KR20220006473A - Appratus for forming photo patterning for geometric phase optic device and method forming photo patterning using the same - Google Patents

Abstract

Provided are an optical alignment forming device of a geometric phase optical element and an optical alignment forming method using the same. The optical alignment forming device of the geometric phase optical element includes: a transfer optical element seating unit on which a light source is incident and a transfer phase optical element having geometrical phase information is seated; an optical element receiving part which is arranged in a line so as to be coaxial with an optical axis of the light source, and the phase optical element to be transferred having the optical alignment layer to which the geometrical phase information is transferred is seated; and an alignment forming unit arranged in a line so as to be coaxial with the optical axis and having an adjustable magnification to image the geometrical phase information on the optical alignment layer in a predetermined pattern. Therefore, a vibration effect is minimized to stably form a geometric phase pattern.

Description

Apparatus for forming optical alignment of geometric phase optical element and method for forming optical alignment using the same

The present disclosure relates to an apparatus for forming optical alignment of a geometric phase optical element and a method for forming optical alignment using the same, and more particularly, to easily fabricate a geometric phase pattern in a geometric phase optical element according to design matters, as well as to influence vibrations Disclosed are an apparatus for forming an optical alignment of a geometric phase optical element that stably forms a geometric phase pattern by minimizing this, and a method for forming an optical alignment using the same.

By spatially controlling the optical axis of anisotropic molecules, the phase of the traveling light can be modulated. In this case, the modulated phase is called a geometric phase or Panchartnam-Berry phase, not a phase caused by a difference in optical paths. A lot of research is being conducted for optical elements using these geometric phases to be widely used in fields such as AR, VR devices, and microscopes, where it is difficult to respond to various requirements only with the performance of existing lenses. In the geometrical phase, when light travels on a half-wave plate made of an anisotropic material, the modulated phase corresponds to twice the optical axis of the half-wave plate.

In the case of making a diffractive element according to polarization using the material, the rotation angle Φ(x,z) of each anisotropic material (eg, liquid crystal) with respect to the x-axis and the z-axis in the height direction is determined by Equation 1 below. and the angle of diffraction is determined by the spacing Λ of the grating. where d is the thickness of the layer and Φ is the twist angle of the anisotropic material.

[Equation 1]

As shown in FIG. 1 , the diffractive element 10 using a geometric phase has an optical characteristic of diffracting light in +1, -1 order according to the circular polarization state of the incident light. 1 is a diagram illustrating a diffractive optical element using a geometric phase.

In the case of making a thin-film lens using the material, the rotation angle of each material on a two-dimensional plane composed of the x and y axes is determined by Equation (2). In this case, f is the focal length of the lens to be manufactured. This thin-film lens is referred to as a geometric phase lens 12 .

[Equation 2]

The geometric phase lens 12 operates at a positive focal length +f and a negative focal length -f, respectively, according to the circular polarization state of the incident light, as shown in FIG. 2 . When linearly polarized light is incident, it acts as +f for 1/2 of the incident light, and acts as -f for the other half. 2 is a view showing the optical characteristics of a general metal lens or geometric phase lens.

Meanwhile, the geometric phase optical element composed of the diffractive element 10 or the geometric phase lens 12 may be made of a curable liquid crystal. A photo-alignment material is coated on the cleaned substrate, and the photo-alignment layer-coated substrate is placed on a polarization hologram interferometer, and then an orientation angle of the photo-alignment layer is formed. Subsequently, the liquid crystal is primarily coated on the photo-alignment layer and cured, and the liquid crystal is coated again and cured. Liquid crystal has a substituent that changes into a polymer by ultraviolet light, and through a curing process, it has a permanent lens function, unlike a general liquid crystal display. Next, a planarization film is formed on the cured liquid crystal layer.

The geometric phase optical element is formed to have an orientation angle of a predetermined pattern on the photo-alignment layer in order to have a geometric phase. As described above, an optical alignment forming apparatus using a polarization hologram interferometer may be used. A conventional device using a polarization hologram interferometer may be composed of a first beam splitter, a plurality of reflection optical systems for emitting the two lights separated by this into a predetermined path, a second beam splitter, and a quarter wave plate. have. Taking the fabrication of a geometric phase optical element having a geometric phase lens as an example, the second beam splitter and the quarter wave plate are a new phase optical element coated with an optical alignment film to form the phase information and the existing phase optical element already equipped with geometric phase information. It may be positioned between the topological optical elements. Accordingly, it is not easy to shorten the focal length of the new topological device, and even when an enlarged focal length is implemented, it is necessary to separate the distance between the existing and the new topological optical device, but there is a spatial limitation in the conventional device. There is a limit to spaced apart the distance. Therefore, according to the conventional apparatus, a photo-alignment film having a focal length that meets the manufacturing requirements of the novel phase optical element is not formed.

In addition, in order to generate circularly polarized light through the two interfering lights in the conventional device, the members of the device are installed separately as separate modules. Accordingly, the vibrations generated by each member are different from each other, and thus an error according to the vibrations applied to the two lights is induced differently. Different errors in the two interfering lights are propagated to the linearly polarized light according to the interfering light, so that the optical alignment by the linearly polarized light inevitably has a serious error. Accordingly, various methods have been tried to minimize the influence of vibrations depending on the device in forming the conventional optical alignment.

The technical problem of the present disclosure is to easily fabricate a geometric phase pattern in a geometric phase optical element according to design matters, while minimizing the vibration effect to stably form a geometric phase pattern by an optical alignment forming apparatus for a geometric phase optical element, and An object of the present invention is to provide a method for forming a photo-alignment using the same.

The technical problems to be achieved in the present disclosure are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those of ordinary skill in the art to which the present disclosure belongs from the description below. will be able

According to an aspect of the present disclosure, an apparatus for forming a photo-alignment of a geometric phase optical element may be provided. The optical alignment forming apparatus of the geometric phase optical element includes a transfer optical element seating portion on which a light source is incident and a transfer phase optical element having geometric phase information is seated, and is arranged in a line to be coaxial with an optical axis of the light source, An optical element receiving portion for seating a phased optical element to be transferred having an optical alignment film to which phase information is transferred, and an optical element to be transferred are arranged in a line to be coaxial with the optical axis, and the magnification is adjustable so that the geometrical phase information is displayed in a predetermined pattern. and an alignment forming unit for imaging the photo alignment layer.

According to another embodiment of the present disclosure, the orientation forming unit includes at least one lens, and a magnification lens unit configured to adjust the magnification by moving the lens along the optical axis or mounting a lens matching the magnification. can do.

According to another exemplary embodiment of the present disclosure, the apparatus may further include an objective lens unit that transmits circularly polarized light components or diffraction patterns generated by passing through the transfer phase optical element to the magnification lens unit without magnification.

According to another embodiment of the present disclosure, the light source, the transfer optical element seating part, the alignment forming part, and the receiving optical element seating part may be integrally formed.

According to another embodiment of the present disclosure, the transfer phase optical element may be a geometric phase optical element including a meta lens or a liquid crystal-based geometric phase lens, or a diffractive element configured with a diffraction grating.

According to another aspect of the present disclosure, there may be provided a method of forming a photo-alignment using an apparatus for forming a photo-alignment of a geometric phase optical element. In the photo-alignment forming method, a light source is incident and a transfer optical element seating portion on which a transfer phase optical element having geometrical phase information is seated, is arranged in a line so as to be coaxial with the optical axis of the light source, and the geometrical phase information is transferred An optical element receiving portion for seating a phased optical element to be transferred having a photo-alignment film, is arranged in a line so as to be coaxial with the optical axis, and the magnification is adjustable so that the geometrical phase information is imaged on the photo-alignment film in a predetermined pattern An apparatus for forming optical alignment of a geometric topological optical element including an alignment forming part is used, whereby the optical alignment forming method includes the steps of supporting the transfer and the topological optical element on the transfer and the optical element receiving part seating parts , adjusting the magnification of the alignment forming unit according to the design requirements of the transfer phase optical element, and inputting the light source to form the geometrical phase information of the transfer phase optical element in the predetermined pattern on the photo-alignment film includes steps.

The features briefly summarized above with respect to the present disclosure are merely exemplary aspects of the detailed description of the present disclosure that follows, and do not limit the scope of the present disclosure.

According to the present disclosure, an apparatus for forming a photo-alignment of a geometric phase optical element that easily forms a geometric phase pattern in a geometric phase optical element according to design matters, and minimizes vibration influence to stably form a geometric phase pattern, and the same It is possible to provide a method for forming a photo-alignment using the same.

The effects obtainable in the present disclosure are not limited to the above-mentioned effects, and other effects not mentioned may be clearly understood by those of ordinary skill in the art to which the present disclosure belongs from the description below. will be.

1 is a diagram illustrating a diffractive optical element using a geometric phase.
2 is a view showing the optical characteristics of a general metal lens or geometric phase lens.
3 is a diagram schematically illustrating an apparatus for forming an optical alignment of a geometric phase optical element according to an embodiment of the present disclosure.
4 is a diagram illustrating a principle in which a phase arrangement of a transfer phase optical element is magnified and input to a phased optical element to be transferred by the optical alignment forming apparatus according to an embodiment of the present disclosure.
5 is a flowchart of a method of forming a photo-alignment according to another exemplary embodiment of the present disclosure.
6 is a diagram illustrating a polarization hologram interferometer based on a Mach-Zehnder interferometer as a conventional optical alignment forming apparatus.
7 is a diagram schematically illustrating a direct-writing system as a conventional optical alignment forming apparatus.

Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement them. However, the present disclosure may be embodied in several different forms and is not limited to the embodiments described herein.

In describing an embodiment of the present disclosure, if it is determined that a detailed description of a well-known configuration or function may obscure the gist of the present disclosure, a detailed description thereof will be omitted. And, in the drawings, parts not related to the description of the present disclosure are omitted, and similar reference numerals are attached to similar parts.

In the present disclosure, when a component is "connected", "coupled" or "connected" to another component, it is not only a direct connection relationship, but also an indirect connection relationship in which another component exists in the middle. may also include. In addition, when a component is said to "include" or "have" another component, it means that another component may be further included without excluding other components unless otherwise stated. .

In the present disclosure, terms such as first, second, etc. are used only for the purpose of distinguishing one component from other components, and do not limit the order or importance between the components unless otherwise specified. Accordingly, within the scope of the present disclosure, a first component in one embodiment may be referred to as a second component in another embodiment, and similarly, a second component in one embodiment is referred to as a first component in another embodiment. can also be called

In the present disclosure, components described in various embodiments do not necessarily mean essential components, and some may be optional components. Accordingly, an embodiment composed of a subset of components described in an embodiment is also included in the scope of the present disclosure. In addition, embodiments including other components in addition to components described in various embodiments are also included in the scope of the present disclosure.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings and the content to be described later. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided so that the disclosed subject matter may be thorough and complete, and that the spirit of the present invention may be sufficiently conveyed to those skilled in the art. Like reference numerals refer to like elements throughout. On the other hand, the terms used herein are for the purpose of describing the embodiments and are not intended to limit the present invention. In this specification, the singular form also includes the plural form unless otherwise specified in the phrase. As used herein, “comprises” and/or “comprising” means that a referenced component, step, operation and/or element is the presence or absence of one or more other components, steps, operations and/or elements. addition is not excluded.

In addition, expressions of positional relationships used in the specification, such as upper, lower, left, right, etc., are described for convenience of explanation, and when the drawings shown in this specification are reversed, the positional relationship described in the specification is interpreted inversely. it might be

Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings.

Referring to FIG. 3 , an apparatus for forming optical alignment of a geometric phase optical element according to an embodiment of the present disclosure will be described.

3 is a diagram schematically illustrating an apparatus for forming an optical alignment of a geometric phase optical element according to an embodiment of the present disclosure.

The optical alignment forming apparatus 100 of a geometric phase optical element includes a predetermined pattern on the optical alignment film so as to simulate or transfer the geometric phase information of the transfer phase optical element A to the to-be-transferred phase optical element B having the optical alignment film. It may be a device for forming lower-order phase information. The geometrical phase information may be the orientation angle of the transfer phase optical element to the photo-alignment film.

Specifically, the optical alignment forming apparatus 100 may include a light source 102 , a transfer optical element mounting unit 104 , an alignment forming unit 106 , and an optical element receiving unit receiving unit 108 .

The light source 102 is high-power laser light, and may be set to be incident as parallel light in the form of linearly polarized light to the transfer phase optical element A supported by the transfer optical element mounting unit 104 .

The transfer optical element mounting unit 104 may seat the transfer phase optical element A having the geometrical phase information to which the light source 102 is incident. The transfer optical element mounting portion 104 may include a member capable of supporting the transfer phase optical element A.

The transfer phase optical element A may be a geometric phase optical element having a meta lens or a liquid crystal-based geometric phase lens, or a diffractive element configured with a diffraction grating. A geometric phase optical element having a meta lens has cells of the meta lens arranged in a matrix form on a substrate, and may include defined geometric phase information for each cell of the meta lens. A geometric phase optical device having a liquid crystal-based geometric phase lens may include a photo-alignment layer and a liquid crystal layer sequentially formed on a substrate. The substrate may be a glass or transparent plastic substrate. The photo-alignment layer may be an alignment layer formed in a fine pattern to control the rotation angle of the liquid crystal, and the alignment angle for each space may already be determined during the photo-alignment process. A geometric topological optical element having a diffractive element may be formed with a plurality of slits for generating coherent light on a substrate. The transfer phase optical element A is not limited to the type described above, and may be any shape as long as it is a geometric phase optical element in which geometric phase information has already been formed.

The orientation forming unit 106 is arranged in a line so as to be coaxial with the optical axis of the light source 102 so as to minimize the effect of vibration caused by the member of the optical orientation forming apparatus 100 including the light source 102 , and the magnification is adjusted Possibly, the geometrical phase information of the transfer phase optical element A can be imaged on the optical alignment film of the transfer target phase optical element B in a predetermined pattern.

The alignment forming unit 106 may include the objective lens unit 110 and the magnification lens unit 112 sequentially arranged along the optical axis of the light source incident from the transfer phase optical element A. The orientation forming unit 106 may be composed of, for example, a relay lens group. The objective lens unit 110 and the magnification lens unit 112 may be installed so as to have the same effect of error due to vibration, for example, to be respectively connected to the inner wall of the single housing. The objective lens unit 110 may configure a lens to transmit circularly polarized light components or diffraction patterns generated through the transfer phase optical element A to the magnification lens unit 112 in a non-magnifying manner. The magnification lens unit 112 includes at least one lens, and may be configured to move the lens along the optical axis, or to have a space for mounting the lens to meet the magnification required for the design when forming the optical alignment. have. As the lens is moved along the optical axis or the lens is replaceable, the magnification of the lens can be adjusted. This can be easily implemented. As another example, in the case of the phase-to-transfer optical element B having the diffraction element, since the magnification lens unit 112 has the above-described configuration, the diffraction angle according to design matters can be freely adjusted.

The optical element receiving part 108 may be arranged in line with the orientation forming part 106 so as to be coaxial with the optical axis in order to minimize the effect of vibration induced in the member of the optical orientation forming apparatus 100 . The optical element receiving unit 108 may support the phase optical element B to be transferred having a photo-alignment layer to which the geometric phase information of the transfer phase optical element A is transferred. The optical element receiving unit 108 is configured to move along the optical axis, so that the position or distance of the phase optical element B to be transferred with respect to the magnification lens unit 112 can be adjusted. In addition, the optical element receiving unit 108 may include a member capable of supporting the phase optical element B to be transferred. In addition, the light source 102 including the optical element receiving unit 108 , the transfer optical element receiving unit 104 , and the orientation forming unit 106 are configured to be robust to vibration caused by the member of the optical alignment forming apparatus 100 . , each connected to the inner wall of the housing constituting the outside of the device may be integrally formed. The phase-to-transfer optical element B may for example be a geometric phase optical element having a liquid crystal-based geometric phase lens. In this case, the phase-to-transfer optical element (B) may be a substrate coated with a photo-alignment layer before any alignment angle is formed. The substrate may be a glass or transparent plastic substrate. The photo-alignment layer may be formed of a brilliant yellow layer or an azo polymer layer.

FIG. 4 is a diagram illustrating a principle in which a phase arrangement of a transfer phase optical element is magnified and input to a phased optical element to be transferred by the optical alignment forming apparatus according to an embodiment of the present disclosure.

Assuming that the high-power laser light of the light source 102 is incident on the transfer phase optical element A having a geometric phase lens as parallel light, passing through the transfer phase optical element A, the parallel light is left circularly polarized and It may be divided into right circularly polarized components and converged or diverged. As another example, in the case of the transfer phase optical element A having the diffraction element, the passing parallel light may be diffracted in the order of +1 or -1. At this time, the surface of the transfer phase optical element (A) is imaged using the orientation forming unit 106 composed of a relay lens group, and when the newly manufactured transfer phase optical element (B) is placed on the imaging surface, the previously manufactured The circularly polarized light components of the transfer phase optical element A can be enlarged with a constant magnification to reach the substrate. The constant magnification is a predetermined pattern of geometrical phase information to be formed on the photo-alignment layer of the phase-to-transfer optical element B, and may be predetermined according to design matters. The magnification according to the design may be adjusted by moving the lens of the magnification lens unit 112 along the optical axis or by replacing it with a lens suitable for the magnification. As another example, the magnification may be adjusted by moving the optical element receiving portion 108 supporting the phase optical element B to be transferred along the optical axis.

When the orthogonal circularly polarized light component reaches the optical alignment film of the phase optical element B to be transferred, the effect of the linearly polarized light input can be imparted due to the vector sum of the polarizations. The optical alignment layer of the phase-to-transfer optical element B forms an alignment angle by the linearly polarized light. Therefore, as illustrated in FIG. 3 , the transfer geometric phase pattern 116 of the magnification pattern enlarged than the transfer geometric phase pattern 114 of the pre-fabricated transfer phase optical element (A) is the transfer phase optical element (B). can be recorded on the photo-alignment layer of Therefore, by moving, replacing the magnification lens unit 112 and/or moving the position of the optical element receiving unit 108, the focal length (geometric phase lens type) or the diffraction angle (geometric phase lens type) of the transfer phase optical element A ( diffraction element type) can be freely formed according to design matters. In addition, by adjusting the linear distance between the orientation forming unit 106 and the phase optical element B to be transferred by the above-described movement, a focal length or a diffraction angle according to a design matter can be formed very easily.

Hereinafter, a photo-alignment forming method according to another exemplary embodiment of the present disclosure will be described with reference to FIG. 5 . 5 is a flowchart related to a method for forming a photo-alignment according to another embodiment of the present disclosure, and the method for forming a photo-alignment is to be performed using the apparatus 100 for forming a photo-alignment of a geometric phase optical element described with reference to FIGS. 3 and 4 . can

First, the phase optical element B to be transferred and transferred is supported on the transfer and to-be-transferred optical element seating portion 108 ( S105 ). The transfer and target phase optical elements B are substantially the same as those described with reference to FIG. 3 , and thus a detailed description thereof will be omitted.

Subsequently, the magnification of the alignment forming unit 106 may be adjusted according to the design requirement of the phase optical element B to be transferred ( S110 ).

Specifically, by moving the lens of the magnification lens unit 112 along the optical axis or by replacing the lens of the magnification lens unit 112 , the magnification of the lens may be adjusted according to design requirements. In the case of the phase-to-transfer optical element B having a geometric phase lens, the focal length may be reduced or expanded according to design considerations. As another example, in the case of the phase-to-transfer optical element B having the diffraction element, since the magnification lens unit 112 has the above-described configuration, the diffraction angle according to design matters can be freely adjusted. As another example, the magnification may be adjusted by moving the optical element receiving portion 108 supporting the phase optical element B to be transferred along the optical axis.

Next, the high-power laser of the light source 102 is incident on the transfer phase optical element A as parallel light, and the geometrical phase information of the transfer phase optical element A is converted into a predetermined pattern by the light of the phase optical element B to be transferred. It can be formed on the alignment layer (S115). When the transfer phase optical element A is a geometric phase lens type, the predetermined pattern may be an orientation angle pattern that is enlarged or reduced than the transfer phase optical element A so as to have a focal length according to a design matter. When the transfer phase optical element (A) is a diffraction element type, it may be an alignment pattern with a diffraction angle enlarged or reduced than that of the transfer phase optical element (A) so as to have a diffraction angle according to design considerations.

Hereinafter, advantages of the optical alignment forming apparatus according to an embodiment of the present disclosure compared to the related art will be described. As the conventional optical alignment forming apparatus, an apparatus using a polarization hologram interferometer based on a Mach-Zehnder interferometer, and an apparatus using a direct-writing system are exemplified.

6 is a diagram illustrating a polarization hologram interferometer based on a Mach-Zehnder interferometer as a conventional optical alignment forming apparatus.

The conventional optical alignment forming apparatus 20 using a polarization hologram interferometer includes a laser light source 22, a first wavefront separator 24 that splits the laser light into two orthogonal interfering beams, and emits each interference light through a predetermined path. The first and second reflection optical systems 26 and 28, the second wavefront separator 30 for focusing the two interfering light incident from the reflection optical system, and the second wavefront separator 30 on the optical path are disposed behind It may include a quarter wave plate 32 . The transfer phase optical element C may be arranged in front of the second wavefront separator 30 , and the phase optical element D to be transferred may be arranged in the rear of the quarter wave plate 32 .

The two interfering lights are configured to be orthogonal circularly polarized light, and as a result of the interference, the interferometer may be configured to output a state of linearly polarized light having an arbitrary oscillation angle. When the transfer phase optical element C is positioned on one axis of the interferometer, the phase information for each space of the transfer phase optical element C can be converted into angle information at the output end. When the phased optical element D coated with the photo-alignment film is placed at the output end of the interferometer, the alignment angle is formed according to the oscillation axis of the linearly polarized component by the linearly polarized light at different angles reaching each point on the plane. can

In the optical alignment forming apparatus 20 according to FIG. 6 , in order to generate circularly polarized light through the two interfering lights, the members of the apparatus are installed separately as separate modules. Accordingly, the vibrations generated by each member are different from each other, and thus an error according to the vibrations applied to the two lights is induced differently. Different errors in the two interfering lights are propagated to the linearly polarized light according to the interfering light, so that the optical alignment by the linearly polarized light inevitably has a serious error. That is, the device 20 according to FIG. 6 has a configuration that is very vulnerable to vibration.

In addition, when the position of the phase optical element D to be transferred is changed, various variables such as pitch and yaw of the first and second reflection optical systems 26 and 28 need to be corrected. is accompanied

In the case of the geometric phase lens type, since the second wavefront separator 30 and the quarter wave plate 32 are arranged between the transfer phase optical element C and the phase optical element D to be transferred, the phase optical element to be transferred It is not easy to reduce the focal length of (D). In addition, when manufacturing the phase-to-transfer optical element (D) of the extended focal length, the distance between the transfer phase optical element (C) and the phase-to-transfer optical element (D) needs to be spaced apart twice the focal length, but It is difficult to construct an interferometer and manufacture a lens due to the vibration and spatial constraints of (20).

Since the optical alignment forming apparatus 100 according to the embodiment of the present disclosure is an interferometer configured in a line, it is robust to vibration and has the advantage of being able to manufacture a geometric phase optical device relatively stably even after exposure to a high-power laser for a long time.

7 is a diagram schematically illustrating a direct-writing system as a conventional optical alignment forming apparatus.

The optical alignment forming apparatus 100 using the conventional direct recording system includes a laser light source 42, a polarization control stage unit 44, a reflection optical system 46, an eyepiece 48, and a new manufacturing method along an optical path. It may include a planar movable support plate 50 that supports the target phase optical element E and moves it in both x and y-axis directions.

The optical alignment forming apparatus 40 according to FIG. 7 is a point-by-point recording system, and the apparatus 40 is also used to manufacture various types of geometric phase optical elements, but it is easy to stably maintain the axis. Otherwise, various issues such as vibration caused by the motor driving the support plate 50 are induced. That is, the device 40 according to FIG. 7 also has a configuration that is very vulnerable to vibration. In addition, the optical alignment forming apparatus 100 according to the present disclosure can form a geometric phase in the photo-alignment film only with the alignment forming unit 106 composed of a relay lens group, whereas the apparatus 40 according to FIG. It is more complex than the optical alignment forming apparatus 100 according to the disclosure and includes a larger number of members. For this reason, the apparatus 40 according to FIG. 7 accompanies a longer optical path compared to the apparatus 100 for forming an optical orientation according to the present disclosure, and thus generates more errors than the apparatus 100 according to the present disclosure in forming the optical alignment. and propagates to the target phase optical element E.

The optical alignment forming apparatus 100 according to the present disclosure does not require expensive parts other than the high-power laser light source 102, so that not only the apparatus is configured simply, but also the manufacturing cost of the apparatuses 20 and 40 of FIGS. 6 and 7 is reduced. can be significantly reduced compared to

Example methods of the present disclosure are expressed as a series of operations for clarity of description, but this is not intended to limit the order in which the steps are performed, and if necessary, each step may be performed simultaneously or in a different order. In order to implement the method according to the present disclosure, other steps may be included in addition to the illustrated steps, other steps may be excluded from some steps, or additional other steps may be included except some steps.

Various embodiments of the present disclosure do not list all possible combinations, but are intended to describe representative aspects of the present disclosure, and matters described in various embodiments may be applied independently or in combination of two or more.

In addition, various embodiments of the present disclosure may be implemented by hardware, firmware, software, or a combination thereof. For implementation by hardware, one or more Application Specific Integrated Circuits (ASICs), Digital Signal Processors (DSPs), Digital Signal Processing Devices (DSPDs), Programmable Logic Devices (PLDs), Field Programmable Gate Arrays (FPGAs), general purpose It may be implemented by a processor (general processor), a controller, a microcontroller, a microprocessor, and the like.

The scope of the present disclosure includes software or machine-executable instructions (eg, operating system, application, firmware, program, etc.) that cause an operation according to the method of various embodiments to be executed on a device or computer, and such software or and non-transitory computer-readable media in which instructions and the like are stored and executable on a device or computer.

Although the present invention has been described in detail through representative embodiments above, those of ordinary skill in the art to which the present invention pertains can make various modifications to the above-described embodiments without departing from the scope of the present invention. will understand Therefore, the scope of the present invention should not be limited to the described embodiments and should be defined by all changes or modifications derived from the claims and equivalent concepts as well as the claims to be described later.

100: apparatus for forming optical alignment of geometric phase optical elements
102: light source 104: transfer optical element seating part
106: alignment forming part 108: receiving optical element seating part
110: objective lens unit 112: magnification lens unit

Claims (1)

a transfer optical element seating unit on which a light source is incident and a transfer phase optical element having geometrical phase information is seated;
an optical element seating part arranged in a line so as to be coaxial with the optical axis of the light source and configured to seat the phase optical element to be transferred having a photo-alignment layer to which the geometrical phase information is transferred; and
and an alignment forming unit arranged in a line to be coaxial with the optical axis and having an adjustable magnification to image the geometrical phase information on the optical alignment layer in a predetermined pattern.

Images