KR20210152334A - Evaporator - Google Patents

Abstract

The present invention provides an element to prevent evaporation material from leaking from a coupling boundary gap between evaporation source members. According to the purpose, the present invention provides an evaporation source wherein a gap sealing material in a form of sheet or a wire made of ductile and high temperature-resistant material is arranged on a boundary part, on which components constituting the evaporation source are coupled with each other, to seal the boundary part so as to prevent leakage of the evaporation material at the gap.

Description

Evaporator {Evaporator}

The present invention relates to a configuration of an evaporation source, and more particularly, to a configuration of an evaporation source for evaporating a material to form a thin film device.

An evaporation source for forming an organic thin film, an inorganic thin film, a metal thin film, etc. puts a material in a crucible and heats it so that the vapor is sprayed into the nozzle. A long linear deposition source is used according to the enlargement of the substrate area, and in some cases, a point deposition source is used. Also, there is a high-temperature deposition source that forms a thin metal film, such as an electrode. The deposition sources include a crucible for putting a material, a heater for heating the crucible, and a nozzle through which the vapor is sprayed. Various means are devised so that the evaporation material sprayed through the nozzle continuously and uniformly forms a thin film on several substrates. Examples include nozzle distribution, shape control, and inner plate responding to changes in material distribution in a crucible. By the way, although it is preferable that the vaporized material is sprayed only through the nozzle, there is a problem in that it leaks through the gaps of various coupling parts constituting the actual deposition source. For example, evaporation material leaks from the gap between the upper end of the evaporation source body 30 and the coupling part of the nozzle part 20, and when the nozzle is assembled in the nozzle part, it is not the opening of the nozzle assembled in the nozzle part. Evaporants also leaked out of the assembly boundary gap (see FIG. 1). Leakage of these vapors has a problem in that expensive materials are wasted, and makes errors in various means designed to form a high-quality and uniform thin film, and also causes contamination in the chamber.

Patent Registration No. 10-2076994 recognizes the problem of evaporation of vapors from the evaporation source, but as a means for this, a shield structure that protrudes slightly to the outside of the evaporation source by wrapping the crucible is proposed, and evaporation of evaporation from the gap made by the shield structure itself Problems and problems such as leaking out of the assembly nozzle gap cannot be solved.

In response to the above problem, the present invention intends to provide a means for preventing evaporation from leaking from the boundary gap between the deposition source members.

In accordance with the above object, the present invention provides a vapor deposition method that prevents crevice leakage of vapors by arranging and sealing a gap sealant in the form of a sheet or wire made of a material that is flexible and resistant to high temperatures at the boundary where the members forming the deposition source are bonded. give a circle

The gap sealing material may be formed of a composite material including copper (Cu), aluminum (Al), graphite, silicon, high molecular weight polymer, or ceramic.

The gap sealer may be machined and arranged in a thin metal or composite foil tailored to the shape of the gap forming portion.

That is, the present invention is

Provided is an evaporation source characterized in that a gap sealing material containing metal, silicon-based elastic material, synthetic resin, polymer polymer, graphite or ceramic is applied to the boundary where bonding between members constituting the evaporation source is made to prevent leakage of vapors.

In the above, the gap sealant is a wire-type gap sealer, a sheet-type gap sealer, an O-ring gap sealant, a block-type gap sealer, a plate-type gap sealer, a hetero-type gap sealant made of multiple materials, or a self-knife It provides an evaporation source comprising a type gap sealing material.

In the above, the gap sealing material provides an evaporation source, characterized in that it is composed of a flexible metal including at least one of Cu, Al, Ti, and stainless steel.

In the above, the boundary portion on which the gap sealing material is arranged includes a portion in contact with the upper end of the crucible and the nozzle portion on which the nozzle is formed, or a portion in which a member fastened to the deposition source contacts the deposition source body. .

In the above, the boundary portion where the gap sealing material is arranged includes a portion in which the inner plate arranged on the upper end of the crucible is in contact with the upper end of the crucible or the nozzle unit.

In the above, when the nozzle is prefabricated to the nozzle part, the boundary part on which the gap sealing material is arranged includes a part in which the nozzle is assembled and in contact with the nozzle part body.

In the above, the wire-type gap-blocking material or the O-ring-type gap-blocking material,

The inner plate is disposed on the boundary surface between the wing portion and the nozzle portion spanning the crucible or on the boundary surface between the inner plate blade portion and the crucible, and disposed in the groove formed on the blade portion of the inner plate,

It is disposed in a groove formed at an angle between the nozzle part and the crucible at the border where the nozzle part and the crucible meet, or

There is provided a deposition source, characterized in that the nozzle unit, the crucible, and the inner plate wing portion is disposed in a border portion where the side groove is formed on the side groove formed on the side of the inner plate wing.

In the above, the sheet-type gap-blocking material, plate-type gap-blocking material, or hetero-type gap-blocking material is partially or wholly arranged on the interface between the inner plate wing part and the nozzle part, or the interface between the inner plate blade part and the crucible, , to provide an evaporation source, characterized in that it is overlapped with a plurality of layers according to the boundary portion.

In the above, the block-type gap sealing material is disposed on the boundary surface between the inner plate wing portion and the nozzle portion or the boundary surface between the inner plate blade portion and the crucible, disposed in the groove formed on the wing portion of the inner plate or the nozzle portion, the crucible , and a boundary portion where the inner plate wing meets and is disposed on the side of the inner plate wing.

In the above, the clip-type gap sealing material provides an evaporation source, characterized in that it is applied as if wrapped around the inner plate wing with a clip at the border where the nozzle part, the crucible, and the inner plate wing part meet.

In the above, the self-knife edge-type gap sealing material provides an evaporation source, characterized in that it is disposed on the interface between the inner plate wing portion and the nozzle portion without forming a separate groove.

In the above, wire-type gap seal material, sheet-type gap seal material, O-ring gap seal material, block-type gap seal material, plate-type gap seal material, multi-material hetero-type gap seal material or self-knife edge seal material It provides an evaporation source, characterized in that at least two of them are partially mixed and applied to one evaporation source.

According to the present invention, it is possible to prevent evaporation of vapors from leaking to other places than the nozzle by the gap sealing materials arranged in various shapes in the coupling gap between the members constituting the deposition source. The gap sealing material has ductility and may be partially processed into a required predetermined shape where the evaporation material is leaked. That is, it is possible to very effectively prevent evaporation of the evaporation material by customizing the shape for the place where the leakage phenomenon is observed and arranging it on the interface of the coupling members.

By applying the gap sealing material of the present invention, material efficiency is improved by about 5% compared to the conventional evaporation source.

1 is a cross-sectional view showing the structure of a conventional deposition source.
2 is a cross-sectional view and a plan view showing the configuration of an evaporation source to which a gap sealing material is applied in the form of a wire according to the present invention.
3 is a view showing an embodiment in which the gap sealing material of the present invention is configured in the form of a sheet.
4 and 5 are tables showing cross-sectional views showing application of various types of gaskets according to the present invention.
6 and 7 are cross-sectional views showing the application of another type of gasket according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 shows the structure of the deposition source 100 according to the present invention.

The nozzle unit 20 is coupled to the upper end of the crucible 10 , and a gap through which the evaporation material leaks occurs in the boundary part 40 where they are coupled. Although mechanically coupled to perfection, the vapors are like sublimated gases and can leak out of small crevices. Therefore, the present invention prevents leakage of evaporation by applying a thin gap sealant to such a mechanical coupling part. The left side of FIG. 2 shows that the wire-type gap-blocking material 200 is applied, and the right-hand side shows that the wire-type gap-blocking material 200 is arranged at the portion to be the interface between the crucible 10 and the nozzle unit 20 . show In the case where there is a thin tubular gap in the coupling part of the nozzle part 20 and the upper end of the crucible 10 , the application of the wire-type gap blocking material 200 effectively blocks the gap leakage.

The gap sealer should have high temperature resistance and good workability. By observing the operation of the deposition source 100, it should be possible to monitor the leakage of the evaporation and to apply a full or partial application to the leakage portion in response thereto. The shape of the gap sealing material should also be customizable and variously processed, and the wire-type or sheet-type is an example. A wire-type gap-blocking material is arranged in a gap where wires can be easily arranged, and both members are combined. When evaporation occurs in a portion of the bonding portion of the deposition source, a sealing material processed into a sheet fragment may be arranged only in the corresponding portion, and a sheet-type sealing material 210 cut to a predetermined width with respect to the entire bonding portion. can also be arranged.

In addition, as for the nozzle unit 20 of the deposition source 100 , a plurality of nozzles having openings are processed into one nozzle unit 20 , but there are also cases in which nozzles are individually assembled to the deposition source. An example is when a replaceable nozzle is configured. In such a case, a gap blocking material may be arranged on the interface where the nozzle is coupled to the nozzle unit body.

In addition, the inner plate 50 is disposed on the upper end of the crucible 10 , and a gap blocking material may be applied to the interface between the inner plate 50 and the upper end of the crucible 10 . The inner plate 50 primarily equalizes the material distribution while passing through the openings formed in the inner plate 50 even if the distribution of the material inside the crucible is changed. Therefore, a gap blocking material may be applied to prevent evaporation of the vapor from leaking to a place other than the opening of the inner plate 50 . For example, the inner plate is provided with a wing portion 55 that spans the upper end of the crucible, and the nozzle portion 20 and the crucible 10 are in contact with the upper and lower sides of the wing portion 55 so that the wing portion 55 side is It becomes a passageway for leakage.

In addition, when vapors leak from places where various fixing members applied to the deposition source 100 are applied, for example, bolts, nuts, pins, etc., a gap blocking material can be applied to the surface to which the fixing member is fastened. .

3 shows a cross-sectional view and a plan view to which the sheet-type gap filler 210 is applied. This is because the application of the sheet-type gap sealing material 210 is effective when there is a gap of a general flat surface in the coupling part of the nozzle part 20 and the upper end of the evaporation source body 30 .

4 and 5, the application of various types of gap sealing materials is summarized in the form of a table.

When there is no gap blocking material (#1), when the wire-type gasket 200 is applied to the interface between the wing part 55 and the nozzle part of the inner plate, and the inner plate wing part and the crucible, respectively (#2) , When the sheet-type gasket 210 is applied to the interface between the inner plate wing part 55 and the nozzle part, and the inner plate wing part 55 and the crucible, respectively (#3), 4 in the same position as #2 When each block-type gap-blocking material 220 is applied (#4), when the O-ring-type gap-blocking material 230 is applied at the same location as #2 (#5), the nozzle part, the crucible, and the inner plate wing meet In the case where a side groove is formed on the side of the inner plate wing portion and the wire-type gap sealer 200 is applied to it (#6), it is the border portion where the nozzle portion, the crucible, and the inner plate wing portion 55 meet. In the case of applying a rectangular block-type gap sealer 220 having a thickness that covers the side thickness of the inner plate wing to the side of the inner plate wing (#7), the nozzle, crucible, and the inner plate wing 55 meet In the case of applying the clip-type gap blocking material 240 applied to hold the inner plate wing 55 with a clip at the border (#8), at the border where the nozzle part, the crucible, and the inner plate wing 55 meet In the case where the plate-type gap sealant 250 is applied to the upper and lower surfaces of the inner plate wing 55, respectively (#9), the inner plate wing 55 at the border where the nozzle part, the crucible, and the inner plate wing 55 meet ) shows a case (#10) in which a hetero-type gap-blocking material 260 in which a sheet-type gap-blocking material made of a different material is superimposed on the upper and lower surfaces is applied (#10).

In the case of #2, #4, #5, and #6, a groove is formed on the boundary surface where the gap sealant can be positioned, and these O-ring and wire-type gap sealants can be applied according to the situation.

6 shows another type of gap sealing material.

It is similar to the side groove of #6, but there is a groove only between the nozzle part 20 and the crucible 10, and there is no groove in the inner plate 50 part. The one-way type gap sealing material 270 is substantially in the form of a wire. That is, grooves are formed at the borders of the nozzle unit 20 and the crucible 10 to face each other, and a wire-type gap sealer suitable for the groove space is arranged to block the passage of leakage.

7 shows another type of gap sealing material.

A knife shape is provided in the gap sealing material itself without a separate groove between the nozzle unit 20 and the crucible 10 .

The self knife edge type gap sealing materials 280 and 285 do not require separate groove formation in the nozzle unit 20 and the crucible 10 by having one or more knife edges in their body. The multiple knife edges have the effect of multiple blocking the leaking vapor path itself.

Depending on the leak test results for the evaporation source, hollow O-ring sealants and wire-type gap sealants can be arranged in one evaporation source at required positions, and sheet-type, block-type, plate-type, and hetero-type gaps can be arranged. It is also possible to mix and apply the blocking material at a position judged to be appropriate.

On the other hand, although the gap sealant may be applied to the entire coupling part of the nozzle unit 20 and the upper end of the crucible 10, only the part where evaporation of the vapor leak is detected may be applied by processing the gap sealant according to the shape of the corresponding part. .

In particular, the sheet-type gap sealant may be applied to overlap some surfaces of the boundary portion as necessary, or may be applied by processing it into a curved shape instead of a rectangular band shape. This is because the degree of evaporation of the evaporation source may differ depending on the condition of the mechanically processed surface of the member, so the gap sealing material is optimized and processed accordingly.

As described above, the gap sealing material should have good workability and high temperature resistance.

It may be composed of a composite material including copper (Cu), aluminum (Al), graphite, or ceramic.

However, in consideration of the temperature range, materials such as silicone-based elastic materials, synthetic resins, and polymer rubber may be used as gap sealing materials.

The sealant may be machined and arranged in a thin metal foil or a foil of a composite material tailored to the shape of the gap forming part. The thickness of the sheet-type gap sealing material can be configured according to the gap, and a foil of about 10 to 30 μm can be processed and applied as it is, or it can be applied partially overlapped.

The appropriate size of the gap blocking material may vary depending on the fastening environment of the application target and the conditions of the upper and lower plates, but generally the cross-sectional width is 1.0mm ~ 5.0mm, and may vary depending on the surface roughness and the shape of the knife edge of the application target. However, the cross-sectional height may be 1.0 mm to 5.0 mm.

It is preferable to select a metal material that is inexpensive such as Cu or Al, and it is advantageous in terms of workability and applicability to select a material with a Brinell hardness of 781 Mpa or less.

In the case of an O-ring type gap sealing material (Metal O-ring), SUS material may also be used.

Combinations of plate-type and hetero-type gaskets are possible, such as Ti-Cu or Ti-Al.

The gap sealing material as described above is preferably used in a temperature range of 500 to 600° C., and when it is 650° C. or higher, it is composed of a material other than Al.

The gap sealing material of the present invention is applied to a leak point that occurs when the surface is in contact with the deposition source and serves to eliminate the contact point. Various types of gap blocking materials are applied to block both cotton and cotton passageways through which materials can exit.

In this way, it is possible to prevent evaporation of the evaporation material from leaking from a gap other than the nozzle of the evaporation source, thereby improving material efficiency by about 5% compared to the conventional evaporation source.

The right of the present invention is not limited to the above-described embodiments, but is defined by the claims, and a person of ordinary skill in the art can make various modifications and adaptations within the scope of the claims. it is self-evident

Crucible(10)
Nozzle part (20)
border (40)
Inner plate (50)
Inner plate wing (55)
Evaporator (100)
Wire Type Gap Filler (200)
Sheet type gap filler (210)
Block Type Gap Filler (220)
O-Ring Type Gap Filler (230)
Clip-type Gap Filler (240)
Plate Type Gap Filler (250)
Heterotype Gap Filler (260)
Self knife edge type gap sealant (280, 285)

Claims (12)

Evaporation source, characterized in that a gap sealing material containing metal, silicon-based elastic material, synthetic resin, polymer polymer, graphite or ceramic is applied to the boundary where bonding between members constituting the evaporation source is applied to prevent leakage of evaporation. The method according to claim 1, wherein the gap-blocking material is a wire-type gap-blocking material, a sheet-type gap-blocking material, an O-ring-type gap-filling material, a block-type gap-blocking material, a plate-type gap-filling material, a hetero-type gap filler made of multiple materials, or An evaporation source comprising a self-knife type gap sealing material. The deposition source according to claim 1, wherein the gap sealing material is made of a flexible metal including at least one of Cu, Al, Ti, and stainless steel. The deposition source of claim 1, wherein the boundary portion at which the gap sealant is arranged includes a portion in contact with the upper end of the crucible and the nozzle portion on which the nozzle is formed, or a portion in which a member coupled to the deposition source contacts the evaporation source body. The deposition source of claim 4 , wherein the boundary portion where the gap sealing material is arranged includes a portion in which an inner plate arranged on the upper end of the crucible is in contact with the upper end of the crucible or the nozzle unit. 5. The deposition source of claim 4, wherein the boundary portion on which the gap sealant is arranged includes a portion to which the nozzle is assembled and in contact with the nozzle body when the nozzle is prefabricated to the nozzle portion. The method according to claim 2, wherein the wire-type gap-blocking material or the O-ring-type gap-blocking material comprises:
The inner plate is disposed on the boundary surface between the wing portion and the nozzle portion spanning the crucible or on the boundary surface between the inner plate blade portion and the crucible, and disposed in the groove formed on the blade portion of the inner plate,
It is disposed in a groove formed at an angle between the nozzle part and the crucible at the border where the nozzle part and the crucible meet, or
An evaporation source, characterized in that it is disposed in a side groove formed on the side of the inner plate wing portion and the border portion where the nozzle unit, the crucible, and the inner plate wing meet. According to claim 2, wherein the sheet-type gap-blocking material, plate-type gap-blocking material, or hetero-type gap-blocking material is partially or entirely on the interface between the inner plate wing and the nozzle part or the interface between the inner plate wing and the crucible. An evaporation source, characterized in that it is arranged and overlapped with a multi-layered sheet according to a boundary portion. According to claim 2, wherein the block-type gap-blocking material is disposed on the boundary surface between the inner plate wing portion and the nozzle portion or between the inner plate blade portion and the crucible, disposed in a groove formed in the wing portion of the inner plate or the nozzle portion , the crucible, and the boundary portion where the inner plate wing meets, and the deposition source, characterized in that disposed on the side of the inner plate wing. The deposition source according to claim 2, wherein the clip-type gap sealing material is applied as if holding the inner plate wing with a clip at the border where the nozzle part, the crucible, and the inner plate wing meet. The deposition source according to claim 2, wherein the self-knife edge-type gap sealing material is disposed on a boundary surface between the inner plate wing portion and the nozzle portion without forming a separate groove. [Claim 3] The gap seal according to claim 2, wherein a wire-type gap seal material, a sheet-type gap seal material, an O-ring gap seal material, a block-type gap seal material, a plate-type gap seal material, a hetero-type gap seal material made of multiple materials, or a self-knife edge-type gap Evaporation source, characterized in that at least two of the sealing materials are partially mixed and applied to one evaporation source.

Images