KR20220096901A - Precision displacement motion actuator for ulatra-high vacuum - Google Patents

Abstract

The precise displacement driving actuator for ultra-high vacuum of the present disclosure comprises: a driving unit including a driving motor; a connection unit including a ball screw and a coupling connecting the ball screw to a rotation shaft of the driving motor; a variable unit including a ball screw nut screwed to the ball screw and linearly movable on the ball screw, and an external coupling end fixed to the ball screw nut; and a housing unit including a motor housing accommodating the driving motor, a connection housing having one end fixed to the motor housing and accommodating the coupling, and a bellows housing which is coupled between the other end of the connection housing and the external coupling end, can be stretched as the external coupling end moves linearly, and accommodates at least a part of the ball screw and the ball screw nut, wherein the housing unit is configured to be sealed from a vacuum outside. The precise displacement driving actuator enables precise displacement driving in an ultra-high vacuum environment while using components used in general atmospheric environments.

Description

Precision displacement actuator for ultra-high vacuum

The present disclosure relates to an actuator for precise displacement driving in an ultra-high vacuum environment.

An actuator for ultra-high vacuum is a device used to control and move a device in an ultra-high vacuum environment, and generally performs a linear or rotational motion, which is a mechanical motion method.

Conventionally, an expensive special motor usable in a vacuum environment is used, or a vacuum internal device is driven through a feed-through for transmitting linear or rotational motion generated in an atmospheric environment to the inside of a vacuum environment.

However, in the existing actuator for precise linear motion applicable in an ultra-high vacuum environment, the selection of applicable main parts such as motors and ball screws is very limited, and these parts are also expensive. In addition, in the case of major parts such as motors and ball screws that can be used in an ultra-high vacuum environment, there were no diversified types due to restrictions on lubricants or materials that could be used, so there was no choice but to limit the construction of a precision miniature actuator for ultra-high vacuum.

In addition, when the device is driven through a feed-through connected between the atmosphere and the vacuum chamber, it is vulnerable to external environmental changes or vibration, so it is difficult to perform precise and stable motion, and there is a difficulty in maintenance due to the links connected to the outside of the vacuum.

Therefore, it is necessary to develop a technology that can be used in an ultra-high vacuum environment using precise and various parts that can be used in an atmospheric environment and can perform precise displacement driving.

One aspect of the embodiment is to provide a precision displacement actuator for ultra-high vacuum capable of precise displacement driving in an ultra-high vacuum environment while applying components usable in a general atmospheric environment as it is.

In addition, another aspect of the embodiment is a precision displacement actuator for ultra-high vacuum, which is small in size and precise, and is manufactured as a module type for easy separation and reassembly, so that it can be applied to various instruments for linear and angular movements and is convenient for maintenance. would like to provide

However, the problems to be solved by the embodiments of the present invention are not limited to the above problems and may be variously expanded within the scope of the technical idea included in the present invention.

A precision displacement driving actuator for ultra-high vacuum according to an embodiment includes a driving unit including a driving motor, a ball screw, and a coupling unit including a coupling connecting the ball screw to a rotating shaft of the driving motor, screwed to the ball screw A variable part including a ball screw nut capable of being linearly driven on the ball screw and an external coupling end fixed to the ball screw nut, and a motor housing accommodating the drive motor, one end fixed to the motor housing and the coupling a connection housing for accommodating it, and a bellows housing coupled between the other end of the connection housing and the external coupling end, the bellows housing being flexible as the external coupling end moves linearly and accommodating at least a portion of the ball screw and the ball screw nut; It may include a housing including a housing part, and the housing part may be configured to be sealed from the outside in a vacuum.

The bellows housing may be coupled to the connection housing and the external coupling end by welding.

The motor housing may further include a feed through which is connected to a side surface of the motor housing so that the inside communicates with each other, and through which a power or signal cable connected to the driving motor is accommodated.

A branch pipe may extend from a side surface of the motor housing, and the feed-through may be connected to the branch pipe via a metal gasket.

The motor housing may include an upper casing accommodating an upper end of the drive motor and a lower casing accommodating a lower end of the drive motor, wherein the upper casing and the lower casing are coupled to each other by welding to be sealed from the outside. .

The upper casing may include a device coupling portion formed of a flat surface on at least a portion of an outer circumferential surface.

In the upper casing, a protrusion wall that can be inserted into the connection housing protrudes from an upper end, and the protrusion wall may be formed to have a step difference from an outer circumferential surface of the upper casing.

It may further include a cross roller bearing or an angular contact bearing mounted on the outside of the coupling coupled to the rotation shaft of the drive motor to support the coupling.

The coupling nut may further include a coupling nut screwed to the outer periphery of the ball screw side of the coupling to fix the inner ring of the crossed roller bearing or the angular contact bearing between the coupling and the coupling.

The motor housing includes a protruding wall protruding inside and stepping into the outer circumferential surface of the motor housing at an upper end portion, wherein the protruding wall is assembled to surround and surround the crossed roller bearing or the angular contact bearing, the crossed roller bearing or the angular contact bearing It may further include a bearing nut coupled to cover the upper edge of the contact bearing and the outer surface of the protruding wall to fix the outer ring of the crossed roller bearing or the angular contact bearing.

An outer circumferential surface of the protruding wall and an inner circumferential surface of the bearing nut may be screwed to each other to be fastened.

An end of the ball screw may include a ball screw stopper having a larger diameter than that of the ball screw.

The external coupling end may include a cylindrical portion extending in a cylindrical shape to be inserted into the bellows housing, and a flange portion extending radially to the outside of the cylindrical portion and fixed to the upper end of the bellows housing.

The ball screw nut includes a cylindrical coupling part having a thread formed therein and screwed to the ball screw, and a support part larger in a radial direction of the coupling part, and the cylindrical part of the external coupling end is the ball screw nut. It can be seated on the support of the coupling and fixed.

The cylindrical portion of the external coupling end may include a space extending deeply in the axial direction so that the ball screw is introduced into the interior.

The external coupling end may further include a protrusion which protrudes in the axial direction of the ball screw to form a step in order to couple with an external device.

A temperature sensor is installed inside the motor housing, and the temperature sensor may transmit a temperature measurement value to the outside through a cable connected through the feed-through.

According to the precise displacement driving actuator for ultra-high vacuum according to the embodiment, it is possible to precisely drive the displacement in the ultra-high vacuum environment while applying the parts usable in the general atmospheric environment as they are.

In addition, it is compact and precise, and it is manufactured in a modular type for easy separation and reassembly, so it is convenient for maintenance.

In addition, when the interior of the actuator according to the embodiment is installed and driven in a vacuum environment while assembled in an atmospheric environment with air, a backlash attenuation effect occurs due to the force to expand in the axial direction by the internal atmospheric pressure.

1 is a perspective view illustrating a precision displacement driving actuator for ultra-high vacuum according to an embodiment.
FIG. 2 is a cross-sectional view taken along line II-II of the precision displacement driving actuator for ultra-high vacuum shown in FIG. 1 .
3 is a cross-sectional view taken along line III-III of the precision displacement driving actuator for ultra-high vacuum shown in FIG. 1 .
4 is an exploded perspective view illustrating a precision displacement driving actuator for ultra-high vacuum according to an embodiment.
5 is an exploded perspective view illustrating a driving motor and a motor housing of an ultra-high vacuum precision displacement driving actuator according to an embodiment.
6 is an exploded perspective view illustrating a coupling and a bearing of a precision displacement driving actuator for ultra-high vacuum according to an embodiment.
7 is an exploded perspective view illustrating a ball screw and a ball screw nut of an ultra-high vacuum precision displacement driving actuator according to an embodiment.
8 is an exploded perspective view illustrating a bellows housing and an external coupling end of an ultra-high vacuum precision displacement driving actuator according to an embodiment.
9 is an exploded perspective view illustrating a feed-through for transmitting motor power and withdrawing a signal line of an ultra-high vacuum precision displacement driving actuator according to an embodiment.
10 is a perspective view illustrating a linear stage equipped with a precision displacement driving actuator for ultra-high vacuum according to an exemplary embodiment.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those of ordinary skill in the art can easily carry out the present invention. In order to clearly explain the present invention in the drawings, parts irrelevant to the description are omitted, and the same reference numerals are given to the same or similar components throughout the specification. In addition, the accompanying drawings are only for easy understanding of the embodiments disclosed in the present specification, and the technical idea disclosed herein is not limited by the accompanying drawings, and all changes included in the spirit and scope of the present invention , should be understood to include equivalents or substitutes.

Terms including an ordinal number such as 1st, 2nd, etc. may be used to describe various elements, but the elements are not limited by the terms. The above terms are used only for the purpose of distinguishing one component from another.

Further, when a part of a layer, film, region, plate, etc. is said to be “on” or “on” another part, it includes not only cases where it is “directly on” another part, but also cases where another part is in between. . Conversely, when we say that a part is "just above" another part, we mean that there is no other part in the middle. In addition, to be "on" or "on" the reference part is located above or below the reference part, and does not necessarily mean to be located "on" or "on" the opposite direction of gravity. .

Throughout the specification, terms such as “comprises” or “have” are intended to designate that a feature, number, step, operation, component, part, or combination thereof described in the specification is present, but one or more other features It should be understood that this does not preclude the existence or addition of numbers, steps, operations, components, parts, or combinations thereof. Therefore, when a part "includes" a certain component, this means that other components may be further included, rather than excluding other components, unless otherwise stated.

In addition, throughout the specification, when referring to "planar", it means when the target part is viewed from above, and "cross-sectional" means when viewed from the side when a cross-section of the target part is vertically cut.

In addition, throughout the specification, when "connected", this does not mean that two or more components are directly connected, but two or more components are indirectly connected through other components, physically connected As well as being electrically connected, or being referred to by different names depending on location or function, it may mean one thing.

1 is a perspective view showing a precision displacement actuator for ultra-high vacuum according to an embodiment, FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 1, and FIG. 3 is a view taken along the line III-III of FIG. It is a cross section. And Figure 4 is an exploded perspective view showing a precision displacement driving actuator for ultra-high vacuum according to an embodiment.

1 to 4, the precision displacement driving actuator 10 for ultra-high vacuum according to the present embodiment (hereinafter, also referred to as 'actuator') is a driving unit including a driving motor 120, a ball screw 145 and the A connection part including a coupling 132 for connecting to the driving motor 120, a variable part including a ball screw nut 146 and an external coupling end 150 fixed thereto, and a driving motor 120, a ball screw ( 145 ), a coupling 132 , and a housing portion accommodating the ball screw nut 146 . Here, the housing part may be configured to be sealed from the outside in a vacuum when the actuator 10 is positioned in a vacuum environment, and the inside of the actuator 10 may be configured to maintain a standby state.

The driving motor 120 includes a rotating shaft 123 , and one end of the ball screw 145 is fixed to the rotating shaft 123 , and as the driving motor 120 rotates, it may rotate together. The ball screw nut 146 may be screwed to the ball screw 145 to be linearly driven on the ball screw 145 as the ball screw 145 rotates. An external coupling end 150 is fixed to the ball screw nut 146 , and the external coupling end 150 may be linearly moved together as the ball screw nut 146 is driven. The external coupling end 150 is configured such that a device or a component to be linearly driven using the actuator 10 is coupled to the outside.

A coupling 132 may be coupled to the rotation shaft 123 of the driving motor 120 by fixing a bolt to a side bolt tab formed by extending in a radial direction from its outer periphery. During coupling, a tolerance may be applied to a hole of the coupling 132 with the rotation shaft 123 of the driving motor 120 . At this time, the concentricity tolerance of the hole of the rotary shaft 123 and the coupling 132 of the drive motor 120 matches the precision level, so the wobble motion of the coupling 132 with respect to the rotary drive of the drive motor 120 . This can be effectively suppressed. In addition, in assembling the hole of the rotary shaft 123 and the coupling 132 of the drive motor 120, the depth of the hole is formed shorter than the length of the rotary shaft 123 and fixed, so that when the drive motor 120 is rotated Interference between the coupling 132 and the driving motor 120 may be prevented.

When the ball screw 145 is coupled to the coupling 132 , it can be inserted and assembled until it comes into contact with the end of the rotation shaft 123 of the drive motor 120 , so assembly at an accurate position is possible. . After the ball screw 145 is coupled to the coupling 132 , a nut 139 may be additionally coupled to be adjacent to the end of the coupling 132 to perform a loosening prevention function. In this way, by integrating the drive motor 120 and the ball screw 145, it is possible to efficiently use the narrow ultra-high vacuum environment internal space.

The housing includes a motor housing 121 accommodating the driving motor 120 , a connection housing 131 having one end fixed to the motor housing 121 , and a bellows housing 141 fixed to the other end of the connection housing 131 . may include Here, the bellows housing 141 may be fixed between the other end of the connection housing 131 and the external coupling end 150, and the external coupling end 150 moves linearly by the displacement driving of the actuator 10. Accordingly, a length change may occur by extending or contracting in the axial direction of the rotation shaft 123 .

The bellows housing 141 may be made of a metal material, and in order to be applied to an ultra-high vacuum environment, it may be made of, for example, stainless steel. The bellows housing 141 may be fixed by welding, for example, to each of the connection housing 131 and the external coupling end 150 . Here, the external coupling end 150 may generate a displacement difference due to the displacement driving of the actuator 10 , and since the connection housing 131 is fixed to the motor housing 121 , the displacement difference is caused by the displacement driving of the actuator 10 . doesn't happen

In this embodiment, the bellows housing 141 may be made of a single corrugated pipe, and a part of the ball screw 145 constituting the variable part in this single corrugated pipe, a part of the external coupling end 150 and the ball screw nut 146 . can be accepted. As described above, by configuring the bellows housing 141 as a single corrugated pipe, it is possible to more easily realize the miniaturization of the actuator 10 .

A feed-through 113 may be connected to the side of the motor housing 121 so that the inside communicates with each other. A branch pipe 118 extends from a side surface of the motor housing 121 , and a feed-through 113 may be connected to the branch pipe 118 . A power or signal cable (not shown) connected to the driving motor 120 to supply power or transmit a driving signal may be accommodated in the feed-through 113 .

5 is an exploded perspective view illustrating a driving motor and a motor housing of an ultra-high vacuum precision displacement driving actuator according to an embodiment.

Referring to FIG. 5 , the motor housing 121 may be configured to be separated into an upper casing 121a and a lower casing 121b. The drive motor 120 may be coupled and fixed to the upper casing 121a using a bolt, and the lower casing 121b may accommodate the drive motor 120 to be sealed from the outside while being coupled to the upper casing 121a. have. The upper casing 121a may suppress a rotational force acting as a reaction when the driving motor 120 operates. The driving motor 120 may perform a driving function of the actuator 10 , and various motors such as a two-phase stepper motor, a five-phase stepper motor, a DC motor, a BLDC motor, and an AC motor may be applied, for example.

The upper casing 121a may include a device coupling part 125 formed by machining a side surface of the actuator 10 to facilitate coupling with an external device. For example, the device coupling portion 125 may have a plurality of portions each having a flat surface spaced apart along the outer periphery of the upper casing 121a, and for example, four flat surfaces may be formed at intervals of approximately 90 degrees. can When coupled through the device coupling unit 125, the actuator 10 may control the movement of the external device by driving the variable unit in a state where it is fixed to the device.

Therefore, when the actuator 10 according to the present embodiment is fixed to an external device, for example, it may be fixed through the device coupling part 125 at one place. That is, the actuator 10 may provide a driving force by coupling the motor housing 121 to a device to which the motor housing 121 is fixed, and in this state, the external coupling end 150 may be operated.

The upper casing 121a has a protruding wall 121c that can be inserted into the connection housing 131 protrudes from an upper end thereof, and the protruding wall 121c may be formed to have a step difference from the outer circumferential surface of the upper casing 121a. The protruding wall 121c may be divided into four, for example, and a bolt tab is formed between the divided protruding walls 121c to facilitate assembly of the bolt using a tool when combined with the driving motor 120 . can be configured to

The upper casing 121a includes a stepped surface 121d between the protruding wall 121c and the outer circumferential surface, and the stepped surface 121d may allow the lower end of the connection housing 131 to be stably seated. Therefore, the connection housing 131 may be fixed by welding, for example, to the upper casing 121a through the stepped surface 121d.

In addition, the upper casing (121a) may be formed to have the same diameter at the lower end to face and meet the upper end of the lower casing (121b). The upper casing 121a and the lower casing 121b having the same diameter may be welded from opposite surfaces to be sealed from the vacuum outside the actuator 10 even in an ultra-high vacuum environment.

6 is an exploded perspective view illustrating a coupling and a bearing of a precision displacement driving actuator for ultra-high vacuum according to an embodiment.

Referring to FIG. 6 , a crossed roller bearing 134 may be mounted and supported on the outside of the coupling 132 coupled to the rotation shaft 123 of the driving motor 120 . The coupling 132 may include a flange extending in a radial direction toward the driving motor 120 , and the cross roller bearing 134 may be seated on the flange of the coupling 132 when coupled.

The coupling 132 is coupled to the crossed roller bearing 134 to perform a precise rotational motion. In the crossed roller bearing 134, the inner ring and the outer ring are separately fastened to minimize frictional force acting on the inside of the bearing, unlike other types of bearings. In addition, the crossed roller bearing 134 can be precisely driven by minimizing the play against the axial load because the rollers are arranged crosswise therein. Here, the crossed roller bearing 134 may be a crossed roller bearing having a known structure.

The coupling 132 may include a bolt tab having a thread formed on the inner surface of the end of the end to which the ball screw 145 is coupled, and a thread may be formed along the outer periphery on the outer periphery. One end of the ball screw 145 may be inserted and screwed into the bolt tab formed on the inner surface of the coupling 132 on the ball screw 145 side. A coupling nut 136 may be fastened to a thread formed on the outer periphery of the ball screw 145 side of the coupling 132 . The coupling nut 136 may fix the inner ring of the crossed roller bearing 134 between the coupling 132 and the coupling 132 .

The crossed roller bearing 134 mounted between the coupling 132 and the coupling nut 136 transmits the rotational motion of the driving motor 120 to the ball screw 145 while matching the concentricity to suppress the wobble motion and reduce the ball Backlash according to the axial motion load of the screw 145 may be reduced. The crossed roller bearing 134 can reduce axial play against the axial load transmitted to the actuator 10, and can also be replaced with an angular contact bearing to minimize backlash caused by the bearing. Here, the angular contact bearing may be an angular contact bearing having a known structure.

The upper casing (121a) may be assembled so that the protruding protruding wall (121c) surrounds and surrounds the crossed roller bearing (134), and the upper edge of the crossed roller bearing (134) and the outer surface of the protruding wall (121c) are assembled together. A bearing nut 138 may be disposed to cover. At this time, since a thread is formed on the outer peripheral surface of the protruding wall 121c and a thread is also formed on the inner peripheral surface of the bearing nut 138, the outer peripheral surface of the protruding wall 121c and the inner peripheral surface of the bearing nut 138 are screwed together and fastened. can be Accordingly, the bearing nut 138 may fix the outer ring of the crossed roller bearing 134 .

When the coupling nut 136 is coupled to the end of the coupling 132 , a bearing washer 133 may be interposed between the coupling nut 136 and the cross roller bearing 134 . This bearing washer 133 is interposed between the upper surface of the crossed roller bearing 134 and the inner surface of the bearing nut 138 even when the bearing nut 138 is coupled with the protruding wall 121c of the upper casing 121a and is fastened. It is possible to prevent the rotational friction force generated during the transmission from being transmitted to the bearing.

In this way, by positioning the cross roller bearing 134 on the outside of the coupling 132 and fixing it using the coupling nut 136, the actuator 10 according to this embodiment is a driving motor 120 for displacement driving. , the coupling 132 and the crossed roller bearing 134 may have a three-step structure, which is advantageous for downsizing the device.

7 is an exploded perspective view illustrating a ball screw and a ball screw nut of an ultra-high vacuum precision displacement driving actuator according to an embodiment.

Referring to FIG. 7 , the ball screw nut 146 may be screwed to the ball screw 145 and linearly driven in the axial direction along the ball screw 145 as the ball screw 145 rotates. The ball screw nut 146 includes a cylindrical coupling part 146a screwed to the ball screw 145 with a thread formed therein, and a support part 146b larger in the radial direction of the coupling part 146a. include The external coupling end 150 may be seated and fixed to the support portion 146b of the ball screw nut 146 .

A ball screw stopper 148 may be fixed to an end of the ball screw 145 , and may be coupled by, for example, bolting or welding. The ball screw stopper 148 may have a larger diameter than the diameter of the ball screw 145 to prevent the ball screw nut 146 from deviating from the ball screw 145, and thus act as a physical limit of the actuator 10. can

8 is an exploded perspective view illustrating a bellows housing and an external coupling end of an ultra-high vacuum precision displacement driving actuator according to an embodiment.

Referring to FIG. 8 , the bellows housing 141 may be extended or contracted in the axial direction by a difference in driving displacement of the actuator 10 . An external coupling end 150 may be fixed to the upper end of the bellows housing 141 , and may be coupled by welding, for example. The bellows housing 141 may be fixed to the connection housing 131 at a lower portion thereof, and may be coupled, for example, by welding. The bellows housing 141 can secure a space for using a tool by shrinking the size when the driving motor 120 and the coupling 132 are fixed with a bolt.

The external coupling end 150 may include a cylindrical portion 153 extending in a cylindrical shape and a flange portion 151 radially extending outwardly of the cylindrical portion 153 . When combined with the bellows housing 141, the cylindrical portion 153 is inserted into the bellows housing 141, and the flange portion 151 may be fixed to the upper end of the bellows housing 141, for example, to be coupled by welding. can

The external coupling end 150 may have a cylindrical portion 153 fixed to the ball screw nut 146 , and may be fastened to each other using, for example, bolts. That is, the cylindrical portion 153 of the external coupling end 150 may be seated on the support portion 146b of the ball screw nut 146 and coupled and fixed using, for example, a bolt. In addition, the cylindrical portion 153 of the external coupling end 150 includes a space extending deeply in the axial direction so that the ball screw 145 is drawn into the inside. Therefore, it is possible to minimize the interference during the linear movement of the ball screw nut 146 according to the rotational driving of the ball screw 145 .

The external coupling end 150 may include a protrusion 156 protruding in the axial direction to form a step in order to couple with an external device, and an outer side of the flange portion 151 may include a bolt tab extending in the axial direction. .

The external coupling end 150 may move in a straight line according to the movement of the ball screw nut 146 to transmit power from the atmospheric environment to the vacuum environment.

The connection housing 131 may serve as a fixed end for the movement of the bellows housing 141 . That is, the bellows housing 141 may be extended or contracted in the axial direction while the external coupling end 150 moves linearly according to the movement of the ball screw nut 146 with one end fixed to the connection housing 131 . Since the bellows housing 141 expands and contracts by its own elastic change, there is no play according to the length change, so that precise driving is possible.

9 is an exploded perspective view illustrating a feed-through for transmitting motor power and withdrawing a signal line of an ultra-high vacuum precision displacement driving actuator according to an embodiment.

Referring to FIG. 9 , a branch pipe 118 may be fixed to a side surface of the lower casing 121b of the motor housing 121 so that the inside communicates with each other, and may be coupled by welding, for example. The branch pipe 118 may include a flange 116 at an end thereof, and the feed-through 113 may also include a flange 115 corresponding thereto. When coupled, the flange 115 of the feed-through 113 may be fixed to the flange 116 of the branch pipe 118 by, for example, bolting. Accordingly, the feed-through 113 may communicate with the inside of the motor housing 121 through the branch pipe 118 .

A bronze gasket may be interposed between the flange 116 of the branch pipe 118 and the flange 115 of the feed-through 113 to be sealed for use in an ultra-high vacuum environment. The feed-through 113 may be accommodated to pass a cable capable of supplying power to the driving motor 120 or transmitting a driving signal between the atmosphere and the vacuum environment. As described above, by accommodating the cable connected to the inside of the actuator 10 through the feed-through 113 , it is possible to minimize the positional restriction for installation in the ultra-high vacuum.

In addition, a temperature sensor may be installed inside the actuator 10 , for example, inside the motor housing 121 , and the temperature sensor may transmit a temperature measurement value to the outside through a cable connected through the feed-through 113 . When abnormal overheating occurs, it can be detected.

In order to create an ultra-high vacuum environment, it is necessary to heat the entire interior of the environment to about 100 degrees Celsius for several days. Therefore, since the actuator 10 is also exposed to a high temperature environment of about 100 degrees Celsius, safety for temperature is required, so a temperature sensor can be installed inside the actuator 10 .

The connector 112 may be bolted to the feed-through 113 , for example. The connector 112 may be made of a material that can be used in an ultra-high vacuum environment.

10 is a perspective view illustrating a linear stage equipped with a precision displacement driving actuator for ultra-high vacuum according to an exemplary embodiment.

Referring to FIG. 10 , the actuator 10 according to the present embodiment may be mounted on the linear stage 50 to provide a driving force for linear motion of the device. The linear stage 50 includes a stage 30 on which the actuator 10 is mounted, and a guide rail 35 is formed on one side of the stage 30 . The transfer block 53 may be seated on the guide rail 35 to be movable in a straight line, and the transfer block 53 is connected to the driving member 51 coupled to the external coupling end 150 of the actuator 10 to drive force. can be provided. That is, when the actuator 10 operates, the driving member 51 is moved, and as the transfer block 53 connected thereto is moved again, the device (not shown) fixed on the transfer block 53 can be linearly moved. .

Although preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and it is possible to carry out various modifications within the scope of the claims, the description of the invention, and the accompanying drawings, and this also It is natural to fall within the scope.

10: actuator
120: drive motor
121: motor housing
121a: upper casing
121b: lower casing
123: rotation shaft
132: coupling
134: crossed roller bearing
136: coupling nut
138: bearing nut
131: connection housing
141: bellows housing
145: ball screw
146: ball screw nut
148: ball screw stopper
150: external coupling end

Claims (17)

a driving unit including a driving motor;
a connecting portion including a ball screw and a coupling connecting the ball screw to a rotation shaft of the driving motor;
a variable part comprising a ball screw nut screwed to the ball screw and capable of linear driving on the ball screw and an external coupling end fixed to the ball screw nut; and
A motor housing accommodating the driving motor, a connection housing having one end fixed to the motor housing and accommodating the coupling, and the other end of the connection housing and the external coupling end coupled between the external coupling end moves in a straight line The housing part is flexible and includes a bellows housing for accommodating at least a portion of the ball screw and the ball screw nut.
including,
The housing portion is configured to be sealed from the outside in a vacuum, a precision displacement actuator for ultra-high vacuum. The method of claim 1,
The bellows housing is coupled to the connection housing and the external coupling end by welding, a precision displacement actuator for ultra-high vacuum. The method of claim 1,
A precision displacement actuator for ultra-high vacuum connected to the side of the motor housing so that the inside communicates with each other, and further comprising a feed through in which a power or signal cable connected to the driving motor is accommodated. 4. The method of claim 3,
A branch pipe extends from the side of the motor housing,
The feed-through is connected to the branch pipe via a metal gasket, a precision displacement actuator for ultra-high vacuum. The method of claim 1,
The motor housing includes an upper casing accommodating an upper end of the driving motor and a lower casing accommodating a lower end of the driving motor,
The upper casing and the lower casing are coupled to each other by welding and configured to be sealed from the outside, a precision displacement actuator for ultra-high vacuum. 6. The method of claim 5,
The upper casing includes a device coupling portion made of a flat surface on at least a portion of the outer peripheral surface, a precision displacement actuator for ultra-high vacuum. 6. The method of claim 5,
In the upper casing, a protruding wall that can be inserted into the connection housing protrudes from the upper end, and the protruding wall is formed to have a step difference from the outer circumferential surface of the upper casing, a precision displacement actuator for ultra-high vacuum. The method of claim 1,
The precision displacement actuator for ultra-high vacuum further comprising a cross roller bearing or an angular contact bearing mounted on the outside of the coupling coupled to the rotation shaft of the drive motor to support the coupling. 9. The method of claim 8,
Ultra-high vacuum precision displacement actuator further comprising a coupling nut screwed to the outer periphery of the ball screw side of the coupling to fix the inner ring of the crossed roller bearing or the angular contact bearing between the coupling and the coupling nut. 9. The method of claim 8,
The motor housing includes a protruding wall protruding inside and protruding stepwise from the outer circumferential surface of the motor housing at the upper end, and the protruding wall is assembled to surround and surround the crossed roller bearing or the angular contact bearing,
Precision displacement drive for ultra-high vacuum further comprising a bearing nut coupled to cover the edge of the upper end surface of the crossed roller bearing or the angular contact bearing and the outer surface of the protruding wall to fix the outer ring of the crossed roller bearing or angular contact bearing actuator. 11. The method of claim 10,
The outer peripheral surface of the protruding wall and the inner peripheral surface of the bearing nut are screwed to each other and fastened, a precision displacement actuator for ultra-high vacuum. The method of claim 1,
A precision displacement actuator for ultra-high vacuum comprising a ball screw stopper having a larger diameter than the diameter of the ball screw at the end of the ball screw. The method of claim 1,
The external coupling end includes a cylindrical portion extending in a cylindrical shape to be inserted into the bellows housing and a flange portion extending radially to the outside of the cylindrical portion and fixed to the upper end of the bellows housing, a precision displacement actuator for ultra-high vacuum. 14. The method of claim 13,
The ball screw nut includes a cylindrical coupling part having a screw thread formed therein and screwed to the ball screw, and a support part larger in the radial direction of the coupling part,
The cylindrical portion of the external coupling end is seated on the support portion of the ball screw nut, coupled and fixed, a precision displacement actuator for ultra-high vacuum. 14. The method of claim 13,
The cylindrical portion of the external coupling end includes a space extending deeply in the axial direction so that the ball screw is introduced into the inside, a precision displacement actuator for ultra-high vacuum. 14. The method of claim 13,
The external coupling end further comprises a protrusion that protrudes in the axial direction of the ball screw to form a step in order to engage with an external device, an ultra-high vacuum precision displacement actuator. The method of claim 1,
A temperature sensor is installed inside the motor housing,
The temperature sensor is a precision displacement actuator for ultra-high vacuum that can transmit a temperature measurement to the outside through a cable connected through the feed-through.

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