KR20220128315A - Reticle storage pod and method for securing reticle - Google Patents

Abstract

Disclosed in the present invention is a reticle storage pod having an outer pod that includes an outer cover and an outer base. The outer cover and the outer base may be coupled to safely store one between a first inner pod and a second inner pod which are configured differently in the outer pod. The first inner pod and the second inner pod are for individually storing reticles. The outer cover is provided with at least one first hold-down device and at least one second hold-down device, and the first hold-down device and the second hold-down device act on covers of the first inner pod and the second inner pod, each having a different structure.

Description

RETICLE STORAGE POD AND METHOD FOR SECURING RETICLE

The present invention relates to a reticle storage pod and a method of securing a reticle, and more particularly, to a reticle storage pod comprising an outer pod and an inner pod, and a method of securing a reticle implemented by the outer pod and the inner pod. The reticle storage pod applies to reticle storage systems and methods.

In the current extreme ultraviolet (EUV) lithography process, the reticle must be protected by a conventional two-layer reticle transport pod (EUV pod) consisting of an EUV inner pod (EIP) and an EUV outer pod (EOP). To store the reticle, place the reticle in the inner pod, store the inner pod in the outer pod, place the entire old reticle transfer pod in a nitrogen cabinet, then fill with nitrogen to store the reticle.

Moreover, the design of this conventional reticle transport pod can prevent particle contamination and reticle damage caused by vibration and deflection during long-distance transport of the inner pod containing the reticle. In addition, conventional reticle transport pods can be configured to suitably load different processing equipment to undergo various types of testing and inspection. As a result, the structure of the inner pod is complex and therefore expensive compared to the outer pod. The inner pods of a reticle carrying pod with the above design objectives may not be fully utilized, even with maximum benefit if these inner pods are stored in a nitrogen cabinet for a long period of time.

1 and 2, the conventional reticle transport pod 10 includes an inner pod 11 and an outer pod 12 in a dual pod structure. The reticle R is stored in the inner pod 11 , and the inner pod 11 is accommodated in the outer pod 12 . The inner pod 11 includes a base 20 and a cover 30 , which cooperate with each other for sealingly receiving the reticle R. The outer pod 12 includes an outer base 40 and an outer cover 50 . The outer base 40 includes a support means for the inner pod 11 , and the outer cover 50 and the outer base 40 are combined to form an accommodation space of the inner pod 11 . A suitable hold-down means is usually provided inside the outer cover 50 so that the inner pod 11 can be supported downward when the outer cover 50 and the outer base 40 are coupled. can, thereby forming a safe accommodation facility. The outer base 40 generally further comprises latching means for securing the outer cover 50 in the outer base 40 . Since the transport of the reticle transport pod 10 is performed by the crane system in the factory, a handle 52 for gripping the crane arm may be provided at the upper end of the outer cover 50 . Accordingly, the height of the handle 52 of the conventional reticle transport pod 10 may be disadvantageous for storage in a stacked manner, and the height of the handle 52 also occupies additional storage space.

Moreover, in the common design, there is a corresponding mutual coordination mechanism between the conventional inner pod and the conventional outer pod, so that the conventional outer pod is used in conformity with the inner pod of another mechanism design instead of being used in conformity with the corresponding inner pod. It can only be used in collaboration with This means that only certain compatible external and internal pods can have the effect of tightly accommodating the reticle, and the use of incompatible external and internal pods does not provide the expected stability. The current external pod design of the reticle storage pod cannot meet the requirements given production cost and storage efficiency.

Accordingly, there is a need in the industry for dedicated reticle storage pods and related methods suitable for long-term storage, and reticle storage systems and methods for storing the dedicated reticle storage pods. Moreover, the technique of developing one single outer pod to be compatible with inner pods of at least two types of different mechanism designs of the present invention helps to reduce storage costs.

In commonly known reticle transport pods, the inner pod is provided with a retaining device that utilizes a force applied by the outer pod, i.e., a hold-down pin. This mechanism acts on the reticle of the inner pod only when the inner pod is housed in the outer pod. For example, the top of the hold-down fin is exposed outside the top portion of the inner pod. If the inner pod is transported without the use of an outer pod, the stability of the reticle in the inner pod may not be sufficient and vibration and shock may occur.

Also, if reticles are stored for an extended period in a dedicated reticle storage cabinet system, the reticles must be removed from the dual-tier reticle transfer pods and transferred to the dedicated pods. Therefore, prior to storage of reticles in a reticle storage cabinet system, a compatible associated reticle loading system and associated method should also be developed.

In addition, since reticles are suitable for high-precision processing of semiconductor manufacturing devices, strict environmental conditions and requirements must be fully met in order to store these reticles in a long-term storage cabinet at high production costs. Therefore, there is a need to develop a reticle storage cabinet pipeline expansion system and related methods for long-term storage of reticles, as well as a reticle storage cabinet management system and related methods suitable for scheduling of reticle storage cabinet systems.

An object of the present invention is to provide a reticle storage pod and a method for fixing the reticle, improving the above disadvantages.

In order to store more reticles in the same space, the present invention provides a storage means for improving the storage efficiency of the reticle. More specifically, the present invention provides a dedicated reticle storage pod different from the conventional reticle transport pod. As used herein, for the sake of distinction, the term "reticle transport pod" refers to a conventional reticle pod, and the term "reticle storage pod" refers to a dedicated reticle pod provided by the present invention in response to an improved efficiency storage means. it means.

If the reticle storage pod is only transported in the storage racks of the reticle loading system and the reticle storage cabinet system, the design of the reticle storage pod for this purpose requires no complicated structure or processing, except that protective mechanisms are required to prevent ingress of foreign particles. This is not necessary at all, which helps to reduce costs.

SUMMARY OF THE INVENTION It is an object of the present invention to include: a base having a plurality of support members each configured to support a corner of a reticle and extending upwardly to form a pair of limiting blocks each positioned on two sides of the corner; and a cover having a plurality of resilient hold-down devices respectively corresponding to the plurality of support members, wherein each resilient hold-down device comprises at least one elastic hold-down device acting on a corner of the reticle supported by the support member. and an arm, wherein the pair of limiting blocks limit horizontal movement of the resilient arm when the cover covers the base for receiving the reticle.

In a specific embodiment, the support member has a pair of inclined surfaces, each of which engages both lower edges of the corner.

In a specific embodiment, the resilient hold-down device includes a body and a pair of resilient arms extending in different directions from the body, each resilient arm having a limiting portion and an inclined surface extending from the limiting portion, wherein The two inclined surfaces of the pair of resilient arms respectively engage the upper edges of the two sides of the corner.

In certain embodiments, a pair of limiting blocks limits the two limiting portions of a pair of resilient arms.

In a particular embodiment, the two inclined surfaces of the pair of resilient arms extend away from the restriction and engage with each other.

It is another object of the present invention to include: an inner pod comprising a cover, a base and a securing device, the cover and the base interlocking with each other to form a storage space, the securing device configured to secure a reticle to the storage space; and an outer pod comprising an outer cover and an outer base, the outer pod receiving the inner pod while the outer cover and the outer base are engaged with each other, the outer cover having a flat top surface and a peripheral sidewall extending downwardly from the flat top surface and at least one pair of handles is provided on the peripheral sidewall, wherein the pair of handles do not exceed the height of the flat top surface.

In certain embodiments, the upper surface of the outer base is provided with a plurality of coupling pins for supporting the base of the inner pod.

In certain embodiments, the outer cover is provided with at least one hold-down device acting on the cover to secure the inner pod.

In a particular embodiment, the hold-down device is a hold-down column acting on the cover of the inner pod.

In a specific embodiment, the fixing device comprises at least one support member provided on the base and at least one resilient hold-down device provided corresponding to the support member on the cover. The outer cover and the outer base engage to receive the inner pod, and the hold-down column applies pressure to the resilient hold-down device to secure the reticle.

In a particular embodiment, the hold-down device is a hold-down rib, which presses against the top surface of the cover of the inner pod when the outer cover and the outer base are coupled to receive the inner pod.

In certain embodiments, a recess is formed in the upper surface of the cover at a position corresponding to the hold-down rib such that the hold-down rib presses the corresponding recess when the outer cover and the outer base are coupled to receive the inner pod. do.

In certain embodiments, the hold-down ribs press against corresponding recesses to securely position and engage the base and cover.

In a specific embodiment, the securing device comprises at least one support member provided on the base and at least one reticle retainer provided corresponding to the support member on the cover, the reticle retainer comprising at least one resilient arm, wherein the reticle retainer comprises at least one resilient arm; When the cover and the base are coupled to receive the reticle, the support member supports the corner of the reticle, and the elastic arm of the reticle retainer engages the corner to secure the reticle.

Another object of the present invention is to include an inner pod configured to be received in an outer pod, wherein a plurality of securing devices are provided on an inner surface of the outer pod, the inner pod comprising a cover, a base and a plurality of securing devices, The cover and the base are coupled to define a storage space, and the securing device is to provide a reticle storage pod configured to secure a reticle to be received in the storage space. A plurality of recesses are formed in the upper surface of the cover at positions respectively corresponding to the plurality of hold-down devices, and when the inner pod is accommodated in the outer pod, the recesses of the cover are connected to the hold-down device. Engage each to obtain a holding force for securing and positioning the inner pod, further improving the securing of the reticle by the securing device.

In a particular embodiment, the recess has a lower surface and a peripheral side surrounding the lower surface, the peripheral side having an outline, and a cover exposing the securing device on the lower surface below the recess.

In a specific embodiment, the hold-down device is a hold-down rib having an outline corresponding to the recess, and when the inner pod is received in the outer pod, the hold-down rib presses the lower surface of the recess accordingly .

Another object of the present invention is to include an outer cover and an outer base, wherein the outer cover and the outer base are engaged with each other to safely accommodate one of a structurally different first inner pod and a second inner pod, the first inner pod and The second inner pod is to provide a reticle storage pod each comprising an outer pod configured to store a reticle. The outer cover is provided with at least one first hold-down device and a second hold-down device, wherein the first hold-down device and the second hold-down device are connected to the cover of the first inner pod and the second hold-down device. each configured to act on a cover of the inner pod.

In a specific embodiment, the first hold-down device and the second hold-down device extend from the lower surface of the outer cover at different heights, respectively, so that the first hold-down device and the second hold-down device are connected to the first interior respectively engage a corresponding structure of the cover of the pod and other corresponding structures of the cover of the second inner pod.

In a specific embodiment, the first hold-down device is a hold-down column, the second hold-down device is a hold-down rib having a horseshoe outline, wherein the hold-down column is a horseshoe outline inner surface of the hold-down rib is located in

In a specific embodiment, the cover of the first inner pod is provided with a resilient hold-down device at a position corresponding to the first hold-down device. The resilient hold-down device includes a hold-down pin, and when the first inner pod is received in the outer pod, the hold-down column presses the hold-down pin to secure the reticle received in the first inner pod .

In certain embodiments, the resilient hold-down device includes a cap that limits the hold-down pins, and the horseshoe outline of the hold-down ribs limits horizontal movement of the cap when the first inner pod is received in the outer pod.

In a particular embodiment, the cover of the second inner pod is provided with a recess in a position corresponding to the second hold-down device. The recess has a bottom surface and a peripheral side surrounding the lower surface, the peripheral side having a horseshoe outline corresponding to the hold-down rib. When the second inner pod is received in the outer pod, the hold-down rib presses against the lower surface of the recess, and the hold-down rib limits horizontal movement of the cover.

Another object of the present invention is to provide a method for securing a reticle. The method is a reticle securing method applied to a reticle storage pod to secure a reticle, the method comprising the steps of: providing, on a base of the reticle storage pod, a plurality of upwardly extending support members, each support member extending upward to form a pair of limiting blocks; ; providing, on the cover of the reticle storage pod, a plurality of resilient hold-down devices respectively corresponding to the plurality of support members and each having at least one resilient arm; and a base for receiving the reticle such that each support member supports a corner of the reticle and an elastic arm of each resilient hold-down device acts on a corresponding corner, and a pair of restriction blocks limit horizontal movement of the resilient arm. and coupling the cover.

In certain embodiments, a pair of constraint blocks are each positioned on either side of the corner.

In a particular embodiment, a resilient hold-down device includes a body and a pair of resilient arms, each resilient arm having a limiting portion and an inclined surface extending from the limiting portion.

In certain embodiments, when the cover and the base are coupled to receive the reticle, the method includes respectively coupling the two inclined surfaces of the pair of resilient arms to the upper edges on opposite sides of the corner.

In certain embodiments, the pair of resilient arms extend in different directions from the body.

In certain embodiments, the distal ends of the pair of resilient arms are coupled to each other.

Included in the content of the present invention.

Reference may be made to the following drawings and specification for a better understanding of the present invention. A non-limiting and non-exclusive embodiment will be described with reference to the drawings below. In addition, the components in the drawings are not necessarily drawn to scale, and are illustrated mainly for descriptions of structures and principles.
1 is an exploded side view of a conventional reticle storage pod;
2 is a three-dimensional exploded view of a conventional inner pod and reticle.
3 is a block diagram of a reticle storage system of the present invention.
4 is a three-dimensional view of the reticle storage system of the present invention.
5A is an exploded side view of a reticle storage pod of the present invention;
5B is a three-dimensional view of the outer cover of the dedicated outer pod of the present invention;
Figure 5c is a three-dimensional view of the outer base of the dedicated outer pod of the present invention;
5D is a three-dimensional exploded view of the dedicated inner pod of the present invention.
5E is a plan view of the cover of the dedicated inner pod of the present invention;
5F is a bottom view of the cover of the dedicated inner pod of the present invention;
5G is a cross-sectional view of the inner pod dedicated cover of the present invention taken along the dotted line of FIG. 5E.
5H is a plan view of the base of the dedicated inner pod of the present invention;
5I is a bottom view of the base of the dedicated inner pod of the present invention;
Fig. 5J is a cross-sectional view of the base of the dedicated inner pod of the present invention along the dashed line in Fig. 5H;
5K is a three-dimensional view of the base of the dedicated inner pod of the present invention;
5L is a three-dimensional view of a base corner of the present invention;
5M is a three-dimensional view of another corner of the base of the present invention;
5N is a view of a reticle retainer provided on the inside of the cover of the present invention.
6A is a view of a reticle retainer and a corresponding support member of a dedicated inner pod of the present invention that holds the corners of the reticle;
6B is a partial enlarged view of a support member of the present invention limiting horizontal movement of the reticle retainer.
7A is a three-dimensional view of a dedicated inner pod of the present invention;
Fig. 7B is a cross-sectional view of the dedicated inner pod of the present invention taken along the dashed line in Fig. 7A;
8A is a bottom view of the outer cover of the dedicated outer pod of the present invention;
8B is an enlarged view of the hold-down device acting on the cover of the dedicated inner pod;
9A is a cross-sectional view of the reticle storage pod of FIG. 5A coupled;
9B is a partially enlarged view of a region indicated by a dotted line in FIG. 9A .
10A is a three-dimensional view of a conventional reticle transport inner pod.
10B is a diagram of a hold-down device acting on the corresponding device of the cover of the conventional reticle transport inner pod;
10C is an enlarged view of the hold-down device and corresponding device of the inner pod of the reticle transport pod;
11A is a cross-sectional view of a dedicated outer pod receiving a dedicated inner pod of a reticle storage pod of the present invention;
11B is a cross-sectional view of a dedicated outer pod receiving a non-dedicated inner pod of a reticle storage pod of the present invention;
12 shows an overlapping diagram of the cover of the inner pod of the reticle transport pod of the present invention and the cover of the dedicated inner pod;
13 is a three-dimensional external view of the reticle loading system of the present invention.
14 is a schematic diagram of a reticle loading system of the present invention;
15 is a loading flow chart of the reticle storage method of the present invention.
16 is an unloading flow chart of the reticle storage method of the present invention.
17 is a specific flowchart of reticle transport of the present invention.
18 is a diagram of a reticle loading system in accordance with certain embodiments of the present invention.
19A is a diagram of a reticle clamping device used in a reticle loading system in accordance with certain embodiments of the present invention.
19B is a front view of the reticle clamping device;
19C is a plan view of the reticle clamping device;
20 is an adjustment view of the reticle clamping device and the lift;
21 is an example of an anomaly handling procedure of a reticle loading system.
22 is an example of another anomaly handling procedure of a reticle loading system.
23 is an example of an abnormality processing procedure of the reticle clamping device.
24 is a schematic block diagram of a reticle loading system and reticle storage system of the present invention.
25 is a plan view of the reticle storage system of the present invention, showing a specific configuration inside the reticle storage system.
26A is a three-dimensional view of a storage rack according to a particular embodiment of the present invention.
26B is a view showing the configuration of the bottom portion of the storage rack.
27A is a view of a storage rack with reticle storage pods.
Fig. 27B is a view from the bottom when there is a reticle storage pod in the storage rack.
27C is a view from another angle with the reticle storage pod in the storage rack.
28A is a plan view of a storage rack and mechanical arm in accordance with certain embodiments, wherein the mechanical arm is positioned below the reticle storage pod and the positioning slot is indicated by dashed lines at the bottom of the reticle storage pod of the storage rack.
28B is a side view of the mechanical arm that goes under the storage rack to pick up the reticle storage pod.
28C is a side view of the mechanical arm separating the reticle storage pod from the storage rack.
29 is a view of an air supply pipeline upstream of a storage rack and its mass flow control means;
30 is a diagram of a connection to an upstream air supply pipeline of a storage rack according to two specific embodiments;
31 is an example of an abnormality processing sequence of the mechanical arm of the reticle storage cabinet system.
32 is a schematic diagram of a reticle loading apparatus and a reticle storage system according to another embodiment of the present invention.
33 is a flowchart of loading of a reticle according to the embodiment of FIG. 32 ;
34 is a flowchart illustrating unloading of a reticle according to the embodiment of FIG. 32 .
FIG. 35 is a detailed flowchart of the transfer of a reticle according to the embodiment of FIG. 32 .
36 is a flow chart of the transfer of the inner pod.
37 is a schematic diagram of a reticle loading apparatus and a reticle storage system according to another embodiment of the present invention;
38A is a diagram of a storage chamber according to a particular embodiment of the present invention.
Fig. 38B is a diagram showing the configuration of an upwardly facing carrier surface inside the storage chamber.
38C is a view of a single pod in a storage chamber.
38D is a diagram of a carrier surface mechanism of a storage chamber supporting the bottom of a single pod.
FIG. 39A is a flowchart of reticle loading according to the embodiment of FIG. 37 ;
39B is a flowchart of reticle unloading according to the embodiment of FIG. 37 ;
FIG. 40 is a detailed flowchart of the transfer of a reticle according to the embodiment of FIG. 37 .
41A is an example of a storage chamber and mechanical arm of a cabinet system for placing a pod in a storage chamber according to an interactive embodiment.
41B is an example of a storage chamber and a mechanical arm of a cabinet system for removing pods from a storage chamber according to an interactive embodiment.
42A is an example of a storage chamber and mechanical arm of a cabinet system for placing a pod in the storage chamber according to another interactive embodiment.
42B is an example of a storage chamber and a mechanical arm of a cabinet system for removing a pod from a storage chamber according to another interactive embodiment.
43 is a schematic diagram of a reticle storage cabinet pipeline expansion system in accordance with an embodiment of the present invention.
44 is a schematic diagram of a reticle loading apparatus and reticle storage system according to another embodiment of the present invention.
45A is a flowchart of loading of a reticle according to the embodiment of FIG. 44 ;
45B is a flowchart of unloading of a reticle according to the embodiment of FIG. 44 ;
46A is another flowchart of reticle loading according to the embodiment of FIG. 44 ;
46B is another flowchart of unloading of a reticle according to the embodiment of FIG. 44 ;

In order to better illustrate the present invention, specific examples and specific embodiments are provided below in conjunction with the accompanying drawings. However, the subject matter of the present application may be specifically embodied in a variety of different forms, and the configuration covered or claimed by the subject matter of the application is not limited to any illustrative specific embodiments disclosed in the detailed description of the application; It should be understood that the specific examples are non-limiting and should not be construed as limiting. Likewise, the present invention is to provide a reasonably broad scope for the subject matter covered or covered by the subject matter.

The expression "in one embodiment" as used in the literature of this application does not necessarily refer to the same specific embodiment, and the expression "in another (some/specific) embodiment" used in the literature of this application does not necessarily refer to another (some/specific) embodiment. It does not refer to a specific embodiment. Its purpose is to include, for example, combinations of all or parts of specific embodiments that are illustrative of the subject matter described.

In the following embodiments, the term "dedicated" relates to a technical means provided in response to the storage problem to be solved by the present invention, for example, a dedicated pod, a dedicated external pod or a dedicated internal pod. Also, the term "non-dedicated" refers to the relevant technical means in response to non-storage purposes, which may be existing or other new reticle internal or external pods. In this document, a non-dedicated pod may be understood as a conventional reticle pod, such as a conventional dual pod shown in FIG. 1, but that does not mean that only a non-dedicated pod can be a conventional reticle pod. More specifically, a non-dedicated pod in the literature should be understood as a reticle pod that is dedicated and not used for storage purposes, for example a reticle pod suitable for general transport purposes in a factory.

3 shows a block diagram of a reticle storage system of the present invention. The present invention provides a reticle storage means for storing a reticle inside a reticle transfer pod (10). The reticle storage system includes a reticle loading system 200 and a reticle storage cabinet system 600 . The reticle loading system 200 transfers reticles between a reticle transfer pod 10 and a dedicated reticle storage pod 100, or transfers an inner pod containing a reticle to a reticle transfer pod 10 or a dedicated reticle storage pod 100. to place it. It should be understood that the reticle transport pod 10 described herein may be a conventional reticle transport pod or a reticle transport pod that is operated with a crane system in a factory. The reticle storage pod 100 provided by the present invention is a storage means different from the existing reticle pod, and is used exclusively for the reticle storage cabinet system 600 of the present invention.

The reticle loading system 200 includes a first port 202 coupled to a factory environment and a second port 204 coupled to a reticle storage cabinet system 600 . A first port 202 allows the reticle transport pod 10 to be moved between a factory environment and a loading environment provided by the reticle loading system 200, and a second port 204 allows the reticle storage pod 100 to transport the reticle. to be moved between the loading environment and the storage environment of the storage cabinet system 600 . The first port 202 and the second port 204 may comprise valve means for individually isolating the factory environment, the loading environment and the storage environment. The first port 202 may be further configured to coordinate with the crane system.

The reticle storage cabinet system 600 includes one or more reticle cabinet racks (not shown) capable of storing a plurality of reticle storage pods 100 , and a reticle storage cabinet control system 300 responsible for storing and retrieving the reticle storage pods 100 . ), a reticle storage cabinet pipeline expansion system 400 responsible for the gas environment of each reticle cabinet rack, and a reticle storage cabinet management system 500 responsible for all processes, related details will be described later.

4 shows an example of a specific external configuration of the reticle storage cabinet system 600 of the present invention, wherein the reticle loading system 200 is close to one side of the reticle storage cabinet system 600, but the present invention is in the above example not limited The first port 202 of the reticle loading system 200 points essentially upwards to facilitate coordination with a crane system for vertically loading or unloading the reticle transport pod 10 . A second port (not shown) is located on the side of the reticle loading system 200 to face the reticle storage cabinet system 600 to horizontally load or unload the reticle storage pod 100 .

The reticle loading system 200 provides, for example, radio frequency identification (RFID) or identification with respect to the reticle transfer pod 10 and reticle storage pod 100 for identifying two-dimensional barcodes on the inner pod and/or outer pod. means, and such information may be associated with an identification number of the pod or reticle. The identification means may further include detecting whether a pellicle is damaged in the pod through a window of the pod and reading the two-dimensional barcode.

The first port 202 and the second port 204 each correspond to different lifting means of the reticle loading system 200 , respectively, after the reticle transport pod 10 and reticle storage pod 100 enter the loading environment. means to be held respectively by the lift means. The loading environment further includes clamping means for the reticle for transferring the reticle between the reticle transfer pod 10 and the reticle storage pod 100 . Details relating to the lifting means and clamping means are described in the paragraphs below.

If the reticle loading system 200 is unavailable (eg, under maintenance), the reticle storage cabinet system 600 may send the reticle storage pod 100 along with the required reticle to the second port 204 . Yes. The reticle storage cabinet system 600 provides a manually operated door so that an operator can take out the reticle storage pod 100 using the manual door, so that the reticle can be safely removed under the protection of the reticle storage pod 100 . A fan filter unit (FFU) that draws in air from the outside for use of the reticle storage cabinet system 600 may be configured above the reticle storage cabinet system 600 . In addition, the corresponding exhaust device is also required.

5A is an exploded side view of a reticle storage pod of the present invention, wherein the reticle storage pod of the present invention includes a dedicated inner pod and a dedicated outer pod; In a preferred embodiment of the present invention, the reticle storage pod 100 is a dual pod structure, and is used exclusively as a storage cabinet rack of the reticle storage cabinet system 600 of the present invention. Although the reticle storage pod 100 of the present invention is used exclusively, like the conventional reticle transport pod 10, it includes a sealing means for protecting the reticle. That is, the contact surface of the pod body has a good sealing and particle barrier design.

A reticle storage pod 100 dedicated to the reticle storage cabinet system 600 of the present invention includes a dedicated outer pod 102 and a dedicated inner pod 101 . The dedicated outer pod 102 houses the dedicated inner pod 101 , and the reticle R is enshrined in the dedicated inner pod 101 . The dedicated outer pod 102 is composed of an outer cover 150 and an outer base 160 (or referred to as a door), and the dedicated inner pod 101 is composed of a cover 110 and a base 130 .

Compared to the conventional reticle transport pod 10 of FIG. 1 , the outer cover 150 of the reticle storage pod 100 of FIG. 5A does not need to coordinate with the crane system, and thus the handle 52 of the conventional reticle transport pod 10 ) is removed. As a result, the overall height of the reticle storage pod 100 is lower than the overall height of the conventional reticle transport box 10 . In addition, compared to the conventional reticle transport pod 10 of FIG. 1 , the coupling pin 161 inside the outer base 160 of the present invention of FIG. 5A is also shorter, and the outer cover 150 and the outer base 160 of the present invention are also shorter. ) is shorter than the height of the outer cover 40 and the outer base 50 of the conventional reticle transport pod 10 of FIG. 1 . In order to minimize the overall height of the reticle storage pod 100 of the present invention, a pair of handles 151 provided on both sides of the outer cover 150 are not higher than the upper surface of the outer cover 150 . The shortened coupling pin 161 also allows the height of the space for receiving the dedicated inner pod 101 to be reduced. Accordingly, the overall height of the reticle storage pod 100 of the present invention is significantly lower than the height of the conventional reticle transfer pod 10, so that the reticle storage cabinet system 600 of the present invention provides a greater number of dedicated reticle storage pods 100. and to accommodate a reticle.

Figure 5b shows a three-dimensional diagram of the outer cover 150 of the dedicated outer pod of the present invention, the structural design for coordination with the crane system is eliminated. The outer cover 150 has a flat top surface 152 and a peripheral side extending downward from the flat top surface 152 . The handle 151 extends outwardly from the peripheral side and does not exceed the essentially flat top surface 152 or exceeds the flat top surface 152 by a very small height.

Figure 5c is a three-dimensional view of the outer base 160 of the dedicated outer pod of the present invention, the configuration of the bottom portion includes a plurality of air valves 162 and positioning slots (163). The air valve 162 may cooperate with a predetermined connection port to supply a predetermined gas to the dedicated external pod 102 or discharge a predetermined gas from the dedicated external pod 102 . The positioning slot 163 is for positioning the dedicated external pod 102 at a specific location on the device.

Figure 5d shows a three-dimensional exploded view of the dedicated inner pod 101 of the present invention, the dedicated inner pod 101 includes a cover 110, a base 130 and a fixing device. The cover 110 and the base 130 are engaged with each other to form a storage space, and the fixing device is configured to support and limit the reticle R so that the reticle R can be accommodated in the storage space. The upper portion of the cover 110 is basically a flat surface, is composed of a filter membrane cover 112, and has a plurality of recesses 114 formed in a predetermined shape and arrangement. In this embodiment, four recesses 114 having a predetermined shape and arrangement are exemplarily configured.

5E to 5J compared to the structure of the inner pod 11 of the reticle transport pod 10 of FIG. 1 , the fixing device and the reticle ( R) is in chamfered contact. As shown in FIGS. 5F and 5H , the securing device is an elastic hold-down device (ie, reticle retainer 120 ) disposed at the four inner corners of the cover 110 and disposed on the upper side of the base 130 . It includes four support members 134 . The number and position of the elastic hold-down device and the supporting member 134 are designed to match the position of the recess 114 in the upper portion of the cover 110 . Accordingly, the positions of the reticle retainer 120 and the support member 134 coincide with each other. When the cover 110 and the base 130 are engaged to receive the reticle R, the four support members 134 and corresponding reticle retainers 120 are held in contact with the four corners of the reticle R. A plurality of air channels are provided in the center of the cover 110 , and a filter membrane cover 112 is provided on the cover 110 to cover the air channels. More specifically, in such a way that the filter membrane cover 112 does not protrude from the upper surface of the cover 110 , as shown in FIG. 5G , the filter membrane cover 112 is recessed in the center of the upper surface of the cover 110 . mounted in position A pair of handles 111 , each extending outwardly from the side of the cover 110 , may interact with a predetermined device during the cover opening process of the reticle loading system 200 , the relevant details will be described in the paragraphs below. .

Also, the position of the recess 114 on the top of the cover 110 coincides with the position of the reticle retainer 120 . Accordingly, when the dedicated inner pod 101 is received in the dedicated outer pod 102 , the recess 114 of the cover 110 can be matched with a hold-down device disposed on the inside of the cover 150 . By providing downward pressure on the cover 110, it strengthens the engagement of the dedicated inner pod 101 and secures the reticle R, related details are described in the paragraphs below.

Compared to the inner pod 11 of the reticle transport pod 10 of FIG. 1 , the dedicated inner pod 101 of the reticle storage pod 100 of the present invention receives the reticle R more securely. When the outer cover 150 of the dedicated outer pod 102 applies an external force to the upper surface of the cover 110 of the dedicated inner pod 101, an elastic hold-down device disposed on the inner surface of the cover 110 (that is, The reticle retainer 120 is guided to press firmly against the four corners of the reticle R. More specifically, in order to hold the reticle during long-distance transportation, the outer cover 50 of the outer pod 12 of the reticle transfer pod 10 of FIG. 1 is an elastic hold disposed on the cover 30 of the inner pod 11 . - The elastic hold-down device acts on the upper surface of the reticle by directly applying an external force to the down device. That is, the outer cover 50 of FIG. 1 does not act on the cover 30 .

Compared to the base 20 of the inner pod 11 of the reticle transport pod 10 of Figure 1, The complex structure is removed, and the removed complex structure may include a reflective laser engraving on the bottom surface of the base 20, a part of the window frame, and the stepped structure, so that the cost of the base 130 of the present invention without a separate processing operation can be greatly reduced, and the configuration of the bottom surface of the base 130 except for the positioning slot 132 and the window W may be a flat surface. The base 130 includes a window W for sensing a two-dimensional code and a pellicle on a reticle R. The bottom surface and the side surface of the base 130 are continuously flat surfaces, and the blowing (blowing) and cleaning are easier due to the design without such a step.

In addition, the pellicle groove 131 on the base 130 has a greater depth compared to the depth of the pellicle groove in the base 20 of FIG. 1 , providing better airflow replacement efficiency inside the pod and relative humidity (RH%) It increases the drop rate of the reticle, making long-term storage of the reticle easier. A surrounding groove 133 is formed in the base 130 (as shown in FIG. 6 ), and the four support members 134 at positions corresponding to the four corners of the reticle R are formed in the surrounding groove 133 . ) is provided. When the cover 110 and the base 130 are airtightly coupled, the configuration of the surrounding groove 133 helps to capture particles flowing into the pod.

5K shows a three-dimensional diagram of the base 130 of the dedicated inner pod of the present invention, and FIGS. each is shown

5N is a view showing an individual reticle retainer 120 provided inside the cover 110 of the present invention. The elastic hold-down device of the cover 110 of the present invention may be implemented by the reticle retainer 120 shown in FIG. 5N. The reticle retainer 120 includes a body 121 and a pair of elastic arms 122 extending in different directions from both sides of the body 121 . One end of the elastic arm 122 is connected to the body 121 , and the other end is connected to the limiting part 123 . One end of the limiting part 123 is connected to the elastic arm 122 , and the other end is connected to the inclined surface 124 . The two inclined surfaces 124 extend obliquely upward from the limiting part 123 , and ends of the two inclined surfaces 124 far from the limiting part 123 are connected. Specifically, the ends of the two inclined surfaces 124 are commonly connected to the pressing part 125 . However, the present invention is not limited to the above examples; For example, the pressing part 125 may be omitted.

The body 121 of the reticle retainer 120 is provided with a screw hole, so that the reticle retainer 120 can be fixed to the inside of the cover 110 by known locking means. The two inclined surfaces 124 connecting the pair of elastic arms 122 are for contacting the upper edges of both sides of the reticle corner, respectively. In this embodiment, the limiting portion 123 is basically a horizontally extending structure for cooperating with the supporting member 134 shown in 5L and 5M, thereby limiting the horizontal movement of the pair of resilient arms 122 and reticle corners. achieves the effect of limiting the fluctuations of

6A shows a view of the reticle retainer 120 and corresponding support member 134 of the dedicated inner pod of the present invention for holding and supporting the corners of the reticle. 6B shows a partial enlarged view of a support member 134 of the present invention that limits horizontal movement of the reticle retainer 120 .

The four support members 134 of the base 130 of the present invention are respectively disposed in the surrounding grooves 133 of the four corners of the base 130, respectively, for supporting the corresponding corners of the reticle R, respectively. . The support member 134 has two support portions protruding upward from the inside of the surrounding groove 133, and each support portion faces the reticle R and has an inclined surface inclined downward toward the reticle R ( 135). The pair of inclined surfaces 135 are essentially orthogonal, and respectively contact and engage the lower edges of both sides of the corresponding corners of the reticle R as shown in FIG. 6A . The upper end of each support portion of the support member 134 extends upwardly to form a restriction block 136 . The limit block 136 is located at the upper end of the inclined surface 135 and does not interfere with the reticle R. When the reticle R is seated on the support member 134 , the two limiting blocks 136 of each support member 134 are respectively located on the two sides of the corner of the reticle R . When the cover 110 and the base 130 are coupled, the two limiting blocks 136 of each support member 134 are positioned outside the limiting portion 123 of the reticle retainer 120, as shown in FIGS. 6A and 6B . As shown, the horizontal movement of the limiter 123 connected to the pair of elastic arms 122 is restricted. Thus, when the cover 110 and the base 130 are coupled, the two limiting portions 123 of the reticle retainer 120 are held between the two supporters of each support member 134, so that a pair of limiting portions ( The horizontal movement of the 123) is limited, and thus the left-right shaking of the reticle retainer 120 is reduced. In other possible embodiments, the restriction block 136 may also be located inside the restriction 123 . Preferably, as shown in FIG. 6B , there is a buffer gap between the limiting part 123 and the limiting block 136 to prevent the generation of particles due to hardware wear.

Fig. 7a shows a three-dimensional diagram of the dedicated inner pod of the present invention, and Fig. 7b shows a cross-sectional view of the dedicated inner pod of the present invention along the dotted line of Fig. 7a. Compared with the structure of the inner pod 11 of the reticle transport pod 10 of Figure 1, the cover 110 and the base 130 of the dedicated inner pod 101 do not have a specific coupling direction therebetween, and the cover 110 The upper surface of is a flat surface with a large area without a step structure. That is, structures such as slots and corners are largely removed from the cover 110 as a whole. The design of laser marking, window, counterweight block, step structure, etc. on the bottom surface of the base 130 is also greatly reduced or eliminated, so the cover 110 and the base 130 of the dedicated inner pod 101 of the present invention reduce the processing process. It facilitates manufacturing and helps to improve yield. In addition, the pellicle groove 131 is deeply formed in the base 130, and the exchange efficiency of the internal air and the external air is improved due to the storage space of the dedicated internal pod 101, so that the relative humidity (RH%) of the storage space is controlled. can help

Further, the securing device of the dedicated inner pod 101 of the present invention is a chamfer matching the edge of the reticle by a pair of resilient arms 122 of the reticle retainer 120 and a pair of limiting blocks of the support member 134. and a pair of limiting portions 123 that restrain the reticle retainer 120 by 136 to secure the reticle. The support member 134 and the reticle retainer 120 are brought into contact through the inclined surface 135 to prevent marks from forming on the upper and lower surfaces of the reticle, and also help to maintain the horizontal state of the reticle and guide the reticle. The contact surface between the cover 110 and the base 130 may form a sealed contact by known means. In this embodiment, the contact surface of the base 130 is lower than the highest surface of the base 130, and the contact surface of the base 130 is separated from the highest surface by the surrounding groove 133, thus preventing particles from entering the pellicle area. prevent.

8A is a bottom view of the outer cover 150 of the dedicated outer pod 102 of the present invention, it can be seen that there are four hold-down devices. Figure 8b shows details of the hold-down device acting on the cover 110 of the dedicated inner pod, the outer cover 150 is omitted from the figure. 9A shows a cross-sectional view of the reticle storage pod 100 of FIG. 5A coupled. 9B is a partially enlarged view of a region indicated by a dotted line in FIG. 9A .

When the dedicated outer pod 102 of the present invention has a hold-down device configured therein and is used to accommodate the dedicated inner pod 101 , the outer cover 150 is a dedicated inner pod accommodated in the dedicated outer pod 102 . Provides a downward machining force acting on (101). Also referring to FIGS. 5B and 5C , the dedicated outer pod 102 of the present invention includes an outer cover 150 and an outer base 160 . According to the hold-down device further provided by the present invention, the outer cover 150 and the outer base 160 have different structures of the inner pod, that is, the inner pod 11 of FIG. 2 or the dedicated inner pod of FIG. 5D ( 101) can be used. In this embodiment, the inner pods of different structures are exemplified by the dedicated inner pod 101 of the present invention and the inner pod 11 of the reticle transport pod 10, the inner pods being the upper surfaces of the covers 110 and 30. have different configurations in However, the present invention is not limited to these two types of inner pods.

The positions of the individual hold-down devices provided on the inner downwardly facing surfaces of the outer cover 150 substantially correspond to the positions of the four corners of the inner pods 101 and 11 of different structures for holding the reticle, respectively. Each hold-down device includes a first hold-down device and a second hold-down device. The first hold-down device is adapted to provide a downward pressing force acting only on the cover 30 of the inner pod 11 of the reticle transport pod 10 and not on the cover 110 of the dedicated inner pod 101 of the present invention. is composed In contrast, the second hold-down device acts only on the cover 110 of the dedicated inner pod 101 of the present invention and does not act on the cover 30 of the inner pod 11 of the reticle transport pod 10. is configured to provide Moreover, the present invention does not define whether the first hold-down device and the second hold-down device are separate elements or one single element integrally formed.

Referring to FIG. 8A , the hold-down device of the present invention is configured on the downward facing surface of the outer cover 150 and substantially corresponds to the corner of the reticle. In this embodiment, the first hold-down device is a horseshoe hold-down rib 153 , and the second hold-down device is a hold-down column 154 , wherein the rib and column may be of an elastic material. Specifically, the horseshoe hold-down rib 153 has a winding U-shaped extension structure, and the hold-down column 154 is located inside the horseshoe hold-down rib 153, or the hold-down column 154 is the horseshoe. It is surrounded by hold-down ribs 153 . The hold-down column 154 of this embodiment has a Y-shaped structure; However, the present invention is not limited to the above examples.

Referring to FIG. 8B , to enable adjustment between the recess 114 of the cover 110 and the first hold-down device, the horseshoe hold-down rib 153 has a predetermined size and shape. When storing the dedicated inner pod 101 in the dedicated outer pod 102 of the reticle storage pod 100 of the present invention, a horseshoe hold-down rib configured on the inner surface of the outer cover 150 of the dedicated outer pod 102 . 153 exactly enters the corresponding recess 114 of the cover 110, the lower surface of the horseshoe hold-down rib 153 is brought into contact with the bottom surface of the recess 114, so that the outer cover 150 Although the weight of the horseshoe hold-down rib 153 acts on the cover 110 , the hold-down column 154 does not contact the bottom surface of the recess 114 because of its size. 9A and 9B, when the outer cover 150 is coupled with the outer base 160 to receive the dedicated inner pod 101, the vertical dimension of the horseshoe hold-down rib 153 is Because it is larger than the vertical dimension of the down column 154, the lower end of the horseshoe hold-down rib 153 enters the recess 114 and presses the bottom surface of the recess 114, while the hold-down column 154 is Suspended in recess 114 . That is, when the dedicated outer pod 102 receives the dedicated inner pod 101 , the hold-down column 154 does not act on the cover 110 . In addition, the sidewall of the recess 114 may limit the horizontal movement of the horseshoe hold-down rib 153 to prevent the dedicated inner pod 101 from horizontally shaking in the dedicated outer pod 102 .

10A shows a three-dimensional view of the reticle transport inner pod 11 . FIG. 10B shows a diagram of a hold-down device acting on the corresponding device of the cover 30 of the inner pod 11 of the reticle transport pod 10 with the outer cover 150 omitted from the figure. FIG. 10C shows an enlarged view of the hold-down device and the corresponding device of the inner pod 11 of the reticle transport pod 10 .

At a position substantially corresponding to the corner of the reticle, a corresponding resilient hold-down device is provided in the cover 30 of the inner pod 11 . Each resilient hold-down device includes a hold-down pin (32) and a cap (34) for securing the hold-down pin (32). Specifically, the upper end of the hold-down pin 32 is exposed from the upper portion of the cover 30 , the lower end of the hold-down pin 32 extends inside the cover 30 , and the storage space of the inner pod 11 . is exposed to When the inner pod 11 receives the reticle and a downward machining force is applied to the upper end of the hold-down pin 32, the hold-down pin 32 is forcibly lowered so that the lower end of the hold-down pin 32 is the reticle. Fix the reticle by pressing the upper surface of the

When the dedicated outer pod 102 of the reticle storage pod 100 of the present invention receives the inner pod 11 of FIG. 10A , a hold-down provided on the inner surface of the outer cover 150 of the dedicated outer pod 102 . The device may act on an elastic hold-down device of the inner pod 11 . Specifically, as shown in FIG. 10B, since the vertical dimensions of the horseshoe hold-down rib 153 and the hold-down column 154 are different, the lower end of the hold-down column 154 of the hold-down device holds - by pressing the exposed upper end of the down pin 32, the weight of the outer cover 150 presses down on the exposed top surface of the hold-down pin 32 through the hold-down column 154 while , the horseshoe hold-down rib 153 is around the cap 34 and does not act on the cover 30 . As shown in FIG. 10C , the inner wall of the horseshoe hold-down rib 153 may restrict horizontal movement of the cab 34 to prevent the inner pod 11 from swaying horizontally in the dedicated outer pod 102 . can

The purpose of the Y-shaped structure of the hold-down column 154 of this embodiment is to create a structural interference between the hold-down column 154 and the cap 34 so that the hold-down column 154 is connected to the hold-down pin 32 ) to prevent excessive pressure and thus prevent the reticle from being subjected to inappropriate force. Preferably, there is a buffer gap between the horseshoe hold-down rib 153 and the cap 34 to prevent particle generation due to wear of the hardware.

11A is a cross-sectional view of a dedicated outer pod 102 receiving a dedicated inner pod 101 of a reticle storage pod of the present invention. 11B is a cross-sectional view of a dedicated outer pod 102 receiving a non-dedicated inner pod 11 of a reticle storage pod of the present invention. That is, the dedicated external pod 102 provided by the present invention, including the hold-down device having two structures, can accommodate the existing internal pod 11 that is widely applied in the field, as well as according to the purpose of storage. Can accommodate the dedicated inner pod 101 provided. Moreover, this hold-down device can achieve the effect of safe accommodation for both the inner pods 11 and 101 having different configurations and purposes of use.

12 is a view showing the cover 110 of the dedicated inner pod 101 of the present invention overlapping the cover 30 of the non-dedicated inner pod 11 of the present invention. The volume of the recess 114 is larger than the volume of the cap 34 of the hold-down device, and the height of the upper part of the hold-down pin 32 of the elastic hold-down device is shown by the vertical difference H in the figure. As shown, it is higher than the bottom surface of the recess 114 . Thus, when the dedicated inner pod 101 or the non-dedicated inner pod 11 is accommodated in the dedicated outer pod 102 , the horseshoe hold-down rib 153 can precisely press the bottom surface of the recess 114 or The bottom surface of the hold-down column 154 of the outer cover 150 may accurately press the upper end of the hold-down pin 32 . That is, in order to harmonize with the dedicated inner pod and the non-dedicated inner pod, for example, the first hold-down (such as the horseshoe hold-down rib 153 ) provided on the inside of the outer cover 150 of the present invention. The device and the second hold-down device (such as hold-down column 154 ) have a height difference that is basically similar to the vertical difference H.

13 shows a three-dimensional exterior view of a reticle loading system 200 of the present invention. 14 shows a schematic diagram of the configuration of a reticle loading system 200 of the present invention.

The reticle loading system 200 of the present invention comprises a first port 202 supporting the E84 standard that enables loading or unloading of a reticle transport pod 10 to allow loading or unloading of a reticle storage pod 100; It has a second port 204 connected as a connection channel of the reticle storage cabinet system 600 of FIG. 4 . Specifically, the crane system of the factory can cooperate with the first port 202 to load the reticle transport pod 10 into the reticle loading system 200 or unload the reticle transport pod 10 from the reticle loading system 200 . have; The second port 204 may cooperate with a mechanical arm of the reticle storage cabinet system 600 to transport the reticle storage pod 100 between the environment of the reticle storage cabinet system 600 and the environment of the reticle loading system 200 . can In this embodiment, the second port 204 is located on the back of the reticle loading system 200 and thus is not visible in FIG. 13 .

Reticle loading system 200 is configured to include identification and inspection means for reticle transfer pod 10 and reticle storage pod 100, such as RFID reading means, two-dimensional barcode reading means, and reticle pellicle inspection means associated with the pod body and reticle. is composed

The first port 202 and the second port 204 correspond to the first lifting means and the second lifting means, respectively. In this embodiment, the first lifting means (A) primarily controls the lift for carrying the reticle transport pod (10), and the second lifting means (B) controls the other lift for carrying the reticle storage pod (100). is controlled first. The first lifting means A allow the lifts to be at different vertical heights, ie high to low A0, A1 to A2 respectively. Likewise, the second lifting means B allow the lifts to be at different vertical heights, ie from high to low respectively B0, B1 to B2. As shown in FIG. 14 , the reticle transport pod 10 and reticle storage pod 100 at height A0 and height B0 are both in the unopened state, and the reticle at height A1 and height B1 is Transfer pod 10 and reticle storage pod 100 are both open (not shown in the figure), and reticle transfer pod 10 and reticle storage pod 100 are both open at height A2 and height B2. and one of them may expose the reticle. More specifically, when the reticle transport pod 10 and the reticle storage pod 100 are at the heights A1 and B1, cover opening means are interposed to separate the outer cover and the inner cover from the outer base and the inner base. More specifically, when reticle transport pod 10 and reticle storage pod 100 are positioned at heights A2 and B2, only the outer base and inner base, respectively, remain in the lift, and the inner and outer covers are closed It is lowered to height A2 and B2 as a state, where the reticle may be positioned in the reticle transport environment 206 .

The conditions of the reticle transport environment 206 may be different from the conditions at heights A0, A1, B0 and B1 to ensure a lower risk of reticle transport. The reticle transfer environment 206 includes a reticle clamping device configured to pick up or position a reticle from a base so that the reticle is transferred between the base of the reticle transfer pod 10 and the base of the reticle storage pod 100 . can

Additionally, the mechanical arm of the reticle storage cabinet system 600 may bring the reticle storage pod 100 from the reticle loading system 200 via the second port 204 . If the reticle loading system 200 malfunctions and becomes inoperable while the reticle storage pod 100 is therein, the mechanical arm of the reticle storage cabinet system 600 may temporarily eject the reticle storage pod 100 so that the reticle storage pod 100 Ensures that the dedicated pods of the reticle storage cabinet system 600 are not contaminated due to maintenance of the loading system 200 .

In order to ensure that the environment of the reticle loading system 200 has a certain level of cleanliness as shown in FIG. 13, a fan filter unit (FFU) responsible for air intake, filtration and exhaust is provided at the top of the cabinet.

15 and 16 are flowcharts of loading and unloading of a reticle according to the embodiment of FIG. 14 .

In step 1500A, the reticle transport pod 10 is loaded through the first port 202 . The reticle transport pod 10 includes an inner pod that receives a reticle and an outer pod that receives the inner pod, and needs to store unused or used reticles. The inner pod and the outer pod may correspond to the inner pod 11 and the outer pod 12 of FIG. 1 , respectively.

In step 1500B, reticle storage pod 100 is loaded from reticle storage cabinet system 600, wherein reticle storage pod 100 includes an empty dedicated inner pod and a dedicated outer pod that receives the dedicated inner pod. The reticle storage cabinet system 600 has a plurality of reticle storage pods 100 stored therein. At this stage, empty dedicated pods are loaded. The dedicated inner pod and the dedicated outer pod may correspond to the dedicated inner pod 101 and the dedicated outer pod 102 of FIG. 5A , respectively.

At step 1502 , reticle loading system 200 individually inspects reticle transfer pod 10 and reticle storage pod 100 , opens covers of inner and outer pods of reticle transfer pod 10 , and reticle The covers of the dedicated outer pod and dedicated inner pod of the storage pod 100 are opened, and the outer base of the reticle transfer pod 10 and the outer base of the reticle storage pod 100 are lowered to the reticle transfer environment 206 . Specifically, this step may include the positions A0 to A2 and B0 to B2 of the first lifting means A and the second lifting means B in FIG. 14 .

In step 1504 , a reticle is fetched from the base of the reticle transfer pod 10 , and the reticle is transferred onto the base of the reticle storage pod 100 . In this step, the transfer is implemented by a reticle clamping device, which moves the reticle in a reticle transfer environment 206 with a high degree of cleanliness to reduce the risk of contamination of the reticle.

At step 1506 , the reticle transport pod 10 and the reticle storage pod 100 are returned to the closed state. At this time, the reticle transport pod 10 is an empty pod, and the reticle to be stored is loaded in the reticle storage pod 100 .

At step 1508 , the reticle storage pod 100 loaded with reticles is transported to a designated storage rack of the reticle storage cabinet system 600 . Preferably, the storage rack is designated according to the shortest movement path of the mechanical arm between the storage rack and the second port 204 in FIG. 14 .

In step 1510, an air filling means is performed to fill the reticle storage pod 100 with a non-reactive gas to complete storage of the reticle. Specifically, the storage rack has dedicated pipelines and connectors connected to the reticle storage pod 100 , and can fill the dedicated external pod of the reticle storage cabinet system 600 with nitrogen. That is, a dedicated internal pod for storage is placed in a specific gas environment.

In step 1600A, reticle transport pod 10 is loaded via first port 202, reticle transport pod 10 comprising an empty inner pod and an outer pod that receives the inner pod. The inner pod and the outer pod may correspond to the inner pod 11 and the outer pod 12 of FIG. 1 , respectively.

At step 1600B, reticle storage pod 100 is loaded from reticle storage cabinet system 600 into reticle loading system 200, reticle storage pod 100 comprising a dedicated inner pod for receiving a reticle and the dedicated inner pod Includes a dedicated external pod that accommodates The dedicated inner pod and the dedicated outer pod may correspond to the dedicated inner pod 101 and the dedicated outer pod 102 of FIG. 5A , respectively. At this stage, the reticle is pre-stored in the reticle storage cabinet system 600 and can be taken out for various purposes.

At step 1602 , the reticle loading system 200 individually inspects the reticle transfer pod 10 and the reticle storage pod 100 , opens the inner and outer pods of the reticle transfer pod 10 , and stores the reticle Connect the outer and inner pods of pod 100 , and lower the outer base of reticle transfer pod 10 and reticle storage pod 100 into reticle transfer environment 206 .

In step 1604 , the reticle is fetched from the base of the reticle storage pod 100 and the reticle is placed on the base of the reticle transfer pod 10 . Similarly, the reticle loading system 200 transfers the reticle from the base of the reticle storage pod 100 to the base of the reticle transfer pod 10 by way of a reticle clamping device, and the reticle is moved in the reticle transfer environment 206 .

At step 1606 , reticle transport pod 10 and reticle storage pod 100 are returned to the closed state. At this time, the reticle transport pod 10 is loaded with a reticle, and the reticle storage pod 100 is an empty pod.

At step 1608 , the reticle transport pod 10 loaded with reticles is moved out of the reticle loading system 200 via the first port 202 . Specifically, the first port 202 may cooperate with a crane system to unload the reticle transport pod 10 . The empty reticle storage pod 100 is sent back to the appropriate area of the reticle storage cabinet system 600 to await its next use.

17 shows a specific flow diagram of the reticle transport of the present invention. The following description is given with reference to FIG. 14 , wherein the left half is carried out by the first lifting means (A), the right half is carried out by the second lifting means (B), and the rest are carried out together.

In step 1700A, the reticle transport pod 10 is loaded to the first lifting means A of the reticle loading system 200 via a first port 202, and the reticle transport pod 10 is connected to the inner pod and the It includes an outer pod that houses the inner pod. Specifically, the lift of the first lifting means A resides at a height A0 for receiving and carrying the reticle transport pod 10 .

In step 1700B, the reticle storage pod 100 is loaded from the reticle storage cabinet system 600 through the connecting channel to the second lifting means B of the reticle loading system 200, and the reticle storage pod 100 is a dedicated inner pod and a dedicated outer pod receiving the dedicated inner pod. Specifically, the lift of the second lifting means B is at a height B0 for receiving and transporting the reticle storage pod 100 .

In step 1702A, gripping the cover of the outer pod of the reticle transport pod 10, lowering the lift of the primary lifting means A from height A0 to height A1, thereby lowering the cover and exterior of the outer pod. The base of the pod is separated side by side. When the lift reaches height A1, the cover of the outer pod is removed, leaving only the base of the outer pod and the inner pod in the lift.

In step 1702B, gripping the cover of the outer pod of the reticle storage pod 100, lowering the lift of the secondary lifting means B from height B0 to height B1, thereby lowering the cover and exterior of the outer pod. The base of the pod is separated side by side. When the lift reaches height B1, the cover of the outer pod is removed, leaving only the base of the outer pod and the inner pod in the lift.

In step 1704A, gripping the cover of the inner pod of the reticle transport pod 10, lowering the lift of the primary lifting means A from height A1 to height A2, thereby lowering the cover and interior of the inner pod. The base of the pod is separated side by side. When the lift reaches height A2, the cover of the inner pod is removed, leaving only the base of the outer pod and the base of the inner pod in the lift. While the lift is descending from height A0 to height A2, the reticle loading system 200 can timely read the two-dimensional barcode on the inner pod, the two-dimensional barcode on the reticle, and/or detect the condition of the pellicle. .

In step 1704B, gripping the cover of the inner pod of the reticle storage pod 100, lowering the lift of the second lifting means B from height B1 to height B2, thereby lowering the cover and base of the inner pod. are separated side by side. When the lift reaches height B2, the cover of the inner pod is removed and only the base of the outer pod and the base of the inner pod remain in the lift. While the lift is descending from height B0 to height B2, the reticle loading system 200 can timely read the two-dimensional barcode on the inner pod, the two-dimensional barcode on the reticle, and/or detect the condition of the pellicle. .

At step 1706 , a reticle is transferred between the base of the inner pod of the reticle transfer pod 10 and the base of the inner pod of the reticle storage pod 100 by the reticle clamping device of the reticle loading system 200 . A specific embodiment of a reticle clamping device may be referred to in FIGS. 19A-19C and related description.

In step 1708A, the lift of the first lifting means A is raised from height A2 to height A1 such that the cover of the inner pod of the reticle transport pod 10 is laterally engaged with the base of the inner pod. do.

In step 1708B, the lift of the second lifting means B is raised from the height B2 to the height B1 such that the cover of the inner pod of the reticle storage pod 100 is laterally engaged with the base of the inner pod. do.

In step 1710A, the lift of the first lifting means A is raised from height A1 to height A0 so that the cover of the outer pod of the reticle transport pod 10 is laterally engaged with the base of the outer pod. do.

In step 1710B, the lift of the second lifting means B is raised from height B1 to height B0 so that the cover of the outer pod of the reticle storage pod 100 is side-coupled with the base of the outer pod. .

In step 1712A, the reticle transport pod 10 is moved out through the first port 202 . The lift of the first lifting means A is higher than the height A0 , and the reticle transport pod 10 is exposed at the first port 202 of the reticle loading system 200 to await the subsequent operation of the crane system.

At step 1712B , the reticle storage pod 100 is loaded into the reticle storage cabinet system 600 through a connecting channel of the reticle storage cabinet system 600 . A mechanical arm of the reticle storage cabinet system 600 may enter the reticle loading system 200 and fetch the reticle storage pod 100 from the second lifting means B.

In the above embodiment, the first lifting means (A) and the second lifting means (B) are each capable of performing a customized operation on the reticle transport pod 10 and the reticle storage pod 100 , respectively. For example, the first lifting means A may be configured to perform locking and unlocking of the outer pod of the reticle storage pod 100 .

18 shows a diagram of a reticle loading system according to a particular embodiment of the present invention, the reticle loading system comprising the first lifting means (A) and the second lifting means (B) of FIG. 14 . The first lifting means A is shown having an outer pod cover support surface 1800A which basically only contacts the cover of the outer pod of the reticle transport pod 10 . That is, there is basically a hollow in the center of the outer pod cover support surface 1800A that allows the base of the outer pod to fall. The base of the outer pod of reticle transport pod 10 is carried by lift 1802A. Thus, when the outer pod of the reticle transport pod 10 is unlocked, the lowering of the lift 1802A causes the base and the cover of the outer pod to separate sideways, so that the base of the outer pod can be lowered together with the inner pod. , to achieve the purpose of pod opening. Closing pods is similar. When lift 1802A is raised to a height substantially level with outer pod cover support surface 1800A, the cover of the outer pod of reticle transport pod 10 is laterally engaged with the base.

The second lifting means B may have a similar configuration to implement the operation on the reticle storage pod 100 . Although FIG. 18 only shows the opening of the outer pod of the reticle transfer pod 10 , the opening of the inner pod of the reticle transfer pod 10 may also be opened by the intervention of other mechanisms. The reticle storage pod 100 may also be opened and closed by the same mechanism. In addition, the reticle loading system 200 may be provided therein with a suitable identification device or sensing unit, so that when the reticle transport pod 10 and reticle storage pod 100 are opened, relevant information, such as an RFID or two-dimensional barcode on the pod, may be retrieved. can be identified in a timely manner.

19A, 19B, and 19C show diagrams of a reticle clamping device 1900 used in a reticle loading system in accordance with certain embodiments of the present invention. The reticle clamping device 1900 is configured, for example, in the reticle transport environment 206 of FIG. 14 , and has a track 1902 and a clamp assembly 1904 . A track 1902 is secured to the inside of the reticle loading system 200 , and as shown in FIG. 20 , the clamp assembly 1904 is controlled to move horizontally on the track 1902 . The clamp assembly 1904 has a pair of clamp arms 1906 and a pair of contact plates 1908 . The pair of contact plates 1908 are driven to approach each other, and are coupled to the periphery of the reticle R through the locking portion 1910 to achieve the purpose of fixing the reticle R. The reticle clamping device 1900 does not have the ability to move vertically, and the reticle R can only disengage from the base when the lift is lowered.

20 shows an adjusted side view of the reticle clamping device 1900 and the lift 2000 . A lift 2000 carrying the outer base 40 of the outer pod 12 , the base 20 of the inner pod 11 and a reticle (not shown) is shown on the right side of FIG. 20 , a reticle clamping device 1900 . ) to descend. Next, the clamp assembly 1904 moves horizontally over the reticle R carried by the lift 2000 . The lift 2000 rises to a height to which the reticle can be clamped, as shown on the left side of FIG. 20 . Lift 2000 lowers after clamp assembly 1904 clamps the reticle. The clamp assembly 1904 moves horizontally over another lift (not shown). Similarly, the other lift raises the base of the inner pod to a height where it can receive the reticle. Clamp assembly 1904 releases the reticle to complete the transfer. During periods when actuation of the reticle clamping device 1900 is not required, the clamp assembly 1904 can be moved between the two lifting means to avoid operational interference. In FIG. 20 , the dashed line indicates that the clamp assembly 1904 is held at the same height during the movement process.

21 is an example of an abnormal processing process of the reticle loading system, and in more detail, the reticle transport pod 10 loaded by the lifting of the first lifting means (A) or the second lifting means (B) of FIG. 14 . The anomaly processing process is shown.

When the reticle transport pod 10 has a loading abnormality and shutdown occurs, the reticle loading system 200 may display an abnormal state and detect whether an initialization key has been activated. When the initialization key is activated, the entire reticle loading system 200 is initialized. The lift returns the reticle transport pod 10 to height A0.

When the reticle transport pod 10 has a loading abnormality and shutdown occurs, the reticle loading system 200 may display an abnormal state and detect whether an initialization key has been activated. When the initialization key is activated, the entire reticle loading system 200 is initialized. The lift returns the reticle storage pod 100 to height B0.

In the event of an abnormal transport and shutdown of the first lifting means A and the second lifting means B located at the heights A2 and B2, the reticle loading system 200 may display an abnormal state, and the initialization key Detects whether it is active or not. When the initialization key is activated, the entire reticle loading system 200 is initialized. The reticle clamping device 1900 positions the reticle in the inner pod of the reticle transport pod 10 or the inner pod of the reticle storage pod 100 . The lifts of the first lifting means A and the second lifting means B are returned to the heights A0 and B0, respectively.

22 is an example of another anomaly handling procedure of the reticle loading system 200, further comprising the step of checking the state of the pellicle. The reticle loading system 200 determines whether key ejection is enabled to perform various operations to return reticles to the reticle transport pod 10 or reticle storage pod 100, or to return the reticle storage pod 100 to a designated storage rack. can be detected additionally.

23 shows an abnormality processing sequence of the reticle clamping device. Depending on whether the reticle originates from the inner pod of the reticle transfer pod 10 or from the inner pod of the reticle storage pod 100 , the reticle clamping device 1900 holds the reticle from the inner pod 10 of the reticle transfer pod 10 . Or return to the inner pod of the reticle storage pod 100, and then return the reticle transfer pod 10 or the reticle storage pod 100 to the position designated by the initialization procedure.

24 shows a schematic block diagram of a reticle loading system and reticle storage cabinet system of the present invention. The reticle storage cabinet system 600 includes one or more storage cabinets 602 . The cabinet 602 includes a plurality of storage racks 604 stacked vertically. The storage cabinet 602 may be substantially divided into an upper area and a lower area. One dedicated reticle storage pod 100 consisting of a dedicated outer pod and a dedicated inner pod may be disposed in each storage rack 604 of the storage cabinet 602, the dedicated outer pod being used to receive and secure the dedicated inner pod. suitable, and a dedicated inner pod is suitable for receiving and securing a reticle. The dedicated inner pod and the dedicated outer pod may correspond to the dedicated inner pod 101 and the dedicated outer pod 102 of FIG. 5A , respectively.

A portion of the storage rack 604 of the storage cabinet 602 may be designed as a buffer area 606 . The buffer area 606 is for storing the cleaned reticle storage pod 100 or the used reticle storage pod 100 . The cleaned reticle storage pod 100 is an empty pod and is ready to receive and store reticles provided to the reticle loading system 200 . The used reticle storage pod 100 refers to an empty pod recovered from the reticle loading system 200, and since it is exposed to an environment with low cleanliness during the reticle transport process, there is a risk of contamination.

The reticle storage cabinet system 600 mainly includes management means 608 configured to manage information of reticles stored in the storage cabinet 602 and monitor the ambient temperature and humidity of the storage cabinet 602 . For example, an oxygen sensing device is used to sense the ambient oxygen concentration in a cabinet. Preferably, the environment of the storage cabinet 602 satisfies a Class 10 cleanliness level, and the filled gas satisfies a Class 1 cleanliness degree. The reticle storage cabinet system 600 further comprises control means 610 for controlling the mechanical arm 609 to transport the reticle storage pods to a storage rack 604 in a designated common storage area or buffer area 606 . The reticle storage cabinet system 600 further comprises mass flow control means 612 responsible for controlling the various mass flow rates of the storage cabinet 602 and in particular non-reactive gases connected to individual storage racks 604 . For example, a mass flow controller is used to control the mass flow of one or more nitrogen pipelines. The mass flow control means 612 further includes a fan filter unit (FFU) disposed above the reticle storage cabinet system 600 and an exhaust module disposed below the reticle storage cabinet system 600 .

The reticle storage cabinet system 600 provides a clean reticle storage pod 100 to the storage cabinet 602 proximate the buffer area 606 and receives the used reticle storage pod 100 from the storage cabinet 602. It further includes a cleaning device 614 .

25 shows a plan view of a reticle storage cabinet system 600 of the present invention, showing a specific configuration inside the reticle storage cabinet system. The storage cabinet 602 is mainly arranged along the inner wall surface of the reticle storage cabinet system 600 , and a mechanical arm 609 is located in the center of the reticle storage cabinet system 600 , so that each storage rack of the storage cabinet 602 is located. 604 can be accessed.

26A shows a three-dimensional view of a storage rack 604 in accordance with a particular embodiment of the present invention. 26B is a diagram showing the configuration of the bottom portion of the storage rack 604 .

Each storage rack 604 is a tablet rack having a front end 2600 and a rear end 2602 . The rack has an upward facing carrier surface and a downward facing lower surface. A notch is formed in the front end 2600 of the rack. The notch provides space for the mechanical arm 609 to operate, allowing the mechanical arm 609 to gently place the reticle storage pod 100 into the storage rack 604 or withdraw the reticle storage pod 100 from the storage rack 604. make it possible The rear end 2602 of the rack is composed of a nitrogen expansion pipeline 2604, of which the upstream is connected to a nitrogen source and the downstream is connected to a pair of nozzles 2606 of the tablet rack to provide nitrogen at the same time.

The carrier surface of each storage rack 604 is provided with three kinematic coupling pins 2608 for supporting the bottom of the reticle storage pod 100 . Two of the coupling pins 2608 are located close to the front end 2600 and located on either side of the notch, and the other coupling pins 2608 are located at the rear end 2602 of the rack so that the storage rack 604 is primarily supported. and the reticle storage pod 100 is positioned by these three coupling pins 2608 . Specifically, these three coupling pins 2608 each correspond to the positioning slots 163 of the outer base shown in FIG. 5C . Positioning slots 132 of base 130 are shown in FIG. 5I , depending on whether storage rack 604 supports external pods or internal pods of dedicated pods.

The carrier surface of the storage rack 604 is further provided with stops 2610 for limiting the reticle storage pod 100 . Preferably, the stop 2610 may be labeled with the identification information of the mechanical arm 609 . The information may also be labeled on the front end 2600 of the storage rack 604 . As shown, side walls limiting the reticle storage pod 100 may be further formed on both sides of the rack. Both sides of the rack of the storage rack 604 are fixed to the wall or vertical branch of the frame by a pair of connecting arms 2612 so that a plurality of storage racks 604 can be vertically stacked. Coupling pins 2608, stops 2610, and sidewalls may be PEEK plastic material to reduce particles that may be created due to wear.

27A shows a view of a storage rack 604 with a reticle storage pod 100 . 27B is a view from the bottom when the storage rack 604 is equipped with the reticle storage pod 100 . 27C is a view from another angle when the storage rack 604 is equipped with the reticle storage pod 100 .

As shown in FIG. 5A , between the dedicated inner pod 101 and the dedicated outer pod 102 included in the reticle storage pod 100 , the dedicated outer pod 102 has an outer cover 150 and an outer base 160 . ) has A latch device 2700 for locking or unlocking the outer cover 150 and the outer base 160 from each other is configured at the bottom of the outer base 160 . When the reticle storage pod 100 is loaded by the lift of the reticle loading system 200 of FIG. 14 , the actuating device provided on the second lifting means B cooperates with the latch device 2700 of the outer base 160 to Dedicated external pod 102 can be locked or unlocked.

When the reticle storage pod 100 is placed in a designated storage rack 604 , the coupling pins 2608 of the storage rack 604 cooperate with a positioning slot 163 in the bottom of the reticle storage pod 100 , Place the reticle storage pod 100 in the storage rack 604 . Specifically, the coupling pins 2608 of the storage rack 604 are located at the outer end of the corresponding positioning slot 163 , that is, at one end remote from the latch device 2700 , and at an angle close to the latch device 2700 . The inner end of the positioning slot 163 is exposed by a notch so that when the mechanical arm 609 approaches the bottom of the reticle storage pod 100, the positioning pin 2804 of the mechanical arm 609 engages the corresponding slot 163. may engage the proximal end of

28C shows a top view of a storage rack 604 and a mechanical arm 609 in accordance with certain embodiments, with the mechanical arm 609 positioned below the reticle storage pod 100 and a reticle on the storage rack 604 . Positioning slots 163 in the bottom of storage pod 100 are indicated by dashed lines. 28B shows a side view of the mechanical arm 609 that goes under the storage rack 604 and picks up the reticle storage pod 100 . 28C shows a side view of the mechanical arm 609 for withdrawing the reticle storage pod 100 from the storage rack 604 .

Mechanical arm 609 has a front end 2800 and a rear end 2802 . The front end 2800 is basically an arrow-shaped tablet with three positioning pins 2804 on the upward facing carrier surface. The three positioning pins 2804 exactly match the inner ends of the positioning slots 163 at the bottom of the reticle storage pod 100 , and the positioning pins 2808 of the storage rack 604 , It engages correspondingly with the outer end. That is, the positioning slot 163 at the bottom of the reticle storage pod 100 of the present invention extends at least from the extent of the tablet rack of the storage rack 604 to the extent of the notch; However, the present invention is not limited to the above examples. The rear end 2802 is connected to the transport device so that the mechanical arm 609 can move at least horizontally and vertically.

28A and 28B , when the mechanical arm 609 approaches the reticle storage pod 100 , the front end 2800 of the mechanical arm 609 first moves below the notch in the target storage rack 604 . and positioning pins 2804 of mechanical arms 609 are aligned with corresponding positioning slots 163 in the bottom of reticle storage pod 100 .

Mechanical arm 609 is raised to engage positioning pin 2804 with positioning slot 163 in the bottom of reticle storage pod 100 . The mechanical arm 609 continues to rise to lift the reticle storage pod 100 from the storage rack 604 , the height of the lift being at least greater than the height of the front end 2600 of the storage rack 604 , such that the mechanical arm 609 ) can be withdrawn from the storage rack 604 as shown in FIG. 28C .

Once the minimum space for the mechanical arms 609 to access each reticle storage pod 100 is ensured, the height between the upper and lower storage racks 604 can be minimized to achieve maximum storage efficiency.

29 shows a diagram of the air supply pipeline 2900 upstream of the storage rack 604 and its mass flow control means. Downstream of the air supply pipeline 2900 is connected as in the expansion pipeline 2604 of FIG. 26A . Accordingly, nitrogen may be supplied into the pod through the nozzle 2606 of the storage rack 604 and the two corresponding air valves 162 of the reticle storage pod 100 of FIG. 5C . The remaining two unconnected air valves 162 of the reticle storage pod 100 exhaust the air inside the pod so that the reticle receiving space of the reticle storage pod 100 located in the storage rack 604 has a convective gas. Mass flow control means upstream of each air supply pipeline 2900 include a ball valve 2901 , a mass flow display 2902 , a limiting valve 2903 , a filter 2904 , a hydrometer/thermometer 2905 , and a mechanical pressure gauge. 2906 , an electronic pressure gauge 2907 , a pressure regulator 2908 , a pressure gauge 2910 and a main pipeline 2909 with an air valve 2911 ; However, the present invention is not limited to the above examples.

30 shows a diagram of a connection to an upstream air supply pipeline of a storage rack 604 according to two specific embodiments. In configurations with mass flow controller 3000 , one or more sensors provided in storage rack 604 may transmit sensing signals depending on whether reticle storage pod 100 is on storage rack 604 , such that the mass flow controller 3000 controls the mass flow rate of gas entering storage rack 604 accordingly. For example, when there is a dedicated pod in the storage rack 604, nitrogen is supplied, and when there is no dedicated pod in the storage rack 604, the nitrogen supply is cut off. In a configuration with a needle valve 3002 , the mass flow rate of gas supplied to the storage rack 604 may be manually adjusted, or a continuous gas supply may be maintained. Regardless of the type of gas used, the filter 3001 reduces impurities in the gas.

31 is a reticle storage that confirms the state of the pellicle and selectively prompts the reticle transport pod (non-dedicated pod) or reticle storage pod (dedicated pod) to perform a predetermined operation according to the state of the pellicle to return to a designated position An example of an anomaly handling procedure of the mechanical arm 609 of the cabinet system 600 is shown.

32 shows a schematic diagram of a reticle loading apparatus 200' and a reticle storage cabinet system 600' in accordance with another embodiment of the present invention. Each storage rack 604 of the storage cabinet 602 of this embodiment only provides a dedicated outer pod 102 of the dedicated reticle storage pod 100 shown in FIG. 101) is not provided. However, the dedicated outer pod 102 may receive the inner pod obtained from the reticle loading system 200', ie the inner pod 11 of the non-dedicated reticle transfer pod 100 shown in FIG. Accordingly, the purpose of the reticle loading system 200' of this embodiment is to transport an inner pod with a reticle accommodated therein. In addition, the rest of the configuration is the same as that of the embodiment of Fig. 24, and related details are omitted here. The details related to the reticle loading system 200' and the reticle storage cabinet system 600' are briefly described.

The reason that the reticle storage cabinet system 600' of this embodiment does not provide a dedicated inner pod is that the dedicated outer pod 102 of the reticle storage pod 100 of the present invention is a hold-down device as shown in FIG. 8A. , and is compatible with non-dedicated internal pods. 8A and 11B , when the dedicated outer pod 102 of the storage cabinet 602 receives the non-dedicated inner pod 11 , the horseshoe hold-down rib 153 of the dedicated outer pod 102 is ) surrounds and restricts the cap (34) and the hold-down column (154) presses the hold-down pin (32) on the cover (30) of the inner pod (11) for storage of the non-dedicated inner pod (11) and reticle. to implement One of the above advantages is that the reticle is not exposed to the environment outside the pod during transport, reducing the risk of particle contamination.

Fig. 33 shows a flow chart of the loading of the reticle according to the embodiment of Fig. 32, wherein the left half is performed by the first lifting means (A) and the right half is performed by the second lifting means (B).

At step 3300A, the reticle transport pod 10 is loaded into the reticle loading system 200' via the first port 202, either by a crane system or manually, and the reticle transport pod 10 is a reticle and an external pod. and an inner pod (11) for receiving (12). The loaded reticle transport pod 10 is received by the lift of the first lifting means A at a height A0.

At step 3300B, the dedicated external pod 102 is loaded from the reticle storage cabinet system 600' through the second port 204 into the reticle loading system 200', and the loaded dedicated external pod 102 is It is an empty pod that does not house any inner pods. Specifically, the mechanical arm 609 of the reticle storage cabinet system 600' places the dedicated external pod 102 on the lift of the second lifting means B, ie at a position of height B0.

In step 3302, reticle transport pod 10 and dedicated external pod 102 are inspected, for example, identifying the pod or information displayed on the pod and the state of the pellicle. The lifts of the first lifting means (A) and the second lifting means (B) descend to heights A2 and B2, respectively. During the lowering process, the non-dedicated outer pod 12 and the dedicated outer pod 102 are laterally opened by a similar mechanism. At heights A2 and B2 the lift of the first lifting means A carries only the inner pod 11 of the outer base 40 and the lift of the second lifting means B carries the outer base 160 of the dedicated pod only, both are located in the reticle transport environment 206 . It should be understood that in this embodiment the inner pod 11 does not need to be opened and the reticle transfer environment 206 only needs to meet the cleanliness level for transferring the inner pod. In addition, since in this embodiment it is not necessary to open the inner pod 11 to transport the reticle, the height is relative to the first lifting means A and the second lifting means B, compared to the embodiment of Fig. 14 . Operations related to (A1, A2) may be omitted.

At step 3304 , the clamp device of the reticle loading system 200 ′ fetches the inner pod 11 and transfers the inner pod 11 to the outer base 160 of the dedicated pod. The clamp arrangement may be similar to that of FIG. 19A and is more suitable for the inner pod 11 . The operation of the clamp device is similar to the operation of the description related to FIG. 20 .

In step 3306, when the transfer of the inner pod 11 is completed, the lifts of the first lifting means (A) and the second lifting means (B) rise to the heights A0 and B0, so that the non-dedicated outer pod ( 12 is side closed and a dedicated outer pod 102 is side closed to receive the inner pod 11 .

At step 3308 , a dedicated outer pod 102 , which houses the inner pod 11 , is stored in a designated storage rack 604 of the storage cabinet 602 . The reticle storage cabinet system 600 ′ may designate a target storage rack 604 according to the shortest travel path of the mechanical arm 609 .

At step 3310 , storage rack 604 fills dedicated external pod 102 with nitrogen. Likewise, the dedicated external pod 102 and storage rack 604 of this embodiment may be configured with the dedicated external pod and storage racks of the embodiment of FIGS. 27A and 27B to implement gas filling.

Fig. 34 shows a flowchart of unloading of a reticle according to the embodiment of Fig. 32, wherein the left half is performed by the first lifting means (A) and the right half is performed by the second lifting means (B).

In step 3400A, the empty outer pod 12 of the non-dedicated transfer pod 10 is loaded via the first port 202 . The loaded outer pod 12 does not include an inner pod and is carried by the lift of the first lifting means A at a height A0.

In step 3400B, the dedicated external pod 102 is loaded from the reticle storage cabinet system 600' via the second port 204, and the loaded dedicated external pod 102 is the internal pod 11 containing the reticle. ) is accepted. The loaded dedicated outer pod 102 and inner pod 11 are carried by the lift of the second lifting means B at height B0.

In step 3402 , likewise the dedicated outer pod 102 and inner pod 11 as well as the non-dedicated outer pod 12 are inspected by the first lifting means A and the second lifting means B. The outer pod 12 and the dedicated outer pod 102 are opened, and the outer base 40 of the outer pod 12 and the outer base 160 of the dedicated outer pod 102 are lowered to the heights A2 and B2. The inner pod 11 is placed in the reticle transport environment 206 .

In step 3404 , the inner pod 11 is fetched and transferred to the outer base 40 of the outer pod 12 . The transfer is performed in the reticle transfer environment 206 or other environment having a degree of cleanliness suitable for transferring the inner pod.

In step 3406, the lifts of the first lifting means (A) and the second lifting means (B) are raised to heights A0 and B0 to close the non-dedicated outer pod 12 to the side, and the inner pod 11 ), with a dedicated external pod 102 closed laterally. At this time, the closed dedicated outer pod 102 is an empty pod, and the non-dedicated inner pod 11 and the outer pod 12 form a reticle transport pod 10 .

In step 3408 , the first lifting means A moves the reticle transport pod 10 out of the reticle loading system 200 ′ through the first port 202 , and the reticle transport pod 10 is subjected to various processing. send to the environment

Fig. 35 shows a flow chart of the transport of the inner pod 11 according to the embodiment of Fig. 32, the left half being performed by the first lifting means (A) and the right half by the second lifting means (B) is carried out

In steps 3500A and 3500B, the first lifting means A receives the outer pod 12 of the non-dedicated reticle transport pod 10 loaded at a height A0, and the second lifting means B is positioned at a height A0. Receives the dedicated outer pod 102 of the dedicated reticle storage pod 100 loaded at B0. An inner pod 11 having a reticle is accommodated between the non-dedicated outer pod 12 and the dedicated outer pod 102, the inner pod 11 comprising a non-dedicated outer pod 12 and a dedicated outer pod 102 and structurally compatible.

In steps 3502A and 3502B, the first lifting means A and the second lifting means B perform the operation of unlocking the non-dedicated outer pod 12 and the dedicated outer pod 102, respectively. After unlocking, the first lifting means (A) and the second lifting means (B) grip the outer covers of the non-dedicated outer pod 12 and the dedicated outer pod 102, respectively, and lift from the heights A0 and B0 to the height ( The lift is lowered to A2 and B2), in which the non-dedicated external pod 12 and the dedicated external pod 102 are opened sideways in the descent process.

In steps 3504A and 3504B, the first lifting means A and the second lifting means B respectively lower the non-dedicated outer pod 12, the dedicated outer pod 102, the two-dimensional barcode and the state of the pellicle. An operation is performed to identify the information labeled on the inner pod 11 and/or the reticle accommodated in the process. If the identification result does not match the expected target, the reticle loading system 200' may perform a related anomaly handling procedure.

In step 3506 , for example, the reticle clamping device 1900 of FIG. 19A transfers the inner pod 11 between the non-dedicated outer base 40 and the dedicated outer base 160 . For example, the clamping arm 1906 and contact plate 1908 of the reticle clamping device 1900 of FIG. 19A are modified to conform to the dimensions and structure of the inner pod 11 to realize movement of the inner pod 11 . can be

In steps 3508A and 3508B, the first lifting means (A) and the second lifting means (B) perform the operation of raising the lift to the heights A0 and B0, respectively, so that the non-dedicated external pod 12 and the dedicated The outer pod 102 is laterally closed and further locks the two pods.

In steps 3510A and 3510B, the reticle transport pod 10 with an empty, non-dedicated outer pod 12 or inner pod 11 is moved out of the reticle loading system 200' via the first port 202. Alternatively, an empty dedicated external pod 102 or a dedicated external pod 102 receiving a non-dedicated inner pod 11 may be returned to the reticle storage cabinet system 600' via the second port 204. .

36 shows a transport flow diagram of the inner pod 11 . During this period, the operations of the first lifting means (A) and the second lifting means (B) are performed in the reticle transport environment 206 or other environment satisfying the required cleanliness.

As shown in the figure, all lifts descend below the reticle clamping device 1900'. The clamping device 1900 ′ moves horizontally over the inner pod 11 . When the inner pod clamping device 1900' does not lift or move, the lift of the first lifting means A rises to a height at which the inner pod 11 can be clamped. When the inner pod 11 is fixed, the lift is lowered to complete the separation. The inner pod 11 is moved horizontally for lifting of the second lifting means B. The lift of the second lifting means B rises to carry the inner pod 11 , and at the same time the reticle clamping device 1900 ′ is released to realize the transfer of the inner pod 11 .

37 is a schematic diagram of a reticle loading apparatus 200 and a reticle storage cabinet system 600" according to another embodiment of the present invention. Substantially identical in construction, differing primarily in that the storage cabinet 602 provides a plurality of storage chambers 604 ′. Each storage chamber 604 ′ may hold a dedicated dual pod, such as the reticle storage pod 100 shown in FIG. 5A . Alternatively, each storage chamber 604 ′ may store a single pod 3700 . This single pod 3700 is mainly composed of a cover and a base, and is for accommodating the reticle obtained from the reticle transport pod 10 .

38A shows a diagram of a storage chamber 604' according to a particular embodiment of the present invention. 38B shows a diagram of the configuration of the carrier surface facing upwards inside the storage chamber 604'. 38C shows a view of a single pod 3700 contained in a storage chamber 604'. 38D shows a diagram of the carrier surface arrangement of the storage chamber 604 ′ supporting the bottom of the single pod 3700 .

These storage chambers 604' may be secured to the frame of the storage cabinet 602 by similar means to form a vertical stacking configuration. Each storage chamber 604 ′ is essentially a pod with an opening, providing sufficient storage space to accommodate a single pod 3700 . The opening allows the mechanical arm 609 to access the single pod 3700 . The storage chamber 604' is provided with two connectors 3800 on the rear side and a nitrogen source is connected upstream to fill the storage chamber 604' with nitrogen. The upwardly facing carrier surface inside the storage chamber 604' is provided with three kinematic coupling pins 3802 and two auxiliary guide pins 3804 for positioning and supporting the single pod 3700. In another embodiment, a valve may be provided at the opening of the storage chamber 604' to prevent the single pod 3700 from falling and to maintain a nitrogen condition within the storage chamber 604'.

39A shows a flow diagram of loading of a reticle according to the embodiment of FIG. 37 ; 39B shows a flowchart of unloading of a reticle according to the embodiment of FIG. 37 ;

In step 3900A, the dual pod is loaded on the lift of the first lifting means A of the reticle loading system 200 via the first port 202 and the reticle transport pod 10 transfers the reticle to the inner reticle. an inner pod to receive and an outer pod to receive the inner pod.

In step 3900B, an empty single pod 3700 is loaded from the reticle storage cabinet system 600 ″ via the second port 204 onto the lift of the second lifting means B.

In step 3902, the reticle accommodated in the inner pod of the reticle transfer unit 10 is taken out and transferred to an empty single pod. 24, in the process of lowering the lift of the first lifting means A from the height A0 to the height A2, the outer pod and the inner pod are laterally opened to expose the reticle, and the second While the lift of the lifting means B is lowered from the height B0 to the height B2, the single pod 3700 is laterally opened to expose the inner base. Next, the reticle clamping device transfers the reticle from the inner pod base of the reticle transfer pod 10 to the base of the single pod 3700 . Finally, the lift of the second lifting means B rises from height B2 to height B0 to receive the reticle sideways in a single pod 3700 .

At step 3904 , a single pod 3700 containing reticles is transferred from the reticle loading system 200 to the reticle storage cabinet system 600 ″ and moved along a designated storage chamber 604 ′ of the storage cabinet 602 . Preferably, the designated storage chamber 604 ′ is determined by the shortest path of the mechanical arm 609 .

In step 3906 , mechanical arm 609 opens the gate of storage chamber 604 ′ and places single pod 3700 into storage chamber 604 ′. Storage chamber 604' is filled with nitrogen after closing the gate to complete storage of the reticle. In the gateless embodiment, the mechanical arm 609 does not need to open the gate. The gate can be replaced with a continuous filling with nitrogen.

In step 3908A, an empty dual pod (eg, reticle transport pod 10 ) or empty single pod 3700 is loaded onto the lift of the first lifting means A of the reticle loading system 200 .

In step 3908B, the mechanical arm 609 withdraws the single pod 3700 containing the designated reticle from the designated storage chamber 604' and lifts the single pod 3700 into the second lifting means of the reticle loading system 200 ( It is loaded on the lift of B).

In step 3910 , the first lifting means (A) and the second lifting means (B) lower the inner pod base of the reticle transport pod 10 and the reticle of the single pod 3700 into the reticle transport environment 206 , respectively. to transfer the reticle of the single pod to the reticle transfer pod 10 .

At step 3912 , the reticle transport pod 10 containing the reticle is unloaded by the crane system through the first port 204 and sent to the destination station.

Fig. 40 shows a specific flow chart of unloading of a reticle according to the embodiment of Fig. 37, wherein the left half is a step performed by the first lifting means (A) and the right half is performed by the second lifting means (B) is a step to be In step 4000A, a dual pod (eg reticle transport pod 10 ) is loaded into the lift of the first lifting means A via the first port 202 . In step 4000B, a single pod 3700 is loaded into the lift of the second lifting means B from the reticle storage cabinet system 600". In step 4002A, the cover of the outer pod is gripped and the outer pod is lifted. unlock, and lower the lift of the first lifting means A from the height A0 to the height A1 In step 4002B, the cover of the single pod 3700 is gripped at the height B0 or B1 and , lower the lift carrying the base of the single pod 3700 from height B0 to height B1. In step 4004A, the lift carrying the base of the inner pod is moved from height A1 to height A2. At step 4004B, the lift carrying the base of the single pod 3700 is lowered from position B1 to position B2. At step 4006, the reticle clamping device engages the base of the inner pod with Move the reticle between the bases of single pod 3700. In step 4008A, when the lift rises from height A2 to height A1, the inner pod closes sideways.In step 4008A, the lift Upon rising from position B2 to position B1, the single pod 3700 is closed laterally, in step 4010A, the outer pod is closed laterally and when the lift rises from height A1 to height A0. In step 4010B, the lift rises from position B1 to position B0.In step 4012A, the dual pod is removed from the crane system.In step 4012B, the single pod 3700 is reticle storage. Return to cabinet system 600".

Whether the reticle is eventually stored by a single pod or a dual pod, the storage environment is important to the storage of the reticle. A gated storage chamber is advantageous for maintaining the conditions of the storage environment. It should be noted that the operating options of the gate are also limited by the internal configuration of the cabinet system. An example of the operating mechanism of the storage chamber gate of the cabinet system of the present invention is as follows.

41A shows an example of the interaction process of the storage chamber 4104 with the mechanical arms 4100 and 4102 for placing the pod P into the storage chamber 4104 . 41B shows an example of the interaction process between the mechanical arms 4100 , 4102 and the storage chamber 4104 for taking the pod P out of the storage chamber 4104 . The illustrated storage chamber 4104 has a gate, and the front end 4102 of the mechanical arm may be configured to interact with the gate of the storage chamber 4104 . For example, the front end 4102 of the mechanical arm extends into a notch in the bottom of the gate and may have a predetermined mechanism for lifting and opening the gate to expose the space of the storage chamber 4104 ; However, the present invention is not limited to the above examples. More specifically, the mechanical arm may consist of at least two parts: one of which is a gripping mechanism 4100 and the other of which is an interaction mechanism 4102 for the gate, the two being separately operable. As shown in FIG. 41A , part of the mechanical arm is first opened by lifting the gate, and then another part places the pod P. When placement is complete, the gate returns to the closed state. The process in FIG. 41B is reversed.

42A shows an example of a storage chamber and a mechanical arm of a cabinet system for placing a pod in the storage chamber according to another interactive embodiment. 42B shows an example of a storage chamber and a mechanical arm of a cabinet system for removing a pod from a storage chamber according to another interactive embodiment. The mechanical arm of this embodiment includes two separate parts, a grip portion 4200 and a push portion 4202 . The grip part 4200 is for carrying or clamping the pod P, and can access the space of the storage chamber 4204 . The storage chamber 4204 has a pivot gate 4206 . The push portion 4202 may extend forward with respect to the grip portion 4200 to push the plate 4208 on the gate 4206, thereby allowing the gate 4206 to be lifted and opened in a leveraged manner. 4200 causes pod P to be delivered into storage chamber 4204 . After completing the above, the pusher 4208 is retracted so that the gate 4206 can be returned to the closed state.

43 shows a schematic diagram of a reticle storage cabinet pipeline expansion system in accordance with an embodiment of the present invention. At least one main pipeline 4300 has an upstream connected to a nitrogen source 4302 and downstream connected to a plurality of branch pipelines 4304 . Each branch pipeline 4304 is connected to one corresponding storage chamber 604 ′ in a storage cabinet 602 . At least one mass flow controller 4306 is connected to the main pipeline 4300 . When the reticle pod is placed in the designated position in the storage chamber 604' of the storage cabinet 602, the mass flow controller 4306 is accordingly placed in a predetermined valve to fill the designated storage chamber 604' with nitrogen 604'. decide to open For example, the mass flow controller 4306 may be configured to monitor the mass flow rate of gas in the main pipeline 4306 and control the opening and closing of the regulating valve 4308 in each branch pipeline 4304, the regulating A valve 4308 may be used to regulate the gas flow rate in each branch pipeline 4304 . As shown in the figure, the upstream end of the main pipeline 4300 may include a particle filter 4310, a pressure gauge 4312, a pressure sensor 4314, a regulator 4316, and a ball valve 4318; However, the present invention is not limited to the above examples.

44 shows a schematic diagram of a reticle loading system and a reticle storage cabinet system in accordance with another embodiment of the present invention. In comparison with the above-described embodiment, it can be seen that the reticle loading system 200" of this embodiment implements the transport of the reticle by only one lifting means A. Likewise, the reticle transport pod 10 has a height In the course of descent from A0 to height A1 it opens and eventually exposes inner pod 11. At height A1 inner pod 11 is allowed to interact with mechanical arm 609 and thus clamping This further shortens the reticle transport path and reduces the risk of reticle shaking.

45A shows a flow diagram of loading of a reticle according to the embodiment of FIG. 44 ; 45B shows a flowchart of unloading of a reticle according to the embodiment of FIG. 44 . At step 4500 , a dual pod (eg, a reticle transport pod 10 ) is loaded into a lift, the dual pod having an inner pod 11 to receive a reticle and an outer pod 11 to receive the inner pod 11 . Includes pods. In step 4502, the inner pod of the dual pod is exposed at height A1, ie in the reticle transport environment. In step 4504 , the inner pod 11 is transferred to a designated storage chamber 604 ′ of the storage cabinet 602 . In step 4506, the gate of the designated storage chamber 604' is opened and put into the inner pod 11, and after closing the gate, the storage chamber 604' is filled with nitrogen to complete storage. At step 4508 , an outer pod of the dual pod (eg, outer pod 12 of FIG. 1 ) is loaded into a lift, the outer pod including a cover and a base. At step 4510, the lift is lowered to open the outer pod to the side and place the base at height A1. In step 4512 , the inner pod 11 containing the reticle is removed from the designated storage chamber 604 ′ of the storage cabinet 602 , and the inner pod is placed on a base located at height A1 . At step 4514 , the lift rises to sideways close the dual pod and lock the dual pod. At step 4516, the dual pods are removed.

46A illustrates another flow diagram of loading a reticle according to the embodiment of FIG. 44 ; 46B shows another flow diagram of unloading of a reticle according to the embodiment of FIG. 44 . In step 4600, a dual pod is loaded into the lift via a port, the dual pod comprising an inner pod 11 and an outer pod that receives the inner pod. At step 4602, the lift carrying the inner pod 11 and the base of the outer pod is lowered from height A0 to height A1, gripping the cover of the outer pod, opening the outer pod to the side. In step 4604, while the lift descends from height A0 to height A1, the two-dimensional barcode of the inner pod 11 is read and the state of the pellicle is identified by the identification means. In step 4606, the mechanical arm of the cabinet system 600" removes the inner pod 11 carried by the base of the outer pod, leaving only the outer pod of the dual pod in the reticle loading system 200". At step 4608 , the outer pod of the dual pod is closed sideways and locked while the lift ascends from height A1 to height A0 . At step 4610, the external pod of the dual pod is ejected through the port. At step 4612, the outer pod of the dual pod is loaded into the lift via the port to receive the inner pod 11 in the reticle storage cabinet system 600". At step 4614, grasp the cover of the outer pod and The outer pod is opened laterally by lowering the lift carrying the base of the outer pod from height A0 to height A1. In step 4616, the mechanical arm of the reticle storage cabinet system 600" is moved to the designated inner pod ( 11) on the lift's outer pod base. In step 4618, while the lift is raised from height A1 to height A0, the two-dimensional barcode on the inner pod 11 is read and the state of the pellicle is identified by the identification means. At step 4620, the dual pod is closed sideways and locked after the lift rises from height A1 to height A0. At step 4622, the dual pod is ejected through the port.

100: reticle storage pod
101: dedicated internal pod
110: cover
130: base
134: support member
R: Reticle
102: dedicated external pod
150: outer cover
151: external base
153 : Horseshoe Hold-Down Rib
154: hold-down column
160: external base
161: coupling pin

Claims (29)

a base having a plurality of support members each configured to support a corner of the reticle and extending upward to form a pair of limiting blocks each positioned on two sides of the corner; and
a cover having a plurality of elastic hold-down devices respectively corresponding to the plurality of support members;
each said resilient hold-down device comprising at least one resilient arm acting on a corner of a reticle supported by said support member;
A reticle storage pod wherein the pair of restriction blocks limit horizontal movement of the resilient arms when the cover covers the base for receiving the reticle. According to claim 1,
The support member has a pair of inclined surfaces, the pair of inclined surfaces respectively engaging lower edges on opposite sides of the corner. According to claim 1,
The elastic hold-down device includes a body and a pair of elastic arms extending in different directions from the body, each elastic arm having a limiting portion and an inclined surface extending from the limiting portion, wherein the pair of elastic arms The two bevels of the reticle storage pod each engage the upper edges of the two sides of the corner. 4. The method of claim 3,
A pair of limiting blocks is a reticle storage pod that limits the two limits of a pair of resilient arms. 4. The method of claim 3,
The two inclined surfaces of the pair of resilient arms extend away from the restriction and engage with each other. an inner pod comprising a cover, a base and a securing device, wherein the cover and the base engage each other to define a storage space, the securing device configured to secure a reticle to the storage space; and
an outer pod comprising an outer cover and an outer base, wherein the outer cover and the outer base are engaged with each other and receiving the inner pod;
The outer cover has a flat top surface and a peripheral sidewall extending downwardly from the flat top surface, the peripheral sidewall being provided with at least a pair of handles, the pair of handles not exceeding a height of the flat top surface Reticle storage pod. 7. The method of claim 6,
A reticle storage pod provided with a plurality of coupling pins on the upper surface of the outer base for supporting the base of the inner pod. 7. The method of claim 6,
A reticle storage pod wherein the outer cover is provided with at least one hold-down device acting on the cover to secure the inner pod. 9. The method of claim 8,
The hold-down device is a reticle storage pod, a hold-down column acting on the cover of the inner pod. 10. The method of claim 9,
The hold-down device includes at least one support member provided on the base and at least one resilient hold-down device provided corresponding to the support member on the cover, wherein when the outer cover and the outer base are engaged to receive the inner pod, the elastic A reticle storage pod in which a hold-down column applies pressure to the resilient hold-down device such that the hold-down device holds the reticle. 9. The method of claim 8,
The hold-down device is a hold-down rib, the hold-down rib pressing the upper surface of the cover of the inner pod when the outer cover and the outer base are engaged to receive the inner pod. 12. The method of claim 11,
A reticle storage pod, wherein a recess is formed in the upper surface of the cover at a position corresponding to the hold-down rib so that the hold-down rib presses the corresponding recess when the outer cover and the outer base are coupled to receive the inner pod. 13. The method of claim 12,
The hold-down ribs press against corresponding recesses to securely position and engage the base and cover reticle storage pods. 7. The method of claim 6,
The fixing device includes at least one support member provided on the base, and at least one reticle retainer provided corresponding to the support member on the cover, wherein the reticle retainer includes at least one resilient arm, the cover and the base are coupled to each other. A reticle storage pod wherein the support member supports a corner of the reticle and the resilient arm of the reticle retainer engages the corner to thereby secure the reticle when positioned to receive the reticle. an inner pod configured to be received in an outer pod, wherein a plurality of securing devices are provided on an inner surface of the outer pod, wherein the inner pod includes a cover, a base, and a plurality of securing devices, the cover and the base being coupled to each other; defining a storage space, wherein the securing device is configured to secure a reticle for storage in the storage space;
A plurality of recesses are formed in the upper surface of the cover at positions respectively corresponding to the plurality of hold-down devices, and when the inner pod is accommodated in the outer pod, the recesses of the cover are connected to the hold-down device. A reticle storage pod each engaged to obtain a holding force for securing and positioning the inner pod, further improving the securing of the reticle by the securing device. 16. The method of claim 15,
A reticle storage pod wherein the recess has a lower surface and a peripheral side surrounding the lower surface, the peripheral side having an outline, and a cover exposing the securing device on the lower surface below the recess. 17. The method of claim 16,
The hold-down device is a hold-down rib having an outline corresponding to the recess, and when the inner pod is received in the outer pod, the hold-down rib presses the lower surface of the recess accordingly. an outer cover and an outer base, wherein the outer cover and the outer base are engaged with each other to safely receive one of a structurally different first inner pod and a second inner pod, wherein the first inner pod and the second inner pod are each is configured to hold a reticle,
The outer cover is provided with at least one first hold-down device and a second hold-down device, wherein the first hold-down device and the second hold-down device are connected to the cover of the first inner pod and the second hold-down device. A reticle storage pod configured to each act on the cover of the inner pod. 19. The method of claim 18,
The first hold-down device and the second hold-down device extend from the lower surface of the outer cover to different heights, respectively, so that the first hold-down device and the second hold-down device correspond to the cover of the first inner pod. and a reticle storage pod each engageable with another corresponding structure of the cover of the second inner pod. 19. The method of claim 18,
The first hold-down device is a hold-down column, the second hold-down device is a hold-down rib having a horseshoe outline, and the hold-down column is a reticle storage located on the inner surface of the horseshoe outline of the hold-down rib. ford. 21. The method of claim 20,
A cover of the first inner pod is provided with an elastic hold-down device at a position corresponding to the first hold-down device, and the elastic hold-down device is configured to hold a hold-down column when the first inner pod is accommodated in the outer pod. A reticle storage pod for pressing the hold-down pin to secure the reticle received in the first inner pod. 22. The method of claim 21,
The resilient hold-down device includes a cap limiting a hold-down pin, wherein the horseshoe outline of the hold-down rib limits horizontal movement of the cap when the first inner pod is received in the outer pod. 21. The method of claim 20,
The cover of the second inner pod is provided with a recess at a position corresponding to the second hold-down device, the recess having a lower surface and a peripheral side surrounding the lower surface, the peripheral side having a hold-down rib A reticle storage pod having a horseshoe outline corresponding to , wherein the hold-down rib presses against the lower surface of the recess when the second inner pod is received in the outer pod, the hold-down rib limiting horizontal movement of the cover. A method of securing a reticle applied to a reticle storage pod to secure a reticle, the method comprising:
providing, on the base of the reticle storage pod, a plurality of support members each extending upwardly to form a pair of limiting blocks;
providing, on the cover of the reticle storage pod, a plurality of resilient hold-down devices respectively corresponding to the plurality of support members and each having at least one resilient arm; and
Each support member supports a corner of the reticle and a resilient arm of each resilient hold-down device acts on a corresponding corner, and a pair of limiting blocks engages a base and a base for receiving the reticle to limit horizontal movement of the resilient arms. A method of securing a reticle comprising engaging a cover. 25. The method of claim 24,
A method of securing a reticle in which a pair of restriction blocks are each positioned on either side of a corner. 25. The method of claim 24,
A method of securing a reticle, wherein the resilient hold-down device includes a body and a pair of resilient arms, each resilient arm having a restriction portion and an inclined surface extending from the restriction portion. 27. The method of claim 26,
A reticle fixing method comprising the step of respectively coupling two inclined surfaces of a pair of elastic arms to upper edges of both sides of a corner when the cover and the base are coupled to receive the reticle. 27. The method of claim 26,
A reticle fixing method in which a pair of resilient arms extend in different directions from the body. 27. The method of claim 26,
A reticle fixing method in which distal ends of a pair of resilient arms are coupled to each other.

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