KR20230137114A - A discharge measurement sensor using infrared absorption spectrum and continuous flow measurement system including the same - Google Patents

Abstract

The present invention relates to a housing part into which a fluid tube through which a fluid flows is inserted, a heating part that raises the temperature of the fluid in a first area that is a heating spot in the fluid by irradiating first infrared light into the fluid tube, and a heating part. A heating modulation unit that is electrically connected to and modulates the power of the first infrared light, is coupled to the housing unit so as to be located on the same straight line as the first infrared light, and generates a first absorption signal for the first flow rate of the fluid in the first area. A first temperature measuring unit to measure and a second absorption signal for the flow rate of the moved first fluid in the second area where the first fluid is moved is coupled to the housing unit to be spaced a predetermined distance from the first temperature measuring unit. Discharge volume calculation that calculates the flow rate, flow rate, and discharge amount of fluid when the fluid is discharged to the outside based on the first and second absorption signals transmitted from the temperature measurement unit including the second temperature measurement unit and the first and second temperature measurement units, respectively. A discharge rate measurement sensor and a continuous flow rate measurement system using an infrared absorption spectrum are provided, including a control section that controls the operation of the section, heating section, heating modulation section, temperature measurement section, and discharge rate calculation section.

Description

Discharge measurement sensor using infrared absorption spectrum and continuous flow measurement system including the same}

The present invention relates to a discharge rate measurement sensor using an infrared absorption spectrum and a continuous flow measurement system including the same. More specifically, the present invention relates to an infrared absorption technique that measures and controls the flow rate in a non-contact manner and enables continuous flow measurement. It relates to a discharge amount measurement sensor using a spectrum and a continuous flow measurement system including the same.

Technology for measuring and monitoring the flow rate of fluid in real time and controlling the flow rate accordingly is widely used throughout industries such as the medical field, semiconductor field, 3D printing field, mold field, and bio field.

In particular, as miniaturization of products such as micro-precision machines (MEMS) is in progress, miniaturization of products is becoming a trend, and accordingly, micro flow rate control technology applied to ultra-miniaturized products is also required.

Looking at the medical field, medical staff working in hospitals often branch drug delivery tubes to deliver multiple drugs at the same time when injecting drugs into patients.

In addition, since the pressure inside the human body varies depending on the patient's condition and the temperature and pressure conditions in the operating room or hospitalization room are different, the flow rate of the drug must be controlled by taking various conditions into consideration.

Meanwhile, looking at the semiconductor field, dispensers used in the semiconductor process precisely apply resin solutions used for waterproofing and adhesion of mobile phones, etc.

The dispenser is a device that can instantaneously discharge about 100 ng of resin solution for 3 ms, allowing a minute amount of resin to be applied precisely. The discharge amount of this dispenser can be measured using a scale before the process begins. Check to see if the resin is discharged precisely.

However, there was a problem in that it could not be confirmed when the resin hardened or the flow rate changed during the semiconductor process.

In addition, there was a problem that it was difficult to continuously measure the total discharge amount of dot flow rate.

(Patent Document 1) Registered Patent Publication No. 10-1046133 (2021.06.27.)

(Patent Document 2) Public Patent Publication No. 10-2018-0054679 (May 24, 2018)

The purpose of the present invention to solve the above problems is to measure the discharge amount using an infrared absorption spectrum that measures the absorption signal from the fluid flowing inside the fluid pipe and then calculates the flow rate, flow rate, and discharge amount based on the measured absorption signal. To provide a sensor and a continuous flow measurement system including the same.

The technical problem to be achieved by the present invention is not limited to the technical problem mentioned above, and other technical problems not mentioned can be clearly understood by those skilled in the art from the description below. There will be.

The configuration of the present invention for achieving the above object includes a housing portion into which a fluid pipe through which fluid flows is inserted; a heating unit that radiates first infrared light into the fluid pipe to increase the temperature of the fluid in a first area, which is a heating spot, in the fluid; a heating modulation unit electrically connected to the heating unit and modulating the power of the first infrared light; A first temperature measurement unit coupled to the housing unit so as to be located on the same line as the first infrared light and measuring a first absorption signal for the first flow rate of the fluid in the first area, and the first temperature measurement unit A temperature measuring unit including a second temperature measuring unit coupled to the housing unit to be spaced a predetermined distance apart from the housing unit and measuring a second absorption signal for the flow rate of the moved first fluid in the second area where the first fluid is moved. ; a discharge amount calculation unit that calculates the flow rate, flow rate, and discharge amount of the fluid when the fluid is discharged to the outside based on the first and second absorption signals transmitted from the first and second temperature measurement units, respectively; and a control unit that controls operations of the heating unit, the heating modulation unit, the temperature measurement unit, and the discharge quantity calculation unit. It provides a discharge amount measurement sensor using an infrared absorption spectrum.

In an embodiment of the present invention, the first temperature measuring unit includes: a first infrared light emitting unit coupled to the housing unit to be located at an upper portion of the fluid pipe and irradiating second infrared light downward to the first area; and a first infrared light receiving unit coupled to the housing to face the first infrared light emitting unit and receiving the second infrared light to measure the first absorption signal, wherein the first infrared light receiving unit is connected to the first infrared light emitting unit. It may be characterized by transmitting the absorption signal to the discharge amount calculation unit.

In an embodiment of the present invention, the second temperature measuring unit is located at the upper part of the fluid pipe and is coupled to the housing unit to be spaced a predetermined distance from the first infrared light emitting unit and transmits third infrared light to the second area. a second infrared light emitting unit that irradiates downward; and a second infrared light receiving unit coupled to the housing to face the second infrared light emitting unit and receiving the third infrared light to measure the second absorption signal. It may be characterized by transmitting the absorption signal to the discharge amount calculation unit.

In an embodiment of the present invention, the discharge amount calculation unit, (v=flow velocity, L=distance between the first and second infrared emitting units, =The time it takes for the fluid in the heating spot to move from the first infrared emitting unit to the second infrared emitting unit) may be used to calculate the flow velocity (v).

In an embodiment of the present invention, the discharge amount calculation unit, (Q = flow rate, A = cross-sectional area of the fluid pipe, v = flow velocity, D = diameter of the fluid pipe, L = distance between the first and second infrared emitting units, =The time it takes for the fluid in the heating spot to move from the first infrared emitting unit to the second infrared emitting unit) may be used to calculate the flow rate.

In an embodiment of the present invention, the discharge amount calculation unit, The discharge amount may be calculated by (Q = flow rate, T = discharge time).

In an embodiment of the present invention, the heating unit includes a light source located outside the housing unit and generating the first infrared light; a collimator located inside the housing unit and collimating the first infrared light supplied from the light source; an optical fiber that connects the light source and the collimator and transmits first infrared light supplied from the light source to the collimator; and a prism located inside the housing unit to be spaced apart from the collimator by a predetermined distance and refracting the collimated first infrared light to irradiate it to the first area.

In an embodiment of the present invention, the housing portion includes a housing upper member, a housing lower member positioned below the housing upper member to face the housing upper member, one side of the housing upper member, and one side of the housing lower member. A housing side member coupled to the other side of the housing upper member and a housing other side member coupled to the other side of the housing lower member, a front portion of the housing upper member, a front portion of the housing lower member, and a front portion of the housing one side member. portion, a housing front member coupled to the front portion of the other housing side member, and a rear portion of the housing upper member facing the housing front member, a rear portion of the housing lower member, a rear portion of the housing one side member, and the housing. A housing including a housing rear member coupled to the rear portion of the other side member; and a fluid pipe insertion member coupled to the lower surface of the housing lower member and inserted so that the fluid pipe is parallel to the housing upper member and the housing lower member, and a fluid pipe cover coupled to the lower surface of the fluid pipe insertion member. It may be characterized as including a tube insertion part.

In an embodiment of the present invention, the response speed of the temperature measuring unit may be 300 kHz or more.

In addition, the configuration of the present invention to achieve the above object includes a discharge amount measurement sensor as described above; The fluid pipe, at least a portion of the outer peripheral surface of which is in close contact with the inside of the housing portion; a fluid supply device that communicates with the inlet of the fluid pipe and supplies the fluid into the interior of the fluid pipe; a fluid discharge device that communicates with an outlet of the fluid pipe and discharges the fluid passing through the fluid pipe to the outside; a halogen lamp that is electrically connected to the temperature measuring unit and irradiates light into the fluid pipe; and a spectrometer electrically connected to the temperature measurement unit and measuring an infrared absorption spectrum based on the first and second absorption signals for the flow rate.

In an embodiment of the present invention, the fluid may be epoxy, and the wavelength of the first infrared light may be 1700 nm.

In an embodiment of the present invention, the fluid may be epoxy, and the wavelength of the second and third infrared lights may be 1800 nm to 2100 nm.

In an embodiment of the present invention, the wavelength of the second and third infrared lights may be 1950 nm.

The effect of the present invention according to the above configuration is to measure the absorption signal from the fluid flowing inside the fluid pipe, then calculate the flow rate, flow rate, and discharge amount based on the measured absorption signal, and calculate the continuous flow rate of the dot flow rate. Since it is possible to monitor during the semiconductor process, problems such as nozzle clogging or resin hardening that occur during the process can be recognized and resolved in advance, and the dispenser is feedback-controlled based on the results of measuring the flow rate of the fluid in real time. This allows the discharge amount of fluid to be controlled more precisely.

The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description or claims of the present invention.

Figure 1 is a block diagram showing a discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention.
Figure 2 is a perspective view from one direction showing the housing provided in the discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention.
Figure 3 is an exploded perspective view from one direction showing the housing provided in the discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention.
Figure 4 is an actual photograph showing the interior of a discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention.
Figure 5 is an actual photograph showing a discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention.
Figures 6 (a) and (b) are a side cross-sectional view and a front view in one direction showing a discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention.
Figure 7 is a perspective view from one direction showing the housing unit and the temperature measurement unit provided in the discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention.
Figure 8 is a block diagram showing a continuous flow measurement system according to an embodiment of the present invention.
Figure 9 is a perspective view from one direction showing a continuous flow measurement system according to an embodiment of the present invention.
Figure 10 is an enlarged partial detailed view of area S of Figure 9.
Figure 11 is a conceptual diagram showing a continuous flow measurement system according to an embodiment of the present invention.
Figure 12 is a spectrum graph showing spectral characteristics according to temperature change of epoxy fluid, using a continuous flow measurement system according to an embodiment of the present invention.
Figure 13 is a graph showing infrared absorption spectrum according to flow rate.
Figure 14 is a graph showing the average signal intensity of the absorption spectrum according to flow rate.
Figures 15 (a) and (b) are graphs showing the wavelengths of the infrared light emitting unit (LED) and the infrared receiving unit (PD) in the continuous flow measurement system according to an embodiment of the present invention.
16 (a), (b), and (c) show an infrared light emitting unit (LED), an infrared photodetector (PD), and a heating unit provided in a continuous flow measurement system according to an embodiment of the present invention. This is an actual photo showing a laser.
Figure 17 is a graph showing the signal intensity of an infrared photodetector (PD) according to flow rate.
Figures 18 (a) and (b) are graphs showing the scale for measuring the discharge amount and the measured discharge amount according to the number of shots.
Figure 19 is a graph showing the discharge amount measurement signal when discharging 400 shots measured by a discharge amount measurement sensor using an infrared absorption spectrum provided in a continuous flow measurement system according to an embodiment of the present invention.
Figure 20 shows the discharge amount measurement signal before the fluid is discharged (before discharge ~ t1) by the discharge amount measurement sensor using an infrared absorption spectrum provided in the continuous flow measurement system according to an embodiment of the present invention and the fluid in the heating spot. This is a graph showing the behavior.
Figure 21 shows that after the fluid is discharged by a discharge amount measurement sensor using an infrared absorption spectrum provided in a continuous flow measurement system according to an embodiment of the present invention, the fluid in the heating spot is on the same straight line as the first infrared light emitting unit. This is a graph showing the discharge amount measurement signal and fluid behavior in the heating spot while moving from the first area located to the second area located on the same line as the second infrared emitting unit (t1 to t2).
Figure 22 shows the moment when the fluid is discharged from the second area located on the same straight line as the second infrared light emitting unit by the discharge amount measurement sensor using the infrared absorption spectrum provided in the continuous flow measurement system according to an embodiment of the present invention. This is a graph showing the discharge amount measurement signal from (t2 to t3) and the fluid behavior at the heating spot.
Figure 23 is a graph showing signals of continuously measuring dot flow rate measured by a discharge rate measurement sensor using an infrared absorption spectrum provided in a continuous flow rate measurement system according to an embodiment of the present invention.
Figure 24 is a graph for calculating discharge amount in a continuous flow measurement system according to an embodiment of the present invention.
Figure 25 is a graph showing the flow rate according to the number of shots obtained from a discharge amount measurement sensor using an infrared absorption spectrum provided in a continuous flow measurement system according to an embodiment of the present invention.
Figure 26 is a graph showing the flow rate according to the number of shots obtained from a discharge amount measurement sensor using an infrared absorption spectrum provided in a continuous flow measurement system according to an embodiment of the present invention.
Figure 27 is a graph showing discharge time according to the number of shots obtained from a discharge amount measurement sensor using an infrared absorption spectrum provided in a continuous flow measurement system according to an embodiment of the present invention.
Figure 28 is a graph comparing the discharge amount obtained from a scale according to the number of shots and the discharge amount obtained from a discharge amount measurement sensor using an infrared absorption spectrum.

Hereinafter, the present invention will be described with reference to the attached drawings. However, the present invention may be implemented in various different forms and, therefore, is not limited to the embodiments described herein. In order to clearly explain the present invention in the drawings, parts that are not related to the description are omitted, and similar parts are given similar reference numerals throughout the specification.

Throughout the specification, when a part is said to be "connected (connected, contacted, combined)" with another part, this means not only "directly connected" but also "indirectly connected" with another member in between. "Includes cases where it is. Additionally, when a part is said to “include” a certain component, this does not mean that other components are excluded, but that other components can be added, unless specifically stated to the contrary.

The terms used herein are only used to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as “comprise” or “have” are intended to indicate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings.

1. Discharge amount measurement sensor using infrared absorption spectrum (100)

Hereinafter, the discharge amount measurement sensor 100 using an infrared absorption spectrum according to an embodiment of the present invention will be described with reference to FIGS. 1 to 7.

Figure 1 is a block diagram showing a discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention.

Referring to FIG. 1, the discharge amount measurement sensor 100 using an infrared absorption spectrum according to an embodiment of the present invention includes a housing unit 110, a heating unit 120, a temperature measurement unit 130, and a heating modulation unit 140. ), a discharge amount calculation unit 150, and a control unit 160.

Figure 2 is a perspective view from one direction showing the housing provided in the discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention. Figure 3 is an exploded perspective view from one direction showing the housing provided in the discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention. Figure 4 is an actual photograph showing the interior of a discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention. Figure 5 is an actual photograph showing a discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention.

A fluid pipe 200 through which fluid flows is inserted into the housing portion 110.

Referring to FIGS. 2 and 3 , the housing portion 110 includes a housing 111 and a fluid pipe insertion portion 112.

The housing 111 includes a housing upper member 111a, a housing lower member 111b, a housing side member 111c, a housing other side member 111d, a housing front member 111e, and a housing rear member 111f. do.

The housing upper member 111a may have a rectangular shape with a predetermined thickness.

The housing lower member 111b is located below the housing upper member 111a so as to face the housing upper member 111a.

At this time, the housing lower member 111b is arranged to be spaced apart from the housing upper member 111a by a predetermined distance in the vertical direction.

The housing side member 111c is coupled to one side of the housing upper member 111a and one side of the housing lower member 111b.

The housing other side member 111d is coupled to the other side of the housing upper member 111a and the other side of the housing lower member 111.

The housing front member 111e is coupled to the front part of the housing upper member 111a, the front part of the housing lower member 111b, the front part of the housing one side member 111c, and the front part of the housing other side member 111d. do.

Additionally, a first opening is formed through the central portion of the housing front member 111e.

The housing rear member 111f faces the housing front member 111e and includes the rear portion of the housing upper member 111a, the rear portion of the housing lower member 111b, the rear portion of one side of the housing member 111c, and the other side of the housing. It is coupled to the rear part of the member 111d.

Additionally, a second opening is formed through the central portion of the housing rear member 111f.

The above-described housing upper member 111a, housing lower member 111b, housing one side member 111c, housing other side member 111d, housing front member 111e, and housing rear member 111f form an internal space. It has a rectangular parallelepiped shape, and the heating unit 120 is located in the internal space.

The fluid pipe insertion portion 112 includes a fluid pipe insertion member 112a and a fluid pipe cover 112b.

The fluid pipe insertion member 112a has a rectangular parallelepiped shape smaller than the housing 111, and is formed through a direction parallel to the housing upper member 111a and the housing lower member 111b so that the fluid pipe 200 can be inserted. .

Specifically, the fluid pipe insertion member 112a is coupled to the lower surface of the housing lower member 111b, and the fluid pipe 200 is inserted in parallel with the housing upper member 111a and the housing lower member 111b.

In addition, a long penetration hole (see FIG. 3) is formed in the central portion of the fluid pipe insertion member 112a in the direction in which the fluid pipe 200 is inserted.

The fluid pipe cover 112b is coupled to the lower surface of the fluid pipe insertion member 112a.

Figures 6 (a) and (b) are a side cross-sectional view and a front view in one direction showing a discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention.

Referring to FIG. 6, the heating unit 120 radiates first infrared light into the fluid pipe to increase the temperature of the fluid in a first area, which is a heating spot, in the fluid.

Here, the first area is a part of the fluid pipe 200 where the first infrared light is irradiated and is also a heating spot that is locally heated.

Referring to Figures 6 (a) and (b), the heating unit 120 includes a light source 121, an optical fiber 122, a collimator 123, and a prism 124.

The light source 121 is located outside the housing unit 110 to generate first infrared light (NIR light) and then supplies it to the collimator 123 through the optical fiber 122.

However, in the present invention, in consideration of cost, a low-cost micro heater may be used in addition to the light source 121 that irradiates infrared rays.

The optical fiber 122 connects the light source 121 and the collimator 123 and transmits the first infrared light supplied from the light source 121 to the collimator 123.

The collimator 123 is located inside the housing unit 110 and collimates the first infrared light supplied from the light source 121.

The prism 124 is located inside the housing unit 110 to be spaced a predetermined distance from the collimator 123 and refracts the collimated first infrared light to irradiate it to the first area.

At this time, the prism 124 is located on the same straight line as the collimator 123, as shown in (a) of FIG. 6, and the collimated first infrared light is refracted at 90 ° and flows into the fluid in the lower part of the housing 111. It is preferably arranged to be irradiated into the tube 200.

Figure 7 is a perspective view from one direction showing the housing unit and the temperature measurement unit provided in the discharge amount measurement sensor using an infrared absorption spectrum according to an embodiment of the present invention.

The fluid specified in the present invention may be epoxy used in the semiconductor process, and the flow rate of the epoxy resin is a dot-shaped flow rate with dynamic behavior. To measure this, a flow measurement system with a fast time response is essential.

Accordingly, the response speed of the temperature measuring unit 130 must be capable of high-speed sampling of 300 kHz or more.

The temperature measuring unit 130 described above includes a first temperature measuring unit 131 and a second temperature measuring unit 132.

The first temperature measuring unit 131 is coupled to the housing unit 110 so as to be located on the same straight line as the first infrared light and measures the first absorption signal for the first flow rate of the fluid in the first area.

The first temperature measuring unit 131 described above includes a first infrared light emitting unit 131a and a first infrared light receiving unit 131b.

The first infrared light emitting unit 131a is coupled to the housing unit 110 so as to be located at the top of the fluid pipe 200 and irradiates the second infrared light downward to the first area.

The first infrared light receiving unit 131b is coupled to the housing unit 110 to face the first infrared light emitting unit 131a and receives the second infrared light to measure the first absorption signal.

The above-described first infrared light receiving unit 131b transmits the first absorption signal to the discharge amount calculation unit 150.

The second temperature measuring unit 132 is coupled to the housing unit 110 to be spaced a predetermined distance from the first temperature measuring unit 131 and measures the flow rate of the moved first fluid in the second area where the first fluid was moved. Measure the second absorption signal.

The second temperature measurement unit 132 includes a second infrared light emitting unit 132a and a second infrared light receiving unit 132b.

The second infrared light emitting unit 132a is located at the upper part of the fluid pipe 200 and is coupled to the housing unit 110 to be spaced a predetermined distance from the first infrared light emitting unit 131a and transmits the third infrared light downward to the second area. Investigate with

The second infrared light receiving unit 132b is coupled to the housing unit 110 to face the second infrared light emitting unit 132a and receives the third infrared light to measure the second absorption signal.

The second infrared light receiving unit 132b transmits the second absorption signal to the discharge amount calculation unit 150.

The heating modulator 140 is electrically connected to the heating unit 120 and modulates the power of the first infrared light.

The discharge amount calculation unit 150 calculates the flow rate, flow rate, and discharge amount of the fluid when the fluid is discharged to the outside based on the first and second absorption signals transmitted from the first and second temperature measurement units 131 and 132, respectively.

In the present invention, in order to finally calculate the discharge amount of the fluid, the flow rate and flow rate when the fluid is discharged to the outside must first be calculated.

Specifically, when the discharge amount measurement signal is analyzed, the discharge amount can be measured through [Equation 1] and [Equation 2] below and then [Equation 3] below.

First, t1, t2, and t3 are obtained from the dispenser discharge amount signal, and t2-t1 indicates that the heating spot is from the first infrared light emitting part 131a (LED 1) to the second infrared light emitting part 132a (LED 2). It is the travel time until. If this is t, the flow velocity v when discharging from the dispenser can be obtained through [Equation 1] below.

For this purpose, the discharge amount calculation unit 150 calculates the flow rate (v) using the following [Equation 1].

[Equation 1]

(v=flow velocity, L=distance between the first and second infrared emitting units, =Time taken for the fluid in the heating spot to move from the first infrared emitting part to the second infrared emitting part)

Next, the discharge amount calculation unit 150 calculates the flow rate (Q) using Equation 2 below.

[Equation 2]

(Q = flow rate, A = cross-sectional area of the fluid pipe, v = flow velocity, D = diameter of the fluid pipe, L = distance between the first and second infrared emitting units, =Time taken for the fluid in the heating spot to move from the first infrared emitting part to the second infrared emitting part)

And t3-t1 is the discharge time (T), so the discharge amount can be measured by applying this.

Specifically, after obtaining the flow rate (v) and flow rate (Q) calculated using the above-mentioned [Equation 1] and [Equation 2], the discharge volume calculation unit 150 calculates the Calculate the discharge amount of fluid.

[Equation 3]

(Q=flow rate, T=discharge time)

Based on [Equation 1] to [Equation 3] described above, the quantitative discharge amount was calculated from the signal obtained from the discharge amount measurement sensor 100 using the infrared absorption spectrum.

The control unit 160 controls the operations of the heating unit 120, the heating modulation unit 140, the temperature measurement unit 130, and the discharge amount calculation unit 150.

2. Continuous flow measurement system (700)

Hereinafter, the continuous flow measurement system 700 according to an embodiment of the present invention will be described with reference to FIGS. 1 to 28.

Figure 8 is a block diagram showing a continuous flow measurement system according to an embodiment of the present invention.

Referring to FIG. 8, the continuous flow measurement system 700 according to an embodiment of the present invention includes a discharge amount measurement sensor 100, a fluid pipe 200, and a fluid supply device 300 using the infrared absorption spectrum as described above. ), a fluid discharge device 400, a halogen lamp 500, and a spectrometer 600.

Figure 9 is a perspective view from one direction showing a continuous flow measurement system according to an embodiment of the present invention. Figure 10 is an enlarged partial detailed view of area S of Figure 9.

Referring to FIGS. 2, 3, 5 to 7, 9, and 10, at least a portion of the outer peripheral surface of the fluid pipe 200 is in close contact with the inside of the housing portion 110.

Figure 11 is a conceptual diagram showing a continuous flow measurement system according to an embodiment of the present invention.

At least a portion of the outer peripheral surface of the fluid pipe 200 is in close contact with the inside of the housing portion 110 and fluid flows therein.

Specifically, the fluid pipe 200 is a pipe that is open on both sides and empty inside, and allows fluid to flow.

Referring to FIG. 11, the fluid supply device 300 communicates with the inlet of the fluid pipe 200 and supplies fluid into the interior of the fluid pipe 200.

The inlet of the fluid pipe 200 for this purpose communicates with the fluid supply device 300 as shown in FIG. 11.

Additionally, the outlet of the fluid pipe 200 communicates with the fluid discharge device 400 as shown in FIG. 11.

The fluid supply device 300 communicates with the inlet of the fluid pipe 200 and supplies fluid to the fluid pipe 200.

The fluid discharge device 400 communicates with the outlet of the fluid pipe 200 and discharges the fluid passing through the fluid pipe 200 to the outside.

The fluid discharge device 400 for this includes a dispenser 410 and a nozzle 420 as shown in FIG. 8.

The dispenser 410 communicates with the outlet of the fluid pipe 200 and receives fluid discharged from the outlet of the fluid pipe.

The nozzle 420 communicates with the lower part of the dispenser 410 and discharges the fluid contained in the dispenser 410 to the outside.

Specifically, the nozzle 420 becomes narrower from the top to the bottom, allowing the fluid to fall in the form of dots.

For example, the discharged fluid may be an epoxy resin used in a semiconductor process, and accordingly, a flow measurement system with a fast time response speed is essential to measure the flow rate of the fluid.

The halogen lamp 500 is electrically connected to the temperature measuring unit 130 and irradiates light into the fluid pipe 200.

Figure 12 is a spectrum graph showing spectral characteristics according to temperature change of epoxy fluid, using a continuous flow measurement system according to an embodiment of the present invention.

The spectrometer 600 is electrically connected to the temperature measuring unit 130 and measures a spectral signal for the flow rate.

The spectrometer 600 is electrically connected to the temperature measuring unit and measures an infrared absorption spectrum based on the first and second absorption signals for the flow rate.

Specifically, in the present invention, in order to check the light absorption characteristics, a broadband light source using a halogen lamp 500 was irradiated to the fluid pipe 200 through an optical fiber, and absorption was performed on the other side. The degree to which this occurred was measured using a spectrometer (600) (FTNIR). To check the infrared absorption characteristics according to temperature, the absorption area was heated with an infrared laser.

Here, the fluid is epoxy as described above, and the wavelength of the first infrared light is 1700 nm.

Additionally, the wavelengths of the second and third infrared lights are 1800 nm to 2100 nm, and the wavelengths of the second and third infrared lights are 1950 nm.

Figure 12 shows the absorption spectrum of epoxy according to temperature change. The laser used in the heating unit 120 is a laser with a wavelength of 1450 nm.

Referring to FIG. 12, it can be seen that the laser used in the heating unit 120 was measured at a wavelength of 1450 nm. The wavelength with the highest absorption rate in epoxy is around 1700 nm. And it can be seen that the wavelength varies depending on temperature around the 1900 nm wavelength.

The graph shown in Figure 12 is measured according to the irradiation time of the heating laser. It can be seen that the absorption signal at 1800 nm to 2100 nm increases as the irradiation time of the heating laser increases.

Therefore, the heating laser used to measure the flow rate of epoxy for semiconductor dispensers is suitable for a laser with a wavelength of 1700 nm, and the first and second infrared light emitting units 131a and 132a (LED) and the first and second infrared light emitting units 131a and 132a (LED) for temperature measurement are suitable. It can be seen that the wavelength of 1800 nm to 2100 nm is suitable for the infrared light receiving units 131b and 132b (Photodetector).

Figure 13 is a graph showing the infrared absorption spectrum according to flow rate, and Figure 14 is a graph showing the average signal intensity of the absorption spectrum according to flow rate.

Referring to FIG. 14, the average signal value of the infrared absorption spectrum in the range of 1800 nm to 2100 nm obtained while changing the flow rate from 1 to 10 mL/h is shown in FIG. 14 according to the flow rate.

As can be seen in Figure 14, as the flow rate increases, the averaged absorption signal at a wavelength of 1800 nm to 2100 nm decreases linearly. Using this correction curve, the flow rate of the fluid can be quantitatively measured by measuring the infrared absorption spectrum.

Figures 15 (a) and (b) are graphs showing the wavelengths of the infrared light emitting unit (LED) and the infrared receiving unit (PD) in the continuous flow measurement system according to an embodiment of the present invention.

By using the spectrometer 600 (FTNIR), the spectroscopic characteristics of the epoxy used in the dispenser are determined, the wavelength used for temperature measurement and flow measurement is determined, and the corresponding first and second infrared light emitting units 131a and 132a (LED) are used. ), the first and second infrared light receiving units (131b, 132b) (PD), and the heating laser were selected. The selected first and second infrared light emitting units 131a and 132a (LED) have a peak at a wavelength of 1950 nm, and the characteristics of the laser beam are as shown in (a) of FIG. 15.

And the first and second infrared light receiving units 131b and 132b (PD) can measure light in the range of 1.65 μm to 2.35 μm (based on 80% or more), and the above characteristics are shown in (b) of FIG. 15. And a semiconductor laser with a wavelength of 1710 nm ± 20 nm was selected for local heating of the fluid.

16 (a), (b), and (c) show an infrared light emitting unit (LED), an infrared photodetector (PD), and a heating unit provided in a continuous flow measurement system according to an embodiment of the present invention. This is an actual photo showing a laser.

In Figures 16 (a), (b), and (c), infrared light emitting parts (131a, 132a) (LED), infrared light receiving parts (131b, 132b) (PD: photodetector), and heating parts selected for measuring the discharge amount of fluid. (120) Shows an actual photo of (heating laser).

Figure 17 is a graph showing the signal intensity of an infrared photodetector (PD) according to flow rate.

The results of measuring the continuous flow rate using the discharge amount measurement sensor 100 using an infrared absorption spectrum are shown in FIG. 17.

Specifically, it can be confirmed that the signal intensity of the discharge amount measurement sensor 100 using the infrared absorption spectrum measured on the upstream side increases linearly as the flow rate increases. This means that as the flow rate increases, the temperature of the fluid decreases and the signal intensity increases accordingly. Therefore, it was confirmed that continuous flow rate can be measured using the discharge amount measurement sensor 100 using the developed infrared absorption spectrum.

Figures 18 (a) and (b) are graphs showing the scale for measuring the discharge amount and the measured discharge amount according to the number of shots.

Figures 18 (a) and (b) show the results of measuring the discharge amount according to the number of shots through which fluid is discharged using a scale. Figure 18 (a) shows the scale used to measure the discharge amount and Figure 18 (b) shows the discharge amount measured according to the number of shots. It can be seen that the discharge amount of fluid increases linearly as the number of shots increases.

Figure 19 is a graph showing the discharge amount measurement signal when discharging 400 shots measured by a discharge amount measurement sensor using an infrared absorption spectrum provided in a continuous flow measurement system according to an embodiment of the present invention.

Figure 19 shows the signal change over time when 400 shots of epoxy measured by the discharge amount measurement sensor 100 using an infrared absorption spectrum are discharged. The measured signal on the y-axis is a signal proportional to the temperature, so although the quantitative value needs to be corrected, an increase or decrease in temperature can be confirmed.

Figure 20 shows the discharge amount measurement signal before the fluid is discharged (before discharge ~ t1) by the discharge amount measurement sensor using an infrared absorption spectrum provided in the continuous flow measurement system according to an embodiment of the present invention and the fluid in the heating spot. This is a graph showing the behavior.

Figure 20 shows a signal graph before discharge and the behavior of the fluid adjacent to the heating spot in the discharge amount measurement sensor 100 using an infrared absorption spectrum. The heating unit 120 creates a heating spot in the first area at the same position as the measurement position of the first infrared light emitting unit 131a (LED 1).

In the first stage, when there is no discharge and the fluid is stopped, a heating spot is created at the position of the first infrared light emitting part 131a (LED 1), so the first infrared light emitting part (LED 1) is not discharged until t1. 131a) The temperature continues to rise in (LED 1). In the second area where the second infrared light emitting unit 132a (LED 2) is located, the temperature is maintained approximately the same.

Figure 21 shows that after the fluid is discharged by a discharge amount measurement sensor using an infrared absorption spectrum provided in a continuous flow measurement system according to an embodiment of the present invention, the fluid in the heating spot is on the same straight line as the first infrared light emitting unit. This is a graph showing the discharge amount measurement signal and fluid behavior in the heating spot while moving from the first area located to the second area located on the same line as the second infrared emitting unit (t1 to t2).

Figure 21 shows the second step in which discharge is performed and the heating spot moves from the first area adjacent to the first infrared light emitting unit 131a (LED 1) to the second infrared light emitting unit 132a (LED 2). indicates.

As shown in FIG. 21, when discharge is performed, the cold fluid upstream flows into the first area adjacent to the first infrared light emitting unit 131a (LED 1), so at the same time as discharge begins, the first infrared light emitting unit 131a (LED 1) It can be seen that the temperature of the fluid in the first area adjacent to LED 1) rapidly decreases. And because cold liquid is continuously introduced, the temperature of the fluid in the first area adjacent to the first infrared light emitting unit 131a (LED 1) is maintained in a low state.

On the other hand, referring to FIG. 21, as the heating spot moves in the second infrared light emitting unit 132a (LED 2), the heating spot moves to the second infrared light emitting unit 132a (LED 2). When it comes to the second area adjacent to , it can be seen that the temperature of the fluid in the second area rises rapidly. And when the heating spot passes through the second area adjacent to the second infrared light emitting unit 132a (LED 2), it can be seen that the temperature decreases as cold liquid enters again. Through this, the time (t) when the heating spot moves from the first infrared light emitting part 131a (LED 1) to the second infrared light emitting part 132a (LED 2) is determined through the time difference between t1 and t2. It can be measured.

Figure 22 shows the moment when the fluid is discharged from the second area located on the same straight line as the second infrared light emitting unit by the discharge amount measurement sensor using the infrared absorption spectrum provided in the continuous flow measurement system according to an embodiment of the present invention. This is a graph showing the discharge amount measurement signal from (t2 to t3) and the fluid behavior at the heating spot.

In Figure 22, the third step proceeds.

Specifically, after the heating spot passes the second infrared light emitting unit 132a (LED 2) and the discharge ends, the movement of the fluid ends, so again at the point of the first infrared light emitting unit 131a (LED 1). Heating occurs. Therefore, the temperature of the signal of the first infrared light emitting unit 131a (LED 1) increases again from t3, which is the time when discharge ends. Therefore, the discharge time (T) can be obtained through the difference between t3, when discharge ends, and t1, when discharge begins.

Figure 23 is a graph showing signals of continuously measuring dot flow rate measured by a discharge rate measurement sensor using an infrared absorption spectrum provided in a continuous flow rate measurement system according to an embodiment of the present invention.

After discharging ends, the temperature of the fluid in the first area adjacent to the first infrared light emitting unit 131a (LED 1) increases until discharging begins again. When discharging starts again, steps 1 to 3 are repeated. 23 shows the results of the signal measured when the above-described steps 1-3 are repeated.

As shown in FIG. 23, it can be seen that the same type of signal pattern is repeated each time ejection is repeated.

Figure 24 is a graph for calculating discharge amount in a continuous flow measurement system according to an embodiment of the present invention.

Figure 24 shows the discharge flow rate over time when fluid is discharged. In theory, it can be seen that the discharge amount can be derived as discharge time Therefore, by measuring the discharge time (T) described in the above-mentioned [Equation 1] and the discharge flow rate (Q) described in [Equation 2], the discharge amount can be measured.

Figure 25 is a graph showing the flow rate according to the number of shots obtained from a discharge amount measurement sensor using an infrared absorption spectrum provided in a continuous flow measurement system according to an embodiment of the present invention.

As shown in Figure 25, it can be seen that the flow rate remains almost constant even as the number of shots increases. At this time, the set condition is that 1 dot discharges 0.1 mg and this is discharged for 0.3 ms. When this is calculated, the flow speed is 2.607 mm/s.

In other words, it can be seen in Figure 25 that the flow rate is almost the calculated level regardless of the number of shots.

Figure 26 is a graph showing the flow rate according to the number of shots obtained from a discharge amount measurement sensor using an infrared absorption spectrum provided in a continuous flow measurement system according to an embodiment of the present invention.

Figure 26 shows the flow rate obtained by multiplying the obtained flow rate by the cross-sectional area of the fluid pipe 200. As shown in Figure 26, the flow rate calculated under the target conditions of 1 dot, 0.1 mg, 3 ms is 118 mL/h, and the measurement results are also almost similar.

Figure 27 is a graph showing discharge time according to the number of shots obtained from a discharge amount measurement sensor using an infrared absorption spectrum provided in a continuous flow measurement system according to an embodiment of the present invention.

Referring to FIG. 27, this is obtained from the time difference between t3 and t1 as described above. It can be seen that the ejection time (T) increases as the number of shots increases.

Figure 28 is a graph comparing the discharge amount obtained from a scale according to the number of shots and the discharge amount obtained from a discharge amount measurement sensor using an infrared absorption spectrum.

The discharge volume was obtained by multiplying the discharge flow rate and discharge time obtained above.

Figure 28 is a graph comparing the discharge amount (red) obtained from the discharge amount measurement sensor 100 using an infrared absorption spectrum and the discharge amount previously obtained from the scale.

As shown in FIG. 28, it can be seen that the discharge amount obtained from the scale according to the number of shots is almost similar to the discharge amount obtained from the discharge amount measurement sensor 100 using the dispenser infrared absorption spectrum. Through this, it can be seen that the discharge amount of the discharge amount measurement sensor 100 using the infrared absorption spectrum is accurately measured.

The description of the present invention described above is for illustrative purposes, and those skilled in the art will understand that the present invention can be easily modified into other specific forms without changing the technical idea or essential features of the present invention. will be. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive. For example, each component described as unitary may be implemented in a distributed manner, and similarly, components described as distributed may also be implemented in a combined form.

The scope of the present invention is indicated by the patent claims described below, and all changes or modified forms derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included in the scope of the present invention.

100: Discharge measurement sensor using infrared absorption spectrum
110: Housing part
111: housing
111a: Housing upper member
111b: Housing lower member
111c: Housing one side member
111d: Housing other side member
111e: Housing front member
111f: Housing rear member
112: Fluid pipe insertion part
112a: Fluid pipe insertion member
112b: Fluid pipe cover
120: heating unit
121: light source
122: optical fiber
123: collimator
124: prism
130: Temperature measurement unit
131: First temperature measuring unit
131a: first infrared light emitting unit
131b: first infrared light receiving unit
132: Second temperature measuring unit
132a: second infrared light emitting unit
132b: second infrared light receiving unit
140: Heating modulation unit
150: Discharge volume calculation unit
160: control unit
200: fluid pipe
300: Fluid supply device
400: Fluid discharge device
410: Dispenser
420: nozzle
500: Halogen lamp
600: Spectroscopy
700: Continuous flow measurement system

Claims (13)

A housing portion into which a fluid pipe through which fluid flows is inserted;
a heating unit that radiates first infrared light into the fluid pipe to increase the temperature of the fluid in a first area, which is a heating spot, in the fluid;
a heating modulation unit electrically connected to the heating unit and modulating the power of the first infrared light;
A first temperature measurement unit coupled to the housing unit so as to be located on the same line as the first infrared light and measuring a first absorption signal for the first flow rate of the fluid in the first area, and the first temperature measurement unit A temperature measuring unit including a second temperature measuring unit coupled to the housing unit to be spaced a predetermined distance apart from the housing unit and measuring a second absorption signal for the flow rate of the moved first fluid in the second area where the first fluid is moved. ;
a discharge amount calculation unit that calculates the flow rate, flow rate, and discharge amount of the fluid when the fluid is discharged to the outside based on the first and second absorption signals transmitted from the first and second temperature measurement units, respectively; and
A discharge quantity measurement sensor using an infrared absorption spectrum, comprising a control unit that controls the operation of the heating unit, the heating modulation unit, the temperature measurement unit, and the discharge quantity calculation unit.
According to claim 1,
The first temperature measuring unit,
a first infrared light emitting unit coupled to the housing to be positioned above the fluid pipe and emitting second infrared light downward to the first area; and
A first infrared light receiving unit is coupled to the housing to face the first infrared light emitting unit and receives the second infrared light to measure the first absorption signal,
A discharge amount measurement sensor using an infrared absorption spectrum, wherein the first infrared light receiving unit transmits the first absorption signal to the discharge amount calculation unit.
According to claim 1,
The second temperature measuring unit,
a second infrared light emitting unit located above the fluid pipe and coupled to the housing to be spaced apart from the first infrared light emitting unit at a predetermined distance to radiate third infrared light downward to the second area; and
A second infrared light receiving unit is coupled to the housing to face the second infrared light emitting unit and receives the third infrared light to measure the second absorption signal,
A discharge amount measurement sensor using an infrared absorption spectrum, wherein the second infrared light receiving unit transmits the second absorption signal to the discharge amount calculation unit.
According to claim 2 or 3,
The discharge amount calculation unit,
(v=flow velocity, L=distance between the first and second infrared emitting units, =The time it takes for the fluid in the heating spot to move from the first infrared emitting part to the second infrared emitting part) is a discharge amount measurement sensor using an infrared absorption spectrum, characterized in that the flow velocity (v) is calculated.
According to clause 4,
The discharge amount calculation unit,
(Q = flow rate, A = cross-sectional area of the fluid pipe, v = flow velocity, D = diameter of the fluid pipe, L = distance between the first and second infrared emitting units, =The time it takes for the fluid in the heating spot to move from the first infrared emitting unit to the second infrared emitting unit) A discharge amount measurement sensor using an infrared absorption spectrum, characterized in that the flow rate is calculated.
According to clause 5,
The discharge amount calculation unit,
A discharge amount measurement sensor using an infrared absorption spectrum, characterized in that the discharge amount is calculated by (Q = flow rate, T = discharge time).
According to claim 1,
The heating unit,
a light source located outside the housing unit and generating the first infrared light;
a collimator located inside the housing unit and collimating the first infrared light supplied from the light source;
an optical fiber that connects the light source and the collimator and transmits first infrared light supplied from the light source to the collimator; and
A discharge amount measurement sensor using an infrared absorption spectrum, comprising: a prism located inside the housing to be spaced apart from the collimator by a predetermined distance and refracting the collimated first infrared light to irradiate it to the first area.
According to claim 1,
The housing part,
A housing upper member, a housing lower member positioned below the housing upper member to face the housing upper member, a housing side member coupled to one side of the housing upper member and one side of the housing lower member, the housing upper member The other side of the housing is coupled to the other side of the housing lower member, the front part of the housing upper member, the front part of the housing lower member, the front part of the housing one side member, and the front part of the housing other side member. a housing front member and a housing rear member that faces the housing front member and is coupled to the rear portion of the housing upper member, the rear portion of the housing lower member, the rear portion of the one side member of the housing, and the rear portion of the other housing side member. A housing containing a; and
A fluid pipe comprising a fluid pipe insertion member coupled to the lower surface of the housing lower member and inserted so that the fluid pipe is parallel to the housing upper member and the housing lower member, and a fluid pipe cover coupled to the lower surface of the fluid pipe insertion member. A discharge amount measurement sensor using an infrared absorption spectrum, comprising an insertion part.
According to claim 1,
A discharge amount measurement sensor using an infrared absorption spectrum, characterized in that the response speed of the temperature measuring unit is 300 kHz or more.
Discharge amount measurement sensor according to claim 1;
The fluid pipe, at least a portion of the outer peripheral surface of which is in close contact with the inside of the housing portion;
a fluid supply device that communicates with the inlet of the fluid pipe and supplies the fluid into the interior of the fluid pipe;
a fluid discharge device that communicates with an outlet of the fluid pipe and discharges the fluid passing through the fluid pipe to the outside;
a halogen lamp that is electrically connected to the temperature measuring unit and irradiates light into the fluid pipe; and
A spectrometer electrically connected to the temperature measurement unit and measuring an infrared absorption spectrum based on the first and second absorption signals for the flow rate.
According to claim 10,
The fluid is epoxy,
A continuous flow measurement system, characterized in that the wavelength of the first infrared light is 1700 nm.
According to claim 10,
The fluid is epoxy,
A continuous flow measurement system, characterized in that the wavelength of the second and third infrared lights is 1800 nm to 2100 nm.
According to claim 12,
A continuous flow measurement system, characterized in that the wavelength of the second and third infrared lights is 1950 nm.

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