KR20230173833A - Optical device and scan type edge exposure system comprising the optical device - Google Patents

Abstract

This specification describes a first barrel including one or more first lenses on the inside, a first photographing means located at the top of the first barrel and capturing an image incident from an inspection object through the first lens, and the first barrel and the inside. A second barrel connected to the first barrel and extending in a different direction and including one or more second lenses on the inside, and a second photographing means connected to the second barrel and capturing an image incident from the inspection object through the second lens. (However, the second lens has a lower magnification than the first lens), is disposed inside the first barrel, and allows part of the light reflected from the inspection object to pass through to reach the first imaging means, while the other part is reflected to the second barrel. a first beam sprinter that directs the light toward the light, a second beam sprinter that is disposed inside the second barrel and passes a part of the light reflected from the first beam sprinter to reach the second photographing means and reflects the other part, and a second beam sprinter that passes through the second barrel. An optical device including a spectroscope that is connected and receives light reflected through a second beam sprinter to analyze optical characteristics, and a scan-type peripheral exposure system including the same are provided.

Description

Optical device and scan type edge exposure system comprising the optical device}

The present invention relates to an optical device for inspecting an inspection object by irradiating light thereto, and a scan-type peripheral exposure system including the optical device.

The scan-type peripheral exposure system currently used in the production process of 10.5 generation (large-sized) displays requires high-speed production and smart manufacturing. Here, smart manufacturing involves predicting defects and improving processes, or implementing a system to enable quick response when defects occur.

The optical device described in Korean Patent No. 2361925 provides a convergence optical system that can inspect three areas of pattern, exposure quality, and spectral characteristics by linking with the above-described scan-type peripheral exposure system 100. This optical device was able to inspect a total of three areas (① pattern, ② exposure quality, and ③ spectral characteristics) with a single optical system, and was also able to link and synchronize them with a scan-type peripheral exposure system.

This optical device determines whether the display panel is defective by using the captured image and the analyzed spectral characteristics of the optical system, and accumulates sufficient data on various defects, such as captured image data and analyzed optical system analysis characteristic data, to increase future inspection efficiency. It could be used to predict defective processes.

However, since the above-mentioned optical device can capture the image of the display panel using light passing through one vertically arranged objective lens and a concave lens and a camera placed on the same axis as the lenses, the exposure pattern When measuring panel defects, it became necessary to measure line widths in micro units and check pattern defects at the same time.

The present invention provides an optical device that simultaneously inspects patterns, exposure quality, and spectral characteristics in conjunction with a scan-type peripheral exposure system, and a scan-type peripheral exposure system including the optical device.

In addition, the present invention provides an optical device that measures the line width in micro units and simultaneously detects pattern defects when measuring exposure patterns and panel defects, and a scan-type peripheral exposure system including the optical device.

In order to achieve the above object, the present specification provides a first barrel including one or more first lenses on the inside, a first barrel located at the top of the first barrel and capturing an image incident from an inspection object through the first lens. Imaging means, a second barrel connected to the inside of the first barrel, extending in a direction different from the first barrel and including one or more second lenses on the inside, connected to the second barrel and receiving light from the inspection object through the second lens A second photographing means for photographing an image (however, the second lens has a lower magnification than the first lens), which is disposed inside the first barrel and allows part of the light reflected from the inspection object to pass through to reach the first photographing means. a first beam sprinter that reflects some of the light and directs it to the second barrel, and a second beam disposed inside the second barrel that allows part of the light reflected from the first beam sprinter to pass through to reach the second photographing means and reflects the other part. An optical device including a two-beam sprinter and a spectrometer connected to the second barrel and analyzing optical characteristics by receiving light reflected through the second beam sprinter, and a scan-type peripheral exposure system including the same are provided.

An optical device according to an embodiment of the present invention and a scan-type peripheral exposure system including the optical device can simultaneously inspect patterns, exposure quality, and spectral characteristics in conjunction with a scan-type peripheral exposure system.

In addition, the optical device according to an embodiment of the present invention and the scan-type peripheral exposure system including the optical device can measure line widths in micro units and simultaneously process pattern defects when measuring exposure patterns and panel defects. can

1 is a conceptual diagram of a scan-type peripheral exposure system including an optical device according to an embodiment.
Figure 2 is a perspective view of an optical device according to one embodiment.
FIGS. 3A and 3B are cross-sectional views of the optical device on planes A and B of FIG. 2.
Figures 4 and 5 are perspective views of the side lighting device of Figure 2.
Figure 6 is a cross-sectional view of the side lighting device of Figure 2.
Figures 7 and 8 show line width and defect measurement images measured by the optical device of Figure 2.

Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. First, when adding reference signs to components in each drawing, it should be noted that the same components are given the same reference numerals as much as possible even if they are shown in different drawings. Additionally, if it is judged that it may obscure the gist of the present invention, the detailed description will be omitted. In addition, embodiments of the present invention will be described below, but of course, the technical idea of the present invention is not limited or limited thereto and can be practiced by those skilled in the art.

Although embodiments have been described above with reference to the drawings, the present invention is not limited thereto.

1 is a conceptual diagram of a scan-type peripheral exposure system including an optical device according to an embodiment.

Referring to FIG. 1, the scan-type main surface exposure system 100 includes an optical device 110 that irradiates light to the inspection object 10 and inspects multiple surfaces up to a certain range on the surface and interior of the inspection object 10, and It includes a guide rail 120 that moves the inspection object 10 in a certain direction.

The lighting device 150 included in the optical device 110 according to one embodiment can adjust the light distribution of the light source that irradiates light to the inspection object 10, as will be described later. Accordingly, the optical device 110 can inspect various surfaces of the product and a certain range of interior surfaces.

Additionally, when this optical device 110 is applied to panel patterning inspection and exposure quality inspection of a glass substrate coated with photoresist in an edge exosure process around a display, the light distribution of the light source can be varied.

Figure 2 is a perspective view of an optical device according to one embodiment. FIGS. 3A and 3B are cross-sectional views of the optical device of FIG. 2 in different directions.

Referring to FIG. 2, the optical device 110 according to one embodiment includes a first barrel 170a including one or more first lenses 140a on the inside, located at the top of the first barrel 170a, and inspecting the object. A first photographing means 130 for capturing an image incident through the first lens 140a from (10), is connected on the inside to the first lens barrel 170a and extends in a different direction from the first lens barrel 170a. and a second barrel 170b including one or more second lenses 140b on the inside, connected to the second barrel 170b and capturing an image incident from the inspection object 10 through the second lens 140b. It includes a second photographing means 160. At this time, the second lens 140b has a lower magnification than the first lens 140a.

The optical device 110 is disposed inside the first barrel 170a and passes a part of the light reflected from the inspection object 10 to reach the first photographing means 130, and reflects the other part to the second barrel 170a. A first beam sprinter 172 directed to (170b), and disposed inside the second barrel 170b, allow part of the light reflected from the first beam sprinter 172 to pass through to reach the second photographing means 160. and a second beam printer 176 that reflects some of the other beams.

The optical device 110 is connected to the second barrel 170b and includes a spectrometer 180 that receives light reflected through the second beam sprinter 176 and analyzes optical characteristics.

One or more lenses 140a may include an objective lens 142 and a tube lens 144. The tube lens 144 may include a convex lens and a concave lens. One or more second lenses 140b may include a lens that removes perspective distortion and has a magnification relatively lower than that of the objective lens 142, for example, a telecentric lens (Telecentric lens) 146. For example, the objective lens 142 has a magnification of approximately 50×. Since the second photographing means 160 uses the telecentric lens 146, it is possible to photograph the inspection object 10 of the same size regardless of the distance from the telecentric lens 146.

The first photographing means 130 captures an image that passes through the high-magnification objective lens 142 and thus can provide an image used to measure line width in micro units. The second photographing means 160 captures an image that passes through the telecentric lens 146 from which perspective distortion is removed, thereby providing an image used to accurately measure pattern defects.

In addition, the first photographing means 130 captures an image while maintaining the first beam sprint 172 for the objective lens 142 with a long work distance, but exposure is performed for the objective lens 142 with a short work distance. During inspection, the first photographing means 130 can capture images after removing the first beam sprint 172 through equipment control. In other words, the first beam sprint 172 can be inserted into or removed from the opening (not shown) of the first barrel 170a manually or by a mechanical device.

The optical device 110 includes a first photographing means 130 and a second photographing means 160 capable of photographing an image incident from the inspection object 10 through the first lens 140 and a variable light distribution of the light source. A pattern exposure quality inspection optical system is configured to perform panel patterning inspection and exposure quality inspection of a glass substrate coated with photoresist in the edge exosure process around the display using the side lighting device 150.

The first beam sprinter 172 is disposed inside the first barrel 170a of the optical device 110 at a specific angle, for example, 45 degrees, and branches off a portion of the reflected light to provide it to the second barrel 170b. .

The second beam sprinter 176 is disposed inside the second barrel 170b at a specific angle, for example, 45 degrees, and passes a part of the light reflected from the first beam sprinter 172 to the second photographing means 160. Some reach, and others reflect.

The spectroscope 180 is connected to the second barrel 170b at a specific angle, for example, in the vertical direction, and can analyze optical characteristics by receiving light reflected through the second beam sprinter 176. The spectrometer 180 may include an optical fiber 182 connected to the second barrel 170b and a spectrometer (not shown) that analyzes spectral characteristics by analyzing image information received from the optical fiber 182.

The spectrometer 180 may include at least one lens (not shown) that transmits light diverged from the second beam sprinter 176 in the direction of the spectrometer. The lens (not shown) may be a tube lens or an objective lens applied to large-area display equipment.

Since the scan-type peripheral exposure system 100 analyzes this spectral characteristic, the spectrometer 180 provides important data for determining the height of the liquid crystal during the next process, for example, the liquid crystal cell process. The scan-type peripheral exposure system 100 can shorten the process time and minimize defective elements by transmitting data required for the next process at the same time as transmitting the image.

The optical device 110 is a spectroscopic imaging optical system that can analyze the spectral characteristics of a glass substrate coated with photoresist in the edge exosure process around the display using the first beam printer 172 and the spectrometer 180. constitutes.

The optical device 110 includes a side illumination device 150 located on the side of the first barrel 170a and irradiating light to the inspection object 10.

In addition, the optical device 110 is connected from the side of the first barrel 170a to the inside of the first barrel 170a and includes a coaxial lighting device 190 and a coaxial lighting device ( It may additionally include a mirror 174 that reflects the light emitted from 190) to the lower end of the first barrel 170a.

The emission wavelength of the side lighting device 150 and the emission wavelength of the coaxial lighting device 190 may be the same. For example, the side lighting device 150 and the coaxial lighting device 190 may emit white light including red, green, and blue.

Meanwhile, the emission wavelength of the side lighting device 150 and the emission wavelength of the coaxial lighting device 190 may be different from each other. For example, the side lighting device 150 and the coaxial lighting device 190 can be combined with red and white depending on the environment. For example, the side lighting device 150 may emit red wavelength light, and the coaxial lighting device 190 may emit white light.

Meanwhile, if the optical device 110 has only the side illumination device 150, only red may be used to accurately obtain an image.

When the emission wavelength of the side lighting device 150 and the coaxial lighting device 190 are different, one of the two may emit infrared rays and the other may emit visible light. In this case, infrared rays are reflected from the inner surface of the inspection object 10 and visible rays are reflected from the surface of the inspection object 10, so that the optical device 110 can analyze a three-dimensional image such as the thickness of the inspection object 10. You can also provide data.

Hereinafter, the side lighting device 150 of FIG. 2 will be described with reference to FIGS. 4 and 5. This side lighting device 150 can be used as the side lighting device 50 of the optical device 110 of FIG. 2, but can also be installed separately in other optical devices, other lighting devices, display inspection equipment, etc.

Figures 4 and 5 are perspective views of the side lighting device of Figure 2.

Referring to FIGS. 4 and 5 , the side lighting device 150 according to another embodiment irradiates light to the inspection object 10 as shown in FIG. 1 .

The side lighting device 150 includes a main body 210 including a first hole 212 and a second hole 214 located on the opposite side of the first hole 212 and through which light is irradiated to the inspection object. ) and a light source unit 220 that irradiates light through the second hole 214, and a reflection unit 230 that is accommodated inside the main body 210 and adjusts the light distribution of the light source of the light source unit 220. .

The side lighting device 150 may be a variable lighting device that adjusts the light distribution of the light source of the light source unit 220 using the reflector 230.

The main body 210 has a cylindrical shape, but is not limited thereto and may have any shape as long as it can accommodate the light source unit 220 and the reflection unit 230. The main body 210 has an overall cylindrical shape, and the radius of the first hole 212 is smaller than the radius of the cylinder of the main body. The exterior of the side lighting device 150 shown in FIG. 2 is shown as a rectangular parallelepiped. The side lighting device 150 of FIG. 2 includes a cylindrical body 210 of FIGS. 4 and 6 on a cover (not shown) of the rectangular parallelepiped. It is a built-in structure.

The reflection unit 230 has a variable angle of the reflection surface, reflects the light emitted from the light source unit 220, and directs it to the inspection object.

The light source unit 220 includes two or more LED light sources 222 arranged concentrically in the cylindrical body 210. The LED light sources 222 include a PCB (not shown). The LED light sources 222 can emit light of various wavelengths.

The reflector 230 includes two or more reflectors 232 arranged concentrically on the inner surface 216 of the cylindrical body 210.

The side lighting device 150 is coupled to the inner surface 216 of the cylindrical main body 210 and contacts the reflectors 232, and is in contact with the first hole direction and the second along the inner surface 216 of the main body 210. It further includes a fixing device 240 that rises or falls in the direction of the second hole to adjust the angle of the reflectors 232.

Each of the reflectors 232 may rotate concentrically with the inner surface 216 of the cylindrical body 210. As the fixing device 240 rises or falls along the inner surface 216 of the main body 210, each of the reflectors 232 can be rotated on its axis to adjust the angle of the reflectors 232.

As the fixing device 240 rises or falls along the inner surface 216 of the main body 210, each of the reflectors 232 can be rotated on its axis to adjust the angle of the reflectors 232.

As shown in FIG. 6, as the fixture 240 rises along the inner surface 216 of the main body 210, each of the reflectors 232 rotates in a certain direction so that the reflecting surface is relatively more inclined. do. Accordingly, the irradiation area of the light emitted from the LED light source 222 becomes narrow.

As the fixture 240 descends along the inner surface 216 of the main body 210, each of the reflectors 232 rotates in the opposite direction so that the reflecting surfaces of the reflectors 232 become relatively erect. Accordingly, the irradiation area of the light emitted from the LED light source 222 becomes wider.

The scan-type peripheral exposure system 100 described above with reference to FIG. 1 may include the side illumination device 150 described with reference to FIGS. 4 to 6 .

The scan-type peripheral exposure system 100 including the side illumination device 150 can inspect multiple surfaces of a product up to a certain extent on the surface and inside. For example, the scan-type peripheral exposure system 100 including the side illumination device 150 can inspect the surface of a three-dimensional object such as a cube, including the front cross-section and the side surface, and can check labeling defects, etc., making it highly efficient. Inspection is possible.

The optical device 110 works in conjunction with the scan-type peripheral exposure system 100 to provide a convergence optical system that can inspect three areas: pattern, exposure quality, and spectral characteristics. The optical device 110 can not only inspect a total of three areas (① pattern ② exposure quality ③ spectral characteristics) with a single optical system, but can also be linked and synchronized with the scan-type peripheral exposure system 100.

In addition, the scan-type peripheral exposure system 100 including the optical device 110 according to one embodiment further includes a computer system, determines the luminance difference of the image captured by the first photographing means 130, and spectroscope Using the spectral characteristics of the optical system analyzed by the panel, it is determined whether the panel is defective through patterning inspection, exposure quality inspection, and spectral characteristics inspection of the panel, which is the inspection object 10, and image data captured by the first photographing means 130 and By sufficiently accumulating various defect data, such as image data captured by the second photographing means 160 and optical system analysis characteristic data analyzed by the spectroscope 180, it can be used to increase future inspection efficiency and predict defect processes. Through this, it is possible to quickly identify defects that occur in the edge exosure process and improve the process.

FIG. 7 is an image used to measure the line width in micro units (e.g., 200um) by capturing an image incident through the objective lens 142 by the first photographing means 130, and FIG. 8 is an image used to measure the line width in micro units (eg, 200um), and FIG. ), the image that passes through the telecentric lens 146 is captured, so it is an image used to accurately measure pattern defects, for example, the pattern of the array of pixels of the display panel.

The optical device described in the above-mentioned Korean Patent No. 2361925 has only one imaging path between the inspection object 10 and the photographing means 130 corresponding to the first photographing means 130. On the other hand, the optical device 110 according to an embodiment of the present invention has a photographing path between the inspection object 10 and the first photographing means 130 and a photographing path between the inspection object 10 and the second photographing means 160. Since there is a shooting path, lenses suitable for each purpose are placed in each of the two shooting paths, so that it is possible to measure the line width in micro units and accurately measure pattern defects at the same time.

In addition, the optical device 110 according to an embodiment of the present invention measures the spectral characteristics of the audit object 10 by connecting the spectrometer 180 to one of the two photographing paths. The overall structure can be simplified by connecting the spectrometer 180 to .

That is, the optical device 110 according to an embodiment of the present invention and the scan-type peripheral exposure system 100 including the optical device 110, as shown in FIGS. 7 and 8, have exposure patterns and panel defects. When measuring, the line width in micro units can be measured and pattern defects can be checked at the same time.

Above, the preferred embodiments of the present invention have been described in detail, but the technical scope of the present invention is not limited to the above-described embodiments and should be interpreted in accordance with the scope of the patent claims. At this time, those skilled in the art should consider that many modifications and variations are possible without departing from the scope of the present invention.

Claims (6)

A first barrel including one or more first lenses on the inside;
a first photographing means located at the top of the first barrel and photographing an image incident from an inspection object through the first lens;
a second barrel connected on the inside to the first barrel, extending in a direction different from the first barrel, and including one or more second lenses on the inside;
a second photographing means connected to the second barrel and photographing an image incident from the inspection object through the second lens, provided that the second lens has a lower magnification than the first lens;
a first beam sprinter disposed inside the first barrel and allowing part of the light reflected from the inspection object to pass through to reach the first photographing means, and reflecting the other part to direct it to the second barrel;
A second beam printer disposed inside the second barrel and allowing part of the light reflected from the first beam printer to pass through to reach the second photographing means and reflecting the other part; And
An optical device connected to the second barrel and comprising a spectrometer that receives light reflected through the second beam sprinter and analyzes optical characteristics. According to paragraph 1,
The at least one first lens includes an objective lens and a tube lens, and the at least one second lens includes a telecentric lens. According to paragraph 2,
An optical device in which the first photographing means provides an image used to measure line width in micro units, and the second photographing means provides an image used to measure pattern defects. According to paragraph 1,
The spectrometer is an optical device including an optical fiber connected to the second barrel and a spectrometer that analyzes spectral characteristics by analyzing image information received from the optical fiber. According to paragraph 1,
An optical device further comprising a side illumination device located on a side of the first barrel and irradiating light to the inspection object. A guide rail that moves the inspection object in a certain direction; and
A scan-type peripheral exposure system comprising the optical device of any one of claims 1 to 5, which irradiates light to the inspection object and inspects several surfaces and interior surfaces of the inspection object to a certain extent.

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