KR20220019424A - manufacture method of metal bellows-pipe andbellows-pipe therefore - Google Patents

Abstract

The present invention relates to a bellows pipe and a method for manufacturing the bellows pipe. The bellows pipe of the present invention is composed of a double pipe type, and a material for strengthening corrosion resistance is included on the inside thereof. Therefore, the bellows pipe can be used for a long time compared to a conventional similar product group. In addition, according to the present invention, due to fumes (acid, alkali, organic solvent, and so on) generated during semiconductor or display manufacturing, corrosion in a short time is prevented, so overall product competitiveness is improved. For this purpose, the bellows pipe of the present invention comprises: an outer pipe body which has a certain thickness, in which a wrinkle unit is formed in a center part, and which has flange units formed at both ends, respectively; and a corrosion-resistant reinforcing pipe body formed on the inner surface of the outer pipe body, and molded to form the corrosion resistance, heat resistance, and uniform thickness.

Description

Bellows pipe and its bellows pipe manufacturing method {manufacture method of metal bellows-pipe and bellows-pipe therefore}

The present invention relates to a bellows pipe and a method for manufacturing the same, and more particularly, it is configured in a double pipe shape, and is configured to include a material for strengthening corrosion resistance inside, so that it can be used for a long time compared to a conventional similar product group, , It relates to a bellows pipe and a method for manufacturing the bellows pipe that prevent corrosion in a short time due to fumes (acid, alkali, organic solvent, etc.) generated during semiconductor or display manufacturing, thereby enhancing overall product competitiveness.

In general, a pipe is used as a means for transferring a liquid substance in a water supply and sewage system, a heavy chemical plant, or an oil refinery plant.

Since the liquid fluids transported along such a pipe work at a considerable high temperature for material change, when the fluid with an increased temperature is transported through the pipe, the pipe may be distorted or damaged while causing thermal expansion.

In addition, a phenomenon of easy tearing may occur due to fatigue caused by vibration of the vibrating body.

Therefore, all pipes have a means to absorb displacement, and a bellows pipe (also called 'expansion joint pipe') capable of absorbing displacement in the longitudinal direction of the pipe by such means is connected to the pipe at predetermined intervals. , has been constructed and is being used.

The bellows pipe is used for pipe or flue gas pipe of various process engineering.

That is, expansion or mechanical vibration due to heat or pressure occurs in various engineering pipes, and the bellows pipe is widely applied and used for the purpose of absorbing such thermal expansion or vibration.

For example, it is being applied to many fields such as power plants, petrochemicals, refrigeration, metallurgy, nuclear power, air conditioning systems, aviation, construction, automobiles, water treatment or incinerators.

However, since the conventional bellows pipe is usually made of a metal material, in the case of continuous expansion and contraction for a long period of time, the wrinkled part is repeatedly expanded and contracted, and the wrinkled part is cracked or torn. there is.

In addition, there is a problem in that the powder is adhered to the inner wall of the bellows pipe during the movement of the fluid, and it is necessary to clean it frequently, thereby causing a decrease in productivity.

As a method for solving the disadvantages of the bellows pipe made of a metal material according to the prior art as described above, the bellows pipe is manufactured using Teflon (PTFE) resin as a raw material, the manufacturing method of which is already in the technical field to which the present invention belongs well known by those skilled in the art.

Briefly looking at the conventional method of manufacturing a Teflon bellows tube, a tube without a seam is produced from Teflon resin powder, and the surface of the produced seam-free tube is lathe-processed to produce a seamless tube with a uniform thickness, and the lathe processing Insert the unsealed tube into the mold.

Then, after sufficiently heating the mold in an electric furnace at about 360° C., compressed air is injected into the mold, ie, the tube, to manufacture a Teflon bellows pipe.

Figure 1a is a partially cut perspective view for showing the cross-sectional thickness of the conventional Teflon bellows pipe, Figure 1b is a schematic perspective view showing the inside of a mold for molding it.

Referring to this reference, the Teflon bellows pipe manufactured by the conventional method has a problem that the thickness of the cross section is not uniform, as shown in FIG. 1A.

That is, in the Teflon bellows pipe, the most important technique is that the thickness should be uniform.

This is to receive a uniform pressure only when the thickness of the bellows tube is maintained uniformly, and as a result, it is possible to sufficiently withstand high temperature and high pressure.

If the thickness of the bellows pipe is not uniform and there is a thin part, the part becomes weak and an accident that eventually explodes occurs.

In addition, the contents flowing inside the pipe are often at high temperature and high pressure, and in particular, there are many cases of poisons such as sulfuric acid or hydrochloric acid. will have fatal consequences for

Therefore, it is one of the most important tasks in this field to develop a perfectly stable bellows tube considering the worst conditions such as high temperature and high pressure poison.

In addition, as shown in Figure 1b, the bellows pipe is manufactured in a bellows shape by a mold, and the conventional Teflon bellows pipe has a phenomenon in which the thickness is reduced near the valley (2) as shown in Figure 1a.

That is, in the Teflon bellows pipe, the flare 3 is integrally formed so that the flanges can be respectively inserted on both sides thereof, and a plurality of mountains 1 and valleys 2 are formed on the inside thereof to form a bellows shape.

The cylindrical Teflon tube is inserted into the mold, and compressed air is injected into the tube while the mold and the Teflon tube are sufficiently heated in an electric furnace.

At this time, the outer surface of the tube is brought into contact with the peaks 1' of the mold, and then with the valleys 2' of the mold, so that the respective peaks 1 and valleys 2 are formed.

Since the outer surface of the cylindrical Teflon tube is first in contact with the acid 1' of the mold, a problem arises that the thickness of the valley 2 has to be reduced as shown in FIG. 1A.

In addition, when the thickness of the bone (2) portion becomes thinner, this portion becomes vulnerable to high temperature and high pressure, and the possibility of bursting increases by that much.

Looking at another conventional example, Registered Utility Model No. 415424 discloses 'a bellows expansion tube with enhanced elasticity and corrosion resistance manufactured by wrinkling processing of Teflon material'.

2a and 2b show a bellows pipe made of Teflon according to the prior art disclosed in the registered utility model No. 415424.

2A and 2B, the conventional bellows pipe has openings 110 formed on both sides in the longitudinal direction, and is molded and processed so that the wrinkles of the concave-convex shape 120 are repeatedly formed in the central portion to expand and contract the bellows made of Teflon material. (100), a pair of flanges 200 coupled to the opening 110 of the bellows 100, in which a hollow hole 210 is formed, and the bellows 100 located between the folds of the bellows Several reinforcing rings 300 for reinforcing the pressure resistance of (100) are configured.

The bellows 100 made of the Teflon material is made of a pipe by processing a thin plate material with excellent elongation into a cylinder, and the pipe is fastened to a mold to form and process wrinkles.

That is, in order to prevent the inside of the bellows 100 from being corroded due to the acid component of the powder when the fluid moves from the hopper, the material is processed into Teflon 150 with strong corrosion resistance.

In addition, a silicone adhesive 130 is applied to the circumference of the bellows 100 to absorb elastic displacement and vibration, and a first cover member 140 made of a glass fiber material coated with silicone is bonded to the upper end thereof.

However, the Teflon 150 is a polymer made of carbon and fluorine, and has excellent heat resistance, oil resistance, chemical resistance, weather resistance, etc., and is therefore preferable as a material for a bellows pipe, but has non-adhesive properties and low friction coefficient, etc. There is a problem in that the silicone adhesive 130 and the like are easily peeled off from the surface of the Teflon 150 because it has properties such as defects and lack of affinity with the hydrophilic material.

In addition, in order to solve the bonding problem of the Teflon 150 material as described above, the surface of the Teflon 150 is modified to increase the bonding property by using heat and chemicals to change the surface of the Teflon 150 to a needle shape. An etching method may be considered.

However, this chemical method (wet method) has problems such as environmental pollution such as odor and water pollution of suspended matter during operation, and the risk of explosion due to reaction with water.

Furthermore, there is a difficulty in etching a sheet having a uniform surface furry and a large area, and there is a problem in that it is difficult to adopt as a surface modification method of the Teflon 150 .

In addition, there are coated bellows that coat Teflon material (ETFE) resin on the inner surface of stainless bellows, which is currently most used in semiconductor and display manufacturing lines. Because it is a method of applying a film through road heat treatment, it is a difficult task to repeat painting and heat treatment several times to raise the film thickness of 300 microns. There is a disadvantage that corrosion occurs and the lifespan is short. In particular, for stainless bellows, the flange and the corrugated pipe are attached by welding, and there is a gap in this part, so if a coating is applied, pinholes are easy to occur.

Republic of Korea Patent Publication No. 10-665322 (2007.01.04. Announcement) Republic of Korea Patent Publication No. 10-1220518 (2013.01.10. Announcement) Republic of Korea Patent Publication No. 10-1837729 (2018.03.13. Announcement)

As proposed in order to solve the above problems, the object of the present invention is to be configured in a double tube shape and to include a material for strengthening corrosion resistance inside, so that it can be used for a long time compared to the conventional similar product group, and the semiconductor Another object of the present invention is to provide a bellows pipe and a method for manufacturing the bellows pipe, which prevent corrosion in a short time due to fumes (acid, alkali, organic solvent, etc.) generated during display manufacturing, thereby enhancing overall product competitiveness.

The present invention for achieving the above object, has a predetermined thickness, a wrinkle portion is formed in the central portion, the outer tube body is formed with a flange portion at each end; and a corrosion-resistant reinforcing tube formed on the inner surface of the outer tube body and molded to form a uniform thickness and corrosion resistance and heat resistance.

In the present invention, the outer tube body is stainless steel; it is preferable.

In the present invention, it is preferable that the corrosion-resistant reinforcing pipe body is composed of aplas, which is a copolymer of tetrafluoro ethylene (TFE) and propylene, as a main raw material;

In the present invention, the corrosion-resistance reinforcing pipe body, with respect to the main aplas, by mixing carbon and a vulcanizing agent in a certain ratio to improve corrosion resistance and heat resistance; it is preferable.

The present invention, an external tubular body forming step of forming an external tubular body having a predetermined thickness and having a wrinkle portion in a central region; When the molding of the outer tube body is completed through the outer tube forming step, the corrosion-resistant reinforcing tube body is primarily formed by extrusion molding or press molding at a high temperature after mixing carbon and vulcanizing agent in a certain ratio with aplas as the main subject. first forming step; And when the primary molding of the corrosion-resistant reinforcing pipe body is completed through the corrosion-resistant reinforcing pipe body 1 forming step, the corrosion-resistant reinforcing pipe body is formed on the inside of the pre-fabricated external pipe body. It is preferable to include; a bellows pipe completion step of completing the double pipe type bellows pipe by bonding the corrosion-resistant reinforcing pipe body.

In the present invention, when the primary molding of the corrosion-resistant reinforcing pipe body is completed through the first forming step of the corrosion-resistant reinforcing pipe body, secondary vulcanization is performed on the firstly formed corrosion-resistant reinforcing pipe body to reinforce the corrosion resistance and heat resistance It is preferable to further include; a secondary molding step of the corrosion-resistant reinforced pipe body so that the molding of the pipe body is completed.

According to the present invention, it is configured in the form of a double tube and includes a material for strengthening corrosion resistance on the inside, so that it can be used for a long time compared to conventional similar products, and fumes (acid, alkali, organic solvent, etc.) to prevent corrosion in a short time, thereby strengthening overall product competitiveness.

1A and 1B are diagrams of a bellows pipe showing an example of the related art.
Figures 2a and 2b is a view of a bellows pipe showing another example of the prior art.
3 is a cross-sectional view of a bellows pipe according to the present invention.
Figure 4 is a prototype image of the bellows tube according to the present invention.
Figure 5 is a manufacturing process diagram of the bellows pipe according to the present invention.

Advantages and features of the present invention, and a method for achieving the same will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings.

However, the present invention is not limited to the embodiments disclosed below, but may be implemented in a variety of different forms, and only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the art to which the present invention pertains It is provided to fully inform those who have the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout.

Accordingly, in some embodiments, well-known process steps, well-known structures, and well-known techniques have not been specifically described in order to avoid obscuring the present invention.

The terminology used herein is for the purpose of describing the embodiments, and is not intended to limit the present invention. In this specification, the singular also includes the plural unless otherwise specified in the phrase.

As used herein, includes and/or comprising refers to the presence or addition of one or more other components, steps, operations and/or elements other than the recited elements, steps, operations and/or elements. It is used in the sense of not being excluded.

And, “and/or” includes each and every combination of one or more of the recited items.

In addition, the embodiments described in this specification will be described with reference to cross-sectional and/or schematic diagrams that are ideal illustrations of the present invention.

Accordingly, the embodiments of the present invention are not limited to the specific form shown, but also include changes in the form generated according to the manufacturing process.

In addition, in each of the drawings shown in the present invention, each component may be shown somewhat enlarged or reduced in consideration of convenience of description.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The bellows pipe of the present invention is configured in the form of a double pipe, and is configured to include a material for strengthening corrosion resistance on the inside, so that it can be used for a long time compared to the conventional similar product group, thereby enhancing product competitiveness.

In particular, when used in a device for manufacturing a semiconductor or display, etc., more effective performance was achieved.

That is, by improving corrosion in a short time due to fumes (acid, alkali, organic solvent, etc.) generated during semiconductor or display manufacturing, corrosion resistance and heat resistance are improved, and long-term use is possible.

As shown in FIGS. 3 and 4 , the bellows pipe 10 includes an external pipe body 110 and a corrosion-resistant reinforced pipe body 120 .

The outer tube body 110 includes a wrinkle portion 112 in a central region.

The wrinkle part 112 absorbs vibrations or shocks acting from the inside and outside, and prevents the transmission of vibrations or shocks to other component groups by shock absorption as well as a function of protecting the bellows pipe 10. .

In addition, the outer tube body 110 includes a flange portion 114 having a predetermined size at each of both ends.

The flange portion 114 is configured to facilitate connection with other components.

Of course, the present invention is not limited thereto, and in some cases, the flange portion 114 may be provided in various forms depending on the purpose or location of use, as any one end or may be omitted.

In addition, the outer tube body 110 is preferably formed of stainless steel.

The corrosion-resistant reinforcing pipe body 120 is formed on the inside of the outer pipe body 110 to a certain thickness, thereby preventing or minimizing corrosion by the fluid transmitted through the bellows pipe 10, etc., of the bellows pipe 10 to improve durability.

The corrosion-resistant reinforcing pipe body 120 is preferably a fluororubber having excellent corrosion resistance while having elasticity.

That is, the corrosion-resistant reinforcing pipe body 120 is composed of aplas made of a copolymer of Tetra Fluoro Ethylene (TFE) and propylene as a main raw material, and thus has a wide range of chemical resistance and excellent heat resistance, even in steam at less than 150 ° C. can be used

In addition, in order to further improve corrosion resistance and heat resistance, the corrosion-resistance reinforcing pipe body 120 is suitable for use in manufacturing processes or devices, such as semiconductors or displays, by mixing Rabon and a vulcanizing agent in the aplace.

When the corrosion-resistant reinforcing pipe body 120 made of the above composition is coated with fluororesin (PTFE) on the inside of the exterior made of stainless steel, which is a conventional example, it is difficult to coat the fluororesin due to the structural characteristics of the bellows pipe, In particular, the problem that a uniform coating thickness cannot be obtained is improved.

In addition, in the conventional fluororesin-coated bellows pipe, bubbles are generated in the coating layer of the fluororesin, and corrosion is easily generated by the bubbles, thereby improving the problem of reducing corrosion resistance.

In this case, the bellows pipe 10 is formed at a ratio of '7' from the outside to the inside of the flange part 114 and '9' from the outside to the outer periphery of the inner pipe, as shown in FIG. 3 , and the ' A step of a certain depth is formed at 7', and when the outer tube body 110 is formed at a ratio of '2' to the depth of the step, a coating layer thickness is formed at a depth of '1' for the step, and at the upper end A thickness having a ratio of '1' is formed, and the corrosion-resistant reinforcing pipe body 120 is formed with a flat inner surface to a thickness of '1.5' from the inside of the outer pipe body 110 .

The manufacturing method of the bellows pipe configured as described above includes the external pipe body forming step (S1), the corrosion-resistant reinforced pipe body primary forming step (S2), the corrosion-resistant reinforced pipe body secondary forming step (S3), and the bellows pipe completion step (S4) includes

The external tubular forming step (S1) is a step of forming an external tubular body having a predetermined thickness with a wrinkle portion in a central region.

This forms the outer tube body 110 so that the wrinkle part 112 is formed in the central part.

In this case, a flange portion 114 that supports to facilitate connection with other components is configured at both ends or one end of the outer tube body 110 .

In addition, since the molding method of the outer tube body 110 is the same as or similar to that of the prior art, it can be easily understood by those skilled in the art even if the detailed description is omitted here.

The corrosion-resistance reinforcing pipe body primary molding step (S2), after the molding of the external pipe body is completed through the external pipe body forming step (S1), after mixing the above-described composition, extrusion molding or press molding at a high temperature The first This is the molding step.

This is, with Aplace as the main material, carbon and a vulcanizing agent are mixed in a certain ratio, and then the corrosion-resistant reinforcing pipe body 120 is first molded through extrusion molding or press molding at a high temperature.

In the second forming step (S3) of the corrosion-resistant reinforcing pipe body, when the primary molding of the corrosion-resistant reinforcing pipe body is completed through the first forming step (S2) of the corrosion-resistant reinforcing pipe body, secondary vulcanization is performed on the firstly molded corrosion-resistant reinforcing pipe body This is a step in which the molding of the corrosion-resistant reinforcing pipe body with enhanced corrosion resistance and heat resistance is completed.

In the bellows pipe completion step (S4), when the corrosion resistance and heat resistance reinforced corrosion resistance reinforcement pipe body is completed through the corrosion resistance reinforcement pipe body secondary forming step (S3), the corrosion resistance reinforcement pipe body inside the pre-manufactured external pipe body This is a step to complete the double tube type bellows tube by stably bonding or fusion bonding.

This is, as heat is applied to the corrosion-resistant reinforcing pipe body 120 formed by secondary molding on the inside of the pre-fabricated outer tube body 110 using a mold, the corrosion-resistant reinforcing tube body ( As the 120) is adhered, the bellows pipe 10 in the form of a double pipe is completed.

The bellows pipe 10 manufactured through the configuration and manufacturing process as described above has superior corrosion resistance and heat resistance compared to the conventionally provided bellows pipe, and is particularly suitable for manufacturing processes and manufacturing equipment such as semiconductors or displays. Do.

Looking at the comparison table between the bellows pipe of the present invention and the conventional ETFE coated bellows pipe,

Properties unit the present invention Conventional bellows pipe note tensile strength MPa 23 41 to 47 The higher the harder Continuous operating temperature ℃ 230 150 heat resistance Short-term heat-resistant temperature
(96hr) ℃ 250 180 heat resistance low temperature cracking temperature ℃ -50 -80 Low temperature characteristics

In addition, looking at the chemical resistance of the bellows pipe of the present invention,

temp 168h (%) Mark 720h (%) Mark hydrochloric acid (20%) 70 1.2

A 3.1

A sodium hydroxide
48 (%) 70 0.1 0.4 Ethylene (100%) 25 0.8 1.5 ammonia
(28%) 70 1.3 2.7

In addition, comparing the bellows pipe of the present invention and the conventional bellows pipe,

As described above, the bellows tube of the present invention is provided in the form of a double tube consisting of an outer tube body and a corrosion-resistant reinforced tube body inside the outer tube body, thereby easily forming a corrosion-resistant reinforced tube body having a uniform thickness on the inside of the outer tube body. In accordance with the composition to improve the corrosion resistance and heat resistance of the corrosion-resistant reinforcing pipe body, in particular, it provides a bellows pipe more suitable for use in semiconductor or display manufacturing process or manufacturing equipment.

What has been described above is only one embodiment for implementing a bellows pipe and a method for manufacturing the bellows pipe, and the present invention is not limited to the above-described embodiment. Those of ordinary skill in the art to which the present invention pertains will understand that various modifications can be made without departing from the gist of the present invention.

10: bellows tube 110: outer tube body
112: pleated portion 114: flange portion
120: corrosion-resistant reinforcing pipe

Claims (6)

It has a predetermined thickness, a wrinkle portion is formed in the central portion, the outer tube body is formed with a flange portion at each of both ends; and
a corrosion-resistant reinforcing tube body formed on the inner surface of the outer tube body and molded to form corrosion resistance, heat resistance, and a uniform thickness;
A bellows pipe comprising a.
The method according to claim 1,
The outer tube body is stainless steel;
Bellows tube, characterized in that.
The method according to claim 1, The corrosion-resistant reinforcing pipe body,
Composition with aplas, which is a copolymer of Tetra Fluoro Ethylene (TFE) and propylene, as the main raw material;
Bellows tube, characterized in that.
The method according to claim 3, The corrosion-resistant reinforcing pipe body,
Composition to improve corrosion resistance and heat resistance by mixing carbon and vulcanizing agent in a certain ratio for aplas, the main subject;
Bellows tube, characterized in that.
An external tubular body forming step of forming an external tubular body having a predetermined thickness and having a wrinkle portion in a central region;
When the molding of the outer tube body is completed through the outer tube forming step, the corrosion-resistant reinforcing tube body is primarily formed by extrusion molding or press molding at a high temperature after mixing carbon and vulcanizing agent in a certain ratio with aplas as the main subject. first forming step; and
When the primary molding of the corrosion-resistant reinforcing pipe body is completed through the corrosion-resistant reinforcing pipe body 1 forming step, the corrosion-resistance reinforcing pipe body is formed inside the pre-fabricated external pipe body. A bellows pipe completion step in which the corrosion-resistant reinforcing pipe body is adhered to complete the double pipe type bellows pipe;
Bellows pipe manufacturing method comprising a.
6. The method of claim 5,
When the primary molding of the corrosion-resistant reinforced pipe body is completed through the first forming step of the corrosion-resistant reinforced pipe body, secondary vulcanization is performed on the firstly formed corrosion-resistant reinforced pipe body to form the corrosion-resistant reinforced pipe body with enhanced corrosion resistance and heat resistance A secondary molding step of the corrosion-resistant reinforcing pipe body to be completed;
Bellows pipe manufacturing method, characterized in that it further comprises.

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