KR20220038935A - Bellows pipes used in cooling line of semiconductor equipment - Google Patents

Abstract

The present invention relates to a bellows-type pipe used in a cooling line of semiconductor equipment. According to the present invention, the bellows-type pipe comprises: a bellows pipe through which a refrigerant moves inside; a first insulating paint layer applied with a uniform thickness on the outer periphery along the longitudinal direction of the bellows pipe; a foam insulation material wrapped around the outer periphery along the longitudinal direction of the first insulating paint layer and installed; and a casing wrapped around the outer periphery along the longitudinal direction of the foam insulation material and installed.

Description

Bellows pipes used in cooling line of semiconductor equipment

The present invention relates to a bellows-type pipe used in a cooling line of semiconductor equipment, and more particularly, to a bellows-type pipe used in a cooling line of a semiconductor equipment that can prevent dew condensation by improving the insulation performance of the bellows-type pipe. it's about

In general, when there is a difference between the temperature of the fluid flowing inside the pipe and the outside temperature, the pipe expands and contracts repeatedly due to this temperature difference. Condensation water is generated on the surface of the pipe.

This condensed water refers to the amount of water generated by the condensation of water vapor due to the dew condensation phenomenon, and the generation of dew water accelerates aging and damage of the pipe and its accessories. It may cause overload of the compressor, which is a major component of the cycle, and may cause excessive power consumption.

Therefore, it is an important method of preventing condensation by using an insulating material having high resistance to the flow of cold air to prevent the transfer of cold air.

Accordingly, in the conventional pipe (A), as illustrated in FIGS. 1 and 2 in order to prevent dew condensation, the insulating material 20 made of glass fiber is double wrapped around the outer periphery of the pipe 10, and the insulating material ( Each of the aluminum tape 30 is wrapped around the outer perimeter of the 20), and the casing 40 is wrapped around the outer perimeter of the outer aluminum tape 30.

However, this conventional pipe (A) has high thermal conductivity due to high moisture absorption and moisture permeability due to the use of the insulating material 20 made of glass fiber, and the thermal insulation performance is not good as the cold storage holding power is lowered, and construction is difficult due to dust I had an uncomfortable problem.

In particular, in the case of a bellows-type pipe (A') installed on a curved part of the cooling line as shown in FIG. 3 , the insulator 20 is wrapped around the uneven part 10'a of the bellows pipe 10' and the uneven part 10 Due to the gap generated between 'a) and the insulator 20, the insulation performance of the bellows-type pipe (A') is lowered, and there is a problem in that dew condensation occurs in the end.

Republic of Korea Patent Publication No. 10-2018-0126799 (published on November 28, 2018)

The present invention has been devised to solve the above-mentioned problems, and by constructing a bellows-type pipe by wrapping a foamed insulating material in a state in which an insulating paint is applied to the surface of the bellows pipe, it is possible to prevent dew condensation by improving the insulating performance of the bellows pipe. It is to provide bellows-type piping used in the cooling line of semiconductor equipment.

The technical problems to be solved by the present invention do not need to be limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those of ordinary skill in the art to which the present invention belongs from the description below. will be able

In order to realize the object as described above, the present invention provides a bellows-type pipe used in a cooling line of semiconductor equipment,

A bellows pipe through which the refrigerant moves through the internal pipe, and

a first insulating paint layer applied to the outer periphery along the longitudinal direction of the bellows pipe;

A foam insulation material wrapped around the outer periphery along the longitudinal direction of the first insulating paint layer and installed;

a casing installed around the outer periphery along the longitudinal direction of the foam insulation;

It is characterized by including

More preferably, the second insulating paint layer may be applied to the outer periphery along the longitudinal direction of the foam insulating material so that the second insulating paint layer is positioned between the foam insulating material and the casing.

More preferably, the insulation film may be wrapped around the outer periphery along the longitudinal direction of the foam insulation so that the insulation film is positioned between the foam insulation and the casing.

More preferably, the first insulating paint layer and the second insulating paint layer may be applied while maintaining a thickness of 0.15 mm, respectively.

More preferably, the foam insulation may be composed of any one of silica insulation or perlite insulation or polyethylene foam insulation or rigid urethane foam insulation or rubber foam insulation or silicone insulation or urethane insulation.

More preferably, the rubber foam insulation may be composed of any one of nitrile butadiene rubber (NBR), ethylene propylene rubber (EDPM), or fluororubber (FKM).

More preferably, the casing may be composed of a tube made of a synthetic resin material.

More preferably, the synthetic resin tube may be composed of any one of a flame-retardant polyvinyl chloride (FRPVC) tube, a heat-shrinkable tube, an elastically-shrinkable tube, or an air-shrinkable tube.

More preferably, the heat-shrinkable tube may be made of any one of Polyolefin (POX), Elastomer (PES), Fluoropolymer (FPM), Polyvinylidenefluoride (PVDF), polyvinylluoride (PVF), Polytetrafluorethylene (PTFE), and Perfluoroalkox (PFA). can

More preferably, the casing may be configured to a thickness of 2 mm.

More preferably, the insulating paint used for the first insulating paint layer and the second insulating paint layer may be composed of a composition including a water-soluble silicone resin, micron ceramic, micron special ceramic, and titanium oxide.

The bellows-type pipe used in the cooling line of the semiconductor equipment according to the present invention according to the above configuration has the following effects.

That is, according to the present invention, foam insulation is installed in a state in which an insulating paint is applied to the outer periphery of the bellows pipe, and then the foamed insulating material is filled in the concave-convex part of the bellows pipe as the bellows-type pipe is constructed by finishing with a casing. is wrapped, it prevents the gap that occurred between the bellows pipe and the foam insulation material, improves the insulation performance of the pipe, prevents dew condensation, and further improves heat shielding, workability, eco-friendliness, sound insulation, elasticity, non-combustibility and durability. have the effect of improving it.

In addition, since the effects of the present invention described as described above are naturally exhibited by the configuration of the described content regardless of whether the inventor is aware, the above-described effects are only a few effects according to the described content, and all effects recognized or existing by the inventor It should not be accepted as written.

In addition, the effect of the present invention should be further grasped by the overall description of the specification, and even if it is not described in an explicit sentence, a person of ordinary skill in the art to which the described content belongs through this specification has such an effect. If it is an effect that can be recognized as the effect, it should be viewed as the effect described in this specification.

1 is a cut-away perspective view of a main part of a pipe manufactured to prevent dew condensation according to a conventional configuration.
2 is a side cross-sectional view of a pipe manufactured to prevent dew condensation according to a conventional configuration.
3 is a front cross-sectional view of a main part of a bellows-type pipe manufactured to prevent dew condensation according to a conventional configuration.
4 is a cut-away perspective view showing the configuration of a bellows-type pipe according to an embodiment of the present invention.
5 is a side cross-sectional view of a bellows-type pipe according to an embodiment of the present invention.
6 is a front cross-sectional view of a main part of a bellows-type pipe according to an embodiment of the present invention.

Hereinafter, the configuration and operation according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

This is intended to describe in detail enough to be easily implemented by those of ordinary skill in the art to which the present invention pertains, and this does not mean that the technical spirit and scope of the present invention is limited. .

In addition, in adding reference numerals to the components of each drawing, it should be noted that only the same components are marked with the same reference numerals as much as possible even though they are displayed on different drawings, considering the configuration and operation of the present invention. Therefore, the terms specifically defined may vary depending on the intention or custom of the user or operator, and the definition of these terms should be determined based on the content throughout this specification.

In addition, throughout the specification, when a part "includes" a certain component, it means that other components may be further included, rather than excluding other components, unless otherwise stated.

First, the configuration of the bellows-type pipe used in the cooling line of semiconductor equipment according to the present invention includes a bellows pipe through which a refrigerant moves, a first insulating paint layer wrapped around the outer periphery of the bellows pipe and applied, and such a first insulating It can be largely divided into a foamed insulating material wrapped around the outer periphery of the paint layer and installed, and a casing installed wrapped around the outer periphery of the foamed insulating material. Specifically, it is as follows.

First, the bellows pipe 100 is,

The corrugated pipe absorbs the vibration of the connecting part and enables lengthening and stretching, and it is installed and used in the curved section of the cooling line connecting the semiconductor equipment and the chiller.

The bellows pipe 100 moves the refrigerant along the internal pipe, and as a material, SUS (stainless steel), Teflon, or cross-linked polyethylene (Cross-Linked PE) material may be used.

The first insulating paint layer 310,

It is composed of a heat-insulating paint having heat-insulating performance and is applied to the outer periphery with a certain thickness along the longitudinal direction of the bellows pipe 100 described above.

When the first insulating paint layer 310 is applied to the outer periphery of the bellows pipe 100, the uneven portion of the bellows pipe 100 is filled with the insulating paint of the first insulating paint layer 310, so the bellows pipe 100 is When the foam insulation 200 to be described later is installed, as in the prior art, as the foam insulation 200 is in direct contact with the bellows tube 100, a gap is generated between the uneven portion of the bellows tube 100 and the foam insulation 200. that can solve the problem.

That is, when the foam insulation 200 is installed in the bellows pipe 100, the foam insulation 200 is not directly installed on the outer periphery of the bellows tube 100, but the first that was previously applied to the bellows tube 100. As it is installed in contact with the outer periphery of the insulating paint layer 310, the thermal insulation performance of the bellows pipe 100 can be improved, condensation can be prevented, and the bellows pipe 100 due to the first insulating paint layer 310 is ) can be further improved in durability, fire resistance, resistance to mechanical stress and extreme temperatures.

On the other hand, the composition of the insulating paint constituting the first insulating paint layer 310 does not need to be set to any one, for example, 30 to 40% of acrylic copolymer, 10 to 18% of rubber resin, 4 to 8% of water-based urethane. , Dispersant 2~5%, Kaolin 2~5%, Amorphous Silica 2~5%, Titanium Dioxide 8~10%, Zinc Dioxide 4~8%, Nonionic Carboxyl Styrene Copolymer Emulsion Coating and Waterproofing Expanded Perlite 12 -20% of the composition.

Alternatively, another embodiment of the insulating paint may be composed of a water-soluble silicone resin, micron ceramic, micron special ceramic, and a composition containing micron oxide and titanium oxide. , soundproofing, waterproofing, preventing pollution, and having the effect of improving indoor air quality.

The insulating paint may be evenly applied to the outer periphery of the bellows pipe 100 with a thickness of about 0.15 mm, and if the thickness is less than 0.15 mm, the thermal insulation effect may fall, and if the thickness exceeds 0.15 mm, material consumption As the number increases, a problem may arise in that the cost increases.

Here, the insulating paint may be applied as a layer on the outer periphery of the bellows pipe 100 described above, and if necessary, may be configured in a laminated structure with a plurality of layers having a constant thickness or different thicknesses.

When the first insulating paint layer 310 composed of such an insulating paint is applied to the outer periphery of the bellows pipe 100, it is possible to reduce noise caused by the refrigerant flowing inside the bellows pipe 100, and to provide excellent thermal insulation. And it is possible to further improve the durability and fire resistance of the bellows pipe 100, resistance to mechanical stress, extreme temperature, and the like.

Foam insulation 200,

The first insulating paint layer 310 installed on the bellows pipe 100 for insulation of the above-described bellows pipe 100, not directly installed on the bellows pipe 100, but installed in advance in the bellows pipe 100 It is installed wrapped around the outer perimeter.

The foam insulation 200 may be preferably made of a thermal insulation material of a foam material (Closd Cell), for example, a silica thermal insulation material, a Perlite thermal insulation material, a polyethylene (Polyethylene) insulation material, a rigid urethane foam (Polyurethane) insulation material and the like may be used, and more preferably, may be composed of a foamed rubber insulating material.

Here, the silica insulating material is a crystalline calcium silicate obtained by high pressure steam curing by adding diatomaceous earth, slaked lime, and reinforcing fibers. It has low conductivity (0.047) even at high temperatures, so it has excellent insulation effect, has excellent heat resistance due to its stable crystal structure, hardly deforms even after long-term use at high temperatures, is completely incombustible as an inorganic insulation material, and is light and strong. It is characterized by easy construction.

And when lava ejected from volcanic activity abruptly solidifies in water, etc., it becomes a glassy rock without a gap to become a crystalline mineral. ), it expands to about 30 times the size of fried corn, and it is made with a special manufacturing method by mixing the hollow or light swells on the cell with various additives. It has the widest safe use temperature range as a thermal insulation material at ℃, it has a unique thermal insulation performance with delicate porous foam, does not burn with non-flammable minerals as fuel, and has excellent water repellency, and the content of CL component Because it contains a large amount of sodium silicate component, which is a corrosion control agent, it exhibits excellent effects in preventing stress corrosion cracking of stainless steel piping and equipment and corrosion protection of general carbon steel. As it is restored to its original state and joined, it responds to the thermal elongation of the pipe to be joined, so there is little heat loss due to gaps in the joint even after long-term use.

In addition, polyethylene insulator is a semi-rigid foam in the form of a chemically crosslinked and foamed sheet of polyethylene, and has a working temperature range of -25 ° C to 80 ° C. During the heating cycle, shrinkage and expansion may cause seams and gaps to open and crack, and these problems may be the main cause of condensation and heat loss. It has the property to melt quickly.

In addition, the rigid polyurethane foam insulation uses polyurethane foam, a synthetic resin produced by the reaction of polyisocyanate and active hydrogen-containing substances such as polyols, as a polymer with a urethane bond, and can be used for on-site spraying, injection, and plate construction. R, a Freon gas with low thermal conductivity, has a variety of finishing methods, has excellent lightness, is easy to use at low temperatures with an operating temperature range of approximately -190°C to 100°C, and is widely used due to its excellent strength. It is a material foamed with -11 and R-12 and polymer, which shows excellent heat insulation, and although it is not a non-flammable material, it has flame retardant properties, is easy to transport and handles, and has strong self-adhesiveness.

In addition, the rubber foam insulation material is eco-friendly, has low thermal conductivity and is stable, so it has excellent initial insulation performance. In case of fire, flame does not spread, smoke density is low, there is almost no toxic gas emission, and it shows excellent flame retardant performance due to high oxygen index. Since there are almost no chlorine and ammonia components, it does not corrode the body to be insulated, and it is easy to handle due to its excellent flexibility and elasticity. There is a characteristic.

These rubber foam insulation materials are widely used for heat loss, corrosion prevention of equipment, and prevention of dew condensation, and foam materials can be divided into two types.

In other words, it is a foamed material of the most commonly used nitrile butadiene rubber (NBR: Nitrile butadiene rubble) and ethylene propylene rubber (EPDM: Ethylene Propylene Diene Monomer), which is more secure in cold resistance, heat resistance, water resistance, and weather resistance. It can be classified by material, and a material (trade name: Viton) foamed with fluorine rubber with excellent heat and chemical resistance may be used.

On the other hand, the foam insulation 200 may be composed of a silicone insulation material or a urethane insulation material, if necessary.

Such foam insulation 200 may be configured in a cylindrical shape so that it can be continuously fitted along the longitudinal direction of the bellows pipe 100 to which the first insulating paint layer 310 is applied, and if necessary, the foam insulation 200 ) by having a cutout along the longitudinal direction, the foam insulation 200 may be installed on the outer periphery of the bellows pipe 100 coated with the first insulating paint layer 310 while spreading the cutout.

Here, the cutout of the foam insulation 200 is divided into two to form a fitting groove at one end opposite to it. At the other end, by configuring a fitting protrusion so that it can be fitted and fixed in such a fitting groove, the foamed insulating material wrapped in the bellows pipe 100 coated with the first insulating paint layer 310 by coupling the fitting protrusion and the fitting groove ( 200) can be prevented from being unnecessarily widened and the thermal insulation effect being deteriorated.

On the other hand, the foam insulation 200 is installed wrapped around the outer periphery of the bellows pipe 100 to which the first insulating paint layer 310 is applied, and one layer having a predetermined thickness or a plurality of thin layers having a predetermined thickness are laminated. , Depending on the installation conditions and installation environment, the foam insulation 200 may be composed of a single layer or a plurality of layers.

Here, when the foam insulation 200 is composed of a plurality of layers, the plurality of layers are spaced apart from each other without being in contact with each other and configured to have a space (air layer or vacuum layer), or the foam insulation 200 is melted while spaced apart. A heating means such as a film heater that maintains a temperature that is not so high may be provided.

The second insulating paint layer 320,

It is composed of an insulating paint having thermal insulation performance, and is applied to the outer periphery with a certain thickness along the longitudinal direction of the above-described foam insulation 200 .

The second insulating paint layer 320 may be selectively used, and the casing 400 to be described later may be directly installed on the outer periphery of the foamed insulating material 200 without using the second insulating paint layer 320, In order to improve the thermal insulation performance, it is preferable to install the casing 400 in a state in which the second thermal insulation paint layer 320 is applied to the outer periphery of the foam insulation 200 .

In addition, when the second insulating paint layer 320 is added, the insulating effect of the bellows pipe 100 together with the first insulating paint layer 310 applied to the bellows pipe 100 can be further improved, The durability and fire resistance of the tube 100 and resistance to mechanical stress and extreme temperature may be further improved.

On the other hand, the composition of the insulating paint constituting the second insulating paint layer 320 does not need to be set to any one, and may be composed of the same composition as the insulating paint composition of the first insulating paint layer 310 described above.

The thickness of the second insulating paint layer 320 is preferably applied to a thickness of about 0.15 mm like the above-described first insulating paint layer 310, and when the thickness is less than 0.15 mm, it is difficult to achieve the desired thermal insulation effect. , when the thickness exceeds 0.15mm, the material consumption increases and the cost may be increased.

Here, the heat insulating paint of the second insulating paint layer 320 may also be applied as one layer on the outer periphery of the foam insulation 200 like the above-described first insulating paint layer 310, and if necessary, a constant thickness. Alternatively, it may be configured while forming a laminated structure with a plurality of layers having different thicknesses.

Meanwhile, according to another embodiment of the present invention, the second insulating paint layer 320 may not be formed on the outer periphery of the foamed insulating material 200, and may be configured by replacing the insulating film (not shown in the drawing).

Here, the insulating film may be wrapped around the outer periphery of the above-described foam insulation 200 and fixed in a state in which the adhesive is applied to the entire or part of the inner surface.

In addition, in another embodiment of the present invention, in a state in which the second insulating paint layer 320 is applied to the outer periphery of the foamed insulating material 200 to improve the thermal insulation effect, an insulating film is applied to the outer periphery of the second insulating paint layer 320 After additional installation of the casing 400 may be installed and configured.

In addition, in another embodiment, the present invention wraps and installs an insulating film in the first insulating paint layer 310 applied to the bellows pipe 100 for a further improved thermal insulation effect, and the foam insulation 200 is formed around the outer periphery of the insulating film. ), apply the second insulating paint layer 320 to the outer periphery of the foam insulation 200, add another insulating film to the outer perimeter of the second insulating paint layer 320, and then to the casing 400 It can also be configured by finishing.

The casing 400 is

Installed wrapped around the outer periphery of the second insulating paint layer 320 surrounding the above-described foam insulation 200, installed wrapped around the outer periphery of the insulation film surrounding the foam insulation 200, or foam insulation 200 ) is installed wrapped around the outer periphery of the insulating film surrounding the second insulating paint layer 320 again.

The color of the casing 400 does not need to be set to any one, and may be configured in various colors so that the moving direction of the refrigerant can be visually determined.

The thickness of the casing 400 may be composed of approximately 1.5 mm to 2.5 mm, and if it is less than 1.5 mm, it can be easily torn, and if it exceeds 2.5 mm, it may be difficult to expect a satisfactory thermal insulation effect, so it is composed of approximately 2 mm. desirable.

The casing 400 may be composed of a tube made of a synthetic resin material, and specifically, may be composed of a flame-retardant polyvinyl chloride (FRPVC) tube, a heat-shrinkable tube, an elastically-shrinkable tube, or an air-shrinkable tube.

Here, the heat-shrinkable tube is a tube that shrinks when heated, and may be made of a material such as Polyolefin (POX), Elastomer (PES), Fluoropolymer (FPM), Polyvinylidenefluoride (PVDF), Polytetrafluorethylene (PTFE), Perfluoroalkox (PFA), etc. .

In addition, the casing 400 may be composed of a bond shrink tube, a fire prevention tube, a curable tube, an oil-resistant tube, a fluoroelastomer tube, a vinyl fluoride resin tube, or a vinyl isofluoride tube.

In the bellows-type pipe (B) according to the present invention, the first insulating paint layer 310 is applied to the outer periphery of the bellows pipe 100, and the foamed insulating material 200 is applied to the outer periphery of the first insulating paint layer 310. ) is wrapped, and after the second insulating paint layer 320 or the insulating film or the second insulating paint layer 320 and the insulating film are sequentially wrapped around the outer perimeter of the foamed insulating material 200, the casing on the outer periphery By being wrapped and installed (400), it is possible to prevent dew condensation occurring on the surface of the bellows-type pipe (B) through improvement of insulation performance as well as improve the manufacturability of the bellows-type pipe (B), and the bellows-type pipe (B) durability and maintenance efficiency can be improved.

As described above, in the detailed description of the present invention, specific embodiments have been described, but various modifications are possible without departing from the scope of the described content. Therefore, the scope of the described content does not need to be limited to the described embodiments, and should be defined by the claims and equivalents as well as the claims to be described later.

100: bellows pipe 200: foam insulation material
310: first insulating coating layer 320: second insulating coating layer
400: casing B: bellows type piping

Claims (11)

Bellows pipe 100 through which the refrigerant is moved through the internal pipe;
a first insulating paint layer 310 applied to the outer periphery along the longitudinal direction of the bellows pipe 100;
a foamed insulating material 200 wrapped around the outer periphery along the longitudinal direction of the first insulating paint layer 310 and installed; and
A casing 400 that is installed wrapped around the outer periphery along the longitudinal direction of the foam insulation 200;
Bellows-type piping used in the cooling line of semiconductor equipment, characterized in that it comprises a. The method according to claim 1,
The second insulating paint layer 320 is applied on the outer periphery along the longitudinal direction of the foam insulating material 200 so that the second insulating paint layer 320 is positioned between the foam insulating material 200 and the casing 400 . Bellows-type piping used in the cooling line of semiconductor equipment, characterized in that The method according to claim 1,
Cooling line for semiconductor equipment, characterized in that the insulation film is wrapped around the outer periphery along the longitudinal direction of the foam insulation 200 so that the insulation film is positioned between the foam insulation 200 and the casing 400 Bellows type piping used for 3. The method according to claim 2,
A bellows-type pipe used in a cooling line of semiconductor equipment, characterized in that the first insulating paint layer 310 and the second insulating paint layer 320 are applied while maintaining a thickness of 0.15 mm, respectively. The method according to claim 1,
The foam insulation 200,
A bellows-type pipe used in a cooling line for semiconductor equipment, characterized in that it is any one of silica insulation or perlite insulation, polyethylene foam insulation, rigid urethane foam insulation, rubber foam insulation, silicone insulation, or urethane insulation. 6. The method of claim 5,
The rubber foam insulation,
A bellows-type pipe used in a cooling line for semiconductor equipment, characterized in that it is made of any one of nitrile butadiene rubber (NBR), ethylene propylene rubber (EDPM), or fluororubber (FKM). The method according to claim 1,
The casing 400,
A bellows-type pipe used in the cooling line of semiconductor equipment, characterized in that it is composed of a tube made of synthetic resin. 8. The method of claim 7,
The tube made of the synthetic resin material,
A bellows-type pipe used in a cooling line of semiconductor equipment, characterized in that it is composed of any one of a flame-retardant polyvinyl chloride (FRPVC) tube, a heat-shrinkable tube, an elastically-shrinkable tube, or an air-shrinkable tube. 9. The method of claim 8,
The heat-shrinkable tube,
Polyolefin (POX), Elastomer (PES), Fluoropolymer (FPM), Polyvinylidenefluoride (PVDF), polyvinylluoride (PVF), Polytetrafluorethylene (PTFE), Perfluoroalkox (PFA) cooling line for semiconductor equipment, characterized in that it is made of any one material Bellows type piping used for The method according to claim 1,
The casing 400,
Bellows-type pipe used in the cooling line of semiconductor equipment, characterized in that it has a thickness of 2mm. 3. The method according to claim 2,
The insulating paint used for the first insulating paint layer 310 and the second insulating paint layer 320 is,
A bellows-type pipe used in a cooling line for semiconductor equipment, characterized in that it consists of a water-soluble silicone resin, micron ceramic, and a composition containing micron special ceramic and titanium oxide.

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