which resulted in a problem of lowering overall product productivity. However, in the structure of the reservoir 100 of this embodiment, the bending phenomenon of the wall is alleviated by the extensions 131, 132, and 133, so there is no burden of precisely injecting the reservoir portion in the injection stage of the base plate as before. It disappears. Accordingly, overall product productivity can also be improved.

Meanwhile, in this embodiment, the expansion portions 131, 132, and 133 may have the shape of a cylinder with a circular cross-section, but the scope of the present invention is not limited thereto. For example, the extensions 131, 132, and 133 may be in the shape of a pillar whose cross-section is oval or polygonal, or may be a closed shape made of straight lines and curves. Here, the cross section refers to a cross section obtained by cutting the extensions 131, 132, and 133 along the longitudinal direction A of the first wall 121.

As one embodiment, the at least one extension portion 131, 132, and 133 may be formed along the first wall 121 and spaced apart from each other by a predetermined distance. For further explanation, please refer to FIG. 11.

In FIG. 11, at least one expansion part 131, 132, and 133 is formed at a position spaced apart from each other by a predetermined distance d. That is, among the at least one expansion part 131, 132, and 133, the second expansion part 132 is formed at a position away from the position where the first expansion part 131 is formed by a distance d, and again the second expansion part 132 ) The third extension 133 may be formed at a location that is a distance d away from the location where ) was formed.

This is so that when the conductive polymer is injected into each region 111 and 112, each expansion part 131, 132, and 133 equally shares the injection pressure and effectively supports the first wall 121.

For example, assume that at least one of the extensions 131, 132, and 133 is formed toward the left side of the first wall 121. At this time, when the conductive polymer is injected, a relatively large injection pressure is applied to the third expansion portion 133 located on the far right, and the third expansion portion 133 may not be able to withstand the excessive injection pressure and may be bent or damaged. Also, in this case, the right portion of the first wall 121 is relatively far away from the extensions 131, 132, and 133, so that it is not supported by the extensions 131, 132, and 133, and is easily damaged by injection pressure. It can bend.

Therefore, it is preferable that at least one expansion part 131, 132, and 133 is arranged at equal intervals by a predetermined distance d, as shown in FIG. 11.

Meanwhile, in one embodiment, expansion portions formed on each wall of the reservoir 100 may be formed in symmetrical positions. This will be further explained with reference to FIG. 12.

Referring to FIG. 12 , a portion of the reservoir 100 including the first area 111, the second area 112, and the third area 113 is shown as an excerpt. A first wall 121 and a second wall 122 having at least one expanded portion are formed between each region 111, 112, and 113.

As described in the previous embodiments, the first wall 121 is located between the first area 111 and the second area 112 to distinguish the areas 111 and 112 from each other. In addition, at least one extension portion 131, 132, and 133 is formed on the first wall 121 and spaced at a certain distance along the longitudinal direction of the first wall 121.

Similarly, the second wall 122 is located between the second region 112 and the third region 113 to separate the regions 112 and 113 from each other. In addition, at least one other extension part 141 , 142 , 143 is formed in the second wall 122 at a certain distance along the longitudinal direction A of the second wall 122 .

At this time, the at least one other extension part 141, 142, and 143 may be formed in a symmetric position with the at least one extension part 131, 132, and 133. Here, symmetrical means that at least one expansion part 131, 132, 133 and at least one other expansion part 141, 142, 143 are positioned facing each other with respect to the center line B of the second region 112. ) means that each is formed.

This may serve to increase the structural stability of each wall 121 and 122 when the conductive polymer is simultaneously injected into each region 111, 112, and 113 of the reservoir 100. For example, if at least one expansion part 131, 132, 133 and at least one other expansion part 141, 142, 143 are formed in a position that is not symmetrical to each other, hydrodynamically within the second region 112 Turbulence is more likely to occur, so that stronger local pressure can be applied to the first wall 121 or the second wall 122.

Therefore, in order to distribute the pressure applied to each part of the walls 121 and 122 as evenly as possible, at least one extension 131, 132, 133 and at least one other extension 141, 142, 143 are used. It is desirable to form them in positions symmetrical to each other.

According to the reservoir structure according to the present invention, which has been explained through the above embodiments, the bending phenomenon of each wall is minimized during injection molding of a conductive polymer, thereby improving injection productivity and reducing product defect rate. Accordingly, the production process can be simplified and the production cost can be significantly reduced.

Below, an electrode structure that makes optical observation of droplets easier in the droplet actuator according to the present invention will be described.

Figure 13 is a diagram showing an electrode structure that facilitates optical observation of droplets according to an embodiment of the present invention. FIG. 13(a) shows a typical electrode structure, and FIG. 13(b) shows an electrode structure according to this embodiment.

Referring to (a) of FIG. 13, in a typical electrode structure, the entire electrode 11 is filled with an opaque conductor, for example, a conductive polymer. Therefore, there is a problem in that the droplet located on the electrode 11 is obscured by the opaque conductor, making optical observation of the droplet difficult.

Meanwhile, referring to (b) of FIG. 13, in the electrode structure according to this embodiment, a hole 211 that is not filled with an opaque conductor is formed inside the electrode 210. Accordingly, the droplet located on the electrode 210 can be directly observed through the hole 211, making optical observation of the droplet and the light emitted from the droplet easy.

Figures 14 to 18 are diagrams to explain in more detail the electrode structure shown in Figure 13.

FIG. 14 is an enlarged view of the structure of the electrode 210 of FIG. 13 in more detail. Referring to FIG. 14, the electrode 210 includes a hole 211 located at the center of the electrode 210 and a peripheral portion 212.

As previously described, the hole 211 is formed inside the electrode 210 and is not filled with an opaque conductor.

In one embodiment, the interior of the hole 211 may be empty or filled with a transparent conductor or insulating material.

In one embodiment, the hole 211 may be located at the center of the electrode 210 as shown in FIG. 13.

The peripheral portion 212 is a portion surrounding the hole 211 of the electrode 210 and is filled with an opaque conductor. In one embodiment, the opaque conductor may be a conductive polymer.

According to the structure of the electrode 210 shown in FIG. 14, the droplet located on the electrode 210 can be guided in a specific direction by a potential or electric signal applied to the peripheral portion 212, and the droplet and the droplet emitted Light can be observed optically through the hole 211 of the electrode 210. Therefore, an electrode structure that allows optical observation of droplets while inducing droplets by electrowetting without problems is possible.

Meanwhile, in this embodiment, the hole 211 is illustrated as having a circular shape, but the scope of the present invention is not limited thereto. For example, the hole 211 may have an oval or polygonal shape in addition to a circular shape.

As an example, the size of the hole 211 may increase as the size of the electrode 210 increases. For further explanation, please refer to Figure 15.

Figure 15 shows a plurality of electrodes 220 and 230 having different sizes. The droplet actuator according to the present invention may simultaneously include electrodes of different sizes. For example, referring to the example of FIG. 8, the electrode 50a located near the reservoir 19 may have a larger size than the other electrode 50b.

In this way, when one droplet actuator has electrodes of different sizes, the hole (P) formed in the larger electrode 220 has a larger size than the hole (Q) formed in the smaller electrode 230. You can.

The larger the size of the hole, the larger the area where the droplet can be observed, making optical observation easier, but since the peripheral area filled with the conductor decreases, the force that induces the droplet may become smaller. Therefore, in order to secure the minimum force for guiding the droplet, the size of the hole Q in the small electrode 230 must be limited to less than a certain level. On the other hand, in the large electrode 220, a certain area of the peripheral area can be secured even if the size of the hole P is increased, so it is possible to have a hole of a larger size than the small electrode 230.

As an example, the ratio between the size of the hole and the size of the electrode may be limited to within a predetermined range. For further explanation, please refer to FIG. 16.

As previously explained in FIG. 16 , if the size of the hole 241 is increased, optical observation of the droplet becomes easier, but the area of the peripheral portion 242 is reduced accordingly, so the force that induces the droplet may be reduced. Therefore, by adjusting the ratio of the hole 241 to the size of the electrode 240 to an appropriate range, both optical observation of the droplet and induction of the droplet by electrowetting can be achieved.

As an example, the ratio between the size of the hole and the size of the electrode may be the ratio of the width. In the example of Figure 12, the electrode 240 is a square with a width wd1, and the hole 241 is a circle with a width wd2. In this case, the ratio R between the size of the hole and the size of the electrode can be wd2/wd1.

As another example, the ratio between the size of the hole and the size of the electrode may be the ratio of area. Referring again to the example of FIG. 16, the area of the electrode 240 is wd1^2, and the area of the hole 241 is π*(wd2/2)^2. In this case, the ratio R between the size of the hole and the size of the electrode can be π*(wd2/2)^2/wd1^2.

As an example, the ratio R between the size of the hole and the size of the electrode may be limited to a value of less than 1/2. This is because if the size of the hole exceeds 1/2 of the size of the electrode, the droplet induction function by electrowetting may be excessively weakened.

Meanwhile, even if the size of the electrode is the same, the size of the hole may be larger in the electrode of interest where optical observation of the droplet is important. For further explanation, please refer to FIG. 17.

Referring to FIG. 17, a plurality of electrodes 251, 252, 253, 254, 255, and 256 of the same size are shown. Among them, let us assume that the first electrode 251 and the sixth electrode 256 are electrodes of interest where optical observation of droplets is important. For example, the droplet in which the first reaction occurred is guided to the first electrode 251, and the droplet passes through the second to fifth electrodes (252, 253, 254, 255) and undergoes a second reaction to reach the sixth electrode. Assume that the reaction result in the (256) phase is emitted as light.

In this case, in the first electrode 251, which can observe the first reaction result of the droplet, and the sixth electrode 256, which can observe the second reaction result, the hole size is relatively large to facilitate optical observation. It may be desirable to do so. On the other hand, in the second to fifth electrodes 252, 253, 254, and 255, where optical observation of droplets is not very important, the size of the hole is reduced and the area of the peripheral area is increased to make it easier to induce droplets by electrowetting. Widening may be desirable.

Therefore, even when the size of the electrodes is the same, the size of the hole can be formed to be relatively larger in the electrode of interest where optical observation of the droplet is important.

Meanwhile, when the hole of the electrode is made of a transparent insulator, the hole can be made integrated into the base plate. Referring to Figure 18 for further explanation,

18, an exemplary configuration 260 of a base plate and hole according to one embodiment of the present invention is shown.

The hole 261 is made of a transparent insulator, and the lower portion 261b of the hole 261 is connected to the base plate 262 through the connection portion 263. The upper portion 261a of the hole 261 is separated from the base plate 262 at a certain distance. A conductive polymer is filled between the hole 261 and the base plate 262 to form the periphery of the electrode.

As an example, the hole 261 may be made together with the base plate 262 by injection molding. For example, the hole 261 and the base plate 262 can be created at once by injecting a transparent insulator through an injection gate into a mold in which spaces corresponding to the hole 261 and the base plate 262 are formed. According to this, since the hole and base plate are formed in one process, the overall process is simplified and the manufacturing cost of the device is reduced.

According to the electrode structure according to the present invention described through the above embodiments, it is possible to optically observe the droplet and the light emitted from the droplet through the hole formed inside the electrode.

Below, an embodiment in which the electrowetting force is improved by providing a plurality of electrodes parallel to each other in the droplet actuator according to the present invention will be described.

Figure 19 is an exploded perspective view showing an exemplary form of a droplet actuator with a parallel electrode structure, according to an embodiment of the present invention.

The embodiment of FIG. 19 also includes an electrode plate 10, a housing 20, and a substrate 30, similar to the embodiment of FIG. 1. However, the embodiment of FIG. 9 includes another electrode layer 310 and another substrate 320 between the electrode plate 10 and the housing 20.

Housing 20 can accommodate fluid. At this time, the housing 20 may include a fluid receiving portion for receiving fluid. Since the configuration and function of the housing 20 according to this embodiment is substantially the same as the configuration and function of the housing 20 previously described in FIGS. 1 to 8, detailed description thereof is omitted here to avoid duplication of explanation. do.

The electrode plate 10 can induce polarization in the liquid droplets distributed from the fluid contained in the housing 20 through an electrowetting signal to move them to the location of the target electrode. At this time, the electrode plate 10 may include at least one electrode for conducting an electrowetting signal. The configuration and function of the electrode plate 10 according to this embodiment are substantially the same as those of the electrode plate 10 previously described in FIGS. 1 to 8, so to avoid duplication of explanation, a detailed description thereof is provided here. omit.

The substrate 30 can transmit an electrowetting signal to the electrode plate 10. For example, the substrate 30 may be any one of a glass substrate, a silicon substrate, a printed circuit board (PCB), and a thin film transistor (TFT). Since the configuration and function of the substrate 30 according to this embodiment is substantially the same as the configuration and function of the substrate 30 previously described in FIGS. 1 to 8, detailed description thereof is omitted here to avoid duplication of explanation. do.

The other electrode layer 310 is spaced apart from the electrode plate 10 and is disposed at a position facing the electrode plate 10 . A droplet is located between the other electrode layer 310 and the electrode plate 10. When the electrode plate 10 applies an electrowetting signal to the droplet through an electrode array formed inside it, the other electrode layer 310 applies a predetermined reference potential to the droplet.

According to this, compared to when the droplet is guided only by the lower electrode plate 10 in the previous embodiments of FIGS. 1 to 9, polarization within the droplet occurs more easily, thereby improving the electrowetting driving force, and thus the droplet moves in the intended direction. can be better derived.

As an example, the predetermined reference potential may be ground, that is, 0V.

The other substrate 320 is located on top of the other electrode layer 310 and provides an electrical path for applying a predetermined reference potential to the other electrode layer 310.

The other substrate 320 may be, for example, one of a glass substrate, a silicon substrate, a printed circuit board (PCB), and a thin film transistor (TFT). However, the scope of the present invention is not limited to these examples, and any known technology having a structure capable of transmitting the reference potential to another electrode layer 310 can be applied to the present invention.

Meanwhile, other electrode layers 310 may be formed in various shapes.

As an example, the other electrode layer 310 may be formed by coating, depositing, attaching, or adhering a conductive polymer, ITO (Indium Tin Oxide), or metal to the other substrate 120.

As another embodiment, the other electrode layer 310 is provided with a separate base plate and formed on or inside the base plate in the same manner as the electrode was formed within the electrode plate 10, or inside the base plate. It may be formed in a form that another electrode layer 310 penetrates.

In this case, the separate base plate is formed by injecting an insulator into a part of the injection gate mold, and the other electrode layer 310 is formed by injecting a conductive polymer into another space of the mold. It may be formed by injection.

In one embodiment, the insulator is polycarbonate (PC), poly methyl methacrylate (PMMA), cyclic olefin polymer (COP), cyclic olefin copolymer (COC), polyethylene terephthalate (PET), polyimide (PI), polyethylene (PE), It may include at least one of acrylic, acrylonitrile butadiene styrene (ABS), polyvinylidene fluoride (PVDF), polytetrafluoroethylene (PTFE), polystyrene (PS), polypropylene (PP), and polyvinyl chrloride (PVC). In addition, all known structures, including thermoplastic resins for insulating electrical signals, can be applied to the present invention to produce an insulator.

As an example, the conductive polymer may include a mixture of a polymer and a conductive material. At this time, the mixture may include at least one of carbon nanotubes, graphene, and carbon fiber, which are conductive materials, along with the polymer. In addition, all known mixtures for conducting electrical signals can be applied in the present invention to produce electrodes.

FIG. 20 explains the cross-sectional structure of the droplet actuator shown in FIG. 19 and the electrowetting operation thereof. In the description of FIG. 20, for convenience of explanation, the electrode array formed within the electrode plate 10 is referred to as the first electrode, the substrate 30 is referred to as the lower substrate, and the other electrode layer 310 between the electrode plate 10 and the housing 20 is referred to as the first electrode. ) and the other substrate 320 will be referred to as a second electrode and an upper substrate, respectively. The following description will be made with reference to the drawings.

FIG. 20 is a cross-sectional view of the droplet actuator having the laminated structure of FIG. 19.

Referring to FIG. 20, a lower substrate 30, an electrode plate 10 with a first electrode 13 formed therein, a second electrode 310, an upper substrate 320, and a housing 20 are stacked. The structure of the droplet actuator is shown.

A spacer 330 is disposed between the first electrode 13 and the second electrode 310 to maintain the gap between the first electrode 13 and the second electrode 310, thereby allowing the droplet 70 to move. A space (A) is created.

As an example, a dielectric layer (not shown) may be additionally laminated between the droplet 70 and the first electrode 13, or between the droplet 70 and the second electrode 310, and the first electrode (13) Alternatively, the surface of the second electrode 110 may be treated with a hydrophobic coating.

In the droplet actuator of FIG. 20, in order to guide the droplet 70 in a specific direction, an electrowetting signal for moving the droplet 70 in the specific direction is applied to the first electrode 13, and the second electrode 310 ), a reference potential is applied. As a result, polarization due to the electric field occurs inside the droplet 70, and the surface tension and shape change accordingly, making it possible to move the droplet 70 in a desired direction.

At this time, the droplet actuator of Figure 20 is provided with a second electrode 310 to which a reference potential is applied, forming a stronger electric field than the droplet actuator of Figures 1 to 8, thereby generating an electrowetting driving force for moving the droplet 70. It also becomes stronger.

According to the structure of the diagnostic device described through the above embodiments, the electrowetting driving force is improved by the lower electrode to which the electrowetting signal is applied and the upper electrode having the reference potential, so that droplets can be induced more easily.

Hereinafter, an embodiment of the droplet actuator according to the present invention will be described having a temperature control function for a local area and a cleaning function within the droplet.

Figure 21 is an exploded perspective view showing an exemplary form of a droplet actuator having a temperature control unit, according to an embodiment of the present invention.

The embodiment of FIG. 21 also includes an electrode plate 10, a housing 20, and a substrate 30, similar to the embodiment of FIG. 1. However, the embodiment of FIG. 9 further includes another substrate 1110 between the electrode plate 10 and the housing 20.

Housing 20 can accommodate droplets. At this time, the housing 20 may include a fluid receiving portion for receiving fluid. Since the configuration and function of the housing 20 according to this embodiment is substantially the same as the configuration and function of the housing 20 previously described in FIGS. 1 to 8, detailed description thereof is omitted here to avoid duplication of explanation. do.

The electrode plate 10 can induce polarization in the liquid droplets distributed from the fluid contained in the housing 20 through an electrowetting signal to move them to the location of the target electrode. At this time, the electrode plate 10 may include at least one electrode for conducting an electrowetting signal. The configuration and function of the electrode plate 10 according to this embodiment are substantially the same as those of the electrode plate 10 previously described in FIGS. 1 to 8, so to avoid duplication of explanation, a detailed description thereof is provided here. omit.

The substrate 30 can transmit an electrowetting signal to the electrode plate 10. For example, the substrate 30 may be any one of a glass substrate, a silicon substrate, a printed circuit board (PCB), and a thin film transistor (TFT). Since the configuration and function of the substrate 30 according to this embodiment is substantially the same as the configuration and function of the substrate 30 previously described in FIGS. 1 to 8, detailed description thereof is omitted here to avoid duplication of explanation. do.

Another substrate 1110 is located on top of the electrode plate 10 and has one or more temperature control units 1111. The temperature control unit 1111 may be a heater for locally heating a portion of the electrode plate 10, but the scope of the present invention is not limited thereto. For example, the temperature control unit 1111 may be a cooler for local cooling of a partial area of the electrode plate 10.

As an example, when the temperature controller 1111 is a heater, the temperature controller 1111 may include one or more resistors that generate heat when current flows.

As an example, when the temperature control unit is a heater, the temperature control unit may include a magnetic induction type heating device.

As an example, the other substrate 1110 may be one of a glass substrate, a silicon substrate, a printed circuit board (PCB), and a thin film transistor (TFT). However, the scope of the present invention is not limited to these examples, and any known technology having a structure in which the temperature control unit 1111 can be embedded can be applied to the present invention.

FIG. 22 is a cross-sectional view for explaining the detailed structure of the droplet actuator shown in FIG. 21 and the temperature control method thereof.

FIG. 22 explains the cross-sectional structure of the droplet actuator shown in FIG. 21 and its temperature control operation. In FIG. 22 , for clarity of terminology, the substrate 30 located relatively below will be referred to as the lower substrate, and the other substrate 1110 located relatively above will be referred to as the upper substrate.

Referring to FIG. 22, the structure of the droplet actuator is shown in which a lower substrate 30, an electrode plate 10 with an electrode 13 formed therein, an upper substrate 1110, and a housing 20 are stacked.

A spacer 1130 is disposed between the electrode plate 10 and the upper substrate 1110 to maintain the gap between the electrode plate 10 and the upper substrate 1110, thereby creating a space in which the droplet 70 can move ( A) is created.

One or more temperature control units 1111 are disposed on the upper substrate 1110. The temperature control unit 1111 is a component that can control the temperature of the droplet 70 located in the thermal area (B), for example, a heater for selectively heating the thermal area (B), or a heater for selectively heating the thermal area (B). It may be a cooler for local cooling. The thermal area B includes at least a partial area of the electrode plate 10.

When the temperature controller 1111 is a heater, the temperature controller 1111 is heated according to a control signal transmitted through the upper substrate 1110, and heat is transferred from the temperature controller 1111 to the thermal area (B). do. As a result, the droplet 70 located in the thermal region B is also heated.

This temperature control function is necessary to enable specific processes to be performed under predetermined temperature conditions. For example, temperature control may be required for DNA denaturation for droplet analysis. Specifically, the temperature control unit 1111 heats the thermal region (B) to a temperature suitable for denaturing the DNA in the droplet 70, annealing the primer to the template strand DNA, or using DNA polymerase. It can be controlled to heat the thermal region (B) to a temperature effective for performing other reaction steps, such as extension of the primer.

According to the embodiment of FIG. 22, the droplet actuator is provided with a temperature control unit 1111, thereby satisfying the optimal temperature conditions required for droplet analysis and diagnosis.

Figures 23 to 25 are diagrams for explaining a liquid droplet actuator with a cleaning function using magnetic force and a cleaning method using the same.

Here, washing means separating and removing some substances contained in the droplet 70 to the outside of the droplet 70.

Referring to FIG. 23, the liquid droplet 70 includes a plurality of magnetic beads (M). In addition, a magnetic force provider 400 is provided inside or outside the droplet actuator to guide or fix the magnetic bead (M) to a specific position or direction. The magnetic force provider 400 may include a permanent magnet or an electromagnet.

The magnetic force provider 400 may be used to remove some substances from the droplet 70 before analyzing the droplet. At this time, the substances to be removed may include contaminants contained in the droplets 70, oversupplied reagents, or substances to be separated from the droplets 70 for separate analysis.

First, magnetic beads (M) are included in the droplet (70). At this time, the magnetic bead (M) is included in the droplet 70 from the beginning, is injected into the droplet 70 at a specific section within the droplet actuator while the droplet 70 is guided to the current position, or is injected into the droplet 70 at a specific position within the droplet actuator. It may be placed in advance and included in the droplet 70 in a way that it naturally mixes with the droplet 70 as the droplet 70 moves to the corresponding location.

In FIG. 23 , since the cleaning function has not yet been activated, the magnetic force provider 400 is maintained in an OFF state, and no magnetic force is applied to the droplet 70. At this time, the magnetic bead (M) reacts to a specific material in the droplet 70 and binds to the material.

As an example, the magnetic force provider 400 may be provided within the droplet actuator or may be provided in a separate tester outside the droplet actuator.

Meanwhile, in this embodiment, the magnetic force provider 400 is illustrated as being located below the lower substrate 30, but the scope of the present invention is not limited thereto. For example, the magnetic force provider 400 may be located between the lower substrate 30 and the electrode plate 10, on the top or bottom of the upper substrate 1110, or on the top or side of the droplet actuator. there is.

Next, a method of driving the cleaning function will be described with reference to FIGS. 24 and 25.

In Figure 24, the magnetic force provider 400 is switched to the ON state, and magnetic force acts from the magnetic force provider 400 to the droplet 70. The magnetic force applied to the droplet 70 attracts the magnetic bead (M) within the droplet 70 in the direction where the magnetic force provider 400 is located. At this time, the material bound to the magnetic bead (M) is also pulled in the direction where the magnetic force providing part 400 is located.

Next, referring to FIG. 25, while the magnetic bead (M) and the material bound thereto are pulled in the direction where the magnetic force provider 400 is located, the droplet 70 is generated according to the electrowetting signal applied to the electrode 13. is moved to another location. At this time, the magnetic bead (M) is being pulled downward by magnetic force, so it does not follow the droplet (70) and is left in its original position, separated from the droplet (70). At this time, the material bound to the magnetic bead (M) is also left in its original position along with the magnetic bead (M).

In this way, a specific material, that is, a material bound to the magnetic bead (M), can be separated and removed from the droplet 70.

Figure 26 is a diagram illustrating the configuration of a signal reader that reads the results of testing a sample of the droplet actuator.

Referring to FIG. 26, the signal reader 2100 includes a housing 2110, an optical unit 2120, an upper socket 2130, a lower socket 2140, and a main board 2160. The droplet actuator 2150 previously described in FIGS. 1 to 25 may be inserted in the form of a cartridge between the upper socket 2130 and the lower socket 2140. As an example, the signal reader 2100 may further include a screen (not shown).

The signal reader 2100 generates and controls the electrowetting signal applied to the droplet actuator 2150. The sample in the droplet actuator 2150 can be sensed by optical methods such as colorimetry, fluorometry, imaging, etc. through the signal reader 2100. Alternatively, the sample in the droplet actuator 2150 may be sensed using an electrochemical method or electromagnetic induction method through the signal reader 2100.

Optics 2120 provides optical means for sensing the sample within droplet actuator 2150.

Upper socket 2130 and lower socket 2140 provide mechanical means to receive droplet actuator 2150.

The main board 2160 performs electrical or electronic control of the droplet actuator 2150, such as temperature control, magnetic field control, and droplet position detection.

FIG. 27 is a diagram showing an exemplary configuration of the optical unit of FIG. 26.

Referring to FIG. 27, the optical unit may include a blue LED, a photodiode, a dichroic mirror, one or more lenses, and one or more filters.

Figures 28 and 29 are diagrams to further explain the droplet position detection function of the main board of Figure 26.

Figure 28 shows an example configuration of a droplet position detection circuit provided on the main board. The main board may include a droplet position detection circuit as shown in FIG. 28 to determine the position of the droplet on the electrowetting electrode in the droplet actuator. The main board can use a droplet position detection circuit to sense changes in resistance or capacitance according to the movement of the droplet, or can detect the current position of the droplet by using an image sensor.

29 shows an exemplary form of droplet position detection results using a droplet position detection circuit.

Figure 29(a) shows a case where droplet movement according to the electrowetting signal fails. Even though the droplet movement signal 2220 increased to High, the droplet sensing signal 2210 is still in a low state in the corresponding section, which means that droplet movement did not actually occur even though the electrowetting signal was applied. .

Figure 29(b) shows a case where droplet movement according to the electrowetting signal was successful. As the droplet movement signal 2220 increased to High, the droplet sensing signal 2210 also changed to High in the corresponding section, meaning that droplet movement actually occurred due to the application of the electrowetting signal.

Figures 30 and 31 are diagrams to further explain the temperature control function of the motherboard of Figure 26.

Figure 30 shows an example configuration of a temperature control circuit provided on the motherboard. The main board may include a temperature control circuit as shown in FIG. 30 to control the temperature of the temperature controller (eg, heater) of the droplet actuator. The motherboard controls the temperature through a temperature control circuit by sensing the change in resistance value according to the temperature within the terminal device or the value of other temperature sensors.

Figure 31 shows an exemplary form for controlling the outputs of a plurality of temperature sensing circuits with one temperature controller.

As the temperature sensor selection signal 2320 changes, it can be seen that the sensor value 2310 input to the temperature controller changes to the selected sensor output.

Figure 32 is a diagram showing a new layered structure of a droplet actuator as another embodiment of the present invention. Referring to FIG. 32, the droplet actuator 2400 having a stacked structure according to this embodiment includes a lower housing 2411, a PCB substrate 2412, a lower substrate 2413, a metal pattern layer 2414, and a dielectric layer 2415. , including a lower plate on which a hydrophobic coating layer 2416 is sequentially laminated and an upper plate on which a hydrophobic coating layer 2421, a conduction layer 2422, an upper substrate 2423, a heater 2424, and an upper housing 2425 are sequentially laminated. can do. The upper plate and the lower plate may be spaced apart from each other to form a space between them to accommodate droplets.

In the space, there may be a bonding 2431 that joins the upper plate and the lower plate, at least one filler 2432, and/or at least one sample 2433.

In one embodiment, PCB substrate 2412 may function as an interconnect layer.

As an example, a conductive polymer electrode may be formed on the lower substrate 2413.

As an example, conduction layer 2422 may include ITO, metal, or conductive polymer.

The dielectric layer 2415 is a component for providing electrical insulation between a conductive polymer electrode or a conduction layer and a droplet, and may include an insulating polymer or a material such as Parylene-C, SiO2, or Si3N4.

The hydrophobic coating layer (2416, 2421) is a layer for hydrophobic coating treatment on the surface of the metal pattern layer (2414) or the conduction layer (2422). The hydrophobic coating layer (2416, 2421) is spin using HMDS, fluorine solution, or gas. It can be coated using methods such as coating, dip coating, spray coating, and plasma coating.

The filler 2432 is a fluid material that is filled between the upper plate and the lower plate to facilitate the movement of liquid droplets and prevent evaporation of liquid droplets and generation of bubbles at high temperatures. The filler 2432 may be a non-polar solvent that is insoluble in water, or a mixture thereof with a surfactant or lubricant.

As an example, siloxane or silicone oil may be used as the filler 2432.

Meanwhile, a spacer is disposed between the upper plate and the lower plate to maintain the gap between the upper plate and the lower plate, thereby creating a space for liquid droplets to move. At this time, the upper plate and lower plate can be bonded using methods such as adhesive material, ultrasonic fusion, or laser fusion.

Figure 33 is a diagram showing a droplet actuator with a vertical electrode structure according to an embodiment of the present invention. Referring to FIG. 33, the droplet actuator 3100 according to this embodiment includes a lower substrate 3110 including a plurality of electrodes 3111, 3112, and 3113, and an upper substrate including a plurality of other electrodes 3121 and 3122. Includes a substrate 3120. The upper substrate 3120 and the lower substrate 3110 are spaced apart from each other to receive liquid droplets and form or define a space for the liquid droplets to move.

The plurality of electrodes 3111, 3112, and 3113 are electrowetting electrodes for handling droplets, and a gap is formed between adjacent electrodes so that they are spaced apart from each other with the gap in between. For example, among the plurality of electrodes 3111, 3112, and 3113, the first electrode 3111 and the third electrode 3112 that are adjacent to each other are spaced apart from each other with the first gap g1 therebetween.

A plurality of other electrodes 3121 and 3122 are also electrowetting electrodes for handling droplets, and gaps are formed between adjacent electrodes. For example, among the plurality of other electrodes 3121 and 3122, the second electrode 3121 and the fourth electrode 3122 that are adjacent to each other are spaced apart from each other with the second gap g2 therebetween.

At this time, the plurality of electrodes 3111, 3112, and 3113 formed on the lower substrate 3110 and the plurality of other electrodes 3121, 3122 formed on the upper substrate 3120 are arranged to stagger each other. For example, the first electrode 3111 and the third electrode 3112 are aligned so that the second electrode 3121 of the upper substrate 3120 is crossed with the first electrode 3111 and the third electrode 3112 of the lower substrate 3110. ) is disposed at a position facing the first gap g1 between. Similarly, the third electrode 3112 of the lower substrate 3110 is crossed with the second electrode 3121 and the fourth electrode 3122 of the upper substrate 3120, and the second electrode 3121 and the fourth electrode ( 3122) is disposed at a position facing the second gap g2.

Meanwhile, refer to FIG. 34 to more clearly illustrate the electrode arrangement structure of FIG. 33. Figure 34 (a) is a side view of the droplet actuator, and Figure 34 (b) is a top view of the upper substrate 3120 of the droplet actuator.

Figure 34 (a) is shown for comparison with Figure 34 (b), and its structure and technical features are the same as those described in Figure 33.

Referring to FIG. 34 (b), the arrangement relationship between the electrodes 3121 and 3122 of the upper substrate 3120 and the electrodes 3111, 3112 and 3113 of the lower substrate 3110 is clearly shown in the plan view.

In Figure 34 (b), each of the electrodes 3121 and 3122 of the upper substrate 3120 is disposed to at least partially overlap the two adjacent electrodes of the lower substrate 3110 and the gap therebetween when viewed from above. .

For example, when viewed from above the upper substrate 3120, the second electrode 3121 is at least partially overlapped with the first electrode 3111 and the third electrode 3112 adjacent thereto. Additionally, the second electrode 3121 at least partially overlaps the first gap g1 between the first electrode 3111 and the third electrode 3112 when viewed from above the upper substrate 3120. do. A similar arrangement applies to the other electrodes 3122 of the upper substrate 3120.

According to this electrode arrangement structure, when an operating signal (i.e., electrowetting signal) is applied to move the droplet, the droplet can be moved in close contact with the upper substrate 3120 and the lower substrate 3110 alternately. Movement of droplets between the electrodes of the substrate 3120 and the electrodes of the lower substrate 3110 can be performed more smoothly. A more detailed description of this will be provided later with reference to FIGS. 36 and 37.

Figure 35 is a diagram showing the switch circuit of the droplet actuator. The switch circuit of FIG. 35 is configured to selectively apply an operating signal to each electrode (3111, 3112, 3113, 3121, and 3122) of the droplet actuator 3100. The switch circuit of this embodiment includes one or more signal lines 3101 and 3102 and a plurality of switches S1, S2, S3, S4, and S5.

Among the one or more signal lines 3101 and 3102, the first signal line 3101 is a signal line through which an operation signal (Vin, ie, electrowetting signal) is provided. Among the one or more signal lines 3101 and 3102, the second signal line 3102 is a signal line to which a reference potential (Vref, for example, ground potential) is applied. One or more signal lines 3101 and 3102 may be electrically connected to each electrode 3111, 3112, 3113, 3121, and 3122 of the droplet actuator 3100 by switches S1, S2, S3, S4, and S5.

A plurality of switches (S1, S2, S3, S4, S5) selectively connect each electrode (3111, 3112, 3113, 3121, 3122) of the droplet actuator (3100) to any one of the signal lines (3101, 3102). It is a switch element for Each of the plurality of switches (S1, S2, S3, S4, and S5) can be controlled independently from each other and can be one-to-one matched with each electrode (3111, 3112, 3113, 3121, and 3122).

As an example, control of the plurality of switches S1, S2, S3, S4, and S5 may be performed by a control unit (not shown) provided in the droplet actuator 3100.

Alternatively, as another example, control of the plurality of switches S1, S2, S3, S4, and S5 may be performed by a control unit (not shown) provided in a test device outside the droplet actuator 3100. In this case, each element (3101, 3102, S1, S2, S3, S4, S5) constituting the switch circuit may be included in an external tester device rather than the droplet actuator 3100.

As one embodiment, the plurality of switches (S1, S2, S3, S4, and S5) may be controlled so that the operating signal (Vin) is sequentially provided to each electrode (3111, 3112, 3113, 3121, and 3122). At this time, the plurality of switches (S1, S2, S3, S4, S5) may be controlled so that the reference potential (Vref) is applied to the electrode to which the operation signal (Vin) is not provided.

For clear understanding, this will be explained with reference to FIGS. 36 and 37.

Figure 36 is a diagram showing the operation of the electrowetting electrode and the movement of droplets thereby over time, and Figure 37 is a timing diagram showing the operation of the switch circuit and the potential state of the electrode for each time section. The following description will be made with reference to the drawings.

First, at time t1, the first switch S1 is controlled so that the operation signal Vin is applied to the first electrode 3111 (S1 = High), thereby positioning the droplet on the first electrode 3111. . At this time, the other switches (S2, S3, S4, S5) are controlled so that the reference potential (Vref) is applied to the remaining electrodes (3112, 3113, 3121, and 3122) (S2, S3, S4, S5 = Low).

Then, at time t2, the second switch S2 is controlled so that the operating signal Vin is applied to the second electrode 3121 in order to move the droplet from the first electrode 3111 to the second electrode 3121. (S2=High). At the same time, other switches (S1, S3, S4, S5) are controlled so that the reference potential (Vref) is applied to the remaining electrodes (3111, 3112, 3113, and 3122) (S1, S3, S4, S5 = Low).

Then, at time t3, the third switch S3 is controlled so that the operating signal Vin is applied to the third electrode 3112 in order to move the droplet from the second electrode 3121 to the third electrode 3112. (S3=High). At the same time, other switches (S1, S2, S4, S5) are controlled so that the reference potential (Vref) is applied to the remaining electrodes (3111, 3113, 3121, and 3122) (S1, S2, S4, S5 = Low).

Then, at time t4, the fourth switch S4 is controlled so that the operating signal Vin is applied to the fourth electrode 3122 in order to move the droplet from the third electrode 3112 to the fourth electrode 3122. (S4=High). At the same time, other switches (S1, S2, S3, S5) are controlled so that the reference potential (Vref) is applied to the remaining electrodes (3111, 3112, 3113, and 3121) (S1, S2, S3, S5 = Low).

According to the operation of the droplet actuator 3100 described in FIGS. 36 and 37, the operating signal Vin is connected to the first electrode 3111, the second electrode 3121, the third electrode 3112, and the fourth electrode 3122. ) is applied sequentially to the surface of the first electrode 3111, the surface of the second electrode 3121, the surface of the third electrode 3112, and the surface of the fourth electrode 3122. It moves.

This has the following advantageous technical effects. Conventional droplet actuators are equipped with electrowetting electrodes only on the lower substrate, so when the droplet moves through the gap between adjacent electrodes during droplet manipulation, if the surface of the lower substrate is processed somewhat roughly, it cannot pass through the gap due to friction with the gap surface. There was a problem where it stopped in the middle.

On the other hand, according to the droplet actuator according to the present embodiment, when the droplet passes through the gap between adjacent electrodes, it moves to and passes in close contact with another electrode formed on the facing substrate, so the friction force between the droplet and the gap surface is reduced, and thus the substrate Even if the surface is processed somewhat roughly, droplets can move smoothly between electrodes.

In addition, because the substrate surface does not need to be processed very smoothly when manufacturing the substrate, the manufacturing process of the droplet actuator can be simplified and the overall production cost can be lowered.

In addition, unlike the case where electrodes are formed only on the lower substrate, even if the gap between adjacent electrodes is not very close, it can be moved to another electrode formed on the opposing substrate, so there is no difference in performance even if the precision of the manufacturing process of the droplet actuator is somewhat lowered. , thus lowering production costs.

Figures 38 and 39 illustrate exemplary electrowetting electrode arrangements of the droplet actuator described in Figure 33.

Figure 38 is a plan view of the electrowetting electrode arrangement in the form of an intersection where the path of the droplet diverges as seen from above the upper substrate of the droplet actuator.

Referring to FIG. 38, the first electrode 3111, the second electrode 3121, the third electrode 3112, and the fourth electrode 3122 are sequentially arranged in the direction in which the droplet travels. The first electrode 3111 and the third electrode 3112 may be electrodes formed on the lower substrate, and the second electrode 3121 and the fourth electrode 3122 may be electrodes formed on the upper substrate.

The fifth electrode 3113 and the sixth electrode 3114 are disposed next to the fourth electrode 3122. The fifth electrode 3113 and the sixth electrode 3114 are electrodes formed on the lower substrate and may be spaced apart from the third electrode 3112 with a gap therebetween. The fifth electrode 3113 and the sixth electrode 3114 may also be spaced apart from each other with a gap therebetween.

As one embodiment, the fourth electrode 3122 is the third electrode 3112, the fifth electrode 3113, and the sixth electrode 3114 when viewed from above the upper substrate (i.e., on the plan view of FIG. 38). and may overlap at least partially, respectively.

In the electrode arrangement of FIG. 38, the droplet 70 responds to sequentially applying an operating signal to each electrode 3111, 3121, 3112, and 3122, from the first electrode 3111 to the second electrode 3121 and the third electrode. It can move to the surface of the fourth electrode 3122 via the electrode 3112. And, in response to selectively applying an operation signal to the fifth electrode 3113 and/or the sixth electrode 3114, (i) moves over the fifth electrode 3113, or (ii) moves the sixth electrode 3114. ) may move upward, or (iii) may be split or spread over the fifth electrode 3113 and the sixth electrode 3114.

For example, after the droplet 70 is moved to the surface of the fourth electrode 3122, an operating signal is applied to the fifth electrode 3113 and a reference potential is applied to the remaining electrodes 3111, 3121, 3112, 3122, and 3114. When is applied, the droplet 70 moves over the fifth electrode 3113. Alternatively, after the droplet 70 is moved to the surface of the fourth electrode 3122, an operating signal is applied to the sixth electrode 3114 and a reference potential is applied to the remaining electrodes 3111, 3121, 3112, 3122, and 3113. When this happens, the droplet 70 moves onto the sixth electrode 3114. Alternatively, after the droplet 70 is moved to the surface of the fourth electrode 3122, an operating signal is applied to the fifth electrode 3113 and the sixth electrode 3114 and the remaining electrodes 3111, 3121, 3112, and 3122. When the reference potential is applied, the droplet 70 is split or spread over the fifth electrode 3113 and the sixth electrode 3114.

Figure 39 is a plan view from above of the upper substrate showing an example of applying the vertical electrode arrangement of the present invention to the reservoir area and distribution area of the droplet actuator.

Referring to FIG. 39, the first electrode 3111, the second electrode 3121, the third electrode 3112, the fourth electrode 3122, and the fifth electrode 3113 are sequentially formed in the direction from the reservoir area toward the fluid channel. ) is placed. The first electrode 3111, the third electrode 3112, and the fifth electrode 3113 may be electrodes formed on the lower substrate, and the second electrode 3121 and the fourth electrode 3122 may be electrodes formed on the upper substrate. there is.

At this time, the first electrode 3111 and the second electrode 3121 are reservoir electrodes that induce the flow of fluid in the reservoir, and the third electrode 3112, fourth electrode 3122, and fifth electrode 3113 may be a distribution electrode for distributing droplets from the reservoir and transferring them to the fluid channel.

The reservoir electrodes 3111 and 3121 may have a different size from the distribution electrodes 3112, 3122 and 3113, and the reservoir electrodes 3111 and 3121 are usually formed to have a larger size than the distribution electrodes 3112, 3122 and 3113. It is common. Figure 39 shows that the vertical electrode arrangement according to the present invention can be applied even when electrowetting electrodes of different sizes are mixed.

FIG. 40 is a diagram illustrating an exemplary stacked structure of the droplet actuator described in FIG. 33.

Referring to Figure 40, the droplet actuator 3100 having a stacked structure according to this embodiment includes a lower housing 3131, a heater 3132, a routing layer 3133, a lower substrate 3110, a dielectric layer 3134, and a hydrophobic layer. A lower plate on which a coating layer 3135 is sequentially laminated, and an upper plate on which a hydrophobic coating layer 3145, a dielectric layer 3144, an upper substrate 3120, a routing layer 3143, a heater 3142, and an upper housing 3141 are sequentially laminated. May include a plate. At this time, the upper plate and the lower plate may be spaced apart from each other to form a space between them to accommodate the droplets.

In the space, there may be a bonding 3151 that joins the upper plate and the lower plate, at least one filler 3152, and/or at least one sample 3153.

The lower housing 3131 is a component that forms the lower exterior of the droplet actuator 3100, protects the internal structure of the droplet actuator 3100, and serves as an interface for connecting the droplet actuator 3100 and an external device (e.g., a tester). provides. As an example, the lower housing 3131 may be made of polymer or plastic.

The heater 3132 is a component for heating the droplet inside the droplet actuator 3100 and may be a resistive heater, magnetic induction heater, or thermoelectric heater. .

The routing layer 3133 is an interconnection layer for electrically connecting the droplet actuator 3100 and an external device (e.g., a tester), and may be a layer including a contact pad pattern. . At this time, the contact pad is connected to a conductive element (eg, conductive polymer) of the lower substrate 3110 through a via. As an example, routing layer 3133 may be comprised of metal (eg, Ag, Au, Cu, Cr) and conductive polymer. As an embodiment, the routing layer 3133 may be formed by evaporation, sputtering, screen printing, inkjet printing, laser ablation, or an R2R process. You can.

The lower substrate 3110 is a layer on which the electrowetting electrode 3111 is formed, and electrically connects the routing layer 3133 and the electrowetting electrode 3111. The lower substrate 3110 may include a base and conductive plastic filled through the base. In one embodiment, the base may be comprised of polymer (eg, PMMA, PC, COP), ceramic, glass, or silicon. As an example, the lower substrate 3110 may be formed by injection molding, dispensing, screen printing, or 3D printing process.

Meanwhile, as an embodiment, the electrowetting electrode 3111 is an electrode for inducing electrowetting, and may be made of metal (e.g., Ag, Au, Cu, Cr) or a conductive polymer, and may be used for deposition, sputtering, It can be formed by screen printing, inkjet printing, laser ablation, or R2R process.

The dielectric layer 3134 is a layer formed on the lower substrate 3110 or the electrowetting electrode 3111 to provide electrical insulation to the lower substrate 3110 or the electrowetting electrode 3111, and is a thin film coating structure. You can. The dielectric layer 3134 may be made of various insulating materials such as SiO2, Si3N4, Parylene, fluoropolymer, SU8, or PDMS, and may be formed by spin, dip, spray, plasma, deposition, It may be formed by sputtering, ALD, CVD, or e-beam processes.

The hydrophobic coating layer 3135 is a layer for hydrophobicizing the surface of the dielectric layer 3134, and may have a thin film coating structure. The hydrophobic coating layer 3135 may be composed of a fluoropolymer and may be formed by spin, dip, spray, plasma, deposition, sputtering, ALD, CVD, or e-beam processes.

A gap spacer is formed between the hydrophobic coating layers 3135 and 3145 to form a gap.

The gap space is a space that accommodates droplets and filler fluid and is a space where the upper plate and the lower plate are connected. The gap space is formed by a spacer, and can be formed by bonding the spacer and the upper plate and/or lower plate by laser fusion, ultrasonic fusion, heat fusion, pressure fusion, or using an adhesive. The height of the gap space can be adjusted by spacers.

Meanwhile, the spacer may be a separate component distinct from the upper plate and lower plate, or may be included as a part of the upper plate or lower plate. In one embodiment, the spacer may be comprised of polymer.

In one embodiment, bonding 3151 may function as a spacer to form the gap space.

The hydrophobic coating layer 3145 is a layer for hydrophobicizing the surface of the dielectric layer 3144, and may have a thin film coating structure. The hydrophobic coating layer 3145 may be composed of a fluoropolymer and may be formed by spin, dip, spray, plasma, deposition, sputtering, ALD, CVD, or e-beam processes.

The dielectric layer 3144 is a layer formed on the upper substrate 3120 or the electrowetting electrode 3121 to provide electrical insulation to the upper substrate 3120 or the electrowetting electrode 3121, and has a thin film coating structure. It can be. The dielectric layer 3144 can be made of various insulating materials such as SiO2, Si3N4, Parylene, fluoropolymer, SU8, or PDMS, and can be used in spin, dip, spray, plasma, deposition, sputtering, ALD, CVD, or e-beam processes. can be formed by

The upper substrate 3120 is a layer on which the electrowetting electrode 3121 is formed, and electrically connects the routing layer 3143 and the electrowetting electrode 3121. The upper substrate 3120 may include a base and conductive plastic filled through the base. In one embodiment, the base may be comprised of polymer (eg, PMMA, PC, COP), ceramic, glass, or silicon. As an example, the upper substrate 3120 may be formed by injection molding, dispensing, screen printing, or 3D printing process.

Meanwhile, as an embodiment, the electrowetting electrode 3121 is an electrode for inducing electrowetting, and may be made of metal (e.g., Ag, Au, Cu, Cr) or a conductive polymer, and may be used for deposition, sputtering, It can be formed by screen printing, inkjet printing, laser ablation, or R2R process.

The routing layer 3143 is an interconnection layer for electrically connecting the droplet actuator 3100 and an external device (eg, a tester), and may be a layer including a contact pad pattern. At this time, the contact pad is connected to a conductive element (eg, conductive polymer) of the upper substrate 3120 through a via. As an example, routing layer 3143 may be comprised of metal (eg, Ag, Au, Cu, Cr) and conductive polymer. As an example, the routing layer 3143 may be formed by deposition, sputtering, screen printing, inkjet printing, laser ablation, or a R2R process.

The heater 3142 is a component for heating the droplet inside the droplet actuator 3100 and may be a resistance heater, a magnetic induction heater, or a thermoelectric heater.

The upper housing 3141 is a component that forms the upper exterior of the droplet actuator 3100, protects the internal structure of the droplet actuator 3100, and provides an interface that connects the droplet actuator 3100 and an external device (e.g., a tester). to provide. As an example, the upper housing 3131 may be made of polymer or plastic.

So far, various embodiments of the present invention and effects according to the embodiments have been mentioned with reference to the drawings. The effects according to the technical idea of the present invention are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the specification.

In the above, even though all the components constituting the embodiments of the present invention have been described as being combined or operated in combination, the technical idea of the present invention is not necessarily limited to these embodiments. That is, as long as it is within the scope of the purpose of the present invention, all of the components may be operated by selectively combining one or more of them.

Although embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical idea or essential features. I can understand that there is. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive. The scope of protection of the present invention shall be interpreted in accordance with the claims below, and all technical ideas within the equivalent scope shall be construed as being included in the scope of rights of the technical ideas defined by the present invention.

Claims (10)

a first substrate including a plurality of electrodes for handling droplets; and
A second substrate including a plurality of other electrodes that are distinct from the plurality of electrodes,
The first substrate and the second substrate are spaced apart from each other to define a space for the liquid droplet to move between the first substrate and the second substrate,
The plurality of electrodes include a first electrode and a third electrode,
The first electrode and the third electrode are spaced apart from each other with a first gap therebetween,
The plurality of other electrodes include a second electrode,
The second electrode is disposed at a position facing the first gap,
The droplet is,
In response to applying an actuation signal to the plurality of electrodes or to the plurality of other electrodes, sequentially to a first position on the first electrode, a second position on the second electrode, and a third position on the third electrode. moving,
Droplet actuator. According to claim 1,
The first electrode and the third electrode are,
Electrodes adjacent to each other among the plurality of electrodes,
Droplet actuator. According to claim 1,
The first electrode and the third electrode are,
Electrodes adjacent to each other among the plurality of electrodes,
Droplet actuator. According to clause 3,
When viewed from above the second substrate,
The second electrode overlaps with at least a portion of the first electrode and at least a portion of the third electrode, respectively.
Droplet actuator. According to claim 1,
Further comprising a switch circuit for selectively connecting the first electrode, the second electrode, or the third electrode to a signal line through which the operating signal is provided,
Droplet actuator. According to claim 1,
The first electrode, the second electrode, and the third electrode are sequentially connected to the signal line by operation of the switch circuit,
While one of the first electrode, the second electrode, and the third electrode is connected to the signal line, a reference potential is applied to the remaining electrodes,
Droplet actuator. According to claim 1,
The plurality of other electrodes further include a fourth electrode,
The second electrode and the fourth electrode are spaced apart from each other with a second gap therebetween,
The third electrode is disposed at a position facing the second gap,
When viewed from above the second substrate,
At least a portion of the second gap, at least a portion of the second electrode, and at least a portion of the fourth electrode overlap on the third electrode, respectively.
Droplet actuator. According to clause 7,
The plurality of electrodes further includes a fifth electrode and a sixth electrode,
The third electrode, the fifth electrode, and the sixth electrode are spaced apart from each other with a gap therebetween,
When viewed from above the second substrate,
The fourth electrode is at least partially overlapped with the third electrode, the fifth electrode, and the sixth electrode, respectively.
Droplet actuator. According to clause 8,
The droplet is,
After moving from a third position on the third electrode to a fourth position on the fourth electrode in response to applying an actuation signal to the plurality of electrodes or the plurality of other electrodes,
(i) move to a fifth position on the fifth electrode, or
(ii) move to a sixth position on the sixth electrode, or
(iii) split or spread into the fifth position and the sixth position,
Droplet actuator. According to claim 1,
According to claim 1,
The first electrode is a reservoir electrode,
The third electrode is an electrode for dispensing the droplets from the reservoir to the fluid channel,
Droplet actuator.