KR20220132840A - Apparatus for generating plasma - Google Patents

Abstract

The present invention relates to a plasma generating device capable of generating ozone gas and the like using oxygen gas, nitrogen, or air and the like comprising: at least one annular magnetic core wherein a primary side core winding connected to a core power source is wound on at least one part; a 1-1 electrode body formed in a shape surrounding one side of the magnetic core; and a 1-2 electrode body formed in a shape surrounding the 1-1 electrode body to form a first discharge space spaced apart from the 1-1 electrode body at a first interval, wherein a voltage difference may be generated between the 1-1 electrode body and the 1-2 electrode body.

Description

Plasma generator {Apparatus for generating plasma}

The present invention relates to a plasma generating device, and more particularly, to a plasma generating device capable of generating ozone gas using oxygen gas, nitrogen, air, or the like.

In general, ozone (O ₃ ) is an allotrope material of oxygen (O ₂ ) that exists as a light blue gas with a characteristic odor in an environment of normal pressure and room temperature. This ozone has a density of 1.5 times that of oxygen. It is a material with solubility 12.5 times that of Ozone, and this ozone has a strong sterilization, disinfection, decolorization and deodorization effect that oxidizes difficult-to-decompose substances and converts them into biodegradable substances.

Conventional ozone generating devices, as described in Korean Patent Registration No. 10-1016435, generate a corona discharge between two electrodes to generate ozone from oxygen radicals through a plasma chemical reaction. As a high power of , a capacitively coupled plasma source method that mainly corresponds to an electrode was used.

However, since plasma discharge cannot be smoothly generated by such a simple capacitively coupled plasma source method, plasma has to be generated in a vacuum environment using a vacuum pump or a vacuum chamber, which greatly wastes the size and manufacturing cost of the device, There were many problems, such as the low density of the generated ozone gas, which greatly reduced productivity.

The present invention is to solve various problems, including the above problems, a high-density plasma in a hybrid method using a transformer coupled plasma source method together with a capacitively coupled plasma source method It is possible to generate high-density ozone radicals under vacuum pressure as well as atmospheric pressure environments, thereby greatly reducing the size and manufacturing cost of the device, and greatly increasing the productivity of ozone gas. An object of the present invention is to provide a plasma generating device. However, these problems are exemplary, and the scope of the present invention is not limited thereto.

Plasma generating apparatus according to the spirit of the present invention for solving the above problems, at least one annular magnetic core is wound on at least a portion of the core winding connected to the core power supply; a 1-1 electrode body formed in a shape surrounding one side of the magnetic core; and a first 1-2 electrode body spaced apart from the 1-1 electrode body by a first interval and formed in a shape surrounding the 1-1 electrode body to form a first discharge space. The 1-1 electrode body or the 1-2 electrode body may be connected to a discharge power source so that a voltage difference is generated between the -1 electrode body and the 1-2 electrode body.

In addition, according to the present invention, a 2-1 electrode body formed in a shape surrounding the other side of the magnetic core; and a 2-2 electrode body spaced apart from the 2-1 electrode body at a second interval to form a second discharge space to surround the 2-1 electrode body.

In addition, according to the present invention, the 1-2 electrode body and the 2-2 electrode body are grounded, and the 1-1 electrode body and the 2-1 electrode body are electrically connected to the discharge power source, respectively. can

In addition, according to the present invention, a connection line electrically connecting the 1-1 electrode body and the 2-1 electrode body; an inductive winding formed on the connection line to form an additional induced electromotive force in the magnetic core and wound around at least another portion of the magnetic core; and at least one switch installed on the connection line.

Also, according to the present invention, a dielectric layer may be formed between the 1-1 electrode body and the magnetic core.

Also, according to the present invention, a cutout may be formed in at least a portion of the 1-1 electrode body and the 1-2 electrode body.

Also, according to the present invention, an insulating member may be inserted into the cutout.

Also, according to the present invention, the 1-1 electrode body may have a cooling line formed therein.

In addition, according to the present invention, in the first and second electrode bodies, a gas inlet is formed on one side to supply a target gas to the first discharge space, and the generated gas is moved along the first discharge space. A gas outlet may be formed on the other side to be discharged.

In addition, according to the present invention, the target gas may include at least one or more components of oxygen, nitrogen, air, and combinations thereof, and the product gas may include an ozone gas component.

Also, according to the present invention, the 1-2 first electrode body may be disposed on a coaxial line with the 1-1 electrode body.

Also, according to the present invention, the first discharge space may be formed in a circular pipe shape as a whole.

Also, according to the present invention, the 1-1 electrode body and the 2-1 electrode body are disposed to be spaced apart from each other, are formed in a circular pipe shape, respectively, and the 1-2 electrode body and the second electrode body are provided. - It may further include a housing formed in a shape surrounding the electrode body.

In addition, according to the present invention, the magnetic core may include: a first shaft portion installed on the inner diameter surface of the 1-1 electrode body; a second shaft portion installed on the inner diameter surface of the first and second electrode bodies; a first connection bracket connecting one end of the first shaft and one end of the second shaft; and a second connection bracket connecting the other end of the first shaft and the other end of the second shaft.

In addition, according to the present invention, the magnetic core, one side of the first connection bracket, the first shaft portion and a first fixing rod fixed through one side of the second connection bracket; and a second fixing bar fixed through the other side of the first connection bracket and the second shaft portion and the other side of the second connection bracket.

In addition, according to the present invention, the magnetic core may include: a first magnetic core penetrating one side of the inner diameter part of the 1-1 electrode body; and a second magnetic core penetrating the other side of the inner diameter portion of the 1-1 electrode body.

On the other hand, a plasma generating device according to the spirit of the present invention for solving the above problems, at least one annular left magnetic core is wound at least a portion of the core winding connected to the core power supply; at least one annular right magnetic core; A toroidal shape in which a gas inlet through which a target gas is supplied on one side and a gas outlet through which a product gas is discharged on the other side is formed in an annular reaction space as a whole is formed inside the left magnetic core and the right magnetic core external electrode body; a left internal electrode body spaced apart from the external electrode body to correspond to the left magnetic core and electrically connected to a discharge power supply; and a right inner electrode body spaced apart from the outer electrode body to correspond to the right magnetic core and electrically connected to the discharge power source.

Also, according to the present invention, the left internal electrode body and the right internal electrode body may each have a pipe shape.

In addition, according to the present invention, the target gas may include at least one or more components of oxygen, nitrogen, air, and combinations thereof, and the product gas may include an ozone gas component.

According to the plasma generating apparatus according to various embodiments of the present invention made as described above, high-density plasma can be generated by a hybrid method using a transformer-coupled plasma source method together with a capacitively coupled plasma source method, so that not only vacuum pressure, but also atmospheric pressure It is possible to generate high-density ozone radicals even in the environment, thereby greatly reducing the size and manufacturing cost of the device, and has the effect of greatly increasing the productivity of ozone gas. Of course, the scope of the present invention is not limited by these effects.

1 is a conceptual diagram illustrating a plasma generating apparatus according to some embodiments of the present invention.
FIG. 2 is an external perspective view showing the plasma generator of FIG. 1 .
FIG. 3 is a cross-sectional view illustrating a section III-III of the plasma generating device of FIG. 2 .
4 is an enlarged cross-sectional view illustrating an enlarged portion IV of the plasma generating apparatus of FIG. 3 .
5 is an enlarged cross-sectional view illustrating an enlarged portion V of the plasma generating apparatus of FIG. 3 .
FIG. 6 is an exploded perspective view of parts showing the plasma generator of FIG. 2 .
FIG. 7 is a cross-sectional view illustrating a magnetic core of the plasma generating device of FIG. 1 .
8 is a conceptual diagram illustrating a plasma generating apparatus according to some other embodiments of the present invention.
9 is a conceptual diagram illustrating a plasma generating apparatus according to some other embodiments of the present invention.

Hereinafter, several preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Examples of the present invention are provided to more completely explain the present invention to those of ordinary skill in the art, and the following examples may be modified in various other forms, and the scope of the present invention is as follows It is not limited to an Example. Rather, these embodiments are provided so as to more fully and complete the present disclosure, and to fully convey the spirit of the present invention to those skilled in the art. In addition, in the drawings, the thickness or size of each layer is exaggerated for convenience and clarity of description.

1 is a conceptual diagram illustrating a plasma generating apparatus 100 according to some embodiments of the present invention.

As shown in FIG. 1 , the plasma generating apparatus 100 according to some embodiments of the present invention includes a magnetic core 10 , a 1-1 electrode body E1-1 , and a 1-2 th electrode body E1-1 . It may include an electrode body E1 - 2 , a 2-1 th electrode body E2-1 , and a 2-2 th electrode body E2 - 2 .

The magnetic core 10 is a magnetic material in which a core winding 11, which is a primary winding connected to the core power supply G2, is wound on at least a part of it, and is a magnetic material capable of generating a magnetic force that forms an annular shape as a whole, and receives an induced electromotive force from the core winding 11 It may be a metal structure capable of applying an electromagnetic field to the electrode bodies. Although it is illustrated that one magnetic core 10 is installed in FIG. 1 , at least one magnetic core 10 may be installed in plurality.

The 1-1th electrode body E1-1 may be a conductive metal structure formed in a shape surrounding one side (upper part in FIG. 1 ) of the magnetic core 10 .

The 1-2 first electrode body E1-2 is spaced apart from the 1-1 electrode body E1-1 by a first gap S1 to form a first discharge space A. It may be a conductive metal structure formed in a shape surrounding (E1-1).

The 2-1 th electrode body E2-1 may be a conductive metal structure formed in a shape surrounding the other side (lower part in FIG. 1 ) of the magnetic core 10 .

The second-second electrode body E2-2 is spaced apart from the second-first electrode body E2-1 by a second gap S2 to form a second discharge space B. It may be a conductive metal structure formed in a shape surrounding the electrode body E2-1.

The electrode bodies E1-1, E1-2, E2-1, and E2-2 are formed in a shape surrounding the magnetic core 10 in the longitudinal direction to prevent eddy current loss. In order to do this, a cutout (not shown) may be formed along the longitudinal direction of the magnetic core 10 . Here, the cutout may be formed in a cut-out state in the form of a slit or in a state in which the slit is filled with an insulating material (eg, ceramic, polymer, glass, Teflon, etc.).

According to an exemplary embodiment, a gas inlet for supplying the target gas Gas1 or a gas outlet for discharging the generated gas Gas2 may be formed in the cutout.

The first discharge space (A) and the second discharge space (B) may be formed in a circular pipe shape as a whole. The first discharge space A and the second discharge space B are not necessarily limited thereto, and various pipe shapes such as an oval or polygonal pipe shape may be applied.

So that the 1-1 electrode body E1-1 and the 1-2 electrode body E1-2 correspond to each other, the 1-2 electrode body E1-2 is formed with the 1-1 electrode body E1- It is a kind of external electrode body disposed on the same axis as 1), and the 1-1th electrode body E1-2 may be a kind of internal electrode body corresponding thereto.

A dielectric barrier discharge (DBD) structure may be formed with a dielectric layer (not shown) interposed between the 1-1 electrode body E1-1 and the 1-2 electrode body E1-2.

The 2nd-2nd electrode body E2-2 is formed with the 2-1th electrode body E2- so that the 2-1th electrode body E2-1 and the 2-2nd electrode body E2-2 can also correspond to each other. It is a kind of external electrode body disposed on the same axis as 1), and the 2-1 th electrode body E2-2 may be a kind of internal electrode body corresponding thereto.

Similarly, a dielectric barrier discharge (DBD) structure may be formed with a dielectric layer (not shown) interposed between the 2-1 th electrode body E2-1 and the 2-2 th electrode body E2-2. have.

The 2-1th electrode body E2-1 and the 2nd-2nd electrode body E2-2 may be omitted.

A voltage difference is generated between the 1-1th electrode body E1-1 and the 1-2th electrode body E1-2, and the 2-1th electrode body E2-1 and the 2-2nd electrode body E2 -2) to generate a voltage difference between the 1-1 electrode body E1-1 or the 2-1 electrode body E2-1 may be electrically connected to the discharge power source G1, respectively, and The -2 electrode body E1 - 2 and the 2 - 2 electrode body E2 - 2 may be grounded.

A gas inlet H1 is formed on one side of the first and second electrode body E1-2 to supply a target gas Gas1 to the first discharge space A, and the first discharge space A A gas outlet (H2) may be formed on the other side so that the generated gas (Gas2) generated by moving along the can be discharged.

The target gas Gas1 may include at least one of oxygen, nitrogen, air, and combinations thereof, and the product gas Gas2 may include an ozone gas component. The types of the target gas and the generated gas are not necessarily limited thereto, and any type of gas capable of forming radicals may be applied.

According to the present invention, the transformer coupling using the above-described magnetic core 10 together with the dielectric barrier discharge source method using the above-described electrode bodies (E1-1) (E1-2) (E2-1) (E2-2) Since high-density plasma can be generated by a hybrid method using a plasma method, high-density ozone radicals can be generated not only under vacuum pressure but also under atmospheric pressure, thereby greatly reducing the size and manufacturing cost of the device. can greatly increase productivity.

A dielectric barrier discharge source using electrode bodies causes plasma initial ignition, and a transformer coupled plasma method using a magnetic core can help to form a higher density of plasma formed in the discharge space.

Specifically, a predetermined power is applied to each of the 1-1 electrode body E1-1 and the 2-1 electrode body E2-1, and the 1-2 electrode body E1-2 and the 2-th electrode body E2-1 are respectively applied. Each of the two electrode bodies E2 - 2 is grounded, and a dielectric layer is interposed between the two electrode bodies.

Then, plasma is generated in the first discharge space (A) and the second discharge space (B) by the dielectric barrier discharge method.

In this case, power is applied to each of the 1-1 electrode body E1-1 and the 2-1 electrode body E2-1 by the discharge power supply G1 or the primary side core winding of the magnetic core 10 . Power may be applied by the secondary-side inductive winding 30 guided by (11).

In other words, each of the 1-1 electrode body E1-1 and the 2-1 electrode body E2-1 is powered by at least one of the discharge power supply G1 and the power supply by the inductive winding 30 . can be authorized

In particular, when power is applied by the inductive winding 30 , the magnitude of the voltage applied to the end of the inductive winding 30 may be adjusted by adjusting the number of turns of the core winding 11 and the inductive winding 30 . For example, if the number of turns of the core winding 11 is 20T and the number of turns of the inductive winding 30 is 200T, the voltage applied to the inductive winding 30 is 10 times greater than the voltage applied to the core winding 11 . this is authorized

Meanwhile, in the magnetic core 10 , when a current flows in the primary-side core winding 11 as the core power supply G2 is applied, a magnetic flux H is generated by the current. Then, an electric field E2 is formed in the secondary-side first discharge space A and the second discharge space B by the magnetic flux H.

Then, plasma is generated in the first discharge space (A) and the second discharge space (B) by the transformer coupled plasma method using the magnetic core (10).

On the other hand, when power is applied by the inductive winding 30, it can be used in addition to the discharge power source G1 as follows.

As shown in FIG. 1 , in the plasma generating apparatus 100 according to some embodiments of the present invention, a 1-1 electrode body E1-1 and a 2-1 electrode body E2-1 are electrically connected to each other. The connection line 20 connecting to and at least one (two in FIG. 1 ) switches 40 installed on the connection line 20 .

When the state of the switch 40 is in the OFF state by the user's selection or the control unit or program, only the core winding 11 wound around the magnetic core 10 can be operated, and if the switch 40 When the state is ON, the inductive winding 30 connected to the connection line 20 may be additionally operated together with the core winding 11 to additionally generate an additional induced electromotive force in the magnetic core 10 .

According to the present invention, high-density plasma can be generated with this additional induced electromotive force, so that high-density ozone radicals can be generated under atmospheric pressure as well as vacuum pressure, thereby greatly reducing the size and manufacturing cost of the device. and can greatly increase the productivity of ozone gas.

FIG. 2 is an external perspective view showing the plasma generating device 100 of FIG. 1 , FIG. 3 is a cross-sectional view showing a III-III cross section of the plasma generating device 100 of FIG. 2 , and FIG. 4 is the plasma generating device of FIG. 3 ( 100) is an enlarged cross-sectional view showing an enlarged part IV, FIG. 5 is an enlarged cross-sectional view showing an enlarged portion V of the plasma generating apparatus 100 of FIG. 3, and FIG. 6 is an enlarged cross-sectional view showing the plasma generating apparatus 100 of FIG. It is an exploded perspective view of parts.

2 to 6 , the atmospheric pressure plasma generating apparatus 100 according to some embodiments of the present invention includes a 1-1 electrode body E1-1 and a 2-1 electrode body E2- 1) are spaced apart from each other, each formed in a circular pipe shape, and formed in a shape surrounding the 1-1 electrode body (E1-1) and the 2-1th electrode body (E2-1). (80) may be further included. The 1-2-th electrode body E1-2 and the 2-1-th electrode body E2-1 may be implemented by the housing 80 instead of being implemented as a separate configuration.

The magnetic core 10 is provided in a toroidal shape through the interior of the 1-1 and 2-1 electrode bodies E1-1 and E2-1.

Each of the 1-1 electrode body E1-1 and the 2-1 electrode body E2-1 includes a first discharge space A and a second discharge space B between the inner surface of the housing 80 . to form Here, a dielectric tube 51 (or a dielectric layer) is interposed in the first discharge space A and the second discharge space B for dielectric barrier discharge.

The housing 80 has a branch line connected to the gas supply pipe P1 on the upper surface to distribute the target gas to the first discharge space (A) and the second discharge space (B), and the gas discharge pipe (P2) on the lower surface A lamination line connected to the may be formed to collect the generated gas.

3 to 5, the 1-1 electrode body E1-1 and the 1-2 electrode body E1-2 have cutouts in at least a portion to prevent eddy current loss as described above. 60 is formed, and the insulating member 61 may be inserted into the cutout 60 .

2 to 6 , the 1-1 electrode body E1-1 and the 2-1 electrode body E2-1 are cooled inside because heat may be generated due to power applied from the outside. A line 70 may be formed, and the refrigerant supply pipe is connected to the cooling line so that the refrigerant circulates in the upper side of the 1-1 electrode body E1-1 and the 2-1 electrode body E2-1. (P3) is formed, and a refrigerant discharge pipe P4 may be formed below the side surfaces of the 1-1th electrode body E1-1 and the 2-1th electrode body E2-1.

Referring to FIG. 4 , the cooling line 70 has an upper space and a lower space due to the cutout 60 formed in the 1-1 electrode body E1-1 and the 2-1 electrode body E2-1. may be formed symmetrically, but may communicate with each other for refrigerant circulation in the upper space and the lower space. At this time, the cooling line 70 is closed by assembling the cooling line cover 71 of FIG.

According to the present invention, it is possible to rapidly cool the electrode bodies heated to a high temperature from the inside using the refrigerant supply pipe (P3) and the refrigerant discharge pipe (P4), thereby reducing the thermal stress of the device and improving the thermal durability.

Referring to FIG. 2 , each of a 1-1 electrode body E1-1 and a 2-1 electrode body E2-1 is assembled using an electrode body assembly member 81 inside the housing 80 . . That is, the center of each of the 1-1 electrode body E1-1 and the 2-1 electrode body E2-1 is aligned with the inner center of the housing 80 by using the electrode body assembly member 81 . The first discharge space (A) and the second discharge space (B) may be assembled while maintaining a uniform interval.

As shown in FIG. 6 , a dielectric layer 50 may be formed between the 1-1th electrode body E1-1 and the magnetic core 10 . The dielectric layer 50 may prevent conduction or arcing between the 1-1 electrode body E1-1 and the magnetic core 10 .

The dielectric layer 50 may be formed by winding an insulating member (eg, Teflon, etc.) on the magnetic core 10 .

Furthermore, the dielectric layer 50 is in close contact with the 1-1 electrode layer E1-1 and the 2-1 electrode layer E2-1. Through this, the center of the magnetic core 10 is aligned with the inner center of the housing 80 by forming the dielectric layer 50 .

As such, the center of each of the 1-1 electrode body E1-1 and the 2-1 electrode body E2-1 is coincident with the inner center of the housing 80 , and the center of the magnetic core 10 is also the housing (80) coincides with the inner centroid.

7 is a cross-sectional view illustrating the magnetic core 10 of the plasma generating apparatus 100 of FIG. 1 .

As shown in FIGS. 6 and 7 , in consideration of productivity and assembling properties of parts, the magnetic core 10 includes a first shaft portion 10- installed on the inner diameter surface of the 1-1 electrode body E1-1. 1), the second shaft portion 10-2 provided on the inner diameter surface of the first and second electrode body E1-2, and one end and the second shaft portion 10-2 of the first shaft portion 10-1 ), a first connection bracket 10-3 for connecting one end, and a second connection bracket 10- for connecting the other end of the first shaft portion 10-1 and the other end of the second shaft portion 10-2 4) and a first fixing bar (F1) fixed through one side of the first connection bracket (10-3) and one side of the first shaft part (10-1) and the second connection bracket (10-4) and a second fixing bar (F2) fixed through the other side of the first connection bracket (10-3) and the other side of the second shaft part (10-2) and the second connection bracket (10-4). have.

After inserting the first shaft portion 10-1 and the second shaft portion 10-2 into the above-described housing 80, the first fixing rod F1 is attached to one side of the first connection bracket 10-3. And, the first shaft portion (10-1) and the second connection bracket (10-4) through one side and fixed, and the second fixing rod (F2) and the other side of the first connection bracket (10-3), When the second shaft portion 10-2 and the other side of the second connection bracket 10-4 are penetrated and fixed, the magnetic core 10 having a toroidal shape can be formed as a whole.

8 is a conceptual diagram illustrating a plasma generating apparatus 200 according to some other embodiments of the present invention.

As shown in FIG. 8 , the magnetic core 10 of the plasma generating apparatus 200 according to some other embodiments of the present invention may consist of two, and a 1-1 electrode body E1-1. It may include a first magnetic core 101 penetrating one side of the inner diameter portion of the 1-1 and a second magnetic core 102 penetrating the other inner diameter portion of the 1-1 electrode body E1-1. In FIG. 8 , the number of magnetic cores 10 is illustrated as two, but three or more are also possible.

In FIG. 8, the core power supply G2 for applying power to the core winding wound around the second magnetic core 102 is also shown as one, but this core winding and the core power supply are also applied to the first magnetic core 101, A plurality may be installed.

As described above, by increasing the number of magnetic cores 10 to two or more, the production efficiency of the product gas Gas2 may be further increased.

9 is a conceptual diagram illustrating a plasma generating apparatus 300 according to some other embodiments of the present invention.

As shown in FIG. 9 , the plasma generating device 300 according to some other embodiments of the present invention has at least one annular shape in which the core winding 11 connected to the core power supply G2 is wound at least in part. The left magnetic core (10-L), the at least one annular right magnetic core (10-R), the left magnetic core (10-L) and the right magnetic core (10-R) passing through the inside of the annular as a whole A toroidal external electrode body E10 in which a reaction space is formed, a gas inlet H1 through which the target gas Gas1 is supplied and a gas outlet H2 through which the product gas Gas2 is discharged on the other side are formed ) and the left inner electrode body E21 and the right magnetic It may include a right internal electrode body E22 installed to be spaced apart from the inside of the external electrode body E10 to correspond to the core 10-R, and electrically connected to the discharge power source G1.

The left internal electrode body E21 and the right internal electrode body E22 may each be formed in a pipe shape, and the target gas Gas1 includes at least one or more components of oxygen, nitrogen, air, and combinations thereof. , the generated gas Gas2 may include a component of ozone gas.

According to the present invention, the above-described left magnetic core 10-L and the right-side magnetic core 10-L together with the capacitively coupled plasma source method using the above-described external electrode body E10, left internal electrode body E21, and right internal electrode body E22 High-density plasma can be generated in a hybrid method using a transformer-coupled plasma source method using a magnetic core (10-R), so that high-density ozone radicals can be generated under atmospheric pressure as well as vacuum pressure. The size and manufacturing cost can be greatly reduced, and the productivity of ozone can be greatly increased.

Although the present invention has been described with reference to the embodiment shown in the drawings, which is only exemplary, those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

10: magnetic core
11: core winding
10-1: first shaft part
10-2: second shaft part
10-3: first connection bracket
10-4: second connection bracket
F1: first fixing bar
F2: second fixing bar
101: first magnetic core
102: second magnetic core
10-L: left magnetic core
10-R: right magnetic core
G1: Discharge power
G2: Core Power
E1-1: 1-1 electrode body
E1-2: 1-2 electrode body
E2-1: 2-1 electrode body
E2-2: 2-2 electrode body
E10: external electrode body
E21: Left inner electrode body
E22: Right inner electrode body
S1: first interval
S2: second interval
A: first discharge space
B: second discharge space
20: connection line
30: inductive winding
40: switch
50: dielectric layer
60: cutout
61: insulation member
70: cooling line
Gas1: target gas
Gas2: product gas
H: magnetic flux
H1: gas inlet
H2: gas outlet
80: housing
81: electrode body assembly member
P1: gas supply pipe
P2: gas exhaust pipe
P3: Refrigerant supply pipe
P4: Refrigerant discharge pipe
100, 200, 300: plasma generating device

Claims (19)

at least one annular magnetic core around which a primary-side core winding connected to a core power source is wound;
a 1-1 electrode body formed in a shape surrounding one side of the magnetic core; and
and a first 1-2 electrode body spaced apart from the 1-1 electrode body by a first interval and formed in a shape surrounding the 1-1 electrode body to form a first discharge space;
A voltage difference is generated between the 1-1 electrode body and the 1-2 electrode body. The method of claim 1,
At least one of a discharge power source and a power source induced to a secondary-side inductive winding wound around the magnetic core is applied to the 1-1 electrode body or the 1-2 electrode body. The method of claim 1,
The atmospheric pressure plasma generating apparatus further comprising a dielectric layer interposed between the 1-1 electrode body and the 1-2 electrode body. The method of claim 1,
a 2-1 electrode body formed in a shape surrounding the other side of the magnetic core; and
a 2-2 electrode body spaced apart from the 2-1 electrode body at a second interval and formed in a shape surrounding the 2-1 electrode body to form a second discharge space;
Further comprising a, plasma generating device. 5. The method of claim 4,
The 1-2 electrode body and the 2-2 electrode body are grounded,
The 1-1th electrode body and the 2-1th electrode body are electrically connected to the discharge power source, respectively. The method of claim 1,
and a dielectric layer is formed between the 1-1 electrode body and the magnetic core. The method of claim 1,
The plasma generating apparatus of claim 1, wherein a cutout is formed in at least a portion of the 1-1 electrode body and the 1-2 electrode body in a longitudinal direction of the magnetic core. 8. The method of claim 7,
An insulating member is inserted into the cutout, a plasma generating device. The method of claim 1,
In the 1-1 electrode body, a cooling line is formed therein. The method of claim 1,
In the first and second electrode bodies, a gas inlet is formed on one side to supply a target gas to the first discharge space, and a gas is formed on the other side so that the generated gas is discharged by moving along the first discharge space. An outlet is formed, a plasma generating device. 11. The method of claim 10,
The target gas includes at least one or more components of oxygen, nitrogen, air, and combinations thereof,
The generated gas includes an ozone gas component. The method of claim 1,
and the first 1-2 electrode body is disposed on a coaxial line with the 1-1 electrode body. The method of claim 1,
The first discharge space is formed in a circular pipe shape as a whole, the plasma generating device. The method of claim 1,
the magnetic core; and
Further comprising; a housing for accommodating the 1-1 electrode body;
and the 2-2 electrode body is provided by the housing. The method of claim 1,
The magnetic core is
a first shaft portion or a second shaft portion on which an inner diameter surface of the 1-1 electrode body can be installed;
a first connection bracket connecting one end of the first shaft and one end of the second shaft; and
a second connection bracket connecting the other end of the first shaft and the other end of the second shaft;
Containing, plasma generating device. 15. The method of claim 14,
The magnetic core is
a first fixing bar fixed through one side of the first connection bracket, and one side of the first shaft portion and the second connection bracket; and
a second fixing bar fixed through the other side of the first connection bracket, the second shaft part, and the other side of the second connection bracket;
Further comprising a, plasma generating device. at least one annular left magnetic core around which a core winding connected to a core power source is wound;
at least one annular right magnetic core;
A toroidal shape in which a gas inlet through which a target gas is supplied on one side and a gas outlet through which a product gas is discharged on the other side is formed in an annular reaction space as a whole is formed inside the left magnetic core and the right magnetic core external electrode body;
a left internal electrode body spaced apart from the external electrode body to correspond to the left magnetic core and electrically connected to a discharge power supply; and
a right inner electrode body spaced apart from the outer electrode body to correspond to the right magnetic core and electrically connected to the discharge power;
Including, a plasma generating device. 18. The method of claim 17,
The left internal electrode body and the right internal electrode body are each pipe-shaped. 18. The method of claim 17,
The target gas includes at least one or more components of oxygen, nitrogen, air, and combinations thereof,
The generated gas includes an ozone gas component.

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