KR20220080809A - Trap unit and sublimation purifying apparatus having the same - Google Patents

Abstract

The present invention provides a sublimation purification apparatus having a heating unit for heating and sublimating an object to be purified, and a vacuum unit for forming a vacuum in the heating unit, the sublimation including an organic material collecting unit for collecting multiple organic substances sublimed by the heating unit A foreign material collecting unit for a purification apparatus is provided.

Description

Foreign matter collecting unit for sublimation purifying apparatus and sublimation purifying apparatus having the same

The present invention relates to a foreign material collecting unit for a sublimation refining apparatus and a sublimation refining apparatus having the same.

In general, sublimation purification equipment is used in the sublimation purification process, which is a process for removing impurities from low molecular weight organic substances that can be used as light emitting bodies or transporters of organic EL or OLED devices.

Conventionally, many studies have been conducted on the development of an organic substance sublimation purification apparatus for purifying organic substances with high purity by removing impurities through such a process.

Referring to Korean Patent Registration No. 10-1124687, a conventionally developed organic substance sublimation purification apparatus will be described as follows.

The organic substance sublimation purification apparatus developed in the prior art is provided at one side of the purification unit 10, which sublimates and collects organic substances from the purification target, and the purification unit 10. A vacuum to selectively control the vacuum state inside the purification unit 10 It includes a unit 20 and a trap unit 30 that blocks the sublimated organic matter from moving to a specific area.

An object to be purified is placed inside the purification unit, and as the object is heated to high heat, the organic material is sublimated in the object to be purified, and the sublimated organic material is collected.

Here, the purification unit 10 is provided with a separate heating unit 11 to control the internal temperature and sublimate the organic matter contained in the purification object.

The vacuum unit 20 is connected to one side of the purification unit 10 and is connected to control the internal vacuum state, and a separate vacuum pump 21 is provided to adjust the interior of the purification unit 10 to a high vacuum state. .

On the other hand, in the high vacuum state, the distribution of the gas inside is extremely small, and accordingly, the flow of the gas does not exist.

Accordingly, in the purification unit 10, which is in a high vacuum state by the vacuum unit 20, the sublimated organic matter moves freely inside and is collected in the collection area.

The trap unit 30 is configured to block the organic matter sublimed in the purification unit 10 from moving to the vacuum pump 21, and it continuously circulates a separate refrigerant to block the free moving gaseous organic matter. .

Specifically, the trap unit 30 uses a general refrigerant to block gaseous organic matter, and a refrigerant such as liquid nitrogen or dry ice is provided therein to exchange heat with gaseous organic matter or impurities to condense and condense. By allowing the impurities to be deposited in the trap unit 30 , the sublimated organic matter is prevented from moving to the vacuum pump 21 .

In such a sublimation purification apparatus, when a foreign material is included in the sublimation object for a certain amount or more, there is a problem of causing product defects in the case of manufacturing an organic electronic device.

An object of the present invention is to provide a foreign material collecting unit for a sublimation purification apparatus capable of collecting multiple foreign substances generated in the process of sublimating an object used for manufacturing an organic electronic device, and a sublimation purification apparatus having the same.

Another object of the present invention is to collect foreign substances by using a thermoelectric element, which is a Peltier element, when the object to be purified is separated into purified material and vaporized organic material through heating. It is to provide a foreign material collecting unit for a sublimation purification apparatus that can solve the problem, and a sublimation purification apparatus having the same.

The objects of the present invention are not limited to the above-mentioned objects, and other objects and advantages of the present invention not mentioned can be understood by the following description, and will be more clearly understood by the examples of the present invention. It will also be readily apparent that the objects and advantages of the present invention may be realized by the means and combinations thereof indicated in the appended claims.

In order to achieve the above objects, the present invention provides a sublimation purification apparatus having a heating unit for heating and sublimating an object to be purified, and a vacuum unit for forming a vacuum in the heating unit,

It provides a foreign material collecting unit for a sublimation purification apparatus including an organic material collecting unit for collecting multiple organic matter sublimed in the heating unit.

Here, the organic matter collecting unit has a first collecting unit and a second collecting unit,

The first collecting unit includes a first collecting unit body having a cylindrical shape with an open top, a ring body installed on the upper end of the first collecting unit body, a thermoelectric module, and a blowing means;

The thermoelectric module has a plurality of collection members and a current providing device for providing current to the plurality of collection members,

One surface of each of the plurality of collecting members forms a cooling surface and the other surface forms a heating surface,

Preferably, the cooling surface of each of the plurality of collecting members is an inner surface, and the heating surface is formed as an outer surface.

And each of the plurality of collecting members doedoe bent in a shape,

Each of the plurality of collecting members has a lower member having a first length, and an upper member bent at the upper end of the lower member,

The angle between the lower member and the upper member forms an obtuse angle,

The lower end members of each of the plurality of collecting members are disposed near the inner wall of the first collecting unit body, and are arranged at regular intervals along the circumferential direction of the first collecting unit body,

It is preferable that the upper end members bent at the upper end of each of the lower end members extend to a central position of the ring body so that the ends of each of the upper end members are connected to each other.

In addition, the second collecting unit has a cooling rod formed of a metal having a certain length, and a heating member disposed to surround the outer periphery of the cooling rod,

The cooling rod is formed of a stainless material,

The length of the heating member is formed to be shorter than the length of the cooling rod.

One end of the cooling rod is spaced apart from the end of the heating member by a predetermined distance and exposed to the outside,

It is preferable that the collecting protrusion members spaced apart from each other by a predetermined distance are formed at one end of the cooling rod.

According to another embodiment, the present invention provides a sublimation purification apparatus including a foreign material collecting unit.

The present invention has the effect of collecting multiple foreign substances generated in the process of sublimating a sublimation object used for manufacturing an organic electronic device.

In addition, the present invention solves the problem of maintenance due to the conventional cooling water management by using a thermoelectric element, which is a Peltier element, to collect foreign substances when the object to be purified is separated into purified material and vaporized organic material through heating. have a possible effect.

In addition to the above-described effects, the specific effects of the present invention will be described together while describing specific details for carrying out the invention below.

1 is a view showing a conventional organic substance sublimation purification apparatus.
2 is a perspective view showing a sublimation purification apparatus according to the present invention.
3 is another perspective view showing a sublimation purification apparatus according to the present invention.
4 and 5 are perspective views showing a flange part.
6 to 9 are perspective views showing the inside of the flange portion according to the present invention.
10 is a perspective view showing the configuration of a continuous purification object supply unit according to the present invention.
11 is another perspective view showing a continuous purification object supply unit according to the present invention.
12 is a side view showing a continuous purification object supply unit according to the present invention.
13 is a side view showing the inside of the continuous purification object supply unit according to the present invention according to the present invention.
14 is a plan view showing a continuous purification object supply unit according to the present invention.
15 is a perspective view showing a compression opening/closing unit according to the present invention.
16 is another perspective view showing the compression opening/closing unit according to the present invention.
17 is a perspective view showing a state before the compression opening and closing unit according to the present invention is coupled to the outer tube.
18 is a perspective view showing a state after the compression opening and closing unit according to the present invention is combined with the outer tube.
19 is an enlarged perspective view showing a state in which the compression opening/closing unit and the outer tube according to the present invention are combined.
20 is an enlarged perspective view showing a coupling state between the outer tube and the connector of the flange body according to the present invention.
21 is a perspective view showing a state in which the foreign material collecting unit according to the present invention is disposed on the flange portion.
22 is a perspective view showing a first collecting unit according to the present invention.
23 is a perspective view showing an arrangement state of the collecting members in the first collecting unit according to the present invention.
24 is a perspective view showing the configuration of the collecting member according to the present invention.
25 is a perspective view showing an arrangement state of the collecting members according to the present invention.
26 is a perspective view showing the configuration of the thermoelectric element and the blowing means according to the present invention.
27 is a perspective view showing a case according to the present invention.
28 is a perspective view showing the configuration of a second collecting unit according to the present invention.
29 is a perspective view showing a cooling rod according to the present invention.
30 is a perspective view showing a heating member according to the present invention.

The above-described objects, features and advantages will be described below in detail with reference to the accompanying drawings, and accordingly, those of ordinary skill in the art to which the present invention pertains will be able to easily implement the technical idea of the present invention. In describing the present invention, if it is determined that a detailed description of a known technology related to the present invention may unnecessarily obscure the gist of the present invention, the detailed description will be omitted. Hereinafter, preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to indicate the same or similar components.

In the following, that an arbitrary component is disposed on the "upper (or lower)" of a component or "above (or below)" of a component means that any component is disposed in contact with the upper surface (or lower surface) of the component. Furthermore, it may mean that other components may be interposed between the component and any component disposed on (or under) the component.

Also, when it is described that a component is "connected", "coupled" or "connected" to another component, the components may be directly connected or connected to each other, but other components are "interposed" between each component. It should be understood that “or, each component may be “connected,” “coupled,” or “connected,” through another component.

Hereinafter, a sublimation purification apparatus having a hybrid flange part according to the present invention will be described with reference to the accompanying drawings.

2 is a perspective view showing the sublimation refining apparatus according to the present invention, Figure 3 is another perspective view showing the sublimation refining apparatus according to the present invention.

2 and 3 , the sublimation purification apparatus according to the present invention includes a main body (not shown), a heating unit 1 , a trap unit 2 , and a vacuum unit 3 .

The heating unit 1 is disposed on the upper end of the main body.

The heating unit 1 has a heating unit body (not shown). The heating unit body has a predetermined length, and a space in which the outer tube 10 is seated is formed.

The heating unit body has a cover (not shown).

The cover is connected to one side of the heating unit in a hinge manner, and is installed to be rotatably opened and closed.

The cover is connected to the motor shaft of the motor axially connected to the hinge.

The other end of the heating unit body is connected to one side of the flange part 100 to be described later. The configuration of the flange part 100 will be described later.

In addition, a compression opening/closing unit 200 for opening the inside of the outer tube 10 is installed at one end of the heating unit body.

The inside of the outer tube 10 may be opened and closed by the operation of the compression opening/closing unit 200 .

And a heating unit (not shown) is disposed inside the heating unit 1 .

The heating unit has a plurality of heating coils and a current provider for applying current to the plurality of heating coils to generate heat in the heating coil.

Here, the plurality of heating coils are arranged at regular intervals around the outer periphery of the outer tube 10 .

In addition, a plurality of inner tubes (not shown) are arranged at intervals inside the outer tube 10 .

The inner tube is formed of a quartz tube.

A purification object is substantially supplied to the inside of the inner tube.

Here, the heating unit 1 is provided with a purification object supplying device 200 for continuously stirring and supplying the purification object into the inner tube.

The flange part 100 has a configuration in which a space connected to the other end of the outer tube 10 , a space in which the trap unit 2 is disposed, and the vacuum unit 3 are connected to form one body.

Hybrid Flange Part (100)

A hybrid flange part 100 according to the present invention will be described.

4 and 5 are perspective views showing a flange part. 6 to 9 are perspective views showing the inside of the flange portion according to the present invention.

4 to 9 , the flange part 100 according to the present invention has a flange part body 110 in which an inner space is formed.

A first area a1 is formed inside one end of the flange part body 110 .

A connector 111 is formed on one surface of the flange part body 110 . The connector 111 communicates with the first area a1.

The connector 111 is connected to the other end of the outer tube 10 described above.

The connector 111 may be sealed through a separate sealing member.

A first opening/closing hole 112 exposing the first region a1 to the outside is formed in the other surface portion of the flange part body 110 . The first opening/closing hole 112 is formed in a circular hole shape.

A second region a2 is formed in the inner space of the central portion of the flange body 110 .

Here, the first area (a1) and the second area (a2) are partitioned by the partition wall 115 formed inside the flange part body 110 .

A through hole 115a is formed in the partition wall 115 .

A partition plate 116 coupled to the partition wall 115 in a bolting manner is installed in the through hole 115a.

Accordingly, the first and second regions a1 and a2 are partitioned from each other.

A second opening/closing hole 113 exposing the second area a2 to the outside is formed in the rear surface of the flange body 110 .

The second opening/closing hole 113 is formed in a circular hole shape.

A first upper connection hole 117a is formed at the upper end of the flange part body 110 in which the second region a1 is located.

Here, the trap unit 2 according to the present invention is installed in the second area a2.

The trap unit 2 may be inserted into the second region a2 through the first upper connection hole 117a and fixed to the flange body 110 .

In addition, a second upper connection hole 117b exposing a third region a3 to be described later is formed at the upper end of the flange part body 110 . A vacuum pump P is coupled to the second upper connection hole 117b.

The trap unit 2 is configured to block the organic matter sublimed in the heating unit 1 from moving to the vacuum pump P. It blocks organic matter in the gaseous state that moves through cooling.

The body of the trap unit 2 has a cylindrical body.

Here, a first lower connection hole 118a having a rectangular shape is formed at the lower end of the first region a1 of the flange part body 110 .

In addition, a circular second lower connection hole 118b is formed at the lower end of the second region a2 of the flange part body 110 .

A flow unit 120 is disposed at the lower end of the flange part body 110 .

The flow unit 120 has a flow box 121 in the shape of a square box. The upper end of the flow box 121 is opened.

The flow box 121 is fastened to the lower end of the flange part body 110 . The inside of the flow box 121 communicates with the first and second regions a1 and a2 through the first and second lower connection holes 118a and 118b.

The flow unit 120 has a first valve unit 122 .

The first valve unit 122 includes a first valve plate 122a for opening and closing the second lower connection hole 118b, and a first lifting shaft 122b-1 for lifting and lowering the first valve plate 122a. It has a first elevating cylinder (122b) having a.

The first elevating cylinder 122b is fixed to the lower end of the flow box 121 .

The first lifting shaft 122b - 1 is raised and lowered inside the flow box 121 . The disk-shaped first valve plate 122a installed on the upper end of the first lifting shaft 122b-1 opens and closes the second lower connection hole 118b according to the elevation of the first lifting shaft 122b-1.

Accordingly, the first lower connection hole 118a, the inside of the flow box 121, and the second lower connection hole 118b form a flow path of the sublimated gas connecting the first and second regions a1 and a2. .

And in the inner space of the flange part body 110 according to the present invention, the second area a2 and the third area a3 in circulation are formed.

A third opening/closing hole 114 is formed in the other surface of the flange part body 110 .

The third opening/closing hole 114 is formed in a circular hole shape, and is preferably formed as a hole having the same size as the second opening/closing hole 113 .

A second upper connection hole 117b is formed at the upper end of the flange part body 110 in which the third region a3 is located.

A vacuum pump P is connected to the second upper connection hole 117b.

A second valve unit 123 is installed at the lower end of the flange part body 110 in which the third area a3 is formed.

A third sealing plate 118d installed in the third lower connection hole 118c is installed at the lower end of the flange part body 110 in which the third region a3 is formed.

The second valve unit 123 includes a second valve plate 123a having a second valve shaft 123a-1, and a second lifting shaft 123b-1 elevating the second valve shaft 123a-1. ) has a second elevating cylinder (123b) having.

The second valve plate 123a is formed in a disk shape.

The second valve shaft 123a-1 is installed through the third sealing plate 118d sealing the third lower connection hole 118c.

The third lifting cylinder 123b is fixed to the lower end of the third sealing plate 118d.

Accordingly, the degree of vacuum in the third region a3 may be variably adjusted according to the lifting position of the second valve plate 123a.

And the vacuum pump (P) according to the present invention is installed so as to be detachably attached to the second upper connection hole (117b) formed at the upper end of the above-described flange body (110).

According to the above configuration, the flange portion 100 according to the present invention has three opening and closing holes 112 , 113 , 114 are formed.

That is, the first, second, and third opening and closing holes 112 , 113 , and 114 are provided on the other surface of the flange body 110 at intervals.

The first opening and closing hole 112 exposes the first region a1 to the outside, the second opening and closing hole 113 exposes the second region a2 to the outside, and the third opening and closing hole 114 The silver exposes the third area a3 to the outside.

In addition, doors ( ) are installed in each of the first, second, and third opening and closing holes 112 , 113 , and 114 , respectively.

However, the size of the first opening and closing hole 112 may be formed to have a predetermined diameter larger than the size of the second and third opening and closing holes 113 and 114 .

Each of the doors 130 has a disc-shaped door body 131 , a hinge end 132 , and a locking member 133 .

The hinge end 132 is configured as a pair, and hinge-connects one end of the door body 131 and a region around the first, second, and third opening and closing holes 112 , 113 , and 114 .

The locking member 133 has a locking member 133a and a locking end 133b.

The locking member 133a is connected to be rotated in the peripheral region of each of the first opening and closing holes 112 , and the other end of the locking member 133a is configured to be caught by the locking end 133b.

Accordingly, the door body 131 may rotationally open and close the first, second, and third opening and closing holes 112 , 113 , and 114 , and maintain the locked state by the locking member 133a in the closed state.

In addition, a window (131a) capable of withstanding a predetermined pressure is installed in the door body (131).

Physical states in the first, second, and third areas a1, a2, and a3 can be visually confirmed through the window 131a. The window 131a may be connected to a separate vision device (not shown) and monitored in real time.

10 is a perspective view showing the configuration of a continuous purification object supply unit according to the present invention, FIG. 11 is another perspective view showing a continuous purification object supply unit according to the present invention, and FIG. 12 is a side view showing a continuous purification object supply unit according to the present invention. , Figure 13 is a side view showing the inside of the continuous purification object supply unit according to the present invention according to the present invention, Figure 14 is a plan view showing the continuous purification object supply unit according to the present invention.

10 to 14 , the sublimation refining apparatus according to the present invention may have a continuous refining object supply unit 300 .

The continuous purification object supply unit 300 sequentially supplies the purification object into the inner tube 50 .

The continuous purification object supply unit 300 includes a storage unit 310 and a moving unit 320 .

The storage unit 310 is disposed at an upper portion near one end of the inner tube 50 .

The storage unit 310 includes a storage container 311 , an upper valve (not shown) for opening and closing the upper end of the storage container 311 , and a lower valve 312 for opening and closing the lower end of the storage container 311 . have

The moving part 320 includes a rotation motor 321 having a rotation motor shaft 321a, a rotation shaft 322 connected to one end of the rotation motor shaft 321a, and a transfer screw installed on the rotation shaft 322 . (323).

The transfer screw 322 has a predetermined length.

The transfer screw 323 is disposed inside the inner tube 50 .

The rotation motor 321 is disposed around one end of the inner tube 50 . Preferably, the rotation motor 321 is installed in the heating unit 1 .

Here, a supply tube (not shown) may be connected to one end of the inner tube 50 .

The supply tube is connected to the lower end of the storage container (311).

The lower valve 312 is installed in the supply tube.

Opening and closing operations of the upper and lower valves 312 are controlled by the control of the controller 900 .

Through this configuration, the supply process of the purification object will be described.

The control unit 900 opens the upper valve. Through this, the object to be purified may be supplied to the inside of the storage container 311 .

The control unit 900 may open the lower valve 312 . The lower valve 312 is a valve capable of adjusting an opening angle, and the amount of supply of the object to be purified into the supply tube 50 may be controlled according to the control of the opening angle.

Accordingly, the object to be purified is continuously supplied into the inner tube 50 through one end of the inner tube 50 through the supply tube.

At the same time, the control unit 900 drives the rotation motor 321 . The rotation motor 321 rotates the rotation shaft 322 .

The controller 900 may variably control the rotation speed of the rotation motor 321 to be set to a rotation speed set through an input device (not shown).

And the transfer screw 323 is rotated in association with the rotation of the rotating shaft 322 .

Therefore, the purification object supplied to one end of the inner tube 50 is transferred while being rotated along the other end from one end of the transfer screw 323 through the rotating transfer screw 323 .

That is, the continuous purification object supply unit 300 according to the present invention can continuously supply the object to be purified from the inside of the inner tube 50 to the other end of the inner tube 50 through the rotating transfer screw 323 .

In addition, the continuous purification object supply unit 300 according to the present invention includes a stirring unit 330 .

The stirring unit 330 is coupled to the coupling member 331 and the coupling member 331 , and a support shaft 332 of a certain length orthogonal to the rotation shaft 322 , and the support shaft 332 . It has agitating blades 333 installed at both ends.

Here, the rotation shaft 322 extends to achieve a set length at the other end of the inner tube 50 .

Accordingly, the other end of the rotation shaft 322 is disposed to protrude from the other end of the inner tube 50 .

And the coupling member 331 is installed at the other end of the rotation shaft 322 . The coupling member 331 is formed in a rectangular box shape.

The support shaft 332 is configured as a pair.

A pair of support shafts 332 are respectively installed at the upper end and lower end of the coupling member 331 .

The pair of support shafts 332 may be orthogonal to the rotation shaft 322 .

At each end of the pair of support shafts 332, each of the stirring blades 333 is installed.

Each of the stirring blades 333 is composed of a pair of unit blades (333a).

One end of the pair of unit blades 333a is fixed to the end of the support shaft 332 .

In addition, the pair of unit blades 333a are disposed symmetrically to each other at the upper end of the support shaft 332 .

Each of the pair of unit blades 333a is bent from one end to a convex shape along the other end.

That is, each of the pair of unit blades 333a includes a first blade 333a-1 and a second blade 333a-2.

One end of the first blade 333a-1 is fixed to the upper end of the support shaft 332, and an inclination is formed along the other end.

One end of the second blade 333a-2 is connected to the other end of the first blade 333a-1, and a slope is formed along the other end.

Here, the first blade 333a-1 and the second blade 333a-2 form an obtuse angle with each other.

In addition, the first blade 333a-1 and the second blade 333a-2 are integrally formed in a shape that is bent to achieve a predetermined curvature with each other.

Also, the second blade 333a-2 is formed to be longer than the first blade 333a-1 by a predetermined length.

The stirring blades 333 installed at the ends of the pair of support shafts 332 are spaced apart from each other by a predetermined distance so as to be close to the inner periphery of the outer tube 10 .

In addition, the front end of each of the stirring blades 333 protrude forward of the inner tube 50 , and the rear end is disposed at a position spaced apart from the outer circumference of the other end of the inner tube 50 .

Through this configuration, the pair of support shafts 332 according to the present invention are rotated in association with the rotation of the rotation shaft 322 .

While each stirring blade 333 installed at each end of the pair of support shafts 332 is also rotated in the area outside the other end of the inner tube 50 , the conveying screw 323 is pressed inside the inner tube 50 . The purified object transported and discharged through the can be stirred in the outer space of the other end of the inner tube (50).

15 is a perspective view showing the compression opening/closing unit according to the present invention, and FIG. 16 is another perspective view showing the compression opening/closing unit according to the present invention. 17 is a perspective view showing a state before the compression opening/closing unit according to the present invention is coupled to the outer tube, and FIG. 18 is a perspective view showing a state after the compression opening/closing unit according to the present invention is coupled to the outer tube. 19 is an enlarged perspective view showing a state in which the compression opening/closing unit and the outer tube are coupled according to the present invention, and FIG.

15 to 20 , the compression opening/closing unit according to the present invention may be a compression opening/closing unit of a cylinder compression type.

The sublimation refining apparatus according to the present invention has a compression opening/closing unit 200 .

The compression opening/closing unit 200 according to the present invention includes a cap member 210 , a guide member 220 , and a support member 230 .

The cap member 210 is formed of a cylindrical rim body 211 and a cover plate 212 disposed on one surface of the rim body 211 .

The cover plate 212 is rotatably installed at one end of the frame body 211 to open and close.

The inner diameter of the rim body 211 may be formed to be the same as the outer diameter of the outer tube 10 according to the present invention within a predetermined error range.

The rim body 211 may be coupled to one end of the outer tube 10 by being fitted to the outer periphery.

The support member 230 is connected to the lower end of the rim body 211 . An upper end of the support member 230 is coupled to a lower end of the rim body 211 .

The support member 230 includes a pair of support ends 231 , a support body 232 that is connected to the lower ends of the pair of support ends 231 and spreads to both sides, and a lower end of the support body 232 . and a base 233 formed thereon.

A pair of rail ends 233b in which rail grooves 233a are formed are formed at the lower end of the base 233 .

The guide member 220 is provided as a pair.

The pair of guide members 220 are coupled to each of the rail grooves 233a of the pair of rail ends 233b in a rail manner.

The pair of guide members 220 are installed in the main body by forming a predetermined interval.

The pair of guide members 220 are formed along the longitudinal direction of the outer tube 10 .

On the other hand, on the inner periphery of the frame body 211, a first stepped portion formed in multiple stages is formed.

The first stepped portion (211a) is 1-1, 1-2, 1-3 step (2111-1, 211-2, 211-3) is formed.

A first sealing member S1 is disposed on the 1-1 step 211-1.

Here, a first installation groove (not shown) into which the first sealing member s1 is fitted is formed in the 1-1 step 211-1.

And on the outer periphery of one end of the outer tube 10 according to the present invention, the first locking projection 11 is formed in a ring shape.

The first locking protrusion 11 is formed at a location spaced apart from one end of the outer tube 10 by a predetermined distance.

The distance spaced apart as described above may be substantially equal to the width of the first and second steps 211-2.

And the first locking step 11 is disposed so as to be in close contact with the inner periphery of the 1-1 step (211-1).

The first sealing member (S1) is in close contact with one end of the first locking projection (11) to airtight between the cap member and the outer tube (10).

In addition, a second stepped portion 111a is formed in the connector 111 formed on one surface of the above-described flange portion body 110 .

The second step portion 111a is formed such that the 2-1, 2-2, and 2-3 step steps 111-1, 111-2, 111-3 form multiple steps.

The inner diameters of the 2-1, 2-2, and 2-3 step steps 111-1, 111-2, 111-3 are formed to be sequentially smaller along the other surface portion from one surface portion of the flange portion body 110.

Here, the second sealing member S2 is installed on the 2-1 step 111-2.

The second sealing member S2 is formed in an O-ring shape, and may be installed at an end of the 2-1 step 111-2.

A second installation groove (not shown) into which the second sealing member S2 is fitted is formed in the 2-1 step 111-2 of the connector 111 .

And a ring-shaped second locking protrusion 12 is formed on the outer periphery of the other end of the outer tube 10 .

The second stopping protrusion 12 is spaced apart from the other end of the outer tube 10 by a predetermined distance.

The other end of the outer tube 10 by the spaced distance is fitted into the 2-2 step 111-2 of the connector.

And the second sealing member seals one end of the second locking protrusion formed at the other end of the outer tube.

Here, the other end of the outer tube 10 is inserted into the connector 111 to form a fixed state. Substantially, the other end of the outer tube 10 is a region that is not frequently opened.

On the other hand, one end of the outer tube 10 is an area frequently opened when maintenance is performed by the cap member 210 according to the present invention.

The cap member 210 according to the present invention may open the inside of the outer tube 10 by opening the cover plate 212 .

Also, the support member 230 according to the present invention is slidably moved along the guide member 220 .

Here, the guide member 230 is configured to serve as a rail.

The support member 230 may be linearly reciprocated by driving a driving device such as a cylinder or a linear motor connected to the guide member 220 .

Accordingly, the cap member 210 fixed to the upper end of the support member 230 is linearly reciprocated from one end of the outer tube 10 so that the rim body 211 of the cap member 210 is at one end of the outer tube 10 . is plugged in

In addition, the connector ( 111), it is possible to always maintain the airtight state between the purifiers to be constant even when driving the purification apparatus.

21 is a perspective view showing a state in which the foreign material collecting unit according to the present invention is disposed on the flange, FIG. 22 is a perspective view showing the first collecting unit according to the present invention, and FIG. 23 is a collecting member in the first collecting unit according to the present invention It is a perspective view showing the arrangement state of the elements, Fig. 24 is a perspective view showing the configuration of the collecting member according to the present invention, Fig. 25 is a perspective view showing the arrangement state of the collecting member according to the present invention, and Fig. 26 is a thermoelectric element according to the present invention And a perspective view showing the configuration of the blowing means, Figure 27 is a perspective view showing a case according to the present invention.

21 to 27, the sublimation purification apparatus according to the present invention has a collecting unit.

The collecting unit according to the present invention has a first collecting unit (2) and a second collecting unit (600).

The first collecting part 2 according to the present invention is composed of the trap unit 2 disposed in the inner second area a2 of the flange part 100 described above. Hereinafter, the trap unit 2 will be named and described as the first collecting unit 2 .

The configuration of the first collecting unit 2 will be described.

The first collecting unit 2 includes a first collecting unit body 510 having a cylindrical shape with an open upper portion, a ring body 520 installed on the upper end of the first collecting unit body 510, and a thermoelectric module ( 530 , and blowing means 560 .

The ring body 520 is installed on the upper edge of the first collecting body 510, and the flange body 110 through the first upper connection hole 117a formed at the upper end of the flange body 110. ) may be inserted and fixed into the second region a2 formed in the inside.

Here, the first collecting body 510 is disposed in the second area a2 and exposed upward through the opening of the ring body 520 .

The thermoelectric module 530 includes a plurality of collecting members 531 and a current providing device 532 providing current to the plurality of collecting members 531 .

One surface of each of the plurality of collecting members 31 forms a cooling surface 531a and the other surface forms a heating surface 531b.

Preferably, the cooling surface 531a of each of the plurality of collecting members 531 is an inner surface, and the heating surface 531b is preferably an outer surface.

The current providing device 532 provides a current to the plurality of collecting members 531 to form a constant cooling temperature in the cooling surface 531a, and forms a constant heating temperature in the heating surface 531b make it That is, the thermoelectric module 530 according to the present invention uses the Peltier effect.

Accordingly, a temperature difference between the cooling surface 531a and the heating surface 531b of the plurality of collecting members 531 is generated.

Here, each of the plurality of collecting members 531 is bent in an A shape. That is, each of the plurality of collecting members 531 includes a lower end member 531-1 having a first length, and an upper end member 531-2 bent at the upper end of the lower end member 531-1.

An angle between the lower member 531-1 and the upper member 531-2 forms an obtuse angle.

The length of the lower member 531-1 is formed to be longer than the length of the upper member 531-2 by a certain length.

The lower members 531-1 of each of the plurality of collecting members 531 are disposed near the inner wall of the first collecting unit body 510, and at regular intervals along the circumferential direction of the first collecting unit body 510. is placed to make

Here, the length of the lower members 531-1 may be formed to correspond to the vertical length of the first collecting unit body 510 .

In addition, the upper members 531-2 bent at the top of each of the lower members 531-1 extend to the central position of the ring body 520 so that the ends of each of the upper members 531-2 are connected to each other

A central bar 540 is installed at a central position where the ends of the upper members 531-2 are connected to each other.

A case 550 in the shape of a square box having an open top is disposed at the top of the central rod 540 .

The upper end of the central rod 540 is connected to the lower center of the case 550 .

A plurality of discharge holes 551 are formed in the lower surface of the case 550 .

4 The plurality of discharge holes 551 are formed by being perforated at a plurality of positions along a direction radiating from the central position of the case 550 .

In addition, the plurality of discharge holes 551 are formed such that the inner diameter of the case 550 is gradually expanded along the radial direction from the central position of the case (550).

In addition, the area of the bottom of the case 550 may form an area included in the opening area of the ring body 520 .

The blowing means 560 is disposed in the inner space of the case 550 .

The blowing means 560 includes a fan 561 and a fan module 562 that rotates the fan 561 . The fan module 562 rotates the fan under the control of the controller 900 .

Referring to the above configuration, the organic material sublimed in the outer tube 10 according to the present invention is formed in the first lower connection hole 118a formed in the flange body 110, the inside of the flow box 121, and the second lower connection hole. It flows from the first area a1 to the second area a2 through the 181b.

And the sublimated organic material is collected by being attached to the cooling surface 531a of the collecting members 531 .

Accordingly, the purified material from which the gaseous organic matter is removed from the purified object heated to a certain level or more flows from the second area a2 to the third area a3. This is achieved by driving the vacuum pump (P).

Here, the fan 561 of the blowing means 560 disposed inside the case 550 is driven under the control of the controller 900 .

The heat generated while the object to be purified is heated according to the driving of the fan 561 may be discharged through a space between the upper members 531 - 2 constituting the plurality of collecting members 531 .

In addition, a plurality of discharge holes 551 are formed in the case 550 , and the heat may be discharged to an upper portion of the case 550 through the plurality of discharge holes 551 .

In addition, the gaseous organic matter generated by the heated sublimation object may be collected by the plurality of collecting members 531 as described above.

28 is a perspective view showing the configuration of a second collecting unit according to the present invention, FIG. 29 is a perspective view showing a cooling rod according to the present invention, and FIG. 30 is a perspective view showing a heating member according to the present invention.

Next, the configuration of the second collecting unit according to the present invention will be described with reference to FIGS. 28 to 30 .

The second collecting unit 600 according to the present invention has a cooling rod 610 formed of a metal having a predetermined length, and a heating member 620 disposed to surround the outer periphery of the cooling rod 610 .

The cooling rod 610 is formed of a stainless material.

Here, the length of the heating member 620 is shorter than the length of the cooling rod 610 .

Accordingly, one end of the cooling rod 610 is spaced apart from the end of the heating member 620 by a predetermined distance and exposed to the outside.

At one end of the cooling rod 610, the collecting protrusion members 611 spaced apart from each other by the predetermined distance are formed.

The heating member 620 is heated to a predetermined temperature by receiving a current through a separate current provider (not shown).

In addition, a flow path 610a is formed inside the cooling rod 610 .

The flow path 610a is connected to a cooling water supply unit (not shown) through a tube.

The cooling water supply unit supplies cooling water having a predetermined cooling temperature to the flow path 610a of the cooling rod 610 .

Accordingly, the cooling rod 610 is cooled to a predetermined cooling temperature.

The second collecting part 600 configured as described above is disposed in the first area a1 of the above-described flange part body 110 .

The second collection unit 600 may be fixed to a separate bracket (not shown) formed in the first area a1 .

Therefore, the purified object heated inside the inner tube 50 flows inside the outer tube 10 by the vacuum of the vacuum pump, including the purified material and the vaporized organic material, and flows through the connector 111 in the first region a1 ) to flow.

In addition, the vaporized organic material may stick to the collecting protrusion member 611 in which the temperature difference is generated.

Accordingly, the organic material vaporized in the first region a1 may adhere to the collecting protrusion member 611 and be primarily removed.

However, the residual organic matter not collected by the collecting protrusion member 611 of the cooling rod 610 in the first area a1 flows to the second area a2 as described above, and enters the first collecting unit 2 Secondary collection may be achieved by

That is, in the present invention, the vaporized organic matter generated in the process of heating the object to be purified in the inner tube 50 of the heating unit 2 is sequentially removed by the first and second collecting units 2 and 600, and the third region The purity of the purified product flowing to (a3) may be increased to a certain level or higher compared to the case where collection is not performed in relatively multiple stages.

The present invention is not limited to the specific preferred embodiments described above, and without departing from the gist of the present invention as claimed in the claims, anyone with ordinary skill in the art to which the invention pertains can implement various modifications Of course, such modifications are intended to be within the scope of the claims.

1: heating part
2: trap unit
3: vacuum part
100: flange part
110: flange body
120: floating unit
130: door
200: crimp opening and closing device
300: continuous purification object supply unit
310: storage
311: storage container
312: bottom valve
320: moving unit
321: rotation motor
322: axis of rotation
323: transfer screw
330: stirring unit
331: coupling member
332: support shaft
333: stirring blade

Claims (5)

A sublimation purification apparatus comprising: a heating unit for heating and sublimating an object to be purified; and a vacuum unit for forming a vacuum in the heating unit;
The foreign material collecting unit for sublimation purification apparatus, characterized in that it comprises an organic material collecting unit for collecting multiple organic matter sublimed in the heating unit.
The method of claim 1,
The organic matter collecting unit has a first collecting unit and a second collecting unit,
The first collecting unit includes a first collecting unit body having a cylindrical shape with an open top, a ring body installed on the upper end of the first collecting unit body, a thermoelectric module, and a blowing means;
The thermoelectric module has a plurality of collecting members and a current providing device for providing current to the plurality of collecting members,
One surface of each of the plurality of collecting members forms a cooling surface and the other surface forms a heating surface,
A foreign material collecting unit for a sublimation purification apparatus, characterized in that the cooling surface of each of the plurality of collecting members is an inner surface, and the heating surface is formed as an outer surface.
3. The method of claim 2,
Each of the plurality of collecting members is bent in an A shape,
Each of the plurality of collecting members has a lower member having a first length, and an upper member bent at the upper end of the lower member,
The angle between the lower member and the upper member forms an obtuse angle,
The lower end member of each of the plurality of collecting members is disposed in the vicinity of the inner wall of the first collecting unit body, and arranged at regular intervals along the circumferential direction of the first collecting unit body,
The upper end members bent at the upper end of each of the lower end members extend to the central position of the ring body, and the ends of each of the upper end members are connected to each other.
4. The method of claim 3,
The second collecting unit has a cooling rod formed of a metal having a certain length, and a heating member disposed to surround the outer periphery of the cooling rod,
The cooling rod is formed of a stainless material,
The length of the heating member is formed to be shorter than the length of the cooling rod.
One end of the cooling rod is spaced apart from the end of the heating member by a predetermined distance and exposed to the outside,
A foreign material collecting unit for a sublimation purification apparatus, characterized in that the collecting protrusion members spaced apart from each other by a predetermined distance are formed at one end of the cooling rod.
A sublimation purification apparatus comprising the foreign material collecting unit of claim 1 .

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