KR20210147974A - Electroosmotic pump, electrode manufacturing method, fluid pumping system using the same, and operation method thereof - Google Patents

Abstract

An electroosmotic pump according to one embodiment of the present invention comprises: a membrane that allows the movement of fluid; and a first electrode and a second electrode respectively provided on both sides of the membrane, wherein the first electrode and the second electrode are electrodes made of a non-porous substrate material and an electrode material coated thereon so that at least one fluid flow passage is formed. By the electrochemical reaction of the first electrode and the second electrode, the fluid moves through the fluid flow passage. The present invention proposes the electroosmotic pump in which the configuration of a porous electrode part of an existing electroosmotic pump is replaced with various electrode materials configured on the non-porous substrate material.

Description

Electroosmotic pump, electrode manufacturing method, fluid pumping system using same, and operating method of the same

The present invention relates to an electroosmotic pump, a method of manufacturing an electrode, a fluid pumping system using the same, and a method of operating the system.

The electroosmotic pump is a pump using the movement of fluid by the electroosmotic phenomenon that occurs when voltage is applied using electrodes on both ends of a porous membrane (porous membrane).

1A is a view for explaining the action of an electroosmotic pump in which a fluid moves through a porous membrane according to an embodiment of the present invention. The porous membrane has countless spaces through which a fluid can flow, one of which is shown below in FIG. 1A.

As a material of the porous membrane, silica, glass, etc. are generally used, and when these are immersed in an aqueous solution, the surface becomes negatively charged. When a voltage is applied in this state, the fluid moves from the (+) electrode part to the (-) electrode part (upper figure in Fig. 1a). In a porous membrane, there are pathways through which a number of fluids can pass. If you enlarge one of them, the surface of the fluid pathway with a negative charge is charged by a mobile cation with a movable (+) charge. It will be in a state of balance. When voltage is applied in this situation, mobile cations move along the surface from the (+) electrode side to the (-) electrode side, and accordingly, the entire fluid connected through the hydrogen bond network slides and flows. It is called electroosmotic phenomenon, and a pump using this principle is an electroosmotic pump.

Referring to Figure 1a, the electrode used in the electroosmotic pump is coated on a porous electrode such as Pt mesh, porous carbon paper or carbon cloth, or a porous structure to facilitate fluid movement. Various electrode materials are used, and when a voltage is applied across a porous membrane made of silica or the like using this, the fluid moves accordingly.

In general, the electrode of the electroosmotic pump has been mainly used with an electrode base material having a porous structure in order to facilitate the movement of the fluid. coating) or a material that can be modified, the use of electrode materials has been limited. On the other hand, the use of a wide variety of electrode materials possible by methods such as drop coating and spin coating useful for application to impermeable base materials has been limited.

In order to solve this problem, an embodiment of the present invention proposes an electroosmotic pump in which the configuration of the porous electrode part of the conventional electroosmotic pump is replaced with various electrode materials configured on an impermeable base material.

However, the technical problems to be achieved by the present embodiment are not limited to the technical problems as described above, and other technical problems may further exist.

As a technical means for achieving the above-described technical problem, the electroosmotic pump according to an embodiment of the present invention is a membrane that allows the movement of the fluid; and first and second electrodes respectively provided on both sides of the membrane, wherein the first and second electrodes are made of a non-porous substrate material and an electrode material coated thereon, at least One or more fluid passages are formed, and the fluid moves through the fluid passageways by an electrochemical reaction between the first electrode and the second electrode.

A method of manufacturing an electrode constituting an electroosmotic pump according to another embodiment of the present invention includes forming one or more fluid passageways on a plate-shaped substrate made of an impermeable base material, and coating the electrode material on the substrate do.

A method of manufacturing an electrode constituting an electroosmotic pump according to another embodiment of the present invention includes the steps of coating an electrode material on a plate-shaped substrate made of an impermeable base material and forming one or more fluid passageways on the substrate do.

A fluid pumping system according to another embodiment of the present invention includes an electroosmotic pump; a first insulating material provided on one side of the electroosmotic pump, the shape of which is deformed as positive pressure and negative pressure are alternately generated; a transfer chamber provided on one side of the first isolation material to suck and discharge the transfer target fluid in response to the deformation of the first isolation material; and a second insulating material provided on the other side of the electroosmotic pump, the shape of which is deformed as positive pressure and negative pressure are alternately generated.

A method of operating a fluid pumping system according to another embodiment of the present invention comprises the steps of: (a) supplying a voltage to a first electrode and a second electrode of an electroosmotic pump of the fluid pumping system according to claim 17; And (b) according to the driving of the electroosmotic pump, at least a portion of the first insulating material of the fluid pumping system moves forward and backward to suck and discharge the fluid to be transferred into a transfer chamber provided on one side of the first insulating material. do.

According to the problem solving means of the present invention described above, the electrode in the conventional electroosmotic pump is based on platinum mesh, porous carbon paper or fiber (carbon paper or carbon cloth) for smooth movement of fluid. Only porous electrodes have been used, but since at least one non-permeable electrode base material with at least one fluid passage is used, it is possible to construct an electroosmotic pump using various electrode materials that can be drop-coated or spin-coated.

In addition, it not only shows the scalability of coating a wide variety of electrode materials on the electrode surface in a variety of ways, but also provides the simplicity of the electroosmotic pump configuration by allowing the substrate to be directly used as a current collector.

1A is a view for explaining the action of an electroosmotic pump in which a fluid moves through a porous membrane according to an embodiment of the present invention.
Figure 1b is a view showing the configuration of a conventional electroosmotic pump using a porous electrode.
2A and 2B are diagrams illustrating the configuration of an electroosmotic pump using an impermeable electrode according to an embodiment of the present invention.
2C and 2D are diagrams illustrating the configuration of a fluid pumping system using the electroosmotic pump of FIG. 2A according to an embodiment of the present invention.
3 (a) is a current response graph when 2.5 V is applied to both ends of the Ti electrode for 30 seconds in an electroosmotic pump implemented as an electrode according to an embodiment of the present invention, and FIG. 3 (b) ) is the pressure response graph under the same conditions.
Figure 4 (a) is in the electroosmotic pump implemented as an electrode drop-coated RuOx on a Ti plate in which the number of fluid passageways is varied to 1, 2, or 5 according to an embodiment of the present invention, 2.5 V is applied to both ends of the electrode. It is a graph of the current response when it is changed by 30 seconds, and Fig. 4 (b) is a graph of the pressure response under the same conditions.
Figure 5 (a) is an electroosmotic pump implemented with an electrode made by adjusting the drop-coating amount of RuOx on the Ti plate according to an embodiment of the present invention to 1.05 mg, 2.10 mg, 3.15 mg, 2.5 V is applied to both ends of the electrode It is a graph of the current response when it is changed for 10 seconds each, and Fig. 5 (b) is a graph of the pressure response under the same conditions.
Figure 6 (a) is a graph showing the current response when 2.5 V is applied to both ends of the electrode for 30 seconds in an electroosmotic pump implemented as an electrode in which MnOx is drop-coated on a Ti plate according to an embodiment of the present invention. 6(b) is a pressure response graph under the same conditions.
7 (a) is an electroosmotic pump implemented with an electrode drop-coated with iron (III) hexacyanoferrate on a Ti plate according to an embodiment of the present invention. is a graph of the current and pressure response when am.
8 (a) is a current response graph when 2.5 V is applied to both ends of the electrode for 10 seconds in an electroosmotic pump implemented with an electrode coated with IrOx by spraying on a Ti plate according to an embodiment of the present invention. , Figure 8 (b) is a pressure response graph under the same conditions.
9 (a) is a current response graph when 2.5 V is applied to both ends of the electrode for 10 seconds in an electroosmotic pump implemented as an electrode in which RuOx is drop-coated on a Ti plate according to an embodiment of the present invention. Figure 9 (b) is a pressure response graph under the same conditions.
FIG. 10 is a view showing a Ti plate electrode substrate having a fluid passage of 4 mm in width and 8 mm in length according to an embodiment of the present invention.
Figure 11 (a) shows the current when 2.5 V is applied to both ends of the electrode for 10 seconds in an electroosmotic pump implemented as an electrode in which RuOx is electrodeposited through a large fluid passage in the Ti plate according to an embodiment of the present invention. It is a response graph, and (b) of FIG. 11 is a pressure response graph under the same conditions.
Figure 12 (a) is a graph of the current response when 2.5 V is applied to both ends of the electrode by 30 seconds in an electroosmotic pump implemented as an electrode in which RuOx is drop-coated on a Ti plate according to an embodiment of the present invention. Figure 12(b) is a pressure response graph under the same conditions.
13 (a) is a graph of the current response when 2.5 V is applied to both ends of the electrode by 30 seconds in an electroosmotic pump implemented as an electrode in which RuOx is drop-coated on a Ni plate according to an embodiment of the present invention. 13(b) is a pressure response graph under the same conditions.
Figure 14 (a) is a non-thermocompression-bonded electrode in which RuOx is drop-coated on a Ti plate according to an embodiment of the present invention. Thus, the thermocompression-bonded electrode is shown.
15 (a) is a graph of the current response when changing 2.5 V to both ends of the electrode for 10 seconds each in an electroosmotic pump implemented as an electrode in which RuOx is drop coated on a Ti plate according to an embodiment of the present invention and then thermocompressed. and FIG. 15 (b) is a pressure response graph under the same conditions.
16A and 16B are flowcharts for explaining a method of manufacturing an electrode constituting an electroosmotic pump according to another embodiment of the present invention.
17 is a flowchart illustrating an operating method of a fluid pumping system according to another embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those of ordinary skill in the art can easily implement them. However, the present invention may be embodied in several different forms and is not limited to the embodiments described herein. And in order to clearly explain the present invention in the drawings, parts irrelevant to the description are omitted, and similar reference numerals are attached to similar parts throughout the specification.

Throughout the present specification, when a part is "connected" with another part, it is not only "directly connected" but also "electrically connected" with another element interposed therebetween. include

Throughout the present specification, when a member is said to be “on” another member, this includes not only a case in which a member is in contact with another member but also a case in which another member is present between the two members.

Throughout the present specification, when a part "includes" a certain component, it means that other components may be further included, rather than excluding other components, unless otherwise stated. As used throughout this specification, the terms "about", "substantially", etc. are used in or close to the numerical value when manufacturing and material tolerances inherent in the stated meaning are presented, and are used in the meaning of the present invention. It is used to prevent an unscrupulous infringer from using the disclosure in which exact or absolute figures are mentioned for better understanding. As used throughout the present specification, the term "step for (to)" or "step for" does not mean "step for".

First, the definition of impermeability in the present invention is that there is no gap or hole through which liquid or gas can pass, and it is different from a porous material such as a mesh structure material, a foam type material, carbon paper, a structure in which several particles are aggregated, etc. have character In the present invention, a fluid passage is formed in an electrode formed by coating an electrode material on an impermeable base material formed in a plate shape so that the fluid can pass through the electrode and the membrane. Conventionally, since the electrode was manufactured in the form of coating the electrode material on the porous base material, there was a difficulty in processing the process based on the non-variable porous base material. Since the electrode is formed, the degree of freedom of the process may be increased, and the manufacturing cost of the electrode may be reduced.

(Example 1) Comparison of the configuration of the electroosmotic pump using the conventional porous electrode and the configuration of the electroosmotic pump using the non-permeable electrode of the present invention

Figure 1b is a view showing the configuration of a conventional electroosmotic pump using a porous electrode.

As shown as an example, the conventional electroosmotic pump (EOP) has one porous electrode on each side of a porous silica membrane, one silver contact strip, and one for support. After connecting the frames in sequence, they are manufactured by fixing them using epoxy.

1A and 1B, in the conventional electroosmotic pump, the porous silica membrane 11 installed in the fluid path part 19 where the fluid needs to move, and the porous electrodes 13 and 15 provided on both sides of the membrane 11, respectively. ), and a contact strip 20 and a support frame 30 for transmitting power by connecting each electrode. The contact strip 20 is provided with a connection member with the power supply unit 17, and transmits the power supplied from the power supply unit 17 provided outside the pump to the porous electrodes 13 and 15.

2A and 2B are diagrams illustrating the configuration of an electroosmotic pump using an impermeable electrode according to an embodiment of the present invention.

Referring to FIG. 2A , the electroosmotic pump of the present invention includes a membrane 11 , a first electrode 130 , a second electrode 150 , and a pair of frames 30 .

Illustratively, as shown in FIG. 2A , the electroosmotic pump includes a first electrode 130 and a second electrode 150 provided on both sides of the membrane 11 and the membrane 11 that allow the movement of the fluid, respectively. . Here, the first electrode 130 and the second electrode 150 are electrodes made of a non-porous substrate material and an electrode material coated thereon, and at least one fluid passage is formed thereon. That is, in the electroosmotic pump, the fluid may move through the fluid movement path by the electrochemical reaction of the first electrode 130 and the second electrode 150 .

In addition, referring to FIG. 2B , the electroosmotic pump 230 is supported on both sides of the first electrode 130 and the second electrode 150 , but the frame 30 in which the flow path is formed, the first electrode 130 and the first electrode 130 are supported. A power supply 46 for supplying a voltage to the second electrode 150 may be further included.

The electroosmotic pump 230 alternately supplies the polarity of the voltage to each of the first electrode 130 and the second electrode 150 so that the electrochemical reaction in the forward and reverse directions occurs repeatedly, so that the A pumping force can be generated by reciprocating movement. In addition, each of the first electrode 130 and the second electrode 150 may be repeatedly consumed and regenerated by repeated forward and reverse electrochemical reactions.

For example, as shown, the first and second electrodes 130 and 150 are plate-shaped electrodes made of an impermeable base material and an electrode material, and are non-permeable, not a porous electrode, and one fluid movement having a diameter of 1 mm in the middle. includes passages.

That is, the present invention can improve the performance of the electroosmotic pump electrode by attaching the electrode material to the surface of the impermeable base material by various methods such as drop-coating. In addition, the present invention does not require a separate contact wire for delivering power to each electrode in the conventional electroosmotic pump, and since the plate-shaped electrode itself can be used as an electrical contact, a simple form It is possible to configure the electroosmotic pump of

Illustratively, the electroosmotic pump 230 generates a positive pressure and a negative pressure through a fluid flow between the membrane 11 and the first and second electrodes 130 and 150 . In addition, the membrane 11 is formed of a porous material or structure to allow the movement of the fluid.

For example, when a voltage is supplied to each of the electrodes 130 and 150 , the first electrode 130 and the second electrode 150 are oxidized by the voltage difference between the first electrode 130 and the second electrode 150 . The reduction reaction occurs and the charge balance is broken. At this time, the positive ions in the electrodes 130 and 150 move through the fluid passageway to balance the charge. In this case, one of the first electrode 130 and the second electrode 150 may generate positive ions through an electrochemical reaction, and the other may consume the positive ions. Here, the cations generated and consumed during the electrochemical reaction may be monovalent cations, but are not limited thereto, and may include various ions such as hydrogen ions (H+), sodium ions (Na+), potassium ions (K+), etc. have.

When the movement of ions according to the redox reaction is made through the membrane 11, the fluid may be moved through the fluid movement passage of the electrode. In this case, the membrane 11 may allow movement of ions as well as fluid. Accordingly, when power is supplied to the electrodes 130 and 150 , the fluid and ions may move from one side to the other side of the membrane 11 or from the other side to one side.

In addition, a conductive polymer electrode material may be coated on the first electrode 130 and the second electrode 150 . In this case, when the electrode material contains a macroanionic polymer, that is, an anionic polymer, during the redox reaction of the electrodes 130 and 150, the anionic polymer is fixed and cannot be moved, so that the cations move to balance the charge. That is, in order to balance the charge of the fixed anionic polymer during the reduction reaction, the cations present in the fluid are mixed in and the cations are released during the oxidation reaction. The positive ions slidably move on the negatively charged surface of the membrane 11 by the voltage applied to both ends, and the hydrated water molecules and the water molecules connected by hydrogen bonds are connected to each other so that the electroosmotic pump 230 operates at a high speed. fluid can be moved.

Specifically, the non-permeable base material may be a plate, a foil, and a film composed of at least one of a conductive material, a semiconductor material, and a non-conductive material. Here, the conductive material includes nickel, copper, silver, titanium and aluminum, the semiconductor material includes silicon, and the non-conductive material includes polyethylene, polypropylene, PVDF, PVDC and polyimide.

Illustratively, the electrode material is formed of a metal, a metal oxide, a conducting polymer, a metal hexacyanoferrate, a carbon nanostructure, or a composite thereof.

Hereinafter, when an example of each electrode material is described, the metal includes at least one of silver, zinc, lead, manganese, copper, tin, ruthenium, and iridium. In addition, metal oxides include vanadium oxide, molybdenum oxide (MoO₃), tungsten oxide (WO₃), ruthenium oxide, iridium oxide, manganese oxide, cerium oxide (CeO₂), and polyoxometalate (polyoxometalate). ) contains at least one of

Conductive polymers include polyaniline, polyaniline derivatives, polythiophene, polythiophene derivatives, polypyrrole, polypyrrole derivatives, quinone polymers, quinone polymer derivatives, and and at least one of polythionine.

The metal hexacyanoferrate includes at least one of Prussian blue, iron hexacyanoferrate (FeHCF), copper hexacyanoferrate (CuHCF), and cobalt hexacyanoferrate (CoHCF) nickel hexacyanoferrate (NiHCF).

The carbon nanostructure includes at least one of carbon nanotube (CNT), graphene, carbon nanoparticles, fullerene, and graphite. Redox reaction may occur more stably and at a faster rate in an electrode in which a composite of electrode material including carbon nanotubes is electrodeposited among carbon nanostructures.

In addition to this, the electrode material may be various polymers having electrical conductivity or having a negative charge.

For example, the above-described electrode material may be formed in a structure in which a plurality of layers are stacked. In addition, the electrode material is deposited on the impermeable base material by at least one method of drop-coating, dip-coating, spin-coating, spray coating, printing, pyrolysis and electrodeposition. It may be coated. Thereafter, the surfaces of the first electrode 130 and the second electrode 150 may be smoothly processed by thermocompression bonding or a decal transfer method.

In the first electrode 130 and the second electrode 150 , the ratio of the area of the fluid passage to the total area of the electrodes 130 and 150 may be greater than 0% and less than or equal to 50% (refer to FIG. 10 ). For example, the shape of the fluid flow passage may be formed in a circle, a square, or other various shapes, and the number is formed in at least one or a plurality, and the area ratio of the fluid passage to the electrode is 50% or less. can

2C and 2D are diagrams illustrating the configuration of a fluid pumping system using the electroosmotic pump of FIG. 2A according to an embodiment of the present invention.

The fluid pumping system 40 of the present invention includes an electroosmotic pump 230 , a first isolation material 210 , a second isolation material 220 , a transfer chamber 240 , an inlet port 240a , an outlet port 240b , and monitoring. Chamber 250 , pressure measuring unit 260 , suction valve 270 , discharge valve 280 , reservoir 41 , suction path 42 , discharge path 45 , power supply unit 46 and control circuit (47).

Specifically, the fluid pumping system 40 is provided on one side of the electro-osmotic pump 230 and the electro-osmotic pump 230, and the first insulating material 210, which is deformed in shape as positive and negative pressures are alternately generated, 1 It is provided on one side of the insulating material 210, and is provided on the other side of the transfer chamber 240 and the electroosmotic pump 230 for sucking and discharging the fluid to be transferred in response to the deformation of the first insulating material 210, and a second insulating material 220 whose shape is deformed as positive pressure and negative pressure are alternately generated.

In addition, on one surface of the transfer chamber 240, an inlet 240a and an outlet 240b through which the transfer target fluid is sucked and discharged are formed, and the inlet 240a and the outlet 240b each have a flow of the transfer target fluid. The suction valve 270 and the discharge valve 280 allowing or blocking are fastened. At this time, the suction valve 270 is closed when a positive pressure is generated and is opened when a negative pressure is generated, and the discharge valve 280 is opened when a positive pressure is generated and is closed when a negative pressure is generated.

Illustratively, as shown in FIG. 2C , the electroosmotic pump 230 may include at least one component that reciprocates a fluid and/or gas through an electrochemical reaction, but is not limited thereto. The electroosmotic pump 230 may be implemented using the electroosmotic principle. This uses the movement of fluid by the electroosmotic phenomenon that occurs when voltage is applied using electrodes on both ends of the capillary or porous membrane. It has the advantage of being able to effectively control the flow rate.

Illustratively, the insulating materials 210 and 220 are installed at at least one end of the electro-osmotic pump 230 to separate the fluid and the fluid to be transferred. The isolation materials 210 and 220 divide the space containing the fluid and the space containing the fluid to be transported to prevent mixing of the fluid and the fluid to be transported, and transfer the pumping force generated by the movement of the fluid to the fluid to be transported. plays a role

That is, the first and second insulating materials 210 and 220 configured on both sides of the electroosmotic pump 230 are, as a non-limiting example, an oil to form an oil gap and a thin film having elasticity. It is made of natural rubber, synthetic rubber, polymer material, metal plate, etc. made of natural rubber, synthetic rubber, polymer material, metal plate, etc., and as the negative and positive pressures are alternately generated according to the operation of the electroosmotic pump 230, at least some of them are moved forward and backward, and the transfer chamber 240 and monitoring A negative pressure and a positive pressure are transferred to the chamber 250 .

Illustratively, the first insulating material 210 transfers the negative pressure and the positive pressure generated by the driving of the electroosmotic pump 230 to the transfer target fluid. More specifically, when a negative pressure is generated, at least a part of the first insulating material 210 is moved backward (that is, when a part of the first insulating material 210 is moved toward the monitoring chamber 250 with reference to FIG. 2C ) (shown by a long dotted line), the transfer target fluid is sucked into the transfer chamber 240 and, conversely, when positive pressure is generated, at least a portion of the first insulating material 210 is advanced (that is, the first When a portion of the isolation material 210 is moved in the direction of the transfer chamber 240 (shown by a short dotted line), the transfer target fluid is discharged from the transfer chamber 240 .

At this time, suction and discharge of the transfer target fluid are performed through the suction port 240a and the discharge port 240b formed on one surface of the transfer chamber 240 . A suction valve 270 and a discharge valve 280 for allowing or blocking the flow of the fluid to be transferred are fastened to each of the inlet 240a and the outlet 240b, so that the fluid to be transferred is sucked through the inlet 240a and the outlet ( 240b) may be discharged. In other words, the suction valve 270 is closed when the first isolator 210 moves forward and is opened when the first isolator 210 moves backward, and the discharge valve 280 opens when the first isolator 210 moves forward and is closed when the first isolator 210 moves backward. The intake valve 270 and the discharge valve 280 may, for example, be check valves, but are not limited thereto, and may be opening/closing devices that operate opposite to each other.

The second insulating material 220, like the first insulating material 210, repeats backward and forward by the driving of the electro-osmotic pump (230). Accordingly, due to the movement of the second isolator 220 , the air pressure in the monitoring chamber 250 changes. That is, when a negative pressure is generated, at least a part of the second insulating material 220 is moved backward (that is, when a part of the second insulating material 220 is moved toward the monitoring chamber 250 based on FIG. 2C (long When the pressure in the monitoring chamber 250 is increased (shown by a dotted line), and conversely, when a positive pressure is generated, at least a portion of the second insulating material 220 is advanced (ie, it moves in the direction of the transfer chamber 240 based on FIG. 2C ) (shown by the short dashed line), the air pressure in the monitoring chamber 250 is lowered.

The pressure measuring unit 260 is provided inside the monitoring chamber 250 to sense the pressure in the monitoring chamber 250 and convert it into an electrical signal. Illustratively, the pressure measuring unit 260 detects a pressure value based on a capacity change, magnetic force strength change, resistance displacement or voltage displacement of the monitoring chamber 250 as the second insulating material 220 is deformed. It may be a sensor. Alternatively, the pressure measuring unit 260 is fastened to the second insulating material 220 or formed integrally with the second insulating material 220 to detect a pressure value based on the degree of deformation of the second insulating material 220 . It may be a sensor. However, the present invention is not limited thereto, and the pressure measuring unit 260 may measure the pressure inside the monitoring chamber 250 in various ways.

Also, referring to FIG. 2D , the fluid pumping system 40 includes the configuration of the electroosmotic pump shown in FIG. 2C , the transfer object fluid discharged from the reservoir 41 in which the transfer object fluid is stored is sucked into the transfer chamber 240 . It is provided on one side of the suction path 42, which is a fluid transport path, the discharge path 45, which is a fluid transport path for the fluid to be transported discharged from the transport chamber 240, and the second insulating material 220, the second insulating material ( 220) by monitoring the pressure value measured by the monitoring chamber 250, the pressure changing in response to the deformation, the pressure measuring unit 260 for measuring the pressure change in the monitoring chamber 250, and the pressure measuring unit 260 and a control circuit 47 for detecting abnormalities in the electroosmotic pump 230 . In addition, the fluid pumping system 40 further includes a power supply 46 for supplying power to the electroosmotic pump 230 and the control circuit (47).

Both ends of the suction path 42 are fastened to the discharge port of the reservoir 41 and the suction valve 270 (or the suction port 240a of the transfer chamber 240 ), respectively, and the transfer target fluid stored in the reservoir 41 . is moved to the transfer chamber 240 . The discharge path 45 has one end fastened to the discharge valve 280 (or the discharge port 240b of the transfer chamber 240) and the other end is inserted into the object to transport (ie, inject) the transfer object fluid to the object. . Illustratively, the discharge path 45 may be a catheter having a needle, a cannula, and/or a porous polymer fiber formed at the other end thereof.

The reservoir 41 is a storage container for storing a transfer target fluid formed of a material that can block external gases and ions, and a suction path 42 is fastened to one side to be synchronized with the operation of the electroosmotic pump 230 . Discharge the transfer target fluid. That is, when negative pressure is generated by the driving of the electroosmotic pump 230 , the suction valve 270 is opened, and the transfer target fluid stored in the reservoir 41 is moved to the suction valve 270 through the suction path 42 . . Conversely, when positive pressure is generated, the suction valve 270 is closed to stop the movement of the transfer target fluid. In this case, since the discharge valve 280 is opened, the fluid to be transferred may be injected into the object through the discharge path 45 coupled to the discharge valve 280 .

(Example 2) Confirmation of the possibility of using an electrode using an impermeable plate-shaped base material as an electroosmotic pump

3 (a) is a current response graph when 2.5 V is applied to both ends of the Ti electrode by 30 seconds in an electroosmotic pump implemented as an electrode according to an embodiment of the present invention. 3(b) is a pressure response graph under the same conditions.

Referring to FIG. 3 , for the first time, only a titanium plate, which is an impermeable substrate material, was used without any other electrode material coating. Here, the performance of the electroosmotic pump using the Ti plate was checked to confirm that the fluid flows through the small fluid passageway and can represent pressure (Fig. 3, Table 1). The driving conditions were +2.5 V, -2.5 V, each 30 sec pulse time, and continuous driving in 0.5 mM Li₂SO₄ pumping solution. The configuration of the electroosmotic pump for the experiment is the same as in Figure 2, the porous silica membrane was used with a thickness of 2 mm, a width of 6 mm, and a length of 10 mm, and a Ti plate with a width of 6 mm and a length of 15 mm was used for the electrode and substrate. did

Table 1. Confirmation of flow rate and pressure of electroosmotic pump using Ti plate

Referring to Table 1, that is, when only the impermeable electrode of the Ti plate substrate is used, the fluid can flow, but it can be seen that the flow rate or pressure is very insignificant.

(Example 3) Performance improvement of impermeable electrode using electrode material and comparison with porous electrode

In (Example 2), although there is only one small fluid passageway in the impermeable base material of the Ti plate only, the fluid flows and pressure appears, but the performance of the electrode is poor and the pump shows low performance. Accordingly, the performance of the electrode was improved by additionally coating the electrode material. A drop coating method was used in which a certain amount of electrode material slurry was dropped and coated with a pipette. It was possible to dry within 20 minutes by coating the electrode material on a 90° C. hot plate. As an example, RuOx, an electrode material, was drop-coated on a Ti plate having one of the 1 mm fluid passageways in the middle. In addition, the porous electrode composed of porous carbon paper was constructed by applying RuOx slurry on the carbon electrode using a brush and drying it in an oven at 110 °C. In this case, there was a lot of loss of electrode material, and it was difficult to determine the actual amount of RuOx coated on the carbon electrode. To compare and confirm the performance of these electrodes, they were applied to the electroosmotic pump, and the driving performance was compared in 0.5 mM Li₂SO₄ pumping solution with +2.5 V, -2.5 V, each 30 sec pulse time, and continuous operation ( Table 2). When constructing the electroosmotic pump for the experiment, the electroosmotic pump using the Ti plate used a porous silica membrane with a thickness of 2 mm, a width of 6 mm, and a length of 10 mm, as shown in FIG. 2 . In the case of impermeability, a Ti plate having a width of 6 mm and a length of 15 mm was used as the electrode and substrate. The RuOx electrode implemented on the porous carbon paper electrode had a width of 6 mm and a length of 10 mm, and a silver wire was used as a contact wire.

Table 2. Performance of the electroosmotic pump when the Ti plate is drop-coated with RuOx and when the carbon paper electrode is coated with RuOx.

Referring to Tables 1 and 2, the effective electrode material coated on the Ti plate (top of Table 2) is the performance of the electroosmotic pump, Flow/power, compared to the case of using only the Ti plate (Table 1). ) and pressure are greatly improved.

In addition, it can be seen that the electrode using the Ti plate showed higher pressure and flow/power compared to that implemented in the porous carbon paper electrode (bottom of Table 2). That is, it can be seen that the efficiency of the electrode is improved due to the efficient coating of the electrode, and thus the performance of the pump is increased.

In the method of coating the electrode material with a brush on the porous carbon paper electrode, the electrode material passed through the porous flow path of the base material during the process of coating the electrode material, and the amount of the electrode material to be coated could not be made constant. On the other hand, the drop coating method on the Ti plate using a pipette was able to produce an efficient and reproducible electrode using a certain amount of electrode material. In addition, compared to the easily brittle carbon paper electrode, a high-strength electrode could be realized by using a Ti plate. In addition, it was possible to simplify the configuration by directly using the Ti plate, which is a base material, as an electrical conductor as an electrical contact, without the need to separately configure an electrical contact.

(Example 4) Comparison of electroosmotic pump performance according to the number of fluid passages of the impermeable electrode

Figure 4 (a) is in the electroosmotic pump implemented as an electrode drop-coated RuOx on a Ti plate in which the number of fluid passageways is varied to 1, 2, or 5 according to an embodiment of the present invention, 2.5 V is applied to both ends of the electrode. It is a graph of the current response when it is changed by 30 seconds, and Fig. 4 (b) is a graph of the pressure response under the same conditions.

In order to check the degree of fluid flow according to the number of fluid passages of the impermeable electrode, the number of fluid passages in the Ti plate was varied and compared. Specifically, after drilling 1, 2, and 5 1mm holes through which the fluid can move in each Ti plate, the performance of the electrode drop-coated with RuOx slurry was confirmed by applying the electroosmotic pump (Fig. 4, Table 3). The driving conditions were +2.5 V, -2.5 V, each 30 sec pulse time, and continuous driving in 0.5 mM Li₂SO₄ pumping solution. When constructing the electroosmotic pump for the experiment, as shown in Figure 2, the porous silica membrane used a thickness of 2 mm, a width of 6 mm, and a length of 10 mm, and a Ti plate with a width of 6 mm and a length of 15 mm was used for the electrode and substrate. did

Table 3. Performance of the electroosmotic pump according to the number of fluid passages of the impermeable electrode

Referring to Table 3, when the performance is compared by varying the number of fluid passages drilled in the Ti plate, drilling five fluid passages shows slightly higher efficiency, but there is no significant difference from one fluid passageway and It was confirmed that the performance was similar to that of the pump. Through this, it was confirmed that there is no significant difference in the performance of the electroosmotic pump even if there is only one small passage through which the fluid can move without using a large number of passages.

(Example 5) Performance according to coating amount of RuOx-based impermeable electrode

Figure 5 (a) is an electroosmotic pump implemented with an electrode made by adjusting the drop-coating amount of RuOx on the Ti plate according to an embodiment of the present invention to 1.05 mg, 2.10 mg, 3.15 mg, 2.5 V is applied to both ends of the electrode It is a graph of the current response when it is changed for 10 seconds each, and Fig. 5 (b) is a graph of the pressure response under the same conditions.

Referring to FIG. 5, it was confirmed that quantitative coating was possible through drop coating on the non-permeable plate-shaped base material in (Example 4), and accordingly, it was possible to control the amount of electrode material on the electrode. In order to check whether the performance of the electrode can be controlled by adjusting the amount of the electrode material differently, the performance difference of the electrode was checked by varying the amount of coating of the electrode material on the non-permeable base material. For example, an electrode was prepared so that 1.05 mg, 2.10 mg, and 3.15 mg of RuOx were coated on the 6 mm horizontal and 15 mm vertical electrodes by varying the coating amount of RuOx on the Ti plate, respectively. To confirm the performance of the electrode, it was confirmed by applying it to the electroosmotic pump (Fig. 5, Table 4). The driving conditions were +2.5 V, -2.5 V, each 10 sec pulse time, and continuous driving in 0.5 mM Li₂SO₄ pumping solution. When constructing the electroosmotic pump for the experiment, as shown in FIG. 2, the porous silica membrane had a thickness of 2 mm, a width of 6 mm, and a size of 10 mm.

Table 4. Performance of electroosmotic pump when drop-coated Ti plate with different amounts of RuOx

Referring to Table 4, when the amount of RuOx coating on the Ti plate was varied, the current and flow rate increased as the amount of electrode material increased. Accordingly, it was confirmed that the performance of the electrode could be controlled by quantitatively varying the amount of the electrode material coated on the impermeable base material.

(Example 6) MnOx-based impermeable electrode

Figure 6 (a) is a graph showing the current response when 2.5 V is applied to both ends of the electrode for 30 seconds in an electroosmotic pump implemented as an electrode in which MnOx is drop-coated on a Ti plate according to an embodiment of the present invention. 6(b) is a pressure response graph under the same conditions.

Referring to FIG. 6 , as mentioned above, the non-permeable plate-shaped base material with a small fluid passageway can be applied to the electroosmotic pump by loading various electrode materials. Previously (Example 4), it was confirmed that RuOx can be coated and applied, and as another example, MnOx was drop-coated on an impermeable Ti plate, and the performance was confirmed by applying it to an electroosmotic pump (Fig. 6, Table 5). . The driving conditions were +2.5 V, -2.5 V, each 30 sec pulse time, and continuous driving in 0.5 mM Li₂SO₄ pumping solution. When constructing the electroosmotic pump for the experiment, as shown in Figure 2, the porous silica membrane used a thickness of 2 mm, a width of 6 mm, and a length of 10 mm, and a Ti plate with a width of 6 mm and a length of 15 mm was used for the electrode and substrate. did

Table 5. Performance of electroosmotic pump when drop coating of MnOx on Ti plate

Referring to Table 5, it was confirmed that the performance of the electroosmotic pump based on MnOx was realized when the electrode was fabricated by coating MnOx on an impermeable metal base material and applied to the electroosmotic pump to check the performance. That is, it was confirmed that various electrode materials can be introduced into the impermeable base material.

(Example 7) Metal hexacyanoferrate-based impermeable electrode

7 (a) is an electro-osmotic pump implemented as an electrode drop-coated with iron (III) hexacyanoferrate (PB, Prussian Blue) on a Ti plate according to an embodiment of the present invention, 2.5 V is applied to both ends of the electrode It is a graph of the current and pressure response when changed by 10 sec., and (b) of FIG. 7 is an electroosmotic pump implemented as an electrode in which NiHCF (Nickel Hexacycnoferrate) is drop-coated on a Ti plate. 2.5 V is applied to both ends of the electrode for 10 sec. It is a graph of the current and pressure response when it is changed.

Referring to FIG. 7 , iron (III) hexacyanoferrate (PB) and NiHCF, which are a series of metal hexacyanoferrates, are dropped on a Ti plate to check performance by coating various electrode materials on an impermeable base material. The electrode was prepared by coating. To check the performance of the electrode, it was applied to the electroosmotic pump to confirm the performance (Fig. 7, Table 6). The driving conditions were +2.5 V, -2.5 V, each 10 sec pulse time, and continuous driving in 0.5 mM CH₃COOK pumping solution. When constructing the electroosmotic pump for the experiment, as shown in Figure 2, the porous silica membrane used a thickness of 2 mm, a width of 6 mm, and a length of 10 mm, and a Ti plate with a width of 6 mm and a length of 15 mm was used for the electrode and substrate. did

Table 6. Performance of the electroosmotic pump when PB (iron (III) hexacyanoferrate) and NiHCF (nickel hexacyanoferrate) were drop-coated on Ti plate, respectively

Referring to Table 6, it was confirmed that iron (III) hexacyanoferrate and NiHCF coated on the Ti plate function as electrode materials. That is, once again, the function according to the type of the electrode material is realized on the base material by coating various electrode materials on the non-permeable plate-shaped metal base material compared to the porous base material (ex. carbon paper electrode) where the coatable electrode material is limited. Confirmed.

(Example 8) IrOx-based impermeable electrode

8 (a) is a current response graph when 2.5 V is applied to both ends of the electrode for 10 seconds in an electroosmotic pump implemented with an electrode coated with IrOx by spraying on a Ti plate according to an embodiment of the present invention. , Figure 8 (b) is a pressure response graph under the same conditions.

Referring to FIG. 8 , the electrode material may be coated on the non-permeable plate-shaped metal base material using various coating methods. An IrOx-based impermeable electrode was used as an example of an impermeable electrode coated with an electrode material by using a spraying method. After spraying IrCl₃ and a small amount of TaCl₃ on the Ti substrate, IrOx was generated by thermal decomposition, and a small fluid passageway was drilled in the middle of the substrate. To check the performance of the electrode, it was applied to the electroosmotic pump to confirm the performance (Fig. 8, Table 7). The driving conditions were +2.5 V, -2.5 V, each 10 sec pulse time, and continuous operation in 0.1 mM Li₂SO₄ pumping solution. When constructing the electroosmotic pump for the experiment, as shown in Figure 2, the porous silica membrane used a thickness of 2 mm, a width of 6 mm, and a length of 10 mm, and a Ti plate of 6 mm horizontal and 15 mm vertical was used for the electrode and substrate. did.

Table 7. Performance of Electroosmotic Pump Using IrOx-Based Impermeable Electrodes

Referring to Table 7, it was confirmed that the electrode manufactured by the coating method using the spraying method also showed good performance in the electroosmotic pump. That is, it was confirmed that electrodes made of various coating methods can be applied to the electroosmotic pump. In addition, it was confirmed that IrOx coated on the Ti plate functions as an electrode material.

(Example 9) Utilization of RuOx-based impermeable electrode using electrodeposition method

Figure 9 (a) is a current response graph when 2.5 V is applied to both ends of the electrode for 10 seconds in an electroosmotic pump implemented as an electrode in which RuOx is electrodeposited on a Ti plate according to an embodiment of the present invention. (b) is a pressure response graph under the same conditions.

Referring to FIG. 9 , the electrode is produced by electrodeposition on the non-permeable electrode, and this can be applied to the electroosmotic pump. As an example, the performance of the electroosmotic pump was confirmed by electrodepositing RuOx on a Ti plate to fabricate an electrode (Fig. 9, Table 8). The driving conditions were +2.5 V, -2.5 V, each 10 sec pulse time, and continuous driving in 0.5 mM Li₂SO₄ pumping solution. When constructing the electroosmotic pump for the experiment, as shown in Figure 2, the porous silica membrane used a thickness of 2 mm, a width of 6 mm, and a length of 10 mm, and a Ti plate with a width of 6 mm and a length of 15 mm was used for the electrode and substrate. did.

Table 8. Electroosmotic pump performance when RuOx is electrodeposited on Ti plate

Referring to Table 8, it was confirmed that the non-permeable electrode manufactured using electrodeposition can be applied to the electroosmotic pump. That is, it was confirmed that various coating methods can be used to manufacture the electrodes of the electroosmotic pump.

(Example 10) Performance of the electroosmotic pump according to the shape and size of the space opened in the non-permeable electrode

FIG. 10 is a view showing a Ti plate electrode substrate having a fluid passage of 4 mm in width and 8 mm in length according to an embodiment of the present invention.

Figure 11 (a) shows the current when 2.5 V is applied to both ends of the electrode for 10 seconds in an electroosmotic pump implemented as an electrode in which RuOx is electrodeposited through a large fluid passage in the Ti plate according to an embodiment of the present invention. It is a response graph, and (b) of FIG. 11 is a pressure response graph under the same conditions.

Referring to FIG. 10, the electroosmotic pump performance was compared according to the number of fluid passageways of the non-permeable electrode (Example 4). In addition to securing the flow path by increasing the number of small fluid flow paths of 1 mm, an electrode having only one large fluid flow path was fabricated. For example, in order to check the performance of the electrode, a 4 mm horizontal and 8 mm vertical fluid passage was drilled in a Ti plate having a width of 6 mm and a length of 15 mm, and then RuOx was electrodeposited (FIG. 10).

Referring to FIG. 11, the performance was confirmed by applying the electrode prepared above to the electroosmotic pump (FIG. 11, Table 9). The driving conditions were +2.5 V, -2.5 V, each 10 sec pulse time, and continuous driving in 0.5 mM Li₂SO₄ pumping solution. When constructing the electroosmotic pump for the experiment, as shown in FIG. 2, the porous silica membrane had a thickness of 2 mm, a width of 6 mm, and a size of 10 mm.

Table 9. Performance of an electroosmotic pump with an impermeable electrode with one large fluid passageway

Referring to Table 9, the electrode with a 4 mm horizontal and 8 mm vertical fluid passage has a small flow rate and pressure about half of the performance of an electrode with a conventional 1 mm fluid passage, but it does not function as an electroosmotic pump. Implementation was confirmed. When using as an electrode by drilling a fluid passage in an impermeable base material, there is a difference in performance depending on the size of the large and small ones (actually it depends on the electrode area used), but regardless of its size, it is possible to secure a flow path while functioning as an electrode Confirmed.

(Example 11) Performance of electrodes using various plate-shaped base materials

Figure 12 (a) is a graph of the current response when 2.5 V is applied to both ends of the electrode by 30 seconds in an electroosmotic pump implemented as an electrode in which RuOx is drop-coated on a Ti plate according to an embodiment of the present invention. Figure 12(b) is a pressure response graph under the same conditions.

13 (a) is a graph of the current response when 2.5 V is applied to both ends of the electrode by 30 seconds in an electroosmotic pump implemented as an electrode in which RuOx is drop-coated on a Ni plate according to an embodiment of the present invention. 13(b) is a pressure response graph under the same conditions.

12 and 13, electrodes were made using various types of metal plate-shaped base materials and applied to the electroosmotic pump. For example, Ti silver is a very stable material with excellent corrosion resistance. Therefore, it is easy to observe only the desired reaction, so it was used as a base material for an electroosmotic pump, and an electrode was made using another metal base material, nickel plate. Electrodes made of various metal base materials were applied to the electroosmotic pump to confirm the performance (Figs. 12, 11, Table 9). The driving conditions were +2.5 V, -2.5 V, each 30 sec pulse time, and continuous driving in 0.5 mM Li₂SO₄ pumping solution. When constructing the electroosmotic pump for the experiment, as shown in Figure 2, the porous silica membrane used a thickness of 2 mm, a width of 6 mm, and a length of 10 mm, and a Ti plate of 6 mm horizontal and 15 mm vertical was used for the electrode and substrate. did.

Table 10. Performance of electroosmotic pumps when drop-coated RuOx on various metal base materials

Referring to Table 10, it was confirmed that both the Ti plate and the Ni plate were in the form of electrodes through which a fluid could flow in the electroosmotic pump. Electrodes were fabricated using various impermeable plate-shaped metal base materials, and it was confirmed that they can be applied to electroosmotic pumps. In other words, it was confirmed that the electroosmotic pump could be configured in the same way by coating the electrode material using the conductor as the base material.

(Example 12) Electrode using thermocompression bonding method

Figure 14 (a) is a non-thermocompression-bonded electrode in which RuOx is drop-coated on a Ti plate according to an embodiment of the present invention. Thus, the thermocompression-bonded electrode is shown.

Referring to FIG. 14 , as compared to a conventional porous electrode, the plate-shaped electrode is not easily deformed by external stimuli because it has a rigid shape. Therefore, a thermocompression bonding method that can make the electrode surface smooth at high temperature and high pressure was introduced into the electrode manufacturing method. For example, an electrode was prepared by drop-coating RuOx on a Ti plate, followed by thermocompression bonding at a pressure of 20 MPa and a temperature of 100° C. for 10 minutes to check the degree of deformation of the electrode.

It was confirmed that the surface of the electrode material can be made smooth while maintaining the shape of the electrode substrate despite external stimulation of high temperature and high pressure. It was applied to an electroosmotic pump to confirm the performance of the electrode fabricated using a thermocompressor (Fig. 14, Table 10).

15 (a) is a current response graph when an electroosmotic pump implemented as an electrode in which RuOx is drop-coated on a Ti plate according to an embodiment of the present invention and then thermocompressed, and 2.5 V is applied to both ends of the electrode for 10 seconds each. and FIG. 15 (b) is a pressure response graph under the same conditions.

Referring to FIG. 15 , the driving conditions were +2.5 V, -2.5 V, each 10 sec pulse time, and continuous driving in 0.5 mM Li₂SO₄ pumping solution. When constructing the electroosmotic pump for the experiment, as shown in Figure 2, the porous silica membrane used a thickness of 2 mm, a width of 6 mm, and a length of 10 mm, and a Ti plate with a width of 6 mm and a length of 15 mm was used for the electrode and substrate. did.

Table 11. Performance of electroosmotic pump using thermocompression-bonded electrode after drop coating with RuOx

Referring to Table 11, it was confirmed that the non-permeable base material electrode exhibited the existing performance even when a strong external stimulus was applied. In addition, it was confirmed that the thermocompression bonding method, which is one of the surface treatment methods of the electrode, can be introduced into the electrode manufacturing method. Therefore, it was confirmed that the electrode using the non-permeable plate-shaped base material can be applied to the electroosmotic pump after external treatment of various methods.

Hereinafter, a description of a configuration performing the same function among the configurations shown in FIGS. 2A to 15 will be omitted.

16A and 16B are flowcharts for explaining a method of manufacturing an electrode constituting an electroosmotic pump according to another embodiment of the present invention.

A method of manufacturing an electrode constituting an electroosmotic pump according to an embodiment of the present invention comprises the steps of forming one or more fluid passageways in a plate-shaped substrate made of a non-porous substrate material (S110) and and coating the electrode material on the substrate (S120).

A method of manufacturing an electrode constituting an electroosmotic pump according to another embodiment of the present invention comprises the steps of coating an electrode material on a plate-shaped substrate made of a non-porous substrate material (S210), and one or more on the substrate It includes the step (S220) of forming the above fluid passage.

The electroosmotic pump includes a membrane 11 and a first electrode 130 and a second electrode 150 provided on both sides of the membrane 11, respectively, for allowing the movement of a fluid, the first electrode 130 and the second The electrode 150 is an electrode manufactured by a method including steps S110 and S120 or steps S210 and S220, and by the electrochemical reaction of the first electrode 130 and the second electrode 150, the electrode 130, 150), the fluid may move through the fluid passage.

The coating step (S110, S210) is drop-coating, dip-coating, spin-coating, spray coating, printing, pyrolysis and electrodeposition by at least one method of electrodeposition. The material may be coated.

17 is a flowchart illustrating an operating method of a fluid pumping system according to another embodiment of the present invention.

The method of operating a fluid pumping system according to another embodiment of the present invention comprises the steps of supplying a voltage to the first electrode 130 and the second electrode 150 of the electroosmotic pump 230 of the fluid pumping system 40 (S310). ), according to the driving of the electro-osmotic pump 230 , at least a portion of the first insulating material 210 of the fluid pumping system 40 moves forward and backward, and a transfer chamber provided on one side of the first insulating material 210 . Sucking and discharging the fluid to be transferred to 240 (S320), monitoring the pressure change of the monitoring chamber 250 provided on one side of the second insulating material 220 of the fluid pumping system 40 (S330) ) and detecting an abnormality of the electroosmotic pump 230 based on a change pattern of the pressure value measured for a predetermined time and an average value of the pressure value measured for a predetermined time (S340).

The above description of the present invention is for illustration, and those of ordinary skill in the art to which the present invention pertains can understand that it can be easily modified into other specific forms without changing the technical spirit or essential features of the present invention. will be. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and likewise components described as distributed may be implemented in a combined form.

The scope of the present invention is indicated by the following claims rather than the above detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts should be interpreted as being included in the scope of the present invention. do.

11: membrane 13, 15: porous electrode
17, 46: power supply unit 19: fluid path unit
20: strip 30: frame
130: first electrode 150: second electrode
210: first insulating material 220: second insulating material
230: electro-osmotic pump
240: transfer chamber
240a: inlet 240b: outlet
250: monitoring chamber 260: pressure measuring unit
270: suction valve 280: discharge valve
40: fluid pumping system
41: reservoir 42: suction path
45: discharge path 47: control circuit

Claims (26)

In the electroosmotic pump,
a membrane that allows the movement of fluid; and
Comprising a first electrode and a second electrode respectively provided on both sides of the membrane,
The first electrode and the second electrode are electrodes made of a non-porous substrate material and an electrode material coated thereon, and at least one fluid passage is formed thereon;
By the electrochemical reaction of the first electrode and the second electrode, the fluid will move through the fluid passageway, the electroosmotic pump. The method of claim 1,
The non-permeable base material is a plate, foil, and film composed of at least one of a conductive material, a semiconductor material, and a non-conductive material,
The conductive material includes nickel, copper, silver, titanium and aluminum,
the semiconductor material comprises silicon;
The non-conductive material will include polyethylene, polypropylene, PVDF, PVDC and polyimide. The method of claim 1,
The electrode material is composed of a metal, a metal oxide, a conductive polymer, a metal hexacyanoferrate, a carbon nanostructure, or a composite thereof,
The metal is to include at least one of silver, zinc, lead, manganese, copper, tin, ruthenium, and iridium,
The metal oxide includes vanadium oxide, molybdenum oxide (MoO₃), tungsten oxide (WO₃), ruthenium oxide, iridium oxide, manganese oxide, cerium oxide (CeO₂), and polyoxometalate (polyoxometalate). ) to include at least one of
The conductive polymer includes polyaniline, polyaniline derivatives, polythiophene, polythiophene derivatives, polypyrrole, polypyrrole derivatives, quinone polymers, quinone polymer derivatives, And it will include at least one of polythionine (polythionine),
The metal hexacyanoferrate is to include at least one of Prussian blue, iron hexacyanoferrate (FeHCF), copper hexacyanoferrate (CuHCF), and cobalt hexacyanoferrate (CoHCF) nickel hexacyanoferrate (NiHCF),
The carbon nanostructure includes at least one of carbon nanotube (CNT), graphene, carbon nanoparticles, fullerene and graphite . The method of claim 1,
The electrode material will be formed in a structure stacked with a plurality of layers, the electroosmotic pump. The method of claim 1,
The electrode material is deposited on the impermeable base material by at least one method of drop-coating, dip-coating, spin-coating, spray coating, printing, pyrolysis and electrodeposition. To be coated, the electroosmotic pump. The method of claim 1,
The first electrode or the second electrode is by thermocompression bonding or decal transfer method, the surface of the electrode material will be treated smoothly, the electroosmotic pump. The method of claim 1,
In the first electrode or the second electrode, the ratio of the area of the fluid passage to the total area of the electrode is formed to be greater than 0% and less than or equal to 50%, the electroosmotic pump. The method of claim 1,
Supported on both sides of the first electrode and the second electrode, the electroosmotic pump further comprising a frame in which a flow path is formed. The method of claim 1,
The electro-osmotic pump further comprising a power supply for supplying a voltage to the first electrode and the second electrode. The method of claim 1,
By alternately supplying the polarity of a voltage to each of the first electrode and the second electrode, the electrochemical reaction in the forward and reverse directions occurs repeatedly, thereby generating a pumping force by the repeated reciprocating movement of the fluid, electroosmotic pump. 11. The method of claim 10,
By the repeated electrochemical reaction in the forward and reverse directions, each of the first electrode and the second electrode is consumed and regenerated is repeated, the electroosmotic pump. In the manufacturing method of the electrode constituting the electroosmotic pump,
forming one or more fluid passageways in a plate-like substrate made of a non-porous substrate material; and
A method of manufacturing an electrode comprising the step of coating an electrode material on the substrate. In the manufacturing method of the electrode constituting the electroosmotic pump,
coating an electrode material on a plate-shaped substrate made of a non-porous substrate material; and
and forming one or more fluid passageways in the substrate. 14. The method according to claim 12 or 13,
The electroosmotic pump is
a membrane that allows the movement of fluid; and
Comprising a first electrode and a second electrode respectively provided on both sides of the membrane,
The first electrode and the second electrode are electrodes manufactured by the method,
By the electrochemical reaction of the first electrode and the second electrode, the fluid is moved through the fluid passage of the electrode, the method of manufacturing an electrode. 14. The method according to claim 12 or 13,
The electrode material is composed of a metal, a metal oxide, a conductive polymer, a metal hexacyanoferrate, a carbon nanostructure, or a composite thereof,
The metal is to include at least one of silver, zinc, lead, manganese, copper, tin, ruthenium, and iridium,
The metal oxide includes vanadium oxide, molybdenum oxide (MoO₃), tungsten oxide (WO₃), ruthenium oxide, iridium oxide, manganese oxide, cerium oxide (CeO₂), and polyoxometalate (polyoxometalate). ) to include at least one of
The conductive polymer includes polyaniline, polyaniline derivatives, polythiophene, polythiophene derivatives, polypyrrole, polypyrrole derivatives, quinone polymers, quinone polymer derivatives, And it will include at least one of polythionine (polythionine),
The metal hexacyanoferrate is to include at least one of Prussian blue, iron hexacyanoferrate (FeHCF), copper hexacyanoferrate (CuHCF), and cobalt hexacyanoferrate (CoHCF) nickel hexacyanoferrate (NiHCF),
The carbon nanostructure includes at least one of carbon nanotube (CNT), graphene, carbon nanoparticles, fullerene and graphite Way. 14. The method according to claim 12 or 13,
The coating step
By at least one method of drop-coating, dip-coating, spin-coating, spray coating, printing, pyrolysis and electrodeposition, the electrode material is coated manufacturing method. A fluid pumping system comprising:
The electro-osmotic pump according to claim 1;
a first insulating material provided on one side of the electro-osmotic pump, the shape of which is deformed as positive pressure and negative pressure are alternately generated;
a transfer chamber provided on one side of the first isolation material to suck and discharge the transfer target fluid in response to the deformation of the first isolation material; and
A fluid pumping system comprising a second insulating material provided on the other side of the electro-osmotic pump, the shape of which is deformed as the positive pressure and the negative pressure are alternately generated. 18. The method of claim 17,
A suction port and a discharge port through which suction and discharge of the transfer target fluid are performed are formed on one surface of the transfer chamber,
A suction valve and a discharge valve for allowing or blocking the flow of the fluid to be transferred are fastened to each of the inlet and outlet, the fluid pumping system. 19. The method of claim 18,
The suction valve is closed when the positive pressure is generated, and is opened when the negative pressure is generated,
The discharge valve is opened when the positive pressure is generated and is closed when the negative pressure is generated. 18. The method of claim 17,
a reservoir in which the transfer target fluid is stored;
a suction path that is a fluid transport path through which the fluid to be transported discharged from the reservoir is sucked into the transport chamber; and
The fluid pumping system further comprising a discharge path that is a fluid transport path of the fluid to be transported discharged from the transport chamber. 18. The method of claim 17,
a monitoring chamber provided on one side of the second insulating material, the pressure of which changes in response to the deformation of the second insulating material; and
The fluid pumping system, further comprising a pressure measuring unit for measuring the pressure change in the monitoring chamber. 22. The method of claim 21,
The pressure measuring unit
The fluid pumping system comprising a pressure sensor provided inside the monitoring chamber to detect a pressure change in the monitoring chamber as the second insulating material is deformed. 22. The method of claim 21,
By monitoring the pressure value measured by the pressure measurement unit, the fluid pumping system further comprising a control circuit for detecting an abnormality in the electro-osmotic pump. A method of operating a fluid pumping system, comprising:
(a) supplying a voltage to the first electrode and the second electrode of the electroosmotic pump of the fluid pumping system according to claim 17; and
(b) according to the driving of the electroosmotic pump, at least a part of the first insulating material of the fluid pumping system moves forward and backward to suck and discharge the fluid to be transferred into a transfer chamber provided at one side of the first insulating material A method of operating a fluid pumping system comprising a. 25. The method of claim 24,
(c) monitoring a pressure change of a monitoring chamber provided on one side of the second insulating material of the fluid pumping system; 26. The method of claim 25,
(D) further comprising the step of detecting an abnormality of the electroosmotic pump based on a change pattern of the pressure value measured for a predetermined time and an average value of the pressure value measured for the predetermined time, the method of operating a fluid pumping system.

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