KR20220041279A - Shock absorbing desk - Google Patents

Abstract

Disclosed is a concrete pad for a vibration isolation table. According to one embodiment of the present invention, the concrete pad for a vibration isolation table enables a reinforcement material to be stably aligned and minimizes a joint placement amount of concrete.

Description

Concrete pad for vibration isolation table {Shock absorbing desk}

The present invention relates to a concrete pad for a vibration damping table used to stably seat semiconductor equipment.

In general, a clean room with a raised floor is used as a manufacturing plant for high-tech products such as semiconductor or display manufacturing, and very precise measuring equipment and ultra-precision processing equipment for manufacturing integrated circuits in the micron to nano level are installed in these factories.

Since these ultra-precision equipment are very sensitive to environmental vibrations, defects occur in a specific frequency band, or operation itself becomes impossible.

The level of environmental vibration is classified according to the magnitude of acceleration for each frequency band, which is the class classification of VC (vibartion criteria)-Curve provided by ISO2631.

In order to create the required environmental vibration level for each equipment, damping devices and damping technologies are used, but in general, a concrete pad having the same size as the floor projected area of the equipment is installed under the equipment and the required environmental vibration is allowed. To suit the characteristics, installing a rigid structure under the concrete pad or installing a damper between the lower rigid structure and the concrete pad is mainly used. A concrete pad is constructed.

The concrete pad is manufactured in the form of a case in which the floor and four sides are sealed with a steel plate of a certain thickness for the purpose of suppressing corrosion and dust generation, the inside is filled with reinforced concrete, and the upper surface is an antistatic tile or paint , or with a conductor.

Numerous casters (support points) that transmit the load of the equipment to the floor are irregularly arranged at the bottom of the equipment installed on the top of the concrete pad for vibration isolation table, and the internal mass of the equipment is also transmitted from the outside because the size of each caster is different in size. The response to the vibration energy is also different for each caster at each position, so there is a possibility that resonance may occur or a problem that the acceleration of a specific frequency is amplified may occur.

It is an important requirement that all casters at the bottom of any one equipment be installed on a structure having the same dynamic characteristics at any point. In this very large or complex case, due to transport and installation problems, a method of bolting concrete pads manufactured in each size to the site is used.

Concrete pads connected by these pins have a problem of showing different dynamic characteristics, and as another method, there is a method in which a steel case is manufactured from the outside, assembled at the place where the equipment will be installed, and then concrete is poured. In this case, there is no problem with the dynamic characteristics, but the problem of contamination of the clean room due to concrete dust and contaminated water during on-site pouring and that it takes about 28 days for the concrete to completely harden, resulting in a considerable waiting time until equipment installation.

Recently, as a method to solve this problem, a concrete pad is made into several pieces, but a separate connection space is formed with an iron plate on the side where the pieces are to be connected, and the reinforcing bar inside the concrete is protruded into the connecting space to connect with the reinforcing bar coupler. Methods are being tried to unify the concrete pieces by connecting the pieces with the padding joint of the floor iron plate and then pouring the concrete into the joint space.

The connection part formation method provided by these existing methods of dividing and reassembling and reassembling concrete blocks, which is such an existing attempt, uses iron plates to seal all sides so that dust generated from concrete does not contaminate the clean room during the handling of concrete blocks. In order to suppress dust, the connection part is also joined with steel plates, and for the purpose of suppressing separation (cracks) at the interface between the steel plate and the concrete joint surface, a method of joining wire mesh or anchors on both sides of the steel plate is used. There is a problem that material, processing, and assembly costs are very high, and since the one-point rebar connection method is used for connecting rebar, the reinforcing bar protrudes through the steel plate installed in the connecting part to the middle point of the connecting part and protrudes from the other concrete block. It uses a method of assembling a rebar and a screw-type coupler, but due to the inaccurate characteristics of the installation work of rebars placed and woven by hand rather than machining, the rebars protruding from each separately manufactured concrete block have the correct angle and distance from each other. Since it is difficult to meet with a screw-type coupler and the problem that the screw-type coupler is not assembled frequently occurs, place the concrete blocks to be connected and place the couplers together and then pour each piece inside, then separate each piece again, and the location where it should be installed Since the method of pouring the connection part after transporting it to the furnace is used, the effect of reducing the manufacturing period is less and the cost is rather increased, so countermeasures are needed.

Republic of Korea Patent No. 10-0791079

Embodiments of the present invention are to provide a concrete pad for vibration damping table for minimizing vibration transmission of equipment (equipment, machine) installed in a floating floor structure such as a clean room with a raised floor.

A concrete pad for vibration damping according to an embodiment of the present invention includes: first body portions 100 and 100a positioned to face each other on a floor surface 10; a second body part 200 formed by concrete curing integrally with the first body part 100 and 100a between the first body parts 100 and 100a; Reinforcing materials (300, 300a) provided for strength reinforcement on the inside of the first body portion (100, 100a); Socket groove portions (400, 400a) formed to a predetermined depth toward the inner side of the first body portion (100, 100a) from the extended end of the reinforcing material (300, 300a); and It is provided on the second body part 200 and includes a connection part 500 having both ends coupled to the socket groove parts 400 and 400a so that the spaced apart first body parts 100 and 100a are connected to each other, The first body parts 100 and 100a have a predetermined length toward the upper side at positions other than the positions facing the second body part 200 from the bottom plates 102 and 102a in contact with the bottom surface 10 . The bent outer plates 104 and 104a are integrally formed.

In the first body portion 100, 100a, the bottom plate 102, 102a and the outer plate 104, 104a are connected at the opposite position facing the outer plate 104, 104a, and a groove portion 111, 111a) is formed on the first and second side frames (110, 110a); It includes first and second support frames 120 and 120a fitted to the groove portions 111 and 111a and having first and second insertion portions 122 and 122a formed at positions facing the reinforcing materials 300 and 300a. do.

The first and second side frames 110 and 110a are fastened by a coupling member 20 provided so that the first body parts 100 and 100a are coupled to each other in a horizontal direction.

Before the first body portion (100, 100a) is molded, the first and second insertion portions (122, 122a) are coupled from the outside to the inside so that the reinforcing materials (300, 300a) are positioned in their original positions and coupled with the ends. The socket portions 600 and 600a are provided.

The socket parts 600 and 600a include body parts 602 and 602a forming an external shape; A first socket groove (610, 610a) coaxial with the reinforcing material (300, 300a) and formed in the inner center of the body portion (602, 602a) facing the ends, and having a thread on the inner surface along the axial direction; After the first socket groove (610, 610a) is opened to a predetermined depth at a position spaced outward in the radial direction based on the curing of the first body part (100, 100a) is finished, the socket part (600) , 600a) including flanges 620 and 620a provided with second socket grooves 622 and 622a providing a space for inserting a tool for drawing out the first and second side frames 110 and 110a to the outside. do.

A polygonal concave-convex groove G is formed in the first body part 100 and 100a in an inner vertical direction along an edge facing the second body part 200 .

The concave-convex grooves G are spaced apart from each other at equal intervals in the left and right directions with respect to the connection part 500 .

The concave-convex grooves G are symmetrically disposed in the first body portions 100 and 100a positioned to face each other.

The concave-convex grooves G are arranged to be staggered from each other in the first body portions 100 and 100a positioned to face each other.

The connecting portion 500 includes a first coupler 510 having threads at both ends in the axial direction; The first coupler 510 includes a nut portion N having a screw thread formed thereon on the inner circumferential surface so that the reinforcing materials 300 and 300a are respectively coupled to the left and right ends of the first coupler 510 .

A reinforcing plate 50 having one end supported on the outer plate 104 and 104a and the other end supported on the upper surface of the bottom plate 102 and 120a is installed in the first body portion 100 and 100a. do it with

Support plates 106 and 106a on which the other end of the reinforcing plate 50 is supported are provided on the first body portions 100 and 100a along the inner surfaces of the outer plates 104 and 104a.

In the embodiments of the present invention, a large-area concrete pad for a vibration damping table is divided into an easy-to-handle area, and pre-fabricated so that it can be connected and poured after assembling at an installation site, making it easy to transport and install, and to speed up delivery.

In the embodiments of the present invention, safety of workers for manufacturing a concrete pad for vibration isolation table is improved, manufacturing is easy, and structural strength due to vibration is improved.

In the embodiments of the present invention, the alignment of the reinforcement is made stably, and the amount of joint pouring of the concrete poured into the second body part is minimized.

In the embodiments of the present invention, the structural rigidity of the concrete pad for the vibration damping table is improved, so that the semiconductor equipment can be stably supported, and the dimensional accuracy is improved because it can be manufactured within the assembly tolerance range.

1 is a perspective view showing a state in which a reinforcing material is installed inside before concrete is poured into a concrete pad for vibration isolation according to an embodiment of the present invention;
2 is a perspective view illustrating a state in which a concrete pad for a vibration isolation table according to an embodiment of the present invention is manufactured.
3 is a cross-sectional view illustrating a socket unit provided in a concrete pad for vibration isolation according to an embodiment of the present invention.
4 is a plan view illustrating a state before concrete is poured into a second main body of a concrete pad for vibration isolation according to an embodiment of the present invention.
5 is a plan view showing the inside of a concrete pad for vibration isolation according to an embodiment of the present invention.
6 is a cross-sectional view taken along line AA of FIG.
7 to 8 are perspective views showing the coupling state and the inside of the concrete pad for vibration damping table according to an embodiment of the present invention.
9 is a cross-sectional view illustrating a state in which a connection part provided in a concrete pad for vibration isolation table is coupled to a reinforcing material according to an embodiment of the present invention.
10 to 13 are perspective views illustrating a manufacturing process of a concrete pad for a vibration damping table according to an embodiment of the present invention.

A concrete pad for a vibration damping table according to an embodiment of the present invention will be described with reference to the drawings.

1 to 7, the concrete pad 1 for the vibration isolation table according to the present embodiment is a first body part in which a plurality of units are assembled with each other on the floor surface 10 so that the semiconductor equipment, which is vulnerable to vibration, is stably seated. (100, 100a) is provided.

The first body parts 100 and 100a are pre-fabricated in a place other than the actual semiconductor equipment installation place, and then move to the semiconductor equipment installation place using a separate heavy equipment to set the installation position. The final assembly is completed by pouring and curing for the main body 200 .

In addition, in this embodiment, the first body parts 100 and 100a are variously changed in addition to the lengths shown in the drawings in width and length according to the size of the place where the semiconductor equipment is to be installed. It is not limited to the specified shape and length.

The first body parts 100 and 100a may be variously changed without necessarily being limited to the shape shown in the drawings, and may be changed into various shapes, for example, a polygonal rectangular parallelepiped shape or a disk shape.

In addition, in the present embodiment, when the first body parts 100 and 100a are changed to various shapes as described above, the shape of the second body parts 200 may also be changed for engagement with each other.

Therefore, although this embodiment is illustrated in the form of a rectangular parallelepiped in the form of a plate as an example, the present embodiment is not necessarily limited thereto, and may be manufactured in various shapes and lengths, and is assembled with each other via the second body portion 200 to be described later.

For example, in this embodiment, after assembling and pouring concrete for the first body part 100 and 100a is made, the production is made through concrete pouring for the second body part 200 .

In this embodiment, the width of the second body part 200 is minimized so that the strength at the joint surface of the first body part 100 and 100a and the second body part 200 is stably maintained, and the reinforcing materials 300 and 300a ) to accurately maintain the arrangement of the reinforcing materials 300 and 300a using the socket portions 600 and 600a, which will be described later, in order to accurately maintain the arrangement without errors as originally designed.

In addition, the second body portion 200 changes the structure so that the connecting portion 500 (see FIG. 7 ) is coupled with the reinforcing materials 300 and 300a precisely by the shortened width, so that the structural rigidity due to vibration and cracking is reduced. By preventing it, durability can be improved by improving tensile strength.

Since the first body part 100 and 100a is molded before the second body part 200 in the manufacturing stage rather than the final assembly site, concrete injection and curing for the second body part 200 is performed. It can more accurately cope with the different sizes of the assembly site.

In addition, in this embodiment, the second body part 200 is not manufactured in advance, but only the first body parts 100 and 100a are standardized in advance and manufactured in multiple pieces, and the second body part 200 is manufactured in the field. Since this method is also possible, installation in the field can be carried out easily.

In addition, when the first body parts 100 and 100a are moved through a vehicle to a position where the semiconductor equipment is to be mounted, the reinforcing materials 300 and 300a, which will be described later, do not protrude to the outside, so that movement and storage are advantageous.

Although the first body parts 100 and 100a and the second body part 200 are made of concrete, it may be possible to change them to other materials.

To this end, the concrete pad 1 for vibration isolation according to the present embodiment is disposed between the first body parts 100 and 100a positioned to face each other on the floor surface 10 and the first body parts 100 and 100a. The second body part 200 is integrally molded with the first body part 100 and 100a by concrete curing, and the reinforcing materials 300 and 300a provided inside the first body part 100 and 100a for strength reinforcement. ), and the socket groove portions 400 and 400a formed to a predetermined depth from the extended ends of the reinforcing materials 300 and 300a toward the inside of the first body portions 100 and 100a and the second body portion 200. It is provided in and includes a connection part 500 having both ends coupled to the socket groove part 400 and 400a so that the spaced apart first body parts 100 and 100a are connected to each other, wherein the first body parts 100 and 100a ) is the outer plate (104, 104a) bent upward to a predetermined length in the remaining positions except for the position facing the second body part 200 from the bottom plate (102, 102a) in contact with the bottom surface (10) ) is integrally formed.

The first body portions 100 and 100a are formed in the same size, and in positions other than the outer plates 104 and 104a integrally formed with the bottom plates 102 and 102a, the first and second supporting frames 120 and 120a are provided. It is fitted to the first and second side frames 110 and 110a to be described later.

The first and second support frames (120, 120a) are coupled to the first and second side frames (110, 110a) only until the first body part (100, 100a) is cured with concrete, and the first body part ( After the curing for 100, 100a) is finished, it is separated from the first and second side frames 110 and 110a.

In the first body part 100 and 100a according to the present embodiment, a separate frame constituting the external shape is not formed as a whole, and only the bottom plates 102 and 102a except for the position facing the second body part 200 . Since the connected outer plates 104 and 104a are provided, it is possible to accurately align the reinforcing materials 300 and 300a.

The first body parts 100 and 100a are formed of concrete, and are composed of an outer side having an outer finish and a side having an inner connecting portion based on the drawings.

The outer side corresponds to the positions shown by a1 and b1, a2 and b2, and the inner connection part corresponds to a position to be formed as the main body 200.

In this embodiment, the outer side bends and covers one iron plate, the other part is manufactured in an open exposed concrete state, and concrete is poured into the second body part 200 to make the first body part 100, 100a) and the second body part 200 are manufactured to be bonded to each other.

The reinforcing materials 300 and 300a are molded together in the first body portion 100 and 100a. Since the reinforcing materials 300 and 300a do not protrude to the outside of the first body portions 100 and 100a and are respectively coupled to the connection portions 500 to be described later, corrosion or deformation due to external exposure is prevented.

When the reinforcing materials 300 and 300a are not exposed to the outside of the first body parts 100 and 100a, the structural strength of the first body parts 100 and 100a is maintained over time, so the strength reflected in the initial design is kept constant.

In addition, when the first body portion 100, 100a is moved, there is no problem due to the damage of the reinforcing materials 300 and 300a or the damage of the first body portions 100 and 100a connected to the reinforcing materials 300 and 300a. Structural strength is always kept constant.

In addition, when a plurality of the first body parts 100 and 100a are made into blocks in advance, they can be easily stacked, thereby improving the convenience of storage.

In the first body portion 100, 100a, the bottom plate 102, 102a and the outer plate 104, 104a are connected at the opposite position facing the outer plate 104, 104a, and a groove portion 111, 111a) is formed on the first and second side frames (110, 110a) and the grooves (111, 111a) are fitted and coupled to the first and second insertion parts 122 at positions facing the reinforcing materials 300 and 300a; The first and second support frames 120 and 120a on which 122a is formed are provided.

The groove portions 111 and 111a extend relatively longer than the widthwise lengths of the first and second side frames 110 and 110a in the width direction to constitute the widthwise length of the second body portion 200 .

In addition, as for the grooves 111 and 111a, concrete is poured in the inner region where the reinforcing materials 300 and 300a are installed based on the first and second side frames 110 and 110a, and the outer region is for the installation work of the connection part 500 Since the space is provided, the operator can perform the work on the first body parts 100 and 100a and the work before pouring the second body part 200, so that a separate separation operation is possible.

In this embodiment, before the first body portions 100 and 100a are molded, the first and second insertion portions 122 and 122a are coupled from the outside to the inside so that the reinforcing materials 300 and 300a are positioned in their original positions. Socket portions 600 and 600a coupled to the ends are provided.

The socket parts 600 and 600a are pre-inserted into the first and second side frames 110 and 110a after the work on the reinforcing materials 300 and 300a is completed to maintain an accurate alignment state with the reinforcing materials 300 and 300a. Therefore, accurate installation can be made within the error range.

The socket parts 600 and 600a are formed in the inner center of the body parts 602 and 602a forming the outer shape and the body parts 602 and 602a coaxial with the reinforcing materials 300 and 300a and facing the ends, and , The first socket grooves 610 and 610a having threads on the inner surface along the axial direction, and the first socket grooves 610 and 610a are opened to a predetermined depth at positions spaced apart from each other in the radial direction based on the first socket grooves 610 and 610a. After curing for the first body portion 100, 100a is finished, a space into which a tool for withdrawing the socket portions 600 and 600a to the outside of the first and second side frames 110 and 110a is inserted. and flanges 620 and 620a provided with second socket grooves 622 and 622a provided therein.

After the socket parts 600 and 600a are installed on the first and second support frames 120 and 120a before concrete pouring for the first body parts 100 and 100a, the first body parts 100 and 100a are cured. After this is finished, it is separated from the first and second support frames 120 and 120a.

The socket portions 600 and 600a are provided to align a plurality of reinforcing materials 300 and 300a disposed in the horizontal and vertical directions to be positioned at the same position within a tolerance range.

Since the reinforcing materials 300 and 300a are coupled to the center of the first socket grooves 610 and 610a formed in the socket portions 600 and 600a, the one end extended when the socket portions 600 and 600a are installed. A phenomenon in which the positions of the reinforcing materials 300 and 300a are skewed or misaligned with each other are prevented from being assembled.

Since the body parts 602 and 602a are formed to be inclined in a cone shape toward the center toward the inner side of the first body parts 100 and 100a, when they are separated from the first and second support frames 120 and 120a, the second socket If the tool is rotated after inserting it into the holes 622 and 622a, it is easily separated.

The first socket holes 610 and 610a are threaded inside, so that when the reinforcing materials 300 and 300a are coupled, they may be coupled in a screw coupling shape.

Since the flanges 620 and 620a are kept in close contact with the outer surfaces of the first and second support frames 120 and 120a, a stable installation state is maintained.

A polygonal concave-convex groove G is formed in the first body part 100 and 100a according to the present embodiment in an inner vertical direction along an edge facing the second body part 200 .

The concave-convex groove G is a space formed as a space without concrete being injected when the concrete is poured into the first body part 100 and 100a, and is filled with the injected concrete when the second body part 200 is poured. .

The concave-convex groove G has an opening area formed in a direction facing the second body part 200 , so that when concrete is poured into the second body part 200 , the opening area is filled with concrete.

The concave-convex groove G is formed to support and reinforce the stress applied in the vertical and horizontal directions of the first and second body parts 100 and 100a and the second body part 200, so that vibration or repeated shock transmitted to the semiconductor equipment is provided. Reduces cracks in the first and second body parts 100, 100a, and 200 due to this.

The concave-convex grooves G are formed in a polygonal shape as shown in the drawings, but may be changed to other shapes and may be spaced apart from each other at equal intervals in the left and right directions with respect to the connecting portion 500 .

In this case, even when vibration is applied from either left or right direction toward the concave-convex groove G, stress concentration is not applied to a specific location, so structural stability of the first body parts 100 and 100a and the second body part 200 and strength is improved.

The concave-convex grooves G according to the present embodiment may be symmetrically disposed in the first body portions 100 and 100a positioned to face each other. In addition, the concave-convex grooves G may be alternately disposed in the first body portions 100 and 100a positioned to face each other. to be prepared in case it happens.

A reinforcing plate 50 has one end supported on the outer plates 104 and 104a and the other end supported on the upper surface of the bottom plates 102 and 120a of the first body portion 100 and 100a according to the present embodiment. is installed

The reinforcing plate 50 is installed only on the outer plates 104 and 104a except for the positions where the first and second support frames 120 and 120a are installed, and a plurality of them are spaced apart from each other at the same intervals.

The reinforcing plate 50 prevents deformation of the above-described bottom plates 102 and 102a and the outer plates 104 and 104a, and is bonded to the poured concrete to form the outer plates 104 of the first body parts 100 and 100a. 104a), it is possible to prevent deformation and cracking of the first body parts 100 and 100a from external vibrations and shocks by reinforcing the support rigidity for the position.

In the first body portion 100, 100a, the extended end of the reinforcing plate 50 is supported along a position spaced from the top to the lower side among the inner surfaces of the outer plates 104 and 104a. 106a) is provided.

The support plates 106 and 106a serve as ribs for reinforcing structural rigidity with respect to the outer plates 104 and 104a, and at the same time, the upper end of the reinforcing plate 50 is connected to the outer plates 104 and 104a and supports. Since it can be welded in close contact with the plates 106 and 106a, stable installation can be achieved.

Reinforcing materials 300 and 300a according to the present embodiment use a deformed reinforcing bar, so the adhesion strength with concrete is improved and structural strength is increased, so that deformation due to tensile and compressive stress can be minimized.

The reinforcing materials 300 and 300a include first reinforcing bars 310 and 310a disposed to face each other up and down in the inner transverse direction (long side direction) of the main body portions 100 and 100a, and the first reinforcing bars 310, 310a) and orthogonal to and includes second reinforcing bars 320 and 320a disposed to face up and down in the longitudinal direction (short side direction).

Since the first reinforcing bars 310 and 310a and the second reinforcing bars 320 and 320a are spaced apart from each other at the same first interval D1 in a lattice form, when the load of the semiconductor equipment is applied, the first body parts 100 and 100a It can be stably supported without the load being concentrated on a specific position of the

When the first and second reinforcing bars 310, 310a, 320, and 320a are arranged at a first interval D1, the first body portions 100 and 100a are formed by vibration even when the semiconductor equipment is positioned at any position on the upper surface. Since it is affected to a minimum, it is possible to reduce errors that may occur when semiconductor equipment is operated along with stable equipment operation.

If the first interval D1 is not maintained in the same manner as in the above-described embodiment, but different intervals are maintained, the spaced intervals of the first reinforcing bars 310 and 310a or the second reinforcing bars 320 and 320a are relatively As a concentrated load is applied to a section spaced away from each other, deformation occurs in the first body portion 100, 100a or becomes disadvantageous in terms of vibration absorption, so as in the present embodiment, the first and second reinforcing bars 310, 310a, 320, 320a It is advantageous to be spaced apart from each other by the same first interval D1.

The first and second side frames 110 and 110a are fastened by a coupling member 20 provided so that the first body parts 100 and 100a are coupled to each other in a horizontal direction.

When the first and second side frames 110 and 110a are fastened by the coupling member 20 in the horizontal direction, the work for the fastening is easily made by the operator, and the bottom plate 102, 102a works upward. Because the work is done from the side position rather than the method, human damage due to safety accidents is prevented and a safe working environment is maintained.

In addition, when the size of the bottom plates 102 and 102a is large as in the present embodiment, the operator can more easily install the coupling member 20, thereby improving the workability of the operator.

In this embodiment, the first body part 100, 100a is in close contact with each other through the first and second side frames 110 and 110a, and in close contact with each other through the coupling member 20, the connection part 500 alone The first and second side frames 110 and 110a and the coupling member 20 together with the connecting part 500 allow for easy assembly and simultaneous coupling without coupling between the spaced apart first body parts 100 and 100a It is possible to simultaneously improve the strength.

The first and second side frames 110 and 110a are cut in cross section and joined to the upper surfaces of the bottom plates 102 and 102a in an L-shape when viewed from the front, so that the first and second support frames 120 and 120a are After removal, after concrete is injected for pouring into the second body part 200, the joined state in the horizontal and vertical directions of the second body part 200 is maintained, so resistance to vibration transmitted from a specific direction and adhesive strength can be improved at the same time.

7 to 9, the connection part 500 according to the present embodiment includes a first coupler 510 with threads at both ends in the axial direction, and the reinforcing material at both ends of the first coupler 510 on the left and right. (300, 300a) includes a nut portion (N) formed with a thread on the inner circumferential surface so that each is coupled.

The connection part 500 minimizes the exposure amount in the second body part 200 by preventing the reinforcing materials 300 and 300a from being exposed to the second body part 200 . If the reinforcing materials 300 and 300a are maintained in an unexposed state in the second body part 200 , the exposure length may be reduced, and thus the width direction length of the second body part 200 may be minimized.

In addition, the length at which the reinforcing materials 300 and 300a are exposed to the second body portion 200 is minimized, and coupling and length adjustment through the first coupler 510 and the nut portion N are easier and more accurate.

Through this, the concentricity of the reinforcing materials 300 and 300a is matched, bending of the first coupler 510 is prevented, and the amount of pouring for concrete injection of the second body part 200 can be minimized, so that the semiconductor equipment is installed in a clean environment. The generation of dust in the room is minimized to prevent contamination.

In addition, when the reinforcing materials 300 and 300a are not exposed in the second body part 200, the extension length of the connection part 500 for connecting to each other may also be reduced, so that the extended path of the connection part 500 is bent. Prevented.

The connection part 500 is coupled to both ends of the first coupler 510 in the axial direction on the left and right sides by using two nut parts N so that the reinforcing materials 300 and 300a and concentricity coincide with each other, and the reinforcing material is attached to the nut part N. (300, 300a) is combined, respectively.

As shown in the drawing, the connecting portion 500 extends to a length excluding the nut portion N, so that the width direction length of the second body portion 200 may also be shortened compared to the conventional one.

The nut part (N) has a partition wall (W) formed on the inside with respect to the center in the axial direction, and a thread is formed on the inner circumferential surface, so that the reinforcing materials 300 and 300a and the connection part 500 are screwed, respectively, and the maximum coupling depth is Since it is limited by the partition wall (W), it is stably coupled within a limited insertion depth.

The nut portion N is extended to a predetermined length as shown in the drawing, and the lengths into which both ends of the reinforcing materials 300 and 300a and the connecting portion 500 are respectively inserted are easily adjustable in the axial direction within the tolerance range. can be accurately combined.

Accordingly, the reinforcing materials 300 and 300a may maintain the same axis as the connecting portion 500 and the state in which they are aligned with each other in the axial direction is maintained.

After the connection part 500 is coupled with the reinforcing materials 300 and 300a via the nut part N, concrete is poured into the second body part 200 .

10 to 11, in this embodiment, a groove formed in the first body part (100, 100a) for manufacturing the first body part (100, 100a) and the second body part (200) ( The first and second side frames 110 and 110a are installed on 111 and 111a.

When the first and second side frames 110 and 110a are installed in the first body part 100 and 100a, the part facing the second body part 200 is kept blocked while the first body part 100, A kind of formwork is formed along the edge for pouring concrete in 100a).

12 to 13, the operator installs the reinforcement (300, 300a) on the inside of the first body portion (100, 100a) in the form of a grid as shown in the drawings.

Then, the socket parts 600 and 600a are coupled to the first and second insertion parts 122 and 122a to align the reinforcing materials 300 and 300a.

And when the curing is completed after pouring concrete into the first body portion (100, 100a) inside the manufacturing is completed in the state shown in FIG.

The operator checks the curing state of the concrete, separates all the socket parts 600 and 600a from the first and second insertion parts 122 and 122a, and then performs the work on the second body part 200 to the first body part. What is necessary is to perform the work on the parts 100 and 100a and the second body part 200 .

As described above, an embodiment of the present invention has been described, but those of ordinary skill in the art can add, change, delete or add components within the scope that does not depart from the spirit of the present invention described in the claims. It will be possible to variously modify and change the present invention by, etc., which will also be included within the scope of the present invention.

100, 100a: first body part
102, 102a: bottom plate
104, 104a: outer plate
110, 110a: first and second side frames
120, 120a: first and second support frames
122, 122a: first and second insertion parts
200: second body part
300, 300a: reinforcement
400, 400a: socket groove
500: connection
600, 600a: socket part
610, 610a: first socket groove
620, 620a: flange
622, 622a: second socket groove

Claims (6)

The first body portions 100 and 100a positioned to face each other on the bottom surface 10;
a second body part 200 formed by concrete curing integrally with the first body part 100 and 100a between the first body parts 100 and 100a;
Reinforcing materials (300, 300a) provided for strength reinforcement on the inside of the first body portion (100, 100a);
Socket groove portions (400, 400a) formed from the extended ends of the reinforcing materials (300, 300a) toward the inside of the first body portion (100, 100a) to a predetermined depth; and
It is provided in the second body part 200 and includes a connection part 500 having both ends coupled to the socket groove parts 400 and 400a so that the spaced apart first body parts 100 and 100a are connected to each other,
The first body part 100, 100a has a predetermined length toward the upper side at positions other than the position facing the second body part 200 from the bottom plates 102 and 102a in contact with the bottom surface 10. Concrete pad for vibration damping table in which the bent outer plates (104, 104a) are integrally formed. According to claim 1,
In the first body portion 100, 100a, the bottom plate 102, 102a and the outer plate 104, 104a are connected at the opposite position facing the outer plate 104, 104a, and a groove portion 111, 111a) is formed on the first and second side frames (110, 110a);
It includes first and second support frames 120 and 120a fitted to the groove portions 111 and 111a and having first and second insertion portions 122 and 122a formed at positions facing the reinforcing materials 300 and 300a. Concrete pad for vibration isolation table. 3. The method of claim 2,
The first and second side frames (110, 110a) are a concrete pad for vibration damping table that is fastened by a coupling member (20) provided to couple the first body parts (100, 100a) to each other in a horizontal direction. 3. The method of claim 2,
Before the first body portion (100, 100a) is molded, the first and second insertion portions (122, 122a) are coupled from the outside to the inside so that the reinforcing materials (300, 300a) are positioned in their original positions and coupled with the ends. A socket portion (600, 600a) is provided,
The socket parts 600 and 600a include body parts 602 and 602a forming an external shape;
A first socket groove (610, 610a) coaxial with the reinforcing material (300, 300a) and formed in the inner center of the body portion (602, 602a) facing the ends, and having a thread on the inner surface along the axial direction;
After the first socket groove (610, 610a) is opened to a predetermined depth at a position spaced outward in the radial direction based on the curing of the first body part (100, 100a) is finished, the socket part (600) , 600a) including flanges 620 and 620a provided with second socket grooves 622 and 622a providing a space for inserting a tool for drawing out the first and second side frames 110 and 110a to the outside. Concrete pad for vibration isolation table. According to claim 1,
A concrete pad for vibration damping table in which a polygonal concave-convex groove (G) is formed in the first body part (100, 100a) in an inner vertical direction along an edge facing the second body part (200). According to claim 1,
The connection unit 500 includes a first coupler 510 having threads at both ends in the axial direction;
Concrete pad for vibration damping table including a nut portion (N) having a thread formed on the inner circumferential surface so that the reinforcing materials (300, 300a) are respectively coupled to the left and right ends of the first coupler (510).

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