KR20210121540A - Apparatus for air conditioning exhaust - Google Patents
Apparatus for air conditioning exhaust Download PDFInfo
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- KR20210121540A KR20210121540A KR1020200038376A KR20200038376A KR20210121540A KR 20210121540 A KR20210121540 A KR 20210121540A KR 1020200038376 A KR1020200038376 A KR 1020200038376A KR 20200038376 A KR20200038376 A KR 20200038376A KR 20210121540 A KR20210121540 A KR 20210121540A
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- air conditioning
- exhaust
- exhaust air
- electric damper
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/007—Ventilation with forced flow
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
- F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/002—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using a central suction system, e.g. for collecting exhaust gases in workshops
- B08B15/005—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using a central suction system, e.g. for collecting exhaust gases in workshops comprising a stationary main duct with one or more branch units, the branch units being freely movable along a sealed longitudinal slit in the main duct
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/0001—Control or safety arrangements for ventilation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
- F24F13/10—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F2007/001—Ventilation with exhausting air ducts
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/40—Pressure, e.g. wind pressure
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Ventilation (AREA)
- Air Conditioning Control Device (AREA)
Abstract
Description
본 발명은 배기 공조 장치에 관한 것으로, 보다 상세하게는, 배기 공조 자동조절 장치에 있어서, 배기압력을 검출하는 차압센서; 배기압력 검출 값을 수신한 후, 전동 댐퍼를 열고 닫는 제어기를 포함하는 배기 공조 자동조절 장치에 관한 것이다.The present invention relates to an exhaust air conditioning apparatus, and more particularly, to an exhaust air conditioning automatic control apparatus comprising: a differential pressure sensor for detecting exhaust pressure; The present invention relates to an exhaust air conditioning automatic control device including a controller for opening and closing an electric damper after receiving an exhaust pressure detection value.
반도체 및 LCD 생산라인에는 각 공정마다 수많은 제조설비가 있는데, 설비 가동 중에 발생하는 가스, 흄 등을 제거하기 위해 각 설비마다 배기덕트가 설치되어 있다.In semiconductor and LCD production lines, there are numerous manufacturing facilities for each process, and exhaust ducts are installed in each facility to remove gas and fumes generated during facility operation.
이때, 각 배기덕트의 배기 압력이 일정하지 않아서 다양한 품질 문제가 발생하고 있는데, 이를 방지하기 위해서 작업자가 수동으로 배기덕트를 조작하여 배기 압력을 조절하여 왔다. 이 경우, 인력 낭비 및 부정확성이 문제가 되었다.At this time, since the exhaust pressure of each exhaust duct is not constant, various quality problems occur. In order to prevent this, an operator has manually manipulated the exhaust duct to control the exhaust pressure. In this case, waste of manpower and inaccuracy became issues.
이에 본 발명자는 차압센서와 비례식 전동댐퍼 구동기를 이용한 배기 공조 자동조절 장치를 제안하고자 한다.Accordingly, the present inventor intends to propose an exhaust air conditioning automatic control device using a differential pressure sensor and a proportional electric damper driver.
본 발명은 상술한 문제점을 모두 해결하는 것을 목적으로 한다.An object of the present invention is to solve all of the above problems.
본 발명은 차압센서 및 전동댐퍼를 이용하여 자동적으로 배기덕트를 조작하여 배기압력을 조절하는 것을 다른 목적으로 한다.Another object of the present invention is to control the exhaust pressure by automatically manipulating the exhaust duct using a differential pressure sensor and an electric damper.
또한, 본 발명은 작업자가 각 설비마다 측정기로 배기압력을 측정한 후 수동으로 배기덕트를 조작하여 배기압력을 조절하던 것을, 차압센서, 제어기, 비례식 전동댐퍼 구동기로 구성된 배기 공조 자동조절 장치를 설치하여 각 설비의 배기압력을 수치로 실시간 확인 및 자동으로 조절하는 것을 다른 목적으로 한다.In addition, the present invention installs an exhaust air conditioning automatic control device composed of a differential pressure sensor, a controller, and a proportional electric damper driver, in which the operator manually controls the exhaust duct after measuring the exhaust pressure with a measuring instrument for each facility. Another purpose is to check and automatically control the exhaust pressure of each facility in real-time numerically.
상기한 바와 같은 본 발명의 목적을 달성하고, 후술하는 본 발명의 특징적인 효과를 실현하기 위한, 본 발명의 특징적인 구성은 하기와 같다.In order to achieve the object of the present invention as described above and to realize the characteristic effects of the present invention to be described later, the characteristic configuration of the present invention is as follows.
본 발명의 일 태양에 따르면, 배기 공조 자동조절 장치에 있어서, 배기압력을 검출하는 차압센서; 배기압력 검출 값을 수신한 후, 전동 댐퍼를 열고 닫는 제어기를 포함하는 배기 공조 자동조절 장치가 제공된다.According to one aspect of the present invention, there is provided an automatic exhaust air conditioning system, comprising: a differential pressure sensor for detecting exhaust pressure; After receiving the exhaust pressure detection value, there is provided an exhaust air conditioning automatic control device including a controller for opening and closing the electric damper.
본 발명에 의하면, 다음과 같은 효과가 있다.According to the present invention, the following effects are obtained.
본 발명은 차압센서 및 전동댐퍼를 이용하여 자동적으로 배기덕트를 조작하여 배기압력을 조절하는 효과가 있다.The present invention is effective in controlling the exhaust pressure by automatically manipulating the exhaust duct using a differential pressure sensor and an electric damper.
또한, 본 발명은 각 공정설비의 배기 압력이 자동으로 실시간 조절 및 모니터링이 가능하므로 배기압력이 일정하지 않아서 발생하는 품질 문제를 방지할 수 있고, 또한 각 설비의 배기 압력을 중앙관제실에서 모니터링이 가능하므로 유지보수가 용이하다는 효과가 있다.In addition, since the present invention enables automatic real-time control and monitoring of the exhaust pressure of each process facility, it is possible to prevent quality problems that occur because the exhaust pressure is not constant, and it is also possible to monitor the exhaust pressure of each facility in the central control room Therefore, it has the effect of easy maintenance.
도 1은 본 발명의 일 실시예에 따라 배기 공조 자동조절 장치의 전체 구성을 나타내는 도면이다.
도 2는 본 발명의 일 실시예에 따라 배기 공조 자동조절 장치의 일부 구성을 나타낸 도면이다.1 is a view showing the overall configuration of an automatic exhaust air conditioning system according to an embodiment of the present invention.
2 is a view showing a partial configuration of an automatic exhaust air conditioning system according to an embodiment of the present invention.
후술하는 본 발명에 대한 상세한 설명은, 본 발명이 실시될 수 있는 특정 실시예를 예시로서 도시하는 첨부 도면을 참조한다. 이들 실시예는 당업자가 본 발명을 실시할 수 있기에 충분하도록 상세히 설명된다. 본 발명의 다양한 실시예는 서로 다르지만 상호 배타적일 필요는 없음이 이해되어야 한다. 예를 들어, 여기에 기재되어 있는 특정 형상, 구조 및 특성은 일 실시예에 관련하여 본 발명의 정신 및 범위를 벗어나지 않으면서 다른 실시예로 구현될 수 있다. 또한, 각각의 개시된 실시예 내의 개별 구성요소의 위치 또는 배치는 본 발명의 정신 및 범위를 벗어나지 않으면서 변경될 수 있음이 이해되어야 한다. 따라서, 후술하는 상세한 설명은 한정적인 의미로서 취하려는 것이 아니며, 본 발명의 범위는, 적절하게 설명된다면, 그 청구항들이 주장하는 것과 균등한 모든 범위와 더불어 첨부된 청구항에 의해서만 한정된다. 도면에서 유사한 참조부호는 여러 측면에 걸쳐서 동일하거나 유사한 기능을 지칭한다.DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0023] Reference is made to the accompanying drawings, which show by way of illustration specific embodiments in which the present invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention are different but need not be mutually exclusive. For example, certain shapes, structures, and characteristics described herein with respect to one embodiment may be embodied in other embodiments without departing from the spirit and scope of the invention. In addition, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the present invention. Accordingly, the detailed description set forth below is not intended to be taken in a limiting sense, and the scope of the invention, if properly described, is limited only by the appended claims, along with all scope equivalents to those claimed. Like reference numerals in the drawings refer to the same or similar functions throughout the various aspects.
이하, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자가 본 발명을 용이하게 실시할 수 있도록 하기 위하여, 본 발명의 바람직한 실시예들에 관하여 첨부된 도면을 참조하여 상세히 설명하기로 한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings in order to enable those of ordinary skill in the art to easily practice the present invention.
도 1은 본 발명의 일 실시예에 따라 배기 공조 자동조절 장치의 전체 구성을 나타내는 도면이다.1 is a view showing the overall configuration of an automatic exhaust air conditioning system according to an embodiment of the present invention.
상기 배기 공조 자동조절 장치는 복수의 공정 설비를 가지며, 각 공정설비에는 전동댐퍼, 차압센서를 포함할 수 있다. 또한, 메인 배기 공조와 연결될 수 있을 것이다.The exhaust air conditioning automatic control device may include a plurality of process equipment, and each process equipment may include an electric damper and a differential pressure sensor. It may also be connected to the main exhaust air conditioning.
도 2는 본 발명의 일 실시예에 따라 배기 공조 자동조절 장치의 일부 구성을 나타낸 도면이다.2 is a view showing a partial configuration of an automatic exhaust air conditioning system according to an embodiment of the present invention.
도 2에서 볼 수 있듯이, 차압센서가 실시간으로 현재 배기 압력 검출값을 제어기로 전달하면, 제어기는 프로그램된 제어알고리즘에 의하여 전동댐퍼를 자동으로 열림 또는 닫힘 동작을 시켜서 설정된 배기 압력값에 현재 검출압력이 도달하도록 자동으로 제어할 수 있다.As can be seen in FIG. 2 , when the differential pressure sensor transmits the current exhaust pressure detection value to the controller in real time, the controller automatically opens or closes the electric damper according to a programmed control algorithm, and the current detected pressure is applied to the set exhaust pressure value. This can be automatically controlled to reach.
즉, 제어기에서는 상기 차압센서 및 전동댐퍼를 통해 자동적으로 배기 압력을 실시간으로 확인 및 자동 조절할 수 있다.That is, the controller can automatically check and automatically adjust the exhaust pressure in real time through the differential pressure sensor and the electric damper.
이상에서 본 발명이 구체적인 구성요소 등과 같은 특정 사항들과 한정된 실시예 및 도면에 의해 설명되었으나, 이는 본 발명의 보다 전반적인 이해를 돕기 위해서 제공된 것일 뿐, 본 발명이 상기 실시예들에 한정되는 것은 아니며, 본 발명이 속하는 기술분야에서 통상적인 지식을 가진 자라면 이러한 기재로부터 다양한 수정 및 변형을 꾀할 수 있다.In the above, the present invention has been described with specific matters such as specific components and limited embodiments and drawings, but these are provided to help a more general understanding of the present invention, and the present invention is not limited to the above embodiments. , those of ordinary skill in the art to which the present invention pertains can make various modifications and variations from these descriptions.
따라서, 본 발명의 사상은 상기 설명된 실시예에 국한되어 정해져서는 아니 되며, 후술하는 특허청구범위뿐만 아니라 이 특허청구범위와 균등하게 또는 등가적으로 변형된 모든 것들은 본 발명의 사상의 범주에 속한다고 할 것이다. Therefore, the spirit of the present invention should not be limited to the above-described embodiments, and not only the claims described below but also all modifications equivalently or equivalently to the claims described below belong to the scope of the spirit of the present invention. will do it
Claims (1)
배기압력을 검출하는 차압센서;
배기압력 검출 값을 수신한 후, 전동 댐퍼를 열고 닫는 제어기;
를 포함하는 배기 공조 자동조절 장치.In the exhaust air conditioning automatic control device,
a differential pressure sensor for detecting exhaust pressure;
a controller that opens and closes the electric damper after receiving the exhaust pressure detection value;
Exhaust air conditioning automatic control device comprising a.
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KR1020200038376A KR20210121540A (en) | 2020-03-30 | 2020-03-30 | Apparatus for air conditioning exhaust |
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KR1020200038376A KR20210121540A (en) | 2020-03-30 | 2020-03-30 | Apparatus for air conditioning exhaust |
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