KR20220160318A - Ultra-precision centripetal grinding machine with tilting module - Google Patents

Abstract

The present invention relates to an ultra-precision calibrating and grinding machine for optics, equipped with a tilting module, and more particularly, to an ultra-precision calibrating and grinding machine equipped with a tilting module, capable of precisely grinding the edge of an object to be ground, which is arranged on a grinding plate, to have a desired shape, by adjusting the angle of the grinding plate, on which the object to be ground is arranged, to maintain normal and gravity directions. To this end, the present invention comprises: a support module including a plurality of posts and a horizontal bar connecting the posts; a base plate having an upper surface in the form of a flat plate and tiltably arranged on the support module; a grinding plate rotatably arranged on the base plate and having an upper surface on which an object to be ground is arranged; a tilting module which operates by applied power and signal and simultaneously tilts the base plate; and a grinding module which is arranged above the grinding plate so as to be movable up and down by a displacement module and which grinds the object to be polished. The tilting module comprises: a tilting driving unit which operates by the applied power and signal; a pair of tilting brackets arranged at mutually symmetrical positions on the base plate; and a tilting shaft which connects the tilting bracket with the base plate and rotatably supports the base plate.

Description

Ultra-precision centripetal grinding machine with tilting module}

The present invention relates to a correction polishing machine for ultra-precision optics equipped with a tilting module capable of polishing an optical product composed of curvature in a large reflector or lens in a normal direction and a gravitational direction, and more particularly, a polishing object (large reflector, lens, etc.) An ultra-precision optical correction polishing machine equipped with a tilting module capable of precisely polishing the edge of an object placed on the polishing plate in a desired shape by adjusting the angle of the polishing plate to be placed so that the normal line and the direction of gravity are maintained according to the calculation formula. will be.

In general, the concave surface of a mirror is formed in a shape such as a spherical mirror, an aspherical mirror, an off-axis aspheric mirror, a palabolic mirror, a hyperbolic mirror, or a curved surface synthesized thereof. When the surface shape is processed by cutting or the like, the optical surface is mirror-polished. For mirror polishing of a simple curved surface because it is a spherical surface, fit polishing using a rigid polishing dish called an Oscar system can be used.

A mirror polishing method using a polishing plate is a method of transferring the surface shape of a polishing plate to an object to be polished.

In addition, in general, the manufacturing of lenses used in optical devices such as cameras, sights, endoscopes, and telescopes involves rough-cutting a material of a certain size and a grinding process of smoothing the surface and correction polishing in nm units. will be completed through

At this time, in order to grind the surface of the mirror, a mirror polishing machine (generally referred to as a 'calibration polishing machine') equipped with a polishing head is used. This mirror polishing machine fixes and rotates the mirror to be polished to perform the polishing process. and a cylinder block to which a polishing member for polishing the mirror and a motor for rotating the rotation holder are attached. Such a mirror polishing machine is usually operated manually.

A major condition required in the optical industry related to such a mirror polishing machine is the ability to improve the surface finish of the mirror without changing the curvature of the mirror surface, and preferably, the mirror polishing operation is performed on small grooves or grooves of the mirror. It is to remove traces that appear during processing and to perfectly maintain the prescribed curvature.

However, in order to perform the work by satisfying the above requirements, the conventional mirror polishing machine cannot effectively process the surface of lenses having various sizes as the surface of the rotating lens is processed while only moving the processing tool up and down. There was a problem that the edge of the mirror, that is, the edge could not be effectively processed.

Republic of Korea Patent No. 10-0453989 Republic of Korea Utility Model Registration No. 20-0493586

The present invention is to solve the above problems, in particular, it is possible to precisely process the edge of the mirror to increase the processing efficiency of the lens,

Polishing objects such as large-diameter mirrors can be precisely processed, and when processing the edge of the object, the optimal polishing angle is calculated by considering the height of the mirror and the polishing module, and the polishing plate is rotated in response to the calculated polishing angle. An object of the present invention is to provide an ultra-precision compensating polishing machine equipped with a tilting module capable of ultra-precision processing.

In addition, the present invention can precisely polish the edges of various types of polishing objects by calculating the rotation angle of the polishing plate corresponding to the height of the polishing object,

An object of the present invention is to provide an ultra-precision correction polishing machine equipped with a tilting module capable of minimizing the occurrence of defects during polishing by verifying the rotation angle of the rotated polishing plate so that the normal line and the direction of gravity are maintained.

In order to achieve the above object, the present invention includes a plurality of posts and a support module including a transverse bar connecting the posts; a base plate having a flat top surface and tiltably disposed on the support module; an abrasive plate rotatably disposed on the base plate and having an object to be polished disposed thereon; a tilting module that tilts the base plate while operating by applied power and signals; and a polishing module disposed above the polishing plate to be movable up and down by a displacement module and polishing an object to be polished.

The tilting module connects a tilting driver operated by applied power and signals, a pair of tilting brackets disposed at mutually symmetrical positions on the base plate, and connecting the tilting bracket and the base plate to the base plate. It is characterized in that it includes a tilting shaft for rotatably supporting the plate.

In addition, the tilting actuator may include a tilting cylinder operated by applied power and signals, and a fixing bracket for rotatably disposing the tilting cylinder to the support module.

At this time, in order to calculate the rotation angle of the abrasive plate by the withdrawal of the rod of the tilting cylinder so that the normal line and the direction of gravity are maintained,

The height of the part to be polished in the object to be polished is the 'x' axis, and the horizontality of the polishing plate is the 'y' axis,

When the length at which the rod of the tilting cylinder is drawn from the body is the 'z' axis, and the angle at which the abrasive plate rotates by the operation of the rod of the tilting cylinder is 'A',

Calculation of the rotation angle 'A' based on the 'x' axis is,

y-axis, z-axis => y'axis, z'axis, and x = x'

y'= y * cos(A) + -z * sin(A)

It is characterized in that z' = y * sin (A) + z * cos (A).

At this time, in order to check the rotation angle of the abrasive plate by the withdrawal of the rod of the tilting cylinder,

The height of the part to be polished in the polishing object is the 'x' axis,

The horizontality of the abrasive plate is the 'y' axis,

The length of the rod of the tilting cylinder withdrawn from the body is the 'z' axis,

When the angle at which the abrasive plate is rotated by the operation of the rod of the tilting cylinder is 'A',

To check the rotated angle 'A',

y-axis, z-axis => y'axis, z'axis,

y'= -44.62 * cos(10) + {-89.49 * sin(10)}

z'= -44.62 * sin(10) + 89.49 * cos(10)

It is characterized by being

In addition, the displacement module includes a forward and backward movement unit for moving the polishing module in a forward and backward direction, a left and right movement unit for moving the polishing module in a left and right direction, and a vertical movement unit for moving the polishing module in a vertical direction. to be

At this time, the forward and backward movement unit rotates through a first driving device operated by applied power and a signal, a gearbox receiving power from the first driving device, and the power transmitted by being coupled to the gearbox, but symmetrical to each other. A pair of power transmission rods disposed to be movable, a pair of first rotational shafts respectively coupled to the pair of power transmission rods, and each movably coupled to the pair of first rotational shafts according to the rotation of the first rotational shaft It is characterized in that it includes a pair of forward or backward moving blocks.

In addition, the left and right moving unit is movably coupled to a second driving device operated by applied power and a signal, a second rotating shaft rotating by receiving power from the second driving device, and movably coupled to the second rotating shaft. Characterized in that it includes a left and right movement block that moves left and right according to the rotation of the rotation shaft.

In addition, the upper and lower parts are movably coupled to the third driving device operated by the applied power and signal, the third rotational shaft rotating by receiving power from the third driving unit, and the third rotational shaft. It is characterized in that it includes a vertical movement block that rises or descends according to the rotation of the rotating shaft and on which the polishing module is disposed.

In addition, the polishing plate rotates by receiving power from a rotation drive motor operated by applied power and signals, and is disposed between the polishing plate and the support module to generate chips when the polishing object is polished by the polishing module. It is characterized in that a collection box is further provided with a discharge port for collecting chips and discharging the collected chips.

In addition, the support module is further provided with a stopper for limiting rotation of the base plate, and the stopper is characterized in that it is disposed vertically upward from the transverse bar connecting the lower end of the post.

The present invention made as described above has an effect of precisely processing the edge of an object to be polished, such as a large-diameter mirror, and in particular, the edge of an object having various shapes and thicknesses.

In addition, the present invention has an effect of providing a good quality polishing object by precisely adjusting the polishing part by adjusting the angle of the polishing plate on which the polishing object is disposed through the tilting module so that the normal line and the direction of gravity are maintained.

In addition, as described above, the present invention reduces the side effect by providing a good polishing object, thereby eliminating the need for material waste and secondary cutting, so that not only the cost required for polishing can be reduced, but also the working time can be reduced. effects can be expected.

Furthermore, the present invention has an effect of shortening the time required for polishing by reducing the initial setting time initially required in polishing objects having various shapes, sizes, and diameters.

1 is an exemplary view showing an ultra-precision compensating polishing machine equipped with a tilting module according to the present invention.
Figure 2 is an exemplary view showing a tilting module and a base plate according to the present invention.
Figure 3 is a state diagram showing the operating state of the tilting module and the base plate according to the present invention.
4 and 5 are exemplary views showing a polishing module and a displacement module constituting the present invention.
6 to 8 are exemplary views illustrating the adjustment of the polishing angle by the operation of the tilting module according to the present invention.

Hereinafter, other objects and features of the present invention in addition to the above objects will be clearly revealed through the description of the embodiments with reference to the accompanying drawings.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and unless explicitly defined in the present application, they should not be interpreted in an ideal or excessively formal meaning. don't

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a preferred embodiment of an ultra-precision compensating polishing machine equipped with a tilting module according to the present invention will be described with reference to the accompanying drawings.

First, as shown in FIGS. 1 and 2, the ultra-precision compensating grinder 1 equipped with a tilting module according to the present invention includes a plurality of posts 11 and a support including a horizontal bar 12 connecting the posts 11. A module 10, a base plate 20 having a flat upper surface and tiltably disposed on the support module 10, rotatably disposed on the base plate, and a polishing object disposed on the upper surface Up and down movement by the abrasive plate 30, the tilting module 40 that tilts the base plate 20 while operating by applied power and signals, and the displacement module 60 above the abrasive plate 30 Possibly disposed, and includes a polishing module 50 for polishing an object to be polished.

The support module 10 includes a plurality of posts 11 vertically disposed at spaced apart from each other and a horizontal bar 12 connecting the lower end or upper end of the adjacent post 11 or both of them, each of which will be described later composition is placed.

At this time, a movable caster 13 may be further disposed at the lower end of the post 11 so as to be movable, and the movable caster 13 is preferably configured in a lockable form so as to be fixed after moving.

In addition, an upper plate 14 in the form of a flat plate covering a predetermined area may be further disposed on the upper end of the post 11, and the upper plate 14 may be used to remove debris or cutting oil generated when the tilting module 40 is polished. protect from

Meanwhile, the support module 10 further includes a stopper 15 for limiting rotation of the base plate 20, and the stopper 15 connects the lower end of the post 11 to the transverse bar 12 ) is placed vertically upwards.

The stopper 15 is located below the base plate 20 to be described later and prevents rotation of the base plate 20 beyond a predetermined angle by contacting one surface of the rotating base plate 20 .

The base plate 20 is disposed to be tiltable on the support module 10 and is coupled to an abrasive plate 30 described later. The tilting axis 43 of the tilting module 40 is coupled.

In such a base plate 20, when the tilting module 40 and the abrasive plate 30 are directly connected, the load pressure of the abrasive plate 30 is concentrated on the front end of the tilting driving unit constituting the tilting module 40, so that the tilting process or polishing In the process, it is possible to prevent the tilting module from being damaged by concentrated load pressure.

In addition, vibration and shock generated during the polishing process are minimized from being directly transmitted to the tilting module 40, thereby preventing the angle of the polishing plate 30 set by the tilting module from being changed.

The abrasive plate 30 is rotatably disposed on the base plate 20 and an object to be polished is disposed on the upper surface, and the upper surface is made in the form of a flat disk, and a rotation drive motor operated by applied power and signals ( 31) to receive power and rotate.

At this time, a fixing jig (not shown in the drawings) may be further disposed on the upper surface of the polishing plate 30 to fix the object to be polished.

On the other hand, a collection box 32 is further provided to prevent chips generated in the process of polishing the polishing object disposed on the polishing plate 30 from scattering below and around the polishing plate and to collect generated chips. do.

The collection box 32 has a bottom surface in the form of a flat plate and has a side wall protruding upward along the rim so that the polishing plate 30 is rotatably disposed on the bottom surface, and chips generated during polishing are removed by the side wall. are collected

In addition, a discharge port 33 is provided at one side of the collection box 32 to communicate the inside and outside to discharge the collected chips to the outside.

The tilting module 40 adjusts the angle of the polishing object disposed on the polishing plate 30 by adjusting the angle of the base plate 20 while operating by applied power and signals.

The tilting module 40 for this purpose includes a tilting driver 41 operated by applied power and signals, a pair of tilting brackets 42 disposed in mutually symmetrical positions on the base plate 20, A tilting shaft 43 connecting the tilting bracket 42 and the base plate 20 and rotatably supporting the base plate 20 is included.

The tilting driver 41 is to provide power for adjusting the angle of the base plate 20, and supports the tilting cylinder 411 operated by the applied power and signal, and the tilting cylinder 411. It includes a fixing bracket 412 for rotatably placed on the module 10.

The tilting cylinder 411 includes a body and a rod 411a extending outward from the body, and is configured to adjust the length of the rod discharged outward from the body while operating according to the applied power and signal.

At this time, a protective cover 413 is provided on the outer surface of the tilting cylinder 411 to prevent the inflow of foreign substances and moisture, and debris generated during polishing of the tilting cylinder.

The fixing bracket 412 is for rotatably supporting the body of the tilting cylinder 411, and is disposed on a pair of fixing pieces arranged symmetrically with each other and the fixing piece to maintain the body of the tilting cylinder 411. It includes a rotation shaft that rotatably supports.

The pair of tilting brackets 42 are disposed on the side of the base plate 20 to rotatably support the base plate from the support module, and the base plate 20 is the reference in the support module 10 A pair is arranged symmetrically with each other.

The tilting shaft 43 is a rotating shaft member connecting the tilting bracket 42 and the base plate 20 .

The tilting module 40 constructed as described above calculates the optimal polishing angle according to the height and position of the polished part of the polishing object disposed on the polishing plate 30, and then withdraws the rod 411a of the tilting cylinder 411. By adjusting the length, the rotation angle of the abrasive plate 30 is calculated.

In the present invention, the following formula is used as a formula for calculating the rotation angle of the abrasive plate 30, that is, the tilt angle.

y, z => when rotating A° with y', z'

x = x'

y'= y * cos(A) + {-z * sin(A)}

z'= y * sin(A) + z * cos(A)

Where the x, y, z are,

The left-right direction of the abrasive plate 30 is 'x', the front-rear direction of the abrasive plate 30 is 'y', and the vertical direction perpendicular to the x-y plane is 'z'.

In the present invention, the angle of rotation of the polishing plate 30 is an angle calculated in the vertical direction of the position where the polishing object is placed, that is, the vertical direction of the gravity direction, compared to the conventional normal line in the process of polishing the polishing object. can be used as a condition value to provide a more precise polishing position.

In addition, in the present invention, the following formula is used to check the rotation angle of the abrasive plate 30.

y, z => when rotating A° with y', z'

y'= -44.62 * cos(10) + {-89.49 * sin(10)}

z'= -44.62 * sin(10) + 89.49 * cos(10)

Where y and z are,

The left-right direction of the abrasive plate 30 is 'x', the front-rear direction of the abrasive plate 30 is 'y', and the vertical direction perpendicular to the x-y plane is 'z'.

In the tilting module 40 made as described above, as the thickness of the object to be polished increases, precision polishing is possible only when the variation tolerance of 'y' does not exceed 0.2, and the tolerance of the angle for this needs to be reduced.

Therefore, the operation of the tilting cylinder 411 constituting the tilting module 40, that is, the adjustment of the withdrawal distance of the rod 411a, is precisely adjusted according to the rotation angle calculation value, thereby precisely adjusting the rotation angle of the polishing plate. In particular, the error range can be reduced in the process of polishing the edge of a large-diameter lens, enabling precise polishing.

By adjusting the rotation angle of the base plate through the above formula, the rotation angle of the base plate according to the polishing part of the object to be polished is as shown in FIGS. 6 to 8 .

That is, by adjusting the rotation angle of the base plate according to the height and position of the polished part of the object to be polished, it is possible to minimize the occurrence of tolerance when polishing the polished part, so that ultra-precise polishing is possible.

Looking at the rotation of the base plate during polishing in detail with reference to FIGS. 6 to 8 , first, FIGS. 6 to 8 show a state in which the base plate is rotated at different angles.

And in FIGS. 6 to 8, the polished parts of the object to be polished are different from each other as shown.

6 to 8, A is the distance between the polishing module and the verticality (B) and the contact point (P) where the polishing module and the polishing object come into contact, and C is the Y-axis change tolerance during polishing and the maximum The value is 0.2, D is the rotation radius of the polishing module, which changes according to the polished part, and E is the tolerance angle of C according to the polished part.

6 shows that the base plate is rotated by 3.77°, A is 5.1913, the radius of rotation of the polishing module is R94.8887, C is a tolerance of 0.2, and the tolerance angle E is 0.148°.

7 is a state in which the polishing part of the object to be polished is relatively moved to the edge side compared to FIG. 6, and at this time, the base plate is rotated by 7.56°.

At this time, A is 10.3925, the radius of rotation of the polishing module is R131.6384, at this time, C is the allowable tolerance of 0.2 and the tolerance angle E is 0.160°.

FIG. 8 shows a state in which the polishing portion of the object to be polished is relatively moved to the edge side compared to FIG. 7, and the base plate is rotated by 11.38°.

At this time, A is 15.5849, the radius of rotation of the polishing module is R176.9931, at this time, C is an allowable tolerance of 0.2 and the tolerance angle E is 0.183°.

As described above, when the polishing part of the object to be polished is changed, the base plate is rotated, but the base plate is rotated on the basis that the Y-axis tolerance of the polished part does not exceed 0.2 at most, so that precise polishing proceeds.

In the above description, the abrasive plate 30 coupled to the upper surface is rotated by rotating the base plate, and illustration of the base plate is omitted in the drawings.

The polishing module 50 is disposed above the polishing plate 30 so as to be movable up and down and left and right by the displacement module 60, and is operated by applied power and signals to the polishing object disposed on the polishing plate 30. polish the

The polishing module 50 includes a polishing tool 51 that rotates by applied power and signals and a body supporting the polishing tool, and a polishing tab is disposed on the polishing tool 51 .

The polishing module 50 is disposed to be vertically and horizontally movable by the displacement module 60, and the displacement module 60 includes a forward and backward movement unit 61 for moving the polishing module 50 in the forward and backward directions. ), a left and right moving part 62 for moving the polishing module 50 in the left and right directions, and a vertical moving part 63 for moving the polishing module 50 in the vertical direction.

The forward and backward movement unit 61 is for moving the polishing module 50 along the forward and backward directions of the base plate 20, and a first driving device 611 operated by applied power and signals for this purpose; A gearbox 612 receiving power from the first driving device 611 and a pair of power transmission rods 613 coupled to the gearbox 612 and rotating through the received power but arranged symmetrically with each other And, a pair of first rotational shafts 614 coupled to the pair of power transmission rods 613, respectively, and movably coupled to the pair of first rotational shafts 614, respectively, to the rotation of the first rotational shaft It includes a pair of forward and backward moving blocks 615 that move forward or backward.

The first driving device 611 may be configured as a motor disposed on the top plate 14 of the support module 10 and providing power while operating by applied power and signals.

The gearbox 612 is coupled to the first driving device 611 to receive power, and as shown in the drawing, an input unit to which power is input and an output unit to receive the input power and change direction to discharge it include

The pair of power transmission rods 613 are coupled to the output part of the gearbox 612 to receive power. Here, the pair of power transmission rods 613 are a pair based on the gearbox 612. They are arranged symmetrically, but are arranged to rotate in the same direction when rotated by the power received.

The pair of first rotational shafts 614 are coupled to the pair of power transmission rods 613 to receive power and rotate, and are disposed side by side in mutually symmetrical directions on the top plate of the support module 10. .

The forward/backward movement block 615 is movably coupled to the first rotary shaft 614 and is coupled to a left/right movement unit 62 to be described later.

The forward and backward movement unit 61 made as described above is driven by the power and signal applied to the first driving device 611, and the generated power is transmitted to the first rotational shaft 614 via the power transmission rod 613, The first rotation shaft 614 is rotated, and a pair of forward and backward movement blocks 615 movably coupled to the first rotation shaft 614 move forward or backward at the same time.

The left and right moving unit 62 is for moving the polishing module 50 in the left and right directions, and includes a second driving device 621 operated by applied power and a signal, and power from the second driving device 621. It includes a second rotational shaft 622 that receives and rotates, and a left-right movement block 623 that is movably coupled to the second rotational shaft 622 and moves left and right according to the rotation of the second rotational shaft.

Here, the left/right moving unit 62 is coupled to the forward/backward movement block 615 constituting the forward/backward movement unit 61, and is disposed to move forward or backward by the operation of the forward/backward movement unit 61.

The second driving device 621 generates power while operating by applied power and signals, and the second rotating shaft 622 is made in the form of a rod extending in the longitudinal direction, and a spiral for movement is formed on the outer circumferential surface. 2 is coupled to the driving device 621.

Further, the left and right movement block 623 is movably disposed on the second rotational shaft 622, and a vertical movement part 63 described later is coupled thereto.

Next, the vertical moving part 63 is disposed to be able to move up and down in the left and right moving part 62, and the polishing module 50 is disposed.

The upper and lower parts 63 include a third driving device 631 operated by applied power and signals, a third rotation shaft 632 rotating by receiving power from the third driving device 631, and the It is movably coupled to the third rotational shaft 632, rises or falls according to the rotation of the third rotational shaft, and includes a vertical movement block 633 on which the polishing module 50 is disposed.

The third drive device 631 generates power while operating by applied power and signals, and the third rotational shaft 632 receives power from the third drive device and is arranged to be rotatable.

Further, the vertical movement block 633 is disposed to be movable vertically on the third rotation shaft 632, and the polishing module 50 is disposed.

The displacement module 60 constructed as described above moves the polishing module 50 forward, backward, left, right, upward, and downward toward the polishing object disposed on the polishing plate 30 so that the polishing module is placed on the polishing part of the polishing object. (50) can be accurately placed.

As described above, the present invention has been described by specific details such as specific components and limited embodiments and drawings, but these are provided to help a more general understanding of the present invention, and the present invention is not limited to the above embodiments. , Those skilled in the art in the field to which the present invention belongs can make various modifications and variations from these descriptions.

Therefore, the spirit of the present invention should not be limited to the described embodiments, and it will be said that not only the claims to be described later, but also all modifications equivalent or equivalent to these claims belong to the scope of the present invention. .

1: Ultra-precision correction and polishing machine equipped with a tilting module
10: support module
20: base plate
30: abrasive plate
31: rotation drive motor 32: collection box
33: outlet
40: tilting module
41: tilting drive unit 42: bracket for tilting
43: tilting axis
411: tilting cylinder 412: fixed bracket
413: protective cover
50: polishing module
60: displacement module
61: forward and backward moving part 62: left and right moving part
63: East Shanghai

Claims (9)

A support module 10 including a plurality of posts 11 and a transverse bar 12 connecting the posts 11;
a base plate 20 having a flat top surface and tiltably disposed on the support module 10;
an abrasive plate 30 rotatably disposed on the base plate and having an object to be polished disposed thereon;
A tilting module 40 that tilts the base plate 20 while operating by applied power and signals;
A polishing module 50 disposed above the polishing plate 30 to be vertically and horizontally movable by a displacement module 60 and polishing an object to be polished,
The tilting module 40,
A tilting driver 41 operated by the applied power and signal;
A pair of tilting brackets 42 disposed at mutually symmetrical positions on the base plate 20;
Ultra-precision correction grinding machine with a tilting module, characterized in that it includes a tilting shaft 43 connecting the tilting bracket 42 and the base plate 20 and rotatably supporting the base plate 20. The method according to claim 1, wherein the tilting driving unit 41,
A tilting cylinder 411 operated by applied power and signals;
An ultra-precision correction and polishing machine equipped with a tilting module, characterized in that it includes a fixing bracket 412 for rotatably disposing the tilting cylinder 411 on the support module 10. The method of claim 2,
Calculation of the tilt angle of the abrasive plate 30 is,
The left and right direction of the abrasive plate 30 is the 'x' axis direction,
The front and rear direction of the abrasive plate 30 is the 'y' axis direction,
Designate the vertical direction perpendicular to the xy plane as the 'z' axis direction,
y, z => when rotating A° with y', z'
x = x'
y'= y * cos(A) + {-z * sin(A)}
z'= y * sin(A) + z * cos(A)
Ultra-precision correction polishing machine equipped with a tilting module, characterized in that. The method of claim 2,
Checking the tilting angle of the abrasive plate 30,
The left and right direction of the abrasive plate 30 is the 'x' axis direction,
The front and rear direction of the abrasive plate 30 is the 'y' axis direction,
Designate the vertical direction perpendicular to the xy plane as the 'z' axis direction,
y, z => when rotating A° with y', z'
y'= -44.62 * cos(10) + {-89.49 * sin(10)}
z'= -44.62 * sin(10) + 89.49 * cos(10)
Ultra-precision correction polishing machine equipped with a tilting module, characterized in that. According to claim 1 or 2,
The displacement module 60,
A forward and backward movement unit 61 for moving the polishing module 50 in the forward and backward directions;
A left and right moving unit 62 for moving the polishing module 50 in the left and right directions;
An ultra-precision correction polishing machine equipped with a tilting module, characterized in that it includes a vertical moving part 63 for moving the polishing module 50 in the vertical direction. The method of claim 5,
The forward and backward moving part 61,
A first driving device 611 operated by applied power and signals;
A gearbox 612 receiving power from the first driving device 611;
A pair of power transmission rods 613 coupled to the gearbox 612 and rotated by the power received and disposed symmetrically with each other;
A pair of first rotational shafts 614 coupled to the pair of power transmission rods 613, respectively;
Ultra-precision correction with a tilting module, characterized in that it includes a pair of forward and backward moving blocks 615 that are movably coupled to the pair of first rotation shafts 614 and move forward or backward according to the rotation of the first rotation shaft. grinder. The method of claim 5,
The left and right moving parts 62,
A second driving device 621 operated by the applied power and signal;
A second rotating shaft 622 rotating by receiving power from the second driving device 621;
An ultra-precision correction grinder equipped with a tilting module, characterized in that it includes a left and right movement block 623 that is movably coupled to the second rotation shaft 622 and moves left and right according to the rotation of the second rotation shaft. The method of claim 5,
The Shanghai East (63),
A third driving device 631 operated by the applied power and signal;
A third rotary shaft 632 rotating by receiving power from the third driving device 631;
A tilting module comprising a vertical movement block 633 movably coupled to the third rotational shaft 632, raised or lowered according to the rotation of the third rotational shaft, and in which the polishing module 50 is disposed. ultra-precision correction and polishing machine. According to claim 1 or 2,
The abrasive plate 30,
It rotates by receiving power from the rotation drive motor 31 operated by the applied power and signal,
An outlet 33 disposed between the polishing plate 30 and the support module 10 to collect chips generated when an object to be polished is polished by the polishing module 50 and to discharge the collected chips An ultra-precision correction and polishing machine equipped with a tilting module, characterized in that the collection box 32 is further provided.

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