KR20230149575A - System and method for mixing a chemical - Google Patents

Abstract

A chemical mixing system and method thereof are disclosed. A chemical mixing system according to an embodiment of the present invention includes a pipe through which at least two types of chemicals supplied from a chemical source move together; A mixing member that primarily mixes at least two types of chemicals moving through the pipe; and a pump member connected to the pipe and secondarily mixing chemicals so that at least two types of chemicals are circulated and mixed.

Description

Chemical mixing system and method {SYSTEM AND METHOD FOR MIXING A CHEMICAL}

The present invention relates to a chemical mixing system and method, and to a chemical mixing system and method that can mix chemicals simply and efficiently.

In general, various types of chemicals are used in semiconductor factories or chemical factories. For example, when manufacturing semiconductors in a semiconductor factory, semiconductor chips are manufactured through wafer diffusion, photography, etching, and thin film processes, and the above chemicals are used in deposition, development, etching, etc. in each process.

These chemicals may be diluted to the concentration required in the process line or supplied as a mixture of two or more chemicals. Here, mixing is a concept that includes dilution.

Referring to Patent Document 1 (Korean Patent Publication No. 10-2005-0076909), the conventional chemical mixing system includes a main mixer 110 and an auxiliary mixer 130, as shown in FIG. 1. , the main mixer 110 is configured to automatically mix the first and second fluids introduced from the outside by moving them to multiple adjacent hollows after receiving them in the same space, and the auxiliary mixer 130 is configured to automatically mix the first and second fluids introduced from the outside (120). ) is configured to select and store the mixed liquid that has passed.

That is, in the conventional chemical mixing system, mixing of fluids occurs within a preset space called the main mixer 110.

However, in the case of the conventional method, since the main mixer 110 is filled with all the fluids and then mixed, it takes a lot of time to mix the fluids, which has the problem of lowering efficiency.

Patent Publication No. 10-2005-0076909

Therefore, the technical problem to be achieved by the present invention is to provide a chemical mixing system and method that can reduce processing time and improve work efficiency by enabling mixing without storing chemicals in a preset space.

According to one aspect of the present invention, a pipe through which at least two types of chemicals supplied from a chemical source move together; a mixing member that primarily mixes the at least two types of chemicals moving through the pipe; and a pump member connected to the pipe and secondarily mixing the at least two chemicals so that they circulate and mix.

In one embodiment, a flow rate control unit coupled to the chemical supply source may be provided to control the flow rate of the chemical supplied from the chemical supply source.

In one embodiment, the pipe includes at least one supply pipe coupled to the chemical supply source; a moving pipe connected to the at least one supply pipe and connected to an inlet of the mixing member; a discharge pipe connected to the outlet of the mixing member and connected to a discharge member in which a plurality of chemicals are stored; And it may include a circulation pipe connecting the discharge pipe and the pump member.

In one embodiment, the circulation pipe includes an inlet pipe through which the at least two types of chemicals flow into the pump member; and an outlet pipe through which the at least two types of chemicals flow out from the pump member, and the at least two types of chemicals moving through the discharge pipe are mixed while moving along the circulation pipe by the operation of the pump member. The inlet pipe and the outlet pipe of the circulation pipe may be respectively connected to the discharge pipe.

In one embodiment, the discharge pipe includes: a first pipe connected to the mixing member; a second pipe extending to be bent from the first pipe and connected to the outflow pipe of the circulation pipe; and a third pipe that extends to be bent from the second pipe, is connected to the inlet pipe of the circulation pipe, and is connected to the discharge member.

In one embodiment, the at least two types of chemicals may be mixed while continuously moving along the circulation pipe and the discharge pipe by the pump member.

In one embodiment, the discharge member may be a supply tank that temporarily stores chemicals and supplies them to a place where the chemicals are used.

In one embodiment, the mixing member includes a case connected to the moving pipe and the discharge pipe, respectively; and a turbulence forming member provided inside the case to generate turbulence in the flow of chemicals.

Meanwhile, according to another aspect of the present invention, supplying at least two types of chemicals from a chemical source; A step of moving the at least two types of chemicals through a pipe and mixing them primarily by a mixing member; A step of secondarily mixing the at least two primarily mixed chemicals while circulating by a pump member; A chemical mixing method may be provided including the step of discharging the mixed chemical.

In one embodiment, the at least two types of chemicals may be mixed while continuously moving along the pipe by the pump member.

Therefore, according to an embodiment of the present invention, chemicals can be mixed while circulating through a pump member without having to be stored in a preset space, which has the effect of reducing process time and improving work efficiency.

1 is a schematic overall perspective view of a chemical mixing system according to an embodiment of the present invention.
Figure 2 is a cross-sectional view of a mixing member in a chemical mixing system according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. Terms or words used in this specification and claims should not be construed as limited to their common or dictionary meanings, and the inventor may appropriately define the concept of terms in order to explain his or her invention in the best way. It must be interpreted with meaning and concept consistent with the technical idea of the present invention based on the principle that it is. Therefore, the embodiments described in this specification and the configurations shown in the drawings are only one of the most preferred embodiments of the present invention and do not represent the entire technical idea of the present invention, so at the time of filing the present application, various alternatives may be used to replace them. It should be understood that equivalents and variations may exist.

In the drawings, the size of each component or specific part constituting the component is exaggerated, omitted, or schematically shown for convenience and clarity of explanation. Therefore, the size of each component does not entirely reflect the actual size. If it is determined that specific descriptions of related known functions or configurations may unnecessarily obscure the gist of the present invention, such descriptions will be omitted.

The term 'coupling' or 'connection' used in this specification refers not only to the case where one member and another member are directly coupled or directly connected, but also when one member is indirectly coupled to another member through a joint member, or indirectly connected to another member. Also includes cases where it is connected to .

In this specification, chemicals include various chemicals, and water such as fruit water (H2O2) or deionized water can be mixed for dilution of chemicals. Within this range, water is also added to the chemicals supplied for mixing. Included. In addition, chemicals mainly refer to those in a liquid state, but also include those in a slurry or paste state in which solid particles are dispersed in a liquid, and those in a gaseous state such as nitrogen, oxygen, and air, and include fluids that can flow through pipes. It's a concept.

Figure 1 is a schematic overall perspective view of a chemical mixing system according to an embodiment of the present invention, and Figure 2 is a cross-sectional view of a mixing member in the chemical mixing system according to an embodiment of the present invention.

Referring to FIG. 1, the chemical mixing system 10 according to an embodiment of the present invention includes a chemical supply source 100, a pipe 200, a mixing member 300, and a pump member 400. .

In this embodiment, a plurality of chemical supply sources 100 are provided, each supplying at least two types of chemicals. That is, a plurality of chemicals are supplied and mixed. For example, hydrofluoric acid and water can be supplied to dilute hydrofluoric acid, and ammonia and water can be supplied to dilute ammonia.

However, the supplied chemicals are not limited to this. For example, the slurry for chemical mechanical polishing contains abrasive particles mixed with the polishing liquid. In this case, the polishing liquid and the abrasive particles can be said to be ‘two types of chemicals.’ Additionally, in this case, since the slurry is supplied in a state in which the polishing liquid and the abrasive particles are already mixed, the chemical mixing system can supply chemicals through only one chemical supply source 100. On the other hand, even in cases where two types of chemicals are supplied already mixed, such as this slurry, over time, uneven concentration (mixing ratio) may occur, such as one type of chemical sinking due to the difference in specific gravity, making mixing difficult. need.

The flow rate control unit 500 may be coupled to the chemical source 100 to control the flow rate of chemicals supplied from the chemical source 100. Since the flow rate of chemicals is important in mixing chemicals, the flow rate of chemicals supplied from the chemical supply source 100 is precisely controlled by the flow rate control unit 500 and the accurate flow rate is supplied.

The pipe 200 is connected to a plurality of chemical supply sources 100, and is configured to allow the plurality of chemicals to move together.

The pipe 200 may include a supply pipe 210, a moving pipe 220, a discharge pipe 230, and a circulation pipe 240. The supply pipe 210 is coupled to a plurality of chemical supply sources 100. Here, the flow rate control unit 500 may be coupled to the supply pipe 210.

The moving pipe 220 is connected to a plurality of supply pipes 210 and is connected to the inlet 311 of the mixing member 300, which will be described later. That is, a plurality of chemicals supplied through the supply pipe 210 meet in the moving pipe 220 and move together toward the mixing member 300.

The discharge pipe 230 is connected to the outlet 312 of the mixing member 300, and is also connected to the discharge member 600 in which a plurality of chemicals are stored. Here, the discharge member 600 may be a supply tank that temporarily stores chemicals and then supplies them to places where they are needed. That is, after the chemicals are mixed, they can be moved to the supply tank through the discharge pipe 230 and stored.

The discharge pipe 230 may include a first pipe 231, a second pipe 232, and a third pipe 233. The first pipe 231 is connected to the outlet 312 of the mixing member 300.

And, the second pipe 232 extends to be bent from the first pipe 231. For example, the second pipe 232 may be extended to be bent at a right angle from the first pipe 231, but this is only one embodiment. The outflow pipe 242 of the circulation pipe 240 is connected to the second pipe 232.

The third pipe 233 extends to be bent from the second pipe 232. The third pipe 233 may also extend, for example, to be bent at a right angle from the second pipe 232, but this is only one embodiment. The inflow pipe 241 of the circulation pipe 240 is connected to the third pipe 233. And, the third pipe 233 is connected to the discharge member 600.

The circulation pipe 240 connects the discharge pipe 230 and the pump member 400. A plurality of chemicals moving through the discharge pipe 230 flow into the pump member 400 through the circulation pipe 240, then flow out from the pump member 400 and enter the discharge pipe 230 again. That is, when the pump member 400 operates, a plurality of chemicals moving along the discharge pipe 230 continue to circulate along the circulation pipe 240 and are mixed.

The circulation pipe 240 may include an inflow pipe 241 and an outflow pipe 242. The inflow pipe 241 is formed to allow a plurality of chemicals to flow into the pump member 400. And, the outflow pipe 242 is formed to allow a plurality of chemicals to flow out from the pump member 400.

That is, the inflow pipe 241 and the outflow pipe ( 242) are respectively connected to the discharge pipes 230. And, the plurality of chemicals are mixed while continuously moving along the circulation pipe 240 and the discharge pipe 230 by the pump member 400.

The mixing member 300 primarily mixes a plurality of chemicals moving through the pipe 200.

Referring to FIGS. 1 and 2 together, the mixing member 300 may include a case 310 and a turbulence forming member 320. Case 310 is connected to the moving pipe 220 and the discharge pipe 230, respectively. And, the turbulence forming member 320 is arranged to rotate inside the case 310.

Additionally, the turbulence forming member 320 may be implemented as a rotating blade such as a propeller or impeller arranged to rotate inside the case 310. The rotor blade may be actively rotated by power, or may be rotated passively by the flow of chemicals passing through the case 31 without separate power. Additionally, the turbulence forming member 320 may be implemented as any structure as long as it can generate turbulence in the flow of chemicals passing through the inside of the case 310, such as a protrusion fixed inside the case 310.

With this configuration, mixing of a plurality of chemicals flowing in from the moving pipe 220 is promoted by the turbulence forming member 320 inside the case 310 and discharged through the discharge pipe 230. Here, a plurality of chemicals can be easily mixed by the vortex generated when the rotary blade, which is the turbulence forming member 320, rotates.

The pump member 400 is connected to the pipe 200 and secondarily mixes chemicals so that a plurality of chemicals circulate and mix. That is, a plurality of chemicals primarily mixed by the mixing member 300 are mixed secondarily while circulating along the circulation pipe 240 by the operation of the pump member 400.

As a result, a plurality of chemicals can be mixed without storing them in a preset space, which has the effect of reducing process time and improving work efficiency.

Hereinafter, the operation and effects of the chemical mixing system 10 according to an embodiment of the present invention will be described.

A plurality of chemicals are supplied from the chemical supply source 100 to the supply pipe 210, and a plurality of chemicals to be mixed move to the moving pipe 220 along the supply pipe 210. A plurality of chemicals meet in the moving pipe 220 and move together toward the mixing member 300 and move into the case 310 of the mixing member 300 through the inlet 311 of the mixing member 300.

When the rotating blade, which is the turbulence forming member 320, inside the case 310 of the mixing member 300 rotates due to the flow of the plurality of chemicals, the plurality of chemicals are primarily mixed. A plurality of chemicals primarily mixed in the mixing member 300 move to the first pipe 231 of the discharge pipe 230 connected to the outlet 312 of the mixing member 300, and the first pipe 231 ) moves along the second pipe 232 extending from the second pipe 232 and the third pipe 233 extending from the second pipe 232.

Here, since the inlet pipe 241 of the circulation pipe 240 is connected to the third pipe 233, when the pump member 400 operates, a plurality of chemicals are supplied from the third pipe 233 to the circulation pipe 240. It moves along the inflow pipe 241 and then flows out along the outflow pipe 242 of the circulation pipe 240. And, since the outflow pipe 242 of the circulation pipe 240 is connected to the second pipe 232 of the discharge pipe 230, a plurality of chemicals flowing out through the outflow pipe 242 of the circulation pipe 240 are connected to the second pipe 232 of the circulation pipe 240. After moving along the pipe 232 and the third pipe 233, it flows back into the inflow pipe 241 of the circulation pipe 240.

That is, the plurality of chemicals primarily mixed in the mixing member 300 are naturally mixed secondarily while continuously circulating along the circulation pipe 240 connected to the discharge pipe 230. Some of the circulation of such a plurality of chemicals are discharged to the discharge member 600, for example, a supply tank, through the third pipe 233 and stored.

In this way, multiple chemicals can be mixed without storing them in a preset space, and they can be mixed even if the pipe 200 is not equipped with a valve, making mixing multiple chemicals simple and easy. This has the effect of reducing process time and improving work efficiency.

Hereinafter, the operation and effects of the chemical mixing method according to an embodiment of the present invention will be described. However, descriptions that are common to the parts described in the chemical mixing system 10 according to an embodiment of the present invention described above are replaced with the above description.

First, at least two types of chemicals, that is, a plurality of chemicals, are supplied from the chemical supply source 100, respectively. Then, a plurality of chemicals move to the mixing member 300 through the pipe 200 and are primarily mixed by the mixing member 300. Here, the mixing member 300 may be diverse and may be provided to include a case 310 and a turbulence forming member 320. However, the explanation regarding this shall be replaced with the above-mentioned explanation.

Next, the plurality of chemicals mixed primarily are mixed secondarily while circulating by the pump member 400. That is, a plurality of chemicals are mixed while continuously moving along the pipe 200 by the pump member 400.

In addition, some of the plurality of chemicals circulated are discharged to the discharge member 600, for example, a supply tank and stored.

Although the present invention has been described above with limited examples and drawings, the present invention is not limited thereto, and the technical idea of the present invention and the description below will be understood by those skilled in the art to which the present invention pertains. Of course, various modifications and variations are possible within the scope of equivalence of the patent claims.

10: Chemical mixing system 100: Chemical source
200: piping 210: supply piping
220: moving pipe 230: discharge pipe
231: first pipe 232: second pipe
233: Third pipe 240: Circulation pipe
241: inflow pipe 242: outflow pipe
300: Mixing member 310: Case
311: inlet 312: outlet
320: Turbulence forming member 400: Pump member
500: flow control unit 600: discharge member

Claims (10)

A pipe through which at least two types of chemicals supplied from a chemical source move together;
a mixing member that primarily mixes the at least two types of chemicals moving through the pipe; and
A chemical mixing system connected to the pipe and including a pump member that secondarily mixes the at least two chemicals so that they circulate and mix. According to paragraph 1,
A chemical mixing system comprising a flow rate control unit coupled to the chemical supply source to control the flow rate of the chemical supplied from the chemical supply source. In number 1,
The pipe is,
At least one supply pipe coupled to the chemical supply source;
a moving pipe connected to the at least one supply pipe and connected to an inlet of the mixing member;
a discharge pipe connected to the outlet of the mixing member and connected to a discharge member in which a plurality of chemicals are stored; and
A chemical mixing system comprising a circulation pipe connecting the discharge pipe and the pump member. According to paragraph 3,
The circulation pipe is,
an inflow pipe through which the at least two types of chemicals flow into the pump member; and
It includes an outflow pipe through which the at least two types of chemicals flow out from the pump member,
The inlet pipe and the outlet pipe of the circulation pipe are respectively connected to the discharge pipe so that the at least two types of chemicals moving through the discharge pipe are mixed while moving along the circulation pipe by the operation of the pump member. Characterized by a chemical mixing system. According to paragraph 4,
The discharge pipe is,
a first pipe connected to the mixing member;
a second pipe extending to be bent from the first pipe and connected to the outflow pipe of the circulation pipe; and
A chemical mixing system comprising a third pipe that extends to be bent from the second pipe, is connected to an inlet pipe of the circulation pipe, and is connected to the discharge member. According to paragraph 3,
A chemical mixing system, wherein the at least two types of chemicals are mixed while continuously moving along the circulation pipe and the discharge pipe by the pump member. According to paragraph 3,
A chemical mixing system characterized in that the discharge member is a supply tank that temporarily stores chemicals and supplies them to places of use. According to paragraph 1,
The mixing member is,
Cases connected to the moving pipe and the discharge pipe, respectively; and
A chemical mixing system comprising a turbulence forming member provided inside the case to generate turbulence in the flow of chemicals. supplying at least two chemicals from a chemical source;
A step in which the at least two types of chemicals move through a pipe and are primarily mixed by a mixing member;
A step of secondarily mixing the at least two primarily mixed chemicals while circulating by a pump member; and
A chemical mixing method including the step of discharging the mixed chemicals. According to clause 9,
A chemical mixing method, characterized in that the at least two types of chemicals are mixed while continuously moving along the pipe by the pump member.

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