KR20220114068A - Seal member, and pipe joint - Google Patents

Abstract

The inner ring 4 of the pipe joint 1 has a cylindrical body portion 5 having a communication hole 5a for communicating the flow passage holes 2c and 8a of the joint body 2 and the tube 8, An annular primary seal portion 11 protruding from the inner diameter of the axial outer end of the body portion 5 to the outer side in the axial direction and press-fitted into the annular primary seal groove 2d formed in the joint body 2 is provided. . The primary seal part 11 has a flat surface 11c extending inward from the outer diameter end 11b of the axial direction while being formed to taper from the inner end in the axial direction toward the outer end in the axial direction when viewed from the cut surface in the axial direction. ) has

Description

Seal member, and pipe joint

The present invention relates to a seal member, and a pipe joint.

In the manufacturing process of various technical fields such as semiconductor manufacturing, medical/pharmaceutical manufacturing, and food processing and chemical industry, in the piping path through which a fluid such as a chemical solution, high-purity solution, ultrapure water, or cleaning solution flows, flow holes formed in two fluid devices are removed. As a connection structure to connect, the pipe joint made of synthetic resin is employ|adopted, for example. As such a pipe joint, a joint body mounted on the outer peripheral side of the tip of the tube (pipe), a union nut mounted on the outer peripheral side of the joint body, and an inner ring mounted on the inner peripheral side of the tip of the tube (pipe) ring) is known (for example, refer patent document 1).

The inner ring has a cylindrical body portion having a communication hole communicating with the flow passage holes, and an annular primary formed by protruding from the inner diameter side of the axial direction outer end portion of the main body portion to the axial direction outer side. It has a seal part and an annular secondary seal part formed by protruding outward in the axial direction from the outer diameter of the outer end of the body in the axial direction. The primary and secondary seals are press-fitted into the annular primary and secondary sealing grooves formed in the joint body. Thereby, the sealing performance between the joint body and the inner ring is ensured, and the fluid is prevented from leaking to the outside.

Japanese Patent Laid-Open No. 2018-168947

The shape of the cut surface of the primary seal part in the pipe joint is formed to gradually taper from the inner end in the axial direction to the outer end in the axial direction, and the outer end of the primary seal part in the axial direction is sharply formed. The thickness in the radial direction is the thinnest at the outer end in the axial direction. For this reason, when the primary seal part is press-fitted into the primary seal groove, the outer end of the primary seal part in the axial direction may be deformed such that it falls (protrudes) to the inside diameter (communication hole side) due to insufficient strength. When such a collapse occurs, the surface pressure between the contact surfaces of the axial direction outer end of the primary seal portion and the primary seal groove is insufficient, so that the fluid enters between these contact surfaces. Then, as the fluid remains between the contact surfaces, the displacement of the fluid flowing through the pipe path is lowered, and adverse effects such as requiring time for flushing the pipe path occur.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a seal member and a pipe joint capable of suppressing the axial outer end of the primary seal portion from falling inward in diameter.

(1) The seal member of the present invention is a seal member for sealingly connecting flow passage holes respectively formed in two fluid devices, and includes a cylindrical body portion having a communication hole communicating the flow passage holes, and the body portion outside the axial direction. an annular primary seal part protruding axially outward from the inner diameter of the end and press-fitted into an annular primary seal groove formed at a connection end of the flow path hole of one of the fluid devices; an annular secondary seal part protruding from the outside in the axial direction and press-fitted into an annular secondary seal groove formed outside the diameter of the primary seal groove in one of the fluid devices; It has a flat surface extending from the radially outer end of the axial direction outer end toward the inner diameter while being formed to be tapered from the axial inner end toward the axial outer end when viewed in cut.

According to the seal member of the present invention, the primary seal portion formed to be tapered from the inner end in the axial direction toward the outer end in the axial direction has a flat surface extending inward from the outer end in the axial direction to the outer end in the axial direction. The thickness in the radial direction at the outer end in the direction can be made thicker than before. As a result, the strength at the axial outer end of the primary seal is increased compared to the conventional one, so that when the primary seal is press-fitted into the primary seal groove, the axial outer end of the primary seal is prevented from collapsing inside the diameter (communication hole side). can be suppressed As a result, since the surface pressure between the contact surfaces of the axial direction outer end of the primary seal part and the primary seal groove becomes higher than before, fluid intrusion between these contact surfaces can be suppressed.

(2) The inner circumferential surface of the primary seal portion is preferably inclined with respect to the inner circumferential surface of the body portion so that the diameter gradually expands from the inner end in the axial direction toward the outer end in the axial direction.

In this case, when the primary seal part is press-fitted into the primary seal groove, it can be suppressed that the inner peripheral surface of the primary seal part protrudes more in diameter than the inner peripheral surface of the main body part even if the primary seal part collapses in diameter. Thereby, it can suppress that the flow of the fluid in the communication hole of a body part is inhibited by the inner peripheral surface of a primary seal part.

(3) The primary seal portion preferably has a chamfer formed at a corner formed by the inner peripheral surface of the primary seal portion and the flat surface.

In this case, even if the fluid penetrates into the pit formed between the corner part of the primary seal part and the primary seal groove, the fluid in the pit easily flows toward the communication hole by the chamfer, so that the residual fluid in the pit is suppressed. can

(4) Diameter of the outer end in the axial direction of the primary seal The radial dimension from the outer end to the inner peripheral surface of the secondary seal is preferably larger than the thickness in the radial direction at the outer end in the axial direction of the primary seal.

In this case, due to the formation of a flat surface at the axial outer end of the primary seal part, the thickness portion in the radial direction of the fluid device disposed between the primary seal part and the secondary seal part (thickness between the primary seal groove and the secondary seal groove) portion) can be prevented from becoming too thin. As a result, it is possible to suppress a decrease in the contact surface pressure between the secondary seal part and the secondary seal groove due to the lack of strength in the thickness part, so it is possible to suppress a decrease in the sealing performance due to the secondary seal part and the secondary seal groove. .

(5) The thickness dimension in the radial direction at the outer end of the primary seal part in the axial direction is preferably 10% or more and 30% or less of the thickness dimension in the radial direction at the inner end of the primary seal part in the axial direction.

In this case, by making the radial thickness dimension at the axial outer end of the primary seal part 10% or more with respect to the radial thickness dimension at the axial inner end of the primary seal part, strength is further increased. Thereby, when press-fitting a primary seal part into a primary seal groove, it can further suppress that the axial direction outer end of a primary seal part falls in diameter inside. As a result, since the surface pressure between the contact surfaces of the axial direction outer end of the primary seal part and the primary seal groove becomes higher, it is possible to effectively suppress the intrusion of fluid between these contact surfaces.

In addition, by setting the thickness dimension in the radial direction at the axial outer end of the primary seal part to 30% or less of the thickness dimension in the radial direction at the axial inner end of the primary seal part, it is disposed between the primary seal part and the secondary seal part It is possible to prevent the thickness portion (thickness portion between the primary seal groove and the secondary seal groove) in the radial direction of the fluid device from becoming too thin. As a result, it is possible to further suppress a decrease in the contact surface pressure between the secondary seal part and the secondary seal groove due to the lack of strength in the thickness part, so it is possible to effectively suppress the decrease in the seal performance due to the secondary seal part and the secondary seal groove have.

(6) The pipe joint of the present invention has a male thread part formed on the outer periphery, a joint body having a flow path hole therein, a union nut having a female thread part fastened to the male thread part formed on the inner periphery, and the joint body in the axial direction outside The end is connected, and the bulging part press-fitted into the tip of the tube has an inner ring formed to protrude from the outer periphery of the inner end in the axial direction, wherein the inner ring is a communication hole for communicating with the flow passage holes respectively formed in the joint body and the tube. An annular primary body part having a cylindrical shape having A seal portion and an annular secondary seal portion protruding from the outer diameter of the axial outer end of the main body to the outer in the axial direction, and press-fitted into the annular secondary seal groove formed outside the diameter of the primary seal groove in the joint body, , The primary seal part has a flat surface extending from the outer diameter of the axial end toward the inner diameter while being formed to be tapered from the inner end in the axial direction toward the outer end in the axial direction when viewed from the cut surface in the axial direction.

According to the pipe joint of the present invention, the primary seal portion formed so as to be tapered from the inner end in the axial direction toward the outer end in the axial direction in the inner ring has a flat surface extending from the outer end in the axial direction toward the inner diameter. The thickness in the radial direction at the outer end of the seal portion in the axial direction can be made thicker than before. As a result, the strength at the axial outer end of the primary seal is increased compared to the conventional one, so that when the primary seal is press-fitted into the primary seal groove, the axial outer end of the primary seal is prevented from collapsing inside the diameter (communication hole side). can be suppressed As a result, since the surface pressure between the contact surfaces of the axial direction outer end of the primary seal part and the primary seal groove becomes higher than before, fluid intrusion between these contact surfaces can be suppressed.

ADVANTAGE OF THE INVENTION According to this invention, it can suppress that the axial direction outer end part of a primary seal part falls in diameter inside.

1 is a cross-sectional view in the axial direction of a pipe joint according to a first embodiment of the present invention.
2 is a cross-sectional view in the axial direction showing the inner ring of the pipe joint.
Fig. 3 is an enlarged cross-sectional view of a main part of Fig. 2;
4 is a cross-sectional view in the axial direction of a flow path joint structure in which a seal member according to a second embodiment of the present invention is used.
5 is a cross-sectional view in the axial direction showing the gasket of the flow path joint structure.
Fig. 6 is an enlarged cross-sectional view of a main part of Fig. 5;

Next, preferred embodiment of the present invention will be described with reference to the accompanying drawings.

[First embodiment]

<Entire composition of pipe joints>

1 is a cross-sectional view in the axial direction of a pipe joint according to a first embodiment of the present invention. In FIG. 1 , the pipe joint 1 is used, for example, in a piping path through which a chemical (fluid) used in a semiconductor manufacturing apparatus flows. The pipe joint (1) includes a joint body (2), a union nut (3), and an inner ring (4). Hereinafter, in the present embodiment, for convenience, the right side in FIG. 1 is referred to as an axial outside, and the left side in FIG. 1 is referred to as an axial inside ( FIGS. 2 and 3 are the same).

The inner ring 4 is, for example, polyvinyl chloride (PVC), polypropylene (PP), polyethylene (PE), or a fluororesin (perfluoroalkoxyalkane (PFA), polytetrafluoroethylene (PTFE), or a synthetic resin material such as polyvinylidene fluoride (PVDF)). The inner ring 4 includes a main body 5 formed in a cylindrical shape, a bulge 6 formed at an axial inner end of the main body 5, and a connecting portion formed at an axial outer end of the main body 5 ( 7) is provided.

The bulging portion 6 is formed to protrude outward in diameter from the inner end in the axial direction of the body portion 5 . The bulging part 6 is press-fitted into the tip part of the tube 8 which consists of synthetic resin material (PFA etc.), and the said tip part diameter-expands. The connecting portion 7 is connected to the end of the joint body 2 and seals the connecting portion. In addition, the structure of the connection part 7 is mentioned later. A communication hole 5a is formed in the body portion 5 to communicate with the flow passage hole 2c formed inside the joint body 2 and the flow passage hole 8a formed inside the tube 8 .

The joint body 2 is formed in a cylindrical shape by, for example, a synthetic resin material of PVC, PP, PE, or a fluororesin (such as PFA or PTFE). The inner diameter of the joint body 2 is set to have substantially the same dimensions as the inner diameter of the main body 5 of the inner ring 4 so as not to impede the movement of the chemical solution. At the end of the joint body 2, a mouth part 2a is formed. An inner ring 4 press-fitted into the tip of the tube 8 is fitted to the inner periphery of the mouthpiece 2a. Thereby, the end of the joint body 2 is mounted on the outer periphery of the front end of the tube 8 . A male threaded portion 2b is formed on the outer periphery of the receiving mouth portion 2a.

The joint body 2 has an annular primary seal groove 2d and an annular secondary seal groove 2e formed inside the diameter of the receiver 2a. The primary seal groove 2d has a tapered shape cut out so that the diameter gradually expands from the outer end in the axial direction toward the inner end in the axial direction on the circumferential surface of the connection end of the flow path hole 2c. The secondary seal groove 2e is formed in a cylindrical annular shape outside the diameter of the primary seal groove 2d in the joint body 2 .

The union nut 3 is formed in a cylindrical shape by, for example, a synthetic resin material of PVC, PP, PE, or fluororesin (PFA, PTFE, etc.). The union nut 3 has a female threaded portion 3a formed on the inner periphery of the outer end in the axial direction, and a pressing portion 3b formed to protrude inward from the inner end in the axial direction. The female threaded portion 3a is fastened to the male threaded portion 2b of the joint body 2 . By tightening, the union nut 3 is mounted on the joint body 2, and the inner end of the pressing part 3b in the axial direction is inflated outward in diameter by the bulging part 6 of the inner ring 4 The outer peripheral surface of the tube (8) is pressed.

With the above configuration, by tightening the female threaded part 3a of the union nut 3 to the male threaded part 2b of the joint body 2, the receiving port 2a of the joint body 2 and the tip of the tube 8 are It is possible to prevent the tube 8 from escaping while being able to secure the sealing performance at the mounting portion of the .

<Seal composition of inner ring>

2 is a cross-sectional view in the axial direction showing the inner ring 4 . 1 and 2 , the connecting portion 7 of the inner ring 4 includes an annular primary seal portion 11 and an annular secondary seal portion 12 .

The primary seal portion 11 is formed to protrude outward in the axial direction from the inner diameter of the outer end of the body portion 5 in the axial direction. In addition, the primary seal part 11 is formed so that the tip may taper toward the axial direction outer end from an axial direction inner end when seen from the cut surface in an axial direction. The primary seal part 11 is press-fitted into the primary seal groove 2d of the joint body 2 .

The secondary seal portion 12 is formed to protrude outward in the axial direction from the outer diameter of the outer end of the body portion 5 in the axial direction. The secondary seal part 12 is formed in a cylindrical annular shape, and is press-fitted into the secondary seal groove 2e of the joint body 2 .

With the above configuration, the primary seal part 11 and the secondary seal part 12 of the inner ring 4 are press-fitted into the primary seal groove 2d and the secondary seal groove 2e of the joint body 2, respectively, The sealing performance of the connection part of the inner ring 4 and the joint body 2 is securable. Therefore, the inner ring 4 functions as a sealing member which seals and connects the flow path hole 8a of the tube (fluid device) 8 and the flow path hole 2c of the joint body (fluid device) 2 .

<Configuration of the primary seal part>

Fig. 3 is an enlarged cross-sectional view of a main part of Fig. 2; In FIG. 3, the outer peripheral surface 11a of the primary seal part 11 is a tapered surface formed so that the diameter gradually expands from the axial direction outer end toward the axial inner end in accordance with the shape of the primary seal groove 2d (see FIG. 1). have.

The primary seal part 11 has a flat surface 11c extending from the outer diameter end 11b of the outer end in the axial direction toward the inner diameter. Here, "extending toward the inner diameter" means not only when extending inward from the outer diameter end 11b along a direction orthogonal to the axis C1 of the inner ring 4, but also in the direction orthogonal to It is meant to include a case where it extends inward in a diameter along a slightly inclined direction.

When the flat surface 11c extends from the outer diameter end 11b to the inner diameter along a direction inclined outward in the axial direction with respect to the orthogonal direction, the inclination angle of the flat surface 11c with respect to the orthogonal direction is It is preferable that it is 1 degree or more and 10 degrees or less.

When the flat surface 11c extends radially inward from the radial outer end 11b along a direction inclined inward in the axial direction with respect to the orthogonal direction, the inclination angle of the flat surface 11c with respect to the orthogonal direction is preferably 1° or more and 20° or less.

As described above, since the primary seal portion 11 formed to be tapered from the axial inner end toward the axial outer end has a flat surface 11c at its axial outer end, at the axial outer end of the primary seal portion 11 The thickness in the radial direction (thickness dimension L2 to be described later) can be made thicker than before. Thereby, since the strength at the outer end of the primary seal 11 in the axial direction is increased compared to the prior art, when the primary seal 11 is press-fitted into the primary seal groove 2d, It can suppress that an edge part falls in diameter inside (communication hole 5a side). As a result, since the surface pressure between the contact surfaces of the axial direction outer end of the primary seal part 11 and the primary seal groove 2d becomes higher than before, it can suppress that a chemical|medical solution penetrates between these contact surfaces.

The inner circumferential surface 11d of the primary seal portion 11 is inclined with respect to the inner circumferential surface 5b of the body portion 5 so that the diameter gradually expands from the inner end in the axial direction toward the outer end in the axial direction. The inner peripheral surface 11d of the primary seal part 11 in this embodiment is the body part 5 even if the primary seal part 11 collapses in diameter when the primary seal part 11 is press-fitted into the primary seal groove 2d. ) is inclined to such an extent that it does not protrude inward in diameter than the inner peripheral surface 5b (refer to FIG. 1).

Thereby, when the primary seal part 11 is press-fitted into the primary seal groove 2d, even if the primary seal part 11 falls in diameter inside, the inner peripheral surface 11d of the primary seal part 11 is the inner peripheral surface of the main body part 5. It can suppress that it protrudes in diameter inside rather than (5b). Thereby, it can suppress that the flow of the chemical|medical solution in the communication hole 5a of the main body part 5 is inhibited by the inner peripheral surface 11d of the primary seal part 11. FIG. On the other hand, the inner peripheral surface 11d is inclined in a curved shape when viewed from a cut plane, but may be inclined linearly.

The primary seal portion 11 further has a chamfered portion 11e formed at a corner formed by the flat surface 11c and the inner circumferential surface 11d. The chamfer 11e of this embodiment is R-chamfered, for example. Thereby, as shown in FIG. 1, when the primary seal part 11 is press-fitted into the primary seal groove 2d, between the said edge part of the primary seal part 11 and the diameter inner end of the primary seal groove 2d Even if the chemical liquid penetrates into the pit 9 to be formed, the chemical liquid in the pit 9 easily flows to the communication hole 5a side along the chamfer 11e. As a result, it can suppress that the chemical|medical solution remains in the pit 9 . In addition, C-chamfering may be given to the chamfer 11e.

Returning to FIG. 3 , the radial dimension L1 from the radial outer end 11b of the axial outer end of the primary seal part 11 to the inner peripheral surface 12a of the secondary seal part 12 is that of the primary seal part 11 . It is set to be larger than the thickness dimension L2 in the radial direction at the outer end in the axial direction. Here, the "thickness dimension in the radial direction" at the outer end in the axial direction means from the outer end 11b in the axial direction to the inner end in the diameter (in this embodiment, the extension line of the flat surface 11c and the inner peripheral surface of the primary seal part 11 in the axial direction). It means the radial dimension up to the intersection of the extension lines in (11d)).

Accordingly, due to the formation of the flat surface 11c at the axial outer end of the primary seal part 11, the primary seal part 11 and the secondary seal part 12 in the radial direction of the joint body 2 disposed between the It is possible to prevent the thick portion 2f (see FIG. 1) from becoming too thin. As a result, it is possible to suppress a decrease in the contact surface pressure between the secondary seal part 12 and the secondary seal groove 2e due to the lack of strength of the thick portion 2f, so the secondary seal part 12 and the secondary seal groove ( It can suppress that the sealing performance by 2e) falls.

The thickness dimension L2 in the radial direction at the outer end of the primary seal 11 in the axial direction is 10% or more and 30% of the thickness L3 in the radial direction at the inner end of the primary seal 11 in the axial direction. It is set to or less (preferably 10% or more and 23% or less, more preferably 10% or more and 20% or less).

By setting the thickness dimension L2 to 10% or more with respect to the thickness dimension L3, the strength at the axial outer end of the primary seal portion 11 is further increased. Thereby, when press-fitting the primary seal part 11 into the primary seal groove 2d, it can further suppress that the axial direction outer end of the primary seal part 11 falls in diameter inside. As a result, since the surface pressure between the contact surfaces of the axial direction outer end of the primary seal part 11 and the primary seal groove 2d becomes higher, it can suppress effectively that a fluid penetrates between these contact surfaces.

By making the thickness dimension L2 into 30% or less with respect to the thickness dimension L3, the thickness part 2f in the radial direction of the joint body 2 arrange|positioned between the primary seal part 11 and the secondary seal part 12. This excessively thinning can be prevented. As a result, since it is possible to further suppress a decrease in the contact surface pressure between the secondary seal part 12 and the secondary seal groove 2e due to the insufficient strength of the thickness part 2f, the secondary seal part 12 and the secondary seal groove 2e It can suppress effectively that the sealing performance by (2e) falls.

[Second embodiment]

<The overall composition of the flow path joint structure>

4 is a cross-sectional view in the axial direction of a flow path joint structure in which a seal member according to a second embodiment of the present invention is used. In FIG. 4 , the flow path joint structure 20 connects the flow path holes 21c and 21c respectively formed in two adjacent fluid devices 21 and 21 in a piping path through which a chemical solution used in a semiconductor manufacturing apparatus flows, for example. It is used as a connection structure to Each fluid device 21 of this embodiment consists of a pump, a valve, an accumulator, a filter, a flowmeter, a pressure sensor, or a piping block, etc.

The flow path joint structure 20 includes a gasket 24 , and an annular primary seal groove 21d and an annular secondary seal groove 21e respectively formed in each fluid device 21 . The gasket 24 is a seal member for sealingly connecting the flow passage holes 21c and 21c of the two fluid devices 21 and 21 . Hereinafter, in the present embodiment, the direction from the axial center of the gasket 24 to both sides in the axial direction is referred to as the axial outer side, and the direction from the axial direction both sides of the gasket 24 toward the axial center is referred to as the axial inner side.

The primary seal groove 21d of each fluid device 21 has a tapered shape cut out so that the diameter gradually expands from the outer end in the axial direction toward the inner end in the axial direction on the circumferential surface of the connection end of the flow path hole 21c. The secondary seal groove 21e of each fluid device 21 is formed in a cylindrical annular shape outside the diameter of the primary seal groove 21d in each fluid device 21 .

<Configuration of gasket>

5 is a cross-sectional view in the axial direction showing the gasket 24 . 4 and 5 , the gasket 24 includes a body part 25 formed in a cylindrical shape, a pair of annular primary seal parts 31 , and a pair of annular secondary seal parts 32 . .

A communication hole 25a for communicating the flow passage holes 21c and 21c of the two fluid devices 21 and 21 is formed in the body portion 25 .

The pair of primary seal parts 31 are respectively formed to protrude outward in the axial direction from the inner diameter of the outer ends of both sides in the axial direction in the main body 25 . Each of the primary seal parts 31 is formed to taper from the inner end in the axial direction to the outer end in the axial direction when viewed from the cut surface in the axial direction. Each primary seal part 31 is press-fitted into the primary seal groove 21d of the corresponding fluid device 21 .

The pair of secondary seal parts 32 are formed to protrude outward in the axial direction from the outer diameter of the outer ends of both sides of the main body 25 in the axial direction, respectively. Each secondary seal portion 32 is formed in a cylindrical annular shape, and is press-fitted into the secondary seal groove 21e of the corresponding fluid device 21 .

With the above configuration, the pair of primary seal parts 31 and the pair of secondary seal parts 32 of the gasket 24 form the primary seal groove 21d and the secondary seal groove 21e of each fluid device 21 . Since it is press-fitted into the , it is possible to ensure the sealing performance of the connecting portion of the flow passage holes 21c and 21c in the two fluid devices 21 and 21 .

<Configuration of the primary seal part>

Fig. 6 is an enlarged cross-sectional view of a main part of Fig. 5; In FIG. 6, the outer peripheral surface 31a of the primary seal part 31 is a tapered surface formed so that the diameter gradually expands from the axial direction outer end toward the axial inner end in accordance with the shape of the primary seal groove 21d (see FIG. 4). have.

The primary seal part 31 has a flat surface 31c extending from the outer diameter end 31b of the outer end in the axial direction toward the inner diameter. Here, "extending toward the inner diameter" means not only the case of extending inward from the outer diameter end 31b along a direction orthogonal to the axis C2 of the gasket 24, but also in the direction orthogonal to the case It is meant to include a case where it extends inwardly in a diameter along a slightly inclined direction. When the flat surface 31c extends radially inward from the outer diameter end 31b along a direction inclined with respect to the orthogonal direction, the inclination angle of the flat surface 31c with respect to the orthogonal direction is within 15° It is preferable to be

As described above, since the primary seal part 31 formed to be tapered from the axial inner end toward the axial outer end has a flat surface 31c at its axial outer end, at the axial outer end of the primary seal part 31 The thickness in the radial direction (thickness dimension L12 to be described later) can be made thicker than before. As a result, the strength at the outer end of the primary seal 31 in the axial direction is increased compared to the prior art. It can suppress that an edge part falls in diameter inside (communication hole 25a side). As a result, since the surface pressure between the contact surfaces of the axial direction outer end of the primary seal part 31 and the primary seal groove 21d is higher than before, it can suppress that a chemical|medical solution penetrates between these contact surfaces.

The inner peripheral surface 31d of the primary seal part 31 is inclined with respect to the inner peripheral surface 25b of the body part 25 so that the diameter gradually expands from the inner end in the axial direction toward the outer end in the axial direction. The inner peripheral surface 31d of the primary seal part 31 in this embodiment is the main body part 25 even if the primary seal part 31 collapses in diameter when the primary seal part 31 is press-fitted into the primary seal groove 21d. It is inclined to such an extent that it does not protrude inward in diameter rather than the inner peripheral surface 25b of (refer FIG. 4).

Accordingly, when the primary seal part 31 is press-fitted into the primary seal groove 21d, even if the primary seal part 31 falls inside the diameter, the inner peripheral surface 31d of the primary seal part 31 is the inner peripheral surface of the body part 25 ( 25b) can be suppressed from protruding to the inner diameter. Thereby, it can suppress that the flow of the chemical|medical solution in the communication hole 25a of the body part 25 is inhibited by the inner peripheral surface 31d of the primary seal part 31. As shown in FIG. On the other hand, the inner peripheral surface 31d is inclined in a curved shape when viewed from a cut plane, but may be inclined linearly.

Diameter of the outer end in the axial direction of the primary seal part 31 The radial dimension L11 from the outer end 31b to the inner peripheral surface 32a of the secondary seal part 32 is the diameter at the outer end in the axial direction of the primary seal part 31 It is set larger than the thickness dimension L12 in the direction. Here, the "thickness dimension in the radial direction" at the outer end in the axial direction means the radial dimension from the outer end 31b in the axial direction to the inner end 31f in the axial direction of the primary seal part 31 .

Thereby, due to the formation of the flat surface 31c at the outer end of the primary seal part 31 in the axial direction, the fluid device 21 disposed between the primary seal part 31 and the secondary seal part 32 in the radial direction. It is possible to prevent the thickness portion 21f (see FIG. 4) from becoming too thin. As a result, it is possible to suppress a decrease in the contact surface pressure between the secondary seal part 32 and the secondary seal groove 21e due to the insufficient strength of the thick portion 21f, so the secondary seal part 32 and the secondary seal groove ( It can suppress that the sealing performance by 21e) falls.

The thickness dimension L12 in the radial direction at the outer end in the axial direction of the primary seal part 31 is 5% or more and 30% of the thickness dimension L13 in the radial direction at the inner end in the axial direction of the primary seal part 31 It is preferable that it is set to less than, and it is more preferable that it is set to 10% or more and 20% or less.

By setting the thickness dimension L12 to 5% or more with respect to the thickness dimension L13, the strength at the axial outer end of the primary seal part 31 is further increased. Thereby, when press-fitting the primary seal part 31 into the primary seal groove 21d, it can further suppress that the axial direction outer end of the primary seal part 31 falls in diameter inside. As a result, since the surface pressure between the contact surfaces of the axial direction outer end of the primary seal part 31 and the primary seal groove 21d becomes higher, it is possible to effectively suppress the intrusion of fluid between these contact surfaces.

By setting the thickness dimension L12 to 30% or less with respect to the thickness dimension L13 , the thickness portion 21f in the radial direction of the fluid device 21 disposed between the primary seal part 31 and the secondary seal part 32 . This excessively thinning can be prevented. As a result, since it is possible to further suppress a decrease in the contact surface pressure between the secondary seal part 32 and the secondary seal groove 21e due to the lack of strength of the thick portion 21f, the secondary seal part 32 and the secondary seal groove It can suppress effectively that the sealing performance by (21e) falls.

[Etc]

In the primary seal part 31 of 2nd Embodiment, similarly to the primary seal part 11 of 1st Embodiment, a chamfer may be formed in the edge part which the flat surface 31c and the inner peripheral surface 31d make.

In addition, the seal member of the present invention can be applied in the field of liquid crystal/organic EL, the field of medical/medicine, or the field of automobiles, in addition to the semiconductor manufacturing apparatus.

It should be considered that the embodiment disclosed herein is illustrative in all respects and not restrictive. The scope of the present invention is indicated by the claims, not the above meanings, and it is intended that the meanings equivalent to the claims and all modifications within the scope are included.

1: Pipe joint 2: Joint body (fluid device)
2d: 1st seal groove 2e: 2nd seal groove
3: Union nut 4: Inner ring (seal member)
5: body part 6: bulging part
11: primary seal part 11b: outer end diameter
11c: flat surface 11d: inner peripheral surface
11e: chamfered part 12: secondary seal part
20: flow path joint structure 21: fluid device
21d: primary seal groove 21e: secondary seal groove
24: gasket (seal member) 25: body part
31: primary seal part 31b: outer end diameter
31c: flat surface 31d: inner peripheral surface
32: secondary seal part

Claims (6)

A sealing member for sealingly connecting flow passage holes respectively formed in two fluid devices, the sealing member comprising:
a cylindrical body portion having a communication hole communicating the flow passage holes;
An annular primary seal groove ( The annular primary seal part that is press-fitted into the sealing groove,
An annular secondary seal portion that protrudes from the outer diameter of the axial outer end of the main body to the outer side in the axial direction and is press-fitted into an annular secondary seal groove formed outside the primary seal groove in diameter in one of the fluid devices; do,
The primary seal part has a flat surface extending from the outer diameter end of the axial direction toward the inside diameter while being formed to taper from the inner end in the axial direction to the outer end in the axial direction when viewed from the cut surface in the axial direction, no seal. According to claim 1,
The inner circumferential surface of the primary seal portion is inclined with respect to the inner circumferential surface of the main body portion so that the diameter gradually expands from the axial inner end toward the axial outer end, the seal member. 3. The method of claim 1 or 2,
The primary seal part has a chamfer formed in a corner formed by the inner peripheral surface of the primary seal part and the flat surface, the seal member. 4. The method according to any one of claims 1 to 3,
A seal member, wherein a radial dimension from a radial outer end of the axial outer end of the primary seal portion to an inner peripheral surface of the secondary seal portion is larger than a radial thickness dimension at the axial outer end of the primary seal portion. 5. The method according to any one of claims 1 to 4,
A seal member, wherein the thickness dimension in the radial direction at the axial outer end of the primary seal part is 10% or more and 30% or less of the thickness dimension in the radial direction at the axial inner end of the primary seal part. A joint body having a male threaded portion formed on the outer periphery and having a flow path hole formed therein;
And a union nut formed on the inner periphery of the female screw portion tightened to the male screw portion,
An axial-direction outer end is connected to the joint body, and an inner ring formed by a bulging portion press-fitted into the front end of the tube protrudes from the outer periphery of the axial-direction inner end portion,
The inner ring is
a cylindrical body portion having a communication hole communicating with the flow passage holes respectively formed in the joint body and the tube;
Annular that protrudes from the inner diameter of the outer end in the axial direction of the main body to the outer side in the axial direction and is press-fitted into an annular primary sealing groove formed in the connection end of the flow path hole of the joint body The primary seal part of
An annular secondary seal portion protruding from the outer diameter of the axial outer end of the main body to the outer diameter of the joint body and press-fitted into the annular secondary seal groove formed outside the primary seal groove in diameter in the joint body;
The primary seal part has a flat surface extending from the outer diameter end of the axial end toward the inside diameter while being tapered from the inner end in the axial direction toward the outer end in the axial direction when viewed from the cut surface in the axial direction.

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