KR20220146856A - A straight line transfer device capable of correcting a traveling route and a method for correcting the traveling route - Google Patents

Abstract

The present invention relates to a straight line transport device capable of correcting a traveling route and a method for correcting a traveling route thereof, which can quickly correct routes of multiple degrees of freedom. To this end, the straight line transport device capable of correcting a traveling route comprises: a linear motion guide installed on the upper surface of a transport base, and consisting of a linear motion rail and a linear motion block; a transport table installed on the linear motion block; a correction table separated to be installed on the transport table; a plurality of actuators changing the relative position of the correction table from the transport table, wherein the upper and lower ends thereof are rotatably coupled between the transport table and the correction table; and a laser measurement device consisting of a laser transmitter installed on the front end of the transport table and a laser receiver installed on the correction table to receive a laser of the laser transmitter.

Description

A straight line transfer device capable of correcting a traveling route and a method for correcting the traveling route}

The present invention relates to a linear transport device, and more particularly, to a linear transport device capable of correcting a driving warning capable of improving the accuracy of transporting goods through correction of the driving route of the linear transport device, and a method for correcting the driving route thereof.

In general, along with the development of industry, products and parts are becoming highly functional and miniaturized, and with the development of IT, BT, and NT fields, production technology with nano-level precision is required. , a linear transfer device (stage) that performs linear motion has been developed and is continuously developing.

The linear conveying device can be manufactured in various forms while using a linear bearing or an air bearing. For example, a surface plate is installed on the lower frame, and a transfer base is installed on the surface plate in the horizontal and vertical directions, A linear motion guide may be installed on the base.

The linear motion guide may be composed of a linear motion rail and a linear motion block moving along the linear motion rail, a transfer table is installed in the linear motion block, and a transfer article is connected to the transfer table to be transferred.

When an air bearing is used in a linear conveying device, the load is supported by a thin film using compressed air between the stationary element and the moving element, and the pressure itself creates a thin film of air rather than the relative motion.

Because there is no mechanical contact, there is no need for lubrication, the bearing surface is wear-free and does not generate dust, and friction is generated only by shearing with a thin air film between the surfaces. In most cases, the friction force is close to zero, Although the movement distance is not limited, the linear movement distance is limited by the length of the component.

The configuration of the linear conveying device in which the air bearing is used may include a bearing, a driving motor, a position sensor, a control system, and the like.

On the other hand, the linear transport device is caused by errors due to tolerance of parts, assembly, deformation, etc., making ideal linear motion impossible. ) and rotational errors of yawing occur in a complex manner.

Therefore, in order to measure the driving path error, various equipment such as a laser interferometer, an autocollimator, and a capacitive sensor are used individually or simultaneously to obtain the driving path error, and then a straight line is compensated for the measured driving path error. Although the precision of the transfer device has been improved, in the case of a laser interferometer, it is possible to measure linear and rotational errors, but errors may occur depending on the environment of use. Although it is possible to measure the motion error, there are problems such as a decrease in precision or low response speed due to dependence on the flatness of the reflector and the measuring distance.

In the case of capacitive sensors, motion errors cannot be directly obtained, and studies such as two-point and three-point methods using a plurality of probes have been steadily progressing. Compared to the above two measuring devices, it has high measurement performance and has the advantage of being low-cost.

In addition, the means for measuring the error of the driving path described above cannot correct the driving path immediately after accurately measuring the complex driving path error of the linear transport device. There is a problem that it is difficult to respond quickly to the

In particular, in the case of a linear transporter that is divided and assembled like a linear transporter for a large display process, the transport precision of the linear transporter decreases during installation on the process line without accurate measurement of the driving path error and correction of the driving path, and performance is reproduced. There is a problem that makes this difficult.

Republic of Korea Patent Publication No. 10-2016-0148339 (published on December 26, 2016)

The present invention has been devised to solve the above-mentioned problems, and it is possible to accurately measure the complex path error of a linear transfer device through a laser measuring device capable of measuring multiple degrees of freedom, and to quickly correct the path of multiple degrees of freedom. An object of the present invention is to provide a straight-line transfer device capable of correcting a traveling path and a method for correcting the traveling path.

The technical problems to be solved by the present invention do not need to be limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those of ordinary skill in the art to which the present invention belongs from the description below. will be able

A straight-line transfer device capable of correcting a traveling path according to the present invention for realizing the object as described above,

A linear motion guide installed on the upper surface of the transfer base and composed of a linear motion rail and a linear motion block;

a transfer table installed on the linear motion block;

a correction table installed to be spaced apart on the transfer table;

A plurality of actuators having an upper end and a lower end rotatably coupled between the transfer table and the compensating table, and varying the relative position of the compensating table from the transfer table with multiple degrees of freedom;

It is composed of a laser transmitter installed at the tip of the transfer base and a laser receiver installed on the calibration table to receive the laser of the laser transmitter, and includes a laser measuring device capable of measuring multiple degrees of freedom traveling path error.

More preferably, the transfer base may be installed as a pair and crossed in the X-axis direction and the Y-axis direction on the surface plate.

More preferably, the transfer table, the actuator, and the compensation table may be configured in the form of a Stewart platform or a robot capable of driving in multiple degrees of freedom.

More preferably, the actuator may be coupled to the upper and lower ends in the form of a ball joint to the compensation table and the transfer table, respectively.

More preferably, the laser measuring device may be configured as a laser measuring device capable of measuring multiple degrees of freedom.

As a driving path correction method of a straight line transfer device capable of driving path correction according to the present invention for realizing the object as described above,

a laser meter alignment step;

a correction table alignment step;

a laser receiver positioning step;

driving route data collection stage and

The motion data conversion step of the driving route data is included and configured.

More preferably, the laser measuring instrument alignment step,

A process in which the transfer table, the actuator, and the correction table are reciprocated on the travel path of the transfer base, and in this process, a laser beam emitted from a laser transmitter installed on one end of the transfer base passes through a laser receiver installed on the correction table. The process of adjusting the position of the laser transmitter or the laser receiver so as to be received by returning to the transmitter may be included.

More preferably, the correction table alignment step comprises:

After positioning the transfer table, actuator, and the correction table at the starting point of travel on the travel path of the transfer base, the correction table is moved to the maximum in the Y-axis direction, and the roll, pitch, and yaw values measured at this time are obtained, and then the roll, pitch , the process of finding a negative value for the yaw value, and

A rotation matrix is obtained using the roll, pitch, and yaw values, and the rotation matrix value is multiplied by a negative value for the roll, pitch, and yaw values and a linear movement value of the correction table to correct the coordinate system of the transfer table. The process of calculating the linear movement error value of the table may be included.

More preferably, the laser receiver positioning step comprises:

In the origin state of the compensation table without changes in the length and rotation of the actuator, the transport table, the actuator, and the compensation table are placed together at the driving starting point on the driving path of the transport base, and at this time, the coordinate value of the laser receiver located in the compensation table The process of setting the to zero point,

a process of obtaining a coordinate value of the laser receiver in a state in which the correction table is rotated to an arbitrary value; and

Thereafter, a process of confirming the positional relationship between the rotation center of the upper surface of the compensation table and the laser receiver by using the inverse matrix of the rotation matrix may be included.

More preferably, the driving route data collection step comprises:

In the origin state of the compensation table where the length of the actuator is not changed and rotation is not made, the transfer table, the actuator, and the correction table together move the entire section at regular intervals to the next running end point located at the running start point on the transfer base. A process of measuring the travel path of the transfer table, the actuator, and the correction table through the .

More preferably, when the transfer table, the actuator, and the correction table are located at the travel starting point on the transfer base, the transfer table, the actuator, and the correction table are moved a predetermined distance in the reverse direction, and then moved back to the travel starting point on the transfer base. A process of eliminating backlash may be included.

More preferably, the motion data conversion step of the driving route data comprises:

A process in which the transfer table, the actuator, and the correction table are positioned at the starting point of the travel on the transfer base together and move the entire section at regular intervals until the end of the travel, in which 0 measurements are made at each measurement point to create travel route data;

Rotation of the correction table in which the linear error of the correction table is reflected by rotating the correction table and moving the correction table linearly at the same time using the negative values of roll and pitch yaw values and the rotation matrix according to the movement of the correction table The process of creating driving route data based on the center and

Using inverse kinematics, the rotation value and the straight line value of the compensation table among the travel route data based on the rotation center of the compensation table and the travel route data of the transfer table and actuator and the compensation table collected through the laser measuring device are used for motion The process of creating data may be included.

More preferably, after the motion data conversion step of the driving path data is completed, the driving path data collection step is executed again to determine whether the driving path correction is abnormal, and if there is no abnormality in the driving path correction, the driving path correction is terminated, , If there is an abnormality in the driving path correction, it may be configured to return to the laser measuring device alignment step.

The straight-line transfer device capable of correcting the traveling path of the present invention according to the above configuration and the method of correcting the traveling path have the following effects.

That is, in the present invention, a transfer table connected to a linear motion guide is installed on the transfer base of the linear transfer device, and the transfer table, the actuator, and the correction table are connected to the transfer table through a plurality of actuators on the transfer table, and the transfer table, the actuator, and the correction table are Stewart platform In order to determine the travel path along which the transfer table, actuator and compensating table move together, a laser measuring device capable of measuring multiple degrees of freedom is installed together, resulting in a complex After accurately determining the travel path error, by controlling the motion of the actuator with respect to the travel path error to correct the travel path of the correction table, it is possible to further improve the conveying precision of the article connected to the correction table.

On the other hand, since the effects of the present invention described as described above are naturally exhibited by the configuration of the described contents regardless of whether the inventor recognizes them, the above-described effects are only a few effects according to the described contents, and all effects recognized or actual by the inventor should not be accepted as having been described.

In addition, the effect of the present invention should be further grasped by the overall description of the specification, and even if it is not described in an explicit sentence, a person of ordinary skill in the art to which the described content belongs has such an effect through this specification If it is an effect that can be recognized as the effect, it will be considered as the effect described in the present specification.

1 is a perspective view showing a linear transfer device according to an embodiment of the present invention.
Figure 2 (a) is an exploded perspective view illustrating the configuration of the transfer table, the actuator, and the compensation table of the linear transfer device according to an embodiment of the present invention.
Figure 2 (b) is a combined perspective view illustrating the configuration of the transfer table, the actuator and the compensation table of the linear transfer device according to an embodiment of the present invention.
3 (a) is a view showing the traveling path of the transfer table, the actuator, and the correction table before the driving path is corrected according to an embodiment of the present invention in a plan view and a side view.
3 (b) is a view showing the traveling path of the transfer table, the actuator, and the correction table after the driving path is corrected according to an embodiment of the present invention in a plan view and a side view.
4 is a block diagram illustrating a system configuration of a straight-line transfer device capable of correcting a traveling path according to an embodiment of the present invention.
5 is a flowchart illustrating a driving path correction process of a linear transfer device capable of correcting a driving path according to an embodiment of the present invention.

Hereinafter, the configuration and operation according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

This is intended to describe in detail enough to be easily implemented by those of ordinary skill in the art to which the present invention pertains, and this does not mean that the technical spirit and scope of the present invention is limited. .

In addition, in adding reference numerals to the components of each drawing, it should be noted that only the same components are marked with the same reference numerals as much as possible even though they are displayed on different drawings, considering the configuration and operation of the present invention. Therefore, the terms specifically defined may vary depending on the intention or custom of the user or operator, and the definition of these terms should be determined based on the content throughout this specification.

In addition, throughout the specification, when a part "includes" a certain component, this means that other components may be further included, rather than excluding other components, unless otherwise stated.

Hereinafter, the configuration of the present invention will be described in more detail with reference to the illustrated drawings.

First, the linear transfer device capable of correcting the travel path according to the present invention may be configured by using a linear bearing or an air bearing, and when a linear bearing is used, a linear motion guide installed on the upper surface of the transfer base and a linear motion The transfer table installed on the linear motion block of the guide, the compensation table installed spaced apart on the transfer table, a number of actuators connecting the transfer table and the compensation table, and 6 freedoms according to the movement of the transfer table and the actuator and the compensation table It can be largely divided into a laser measuring machine that can measure the , and each configuration will be described in detail with reference to the illustrated drawings below.

First, the linear motion guide 140 is,

The rolling element of the ball or roller has a structure that smoothly circulates inside the block, and the block can move in a straight line on the raceway of the rail. The friction fluctuation is very small, and it has excellent responsiveness even during fine movement, enabling precise and fine linear motion.

As illustrated in FIG. 1 , the linear motion guide 140 may be configured to be included in a linear transport device, and the linear transport device includes, for example, a surface plate 120 installed on the upper portion of the lower frame 110, and such a plate ( 120), the transfer base 130 may be installed in the X-axis and Y-axis directions, and the linear motion rail is configured with a linear motion rail and a linear motion block while the linear motion rail is installed on the transfer base 130. A linear motion block may be installed to perform a linear motion (including reciprocating motion) along the

The transfer table 150 is

As illustrated in (a) and (b) of FIG. 2 , it is installed on the linear motion block 142 installed on the linear motion rail of the linear motion guide 140 described above, and the linear motion rail in a state connected to the linear motion block. will move along

The correction table 170 is

As illustrated in (a) and (b) of FIG. 2 , it is installed in a spaced state through an actuator 160 to be described later above the transfer table 150 above, and the relative position from the transfer table 150 is variable. It may be, and the article fixing portion may be formed so that the transported article can be fixed.

The article fixing unit may fix the transferred article through physical pressure or may fix the transferred article through a method such as adsorption using vacuum or the like.

The actuator 160 is

As illustrated in (a) and (b) of FIG. 2 , the Stewart Platform is installed between the transfer table 150 and the correction table 170 and together with the transfer table 150 and the correction table 170 . ), and when the actuator 160 is driven, the compensation table 170 from the transfer table 150 drives in multiple degrees of freedom, preferably 6 degrees of freedom.

The means for driving the correction table 170 from the transfer table 150 to multiple degrees of freedom, preferably 6 degrees of freedom, does not need to be limited to the actuator 160, and a transfer table using a robot capable of driving multiple degrees of freedom. From 150, the correction table 170 may be configured to operate in multiple degrees of freedom.

On the other hand, a plurality of actuators 160 connecting the transfer table 150 and the correction table 170 in parallel so that the transfer table 150, the actuator 160, and the correction table 170 form a Stewart platform, the upper and lower ends Each of the compensation table 170 and the transfer table 150 may be connected to each other by a hinge or a ball joint.

Accordingly, the compensation table 170 can be driven with multiple degrees of freedom, preferably with six degrees of freedom, while the relative height or relative position is changed from the transfer table 150, and the actuator 160 provides motion data from the controller 200 to be described later. is input and causes changes in length and rotation to change the position of the compensation table.

laser meter,

This is a device for measuring the multiple degrees of freedom, preferably 6 degrees of freedom, based on the traveling path of the compensation table 170 connected to the transfer table 150 and the actuator 160 .

It is preferable that the laser measuring device is configured to measure multiple degrees of freedom, preferably six degrees of freedom, by using one optic instead of using a plurality of optics to measure the multiple degrees of freedom driving path error.

In the present invention, the laser measuring device is not limitedly used to verify the performance of the linear transport device, but the laser measuring device is installed in the linear transport device to determine the error of the driving route, and is configured to correct the driving route in consideration of the error will be.

In the case of a linear feeder, the feed table and the compensation table moved through the linear motion guide on the feed base due to machining errors of parts and assembly errors, etc. , a rotation error of the roll is compounded. (See Fig. 3 (a))

Therefore, after measuring the driving path error of the transfer table 150, the actuator 160, and the correction table 170 moved by the linear motion guide 140 through the laser measuring device, and then correcting the driving path error, Even if the transfer table 150 moves along a travel path in which an error occurs, the correction table 170 whose position is corrected through the control of the actuator 160 travels along an accurate travel path without errors (Fig. 3). of (b))

On the other hand, the laser measuring device may include a laser transmitter 181 , a laser receiver 182 , and software and hardware for generating and storing measurement data measured by the laser measuring device, and the laser beam transmitted from the laser transmitter 181 . is received by the laser receiver 182, and then the laser beam received by the laser receiver 182 is transmitted again and received by the laser transmitter, so that the multiple degrees of freedom error of the point where the laser receiver is located can be measured.

Such a laser measuring device may be installed as follows, in being installed in the linear transfer device.

That is, as illustrated in FIG. 1 , the laser transmitter 181 is installed through a bracket that is installed to protrude upward from one end of the transfer base 130 , and the correction table 170 faces the laser transmitter 181 . While the laser receiver 182 is installed on the upper surface of the do.

Accordingly, through the laser beam transmitted and received between the laser transmitter 181 fixed to the transfer base 130 and the laser receiver 182 that is moved by the correction table 170, it is on the travel path of the correction table 170. Accordingly, it is possible to determine the error of the multiple degree of freedom driving.

On the other hand, after the travel route of the correction table is measured through the linear transfer device capable of correcting the travel route configured as described above, the method of correcting the travel route in consideration of the error of the travel route is as follows.

First, the transfer table 150 installed in the linear transfer device is installed and moved in the linear motion block 142 that is moved along the linear motion rail 140 of the linear motion guide 140. At this time, the transfer table 150 can not perform an ideal linear motion due to complex errors due to processing, assembly, and deformation of parts constituting the linear conveying device.

Accordingly, in the present invention, the compensation table 170 is installed vertically above the transfer table 150, and the transfer table 150 and the correction table 170 are connected through an actuator 160 to connect the transfer table 150. And the actuator 160 and the compensation table 170 are configured in the form of a Stewart platform, and the multiple degrees of freedom of the compensation table 170 according to the movement of the transfer table 150 and the actuator 160 and the compensation table 170 can be measured. By installing a laser measuring device that can By changing the position of the correction table 170 with the actuator 160, the driving path of the correction table 170 can be matched with the target driving path.

Hereinafter, a method of measuring the driving path error of the transfer table 150, the actuator 160, and the correction table 170 through the laser measuring device according to the present invention and correcting the driving path error will be described in stages.

First, the system for correcting the travel path of the linear transporter according to the present invention is a linear transporter and a linear transporter installed in such a linear transporter, as illustrated in FIG. 4 , the transport table 150, the actuator 160, and the correction table In the driving process of 170, the laser measuring device 180 for measuring the multiple degrees of freedom of the correction table 170 and the multiple degree of freedom driving measurement data measured from the laser measuring device while driving the linear transfer device are collected and stored, and such In order to drive the actuator 160 with the measured data of the multiple degree of freedom, the controller 200 converts the measured data of the multiple degree of freedom drive into motion data, and transmits the motion data to the motion controller 300; 200 , it may be configured to include a motion controller 300 that controls the actuator 160 to change the position of the compensation table 170 based on the motion data received from it.

And, as a process of correcting the driving path of the correction table through the system for correcting the driving path of the linear transfer device, first, as illustrated in FIG. 5 , the laser measuring device alignment step (S100) may be performed.

In this step, prior to the alignment of the laser measuring device, the laser transmitter 181 of the laser measuring device is fixedly installed at one end of the transfer base 130, and the laser receiver 182 is movably installed on the calibration table 170. The alignment of the laser measuring device is a step for confirming whether the laser beam is accurately received and transmitted between the laser transmitter 181 and the laser receiver 182 .

The alignment method of the laser measuring instrument moves the transfer table 150, the actuator 160, and the correction table 170 at a constant speed from the travel start point on the transfer base 130 to the travel end point, and in this process, the transfer base 130 The laser receiver 182 so that the laser beam emitted from the laser transmitter 181 installed at one end of the It includes the process of precisely adjusting the position of the

Here, in the embodiment of the present invention, since the laser transmitter 181 is fixed to the transfer base 130 and the laser receiver 182 is movably installed on the calibration table 170, the alignment of the laser receiver 182 is By adjusting the position, the laser transmitter 181 may be movably installed on the transfer base 130 to adjust the position of any one or both of the laser receiver 182 and the laser transmitter 181 .

The purpose of aligning the laser measuring device in this way is to accurately measure and correct the 6-DOF driving of the compensation table 170 by the laser measuring device during the traveling process of the transfer table 150, the actuator 160, and the compensation table 170. This is to secure the driving route data of the table 170 .

Here, when the transfer table 150 , the actuator 160 , and the correction table 170 move from the travel start point on the transfer base 130 to the travel end point, the actuator connecting the transfer table 150 and the correction table 170 . At 160, there is no change in length and rotation, so that the correction table 170 needs to be set to maintain the origin state.

After the laser measuring instrument alignment step (S100) is completed, the calibration table alignment step (S200) may be performed.

In this step, the alignment of the laser measuring device is completed through the above-described laser measuring device alignment step (S100), and the transport table 150, the actuator 160, and the compensation table 170 are positioned at the driving starting point on the transport base 130. Then, a process of measuring the roll, pitch, and yaw values generated at this time by moving the correction table 170 as much as possible in the Y-axis direction may be included.

In addition, the process of calculating each negative value so that the measured roll, pitch, and yaw values are '0' may be included.

For reference, the negative value of the roll and pitch yaw values according to the Y-axis movement of the correction table 170 may be used to obtain a linear movement error value of the correction table 170 thereafter, and the transfer table ( 150) The coordinate system-based movement error value is obtained by applying the above-described roll, pitch, and yaw values to obtain a rotation matrix, and then to the values obtained through this rotation matrix, the negative values of the aforementioned roll and pitch yaw values and the correction table It can be obtained by multiplying the linear movement value of (170).

After the correction table alignment step (S200) is completed, the laser receiver positioning step (S300) may be performed.

This is to confirm the relationship between the center of rotation of the upper surface of the correction table 170 and the position of the laser receiver 182 installed on the upper surface of the correction table 170 , and the laser receiver 182 installed on the upper surface of the correction table 170 . ), as the position of the correction table 170 is installed as close as possible to the transported article, a distance difference between the rotation center of the correction table 170 and the position of the laser receiver 182 is inevitable.

That is, the position of the correction table 170 through the laser measuring device is measured based on the position of the laser receiver 182 , while the error correction of the correction table 170 is based on the rotation center of the upper surface of the correction table 170 . As this is done, an error occurs due to a difference in distance between the center position of the correction table 170 and the position of the laser receiver 182, and in order to correct this error, the position of the laser receiver 182 and the correction table ( 170), it is necessary to confirm the relationship between the positions of the centers of rotation.

Therefore, as a specific process for confirming the relationship between the position of the laser receiver 182 and the position of the center of rotation of the correction table 170, first, the transfer table 150, the actuator 160, and the correction table 170 are transferred to the transfer base ( 130), and at this time, the correction table 170 is made to the origin state in which the length of the actuator 160 is not changed and is not rotated, and then the coordinate value of the laser receiver 182 located on the correction table 170 is set to zero.

Thereafter, the correction table 170 is driven to rotate to an arbitrary value, and the coordinate value of the laser receiver 182 obtained by the laser measuring device is obtained through such rotation, and then the upper surface of the correction table 170 is obtained using the inverse matrix of the rotation matrix. A process of confirming the positional relationship between the rotation center and the laser receiver 182 as a coordinate relationship may be included.

As such, when the relationship between the rotation center of the upper surface of the compensation table 170 and the position of the laser receiver 182 is known, the transfer table 150, the actuator 160, and the correction table 170 are moved from the starting point of the transfer on the transfer base 130. When moving to the driving end point, in the driving route data obtained through the laser measuring device, data measured based on the position of the laser receiver 182 is converted to data measured based on the position of the rotation center of the correction table 170 . that can be converted.

After the laser receiver positioning step (S300) is completed, the driving route data collection step (S400) may be performed.

In the process of collecting such travel route data, first, the correction table 170 is placed in the origin state in which the length of the actuator 160 is not changed and the rotation is not made, and the transfer table 150, the actuator 160, and the correction table 170 are set. ) together at the starting point of travel on the transfer base 130, and then measuring through a laser measuring machine while moving the entire section to the end point of travel at regular intervals (for example, approximately 10 mm), as the measurement and movement are repeated, the transfer table ( 150), the actuator 160, and the driving route data of the correction table 170 may be collected.

Here, when the transfer table 150, the actuator 160, and the correction table 170 are positioned at the starting point of travel on the transfer base 130, the transfer table 150, the actuator 160, and the correction table 170 are It is preferable to remove unnecessary backlash by moving a predetermined distance (eg, about 1 mm) in the opposite direction to the traveling direction and then moving it back to the traveling starting point on the transfer base 130 .

After the driving route data collection step (S400) is completed, the motion data conversion step of the driving route data for controlling the motion of the actuator 160 using the previously collected driving route data of the correction table 170 (S500) is performed

This is to convert the motion data for controlling the actuator 160 for driving the compensation table 170 using the travel route data of the transport table 150, the actuator 160, and the compensation table 170 collected through the laser measuring device. This driving route data is converted into motion data through the controller 200, and then the controller 200 drives the motion controller 300 based on the converted motion data, thereby driving the motion controller 300 to the actuator 160. ) is driven to drive the correction table 170 .

Hereinafter, the process of converting driving route data into motion data will be described in detail as follows.

The travel route data of the transfer table 150, the actuator 160, and the correction table 170 collected through the laser measuring device is data made on the basis of the position of the laser receiver 182, so it is the rotation center of the correction table 170. It is necessary to convert the data into position-based data, and accordingly, the driving route data is the relationship between the position of the laser receiver 182 and the center of rotation of the correction table 170 through the laser receiver positioning step S300 described above. When , it can be converted into driving route data based on the rotation center of the correction table 170 .

And since the driving route data based on the rotation center of the correction table 170 is in a state in which the error of the correction table 170 is not reflected, the movement of the correction table 170 obtained through the correction table alignment step (S200) described above The correction table 170 in which the linear error of the correction table 170 is reflected by rotating the correction table 170 and moving the correction table 170 in a straight line at the same time using the negative value of the roll and pitch yaw values and the rotation matrix according to ), driving route data based on the center of rotation can be created.

Thereafter, the correction table 170 among the driving path data based on the rotation center of the correction table 170 and the driving path data of the transport table 150 , the actuator 160 and the correction table 170 collected through the laser measuring device. ) can be converted into motion data capable of driving the actuator 160 by calculating the rotation value and the straight line value using inverse kinematics, and while this motion data is transmitted to the motion controller 300, the actuator The motion is generated and the compensation table 170 is driven.

Here, the travel route data of the transfer table 150, the actuator 160, and the correction table 170 are the transfer table 150, the actuator 160, and the correction table 170 together with the transfer base 130. It is made through measurement for each measurement point while moving the entire section at regular intervals to the next driving end point, and the error of the correction table 170 and the laser receiver 182 and the correction table 170 through the control unit 200 The positional relationship between the centers is applied and converted into motion data.

In addition, the controller 200 transmits the motion data to the motion controller 300 and drives the actuator 160 through the motion controller 300 , the transfer table 150 , the actuator 160 , and the compensation table 170 . ) is located at the starting point of travel on the transfer base 130 and the entire section is moved at regular intervals until the end point of travel. The actuator 160 makes a continuous motion by the motion controller 300 receiving the data.

On the other hand, after the motion data conversion step (S500) of the driving route data, the driving route data collection step (S400) is performed once again to check whether the driving route correction is abnormal. If there is no abnormality in the driving route correction, the driving route correction is performed. End, if there is an abnormality, you may proceed again from the laser measuring instrument alignment step (S100).

According to the present invention, a correction table 170 is installed on the transfer table 150 of the linear transfer device to enable 6-DOF driving, and a laser measuring machine capable of measuring 6-DOF driving periodically or if necessary, adjusts the travel path. After judging the error, as the correction table 170 is corrected so that the travel path error can be removed, the transfer precision of the article to be transferred through the linear transfer device can be further improved.

As described above, in the detailed description of the present invention, specific embodiments have been described, but various modifications are possible without departing from the scope of the described content. Therefore, the scope of the described content does not need to be limited to the described embodiments, and should be defined by the claims described below as well as the claims and equivalents.

110: lower frame 120: surface plate
130: transfer base 140: linear motion guide
141: linear motion rail 142: linear motion block
150: transfer table 160: actuator
170: calibration table 181: laser transmitter
182: laser receiver 200: control unit
300: motion controller

Claims (14)

It is installed on the upper surface of the transfer base 130, the linear motion guide 140 consisting of the linear motion rail 140 and the linear motion block 142;
a transfer table 150 installed on the linear motion block 142;
a correction table 170 installed to be spaced apart on the transfer table 150;
A plurality of upper and lower ends are rotatably coupled between the transfer table 150 and the correction table 170 , and vary the relative position of the correction table 170 from the transfer table 150 with multiple degrees of freedom. actuator 160; and
It consists of a laser transmitter 181 installed at the tip of the transfer base 130 and a laser receiver 182 installed on the calibration table 170 to receive the laser beam of the laser transmitter 181, A laser measuring device capable of measuring the driving path error in degrees of freedom;
A linear transport device capable of correcting the driving path, characterized in that it includes a. The method according to claim 1,
The transfer base 130 is
A linear conveying device capable of correcting a traveling path, characterized in that it is configured as a pair and is installed to cross in the X-axis direction and the Y-axis direction on the surface plate 120 . The method according to claim 1,
The transfer table 150, the actuator 160, and the correction table 170 are in the form of a Stewart platform or a robot capable of multi-guided driving. 4. The method of claim 3,
The actuator 160 has an upper end and a lower end respectively coupled to the correction table 170 and the transfer table 150 in the form of a ball joint. The method according to claim 1,
The laser measuring device is a linear transporting device capable of correcting a driving path, characterized in that it is configured to measure multiple degrees of freedom driving. 6. The method of claim 5,
The laser measuring device is a linear transporting device capable of correcting a driving path, characterized in that it is configured to enable measurement of driving in 6 degrees of freedom. As a driving path correction method of a straight-line transfer device capable of driving path correction,
laser measuring device alignment step (S100);
Compensation table alignment step (S200);
Laser receiver positioning step (S300);
driving route data collection step (S400); and
a motion data conversion step of the driving route data (S500);
A driving path correction method of a straight-line transfer device capable of driving path correction, characterized in that it includes a. 8. The method of claim 7,
The laser measuring instrument alignment step (S100) is,
a process in which the transfer table 150, the actuator 160, and the correction table 170 are reciprocated on the travel path of the transfer base 130; and
In this process, the laser beam emitted from the laser transmitter 181 installed on one end of the transfer base 130 is returned to the laser transmitter 181 through the laser receiver 182 installed on the calibration table 170 . adjusting the position of the laser transmitter 181 or the laser receiver 182 to be received;
A driving path correction method of a linear transport device capable of driving path correction, characterized in that it includes. 8. The method of claim 7,
The correction table alignment step (S200) is,
The transfer table 150, the actuator 160, and the correction table 170 are positioned at the starting point of the travel on the travel path of the transfer base 130, and then the correction table 170 is moved to the maximum in the Y-axis direction. After obtaining the roll, pitch, and yaw values, the process of obtaining negative values for the roll, pitch, and yaw values; and
A rotation matrix is obtained using the roll, pitch, and yaw values, and the rotation matrix value is multiplied by a negative value for the roll, pitch, and yaw values by the linear movement value of the correction table 170 to the transfer table 150 obtaining a linear movement error value of the correction table 170 based on the coordinate system of ;
A driving path correction method of a linear transport device capable of driving path correction, characterized in that it includes. 8. The method of claim 7,
The laser receiver positioning step (S300) is,
In the origin state of the compensation table without changes in length and rotation of the actuator 160, the transfer table 150, the actuator 160, and the correction table 170 together are located at the starting point of the travel on the travel path of the transfer base 130 after setting the coordinate value of the laser receiver 182 located in the correction table 170 as a zero point;
obtaining a coordinate value of the laser receiver 182 in a state in which the correction table 170 is rotated to an arbitrary value; and
Thereafter, the process of confirming the positional relationship between the center of rotation of the upper surface of the correction table 170 and the laser receiver 182 using the inverse matrix of the rotation matrix;
A driving path correction method of a linear transport device capable of driving path correction, characterized in that it includes. 8. The method of claim 7,
The driving route data collection step (S400) is,
In the origin state of the compensation table 170 where there is no change in length of the actuator 160 and no rotation is made, the transport table 150, the actuator 160, and the compensation table 170 together with the transport base 130 travel starting point Driving path correction, characterized in that it includes the process of measuring the driving path of the transfer table 150, the actuator 160, and the correction table through a laser measuring machine while moving the entire section at regular intervals to the next driving end point located in A method of correcting the travel path of a possible straight-line transfer device. 12. The method of claim 11,
When the transfer table 150, the actuator 160, and the correction table 170 are located at the starting point of the transfer on the transfer base 130, the transfer table 150, the actuator 160, and the correction table 170 After moving a predetermined distance in the reverse direction, the driving path correction method of a straight transport device capable of driving path correction, characterized in that it includes the process of removing backlash by moving it back to the driving starting point on the transport base 130 . 8. The method of claim 7,
The motion data conversion step (S500) of the driving route data is,
The transfer table 150, the actuator 160, and the correction table 170 move the entire section at regular intervals to the next travel end point located at the travel start point on the transfer base 130 together, and measurements are made at each measurement point, so that the travel route data the process by which it is made;
By rotating the correction table 170 and moving the correction table 170 in a straight line using the rotation matrix and the negative value of the roll and pitch yaw values according to the movement of the correction table 170, the correction table ( 170) a process of generating driving route data based on the rotation center of the correction table 170 in which the linear error is reflected; and
The correction table 170 among the driving path data based on the rotation center of the correction table 170 and the driving path data of the transfer table 150 , the actuator 160 , and the correction table 170 collected through a laser measuring device ), the process of making the rotation and straight line values into motion data using inverse kinematics;
A driving path correction method of a linear transport device capable of driving path correction, characterized in that it includes. 14. The method of claim 13,
After the motion data conversion step (S500) of the driving route data is completed,
Execute the driving path data collection step (S400) again to determine whether the driving path correction is abnormal, and if there is no abnormality in the driving path correction, end the driving path correction, and if there is an error in the driving path correction, align the laser measuring device A driving path correction method of a linear transfer device capable of driving path correction, characterized in that returning to step (S100) again.

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