KR20230082179A - Sample stage of atmospheric non-opening type - Google Patents

Abstract

An atmosphere non-open type sample stand according to the present invention comprises an airlock chamber, wherein the airlock chamber comprises a lower part chamber and an upper part chamber that is openably coupled to an upper part of the lower part chamber, and a contact surface of the lower part chamber that comes in contact with the upper part chamber, when the airlock chamber is in a closed state, is formed to be inclined upwards by 10-15 degrees with respect to a bottom surface of the lower part chamber on a side surface. Therefore, the present invention is capable of allowing etching and sample observation by ions.

Description

Sample stage of atmospheric non-opening type}

The present invention relates to a non-atmospheric sample stand, and more particularly, to a non-atmospheric sample stand applied to a cross-section specimen preparation device for finely processing the surface of a sample to be observed with an electron microscope.

In general, a scanning electron microscope acquires an image of a target sample by scanning an electron beam on a sample and detecting secondary electrons or back scattered electrons generated from the sample. In order to observe a sample using a scanning electron microscope, it is necessary to pre-process the sample, and for this purpose, a cross-section specimen preparation device is required.

The cross-section specimen preparation device can finely process the surface of a sample to be observed with an electron microscope using ions rather than mechanical methods. This cross-section specimen processing technique is an essential element for producing electron microscope or TEM (Transmission Electron Microscope) specimens. In particular, if the object to be observed is very fine and cannot be observed when the specimen is mechanically polished, the specimen must be manufactured using an ion beam.

Ion beam polishing (ion milling) was originally started to polish ceramic or semiconductor samples that are difficult to chemically polish, but it is currently the most common method used for polishing various materials such as metals as well as these materials. In particular, cross-section observation is essential in the research and development of various materials such as secondary batteries, connectors, and MLCCs, and ion beam polishing is increasing to analyze them.

Ion beam polishing is performed by irradiating a sample with an ion beam generated from an ion gun, and the sample is installed on a sample stand.

The sample stand on which the sample is installed is mounted on a single-sided specimen preparation device for etching and observation by ion beams. In the case of the existing sample stand, the door opening structure is manually opened and closed, so there is a problem in that a complicated load-lock chamber must be separately created. There is a problem in that it is difficult to accurately and minimally open the door on the stand.

The present invention has been proposed to solve the problems of the prior art, and provides an airlock chamber that is minimally open to allow etching by ions (milli) and sample observation, and to provide a non-atmospheric sample stand having an automatic opening and closing structure. aims to do

A non-atmospheric sample stage according to a preferred embodiment of the present invention includes an airlock chamber mounted therein, the airlock chamber comprising: a lower chamber; and an upper chamber coupled to an upper portion of the lower chamber to be openable and openable, and a contact surface of the lower chamber contacting the upper chamber in a closed state of the airlock chamber is 10 to 10 to a bottom surface of the lower chamber on a side surface. It is characterized in that it is formed with an upward slope of 15 degrees.

In addition, a motor disposed on the rear surface of the airlock chamber to open or close the upper chamber from the lower chamber; a rotation shaft connected to the motor; It further includes a pivoting arm coupled to the rotational shaft at a lower end and connected to a rear surface of the upper chamber at an upper end.

In addition, the airlock chamber further includes a limit sensor for detecting a contact between the upper chamber and the lower chamber during a closing operation.

In addition, the airlock chamber further includes a vacuum gauge sensor.

In addition, the airlock chamber includes a lower coupling portion coupled to a lower portion of the lower chamber; a side coupling portion bent upward from the lower coupling portion and coupled to a side surface of the airlock chamber; and a carrying jig including an upper coupling portion bent from the side coupling portion to the upper chamber.

In addition, the transport jig is detachably coupled to the airlock chamber.

In addition, the transport jig further includes a screw fixing portion screwed to the upper coupling portion.

In addition, the airlock chamber further includes a vacuum connector capable of detachably connecting the pump to its outer surface.

In addition, a push button switch is disposed in the vacuum connector.

In addition, an O-ring for blocking atmospheric air in a closed state of the airlock chamber is disposed at an upper edge of the lower chamber.

According to the present invention, etching by ions and sample observation are possible by minimally opening the airlock chamber, and a non-atmospheric sample stand having an automatic opening and closing structure is provided.

1 is a perspective view of a non-atmospheric sample stand according to the present invention;
Figure 2 is a perspective view of the non-atmospheric sample stage of the present invention viewed from another angle,
3 is a perspective view showing an open state of the non-atmospheric sample stage of the present invention;
Figure 4 is a side view of the open state of the non-atmospheric sample stage of the present invention,
5 is a cross-sectional view of an O-ring in the present invention.

Advantages and features of the present invention, and methods of achieving them, will become clear with reference to the detailed description of the following embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various different forms, only these embodiments make the disclosure of the present invention complete, and common knowledge in the art to which the present invention belongs. It is provided to fully inform the holder of the scope of the invention, and the present invention is only defined by the scope of the claims. Thus, in some embodiments, well-known process steps, well-known device structures, and well-known techniques have not been described in detail in order to avoid obscuring the interpretation of the present invention. Like reference numbers designate like elements throughout the specification.

In the drawings, the thickness is shown enlarged to clearly express the various layers and regions. Like reference numerals have been assigned to like parts throughout the specification. When a part such as a layer, film, region, plate, etc. is said to be “on” another part, this includes not only the case where it is “directly on” the other part, but also the case where there is another part in between. Conversely, when a part is said to be "directly on" another part, it means that there is no other part in between. In addition, when a part such as a layer, film, region, plate, etc. is said to be "below" another part, this includes not only the case where it is "directly below" the other part, but also the case where another part is present in the middle. Conversely, when a part is said to be "directly below" another part, it means that there is no other part in between.

The spatially relative terms "below", "beneath", "lower", "above", "upper", etc. It can be used to easily describe the correlation between elements or components and other elements or components. Spatially relative terms should be understood as encompassing different orientations of elements in use or operation in addition to the orientations shown in the figures. For example, when flipping elements shown in the figures, elements described as “below” or “beneath” other elements may be placed “above” the other elements. Thus, the exemplary term “below” may include directions of both below and above. Elements may also be oriented in other orientations, and thus spatially relative terms may be interpreted according to orientation.

In this specification, when a part is said to be connected to another part, this includes not only the case where it is directly connected, but also the case where it is connected with another element interposed therebetween. In addition, when a part includes a certain component, it means that it may further include other components without excluding other components unless otherwise specified.

In this specification, terms such as first, second, and third may be used to describe various components, but these components are not limited by the terms. The terms are used for the purpose of distinguishing one component from other components. For example, a first component may be termed a second or third component, etc., and similarly, a second or third component may be termed interchangeably, without departing from the scope of the present invention.

Unless otherwise defined, all terms (including technical and scientific terms) used in this specification may be used in a meaning commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in commonly used dictionaries are not interpreted ideally or excessively unless explicitly specifically defined.

Hereinafter, a non-atmospheric sample stand according to a preferred embodiment of the present invention will be described in detail with reference to the drawings.

Figure 1 is a perspective view of the non-atmospheric sample stage according to the present invention, Figure 2 is a perspective view of the non-atmospheric sample stage viewed from another angle, Figure 3 shows the open state of the non-atmospheric sample stage of the present invention A perspective view, Figure 4 is a side view of the open state of the air non-open type sample stage of the present invention, Figure 5 is a cross-sectional view of the O-ring in the present invention.

An airlock chamber 200 including a lower chamber 210 and an upper chamber 250 coupled to an upper portion of the lower chamber 210 to be openable and openable on the airlock chamber 200 according to a preferred embodiment of the present invention. . A sample stand 100 for fixing a sample may be installed inside the airlock chamber 200 .

The non-atmospheric sample stage of the present invention is for etching and observing a sample in a vacuum chamber in a state in which the atmosphere is blocked. It is one of the devices applied to the cross-section specimen preparation device for observation.

In the non-atmospheric sample stage of the present invention, the airlock chamber 200 has an automatic opening and closing structure and is capable of opening and closing the air shielding window in a vacuum.

Specifically, the airlock chamber 200 includes a lower chamber 210 and an upper chamber 220 coupled to an upper portion of the lower chamber 210 .

Inside the lower chamber 210, the sample stand 100 on which the sample is seated is accommodated, and the upper chamber 220 is coupled to the upper portion of the lower chamber 210 to be openable and openable.

In the present invention, a motor 230, a rotating shaft 231 connected to the motor 230, and a pivoting arm 232 are disposed at the rear of the airlock chamber 200 to automatically open and close the upper chamber 250.

The motor 230 is disposed on the rear surface of the lower chamber 210 to generate rotational force for opening the upper chamber 250, and the rotational shaft 231 is shaft-coupled to the motor 230 according to the operation of the motor 230. The rotating shaft 231 rotates. In this embodiment, the motor 230 is a geared stepper motor.

The rotational arm 232 is for opening or closing the upper chamber 250 from the lower chamber 210 as the rotational shaft 231 rotates, and the rotational shaft 231 is coupled to one end of the rotational arm 232 and the rotational arm ( The rear surface of the upper chamber 250 is connected to the other end of 232.

Therefore, when the motor 230 is operated while the airlock chamber 200 is closed, the rotating shaft 231 rotates, and accordingly, the rotating arm 232 rotates to separate the upper chamber 250 from the lower chamber 210. become open Conversely, when the motor 230 rotates the rotating shaft 231 in the opposite direction while the airlock chamber 200 is open, the rotating arm 232 rotates in the opposite direction accordingly, so that the upper chamber 250 is attached to the lower chamber 210. By contact, the airlock chamber 200 is closed.

And, in the present invention, as shown in FIG. 4, the rotational shaft 231 is coupled to the lower end of the rotation arm 232, and the upper end of the rotation arm 232 is coupled to the lower rear surface of the upper chamber 250. In this embodiment, the rotational shaft 231 is coupled to the pivot arm 232 at a lower chamber 210 bottom surface 211 below the middle of the rear surface of the lower chamber 210 .

That is, in the present invention, the position of the rotation shaft 231 is not between the general upper and lower members, but the rotation shaft 231 is coupled to the lower end of the rotation arm 232, and the upper end of the rotation arm 232 is the upper chamber 250 ) and rotates eccentrically, whereby even a small rotation of the rotating shaft 231 can quickly secure the minimum separation distance for observation of the sample.

And, in the state in which the airlock chamber 200 is closed, the contact surfaces of the lower chamber 210 and the upper chamber 250 are inclined upward by 10 to 15 degrees (angle θ) with respect to the bottom surface of the lower chamber 210.

Referring to FIG. 4 in more detail, when the upper chamber 250 is closed to the lower chamber 210, the upper surface 212 of the lower chamber 210 that contacts the lower surface of the upper chamber 250 is the axis of rotation on the side. 231 is formed to be inclined upward by 10 to 15 degrees forward from the rear surface where it is disposed.

The electron beam is irradiated vertically from the upper side toward the sample table 100, and the ion beam is irradiated horizontally from the side toward the sample table 100 (the direction of the electron beam and the direction of the ion beam may be perpendicular). .

As described above, in the present invention, the upper surface 212 of the lower chamber 210 is inclined upward by 10 to 15 degrees from the rear to the front, so that when the upper chamber 250 is opened at the same angle, as shown in FIG. 4, the lower chamber 210 Compared to the case where the top surface 212 of ) is parallel to the bottom surface 211, the sample observation separation distance is increased by about 10%, thereby reducing the interference effect caused by the electron beam.

Meanwhile, if the upward inclination exceeds 15 degrees, there is a possibility that the ion beam may interfere with the front end of the lower chamber 210, which is undesirable. ), which is undesirable because the opening angle must be larger.

Also, an O-ring 220 may be disposed on an upper edge of the lower chamber 210 . The O-ring 220 is disposed on the upper edge of the lower chamber 210 to block the atmosphere.

5(a) shows an O-ring groove 221, and the O-ring groove 221 is a groove having a trapezoidal cross-section shape (a groove having a dovetail cross-sectional shape). The groove 221 is formed such that both sides of the groove 221 are gradually widened to the side.

Therefore, as shown in FIG. 5(b), when the O-ring 220 is forcibly fitted into the groove 221, the O-ring 220 is not pushed or displaced during the opening or closing operation of the airlock chamber 200. . One example of an O-ring 220 is a dovetail O-ring.

5(b) shows the O-ring 220 before being forced into the groove 221, and when the O-ring 220 is forced into the groove 221, the O-ring 220 is forced into the groove 221 while being deformed. Meanwhile, instead of the O-ring 220 having a circular cross section, an O-ring having a trapezoidal cross section corresponding to the groove 221 may be force-fitted into the groove 221 .

A limit sensor 241 is installed in the lower chamber 210 outside the airlock chamber 200 . When the upper chamber 250 is closed to the lower chamber 210 in the open state, the contact block 251 disposed in the upper chamber 250 contacts the limit sensor 241 and the limit sensor 241 detects this, the controller ( The operation of the motor 230 is stopped by (not shown).

In addition, a vacuum connector 260 and a vacuum gauge sensor 240 are disposed in the airlock chamber 200 .

The vacuum connector 260 is disposed on the rear surface of the upper chamber 250 to be detachably connected to a roughing pump (not shown), and vacuums the inside of the airlock chamber 200 by connecting the roughing pump. The vacuum connector 260 is normally maintained in a closed state.

In addition, a push button switch 261 is disposed in the vacuum connector 260, and an open or closed state through the connector 260 can be checked through the push button switch 261. While connecting the roughing pump, the push button switch 261 is pressed and opened, and when disconnecting the roughing pump, the push button switch 261 is pressed again to release the connection and is in the closed position.

Then, the pressure inside the chamber is measured through the vacuum gauge sensor 240 .

In addition, a transport jig 300 is coupled to the airlock chamber 200 .

The transport jig 300 is detachably coupled to the airlock chamber 200, the lower coupling portion 310 disposed below the lower chamber 210, and the lower coupling portion 310 is bent upward to air The side coupling portion 320 disposed on the side of the lock chamber 200 and the upper coupling portion 330 bent from the side coupling portion 320 to the upper chamber 250 are formed integrally and are approximately 'c'. form a ruler

In addition, the screw fixing part 331 is screwed to the upper coupling part 330 . The screw fixing part 331 is screwed to the upper coupling part 330 to rotate the screw fixing part 331 in one direction when the transport jig 300 is fixed to the airlock chamber 200 to move the transport jig 300. It is fixed to the airlock chamber 200, and the fixation of the transport jig 300 is released by rotating the screw fixing part 331 in the opposite direction.

Therefore, the transport jig 300 is coupled and fixed to the airlock chamber 200 to prevent the airlock chamber 200 from being opened when not in use or during transportation, and the transport jig 300 is separated during use.

Above, the present invention has been described with reference to preferred embodiments, but the present invention is not limited thereto, and various modifications may be made by those skilled in the art within the scope without departing from the gist of the present invention described in the claims below. There will be.

100: sample stand 200: airlock chamber
210: lower chamber 220: O-ring
230: motor 231: rotation shaft
232: rotation arm 240: vacuum gauge sensor
241: limit sensor 250: upper chamber
251: contact block 260: vacuum connector
300: transport jig

Claims (10)

An airlock chamber 200 in which a sample table 100 for fixing a sample is mounted,
The airlock chamber 200 is
lower chamber 210; and
An upper chamber 250 coupled to the upper portion of the lower chamber 210 to be openable and closed,
The contact surface of the lower chamber 210 contacting the upper chamber 250 in a closed state of the airlock chamber 200 is inclined upward by 10 to 15 degrees with respect to the bottom surface of the lower chamber 210 on the side surface,
An atmospheric non-open type sample table, wherein electron beams are irradiated from above toward the sample stage (100) to which a sample is fixed, and ion beams are irradiated from the side toward the sample stage (100). According to claim 1,
a motor 230 disposed on a rear surface of the airlock chamber 200 to open or close the upper chamber 250 from the lower chamber 210;
a rotating shaft 231 connected to the motor 230; and
Atmospheric non-open type sample stand further comprising a rotational arm 232 to which the rotating shaft 231 is coupled to the lower end and the rear surface of the upper chamber 250 is connected to the upper end. According to claim 2,
The airlock chamber 200 further includes a limit sensor 241 for detecting contact between the upper chamber 250 and the lower chamber 210 during a closing operation. According to claim 1,
The airlock chamber 200 further includes a vacuum gauge sensor 240. According to claim 1,
The airlock chamber 200 is
a lower coupling part 310 disposed under the lower chamber 210;
a side coupling portion 320 bent upward from the lower coupling portion 310 and disposed on a side surface of the airlock chamber 200; and
Atmospheric non-open type sample stand further comprising a transport jig 300 including an upper coupling portion 330 bent from the side coupling portion 320 to the upper chamber 250. According to claim 5,
The transport jig 300 is a non-atmospheric non-atmospheric sample table that is detachably coupled to the airlock chamber 200. According to claim 6,
The transport jig 300 further includes a screw fixing part 331 screwed to the upper coupling part 330. According to claim 1,
The airlock chamber 200 further comprises a vacuum connector 260 capable of detachably connecting a pump to its outer surface. According to claim 8,
Atmospheric non-open type sample stand in which a push button switch 261 is disposed in the vacuum connector 260. According to claim 1,
Atmospheric non-open type sample table in which an O-ring 220 is disposed on the upper edge of the lower chamber 210 to block the atmosphere while the airlock chamber 200 is closed.

Images