KR20220165351A - Vacuum gate valve of bellows opening and closing type - Google Patents

Abstract

The present invention relates to a bellows-type vacuum gate valve, which can ensure the operability and airtightness of the valve and prevent a shock caused by an overload of a vacuum pump when a vacuum chamber opens or closes. The present invention provides the bellows-type vacuum gate valve, which can adopt a swing-type opening and closing mechanism for opening and closing the valve by using the linear motion of a cylinder and the rotational motion of a link device when the vacuum gate valve opens or closes, thereby actively responding to the standard expansion of the vacuum gate valve resulting from the processing capacity expansion of the vacuum pump, can particularly adopt a bellows-type opening and closing mechanism for making the valve airtight and nonairtight by opening and closing the valve in a bellows manner in which the valve is expanded and contracted by air pressure and vacuum pressure, thereby ensuring excellent operability and improved tightness of the vacuum gate valve, and can be provided as a novel vacuum gate valve which opens in a two-step manner by using a small-diameter slow pump line and a large-diameter slow pump line, thereby controlling an overload of the vacuum pump and suppressing vibration and noise. The bellows-type vacuum gate valve comprises: a valve plate (13); a valve plate driving part (14) for operating the valve plate (13); and a valve assembly (15) for opening and closing an inlet-side area and an outlet-side area through a plurality of slow pump lines with a time gap.

Description

Bellows vacuum gate valve {VACUUM GATE VALVE OF BELLOWS OPENING AND CLOSING TYPE}

The present invention relates to a vacuum gate valve installed in a vacuum chamber in a semiconductor manufacturing process, and in particular, a bellows method capable of preventing shock due to overload of a vacuum pump as well as securing valve operability and airtightness when opening/closing the vacuum chamber. of vacuum gate valves.

With the recent development of technology, the semiconductor manufacturing process requires a process that combines high cleanliness and the latest technology.

For this reason, the processing capacity of vacuum pumps used in semiconductor manufacturing facilities is continuously expanding, and accordingly, the specifications of vacuum lines are also expanding, as well as the size of vacuum chambers in semiconductor and LCD manufacturing processes. As the size of the vacuum line increases, the size of the vacuum gate valve is also required.

Accordingly, the standard of a vacuum gate valve installed in a passage of a fluid connecting a semiconductor manufacturing facility and a vacuum gate pump is also expanding.

The motion method of the seal disk of the existing vacuum gate valve is linear motion, and as the size of the fluid passage is enlarged, the size of the vacuum gate valve mounted here is also enlarged. are limited by space.

In order to overcome the limitations of such an installation space, there is a tendency to expand and operate the fluid passage while changing the motion direction of the valve plate of the existing linear vacuum gate valve to the rotation direction.

As the operating method of the vacuum gate valve gradually shifts from the straight type to the swing type, there is a demand for ensuring airtightness as well as operability of the vacuum gate valve.

On the other hand, due to the enlargement of the fluid passage, existing vacuum gate valves have a problem of causing shock, vibration, and noise due to overload of the vacuum pump.

For example, in the atmospheric pressure state of the upper part of the vacuum gate valve in the state of turning on the vacuum pump mounted on the lower part of the vacuum gate valve, one slow pump line attached to the existing vacuum gate valve (internal diameter standard) When Ø4.6∼Ø4.8) is opened, the vacuum level at the bottom of the vacuum gate valve suddenly drops, causing an instant overload of the vacuum pump, which eventually causes a strong shock (vibration and noise) to occur throughout the vacuum pump. There is a problem.

In addition, when the impact applied to the vacuum pump is severe, there is a problem in that a trip phenomenon of the vacuum pump occurs as the powder accumulated in the vacuum pipe line falls.

Patent Publication No. 10-2003-0072064 Publication No. 10-2004-0035133 Publication No. 10-2004-0056630 Patent Publication No. 10-2020-0123970

Therefore, the present invention has been devised in view of this point, and by adopting a swing-type opening and closing mechanism that opens and closes the valve using the linear motion of the cylinder and the rotational motion of the link mechanism during the opening and closing operation of the vacuum gate valve, A bellows method that can actively respond to the expansion of vacuum gate valve specifications according to the expansion of the processing capacity of vacuum pumps, and in particular, a bellows method that expands and contracts by air pressure and vacuum pressure. An object of the present invention is to provide a bellows type vacuum gate valve capable of securing excellent operability and close tightness of the vacuum gate valve by adopting an operating mechanism.

In addition, another object of the present invention is to control the overload of the vacuum pump by implementing a new vacuum gate valve of a two-step opening method using a small diameter slow pump line and a large diameter slow pump line. Its purpose is to provide a bellows-type vacuum gate valve capable of suppressing vibration and noise as well as being able to do so.

In addition, another object of the present invention is to generate powder on the vacuum pipe line by providing a heater controlled at a temperature of about 180 to 220 ° C. in a vacuum gate valve in which a multi-stage slow pump line (by-pass) is formed. It is to provide a bellows-type vacuum gate valve capable of suppressing.

In order to achieve the above object, the bellows type vacuum gate valve provided by the present invention has the following characteristics.

The bellows type vacuum gate valve is interposed between a valve body having an inlet and an outlet communicating with each other, and air supplied to the internal space portion while operating in a swinging manner while opening and closing the inlet and outlet of the valve body. A valve plate including an upper gate plate and a lower gate plate that open or close the inlet passage and the outlet passage of the valve body while being operated up and down by the upper and lower bellows, which expand and contract by pressure and vacuum pressure, and the upper and lower bellows. and a valve plate driver installed on one side of the valve body to operate the valve plate, and a valve assembly installed on a side surface of the valve body to bypass the inlet region and the outlet region and selectively open and close the valve plate.

In particular, the vacuum gate valve is a means for opening and closing the inlet and outlet while operating in a swing manner interposed between the inlet and outlet of the valve body, and the upper part expands and contracts by air pressure and vacuum pressure supplied to the internal space. It may include a valve plate having an upper gate plate and a lower gate plate that open or close the inlet passage and the outlet passage of the valve body while being operated up and down by the bellows, the lower bellows, and the upper and lower bellows.

The upper and lower bellows of the valve plate are expanded by air pressure provided from the air supply valve module and supplied to the space through the air line while being linked to the opening and closing operation of the vacuum connection valve, and supplied from the vacuum pump side through the air passage. It is preferable to make it shrink by the vacuum pressure supplied to the space part.

In a preferred embodiment, the valve assembly comprises a first slow pump line having a relatively small diameter while communicating with the inlet and outlet regions, and a first actuator that opens and closes the first slow pump line and a first actuator that communicates with the inlet and outlet regions and has a relatively small diameter. It includes a second slow pump line having a large diameter and a second actuator that opens and closes the second slow pump line. Therefore, when the valve is open, the first slow pump line and the second slow pump line are sequentially opened with a time difference to reduce overload of the vacuum pump. It is characterized by being able to

At this time, when the valve assembly operates to open the valve, it is preferable to first open the first slow pump line and then open the second slow pump line later with a time difference.

Here, the first slow pump line of the valve assembly includes a horizontal first slow pump line connected between a vertical line extending from an inlet line communicating with an inlet side area of the valve body and a cylinder space of the first actuator; It may be composed of a vertical first slow pump line connected between the cylinder space of the actuator and a discharge line that communicates with the outlet area of the valve body, and the second slow pump line has an inlet side that communicates with the inlet area of the valve body. A horizontal second slow pump line connected between the vertical line extending from the line and the cylinder space of the second actuator, and a vertical type connected between the cylinder space of the second actuator and the discharge line that runs through the outlet area of the valve body. It may consist of a second slow pump line.

In addition, the first actuator of the valve assembly includes a valve assembly cylinder having an air port on one side, a piston rod located inside the valve assembly cylinder and opening and closing each slow pump line while operating forward and backward, and the piston rod A spring may be included to provide a restoring force while elastically supporting the rear surface.

Similarly, the second actuator of the valve assembly also includes a valve assembly cylinder having an air port on one side, a piston rod located inside the valve assembly cylinder and opening and closing each slow pump line while operating forward and backward, and the piston rod A spring may be included to provide a restoring force while elastically supporting the rear surface.

As a preferred embodiment, the valve plate driving unit has a valve plate driving unit cylinder, one side is connected to the rod of the valve plate driving unit cylinder and the other side is connected to a first link connected to the second link, and one side is connected to the first link At the same time, the other side may include a second link coupled to the valve plate and connected to the valve plate driving shaft serving as a rotation center axis of the valve plate.

As a preferred embodiment, the vacuum gate valve having the multi-stage slow pump valve may further include a heater installed on one side of the valve body and serving to reduce powder generation.

The bellows type vacuum gate valve provided by the present invention has the following effects.

First, by applying a method of operating the valve plate of the vacuum gate valve in the rotational direction (swing), the effect of actively responding to the expansion of the standard of the vacuum gate valve according to the expansion of the processing capacity of the vacuum pump while eliminating the limitations of the installation space There is, by applying a new valve plate operating mechanism in which the linear motion of the air cylinder is transmitted to the link mechanism and the valve plate is opened and closed by rotational motion through the link movement of the link mechanism, the valve plate opening and closing operability can be improved, and the vacuum gate valve There is an effect of simplifying the overall structure of.

In particular, by using vacuum pressure as an energy source that opens and closes the chamber side and the pump side along with the expansion and contraction action of the bellows, it is possible to improve the opening and closing operability of the vacuum gate valve and to secure excellent airtightness. There is an effect of increasing the efficiency of facility operation through efficient use of power.

Second, by applying a new vacuum gate valve with a two-step open method that combines a relatively small diameter slow pump line and a relatively large diameter slow pump line, it is possible to control the overload of the vacuum pump as well as It has the effect of increasing the safety of semiconductor manufacturing facilities as well as extending the lifespan of vacuum pumps, such as suppressing vibration and noise.

Third, by installing a heater controlled at a temperature of about 180 to 220 ° C in a vacuum gate valve in which a multi-stage slow pump line (by-pass) is formed, powder generation on the vacuum pipe line can be minimized and vacuum There is an effect that can exclude the tripping phenomenon of the pump.

1 to 3 are perspective views showing a vacuum gate valve according to an embodiment of the present invention
Figure 4 is a cross-sectional view showing a vacuum gate valve according to an embodiment of the present invention
5 and 6 are cross-sectional views showing an operating state of the bellows of the vacuum gate valve according to an embodiment of the present invention.
7 and 8 are perspective views illustrating a valve assembly of a vacuum gate valve according to an embodiment of the present invention.
9 and 10 are cross-sectional views showing a valve assembly of a vacuum gate valve according to an embodiment of the present invention.
11 and 12 are cross-sectional views showing an operating state of a valve assembly of a vacuum gate valve according to an embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 to 3 are perspective views showing a vacuum gate valve according to an embodiment of the present invention, and FIG. 4 is a cross-sectional view showing a vacuum gate valve according to an embodiment of the present invention.

1 to 4, the bellows type vacuum gate valve includes a valve body 12 connected between a process chamber (not shown) side and a vacuum pump (not shown) side.

The valve body 12 is composed of a plurality of block combinations including an upper inlet 10 and a lower outlet 11 communicating with each other in a circular shape, as well as a valve plate accommodating space 32 therein.

The valve body 12 is installed in a structure fastened between the process chamber side and the vacuum pump side using respective flange portions on the inlet 10 side and the outlet 11 side.

In addition, an inlet-side connection line 33 having a structure penetrating horizontally from an inner circumferential surface of the inlet-side region is formed at the inlet 10 of the valve body 12, and the inlet-side connection line 33 at this time is the valve assembly 15 It communicates with the inlet side line 20 in ).

In addition, the outlet 11 of the valve body 12 is formed with a discharge-side connection line 34 having a structure penetrating horizontally from the inner circumferential surface of the outlet area, and the discharge-side connection line 34 at this time is a valve assembly ( It communicates with the discharge side line 22 at 15).

In addition, the bellows type vacuum gate valve includes a valve plate 13 as a means for opening and closing the inlet 10 and the outlet 11 of the valve body 12 .

The valve plate 13 has a disk shape with an arm extending to one side, and is installed in a structure interposed between the inlet 10 and the outlet 11 of the valve body 12 while taking a horizontal posture.

The valve plate 13 installed in this way opens and closes the inlet 10 and the outlet 11 while operating in a swing method, that is, a method of moving in a horizontal direction. For this purpose, the arm portion of the valve plate 13 is a valve plate driver. It is connected to the valve plate driving shaft 30 of (14) so that it can rotate about the valve plate driving shaft 30.

Accordingly, when the valve plate 13 operated by the power of the valve plate driver 14 is located between the inlet 10 and the outlet 11, the inlet 10 and the outlet 11 are blocked while the process When the chamber can be closed and the valve plate 13 is moved out of the position between the inlet 10 and the outlet 11 and placed into the valve plate accommodating space 32, the gap between the inlet 10 and the outlet 11 is opened so that the process chamber can be opened.

In particular, the valve plate 13 has a disk-shaped plate shape having a space 38 formed therein, and is connected to the valve plate drive shaft 30 using an arm 49 extending from one side of the plate.

Above and below the valve plate 13, disc-shaped upper bellows 39 and lower bellows 40 are installed, respectively, to close the space 38 of the valve plate 13, and at this time, the upper and lower bellows 39, 40) can be expanded by air pressure flowing into the space portion 38 or contracted by vacuum pressure created in the space portion 38.

Disc-shaped upper gate plates 41 and lower gate plates 42 are respectively installed on the upper and lower surfaces of the upper and lower bellows 39 and 40 installed in this way, and at the same time, these upper and lower gate plates 41 and 42 are upper and lower bellows ( 39 and 40), the upper and lower gate plates 41 and 42 are in close contact with the edges of the inlet and outlet passages of the valve body 12 when the upper and lower bellows 39 and 40 expand. As it closes between the inlet passage and the outlet passage, and when the upper and lower bellows 39 and 40 are contracted, the inlet passage and the outlet side of the valve body 12 are separated from the edges of the inlet passage and the outlet passage. It will open the passage between them.

The upper and lower bellows 39 and 40 of the valve plate 13 have operating characteristics of expanding and contracting by air pressure and vacuum pressure.

To this end, a valve block 40 having a space inside is installed on one side of the bottom of the valve body 12, and the inner space of the valve block 40 thus installed extends from the exit passage of the valve body 12. The vacuum introduction line 47 and the air introduction line 46 extending from the air supply valve module 44 are respectively connected.

Accordingly, vacuum pressure and air pressure can be applied to the inner space of the valve block 40 .

At this time, the vacuum introduction line 47 and the air introduction line 46 are formed in a horizontal direction and form an angle of 90° to each other.

In addition, the lower end of the valve plate drive shaft 30 is located inside the valve block 40 and the front end of the piston rod 48 of the vacuum connection valve 43 installed on one side of the valve block 40 is located. .

At this time, the piston rod 48 is positioned parallel to the vacuum introduction line 47 along the coaxial line, and can selectively open and close the vacuum introduction line 47 through forward and backward movement.

In addition, the valve plate driving shaft 30 is vertically penetrated from the lower end to a certain height along the axis line, for example, to the height to which the arm 49 is coupled, and continues to be bent horizontally by 90 °, then the arm ( An air line 45 having a structure that penetrates along the inside of 49 and communicates with the space portion 38 of the valve plate 13 is formed.

In addition, an air supply valve module 44 is installed on one side of the valve block 50, and the air supplied from the air supply valve module 44 at this time, that is, the air pressure, is applied to the air introduction line 46 and the air pressure. It can be passed along the line 45 to the space 38 of the valve plate 13.

In addition, a vacuum connection valve 43 including a piston rod 48 and a spring is installed on the other side of the valve block 50, and the vacuum connection valve 43 installed in this way connects the piston rod 48 It serves to selectively open and close the vacuum introduction line 46 by using.

For example, when operating air is supplied to the vacuum connection valve 43, the piston rod 48 moves backward while overcoming the force of the spring, and accordingly, the vacuum introduction line 46 is opened and the vacuum of the vacuum pump is moved. The pressure is transmitted to the space portion 38 of the valve plate 13, and eventually the bellows can be contracted by the vacuum pressure, while when the supply of operating air to the vacuum connection valve 43 is cut off, the piston rod ( 48) moves forward by the force of the spring, and as a result, the vacuum inlet line 46 is blocked and the vacuum pressure of the vacuum pump is not transmitted to the space 38 of the valve plate 13, and eventually the bellows It can be expanded by the air pressure on the air supply valve module 44 side.

5 and 6 are cross-sectional views showing the operating state of the bellows of the vacuum gate valve according to an embodiment of the present invention.

As shown in Fig. 5, here the expansion state of the bellows (for example, the valve plate closed state) is shown.

When the vacuum connection valve 43 is turned off, the piston rod 48 at this time blocks the vibration introduction line 47 in a state in which it advances under the force of the spring, and as a result, the vacuum pressure on the vacuum pump side is reduced to the valve plate ( 13) will not be transmitted to the side.

In this state, when the air supply valve module 44 is ON, the air pressure of the compressed air supplied from the air supply valve module 44 passes through the air introduction line 46 and the air line 45 to the valve plate 13. ) is transmitted to the space portion 38, and accordingly, the upper bellows 39 and the lower bellows 40 expand, and the upper gate plate 41 and the lower gate plate 42 move upward and downward, respectively. And, eventually, between the inlet passage and the outlet passage of the valve body 12 is blocked by the valve plate 13.

As shown in FIG. 6, here, the contracted state of the bellows (eg, valve plate open state) is shown.

When the vacuum connection valve 43 is ON, the piston rod 48 receives the force of the working air and overcomes the force of the spring to open the vacuum introduction line 47 in a backward state, in this state The vacuum pressure of the vacuum pump is transmitted to the space portion 38 of the valve plate 13 through the vacuum introduction line 47 and the air line 45, and thus the upper bellows 39 and the lower bellows 40 At the same time as being contracted, the upper gate plate 41 and the lower gate plate 42 return to the lower and upper portions, respectively, and separate from the periphery of the inlet passage and the outlet passage of the valve body 12, and eventually the valve body 12 The sealed state between the inlet-side passage and the outlet-side passage of the is released.

At this time, the air supply valve module 44 is in an OFF state, and compressed air is not supplied.

Thereafter, the valve plate 13 can be swing-operated and opened by the operation of the valve plate driver 14 .

In addition, the bellows type vacuum gate valve includes a valve plate driver 14 as a means for operating the valve plate 13 .

The valve plate driver 14 rotates the valve plate 13 in a swinging manner using cylinder power and movement of a link mechanism.

To this end, the valve plate driver cylinder 27 is installed in a horizontal position on one side of the upper surface of the valve body 12, and one end of the first link 29 is installed on the rod of the valve plate driver cylinder 27 installed in this way. While being connected in a pin structure, one end of the second link 28 is connected to the other end of the first link 29 in a pin structure.

In addition, a drive shaft housing 35 is installed on the other side of the upper surface of the valve body 12, for example, in front of the valve plate drive cylinder 27, and the drive shaft housing 35 installed in this way has a valve plate drive shaft 30 ) is rotatably installed in a vertical position, and at the same time, the other end of the first link 28 is coupled to the upper end of the valve plate drive shaft 30 protruding to the upper end of the drive shaft housing 35.

At this time, the lower end of the valve plate driving shaft 30 is coupled to the arm 49 of the valve plate 13 while being positioned inside the valve body 12 .

Accordingly, when the valve plate drive cylinder 27 moves forward and backward, the first link 29 and the second link 28 perform a link movement, and at the same time, the valve plate drive shaft 30 is centered on its axis As a result, by the rotation of the valve plate driving shaft 30, the valve plate 13 rotates around the valve plate driving shaft 30 as a central axis, and the inlet 10 and the outlet 11 of the valve body 12 You can open and close between them.

In addition, the bellows type vacuum gate valve includes a heater 31 as a means for effectively reducing powder generation on the slow pump line side as well as on the vacuum pump side.

The heater 31 may be a known heater such as a coil heater, a metal tubular heater, or a ceramic heater, and may be applied to one side of the valve body 12, for example, the circumference of the inlet 10 of the valve body 12. While being inserted into the circular heater installation groove 37 formed along the valve body 12, it is installed in a structure buried in the inside.

The heater 31 is preferably controlled to a temperature of about 180 to 220°C.

Accordingly, when the heater 31 is operated, the entire temperature of the valve body 12, particularly the temperature of the inlet region, can always be maintained at a constant temperature, resulting in powder generation due to waste gas produced in the semiconductor production line. can be fundamentally solved.

7 and 8 are perspective views showing a valve assembly of a vacuum gate valve according to an embodiment of the present invention, and FIGS. 9 and 10 are cross-sectional views showing a valve assembly of a vacuum gate valve according to an embodiment of the present invention.

As shown in FIGS. 7 to 10, the valve assembly 15 bypasses the inlet area formed at the inlet 10 of the valve body 12 and the outlet area formed at the outlet 11. It serves to sequentially open and close the slow pump line.

To this end, the valve assembly 15 is a valve body 36 installed on one side of the valve body 12, for example, on the side where the inlet-side connection line 33 and the outlet-side connection line 34 are formed. includes

The valve body 36 has a square block shape in which upper and lower ends are closed with plates, and is installed on one side of the valve body 12 in a fastening structure.

Two slow pump lines, that is, a first slow pump line 16 and a second slow pump line 18 are formed in the valve body 36 of the valve assembly 15, and each of the first slow pump lines 16 ) and a first actuator 17 and a second actuator 19 that open and close the second slow pump line 18 are installed.

Here, the first slow pump line 16 and the second slow pump line 18 are the inlet connection line 33 extending from the inlet area of the valve body 12 and the outlet area of the valve body 12. It is possible to form a bypass line from the inlet 10 to the outlet 11 while being connected to the discharge side connection line 34 extending to .

In particular, the first slow pump line 16 has a relatively smaller diameter than the second slow pump line 18, and the second slow pump line 18 is connected to the first slow pump line 18. It is made of a relatively large diameter compared to the

Here, the diameter of the first slow pump line 16 is preferably about Ø1,4 to Ø1.6, and the diameter of the second slow pump line 18 is preferably about Ø4,5 to Ø6.5.

The bypass line formed by the first slow pump line 16 and the second slow pump line 18 will be described in more detail.

The first slow pump line 16 is composed of a horizontal first slow pump line 16a and a vertical first slow pump line 16b.

The horizontal first slow pump line 16a is formed from the inlet line 20 connected to the inlet connection line 33 leading to the inlet area of the valve body 12 and the inlet line 20 at this time. It communicates with the vertical line 21 formed long downward and communicates with the cylinder space formed in the first actuator 17, and the vertical first slow pump line 16b is the cylinder space of the first actuator 17 It communicates with the discharge side line 22 connected to the discharge side connection line 34 side leading to the outlet side area of the valve body 12 at the same time.

The second slow pump line 18 is composed of a horizontal second slow pump line 18a and a vertical second slow pump line 18b.

The horizontal second slow pump line 18a is formed from the inlet line 20 connected to the inlet connection line 33 leading to the inlet area of the valve body 12 and the inlet line 20 at this time. It communicates with the vertical line 21 formed long downward and communicates with the cylinder space formed in the second actuator 19, and the vertical second slow pump line 18b is the cylinder space of the second actuator 17 It communicates with the discharge side line 22 connected to the discharge side connection line 34 side leading to the outlet side area of the valve body 12 at the same time.

Accordingly, two bypass slow pump lines are formed on the inlet 10 side and the outlet 11 side of the valve body 12 and the valve body 36 of the valve assembly 15.

For example, one bypass slow pump line is inlet 10→inlet side connection line 33→inlet side line 20→vertical line 21→horizontal first slow pump line 16a→first The cylinder space of the actuator 17 → the vertical first slow pump line 16b → the discharge-side line 22 → the discharge-side connection line 34 → the outlet 11, and the other one The bypass slow pump line is inlet (10) → inlet-side connection line (33) → inlet-side line (20) → vertical line (21) → horizontal second slow pump line (18a) → cylinder of the second actuator (19) Space→vertical second slow pump line (18b)→discharge side line 22→discharge side connection line 34→outlet 11, and these two detours are made when the vacuum pump is operated. As the slow pump lines are sequentially opened with a time difference, a vacuum can be created in the process chamber.

The valve assembly 15 includes a first actuator 17 and a second actuator 19 as means for opening and closing the first slow pump line 16 and the second slow pump line 18 .

The first actuator 17 is located inside the valve assembly cylinder 24 having an air port 23 installed on one side thereof and operates forward and backward while moving the first slow pump line 16 ), that is, the piston rod 25 that opens and closes the horizontal first slow pump line 16a, and the piston rod 25 when air pressure is removed while elastically supporting the rear surface of the piston rod 25. It consists of a spring 26 providing restoring force.

At this time, the cylinder space of the valve assembly cylinder 24, for example, the space in front of the piston rod communicates with the horizontal first slow pump line 16a and the vertical first slow pump line 16b.

The second actuator 19 is located inside the valve assembly cylinder 24 having an air port 23 installed on one side thereof and operates forward and backward while moving the second slow pump line 18 ), that is, the piston rod 25 that opens and closes the horizontal second slow pump line 18a, and the piston rod 25 when air pressure is removed while elastically supporting the rear surface of the piston rod 25. It consists of a spring 26 providing restoring force.

At this time, the cylinder space of the valve assembly cylinder 24, for example, the space in front of the piston rod communicates with the horizontal second slow pump line 18a and the vertical second slow pump line 18b.

Therefore, when the valve assembly 15 operates to open the valve, the first slow pump line 16 and the second slow pump line 18 are sequentially opened with a time difference, and during this valve open operation, the first actuator 17 After the first slow pump line 16 is opened first through the operation of ), the second slow pump line 18 is opened later through the operation of the second actuator 19 at a predetermined time interval. ) is preferred to be open.

For example, while the first slow pump line 16 is opened and the vacuum level of the vacuum pump is adjusted to 690 to 700 Torr for about 18 to 22 sec, the second slow pump line 18 is continuously opened to set the preset vacuum level. By fitting, the overload of the vacuum pump can be reduced, and as a result, vibration and noise can be suppressed.

11 and 12 are cross-sectional views showing an operating state of a vacuum gate valve according to an embodiment of the present invention.

As shown in FIG. 11, when the first actuator 17 is operated together with the operation of the vacuum pump to create a vacuum in the process chamber, the piston rod 25 moves backward, and at the same time the second slow pump line The cylinder space of the valve assembly cylinder 24 in the first actuator 19 communicates with the horizontal first slow pump line 16a of the first slow pump line 16 having a relatively small diameter compared to (18) At the same time, the cylinder space of the valve assembly cylinder 24 in the first actuator 19 and the vertical first slow pump line 16b of the first slow pump line 16 communicate with each other.

Therefore, inlet 10 → inlet side connection line 33 → inlet side line 20 → vertical line 21 → horizontal first slow pump line 16a → cylinder space of the first actuator 17 → vertical A vacuum is created inside the process chamber through one bypass slow pump line that connects the first slow pump line 16b→discharge side line 22→discharge side connection line 34→outlet 11, and at this time, A vacuum is created for about 18 to 22 sec with the degree of vacuum of the vacuum pump adjusted to about 690 to 700 Torr.

As shown in FIG. 12, when the second actuator 19 is operated in a state in which the vacuum level is adjusted in one step, the piston rod 25 moves backward, and at the same time, relative to the first slow pump line 16 The horizontal second slow pump line (18a) of the second slow pump line (18) having a large diameter and the cylinder space of the valve assembly cylinder (24) in the second actuator (19) communicate with each other, and the second actuator The cylinder space of the valve assembly cylinder 24 at (19) communicates with the vertical second slow pump line 18b of the second slow pump line 18.

Therefore, inlet 10→inlet side connection line 33→inlet side line 20→vertical line 21→horizontal second slow pump line 18a→cylinder space of the second actuator 19→vertical A vacuum is created inside the process chamber through another bypass slow pump line connected from the second slow pump line 18b → the discharge-side line 22 → the discharge-side connection line 34 → the outlet 11, and at this time In the state in which the degree of vacuum of the vacuum pump is set to a preset pressure, a vacuum is created for a preset time.

Here, while the second slow pump line 18 is opened to create a vacuum, the first slow pump line 16 may remain open or closed.

In this way, one slow pump line is opened to create a first-stage vacuum at a predetermined pressure for a predetermined time, and then another slow pump line is subsequently opened to create a second-stage vacuum at a predetermined pressure for a predetermined time, The load applied to the vacuum pump can be reduced, and as a result, shocks such as vibration and noise can be suppressed as much as possible.

As described above, in the present invention, a new valve plate operating mechanism using a bellows that operates the valve plate using a link mechanism and expands and contracts by receiving air pressure and vacuum pressure when the valve plate is opened and closed by swing-type rotational movement. By applying, it is possible to improve operability, simplify the structure, and secure excellent airtightness and durability.

In addition, in the present invention, the overload of the vacuum pump can be controlled by applying a new vacuum gate valve that opens the two slow pump lines in a two-step manner by adopting two slow pump lines with different diameters. Of course, vibration and noise can be suppressed.

In addition, by applying a heater controlled at a temperature of about 180 to 220 ° C. to a vacuum gate valve in which a multi-stage slow pump line (by-pass) is formed, the vacuum gate valve can always be maintained at a constant temperature. Powder generation on the entire vacuum pipe line including the slow pump line can be suppressed.

10: entrance 11: exit
12: valve body 13: valve plate
14: valve plate driving unit 15: valve assembly
16: first slow pump line 16a: horizontal first slow pump line
16b: vertical first slow pump line 17: first actuator
18: second slow pump line 18a: horizontal second slow pump line
18b: vertical second slow pump line 19: second actuator
20: inlet side line 21: vertical line
22: discharge side line 23: air port
24: valve assembly cylinder 25: piston rod
26: spring 27: valve plate drive cylinder
28: second link 29: first link
30: valve plate drive shaft 31: heater
32: valve side storage space 33: inlet side connection line
34: discharge side connection line 35: drive shaft housing
36: valve body 37: heater installation groove
38: space part 39: upper bellows
40: lower bellows 41: upper gate plate
42: lower gate plate 43: vacuum connection valve
44: air supply valve module 45: air line
46: air introduction line 47: vacuum introduction line
48: piston rod 49: arm
50: valve block

Claims (9)

a valve body 12 having an inlet 10 and an outlet 11 communicating with each other;
It is interposed between the inlet 10 and the outlet 11 of the valve body 12 and operates in a swing manner to open and close the inlet 10 and the outlet 11, and the air pressure supplied to the internal space 38 Opens or closes the inlet passage and the outlet passage of the valve body 12 while being operated up and down by the upper bellows 39 and lower bellows 40 and the upper and lower bellows 39 and 40 that expand and contract by the vacuum pressure. a valve plate 13 including an upper gate plate 41 and a lower gate plate 42;
a valve plate driver 14 installed on one side of the valve body 12 and operating the valve plate 13;
a valve assembly (15) installed on a side surface of the valve body (12) and opening and closing the inlet and outlet regions at a time difference through a plurality of slow pump lines by bypassing the inlet and outlet regions;
A bellows type vacuum gate valve comprising a.
It is interposed between the inlet 10 and the outlet 11 of the valve body 12 and operates in a swing manner to open and close the inlet 10 and the outlet 11, and the air supplied to the internal space 38 The upper and lower bellows 39 and lower bellows 40 and the upper and lower bellows 39 and 40, which expand and contract by pressure and vacuum pressure, open or close the inlet and outlet passages of the valve body 12 while being operated up and down. A bellows type vacuum gate valve comprising a valve plate (13) having an upper gate plate (41) and a lower gate plate (42) to close.
According to claim 1 or claim 2,
The upper and lower bellows 39 and 40 of the valve plate 13 are provided from the air supply valve module 44 while being linked to the opening and closing operation of the vacuum connection valve 43 and pass through the air line 45 to the space portion 38 ) In addition to being expanded by the air pressure supplied to the vacuum pump side and contracted by the vacuum pressure supplied to the space portion 38 through the air passage 45, the bellows type vacuum gate valve.
The method of claim 1,
The valve assembly 15 includes a first slow pump line 16 having a relatively small diameter while communicating with the inlet and outlet areas, a first actuator 17 opening and closing the first slow pump line 16, and the inlet and outlet areas. It includes a second slow pump line 18 having a relatively large diameter and a second actuator 19 that opens and closes the second slow pump line 18, which is in communication with the first slow pump line 16 and the second slow pump line 18 when the valve is open. ) A bellows type vacuum gate valve, characterized in that it opens sequentially with a time difference.
The method of claim 4,
Bellows, characterized in that when the valve assembly (15) operates to open the valve, the first slow pump line (16) is first opened and then the second slow pump line (18) is opened later with a time difference. vacuum gate valve.
The method of claim 4,
The first slow pump line 16 of the valve assembly 15 is a vertical line 21 extending from the inlet line 20 communicating with the inlet area of the valve body 12 and the cylinder of the first actuator 17 A horizontal first slow pump line 16a connected between the spaces and a vertical type connected between the cylinder space of the first actuator 17 and the discharge line 22 communicating with the outlet area of the valve body 12 It consists of a first slow pump line 16b, and the second slow pump line 18 includes a vertical line 21 extending from the inlet line 20 communicating with the inlet area of the valve body 12 and a second slow pump line 21. A horizontal second slow pump line 18a connected between the cylinder space of the actuator 19 and a discharge line 22 communicating with the cylinder space of the second actuator 19 and the outlet area of the valve body 12 A bellows type vacuum gate valve, characterized in that composed of a vertical second slow pump line (18b) connected therebetween.
The method of claim 4,
The first actuator 17 and the second actuator 19 of the valve assembly 15 are located inside the valve assembly cylinder 24 having an air port 23 on one side, respectively, and the valve assembly cylinder 24 Bellows method characterized in that it includes a piston rod 25 that opens and closes each slow pump line while operating forward and backward, and a spring 26 that elastically supports the rear surface of the piston rod 25 and provides a restoring force. vacuum gate valve.
According to claim 1 or claim 4,
The valve plate driver 14 is a first link 29 connected to the valve plate driver cylinder 27, one end connected to the rod of the valve plate driver cylinder 27 and the other end connected to the second link 28 And, while one side is connected to the first link 29, the other side is connected to the valve plate 13 while being coupled to the valve plate drive shaft 30 serving as the rotation center axis of the valve plate 13. A second link ( 28) A bellows-type vacuum gate valve comprising a.
According to claim 1 or claim 4,
A bellows type vacuum gate valve, characterized in that it further comprises a heater 31 installed on one side of the valve body 12 and serving to reduce powder generation.

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