KR20220075828A - Mass spectrometer - Google Patents

Abstract

The present invention provides a sample introduction unit, an ionization unit connected to the sample introduction unit and ionizing the sample introduced from the sample introduction unit, an extraction lens adjacent to the ionization unit, and a first guy guiding an ion beam extracted from the extraction lens An ion lens unit including a guiding lens and a second guiding lens, and a detector for detecting the ion beam guided by the ion lens unit, wherein the central axis of the first guiding lens and the second guiding The central axes of the lenses provide the mass spectrometers spaced apart from each other.

Description

Mass spectrometer {MASS SPECTROMETER}

The present invention relates to a mass spectrometer, and more particularly, to a mass spectrometer including guiding lenses having central axes spaced apart from each other.

As air and water pollution, including fine dust, is accelerating, a method capable of measuring and analyzing it is required. A mass spectrometer may be used for such measurement and analysis.

A mass spectrometer is an instrument for identifying or analyzing a chemical agent or the like by mass spectrometry. Such a mass spectrometer may measure the mass of a material as a mass-to-charge ratio to analyze components of a sample. A sample may be ionized using a variety of methods within the mass spectrometer. The ionized sample may be accelerated by passing through an electric and/or magnetic field. That is, a path of some or all of the ionized sample may be bent by an electric field and/or a magnetic field. The detector may detect the ionized sample.

One technical object of the present invention is to provide a mass spectrometer with improved measurement accuracy.

The problem to be solved by the present invention is not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those of ordinary skill in the art from the description below.

In order to solve the above technical problems, the mass spectrometer according to an embodiment of the present invention includes a sample introduction unit, an ionizer connected to the sample introduction unit, and an ionization unit for ionizing a sample introduced from the sample introduction unit, an extraction lens adjacent to the ionization unit, and An ion lens unit including a first guiding lens and a second guiding lens for guiding the ion beam extracted from the extraction lens, and a detector for detecting the ion beam guided by the ion lens unit, A central axis of the first guiding lens and a central axis of the second guiding lens may be spaced apart from each other.

It may further include an interface unit between the ionization unit and the ion lens unit, and a mass separation unit between the ion lens unit and the detection unit.

The extraction lens may include a first extraction lens and a second extraction lens, and the first extraction lens and the second extraction lens may each be arranged such that a central axis coincides with a central axis of the first guiding lens.

Each of the first extraction lens and the second extraction lens may have a cone shape in which a diameter of a front opening is smaller than a diameter of a rear opening.

At least a portion of the second extraction lens may be located inside the first extraction lens.

The ion lens unit may further include a third guiding lens adjacent to the second guiding lens, and the third guiding lens may be disposed such that a central axis thereof coincides with a central axis of the second guiding lens.

The ion lens unit further includes a third guiding lens and a fourth guiding lens adjacent to the second guiding lens, wherein each of the third guiding lens and the fourth guiding lens has a central axis of the second guiding lens. It may be arranged to coincide with the central axis of the ding lens.

Each of the third guiding lens and the fourth guiding lens may have a structure in which a hollow columnar shape protrudes from a flat plate in the same direction.

Each of the third guiding lens and the fourth guiding lens may have a structure in which a hollow columnar shape protrudes from a flat plate in opposite directions.

The first guiding lens may include a first part and a second part connected to the first part to form an integral body, and the second guiding lens may be provided under the second part of the first guiding lens. can

The first portion of the first guiding lens has a hollow columnar shape, and the second portion of the first guiding lens has a hollow columnar shape cut by a plane including its central axis, and the second A lower portion of the second portion may be exposed to the outside, and an upper portion of the second portion may be blocked from the outside.

The second guiding lens is spaced apart from the first portion of the first guiding lens, an upper portion of the second guiding lens is exposed to the outside, and a lower portion of the second guiding lens is blocked from the outside. can

The sample introduction unit is connected to a nebulizer that converts a liquid sample into an aerosol state, and the nebulizer, and controls the flow of the aerosol so that only a relatively small aerosol can move to the ionization unit through temperature control. It may include a spray chamber that does.

The ionization unit is connected to the spray chamber of the sample introduction unit, the innermost first tube, the end faces the ion lens unit, the third tube is disposed at the outermost, between the first tube and the third tube It may include a second tube disposed in, and an induction coil having a spiral shape surrounding the outside of the third tube.

The first guiding lens and the second guiding lens are respectively connected to voltage application units, and the first and second guiding lenses control the path of the ion beam by the voltage applied to the voltage application units. can

A voltage applied to the voltage applying units may be selected in a range of -300 V to +300 V.

The mass spectrometer according to embodiments of the present invention can block photons, neutral particles, etc. through guiding lenses whose central axes are spaced apart from each other and control the path of ions to be analyzed, so that measurement accuracy can be improved. have.

1 is a conceptual diagram for explaining a mass spectrometer according to embodiments of the present invention.
2, 4, and 6 are enlarged views for explaining an ion lens unit of a mass spectrometer according to embodiments of the present invention, respectively, corresponding to a portion A of FIG. 1 .
3, 5, and 7 are simulation diagrams for explaining a path of an ion beam within an ion lens unit of a mass spectrometer according to embodiments of the present invention.

In order to fully understand the configuration and effects of the present invention, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention is not limited to the embodiments disclosed below, but may be implemented in various forms and various modifications and changes may be made. However, it is provided in order to complete the disclosure of the present invention through the description of the present embodiment, and to fully inform those of ordinary skill in the art to which the present invention pertains to the scope of the invention. In the accompanying drawings, for convenience of explanation, the size is enlarged than the actual size, and the ratio of each component may be exaggerated or reduced.

The terminology used herein is for the purpose of describing the embodiments and is not intended to limit the present invention. Also, unless otherwise defined, terms used herein may be interpreted as meanings commonly known to those of ordinary skill in the art.

In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, 'comprises' and/or 'comprising' means that a referenced component, step, operation and/or element is the presence of one or more other components, steps, operations and/or elements. or addition is not excluded.

When a layer is referred to herein as being 'on' another layer, it may be formed directly on top of the other layer, or a third layer may be interposed therebetween.

Although terms such as first and second are used herein to describe various regions, layers, and the like, these regions and layers should not be limited by these terms. These terms are only used to distinguish one region or layer from another. Accordingly, a part referred to as the first part in one embodiment may be referred to as the second part in another embodiment. The embodiments described and illustrated herein also include complementary embodiments thereof. Parts indicated with like reference numerals throughout the specification indicate like elements.

Hereinafter, embodiments of the mass spectrometer according to the present invention will be described in detail with reference to the drawings.

1 is a conceptual diagram for explaining a mass spectrometer according to embodiments of the present invention.

Referring to FIG. 1 , the mass spectrometer according to the present invention includes a sample introduction unit 10 , an ionization unit 20 , an interface unit 30 , an ion lens unit 40 , a reaction unit 50 , and a mass separation unit 60 . and a detection unit 70 . Although the mass spectrometer according to the present invention has been illustrated and described as being a mass spectrometer using inductively coupled plasma (ICP), this is merely exemplary and the present invention is not limited thereto, and the mass spectrometer according to the present invention is described below. Various types of mass spectrometers including the illustrated and described ion lens unit 40 may be used.

The sample introduction unit 10 may include a nebulizer 110 and a spray chamber 120 . The nebulizer 110 may change a sample in a liquid state into an aerosol state and inject it into the spray chamber 120 . The spray chamber 120 may be connected to the nebulizer 110 . The spray chamber 120 may reduce fluctuations in the sample and make the size and amount of the sample moving to the ionization unit 20 to be described later constant. Specifically, the spray chamber 120 may control the flow of the aerosol so that only a relatively large aerosol is removed through temperature control and only a relatively small aerosol moves to the ionization unit 20 . Although not shown, a carrier gas may be supplied to the nebulizer 110 and/or the spray chamber 120 through at least one gas supply pipe. The carrier gas may cause the sample to be introduced into the plasma P.

The ionization unit 20 may be connected to the sample introduction unit 10 . The ionizer 20 may be referred to as, for example, a plasma torch. The ionizer 20 may include a first tube 201 , a second tube 202 , a third tube 203 , and an induction coil 220 .

The first tube 201 may be connected to the spray chamber 120 of the sample introduction unit 10 , and may be disposed at the innermost side of the ionization unit 20 . The third tube 203 may be disposed on the outermost side of the ionizer 20 , and the second tube 202 may be disposed between the first tube 201 and the third tube 203 . The second tube 202 and the third tube 203 may be connected to the first gas supply pipe 212 and the second gas supply pipe 213 , respectively. The first to third tubes 201 , 202 , and 203 may each have a hollow column shape extending in the first direction D1 . The first to third tubes 201 , 202 , and 203 may have a concentric circle shape in which central axes coincide with each other in view of a cross-sectional area cut in a plane perpendicular to the first direction D1 . The first to third tubes 201 , 202 , and 203 may be made of, for example, quartz, alumina, platinum, or sapphire.

The sample and carrier gas may move through the first tube 201 , and auxiliary gas may move through the first gas supply pipe 212 and the second tube 202 , and the second gas supply pipe 213 . ) and the third tube 203 may move a coolant gas. The auxiliary gas may prevent or minimize damage to the ends of the first and second tubes 201 and 202 due to contact with the plasma P. The cooling gas may prevent or minimize damage to the inner wall of the third tube 203 in contact with the plasma P. The carrier gas, auxiliary gas, and cooling gas may include, for example, argon (Ar).

The induction coil 220 may have, for example, a spiral shape that surrounds the outside of the third tube 203 at least twice or more. The induction coil 220 may generate a strong electromagnetic field that changes with time inside the ionizer 20 . The electromagnetic field generated by the induction coil 220 may generate the plasma P by discharging the gas therein. The high-temperature plasma P may ionize the sample in an aerosol state introduced from the sample introduction unit 10 .

Although not shown, the ionizer 20 may further include a high-power RF power source connected to the induction coil 220 and a shielding plate between the induction coil 220 and the outer wall of the third tube 203 .

The interface unit 30 may extract an ionized sample in the form of an ion beam from the plasma P generated by the ionizer 20 . The interface unit 30 may be adjacent to the ionization unit 20 in the first direction D1 . The interface unit 30 may be connected to the chamber CH. The interface unit 30 may be provided between the ionizer 20 and the chamber CH. Although not shown, the interface unit 30 may include a sampler cone and a skimmer cone for extracting an ion beam. The sampler cone and the skimmer cone, for example, may have a cone shape in which the width in the second direction D2 increases toward the first direction D1.

An ion lens unit 40 , a reaction unit 50 , a mass separation unit 60 , and a detection unit 70 may be provided inside the chamber CH. The interior of the chamber CH may be maintained in a vacuum state. At least one or more of the ion lens unit 40, the reaction unit 50, the mass separation unit 60, and the detection unit 70 may be provided in, for example, sub-chambers inside the chamber CH, The sub-chambers may be maintained in a vacuum state different from that of the inside of the chamber CH. The ion lens unit 40 , the reaction unit 50 , the mass separation unit 60 , and the detection unit 70 may be arranged, for example, along the first direction D1 , but the present invention is not limited thereto. .

The ion lens unit 40 may be provided between the interface unit 30 and the reaction unit 50 . The ion lens unit 40 may include at least one lens, and may block photons, neutral particles, etc. through the one or more lenses and may control the path of ions to be analyzed. Hereinafter, a detailed configuration of the ion lens unit 40 will be described in detail with reference to FIGS. 2 to 7 .

The reaction unit 50 may be provided between the ion lens unit 40 and the mass separation unit 60 . The reaction unit 50 may be referred to as a collision/reaction cell. Although not shown, the collision/reaction gas may be supplied to the reaction unit 50 through at least one gas supply pipe. The collision/reaction gas may collide with various ions inside the reaction unit 50 , and convert or analyze interfering ions (eg, ⁴⁰ Ar, ⁴⁰ Ar ¹⁶ O, ³⁸ ArH, etc.) into non-interfering species. Target ions can be converted into ions with different masses.

The mass separation unit 60 may be provided between the reaction unit 50 and the detection unit 70 . The mass separation unit 60 may use, for example, a quadrupole method, a double focusing magnetic sector method, or a time-of-flight method, and separates ions by mass It can be separated according to the charge ratio (m/z). Unlike the illustration, another mass separation unit 60 may be additionally provided between the ion lens unit 40 and the reaction unit 50 .

The detection unit 70 may be adjacent to the end of the mass separation unit 60 , and may detect a mass spectrum of ions to be analyzed separated by the mass separation unit 60 . The detection unit 70 may use, for example, a channel electron multiplier, a Faraday cup, or a discrete dynode electron multiplier.

FIG. 2 is an enlarged view for explaining an ion lens unit of a mass spectrometer according to embodiments of the present invention, and corresponds to part A of FIG. 1 . FIG. 3 is a simulation diagram for explaining a path of an ion beam within the ion lens unit of FIG. 2 .

2 and 3, the ion lens unit 40 (refer to FIG. 1) of the mass spectrometer according to the present invention includes a first extraction lens EL1, a second extraction lens EL2, and a first guiding lens GL1. ), a second guiding lens GL2 and a third guiding lens GL3 may be included. The first extraction lens EL1, the second extraction lens EL2, the first guiding lens GL1, the second guiding lens GL2, and the third guiding lens GL3 move in the first direction D1. can be arranged accordingly. In this case, the number of extraction lenses EL1 and EL2 and the guiding lenses GL1 , GL2 and GL3 is merely exemplary, and the present invention is not limited thereto.

The first and second extraction lenses EL1 and EL2 may be disposed adjacent to the ionization unit 20 (refer to FIG. 1 ) and the interface unit 30 (refer to FIG. 1 ). The first and second extraction lenses EL1 and EL2 may have, for example, a cone shape in which the width in the second direction D2 increases in the first direction D1. Each of the first and second extraction lenses EL1 and EL2 may have openings in front and rear surfaces. Hereinafter, the front side means a side facing the ionization unit 20 (refer to FIG. 1) and the interface unit 30 (refer to FIG. 1) (ie, a direction opposite to the first direction D1), and the back side is the reaction It means a surface facing the direction (ie, the first direction D1) toward the portion 50 (refer to FIG. 1). In each of the first and second extraction lenses EL1 and EL2 , the diameter of the front opening may be smaller than the diameter of the rear opening.

At least a portion of the second extraction lens EL2 may be located inside the first extraction lens EL1, for example. In other words, at least a portion of the second extraction lens EL2 may overlap the first extraction lens EL1 in the second direction D2 . However, the present invention is not limited thereto, and the first extraction lens EL1 and the second extraction lens EL2 may not overlap each other in the second direction D2, and the rear surface of the first extraction lens EL1 and The front surfaces of the second extraction lens EL2 may be spaced apart from each other in the first direction D1 .

The first voltage applying units V11 and V12 may be respectively connected to the first and second extraction lenses EL1 and EL2. For example, the first voltage applying units V11 and V12 may be respectively connected to an upper portion of the first extraction lens EL1 and a lower portion of the second extraction lens EL2. The first and second extraction lenses EL1 and EL2 by the voltage applied to the first voltage application units V11 and V12 connect the ionization unit 20 (refer to FIG. 1) and the interface unit 30 (refer to FIG. 1). The passed ion beam IB can be extracted.

The third guiding lens GL3 may be disposed adjacent to the reaction unit 50 (refer to FIG. 1 ). The third guiding lens GL3 may have a hollow pillar shape (eg, a hollow cylinder shape). Specifically, the third guiding lens GL3 may have a structure in which hollow columnar shapes protrude from one flat plate in both directions (the first direction D1 and the direction opposite to the first direction D1 ). The third voltage applying unit V3 may be connected to the third guiding lens GL3 .

The first and second guiding lenses GL1 and GL2 may be disposed between the second extraction lens EL2 and the third guiding lens GL3 . The first guiding lens GL1 may be disposed adjacent to the rear surface of the second extraction lens EL2 , and the second guiding lens GL2 may be disposed adjacent to the front surface of the third guiding lens GL3 . can For example, the front surface of the first guiding lens GL1 may be spaced apart from the rear surface of the second extraction lens EL2 in the first direction D1, and the rear surface of the second guiding lens GL2 may be 3 It may be spaced apart from the front surface of the guiding lens GL3 in the first direction D1 .

The first guiding lens GL1 may include a first part GL1a and a second part GL1b. The first part GL1a and the second part GL1b may be connected to each other to form an integral body. In detail, the second part GL1b may be connected to the rear surface of the first part GL1a to form an integral body with each other. The first portion GL1a may have a hollow pillar shape similar to the third guiding lens GL3 . The second part GL1b may have a shape such as a hollow columnar shape cut by a plane including a central axis thereof, and the lower part may be exposed to the outside and the upper part may be blocked from the outside.

The second guiding lens GL2 may be provided under the second part GL1b of the first guiding lens GL1, for example. Similar to the second part GL1b of the first guiding lens GL1 , the second guiding lens GL2 may have a shape such that a hollow columnar shape is cut by a plane including its central axis, and the first Unlike the second portion GL1b of the guiding lens GL1 , the upper portion may be exposed to the outside and the lower portion may be blocked from the outside. An upper portion of the second guiding lens GL2 may contact a lower portion of the second portion GL1b of the first guiding lens GL1 . The front surface of the second guiding lens GL2 may be spaced apart from the first portion GL1a of the first guiding lens GL1 in the first direction D1 .

Each of the first and second guiding lenses GL1 and GL2 may have openings in front and rear surfaces. In the second guiding lens GL2 , the diameter of the rear opening may be smaller than the diameter of the front opening.

The second voltage applying units V21 and V22 may be respectively connected to the first and second guiding lenses GL1 and GL2. For example, the second voltage applying units V21 and V22 may be respectively connected to an upper portion of the first guiding lens GL1 and a lower portion of the second guiding lens GL2 . By the voltage applied to the second voltage applying units V21 and V22, the first and second guiding lenses GL1 and GL2 are formed by the ion beam passing through the first and second extraction lenses EL1 and EL2. The path of IB) can be controlled. The voltage applied to the second voltage applying units V21 and V22 may be selected, for example, in a range of about -300 V to +300 V, and may be adjusted to determine an optimal path for each energy of the ions.

Specifically, in the ion beam IB that has passed through the first and second extraction lenses EL1 and EL2, ions having charges are bent by the voltage applied to the second voltage applying units V21 and V22. It can be directed to the third guiding lens GL3 and the reaction unit 50 (refer to FIG. 1 ) through the rear opening of the second guiding lens GL2, and photons, neutral particles, etc. having straightness are directed to the first axis AX1 ) in the first direction D1 and may not pass through the rear opening of the second guiding lens GL2 and may be blocked.

The first and second extraction lenses EL1 and EL2 and the first guiding lens GL1 may be disposed such that a central axis coincides with the first axis AX1 . The second and third guiding lenses GL2 and GL3 may be disposed such that a central axis coincides with the second axis AX2 . In particular, the rear opening of the second guiding lens GL2 may be positioned where the second axis AX2 passes. The first axis AX1 and the second axis AX2 may be axes parallel to the first direction D1 , and may be spaced apart from each other by a first distance OD in the second direction D2 .

The mass spectrometer according to the present invention blocks photons, neutral particles, metastable ions, etc. through the first and second guiding lenses GL1 and GL2 whose central axes are spaced apart from each other, and ions to be analyzed By controlling their path, the accuracy of the measurement can be improved. The path is controlled by the first and second guiding lenses GL1 and GL2 so that ions passing through the rear opening of the second guiding lens GL2 are, for example, an incident angle of about 30 degrees or less, about 5 The ions may be ions having an ion energy of about 30 eV to about 300 atomic mass units (amu) or less.

4 is an enlarged view for explaining an ion lens unit of a mass spectrometer according to embodiments of the present invention, and corresponds to part A of FIG. 1 . FIG. 5 is a simulation diagram for explaining a path of an ion beam within the ion lens unit of FIG. 4 . Hereinafter, for convenience of description, descriptions of the items substantially the same as those described with reference to FIGS. 2 and 3 will be omitted and differences will be described in detail.

4 and 5, the ion lens unit 40 (refer to FIG. 1) of the mass spectrometer according to the present invention includes a first extraction lens EL1, a second extraction lens EL2, and a first guiding lens GL1. ), a second guiding lens GL2 , a third guiding lens GL3 , and a fourth guiding lens GL4 may be included. The first and second extraction lenses EL1 and EL2 and the first to fourth guiding lenses GL1 , GL2 , GL3 and GL4 may be arranged along the first direction D1 . The second, third, and fourth guiding lenses GL2 , GL3 , and GL4 may be disposed such that a central axis coincides with the second axis AX2 .

The third guiding lens GL3 and the fourth guiding lens GL4 may be disposed adjacent to the reaction unit 50 (refer to FIG. 1 ). The third and fourth guiding lenses GL3 and GL4 may have substantially the same shape as each other. The third and fourth guiding lenses GL3 and GL4 may have a hollow pillar shape (eg, a hollow cylinder shape). Specifically, each of the third and fourth guiding lenses GL3 and GL4 has a hollow columnar shape in the same direction (eg, the first direction D1 or the opposite direction to the first direction D1) from the flat plate. It can have this protruding structure. The third voltage applying units V31 and V32 may be respectively connected to the third and fourth guiding lenses GL3 and GL4 .

6 is an enlarged view for explaining an ion lens unit of a mass spectrometer according to embodiments of the present invention, and corresponds to part A of FIG. 1 . FIG. 7 is a simulation diagram for explaining a path of an ion beam within the ion lens unit of FIG. 6 . Hereinafter, for convenience of description, descriptions of the items substantially the same as those described with reference to FIGS. 2, 3, 4 and 5 will be omitted and differences will be described in detail.

6 and 7 , the third and fourth guiding lenses GL3 and GL4 may have symmetrical shapes. Each of the third and fourth guiding lenses GL3 and GL4 may have a structure in which a hollow columnar shape protrudes from a flat plate in opposite directions. Specifically, the third guiding lens GL3 may have a structure in which a hollow columnar shape protrudes from the flat plate in one direction (eg, in a direction opposite to the first direction D1), and the fourth guiding lens The GL4 may have a structure in which a hollow columnar shape protrudes from the flat plate in a direction opposite to the one direction (eg, the first direction D1 ).

In the above, embodiments of the present invention have been described with reference to the accompanying drawings, but those of ordinary skill in the art to which the present invention pertains can practice the present invention in other specific forms without changing the technical spirit or essential features. You will understand that there is Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

Claims (16)

sample introduction;
an ionization unit connected to the sample introduction unit to ionize the sample introduced from the sample introduction unit;
an ion lens unit including an extraction lens adjacent to the ionization unit and a first guiding lens and a second guiding lens for guiding the ion beam extracted from the extraction lens;
Comprising a detection unit for detecting the ion beam guided by the ion lens unit,
A central axis of the first guiding lens and a central axis of the second guiding lens are spaced apart from each other.
The method of claim 1,
an interface unit between the ionization unit and the ion lens unit; and
The mass spectrometer further comprising a mass separation unit between the ion lens unit and the detection unit.
The method of claim 1,
The extraction lens comprises a first extraction lens and a second extraction lens,
The first extraction lens and the second extraction lens are each disposed such that a central axis coincides with a central axis of the first guiding lens.
4. The method of claim 3,
The first extraction lens and the second extraction lens each have a cone shape in which a diameter of a front opening is smaller than a diameter of a rear opening.
4. The method of claim 3,
at least a portion of the second extraction lens is located inside the first extraction lens.
The method of claim 1,
The ion lens unit further includes a third guiding lens adjacent to the second guiding lens,
The mass spectrometer is arranged such that the central axis of the third guiding lens coincides with the central axis of the second guiding lens.
The method of claim 1,
The ion lens unit further includes a third guiding lens and a fourth guiding lens adjacent to the second guiding lens,
The third guiding lens and the fourth guiding lens are each disposed such that a central axis thereof coincides with a central axis of the second guiding lens.
8. The method of claim 7,
The third guiding lens and the fourth guiding lens each have a structure in which a hollow columnar shape protrudes from a flat plate in the same direction.
8. The method of claim 7,
The third guiding lens and the fourth guiding lens each have a structure in which a hollow columnar shape protrudes from a flat plate in opposite directions.
The method of claim 1,
The first guiding lens includes a first part and a second part connected to the first part to form an integral body,
and the second guiding lens is provided below the second portion of the first guiding lens.
11. The method of claim 10,
The first portion of the first guiding lens has a hollow columnar shape,
The second portion of the first guiding lens has a shape of a hollow columnar shape cut by a plane including its central axis,
A lower portion of the second portion is exposed to the outside, and an upper portion of the second portion is blocked from the outside.
11. The method of claim 10,
The second guiding lens is spaced apart from the first portion of the first guiding lens,
An upper portion of the second guiding lens is exposed to the outside, and a lower portion of the second guiding lens is blocked from the outside.
The method of claim 1,
The sample introduction section includes:
a nebulizer that converts a sample in a liquid state into an aerosol state; and
A mass spectrometer including a spray chamber connected to the nebulizer and controlling the flow of the aerosol so that only a relatively small aerosol can move to the ionizer through temperature control.
14. The method of claim 13,
The ionization unit:
a first tube connected to the spray chamber of the sample introduction part and disposed at the innermost side;
a third tube having an end facing the ion lens unit and disposed at the outermost side;
a second tube disposed between the first tube and the third tube; and
and an induction coil having a spiral shape surrounding the outside of the third tube.
The method of claim 1,
The first guiding lens and the second guiding lens are respectively connected to voltage applying units,
The first and second guiding lenses are a mass analyzer for controlling a path of the ion beam by a voltage applied to the voltage applying units.
16. The method of claim 15,
A voltage applied to the voltage applying units is selected from a range of -300 V to +300 V.

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