KR20230040448A - Monitoring system of robot assembly provided in vacuum chamber - Google Patents

Abstract

The present invention relates to a monitoring system of a robot assembly provided in a vacuum chamber, and more specifically, to a monitoring system of a robot assembly provided in a vacuum chamber, which is configured to analyze by considering not only image data acquired by an image acquisition module but also distance data measured by a displacement measurement module in order to determine the misalignment of the location of a robot assembly operated in a vacuum chamber, thereby precisely and easily determining the misalignment of the location of the robot assembly by monitoring the state of the robot assembly in real time, and also precisely and easily performing calibration of the location of the robot assembly. To this end, the monitoring system of a robot assembly provided in a vacuum chamber according to the present invention is a monitoring system of a robot assembly provided in a vacuum chamber, which comprises: an image acquisition module acquiring the image of a reference mark on at least one predetermined location included in the moving route of the robot assembly; a displacement measurement module which measures the distance to the robot assembly from at least one predetermined location included in the moving route of the robot assembly; and a monitoring device which analyzes the image data acquired by the image acquisition module and the distance data measured by the displacement measurement module to monitor the state of the robot assembly in real time. The reference mark is formed at the robot assembly or arranged at a specific point within the vacuum chamber. The image acquisition module is mounted on the robot assembly or arranged on the inside or outside of the vacuum chamber. The displacement measurement module is arranged on the inside or outside of the vacuum chamber.

Description

Monitoring system of robot assembly provided in vacuum chamber

The present invention relates to a monitoring system for a robot assembly provided in a vacuum chamber, and in particular, image data acquired by an image acquisition module and measured by a displacement measurement module to determine positional misalignment of a robot assembly operating in a vacuum chamber. By configuring the analyzed distance data in consideration, it is possible to accurately and easily determine the misalignment of the position of the robot assembly by monitoring the state of the robot assembly in real time, and furthermore, it is possible to accurately and easily correct the position of the robot assembly. It relates to a monitoring system of a robot assembly provided in a vacuum chamber to do so.

In general, industrial robots repeatedly move along taught coordinates. Industrial robots must always reach their starting point or destination accurately in order to faithfully perform a given task. For the same target position, if the actual arrival position of the robot in the previous cycle and the next cycle is different, it may affect the work.

Repeatability is a specification that indicates how much the robot's actual position error will be when it repeatedly moves to the same position. Since the target position in the program stored in the robot is the same, the robot must always reach the same position, but due to the physical limitations of the robot, some degree of error cannot be avoided.

In relation to the prior art, Korean Patent Registration No. 10-1329322 (hereinafter referred to as "prior art literature") is automatic teaching of a substrate transfer robot in which a vision camera is installed on a plate and a reference display is attached to a jig wafer in the form of a sticker. device is proposed.

However, the prior art document cannot accurately determine the height of the substrate transfer robot because the position of the substrate transfer robot arm needs to be corrected based on the 2D image data captured by the vision camera, so the substrate transfer robot arm moves There is a problem that a movement error inevitably occurs between the desired coordinate and the actual movement position.

That is, in the prior art document, since it is necessary to determine whether the position of the robot arm is out of the predetermined position only by the vision camera, it is impossible to accurately determine the misalignment of the position of the robot arm, and furthermore, it is difficult to perform accurate position correction. It has incalculable drawbacks.

Republic of Korea Patent Registration No. 10-1329322 (Public date: 2013.11.14., Title of invention: Automatic teaching device for substrate transfer robot)

The present invention was invented to solve the problems of the prior art as described above, and is measured by a displacement measurement module as well as image data obtained by an image acquisition module to determine positional misalignment of a robot assembly operating in a vacuum chamber. By configuring the analyzed distance data in consideration, it is possible to accurately and easily determine the misalignment of the position of the robot assembly by monitoring the state of the robot assembly in real time, and furthermore, it is possible to accurately and easily correct the position of the robot assembly. Its object is to provide a monitoring system of a robot assembly provided in a vacuum chamber to do so.

In order to solve the above problem, the present invention proposed to solve the above problems, the constituent means constituting the monitoring system of the robot assembly provided in the vacuum chamber, in the monitoring system of the robot assembly provided in the vacuum chamber, is included in the movement path of the robot assembly An image acquisition module for acquiring an image of a fiducial mark at at least one preset position, a displacement measurement module for measuring a distance from the robot assembly at at least one preset position included in a movement path of the robot assembly, and the image acquisition module It is configured to include a monitoring device for monitoring the state of the robot assembly in real time by analyzing the image data obtained by and the distance data measured by the displacement measurement module, wherein the reference mark is formed on the robot assembly or the vacuum Disposed at a specific point inside the chamber, the image acquisition module is mounted on the robot assembly or disposed inside or outside the vacuum chamber, characterized in that the displacement measurement module is disposed inside or outside the vacuum chamber do.

Here, the displacement measurement module disposed inside the vacuum chamber is a laser displacement sensor.

In addition, the monitoring device compares and analyzes the image data obtained by the image acquisition module with the image reference data set in advance to perform a first position alignment determination to determine whether the position of the robot assembly is out of an allowable error range. And performing a second position alignment determination to determine whether the position of the robot assembly is out of the allowable error range by comparing and analyzing the distance data measured by the displacement measurement module with the distance reference data set in advance. do.

Here, if the monitoring device determines that the position of the robot assembly is out of the tolerance range in any one of the determination of whether the first position is aligned and the determination of whether the second position is aligned, it is determined that the position of the robot assembly needs to be corrected. It is characterized in that the position calibration correction value is calculated by determining.

According to the monitoring system of the robot assembly provided in the vacuum chamber of the present invention having the above problems and solution means, in order to determine the positional misalignment of the robot assembly operating in the vacuum chamber, as well as the image data acquired by the image acquisition module Since it is configured to analyze in consideration of the distance data measured by the displacement measurement module, it is possible to accurately and easily determine the position misalignment of the robot assembly by monitoring the state of the robot assembly in real time, and furthermore, the position correction of the robot assembly is also accurate. Advantages are generated that allow it to be performed easily and easily.

1 is a schematic configuration diagram of a monitoring system of a robot assembly provided in a vacuum chamber according to an embodiment of the present invention.
2 is a configuration block diagram of a monitoring device constituting a monitoring system of a robot assembly provided in a vacuum chamber according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings, a preferred embodiment of a monitoring system for a robot assembly provided in a vacuum chamber of the present invention having the above problems, solutions, and effects will be described in detail.

Since the present invention can apply various transformations and have various embodiments, specific embodiments will be illustrated in the drawings and described in detail in the detailed description. Effects and features of the present invention, and methods for achieving them will become clear with reference to the embodiments described later in detail together with the drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and when describing with reference to the drawings, the same or corresponding components are assigned the same reference numerals, and overlapping descriptions thereof will be omitted. .

In the following embodiments, terms such as include or have mean that features or components described in the specification exist, and do not preclude the possibility that one or more other features or components may be added.

In the drawings, the size of components may be exaggerated or reduced for convenience of explanation. For example, since the size and thickness of each component shown in the drawings are arbitrarily shown for convenience of description, the present invention is not necessarily limited to the illustrated bar.

1 is a schematic configuration diagram of a monitoring system of a robot assembly provided in a vacuum chamber according to an embodiment of the present invention, and FIG. 2 is a configuration diagram of a monitoring system of a robot assembly provided in a vacuum chamber according to an embodiment of the present invention. It is a block diagram of the monitoring device.

As shown in Figure 1, the monitoring system 100 of the robot assembly provided in the vacuum chamber according to an embodiment of the present invention is a reference mark when the robot assembly 30 in the vacuum chamber 10 arrives at a predetermined position. An image acquisition module 50 for acquiring an image, a displacement measurement module 70 for measuring a distance to the robot assembly 30 when the robot assembly 30 in the vacuum chamber 10 arrives at a predetermined position, and the vacuum chamber ( 10) It is configured to include a monitoring device 90 disposed outside to monitor the state of the robot assembly 30.

The robot assembly 30 is provided in the vacuum chamber 10 to perform various tasks. For example, the robot assembly 30 may be provided in the vacuum chamber 10 to perform an operation of transferring glass to be processed from the conveyor 1 to the work stage 3 .

The robot assembly 30 may correspond to various industrial robots such as semiconductor wafer transfer robots, automobile assembly line robots, logistics transfer robots, inspection robots, clean room robots, LCD manufacturing robots, and precision stages, , It is generally programmed to repeat the same task through a pre-entered path for a long time.

The robot assembly 30 needs to be monitored to see if the movement path and work position are being accurately implemented. At this time, if an error is found in the work position, the position needs to be corrected using a position correction system.

The robot assembly 30 may be configured in various forms as long as it can repeatedly perform a predetermined task or operation within the vacuum chamber 10 . However, the robot assembly 30 includes at least one link 31 and a hand 33 connected to an end of the link 31 . The link 31 can move to various positions through the robot assembly 30 and multi-joints and has various movements. And, the hand 33 performs an operation of picking up or supporting a specific object (glass, etc.).

Since the robot assembly 30 may deviate from the path and the designated position due to internal and external factors as it repeatedly moves along the input path as a part of the automation equipment, it is determined whether it deviates from the movement path or from the designated position. need to be continuously monitored.

In order to monitor the robot assembly 30, it is necessary to acquire data capable of confirming the location and alignment of the robot assembly 30 at a predetermined location. To this end, in the present invention, an image acquisition module 50 and a displacement measurement module 70 are provided. That is, in the present invention, in order to monitor position misalignment of the robot assembly 30, the robot assembly measured by the displacement measurement module 70 rather than simply considering only the image data acquired by the image acquisition module 50 ( 30) and distance data are also considered.

The image acquisition module 30 performs an operation of acquiring an image of a fiducial mark at at least one predetermined position included in the movement path of the robot assembly 30 . It is preferable that the predetermined position is at least one, and for example, in FIG. 1 the robot assembly 30 has a moving path between the conveyor 1 and the work stage 3, wherein the at least one The preset position of may include a position when the hand 33 of the robot assembly 30 arrives on the conveyor 1 and a position when it arrives on the work stage 3 .

The robot assembly 30 may continuously move at the at least one preset position, but preferably includes an operation of momentarily stopping at the at least one preset position. In order to accurately acquire the image of the reference mart by the image acquisition module 30, the robot assembly 30 has a momentary stopped state, and at this time, the image acquisition module 30 acquires an image of the reference mark it is desirable

The fiducial mark is formed on the robot assembly 30 or disposed at a specific point inside the vacuum chamber 10 . Preferably, the reference mark has a shape in which two or more straight lines intersect or a polygonal shape.

When the reference mark is formed on the robot assembly 30, the reference mark is preferably formed on the surface of the hand 33 of the robot assembly 30, and the reference mark is formed on the inside of the vacuum chamber 10. When arranged at a specific point, the surface of the structure near the preset position corresponding to the position where the image of the reference mark is acquired by the image acquisition module 50, specifically the surface of the conveyor 1 and the work stage 3 ) is preferably formed on the surface of Of course, when the fiducial mark is formed on the surface of the conveyor 1 and the work stage 3, it is preferable to form it at a position where it is not damaged or covered by a moving object (glass, etc.).

Meanwhile, the location of the image acquisition module 50 may be changed or determined depending on where the fiducial mark is formed. Specifically, the image acquisition module 50 is mounted on the robot assembly 30 or disposed inside or outside the vacuum chamber 10 .

Specifically, when the fiducial mark is disposed at a specific point inside the vacuum chamber 10, specifically, the surface of the conveyor 1 corresponding to the surface of the structure near the preset position and the work stage 3 When formed on a surface, the image acquisition module 50 may be disposed on the robot assembly 30, more specifically, the link 31 or the hand 33, and is mounted on the hand 33. more preferable

In this case, when the robot assembly 30 momentarily stops at a predetermined position, the image acquisition module 50 mounted on the robot assembly 30 is located at a specific point inside the vacuum chamber 10, specifically, the base station. An operation of photographing fiducial marks formed on the surface of the conveyor 1 and the surface of the work stage 3 corresponding to the surface of the structure near the set position may be performed.

When the image acquisition module 50 is disposed in the robot assembly 30, the image acquisition module 50 is fixedly disposed so that a minute posture change does not occur, so that the robot assembly 30 is momentarily in a preset position. When stopped, an image of the fiducial mark is acquired while always looking at the same direction and position. Therefore, when the moving path of the robot assembly 30 is out of alignment or misaligned, the image data of the fiducial mark captured by the image acquisition module 50 indicates that the robot assembly 30 is on a normal moving path or in an aligned state. It is different from the reference image data of the fiducial mark taken in the present state, and through this, the monitoring device 90 for monitoring the state and operation of the robot assembly 30 is misaligned and the path deviation of the robot assembly 30 etc. can be determined, and furthermore, a procedure related to teaching for correcting an error can be performed.

On the other hand, when the reference mark is formed on the robot assembly 30, specifically the hand 33, the image acquisition module 50 of the reference mark formed on the hand 33 of the robot assembly 30 If image data can be obtained by taking an image, it can be disposed in various positions inside or outside the vacuum chamber 10 .

Specifically, in this case, as shown in FIG. 1, the image acquisition module 50 is disposed inside the vacuum chamber 10 and includes at least one unit included in the movement path of the robot assembly 30. It is arranged near a set position, specifically, a position where the robot assembly 30 momentarily stops. Accordingly, the image acquisition module 50 performs an operation of photographing a fiducial mark formed on the hand 33 of the robot assembly 30 when the robot assembly 30 momentarily stops at a preset position.

Also, the image acquisition module 50 may be disposed outside the vacuum chamber 10 . However, in this case, it is preferable that a transparent window capable of photographing the interior from the outside is formed in the vacuum chamber 10 . Therefore, the image acquisition module 50 disposed outside the vacuum chamber 10 is moved from the outside through the window to the inside of the vacuum chamber 10, specifically, the robot assembly 30 at a preset position. Image data may be obtained by photographing a reference mark formed on the hand 33 of the robot assembly 30 in a stopped state.

Eventually, the image acquisition module 50 may perform an operation of photographing a fiducial mark formed on the hand 33 of the robot assembly 30 when the robot assembly 30 momentarily stops at a preset position. there is.

When the image acquisition module 50 is disposed inside or outside the vacuum chamber 10, the image acquisition module 50 is fixedly disposed so as not to cause a slight change in posture, always looking at the same direction and position. Acquire an image of the fiducial mark in Therefore, when the moving path of the robot assembly 30 is out of alignment or misaligned, the image data of the fiducial mark captured by the image acquisition module 50 indicates that the robot assembly 30 is on a normal moving path or in an aligned state. It is different from the reference image data of the fiducial mark taken in the present state, and through this, the monitoring device 90 for monitoring the state and operation of the robot assembly 30 is misaligned and the path deviation of the robot assembly 30 etc. can be determined, and furthermore, a procedure related to teaching for correcting an error can be performed.

Separately from the above-described image acquisition module 50, a displacement measurement module 70 is provided to acquire data capable of monitoring the state of the robot assembly 30. The displacement measurement module 70 is the robot assembly 30 ) Performs an operation of measuring a distance with the robot assembly 30 at at least one predetermined position included in the movement path of the.

That is, the displacement measuring module 70 performs an operation of measuring a distance between itself and the robot assembly 30 when the robot assembly 30 momentarily stops at a predetermined position. More specifically, the displacement measurement module 70 measures the distance between itself and the hand 33 of the robot assembly 30 at a preset position of the robot assembly 30 to obtain distance data. carry out

The displacement measuring module 70 is disposed inside or outside the vacuum chamber 10 . That is, the displacement measurement module 70 may be disposed outside as well as inside the vacuum chamber 10 . The displacement measuring module 70 may adopt and apply various displacement measuring sensors if the robot assembly 30 can measure the distance to the robot assembly 30 in a state in which the robot assembly 30 is momentarily stopped at a preset position.

The displacement measurement module 70 may select and apply any one of various displacement measurement sensors such as a laser displacement sensor, an ultrasonic sensor, an optical sensor, and an electron beam sensor. It is preferable to be disposed inside, and in consideration of this, it is preferable to adopt and apply a laser displacement sensor to the displacement measuring module 70. That is, the displacement measurement module 70 disposed inside the vacuum chamber 10 is preferably a laser displacement sensor.

More specifically, the displacement measurement module 70 is preferably disposed near the robot assembly 30, that is, inside the vacuum chamber 10, in order to more accurately measure the distance to the robot assembly 30. However, since the vacuum chamber 10 is in a vacuum state, accurate distance measurement cannot be guaranteed due to refraction of ultrasonic waves or light, while laser can be free from refraction in a vacuum state because of its good linearity. Therefore, the displacement measurement module 70 applied to the present invention is preferably a laser displacement sensor disposed inside the vacuum chamber 10, and the laser displacement sensor is included in the movement path of the robot assembly 30 An operation of measuring a distance with the robot assembly 30 is performed at at least one preset position.

Eventually, the displacement measuring module 70, specifically, the laser displacement sensor measures the distance to the robot assembly 30, specifically the hand 33, when the robot assembly 30 momentarily stops at a preset position. action can be performed.

When the displacement measurement module 70 is disposed inside or outside the vacuum chamber 10, the displacement measurement module 70 is fixedly disposed so as not to cause a slight change in posture, and is always viewed in the same direction and position. Obtain distance data by measuring the distance to the robot assembly 30 in . Therefore, when the moving path of the robot assembly 30 is out of alignment or misaligned, the distance data related to the robot assembly 30 captured by the side measurement module 70 indicates that the robot assembly 30 is on the normal moving path. The monitoring device 90, which monitors the state and operation of the robot assembly 30 through this, is different from the reference distance data measured in a state in which the robot assembly 30 is in an alignment state and the misalignment and path of the robot assembly 30 Departure or the like can be determined, and furthermore, procedures related to teaching for correcting errors can be performed.

The image acquisition module 50 and the displacement measurement module 70 each have a communication unit or a connection interface. Accordingly, the image acquisition module 50 and the displacement measuring module 70 may perform data communication with the monitoring device 90 disposed outside the vacuum chamber 10 . Eventually, the image acquisition module 50 may transmit image data acquired by photographing the fiducial mark to the monitoring device 90, and the displacement measurement module 70 may also measure the distance to the robot assembly 30 The obtained distance data may be transmitted to the monitoring device 90 .

The monitoring device 90 analyzes the image data acquired by the image acquisition module 50 and the distance data measured by the displacement measurement module 70 to monitor the state of the robot assembly 30 in real time. Do it. The monitoring device 90 analyzes the image data and the distance data to monitor whether the robot assembly 30 is out of the path, out of alignment, or out of position, and furthermore, the extent to which it is out of position. , the degree of deviation from the alignment state, the degree of deviation from the path, for example, the degree of deviation from the reference coordinates in the x, y, z directions, and the rotation angle from the reference angle, etc. can be calculated so that teaching can proceed through correction. there is.

Specifically, the monitoring device 90 compares and analyzes the image data obtained by the image acquisition module 50 with preset image reference data to determine whether the position of the robot assembly 30 is out of the allowable error range. A first position alignment determination is performed, and the distance data measured by the displacement measurement module 70 is compared and analyzed with previously set distance reference data so that the position of the robot assembly 30 is out of the allowable error range. An operation for determining whether or not the second position is aligned is performed.

The monitoring device 90 stores and manages reference data related to coordinates of a specific point of the robot assembly 30 or a specific point of the hand at a preset position of the robot assembly 30 and a rotation angle. That is, it stores and manages reference data related to coordinate values and rotational angles of the robot assembly 30 at a fixed position.

The monitoring device 90 transmits the image acquisition module 50 when the robot assembly 30 is in a predetermined position (aligned position in an initially taught state, predetermined position, position on a path, etc.) The reference image data obtained through the storage and management is stored and managed, and through the reference image data, reference data related to coordinate values and rotation angles of the robot assembly 30 are stored and managed together.

In addition, the monitoring device 90, when the robot assembly 30 is in a predetermined position (aligned position in an initially taught state, predetermined position, position on a path, etc.), the displacement measuring module 70 ) Stores and manages the reference distance data obtained through, and stores and manages reference data regarding coordinate values and rotation angles of the robot assembly 30 together through the reference distance data.

Therefore, the monitoring device 90 compares and analyzes the image data acquired and transmitted by the image acquisition module 50 with the stored and managed pre-set image reference data to calculate a coordinate value and a difference value of a rotation angle. and a first position alignment determination process of determining whether the difference between the coordinate value and the rotation angle is out of a preset tolerance range may be performed.

Specifically, the reference coordinate values and reference rotation angles related to the image reference data are stored and managed, and the transmitted image data may be analyzed to calculate the related coordinate values and reference rotation angles, and the reference coordinate values and reference rotation angles may be calculated. A difference between the angle and the reference rotation angle and the related coordinate value calculated by analyzing the transmitted image data may be calculated.

In addition, the monitoring device 90 stores and manages an allowable error range for the position of the robot assembly. Although the tolerance range is out of the reference coordinate value and the reference rotation angle, it is not a problem enough to teach the robot assembly 30 and the robot assembly 30 is out of range to the extent that it can continuously perform normal tasks and operations. means

Therefore, the monitoring device 90 performs a first position alignment determination process for determining whether the difference between the coordinate value and the rotation angle is out of the preset tolerance range. If it is determined that the first alignment is out of the allowable error range through the process of determining whether or not the first position is aligned, it may be determined that teaching is necessary through correction of coordinate values and rotation angles of the robot assembly 30 .

In addition, the monitoring device 90 compares and analyzes the distance data obtained and transmitted by the displacement measurement module 70 with the stored and managed distance reference data, and calculates a difference value between coordinate values and rotation angles. and a second position alignment determination process for determining whether the difference between the coordinate value and the rotation angle is out of a preset tolerance range may be performed.

Specifically, the reference coordinate value and reference rotation angle related to the distance reference data are stored and managed, and the transmitted distance data may be analyzed to calculate the related coordinate value and reference rotation angle, and the reference coordinate value and reference rotation angle may be calculated. A difference between the angle and the reference rotation angle and the related coordinate value calculated by analyzing the transmitted distance data may be calculated.

In addition, the monitoring device 90 stores and manages an allowable error range for the position of the robot assembly. Although the tolerance range is out of the reference coordinate value and the reference rotation angle, it is not a problem enough to teach the robot assembly 30 and the robot assembly 30 is out of range to the extent that it can continuously perform normal tasks and operations. means

Therefore, the monitoring device 90 performs a second position alignment determination process for determining whether the difference between the coordinate value and the rotation angle is out of the preset tolerance range. If it is determined that the case is out of the allowable error range through the second position alignment determination process, it may be determined that teaching is necessary through correction of coordinate values and rotation angles of the robot assembly 30.

The monitoring device 90 determines whether the position of the robot assembly 30 is out of the tolerance range in any one of the first position alignment determination and the second position alignment determination determination, the robot assembly 30 ), it is determined that the position correction is necessary, and an operation of calculating a position correction correction value is performed.

Specifically, the image data obtained by the image acquisition module 50 is compared and analyzed with reference image data to determine that the position of the robot assembly 30 is out of the allowable error range or the displacement measurement module 70 obtains If the position of the robot assembly 30 is determined to be out of the tolerance range by comparing and analyzing the distance data with the reference distance data, or if the position of the robot assembly 30 is determined to be out of the tolerance range in both cases, the monitoring device In step 90, it is determined that the robot assembly 30 is misaligned or out of a predetermined path, and a position correction correction value is calculated so that teaching can proceed.

As shown in FIG. 2, the monitoring device 90 according to the present invention performing such an operation is image data obtained from the image acquisition module 50 under the control of the control unit 91 and the control unit 91. , and performs the above-described first position alignment determination and second position alignment determination according to the control of the input unit 93 receiving the distance data obtained from the displacement measurement module 70 and the control unit 91. And, if it is determined that the position of the robot assembly 30 is out of the tolerance range in any one of the first position alignment determination and the second position alignment determination determination, the position correction of the robot assembly 30 An analysis unit 95 that determines that it is necessary and performs an operation of calculating a position correction correction value, a visualization unit 97 that visualizes and displays the analysis result information under the control of the control unit 91, and the control unit 91 It is configured to include an alarm unit 99 that generates an alarm when it is determined that the position of the robot assembly 30 is out of position, misaligned, or out of the path under the control of.

The controller 91 controls overall operations of the monitoring device 90 . That is, the controller 91 controls the operation of the input unit 93, analysis unit 95, visualization unit 97 and alarm unit 99.

The input unit 93 is wired or wirelessly connected to the image acquisition module 50 and the displacement measurement module 70 under the control of the control unit 91 to receive acquired image data and distance data, respectively. The controller 91 controls the input unit 93 so that the acquired image data and distance data can be input in real time.

Image data and distance data input in real time through the input unit 93 are transmitted to the analysis unit 95 under the control of the control unit 91 and analyzed. That is, the analyzer 95 receives and analyzes the image data and the distance data under the control of the control unit 91 . The analyzer 95 performs the above-described operations of analyzing and determining whether the first position is aligned, the second position is aligned, and the position correction value is calculated as a whole under the control of the control unit 91.

In this way, when various and specific analysis result information is generated by the analysis unit 95, the control unit 91 controls the visualization unit 97 to visualize and display the analysis result information in various forms. do. That is, the visualization unit 97 visualizes and displays the various analysis result information through various information display forms under the control of the control unit 91 . For example, the visualization unit 97 may display the analysis result information in various forms such as a graph display form, a flickering display form, and a color display form. According to the operation of the visualization unit 97, the manager can visually check and recognize the state of the robot assembly 30 in real time, and when an abnormality occurs in the position, alignment, route, etc. of the robot assembly 30, it is possible to quickly can be dealt with

On the other hand, when various and specific analysis result information is generated by the analysis unit 95, the control unit 91 controls the alarm unit 99 to indicate an abnormal state of the robot assembly, that is, misalignment, deviation from the normal position, and path deviation. An alarm is generated to notify the administrator of the occurrence of such occurrences. That is, the alarm unit 99 generates an alarm when an abnormal state of the robot assembly occurs according to the analysis result information of the analysis unit 95 under the control of the control unit 91 so that the manager can hear it. let it be According to the operation of the alarm unit 99, the manager can aurally check and recognize the misalignment, departure from the normal position, etc. of the robot assembly in real time, and can quickly respond to the occurrence of an abnormal situation of the robot assembly.

Embodiments according to the present invention have been described above, but these are merely examples, and those skilled in the art will understand that various modifications and embodiments of equivalent range are possible therefrom. Therefore, the true technical protection scope of the present invention should be defined by the following claims.

1: conveyor 3: work stage
10: vacuum chamber 30: robot assembly
31: link 33: hand
50: image acquisition module 70: displacement measurement module
90: monitoring device 91: control unit
93: input unit 95: analysis unit
97: visualization unit 99: alarm unit
100: monitoring system of the robot assembly provided in the vacuum chamber

Claims (4)

In the monitoring system of the robot assembly provided in the vacuum chamber,
an image acquisition module for acquiring an image of a fiducial mark at at least one preset position included in the movement path of the robot assembly;
a displacement measuring module for measuring a distance from the robot assembly at at least one predetermined position included in the movement path of the robot assembly;
It is configured to include a monitoring device for monitoring the state of the robot assembly in real time by analyzing the image data acquired by the image acquisition module and the distance data measured by the displacement measurement module,
The fiducial mark is formed on the robot assembly or disposed at a specific point inside the vacuum chamber, the image acquisition module is mounted on the robot assembly or disposed inside or outside the vacuum chamber, and the displacement measurement module The monitoring system of the robot assembly provided in the vacuum chamber, characterized in that disposed inside or outside the vacuum chamber.
The method of claim 1,
The displacement measurement module disposed inside the vacuum chamber is a monitoring system of a robot assembly provided in a vacuum chamber, characterized in that a laser displacement sensor.
The method of claim 1,
The monitoring device compares and analyzes the image data acquired by the image acquisition module with preset image reference data to determine whether the position of the robot assembly is out of an acceptable error range. Performs a first position alignment determination, A second position alignment determination is performed to determine whether the position of the robot assembly is out of an allowable error range by comparing and analyzing the distance data measured by the displacement measurement module with preset distance reference data. Vacuum characterized in that Monitoring system of the robot assembly provided in the chamber.
The method of claim 3,
When the monitoring device determines that the position of the robot assembly is out of the tolerance range in any one of the first position alignment determination and the second position alignment determination determination, it is determined that position calibration of the robot assembly is necessary A monitoring system of a robot assembly provided in a vacuum chamber, characterized in that for calculating a position correction correction value.

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