KR20230062355A - Resin-filled bag, method of manufacturing protective film, and method of manufacturing dry film resist - Google Patents

Abstract

The objective of the present invention is to provide a resin-filled bag useful for suppressing the occurrence of fish eyes in a protective film. To this end, provided is a resin-filled bag in which resin is filled into a packaging bag. The resin is a resin for producing a protective film. The packaging bag has an outer envelope and an inner envelope. The outer envelope is a flexible container. The inner envelope is made of polyolefin resin.

Description

Method for manufacturing a resin filling bag, protective film, and manufacturing method for a dry film resist

The present invention relates to a method for manufacturing a resin-filled bag, a protection film, and a method for manufacturing a dry film resist.

Conventionally, a dry film resist is used when forming a lead frame used for a semiconductor integrated circuit or an electrode of a printed wiring board. Such a dry film resist generally includes a base film (for example, a film formed of polyester or the like), a photosensitive resist layer laminated on the base film, and a protection film laminated on the resist layer.

When forming said electrode using the above dry film resist, the protection film is peeled off from the resist layer, and it is set as the laminated|multilayer film provided with a base film and a resist layer. Then, a laminated film is laminated on the electrode metal layer so that the resist layer is in contact with the electrode metal layer for forming the electrode, and the resist layer is exposed. In this way, a predetermined pattern is baked on the resist layer. Thereafter, the laminated film in the region other than the baked pattern is removed from the resist layer to form a resist pattern. And after etching the metal layer for electrodes using the resist pattern as a mask, the electrode of a printed wiring board or a lead frame can be formed by removing a resist pattern.

Here, when the protection film is manufactured, fish eye may occur on the protection film. If fish eyes are present in the protection film, defects may occur in the pattern when the resist layer is exposed to light and a predetermined pattern is baked. Then, as a method of suppressing the occurrence of fish eye in the protective film, Patent Document 1, when producing polyethylene used as a resin for producing a protective film, in the presence of a radical polymerization initiator, ethylene at a specific reaction temperature and reaction pressure A method of polymerization is disclosed.

Japanese Unexamined Patent Publication No. 2002-060426

However, since fish eye may still occur in the protective film even with the above methods, a new method capable of suppressing the occurrence of fish eye in the protective film is required.

Then, the present invention makes it a subject to provide a resin-filled bag useful for suppressing the occurrence of fish eye in a protection film, and a method for manufacturing the protection film. Another object of the present invention is to provide a method for manufacturing a dry film resist using a protection film in which fish eye is suppressed.

The resin filled bag according to the present invention,

A resin filled bag in which resin is filled in the packaging bag,

The resin is a resin for producing a protective film,

The packaging bag has an outer envelope and an inner envelope,

The outer envelope is a flexible container,

The inner bag is a bag made of polyolefin-based resin as a material.

The manufacturing method of the protection film according to the present invention,

Step (1) of taking out the resin from the resin filling bag;

The process (2) which melt-kneads the resin taken out and forms a film is included.

The manufacturing method of the dry film resist which concerns on this invention,

The process (3) of bonding the protection film obtained by the manufacturing method of the said protection film to the laminated|multilayer film provided with the base film and the resist layer formed on the base film is included.

ADVANTAGE OF THE INVENTION According to this invention, the resin filled bag useful for suppressing the occurrence of fish eye in the protection film and the manufacturing method of the protection film can be provided. Moreover, the manufacturing method of the dry film resist using the protection film in which fish eye was suppressed can be provided.

1 is a perspective view showing a packaging bag included in a resin-filled bag according to an embodiment of the present invention.
Fig. 2 is a perspective view showing constituent members of a packaging bag included in a resin-filled bag according to the same embodiment.
Fig. 3 is a schematic diagram showing the configuration of an apparatus used for production of a copolymer of ethylene and ?-olefin in the test of Example.
Fig. 4 is a schematic diagram showing the configuration of an apparatus used for production of ethylene homopolymer in the test of Example.

EMBODIMENT OF THE INVENTION Below, one Embodiment of this invention is described based on drawing. In addition, in the following drawings, the same reference numerals are attached to the same or equivalent parts, and the description thereof will not be repeated.

In the resin-filled bag according to this embodiment, the packaging bag 101 shown in Fig. 1 is filled with a resin for producing a protection film (hereinafter, also referred to as "resin for a protection film"). So, firstly, resin for protection films is demonstrated.

As resin for protection films, polyolefin-type resin etc. are mentioned, for example.

(Polyolefin resin)

Examples of polyolefin-based resins include polyethylene-based resins and polypropylene-based resins, and polyethylene-based resins are preferred.

(polyethylene resin)

Polyethylene-based resins include ethylene-based polymers. That is, when the resin for protection films is a polyethylene-type resin, the resin for protection films contains an ethylene-type polymer. The ethylene-based polymer is a polymer containing more than 50% by mass of structural units derived from ethylene, may be an ethylene homopolymer, or may be an ethylene-based copolymer containing more than 50% by mass of structural units derived from ethylene. Examples of the ethylene-based copolymer include copolymers of ethylene and α-olefin, copolymers of ethylene and α-olefin substituted with an alicyclic compound, and the like. The polyethylene-based resin may contain only one of an ethylene homopolymer and an ethylene-based copolymer as an ethylene-based polymer, or may contain both of them. When the polyethylene-based resin contains both an ethylene homopolymer and an ethylene-based copolymer as the ethylene-based polymer, the polyethylene-based resin may also contain a mixture of the ethylene homopolymer and the ethylene-based copolymer. Examples of the mixture include a mixture obtained by polymerizing an ethylene homopolymer and polymerizing an ethylene-based copolymer in the presence of the obtained ethylene homopolymer (multistage polymer).

In addition, in this specification, a "structural unit" in terms such as "structural unit derived from ethylene" means a polymerized unit of a monomer. Therefore, for example, "a structural unit derived from ethylene" means a structural unit that is -CH ₂ CH ₂ -.

Examples of the ethylene homopolymer include high-pressure low-density polyethylene (LDPE) produced by high-pressure radical polymerization using a radical initiator, high-density polyethylene (HDPE) produced using a predetermined catalyst, and the like. In high-pressure process low-density polyethylene (LDPE), ethylene of repeating units has a randomly branched structure and is bonded. The density of the high-pressure method low-density polyethylene (LDPE) may be, for example, 910 kg/m 3 or more and 935 kg/m 3 or less. In high-density polyethylene (HDPE), ethylene of a repeating unit is bonded in a straight chain without substantially having branches. The density of high-density polyethylene (HDPE) may be, for example, 940 kg/m 3 or more and 970 kg/m 3 or less. As an ethylenic polymer, Preferably it is high-pressure method low-density polyethylene (LDPE).

As the copolymer of ethylene and α-olefin, for example, linear low-density polyethylene having ethylene main chain and α-olefin short chain branching and having crystallinity, and ethylene having low crystallinity and rubber-like elastic properties, The elastomer of the copolymer of alpha-olefin, etc. are mentioned. Linear low-density polyethylene can be produced using a catalyst. The density of the linear low-density polyethylene may be, for example, 900 kg/m 3 or more and 940 kg/m 3 or less. The content of structural units derived from α-olefin in the copolymer of ethylene and α-olefin is not particularly limited, and may be, for example, 4.0% by mass or more and 20% by mass or less. The density of the elastomer of the copolymer of ethylene and α-olefin may be, for example, 860 kg/m 3 or more and 900 kg/m 3 or less.

In the copolymer of ethylene and α-olefin, the content of structural units derived from ethylene (unit: mass%, the total amount of the copolymer of ethylene and α-olefin is 100% by mass) is preferably 81.0 mass%. % or more and 99.0 mass% or less, more preferably 85.0 mass% or more and 95.0 mass% or less.

As an alpha olefin, C3-C10 alpha-olefin etc. are mentioned, for example. As the C3-C10 α-olefin, for example, propylene, 1-butene, 1-pentene, 1-hexene, 4-methyl-1-pentene, 1-octene, 1-decene, 3-methyl-1 -Butene etc. are mentioned, Preferably it is C4-C10 alpha-olefin, More preferably, it is 1-butene, 1-hexene, or 1-octene.

Examples of copolymers of ethylene and α-olefin include ethylene-1-butene copolymers, ethylene-1-hexene copolymers, ethylene-1-octene copolymers, ethylene-1-decene copolymers, and ethylene-(3 -Methyl-1-butene) copolymer etc. are mentioned. Moreover, as a copolymer of ethylene and an alpha-olefin, 1 type selected from these may be used independently, and you may use 2 or more types together.

Examples of the α-olefin substituted with an alicyclic compound include vinylcyclohexane.

The ethylene-based polymer has a melt flow rate (hereinafter also referred to as "MFR") measured at a measurement temperature of 190°C and a load of 2.16 kg, preferably 0.5 g/10 min or more and 50 g/10 min or less, and more Preferably they are 1 g/10 min or more and 30 g/10 min or less, and more preferably 1 g/10 min or more and 20 g/10 min or less. In addition, MFR can be measured under the above conditions according to Method A stipulated in JIS K7210-1.

An ethylene-based polymer can be produced by a known polymerization method using a known polymerization catalyst.

Examples of the polymerization catalyst include a homogeneous catalyst system typified by a metallocene catalyst, a Ziegler-type catalyst system, and a Ziegler-Natta-type catalyst system. As the homogeneous catalyst system, for example, a catalyst system composed of a transition metal compound of Group 4 of the periodic table having a cyclopentadienyl ring and an alkylaluminoxane, a transition metal compound of Group 4 of the periodic table having a cyclopentadienyl ring , a compound that reacts with it to form an ionic complex, and a catalyst system composed of an organic aluminum compound, a transition metal compound of Group 4 of the periodic table having a cyclopentadienyl ring in inorganic particles such as silica and clay minerals, and an ionic complex and a catalyst system prepared by carrying and modifying a catalyst component such as a compound and an organoaluminum compound, a prepolymerization catalyst system prepared by prepolymerizing ethylene or α-olefin in the presence of the above catalyst system, and the like.

In addition, a radical initiator can be used as a polymerization catalyst for high-pressure method low-density polyethylene (LDPE).

(Polypropylene resin)

The polypropylene-based resin includes a propylene-based polymer. The propylene-based polymer is a polymer containing more than 50% by mass of structural units derived from propylene, may be a propylene homopolymer, or may be a propylene-based copolymer containing more than 50% by mass of structural units derived from propylene. Examples of the propylene-based copolymer include a copolymer of propylene and ethylene and/or an α-olefin having 4 to 10 carbon atoms. The polypropylene resin may contain only one of a propylene homopolymer and a propylene copolymer as a propylene polymer, or may contain both of them. When the polypropylene resin contains both a propylene homopolymer and a propylene copolymer as the propylene polymer, the polypropylene resin may also contain a mixture of the propylene homopolymer and the propylene copolymer as the propylene polymer. do. Examples of the mixture include one obtained by polymerizing a propylene homopolymer and polymerizing a propylene-based copolymer in the presence of the obtained propylene homopolymer (multistage polymer).

The propylene homopolymer may have an MFR of 0.1 g/10 min or more and 50 g/10 min or less when measured at a measurement temperature of 230°C and a load of 2.16 kg. In addition, MFR can be measured under the above conditions according to Method A stipulated in JIS K7210-1.

The copolymer of propylene and ethylene and/or an α-olefin having 4 to 10 carbon atoms may have an MFR of 10 to 200 g/10 min at a measurement temperature of 230°C and a load of 2.16 kg. In addition, MFR can be measured under the above conditions according to Method A stipulated in JIS K7210-1.

The copolymer of propylene and ethylene and/or an α-olefin having 4 to 10 carbon atoms may contain 99.9% by mass or more and 60% by mass or more of structural units derived from propylene when the total mass is 100% by mass, and ethylene and/or a structural unit derived from an α-olefin having 4 to 10 carbon atoms may be 0.1% by mass or more and 40% by mass or less.

Examples of the α-olefin having 4 to 10 carbon atoms include 1-butene, 1-pentene, 1-hexene, 4-methyl-1-pentene, 1-octene, 1-decene and the like, preferably is 1-butene, 1-hexene, or 1-octene.

Examples of the copolymer of propylene and ethylene and/or an α-olefin having 4 to 10 carbon atoms include a random copolymer of propylene and ethylene, a random copolymer of propylene and an α-olefin having 4 to 10 carbon atoms, propylene and and random copolymers (terpolymers) of ethylene and an α-olefin having 4 to 10 carbon atoms. As a copolymer of propylene and ethylene and/or C4-C10 alpha-olefin, one type selected from these may be used independently, or two or more types may be used together.

Examples of the random copolymer of propylene and an α-olefin having 4 to 10 carbon atoms include propylene-1-butene random copolymer, propylene-1-hexene random copolymer, propylene-1-octene random copolymer, and propylene-1. - Decene random copolymer etc. are mentioned.

Examples of the random copolymer of propylene, ethylene, and an α-olefin having 4 to 10 carbon atoms include a propylene-ethylene-1-butene copolymer, a propylene-ethylene-1-hexene copolymer, and a propylene-ethylene-1-octene copolymer. A polymer, a propylene-ethylene-1-decene copolymer, etc. are mentioned.

The propylene-based polymer can be produced by a known polymerization method using a known polymerization catalyst for olefins.

Examples of the polymerization catalyst include a Ziegler-type catalyst system, a Ziegler-Natta-type catalyst system, a catalyst system composed of a transition metal compound of Group 4 of the periodic table having a cyclopentadienyl ring and an alkylaluminoxane, and a cyclopentadienyl ring. A transition metal compound of Group 4 of the periodic table, a compound reacting with it to form an ionic complex, and a catalyst system composed of an organoaluminum compound, a periodic table agent having a cyclopentadienyl ring in inorganic particles such as silica and clay minerals Catalyst systems modified by carrying catalyst components such as group 4 transition metal compounds, compounds forming ionic complexes, and organoaluminum compounds, and prepolymerization catalyst systems prepared by prepolymerization of ethylene or α-olefin in the presence of the above catalyst systems etc. can be mentioned.

In this embodiment, resin for protection films may consist only of said polymer, but may also contain additives other than a polymer. The mass ratio of the polymer in the resin is not particularly limited, and may be, for example, 50% or more, 70% or more, 90% or more, or 95% or more.

Examples of additives include antioxidants, weathering agents, lubricants, antiblocking agents, antistatic agents, antifogging agents, anti-drip agents, pigments, and fillers.

Next, the packaging bag 101 filled with the above resin for protection films will be described. As shown in FIGS. 1 and 2 , such a packaging bag 101 includes a filling part 102 filled with a resin for protection film, and a closing part 103 closing the filling part 102 . Further, the packaging bag 101 includes an outer bag 104 and an inner bag 105.

The outer envelope 104 is a flexible container. A flexible container has an envelope-shaped body portion 106 formed of a flexible sheet material. In this embodiment, the flexible container is provided with an envelope-shaped body portion 106 and a suspending string portion 107 for suspending the body portion 106.

The body portion 106 includes a cylindrical side wall portion 108 extending vertically, an opening 109 formed at an upper end of the side wall portion 108, and a side wall portion 108 closed from below. It is provided with a bottom portion 110 to do. The side wall portion 108 and the bottom portion 110 may be integrally formed from a single sheet material, or may be formed from a separate sheet material. When the side wall portion 108 and the bottom portion 110 are formed of separate sheet materials, the body portion 106 can be formed by sealing the lower end of the side wall portion 108 and the outer periphery of the bottom portion 110. In this embodiment, the side wall portion 108 is configured so that the outer circumferential shape becomes a quadrangular shape when viewed along the vertical direction. Moreover, the bottom part 110 is comprised so that the outer peripheral shape may become a square shape.

Further, in the main body portion 106, the lower region including the bottom portion 110 forms the filling portion 102 of the packaging bag 101, and a region extending upward from the region forming the filling portion 102. The closed part 103 of this packaging bag 101 is formed. Further, the main body portion 106 has an opening portion 109 at the upper end of the region forming the closed portion 103 of the packaging bag 101.

The thickness of the outer envelope 104, that is, the thickness of the sheet material forming the body portion 106 is not particularly limited, and may be, for example, 0.10 mm or more and 3.00 mm or less, or 0.30 mm or more and 2.00 mm or less. , 0.50 mm or more and 1.50 mm or less may be sufficient, and 0.10 mm or more and 1.00 mm or less may be sufficient. In addition, the capacity of the outer bag 104, that is, the capacity of the flexible container that can be filled is not particularly limited, and is, for example, 50 L or more and 5000 L or less, 200 L or more and 5000 L or less, or 300 L. It may be more than 4000 L or less, and may be more than 500 L and less than 3000 L.

The sheet material forming the body portion 106 includes a base sheet formed using woven fabric, resin film, paper, or the like. Moreover, as a sheet material, what coated at least one surface of the base sheet with resin, what impregnated resin in the base sheet, etc. are mentioned, for example. As the base sheet, it is preferable to use a woven fabric. As a woven fabric, for example, a fabric formed by weaving strips (so-called flat yarns) formed of resin materials such as polyolefin-based resins (PP, PE, etc.) or polyester-based resins (PET, etc.) so as to cross each other (so-called , yarn dough) and the like. The resin to be laminated or impregnated into the base sheet is not particularly limited, and examples thereof include those containing soft vinyl chloride, EVA, polyurethane, rubber, and the like.

The suspending string part 107 can be formed using a belt, a rope, etc. In addition, both ends of the string portion 107 for hanging are attached to the side wall portion 108. In this embodiment, the suspending string part 107 is attached between two points spaced apart in the circumferential direction in the side wall part 108. Specifically, the suspending string part 107 is attached between two adjacent wall parts of the side wall part 108 whose outer peripheral shape becomes a square shape when seen from above. Moreover, in this embodiment, the suspending string part 107 is formed at several points in the circumferential direction of the side wall part 108.

As the flexible container structured as described above, a known flexible container can be used. For example, as a flexible container, one based on JIS Z 1651:2017 "Flexible container for non-dangerous substances" can be used. Such a flexible container may be a running container that is used repeatedly for a relatively long period of time, may be a cross container on the premise of only one-time charge use, or a cross container whose number of years of use is set to one year. As a running container, in the case of repeated use, a flexible container using the above-mentioned yarn fabric as a base sheet is preferable from the viewpoint of strength.

The inner envelope 105 is an envelope made of polyolefin-based resin. As the polyolefin-based resin constituting the inner bag 105, those described in the description of the above resin for producing a protective film can be used, and a polyethylene-based resin is preferable. Further, the polyolefin-based resin constituting the inner bag 105 is preferably the same as the polyolefin-based resin used as the resin for producing the protective film. Specifically, in the classification of systems such as polyethylene and polypropylene, it is preferable that they are of the same type. In addition, in the classification of the same type as high-pressure low-density polyethylene (LDPE), linear low-density polyethylene, and high-density polyethylene (HDPE), it is preferable that they are of the same type. For example, when the polyolefin-based resin constituting the inner bag 105 is a polyethylene-based resin, the resin for producing the protective film is also preferably a polyethylene-based resin. Further, when the ethylene-based polymer contained in the polyethylene-based resin constituting the inner bag 105 is high-pressure low-density polyethylene (LDPE), the protective film production resin is preferably high-pressure low-density polyethylene (LDPE). Further, when the ethylene-based polymer contained in the polyethylene-based resin constituting the inner bag 105 is linear low-density polyethylene, the resin for producing the protective film is preferably linear low-density polyethylene. Further, when the ethylene-based polymer contained in the polyethylene-based resin constituting the inner bag 105 is high-density polyethylene (HDPE), the resin for producing the protective film is preferably high-density polyethylene (HDPE).

As described above, since the polyolefin-based resin constituting the inner bag 105 is of the same type as the polyolefin-based resin used as the resin for producing the protective film, even if the resin for producing the protective film in the inner bag 105 rubs against the inner bag 105, , it is possible to suppress the generation of foreign substances that cause fish eye.

In addition, it is preferable that the polyolefin-based resin constituting the inner bag 105 has relatively close physical property values to the polyolefin-based resin constituting the resin for the protection film. For example, the MFR of the polyolefin-based resin constituting the inner bag 105 is preferably 25% or more and 400% or less, more preferably 50% or less, relative to the MFR of the polyolefin-based resin constituting the resin for the protection film. % or more and 200% or less, more preferably 56% or more and 180% or less. In addition, the density of the polyolefin-based resin constituting the inner bag 105 is preferably 97% or more and 103% or less, more preferably 98% or more of the density of the polyolefin-based resin constituting the resin for the protection film. 102% or less, more preferably 99% or more and 101% or less.

The inner bag 105 has an opening 111 at its upper end. In this embodiment, the opening 111 of the inner envelope 105 is located above the opening 109 of the outer envelope 104 . The thickness of the inner bag 105 is not particularly limited, and may be, for example, 0.05 mm or more and 0.10 mm or less, 0.01 mm or more and 0.50 mm or less, 0.03 mm or more and 0.30 mm or less, or 0.05 mm or more and 0.10 mm or more. It may be less than mm. Further, the capacity of the inner bag 105, that is, the total capacity of the inner bag 105 is not particularly limited, and may be, for example, 100 L or more and 10000 L or less, or 200 L or more and 10000 L or less. , 500 L or more and 6000 L or less may be sufficient, 1000 L or more and 6000 L or less may be sufficient, and 2000 L or more and 6000 L or less may be sufficient. Further, the ratio of the capacity of the inner bag 105 to the capacity of the outer bag 104 may be 1.0 or more and 5.0 or less, or 2.0 or more and 4.0 or less.

As a method for manufacturing the inner bag 105 as described above, a conventionally known method can be used. For example, it can be manufactured by forming the melt-kneaded polyolefin-type resin into a film shape by a T-die method or a tubular method, and manufacturing a bag from the obtained film by heat sealing or the like.

A resin filling bag can be formed by filling the above packaging bag 101 with resin for protection films. Specifically, the filling part 102 of the packaging bag 101 is filled with the resin for the protection film by throwing the resin for the protection film into the inner bag 105 through the opening 111 of the inner bag 105. Then, by closing the filling portion 102 with the closing portion 103, a resin-filled bag can be formed. As a method of closing the packing part 102, a method of gluing the closing part 103 to the center of the packaging bag 101 and tying it with a rope or the like, a method of winding the closing part 103 from top to bottom and fixing it, etc. can be heard In addition, when the filling part 102 is blocked by the blocking part 103, it is preferable to discharge gas from the inside of the packaging bag 101 (specifically, inside the filling part 102). For example, gas may be discharged by pressing the filling part 102, or gas may be discharged by sucking gas from the filling part 102 using an intake device. In this way, when gas is discharged from the filling part 102, the closing part 103 is comprised so that sealing of the filling part 102 is possible. In the resin-filled bag, the ratio of the volume of the resin for the protection film to the volume of the gas in the inner bag 105 may be 0.01 or more and 2.00 or less, 0.02 or more and 0.19 or less, or 0.4 or more and 0.8 or less. Further, the volume of the resin for protection film in the inner bag 105 can be obtained by dividing the weight of the filled resin for protection film (for example, polyethylene-based resin) by the resin density. The volume of the gas in the inner bag 105 can be obtained by subtracting the volume of the resin from the volume of the flexible container cover (floor area x height).

Next, a method for manufacturing a protective film using the resin for the protective film in the above resin-filled bag will be described. The manufacturing method of the protection film which concerns on this embodiment is process (1) which takes out the resin for protection films from a bag filled with resin (hereinafter also described as "take-out process"), melt-kneading the taken-out resin for protection films, A film-forming process (2) (hereinafter also referred to as a "film-forming process") is included.

The method of carrying out the take-out step is not particularly limited, and for example, blocking of the packing part 102 by the blocking part 103 is released, and the resin for the protection film is released from the opening part 111 of the inner bag 105. A discharge method or a method of cutting a part of the packaging bag 101 and discharging the resin for the protection film from the cut portion is exemplified. From the viewpoint of reusing the packaging bag 101, particularly the outer bag 104 (flexible container), it is preferable to adopt a method of releasing the blockage of the packing part 102 by the closing part 103.

As a method for performing the film forming step, a known film forming method can be employed. For example, in the film forming step, an inflation method (air cooling method, water cooling method) using an inflation film forming machine, a T die method using a T die, or the like can be employed, and the inflation method is preferably employed. Further, the film forming step may include a stretching step in which the molten resin is formed into a sheet to form a film, and then the film is subjected to a stretching treatment such as a uniaxial stretching treatment or a biaxial stretching treatment. In the film forming step, the temperature (molding temperature) at which the molten resin is extruded into a film from a die is not particularly limited, and is preferably, for example, 130°C or more and 230°C or less. In addition, in the film forming step, the take-up speed at the time of extruding the molten resin into a film form from a die is not particularly limited, and is preferably, for example, 10 m/min or more and 300 m/min or less.

The thickness of the protective film obtained by the manufacturing method of the protective film according to the present embodiment is not particularly limited, and is preferably 5 µm or more and 100 µm or less, more preferably 10 µm or more and 60 µm or less, and still more preferably is 12 μm or more and 25 μm or less.

It is preferable that the resin for protection films used in the manufacturing method of the above protection films is a polyethylene-type resin. As such polyethylene-based resin, it is preferable to include high-pressure process low-density polyethylene as the ethylene-based polymer, and a mixture of polyolefin-based resins such as linear low-density polyethylene, high-density polyethylene, ethylene-propylene copolymer, and ethylene-butene copolymer may include

Moreover, in the manufacturing method of the protection film concerning this embodiment, when melt-kneading resin in a film forming process, you may add the general additive used in manufacture of polyolefin resin as needed. For example, antioxidants, antiblocking agents, lubricants, antistatic agents, ultraviolet absorbers and the like may be added. In addition, when a radical polymerization inhibitor is used in the polymerization reaction during production of the ethylene-based polymer constituting the resin to be melt-kneaded, the radical polymerization inhibitor may remain in the resin. When such a residual radical polymerization inhibitor has an antioxidant ability and has a sufficient concentration, the antioxidant may not be added in the film forming step.

The protection film obtained by the manufacturing method of the said protection film can be used as a protection film which comprises a dry film resist. In short, the resin for protection film to be filled in the packaging bag 101 can be used as a resin for manufacturing a protection film for dry film resist.

Here, the dry film resist is outlined. A dry film resist is laminated|stacked on the metal layer for electrodes, when manufacturing a lead frame used for a semiconductor integrated circuit etc., a printed wiring board, etc. Specifically, a dry film resist generally consists of a base film (for example, a film formed of polyester or the like), a photosensitive resist layer laminated on the base film, and a protection film laminated on the resist layer to provide When laminating a dry film resist on the electrode metal layer, the protection film is peeled off from the resist layer to obtain a laminated film comprising a base film and a resist layer. Then, the laminated film is bonded to the metal layer for electrodes so that the resist layer comes into contact with the metal layer for electrodes. Thereafter, by exposing the resist layer in a predetermined pattern, a predetermined pattern is baked on the resist layer. Further, parts of the resist layer other than the baked pattern are removed, and a resist pattern is formed on the electrode metal layer. And after etching the metal layer for an electrode using the resist pattern as a mask, by removing the resist pattern, a printed wiring board and a lead frame provided with an electrode corresponding to the resist pattern can be manufactured.

As a method for producing the dry film resist as described above, step (3) of bonding the protection film obtained by the above protection film production method to a laminated film comprising a base film and a resist layer formed on the base film include As a base film, the film etc. which use polyethylene terephthalate as a material are mentioned, for example. As a resist layer, what uses photosensitive resin as a material is mentioned.

As described above, in the method for manufacturing the resin-filled bag and the protective film according to the present embodiment, the outer bag 104 is a flexible container and the inner bag 105 is a bag made of polyolefin-based resin, so that the protective film It is useful in preventing fish eye from occurring. More specifically, when the flexible container is directly filled with the resin for the protection film, a part of the material adhering to the flexible container or the material constituting the flexible container is formed by rubbing the resin for the protection film with the flexible container, etc. It may be mixed as a foreign substance in the resin for use. In this case, when a protection film is manufactured using a resin containing foreign substances, a relatively large number of fish eyes are generated in the obtained protection film. In contrast, as in the present embodiment, the outer bag 104 is a flexible container and the inner bag 105 is a bag made of polyolefin-based resin, so that foreign substances from the flexible container are used. It can prevent mixing in this resin for protection films. Accordingly, it is possible to suppress occurrence of fish eye on the protection film. Further, in the dry film resist manufacturing method according to the present embodiment, since the dry film resist is manufactured using a protection film having relatively little fish eye as described above, occurrence of defects in the resist pattern can be suppressed.

In addition, the resin-filled bag according to the present embodiment, the method for manufacturing the protective film, and the method for manufacturing the dry film resist are not limited to the above embodiments, and various changes may be made without departing from the gist of the present invention. possible. In addition, structures and methods of other embodiments may be arbitrarily adopted and combined, and structures and methods related to one embodiment described above may be applied to structures and methods related to other embodiments described above.

For example, in the above embodiment, the flexible container used as the outer envelope 104 includes a body portion 106 and a lanyard portion 107, but is not limited thereto. For example, the lanyard portion 107 ), and a flexible container composed of only the body portion 106 can be used.

Further, in the above embodiment, the opening 111 of the inner bag 105 is located above the opening 109 of the outer bag 104 (i.e., flexible container), but is not limited to this, for example, The opening 111 of the inner envelope 105 may be positioned below the opening 109 of the outer envelope 104 (ie, flexible container).

Further, in the above embodiment, in the outer envelope 104, the outer circumferential shape of the side wall portion 108 and the outer circumferential shape of the bottom portion 110 when viewed from above are rectangular, but are not limited to this, For example, it can be configured to be circular.

The present invention includes the following aspects.

[1] A resin filled bag in which resin is filled in a packaging bag, wherein the resin is a resin for producing a protective film, the packaging bag has an outer bag and an inner bag, the outer bag is a flexible container, and the inner bag is a flexible container. A resin-filled bag wherein the bag is a bag made of polyolefin-based resin as a material.

[2] The resin-filled bag according to [1], wherein the resin for producing a protective film is a resin for producing a dry film resist protective film.

[3] The resin-filled bag according to [1] or [2], wherein the resin for producing the protective film contains an ethylene-based polymer.

[4] The resin-filled bag according to [3], wherein the ethylene-based polymer is high-pressure method low-density polyethylene.

[5] The resin-filled bag according to any one of [1] to [4], wherein the inner bag is a bag made of an ethylene polymer.

[6] The resin-filled bag according to any one of [1] to [5], wherein the thickness of the outer bag is 0.10 mm or more and 3.00 mm or less, and the thickness of the inner bag is 0.05 mm or more and 0.10 mm or less.

[7] The resin-filled bag according to any one of [1] to [6], wherein the outer bag has a capacity of 50 to 5000 L and the inner bag has a capacity of 100 L or more and 10000 L or less.

[8] The resin-filled bag according to any one of [1] to [7], wherein the ratio of the volume of the resin for producing the protective film to the volume of the gas in the inner bag is 0.01 or more and 2.00 or less.

[9] A method for producing a protective film, including the step (1) of taking out the resin from the resin filled bag according to any one of [1] to [8], and the step (2) of melting and kneading the taken out resin to form a film. .

[10] The method for producing a protection film according to [9], wherein the step (2) is a step using an inflation film forming machine.

[11] A dry film resist comprising a step (3) of bonding the protective film obtained by the production method according to [9] or [10] to a laminated film having a base film and a resist layer formed on the base film. manufacturing method.

[12] The method for producing a dry film resist according to [11], wherein the base film is a film made of polyethylene terephthalate as a material, and the resist layer is a layer made of a photosensitive resin as a material.

Example

Hereinafter, the present invention will be described in more detail using Examples and Comparative Examples, but the present invention is not limited to the following Examples.

<Manufacture of ethylene-based polymer>

(1) Preparation of a copolymer of ethylene and α-olefin

A fluidized bed gas phase polymerization reactor 11 as shown in FIG. 3, a post-processing hopper 12 for recovering an olefin polymer, a transfer pipe 1 and a transfer pipe 2 are provided. A gas phase polymerization apparatus 20 was used.

In the gas phase polymerization reactor 11, copolymerization of ethylene, 1-hexene and 1-butene was performed to prepare an ethylene-1-hexene-1-butene copolymer as a copolymer of ethylene and α-olefin. As a prepolymerization catalyst, what was described in Example 1 (3) of Unexamined-Japanese-Patent No. 2010-195952 was used. In the polymerization, after supplying the prepolymerization catalyst to the gas phase polymerization reactor 11, triisobutylaluminum was added at a rate of 0.55 mol and triethylamine at a rate of 0.0165 mol with respect to 1 ton of the polymer to be produced. It was supplied to the gas phase polymerization reactor (11).

Polymerization conditions were: polymerization temperature: 85 ° C., pressure: 2.1 MPaG, and the composition of the circulation gas introduced into the gas phase polymerization reactor 11 was ethylene: 81.6 mol%, hydrogen gas: 1.8 mol%, 1-hexene : 0.8 mol%, 1-butene: 2.8 mol%, nitrogen gas: 13.0 mol%, and hexane (catalyst carrier gas): 0.1 mol%.

(1-1) Density of copolymer of ethylene and α-olefin (unit: kg/m3)

The density of the copolymer of ethylene and α-olefin was measured according to the method specified in Method A in JIS K7112-1980. In addition, annealing described in JIS K6760-1995 was performed on the sample. The density of the copolymer of ethylene and α-olefin (ethylene-1-hexene-1-butene copolymer: copolymer 1) obtained by polymerization was 918.5 kg/m 3 .

(1-2) Melt flow rate of copolymer of ethylene and α-olefin (MFR, unit: g/10 min)

The MFR of the copolymer of ethylene and α-olefin was measured according to method A specified in JIS K7210-1995 under conditions of a load of 2.16 kg and a temperature of 190°C. The MFR of the copolymer of ethylene and α-olefin (ethylene-1-hexene-1-butene copolymer: copolymer 1) obtained by polymerization was 1.2 g/10 min.

(1-3) Content of structural units derived from ethylene in the copolymer of ethylene and α-olefin (unit: mass%, the total amount of the copolymer of ethylene and α-olefin is 100% by mass)

The content of structural units derived from ethylene in the copolymer of ethylene and α-olefin was measured by ¹³ C-NMR. The content of structural units derived from ethylene in the copolymer of ethylene and α-olefin (ethylene-1-hexene-1-butene copolymer: copolymer 1) obtained by polymerization was 89.6% by mass.

The measurement method and analysis method are shown below.

<Carbon nuclear magnetic resonance ( ¹³ C-NMR) measurement conditions>

Apparatus: Bruker Biospin Co., Ltd. AVANCE III 600HD

Measurement probe: 10 mm cryoprobe

Measurement solvent: 1,2-dichlorobenzene/1,1,2,2-tetrachloroethane-d2 = 85/15 (volume ratio) mixed solution

Sample concentration: 100 mg/mL

Measurement temperature: 135 ℃

Measurement method: Proton decoupling method

Total number of times: 256 times

Pulse width: 45 degrees

Pulse repetition time: 4 seconds

Measurement standard: tetramethylsilane

Attribution is documented in “JMS-REV. Macromol. chem. Pys. C29 (2.3) 201-317 (1989)”.

80 parts by mass of an ethylene-1-butene-1-hexene copolymer (copolymer 1) obtained by polymerization, and high-pressure low-density polyethylene (Sumitomo Chemical Co., Ltd. Sumitomo Chemical, MFR: 4.0 g/10 min, density: 923 kg) /m3) 20 parts by mass, erucic acid amide (Finawax-E manufactured by Fine Organics Industries Ltd) 600 ppm by mass, antioxidant (Sumitomo Chemical Co., Ltd., Sumilizer GP) 750 ppm by mass, anti-blocking agent (Mizusawa Co., Ltd.) Silton JC-50 manufactured by Chemical Industry Co., Ltd.) 700 mass ppm was mixed, supplied to an extruder, and melt-kneaded. After the obtained molten mixture was extruded from the through hole of the die plate, it was solidified with cooling water and then cut to prepare a polyethylene-based resin (Resin 1) in the shape of a fine particle size.

(2) Preparation of ethylene homopolymer

As shown in Fig. 4, a front end of the primary compressor 21, a downstream end of the primary compressor 22, a secondary compressor 23, a high pressure polymerization reactor 24, a high pressure separator 25, a low pressure separator 28 and polyethylene extraction. A high-pressure polymerization apparatus 31 equipped with a pipe 30 was used.

In the high-pressure polymerization reactor 24, homopolymerization of ethylene was performed to produce an ethylene homopolymer (homopolymer 1). As the polymerization initiator, t-butyl peroxy-2-ethylhexanoate was used.

Polymerization conditions were: polymerization temperature: 232 ° C., polymerization pressure: 164 MPaG, and the gas composition supplied to the high-pressure polymerization reactor was ethylene: 97.8 mol%, propane: 1.2 mol%, propylene: 0.7 mol%, ethane: It was set as 0.3 mol%.

(2-1) Density of ethylene homopolymer (unit: kg/m3)

The density of the ethylene homopolymer was measured by Method A according to the method stipulated in JIS K7112 after annealing described in JIS K6922-2 was performed. The density of the ethylene homopolymer (homopolymer 1) obtained by polymerization was 923.0 kg/m 3 .

(2-2) Melt flow rate of ethylene homopolymer (MFR, unit: g/10 min)

The MFR of the ethylene homopolymer was measured according to method A specified in JIS K7210-1995 under conditions of a load of 2.16 kg and a temperature of 190°C. The MFR of the ethylene homopolymer (homopolymer 1) obtained by polymerization was 3.6 g/10 min.

A molten ethylene homopolymer obtained by polymerization (homopolymer 1) is supplied to an extruder, extruded through a through hole of a die plate, solidified by cooling water, and then cut to obtain a fine-sized pellet-shaped polyethylene-based resin ( Resin 2) was prepared.

<Method for measuring physical properties of polyethylene-based resin>

(3) heating test

The packaging bag 101 was filled with pellet-shaped polyethylene resin (25 kg) to obtain a resin-filled bag. After grounding the side surface of the obtained resin-filled bag to the floor surface of an indoor warehouse, the resin-filled bag was rotated 10 turns while rotating it in the lateral direction. Thereafter, a pellet-shaped polyethylene-based resin was sampled from the resin-filled bag.

(4) Manufacture of protective film

A protection film was manufactured under the following conditions using the pellet-shaped polyethylene-type resin collected from the resin-filled bag described above.

Inflation film forming machine: DEL-40 manufactured by Modern Machinery

· Screw diameter: 40 mmφ

· L/D (extruder length/extruder screw diameter): 26

・Dice diameter: 75 mmφ

Lip gap: 2.0 mm

・Setting temperature: 190 ℃

· BUR (blow-up ratio): 1.78

· Film thickness: 30 ㎛

· Screw speed: 60 rpm

Take-off machine: AIX-400 type manufactured by Modern Machinery Co., Ltd.

(5) Measurement of Fish Eye (unit: pieces/㎡)

The fish eye contained in the protection film (hereinafter also referred to as "FE") was measured under the following conditions using a flaw detector installed in the inflation film forming machine. Based on the measurement results, the number of fish eyes (pieces/m 2 ) per 1 m 2 of a film of 60 μm thickness (2 sheets of 30 μm overlapped) was calculated.

・Inspection device: Scantec elements2 manufactured by Nagase Engineering

· Detection ability width direction: 35 ㎛/bit

· Detection ability flow direction: 35 ㎛/scan

·Throwing distance: 90 mm

· Receiving distance: 380 mm

· Inspection width: 360 mm

· Inspection area: 18 ㎡

・Detection sensitivity: -20

· FE size (200 ㎛ or more and less than 500 ㎛):

200 ㎛ ≤ ferret diameter FE (√ (vertical 2 × horizontal 2)) < 500 ㎛

· FE size (500 ㎛ or more and less than 1000 ㎛):

500 ㎛ ≤ ferret diameter FE (√ (vertical 2 × horizontal 2)) < 1000 ㎛

· FE size (more than 1000 ㎛):

1000 ㎛ ≤ ferret diameter FE (√(vertical 2 × horizontal 2))

Here, the ferret diameter means the vertical and horizontal lengths of a rectangle, and is also referred to as the projected width. The vertical length is called the vertical ferret diameter, and the horizontal length is called the horizontal ferret diameter. The measured value when an object is sandwiched between the nogis is equivalent to the ferret diameter.

[Example 1]

As the packaging bag 101, a flexible container made by Nippon Matai Co., Ltd. having an outer bag 104 and an inner bag 105 was used. The outer envelope 104 was made of polypropylene, was cylindrical, had a bottom surface of 1100 mm in diameter, 1090 mm in height, had a thickness of 0.50 mm or more and 1.50 mm or less, and had a capacity of 1030 L. The inner bag 105 was made of low density polyethylene, had a thickness of 0.05 mm, a width of 1800 mm, and a normal film of height of 2800 mm, and had a capacity of 2890 L. This packaging bag 101 was filled with pellet-shaped polyethylene-based resin (Resin 1, polyethylene produced by gas phase polymerization, 25 kg) to obtain a resin-filled bag. In the obtained resin-filled bag, the volume of the gas was 1003 L, the volume of the pellet-shaped polyethylene resin (resin 1) was 27 L, and the volume ratio of the polyethylene resin (resin 1) to the volume of the gas was 0.03. In addition, the measurement results of the fish eye of the protection film are shown in Table 1 below.

[Comparative Example 1]

As the packaging bag 101, only a flexible container manufactured by Taiyo Industrial Co., Ltd. was used. The flexible container was made of polypropylene, was rectangular, bottom: 1000 mm long x 1300 mm wide, height: 1300 mm, had a thickness of 0.50 mm or more and 1.50 mm or less, and had a capacity of 1650 L. This packaging bag 101 was filled with pellet-shaped polyethylene-based resin (Resin 1, polyethylene produced by gas phase polymerization, 25 kg) to obtain a resin-filled bag. In the obtained resin-filled bag, the volume of the gas was 1623 L, the volume of the pellet-shaped polyethylene resin (resin 1) was 27 L, and the volume ratio of the polyethylene resin (resin 1) to the volume of the gas was 0.02. In addition, the measurement results of the fish eye of the protection film are shown in Table 1 below.

[Example 2]

As the outer envelope 104 of the packaging bag 101, two commercially available self-supporting rectangular bags were used to cover the entire surface. The outer envelope 104 was made of polypropylene, bottom: 410 mm long x 410 mm wide, height: 420 mm, thickness: 1.00 mm, and the capacity was 71 L. The inner bag 105 of the packaging bag 101 was made of low density polyethylene, was a normal film of 0.10 mm in thickness, 600 mm in width, and 1000 mm in height, and had a capacity of 115 L. This packaging bag 101 was filled with pellet-shaped polyethylene resin (Resin 2, high-pressure method low-density polyethylene, 25 kg) to obtain a resin-filled bag. In the obtained resin-filled bag, the volume of the gas was 44 L, the volume of the pellet-shaped polyethylene resin (resin 2) was 27 L, and the volume ratio of the polyethylene resin (resin 2) to the volume of the gas was 0.62. In addition, the measurement results of the fish eye of the protection film are shown in Table 2 below.

[Comparative Example 2]

As the packaging bag 101, two commercially available self-supporting rectangular bags were used to cover the entire surface. The packaging bag was made of polypropylene, bottom: 410 mm long x 410 mm wide, height: 420 mm, thickness: 1.00 mm, and the capacity was 71 L. This packaging bag 101 was filled with pellet-shaped polyethylene-based resin (Resin 2, high-pressure method low-density polyethylene, 25 kg) to obtain a resin-filled bag. In the obtained resin filled bag, the volume of the gas in the filled bag is 44 L, the volume of the pellet-shaped polyethylene resin (resin 2) is 27 L, and the volume ratio of the polyethylene resin (resin 2) to the volume of the gas is It was 0.62. In addition, the measurement results of the fish eye of the protection film are shown in Table 2 below.

[Example 3]

As the packaging bag 101, a flexible container made by Nippon Matai Co., Ltd. having an outer bag 104 and an inner bag 105 was used. The outer envelope 104 was made of polypropylene, was rectangular, bottom: 1000 mm long x 1000 mm wide, high: 1750 mm, had a thickness of 0.50 mm or more and 1.50 mm or less, and had a capacity of 2230 L. The inner bag 105 was a normal film made of low-density polyethylene and linear low-density polyethylene, 0.05 mm thick, 2100 mm wide, and 3500 mm high, and had a capacity of 4910 L. This packaging bag 101 was filled with pellet-shaped polyethylene resin (Resin 2, high-pressure method low-density polyethylene, 25 kg) to obtain a resin-filled bag. In the obtained resin-filled bag, the volume of the gas was 2203 L, the volume of the pellet-shaped polyethylene resin (resin 2) was 27 L, and the volume ratio of the polyethylene resin (resin 2) to the volume of the gas was 0.01. In addition, the measurement results of the fish eye of the protection film are shown in Table 3 below.

[Example 4]

As the packaging bag 101, a flexible container made by Nippon Matai Co., Ltd. having an outer bag 104 and an inner bag 105 was used. The outer envelope 104 was made of polypropylene, was cylindrical, had a bottom surface of 1100 mm in diameter, 1090 mm in height, had a thickness of 0.50 mm or more and 1.50 mm or less, and had a capacity of 1030 L. The inner bag 105 was made of low density polyethylene, had a thickness of 0.05 mm, a width of 1800 mm, and a normal film of height of 2800 mm, and had a capacity of 2890 L. This packaging bag 101 was filled with pellet-shaped polyethylene-based resin (Resin 2, high-pressure method low-density polyethylene, 25 kg) to obtain a resin-filled bag. In the obtained resin-filled bag, the volume of the gas was 1003 L, the volume of the pellet-shaped polyethylene-based resin (resin 2) was 27 L, and the volume ratio of the polyethylene-based resin (resin 2) to the volume of the gas was 0.03. In addition, the measurement results of the fish eye of the protection film are shown in Table 3 below.

[Example 5]

As the packaging bag 101, a flexible container made by Media International Co., Ltd. having an outer bag 104 and an inner bag 105 was used. The outer envelope 104 was made of polypropylene, was cylindrical, bottom: 1150 mm in diameter, 1250 mm in height, had a thickness of 0.50 mm or more and 1.50 mm or less, and had a capacity of 1300 L. The inner bag 105 was made of low-density polyethylene, had a thickness of 0.07 mm, a width of 2000 mm, and a normal film of height of 3600 mm, and had a capacity of 4580 L. This packaging bag 101 was filled with pellet-shaped polyethylene resin (Resin 2, high-pressure method low-density polyethylene, 25 kg) to obtain a resin-filled bag. In the obtained resin-filled bag, the volume of the gas was 1273 L, the volume of the pellet-shaped polyethylene resin (resin 2) was 27 L, and the volume ratio of the polyethylene resin (resin 2) to the volume of the gas was 0.02. In addition, the measurement results of the fish eye of the protection film are shown in Table 3 below.

[Comparative Example 3]

As the packaging bag 101, only a flexible container manufactured by Taiyo Industrial Co., Ltd. was used. The flexible container was made of polypropylene, was rectangular, bottom: 1000 mm long x 1300 mm wide, high: 1300 mm, had a thickness of 0.50 to 1.50 mm, and a capacity of 1650 L. This packaging bag 101 was filled with pellet-shaped polyethylene resin (Resin 2, high-pressure method low-density polyethylene, 25 kg) to obtain a resin-filled bag. In the obtained resin-filled bag, the volume of the gas was 1623 L, the volume of the pellet-shaped polyethylene resin (resin 2) was 27 L, and the volume ratio of the polyethylene resin (resin 2) to the volume of the gas was 0.02. In addition, the measurement results of the fish eye of the protection film are shown in Table 3 below.

＜Summary＞

From Table 1, it is confirmed that Example 1 has fewer fish eyes than Comparative Example 1. From Table 2, it is confirmed that Example 2 has fewer fish eyes than Comparative Example 2. From Table 3, it is confirmed that Examples 3, 4 and 5 have fewer fish eyes than Comparative Example 3. In short, as in the present invention, by using the packaging bag 101 in which the outer bag 104 is a flexible container and the inner bag 105 is a bag made of polyolefin-based resin, fish eye occurs on the protective film. can refrain from doing so.

1: Transfer piping
2: Transfer piping
3, 4, 7, 8: open/close valve (valve)
5, 6: inlet pipe
9, 10: gas tank
11: gas phase polymerization reactor
12: Hopper (container)
13 : Compressor
14: heat exchanger
15: circulation gas line
16: gas distribution plate
20: vapor phase polymerization device
21: 1st compressor front
22: After the 1st compressor
23: secondary compressor
24: high pressure polymerization reactor
25: high pressure separator
26: unreacted high-pressure ethylene pipe
27: polyethylene discharge piping
28: low pressure separator
29: unreacted low pressure ethylene pipe
30: polyethylene extraction piping
31: high-pressure polymerization unit
101: packaging bag
102: charging part
103: occluded part
104: outer envelope
105: inner envelope
106: main body
107: hanging string
108: side wall
109: opening
110: bottom
111: opening

Claims (12)

A resin filled bag in which resin is filled in the packaging bag,
The resin is a resin for producing a protective film,
The packaging bag has an outer envelope and an inner envelope,
The outer envelope is a flexible container,
The resin-filled bag wherein the inner bag is a bag made of polyolefin-based resin as a material. According to claim 1,
The resin-filled bag in which the said resin for manufacture of a protection film is resin for manufacture of a protection film of a dry film resist. According to claim 1 or 2,
The resin-filled bag in which the said resin for manufacture of a protection film contains an ethylene-type polymer. According to claim 3,
The resin-filled bag wherein the ethylene-based polymer is high-pressure method low-density polyethylene. According to claim 1 or 2,
The resin-filled bag wherein the inner bag is a bag made of an ethylene-based polymer. According to claim 1 or 2,
The thickness of the outer envelope is 0.10 mm or more and 3.00 mm or less,
A resin-filled bag, wherein the inner bag has a thickness of 0.05 mm or more and 0.10 mm or less. According to claim 1 or 2,
The capacity of the outer envelope is 50 L or more and 5000 L or less,
A resin-filled bag wherein the capacity of the inner bag is 100 L or more and 10000 L or less. According to claim 1 or 2,
The resin-filled bag, wherein the ratio of the volume of the resin for producing the protective film to the volume of the gas in the inner bag is 0.01 or more and 2.00 or less. Step (1) of taking out resin from the resin-filled bag according to claim 1 or 2;
The manufacturing method of the protection film including the process (2) of melt-kneading and film-forming the resin taken out. According to claim 9,
The manufacturing method of the protection film in which the said process (2) is a process using an inflation film molding machine. Dry film resist manufacturing method including step (3) of bonding the protection film obtained by the manufacturing method according to claim 9 to a laminated film comprising a base film and a resist layer formed on the base film . According to claim 11,
The base film is a film made of polyethylene terephthalate as a material,
The method for producing a dry film resist, wherein the resist layer is a layer made of a photosensitive resin as a material.

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