KR20240005707A - Stator for vacuum pump - Google Patents

Abstract

At least a portion of the stator 116 for the vacuum pump 100 includes a first wall 120 and one or more side walls 122 extending therefrom, wherein the first wall 120 and the one or more side walls 122 define an internal cavity. defining one or more side walls (122) and an outlet channel (124) formed through one of the one or more side walls (122), wherein the outlet channel (124) has an opening in the inner surface of the one or more side walls (122). 126 , the outlet channel 124 comprising an outlet channel 124 for allowing fluid to flow from the interior cavity to the outside of at least a portion of the stator 116 . The inner surface of the first wall 120 is continuous with the opening 126. Accordingly, liquid and particulate matter within at least a portion of the stator tend to flow out of the stator through the outlet channel 124 due to gravity.

Description

Stator for vacuum pump

The present invention relates to a stator for a vacuum pump and parts thereof.

Vacuum pumps are used in various technological processes to pump gases out of the process chamber and create low pressure conditions for the respective process.

Vacuum pumps are known to be vertically oriented. This tends to reduce the footprint of the vacuum pump compared to orienting the vacuum pump horizontally.

The inventors have realized that particulate matter, such as liquids and dust, may be present in fluids (e.g., gases) pumped by a vacuum pump. For some processes, this liquid and/or particulate material may be flammable, corrosive, or otherwise hazardous. Additionally, this liquid and/or particulate matter can interfere with the proper operation of the pump, such as by preventing the rotation of the pump rotor. As such, it is undesirable for this liquid and particulate matter to accumulate inside the pump.

Accordingly, a self-draining or manually draining vacuum pump stator is provided. Advantageously, liquid and other debris that collects within the pump stator tends to drain from the pump stator without the need for a sump or active liquid removal means to collect and remove the liquid.

In one aspect, at least a portion of a stator for a vacuum pump is provided, comprising: a first wall and one or more side walls extending upwardly from the first wall, the first wall and one or more side walls defining an interior cavity; at least one side wall, and an outlet channel formed through one of the one or more side walls, the outlet channel having an opening in an interior surface of one of the one or more side walls, the outlet channel allowing fluid to flow from the internal cavity to at least a portion of the stator. and an outlet channel for flowing outwardly. The inner surface of the first wall is continuous with the opening of the outlet channel. In other words, the opening of the outlet channel is flush with or below the height of the inner surface of the first wall. Accordingly, the liquid within at least a portion of the stator tends, due to gravity, to take particulate matter with it as it flows out of the stator through the outlet channel.

The lowermost point of the inner surface of the first wall may be continuous with the opening of the outlet channel. The effluent channel may extend from the opening of the outlet channel in a direction having a downwardly oriented component. The inner surface of the first wall may be inclined towards the opening or may be substantially flat. In other words, the inner surface of the first wall may be inclined downward in the direction of the opening.

The first wall may include one or more through bores, each of the one or more through bores being for receiving a respective rotor shaft.

The first wall may include an exterior surface opposite the interior surface, and the exterior surface of the first wall may include one or more recesses. The one or more recesses in the outer surface of the first wall are one or more selected from the group of recesses consisting of a loop-shaped groove for receiving an O-ring and a recess (which may be substantially cylindrical) configured to receive an insulating spacer. May include recesses.

In another aspect, a stator for a vacuum pump is provided, comprising a first stator portion that is a portion of the stator described in any of the preceding aspects, and a second stator portion. The second stator portion includes a second wall and one or more additional side walls extending downwardly from the second wall. One or more side walls of the first stator portion are attached to one or more additional side walls of the second stator portion, such that the first wall, the one or more side walls, the second wall and the one or more additional side walls define an interior chamber. The stator further includes an inlet channel formed through one of the one or more side walls or one or more additional side walls, the inlet channel for allowing fluid to flow from the outside of the stator into the interior chamber.

The second wall may include one or more through bores, each of the one or more through bores being for receiving a respective rotor shaft.

The second wall may include an exterior surface, and the exterior surface of the second wall may include one or more recesses. The one or more recesses on the outer surface of the second wall are one selected from the group of recesses consisting of a loop-shaped groove for receiving an O-ring and a recess (which may be substantially cylindrical) configured to receive an insulating spacer. It may include more than one recess.

The stator may further include a pressure relief valve disposed within the first or second wall. The stator may further include a channel formed in the first or second wall. The channel may include a first opening at a first end of the channel and a second opening at a second end of the channel. At least one of the first or second openings of the channel may be formed on an inner surface of the first or second wall. A pressure relief valve may be disposed within the channel.

In another aspect, comprising a stator as described in the preceding aspect, and one or more rotor shafts extending through an interior chamber of the stator between a first wall and a second wall, each rotor mounted on a respective one of the rotor shafts. A vacuum pump is provided.

One or more rotors may define an intake side of the inner chamber and an exhaust side of the inner chamber. The stator may further include a channel formed in the first or second wall. The channel may include a first opening at a first end of the channel and a second opening at a second end of the channel. The first opening of the channel may be formed in the inner surface of the first wall or the second wall on the outlet side of the internal chamber. The second opening of the channel may be formed in the inner surface of the first wall or the second wall on the suction side of the internal chamber. The vacuum pump may further include a pressure relief valve disposed within the channel.

The first wall may include an external surface, and one or more grooves may be formed in the external surface of the first wall. The vacuum pump includes a first O-ring and/or a first insulating spacer disposed in one or more recesses formed in the outer surface of the first wall, a first head plate for supporting one or more rotor shafts, and a first head plate for supporting one or more rotor shafts. The head plate is arranged against the external surface of the first wall and is arranged relative to the first O-ring and/or the first insulating spacer, such that the first head plate is spaced from the external surface of the first wall.

The second wall may include an outer surface, and one or more grooves may be formed in the outer surface of the second wall. The vacuum pump includes a second O-ring and/or a second insulating spacer disposed in one or more recesses formed in the outer surface of the second wall, a second head plate for supporting one or more rotor shafts, and a second head plate for supporting one or more rotor shafts. The head plate is disposed against the outer surface of the second wall and is disposed relative to the second O-ring and/or the second insulating spacer, such that the second head plate is spaced from the outer surface of the second wall.

1 is a schematic diagram (not to scale) of a side cross-section of a vacuum pump.
Figure 2 is a schematic diagram (not to scale) of the front cross-section of a vacuum pump.
Figure 3 is a schematic diagram (not to scale) showing a perspective view of the stator of a vacuum pump.
Figure 4 is a schematic diagram (not to scale) showing a cross-sectional perspective view of the stator.
Figure 5 is a schematic diagram (not to scale) of a perspective view of a first portion of the stator.
Figure 6 is a schematic diagram (not to scale) of a perspective view of a second portion of the stator.
Figure 7 is a schematic diagram (not to scale) of a perspective view of a second part of the stator.

Relative terms such as above and below, horizontal and vertical, top and bottom, front and rear, etc. are used herein merely for ease of reference to the drawings, and such terms are not limited as such, and are not intended to be limited in their true sense, such as above and below, It will be appreciated that any two different directions or positions other than horizontal and vertical, top and bottom, etc. may be implemented.

1 is a schematic diagram (not to scale) of a side cross-section of an embodiment of a vacuum pump 100.

2 is a schematic diagram (not to scale) of a front cross-section of the vacuum pump 100.

Vacuum pump 100 is a vertically oriented Roots-type vacuum pump.

The vacuum pump 100 includes a stator 102, a first rotor 104 mounted on the first rotor shaft 106, a second rotor 108 mounted on the second rotor shaft 110, and a first rotor 108. It includes a head plate 112 and a second head plate 114.

The stator 102 includes two parts: a first stator part 116 and a second stator part 118. Additional illustrations of stator 102 are provided in FIGS. 3 and 4. 3 is a schematic diagram (not to scale) showing a perspective view of the stator 102. Figure 4 is a schematic diagram (not to scale) showing a cross-sectional perspective view of the stator 102.

First stator portion 116 and second stator portion 118 may be considered bucket stators that are attached together to form stator 102.

First stator portion 116 includes a first wall 120 and one or more first side walls 122 extending from first wall 120 . First wall 120 may be considered the bottom wall or first end wall of stator 102. One or more first side walls 122 extend upwardly from first wall 120 . First wall 120 and one or more first side walls 122 define an interior cavity. First wall 120 and one or more first side walls 122 may be a single, integrated article.

First stator portion 116 further includes an outlet channel 124. Outlet channel 124 is the gas outlet of stator 102. Outlet channel 124 is formed through one or more first sidewalls 122 . Outlet channel 124 is the channel between first opening 126 and second opening 128. First openings 126 are on the interior surface of one or more side walls 122 . The second opening 128 may be located on an outer surface of one or more side walls 122 that is opposite an inner surface of the one or more side walls 122 . Preferably, the outlet channel 124 slopes downward from the first opening 126 to the second opening 128.

The interior surface 130 of the first wall 120 is continuous with the first opening 126 of the outlet channel 124. Preferably, the lowermost point of the inner surface 130 of the first wall 120 is continuous with the first opening 126. Preferably, the inner surface 130 of the first wall 120 slopes downward toward the first opening 126. Nonetheless, in some embodiments, interior surface 130 may be substantially flat.

The interior surface 130 of the first wall 120 may be considered to abut, share a boundary, join, connect, or coincide with the first opening 126 . When viewed from the side as in Figure 1, the lowermost surface 132 of the outlet channel 124 is substantially flush with the height 134 of the interior surface 130 of the first wall 120, or more preferably. It is located below it. Additionally, when viewed from the front as in FIG. 2, the inner surface 130 of the first wall 120 coincides with the perimeter of the first opening 126, or more preferably matches the perimeter of the first opening 126. It lies within the area bounded by .

In this embodiment, first wall 120 includes two through bores 136. Each through bore 136 receives one of a first rotor shaft 106 and a second rotor shaft 110 . In other words, the first and second rotor shafts 106, 110 pass through the first wall 120 through respective through bores 136. The first and second rotor shafts 106, 110 may be sealed against the first wall 120 (i.e., the wall of the through bore 136) by any suitable sealing means, such as a lip seal or labyrinth seal. there is.

In this embodiment, the outer surface 138 of the first wall 120 opposite the inner surface 130 of the first wall 120 includes a plurality of recesses. The outer surface 138 of the first wall 120 is more clearly visible in Figure 5, which is a schematic (not to scale) perspective view of the first stator portion 116 inverted.

More specifically, in this embodiment, the outer surface 138 of the first wall 120 includes a loop-shaped recess or groove 140. A loop-shaped groove 140 surrounds the through bore 136. The loop-shaped groove 140 may be located proximate the peripheral edge of the outer surface 138.

In this embodiment, the outer surface 138 of the first wall 120 includes a plurality of recesses 142 and is substantially cylindrical in this embodiment. In this embodiment, the recess 142 is disposed between the loop-shaped groove 140 and the edge portion of the outer surface 138.

Referring back to FIGS. 1 and 2 , in this embodiment, the first O-ring 144 is disposed in a loop-shaped groove 140 in the outer surface 138 of the first wall 120. First O-ring 144 may be made of any suitable material, such as polytetrafluoroethylene (PTFE). Preferably, the first O-ring 144 is made of an insulating material. Additionally, in this embodiment, the plurality of first spacers 146 are respectively disposed in the plurality of recesses 142. The first spacer 146 may be substantially cylindrical in shape. In this embodiment, the first spacer 146 is made of an insulating material, such as a ceramic material.

The first head plate 112 is positioned against or opposite the outer surface 138 of the first wall 120. The first head plate 112 is disposed relative to the first O-ring 144 and the first spacer 146. The first O-ring 144 and/or the first spacer 146 maintain the first head plate 112 spaced apart from the outer surface 138 of the first wall 120. Accordingly, a gap 148 (eg, an air gap) is provided between the stator 102 and the first head plate 112. The first O-ring 144 is between the stator 102 and the first head plate 112, that is, between the outer surface 138 of the first wall 120 and the opposing surface of the first head plate 112. Form a seal.

The first head plate 112 is configured to support the first and second rotor shafts 106 and 110 at their lower ends. The first head plate may be a conventional head plate. First head plate 112 may include a bearing and/or seal system to support rotor shafts 106, 110.

In this embodiment, one or more first side walls 122 include a first flange 150 at an end of the first side wall 122 opposite the first wall 120.

The second stator portion 118 includes a second wall 152 and one or more second side walls 154 extending from the second wall 152 . Second wall 152 may be considered a top wall or a second end wall of stator 102. One or more second side walls 154 extend downwardly from second wall 152 . Second wall 152 and one or more second side walls 154 define an interior cavity. Second wall 152 and one or more second side walls 154 may be a single, integrated article.

The second stator portion 118 further includes an inlet channel 155. Inlet channel 155 is the gas inlet of stator 102. Inlet channel 155 is formed through one or more second side walls 154.

In this embodiment, second wall 152 includes two through bores 156. Each through bore 156 receives a respective one or first rotor shaft 106 and a second rotor shaft 110. In other words, the first and second rotor shafts 106, 110 pass through the second wall 152 through respective through bores 156. The first and second rotor shafts 106, 110 may be sealed against the second wall 152 (i.e., the wall of the through bore 156) by any suitable sealing means, such as a lip seal or labyrinth seal. there is.

In this embodiment, the outer surface 158 of the second wall 152 includes a plurality of recesses. The outer surface 158 of the second wall 152 can be seen more clearly in Figures 6 and 7, which are schematic (not to scale) perspective views of the second stator portion 118.

More specifically, in this embodiment, the outer surface 158 of the second wall 152 includes a loop-shaped recess or groove 160. A loop-shaped groove 160 surrounds the through bore 156. The loop-shaped groove 160 may be located proximate the peripheral edge of the outer surface 158.

In this embodiment, the outer surface 158 of the second wall 152 includes a plurality of recesses 162 and is substantially cylindrical in this embodiment. In this embodiment, the recess 162 is disposed between the loop-shaped groove 160 and the edge portion of the outer surface 158.

Referring back to FIGS. 1 and 2 , in this embodiment, the second O-ring 164 is disposed in a loop-shaped groove 160 in the outer surface 158 of the second wall 152. The second O-ring 164 may be made of any suitable material, such as polytetrafluoroethylene (PTFE). Preferably, the second O-ring 164 is made of an insulating material. Additionally, in this embodiment, the plurality of second spacers 166 are respectively disposed in the plurality of recesses 162. The second spacer 166 may be substantially cylindrical in shape. In this embodiment, the second spacer 166 is made of an insulating material, such as a ceramic material.

The second head plate 114 is positioned against or opposite the outer surface 158 of the second wall 152. The second head plate 114 is disposed relative to the second O-ring 164 and the second spacer 166. The second O-ring 164 and/or the second spacer 166 maintain the second head plate 114 spaced apart from the outer surface 158 of the second wall 152. Accordingly, a gap 168 (eg, an air gap) is provided between the stator 102 and the second head plate 114. The second O-ring 164 is between the stator 102 and the second head plate 114, i.e. between the outer surface 158 of the second wall 152 and the opposing surface of the second head plate 114. Form a seal in

The second head plate 114 is configured to support the first and second rotor shafts 106 and 110 at the upper ends of these rotor shafts 106 and 110. The second head plate 114 may be a conventional head plate. The second head plate 114 may include a bearing and/or seal system to support the rotor shafts 106, 110.

In this embodiment, one or more of the second side walls 154 include a second flange 170 at an end of the second side wall 154 opposite the second wall 152.

1-4, in the assembled configuration, the second stator portion 118 is positioned on the first stator portion 116 such that the second flange 170 contacts the first flange 150. do. First stator portion 116 and second stator portion 118 are attached together by a plurality of fasteners (not shown) fastened through first and second flanges 150, 170.

The walls of the first stator portion 116 and the second stator portion 118, i.e., first wall 120, first side wall 122, second wall 152, and second side wall 154, define an internal cavity. or defines the chamber 171. Chamber 171 may also be referred to as a stator bore. This chamber 171 is the pumping chamber of the vacuum pump 100. Rotors 104 and 108 are located within chamber 171.

In operation, one or more motors (not shown) drive rotor shafts 106, 110, causing rotors 104, 108 to rotate about parallel axes in chamber 171. This rotation of rotors 104, 108 draws gas through inlet 155 into suction side 172 of chamber 171, as indicated by arrow and reference numeral 174 in FIG. Continued rotation of the rotors 104 and 108 moves the gas from the suction side 172 of the chamber 171 to the discharge side 176 of the chamber 171, as indicated by arrow and reference numeral 178 in FIG. . Continued rotation of the rotors 104 and 108 moves the gases from the discharge side 176 of the chamber 171 out of the outlet 124, as indicated by the arrow and reference numeral 180 in FIG.

Accordingly, the rotors 104, 108 can be considered to divide the chamber 171 into an intake side 172 (where the inlet 155 is located) and an discharge side 176 (where the outlet 124 is located). there is.

The fluid (eg, gas) pumped by vacuum pump 100 may contain or carry with it liquid and/or particulate matter such as dust. Additionally, the pumped fluid may condense on surfaces within chamber 171. Such liquid and/or particulate matter tends to fall to the bottom of the pumping chamber 171 by gravity and may collect on the interior surface 130 of the first wall. Advantageously, the interior surface 130 of the first wall 120, which is continuous with the first opening 126 of the outlet channel 124, allows liquid and/or particulate matter to flow out of the pumping chamber through the outlet 124. There is a tendency to provide it so that it can be moved. Such discharge of liquid and/or removal of particulate matter from the chamber 171 may be accomplished such that the lowermost point of the interior surface 130 is continuous with the first opening 126 and/or the interior surface 130 is adjacent to the first opening 126. This tends to be further facilitated by a downward slope towards (126).

Accordingly, advantageously, the accumulation of potentially flammable, corrosive or other hazardous liquids and/or particulate matter within the pumping chamber 171 tends to be reduced or eliminated. Additionally, the impedance of the rotors 104, 108, for example due to liquid and/or particulate matter, tends to be reduced or eliminated. Therefore, the pumping efficiency of the pump tends to improve.

Advantageously, the spatial separation of the stator 102 and the head plates 112, 114 by the O-rings 144, 164 and the spacers 146, 166 (i.e., the stator 102 and the head plates 112, 114 ) The presence of gaps 148 and 168 between the stator 102 and the head plates 112 and 114 tends to reduce heat transfer. Accordingly, in embodiments where the temperature of the stator 102 is relatively high, the temperature of the head plate can nevertheless be maintained relatively low. For example, in some implementations, the temperature of stator 102 may be about 200°C and the temperature of headplates 112, 114 may be about 100°C. This advantageously tends to improve the operation of the vacuum pump 100 .

In this embodiment, the second stator portion 118 further includes a channel 182 formed in the second wall 152. Channel 182 extends between first opening 184 and second opening 186.

In this embodiment, the first opening 184 is formed in the interior surface 188 of the second wall 152, with the interior surface 188 being opposite the exterior surface 158. The first opening 184 is located on the discharge side 176 of the chamber 171.

In this embodiment, the second opening 186 is formed in the interior surface 188 of the second wall 152. The second opening 186 is located on the suction side 172 of the chamber 171.

In this embodiment, the pressure relief valve 190 is disposed within the channel 182 between the first openings 184, 186 and the second openings 187. In this embodiment, pressure relief valve 190 is configured to prevent flow of fluid through channel 182 if the pressure difference across pressure relief valve 190 is less than a predetermined threshold. Additionally, pressure relief valve 190 is configured to allow flow of fluid through channel 182 when the pressure difference across pressure relief valve 190 is greater than or equal to a predetermined threshold.

Therefore, in this embodiment, during operation, the pressure difference across the pressure relief valve 190, i.e., between the discharge side 176 of chamber 171 and the suction side 172 of chamber 171, is If greater than or equal to the predetermined threshold, the pressure relief valve 190 causes the pumped fluid to flow from the discharge side 176 of the chamber 171 through the channel 182 to the suction side 172 of the chamber 171. It is open. This advantageously tends to reduce the pressure difference between the discharge side 176 and the suction side 172. In other words, the pressure difference across the rotors 104 and 108 is reduced. Accordingly, the risk of damage to the rotors 104 and 108 tends to be reduced.

Advantageously, the channel 182 fluidly connected between the discharge side 176 and the suction side 172 tends to reduce the pressure difference between the discharge side 176 and the suction side 172 more quickly. . Nevertheless, in some embodiments, channel 182 may be fluidly coupled between pumping chamber 171 (e.g., discharge side 176 of chamber 171) and the external environment of pump 100. there is.

The pressure relief valve 190 is located or received within the stator 102, in particular, in this embodiment, within the second wall 152 of the stator 102. Pressure relief valve 190 may be integral with stator 102 or may be considered integrated within the stator. In use, the temperature of the stator 102 tends to be relatively high compared to, for example, the temperature of the head plates 112 and 114. For example, in some implementations, the temperature of stator 102 may be about 200°C and the temperature of headplates 112, 114 may be about 100°C. The relatively high temperature of stator 102 tends to reduce or eliminate condensation of the pumped fluid within channels 182. This advantageously tends to reduce or eliminate condensation which would interfere with the operation of the pressure relief valve 190.

In this embodiment, the pressure relief valve 190 is located within a housing that is removable from the stator through an opening in the side of the second end wall 152. This tends to facilitate inspection, maintenance, service and/or repair of the pressure relief valve 190.

Advantageously, by locating the pressure relief valve 190 at the top of the stator, i.e., on the top wall, any particulate matter or fluid entering the channel 182 will flow into the channel 182 (i.e., the pressure relief valve) rather than accumulating. tends to fall out of the duct.

In some embodiments, channel 182 is a multiple branch (e.g., two-branch channel) having a plurality of first openings (or inlets) and/or a plurality of second openings (or outlets). In some embodiments, multiple pressure relief valves may be located in the channel.

In this embodiment, the vacuum pump is a vertically oriented Roots-type vacuum pump. However, in other embodiments, the vacuum pump is a different type of vacuum pump. For example, a vacuum pump can have any number of stages, pumping chambers, rotors, and rotor shafts.

In this embodiment, the stator is formed from two parts that are attached together to form the stator. However, in other embodiments, the stator is formed from a different number of parts, such as only a single part or two or more parts attached together to form the stator.

In this embodiment, the inlet is formed in the second stator portion. However, in other embodiments, the inlet is located in a different stator portion, such as the first stator portion. In some embodiments, the inlet is formed through multiple different stator components.

In this embodiment, the two head plates are spaced apart from the stator. However, in other embodiments, the one or more head plates are not spaced apart from the stator. For example, one or more head plates may be in contact with the stator or may be integral with the stator.

In this embodiment, the second stator portion includes a channel in which the pressure relief valve is located. However, in other embodiments, the channel and the pressure relief valve located therein may be disposed in a different portion of the stator, such as a first stator portion, such as the first wall. In some embodiments, the channel and pressure relief valve therein may be omitted.

In this embodiment, the outlet is formed in the first stator portion. However, in other embodiments, the outlet is located in a different stator portion, such as a second stator portion. In some embodiments, the outlet is formed through multiple different stator portions.

100: vacuum pump
102: Stator
104: first rotor
106: first rotor shaft
108: second rotor
110: second rotor shaft
112: first head plate
114: 2nd head plate
116: first stator part
118: second stator part
120: first wall
122: first side wall
124: outlet channel
126: first opening
128: second opening
130: inner surface
132: lowest surface
134: height
136: through bore
138: external surface
140: loop-shaped groove
142: recess
144: first O-ring
146: first spacer
148: gap
150: first flange
152: second wall
154: second side wall
155: inlet channel
156: Through bore
158: external surface
160: loop-shaped groove
162: recess
164: second O-ring
166: second spacer
168: gap
170: second flange
171: chamber
172: suction side
174: Gas flow direction on suction side
176: discharge side
178: Gas flow direction
180: Exhaust gas flow direction
182: channel
184: first opening
186: second opening
188: inner surface
190: pressure relief valve

Claims (17)

In at least a portion of the stator for a vacuum pump,
the first wall,
one or more side walls extending upwardly from the first wall, the first wall and the one or more side walls defining an interior cavity;
An outlet channel formed through one of the one or more side walls, the outlet channel having an opening in an interior surface of the one of the one or more side walls, the outlet channel allowing fluid to flow from the interior cavity to the stator. comprising an outlet channel for directing at least a portion of the flow outward;
The inner surface of the first wall is continuous with the opening of the outlet channel.
At least part of a stator for a vacuum pump. According to claim 1,
The lowermost point of the inner surface of the first wall is continuous with the opening of the outlet channel.
At least part of a stator for a vacuum pump. The method of claim 1 or 2,
The outlet channel extends in a direction having a downwardly oriented component from an opening of the outlet channel.
At least part of a stator for a vacuum pump. The method according to any one of claims 1 to 3,
The interior surface of the first wall is inclined toward the opening or is substantially flat.
At least part of a stator for a vacuum pump. The method according to any one of claims 1 to 4,
wherein the first wall includes one or more through bores, each of the one or more through bores for receiving a respective rotor shaft.
At least part of a stator for a vacuum pump. The method according to any one of claims 1 to 5,
wherein the first wall includes an outer surface opposite the inner surface, and the outer surface of the first wall includes one or more recesses.
At least part of a stator for a vacuum pump. According to claim 6,
The one or more recesses in the outer surface of the first wall include one or more recesses selected from the group of recesses constituting a loop-shaped groove for receiving an O-ring and a recess configured to receive an insulating spacer.
At least part of a stator for a vacuum pump. In the stator for a vacuum pump,
a first stator portion that is part of the stator according to any one of claims 1 to 7;
A second stator portion comprising:
a second wall,
comprising at least one additional side wall extending downwardly from the second wall,
One or more side walls of the first stator portion are attached to one or more additional side walls of the second stator portion, such that the first wall, the one or more side walls, the second wall and the one or more additional side walls define an interior chamber. limited,
The stator further includes an inlet channel formed through one of the one or more side walls or the one or more additional side walls, the inlet channel for allowing fluid to flow from the outside of the stator into the interior chamber.
Stator for vacuum pump. According to claim 8,
wherein the second wall includes one or more through bores, each of the one or more through bores for receiving a respective rotor shaft.
Stator for vacuum pump. According to claim 8 or 9,
wherein the second wall includes an exterior surface, and the exterior surface of the second wall includes one or more recesses.
Stator for vacuum pump. According to claim 10,
The one or more recesses in the outer surface of the second wall include one or more recesses selected from the group of recesses constituting a loop-shaped groove for receiving an O-ring and a recess configured to receive an insulating spacer.
Stator for vacuum pump. The method according to any one of claims 8 to 11,
The stator further includes a pressure relief valve disposed within the first wall or the second wall.
Stator for vacuum pump. According to claim 12,
The stator further includes a channel formed in the first wall or the second wall,
the channel includes a first opening at a first end of the channel and a second opening at a second end of the channel,
At least one of the first opening or the second opening of the channel is formed on an inner surface of the first wall or the second wall,
The pressure relief valve is disposed within the channel
Stator for vacuum pump. In the vacuum pump,
The stator according to any one of claims 8 to 13,
one or more rotor shafts extending through an interior chamber of the stator between the first wall and the second wall;
comprising one or more rotors each mounted on each one of the rotor shafts
Vacuum pump. According to claim 14,
the one or more rotors define a suction side of the inner chamber and an discharge side of the inner chamber,
The stator further includes a channel formed in the first wall or the second wall,
the channel includes a first opening at a first end of the channel and a second opening at a second end of the channel,
The first opening of the channel is formed in the inner surface of the first wall or the second wall at the discharge side of the inner chamber,
a second opening of the channel is formed in the first wall or an inner surface of the second wall on a suction side of the internal chamber,
The vacuum pump further includes a pressure relief valve disposed within the channel.
Vacuum pump. The method of claim 14 or 15,
The first wall includes an outer surface, and one or more grooves are formed on the outer surface of the first wall,
The vacuum pump is,
a first O-ring and/or a first insulating spacer disposed in one or more recesses formed in the outer surface of the first wall;
A first head plate for supporting the one or more rotor shafts, the first head plate being disposed against an outer surface of the first wall and relative to the first O-ring and/or the first insulating spacer. and, accordingly, the first head plate further includes the first head plate spaced apart from the outer surface of the first wall.
Vacuum pump. The method according to any one of claims 14 to 16,
wherein the second wall includes an outer surface, wherein one or more recesses are formed on the outer surface of the second wall,
The vacuum pump is,
a second O-ring and/or a second insulating spacer disposed in one or more recesses formed in the outer surface of the second wall;
a second head plate for supporting the one or more rotor shafts, the second head plate being disposed against an outer surface of the second wall and relative to the second O-ring and/or the second insulating spacer; , whereby the second head plate is spaced apart from the outer surface of the second wall, further comprising a second head plate.
Vacuum pump.