KR20230060900A - 멀티 프로버용 카트리지 락킹장치 - Google Patents

멀티 프로버용 카트리지 락킹장치 Download PDF

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Publication number
KR20230060900A
KR20230060900A KR1020210145606A KR20210145606A KR20230060900A KR 20230060900 A KR20230060900 A KR 20230060900A KR 1020210145606 A KR1020210145606 A KR 1020210145606A KR 20210145606 A KR20210145606 A KR 20210145606A KR 20230060900 A KR20230060900 A KR 20230060900A
Authority
KR
South Korea
Prior art keywords
head
assembly
chuck assembly
wafer
card
Prior art date
Application number
KR1020210145606A
Other languages
English (en)
Korean (ko)
Inventor
남경태
모승기
추성원
Original Assignee
한국생산기술연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국생산기술연구원 filed Critical 한국생산기술연구원
Priority to KR1020210145606A priority Critical patent/KR20230060900A/ko
Priority to PCT/KR2021/015322 priority patent/WO2023074947A1/fr
Publication of KR20230060900A publication Critical patent/KR20230060900A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0441—Details
    • G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1020210145606A 2021-10-28 2021-10-28 멀티 프로버용 카트리지 락킹장치 KR20230060900A (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020210145606A KR20230060900A (ko) 2021-10-28 2021-10-28 멀티 프로버용 카트리지 락킹장치
PCT/KR2021/015322 WO2023074947A1 (fr) 2021-10-28 2021-10-28 Appareil de verrouillage de cartouche pour multi-sondeur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020210145606A KR20230060900A (ko) 2021-10-28 2021-10-28 멀티 프로버용 카트리지 락킹장치

Publications (1)

Publication Number Publication Date
KR20230060900A true KR20230060900A (ko) 2023-05-08

Family

ID=86158159

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020210145606A KR20230060900A (ko) 2021-10-28 2021-10-28 멀티 프로버용 카트리지 락킹장치

Country Status (2)

Country Link
KR (1) KR20230060900A (fr)
WO (1) WO2023074947A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102648394B1 (ko) * 2023-11-15 2024-03-18 주식회사 유니테스트 웨이퍼 검사용 프로브 카드 홀더

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118033187A (zh) * 2024-02-08 2024-05-14 苏州联讯仪器股份有限公司 一种升降机构及晶圆级老化测试装置
CN118033186A (zh) * 2024-02-08 2024-05-14 苏州联讯仪器股份有限公司 一种晶圆级老化测试夹具及晶圆级老化测试装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170064750A (ko) * 2015-12-02 2017-06-12 세메스 주식회사 프로브 스테이션
KR102033560B1 (ko) * 2018-11-26 2019-10-17 (주)케미텍 반도체 테스트 장치
KR20210009136A (ko) * 2019-07-16 2021-01-26 한국전기연구원 프로버용 카트리지
KR20210009094A (ko) * 2019-07-16 2021-01-26 한국전기연구원 프로버용 카트리지
KR20210012348A (ko) * 2019-07-25 2021-02-03 한국전기연구원 프로버용 카트리지

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102648394B1 (ko) * 2023-11-15 2024-03-18 주식회사 유니테스트 웨이퍼 검사용 프로브 카드 홀더

Also Published As

Publication number Publication date
WO2023074947A1 (fr) 2023-05-04

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