KR20210097083A - A System for Managing a Process Parameter by a Smart Sensor - Google Patents

Abstract

The present invention relates to a system for managing process parameters by a smart sensor and more specifically, to a system for managing process parameters by a smart sensor, which can detect a temperature or leakage by installing multipole smart sensors at different positions of a device or equipment for processes to control the processes based on the detection. The system for managing process parameters by a smart sensor comprises: multiple sensor groups (11) including at least one smart sensor (11_1 to 11_N); a reader module (12) for starting operation of at least one smart sensor (11_1 to 11_N) and receiving detection information from each of the smart sensor (11_1 to 11_N); and a relay module (13) for transmitting the detection information from the smart sensor (11_1 to 11_N) to a fault detection classifier (FDC) (141) or a management server (142), wherein the operation of the at least one smart sensor (11_1 to 11_N) starts by reception of an RF signal, and the detection information is transmitted through an operation antenna.

Description

A System for Managing a Process Parameter by a Smart Sensor

The present invention relates to a process factor management system by a smart sensor, and specifically, by attaching a plurality of smart sensors to different positions of a device, facility or device for a process to detect temperature or leakage, and control the process based on this It relates to a process factor management system by a smart sensor capable of being.

Various industrial facilities such as semiconductor equipment are operated by electric power and generate heat in various forms according to the use of electric power, and accordingly, the temperature affecting the process process may change, so temperature change needs to be monitored. In addition, leaks may occur in conduits or connections in industrial facilities that require supply of various gases or liquids, which may cause a risk. And detection techniques for temperature or leak detection of various industrial equipment are known in the art. Patent Registration No. 10-1654703 discloses Europium and Europium, which can easily and effectively measure temperature using a non-contact temperature sensor containing europium and graphene oxide, in a high-temperature working environment where it is difficult to measure temperature using a contact thermometer. Disclosed is a non-contact temperature sensor including graphene oxide. Patent Registration No. 10-1401275 discloses a device for non-contact measurement of a measurement object in a hot air blower using a thermoelectric element. In addition, Patent Registration No. 10-1750800 discloses a non-contact temperature measurement method and apparatus for calculating the temperature by monitoring the emissivity of the non-gray body in order to improve the accuracy of temperature measurement.

The infrared sensor, thermoelectric element or non-contact sensor disclosed in the prior art or the known art has disadvantages in that the measurement accuracy is low, the measurement equipment is complicated, or the processing of the detection result is complicated. In addition, it has disadvantages in that it requires a lot of cost to improve measurement precision and it is difficult to measure various parts. In addition, there is a problem in that it is difficult to analyze the correlation by accurately measuring in real time the temperature of various parts having a large temperature change due to heat generation or affecting the process process in real time.

The present invention has the following objects to solve the problems of the prior art.

Prior Art 1: Patent Registration No. 10-1654703 (Yonsei University Industry-Academic Cooperation Foundation, announced on September 06, 2016) Non-contact temperature sensor containing europium and graphene oxide, manufacturing method thereof, and non-contact temperature measurement method using the same Prior Art 2: Patent Registration No. 10-1401275 (Korea Institute of Standards and Science, Announced on May 29, 2014) Non-contact temperature measuring device and non-contact temperature measuring method Prior Art 3: Patent Registration No. 10-1750800 (LG Chemical Co., Ltd., announced on June 26, 2017) Non-contact temperature measurement method and apparatus of a non-gray body

It is an object of the present invention to analyze detection information transmitted in real time from a plurality of smart sensors installed in various parts to improve process stability through control of process parameters and at the same time to improve process efficiency by smart sensors. to provide a management system.

According to a suitable embodiment of the present invention, a process factor management system by a smart sensor includes a plurality of sensor groups including at least one smart sensor; a reader module that initiates operation of at least one smart sensor and receives detection information from each smart sensor; and a relay module for transmitting the detection information received from the reader module to an operation detection server (FDC) or a management server, wherein the at least one smart sensor starts operation by receiving an RF signal, and transmits detection information to the operation antenna transmitted through

According to another suitable embodiment of the present invention, each of the at least one smart sensor comprises a detection unit; A label or sticker structure consisting of a patterned antenna electrically connected to an actuating chip and a detection unit.

According to another suitable embodiment of the present invention, a plurality of sensor groups are arranged at different positions to detect temperature information or leakage information in real time, and the correlation between the detection information and the process parameter is detected by the process parameter detection unit. do.

According to another suitable embodiment of the present invention, the plurality of sensor groups comprises at least one process chamber, at least one supply tank, a clean chamber; feed tube; It becomes a Processing Furnace or a processing material.

The system according to the present invention detects a temperature or liquid leakage of a monitoring point of a device or facility that generates heat according to power consumption by a plurality of smart passive sensors. The smart passive sensor operates without a separate battery or similar power supply means, and has the advantage of simplifying the measurement equipment and operation structure by allowing detection information to be transmitted wirelessly through an antenna. For example, in semiconductor equipment, a smart passive sensor is attached to a key part where safety must be secured, so that the temperature is constantly monitored in real time, so that heat can be detected in advance. A smart passive sensor is attached to the end of the main power load of the main power supply unit (Main Rack) for power supply so that a risk such as a fire that may occur due to an increase in load is prevented in advance. By detecting the temperature or the occurrence of fire in this way, the actual temperature at a predetermined point in the operating state is accurately detected while measuring is simple compared to the known detection method of periodically detecting the temperature or the occurrence of a fire by a device such as an infrared camera. In addition, the system according to the present invention is attached to various points where leaks may occur, for example in semiconductor equipment, so that leaks can be checked in real time. The method according to the present invention sets a management point in advance and attaches a smart passive sensor to detect temperature or water leakage, thereby enabling the detection of a temperature change characteristic in real time while enabling leak detection. Accordingly, when a known thermoelectric (TC) sensor or a water leak sensor is applied, a separate communication line must be arranged, the unit price is high, and the problem of an increase in size or an increase in cost according to the use of a battery can be solved. In addition, the system according to the present invention enables the management of process parameters by installing a plurality of smart sensors at a point requiring measurement and transmitting detection information in real time.

1 shows an embodiment of a process factor management system by a smart sensor according to the present invention.
2 shows an embodiment of a smart sensor according to the present invention.
3 shows an embodiment of a process in which process parameters are controlled by a smart sensor according to the present invention.
4 shows an embodiment in which the system according to the present invention is applied to a process chamber.
5 shows an embodiment in which the system according to the present invention is applied to a chemical handling process.
6 shows an embodiment in which the system according to the present invention is applied to clean equipment.
7 shows an embodiment in which the system according to the present invention is applied to a conveying conduit.
8 shows an embodiment in which the system according to the present invention is applied to a process furnace.
9 shows an embodiment in which the system according to the present invention is applied to a process material such as a wafer.
10 shows an embodiment of a method in which a process parameter is adjusted by the system according to the present invention.

Hereinafter, the present invention will be described in detail with reference to the embodiments shown in the accompanying drawings, but the embodiments are for a clear understanding of the present invention, and the present invention is not limited thereto. In the following description, components having the same reference numerals in different drawings have similar functions, so they will not be repeatedly described unless necessary for the understanding of the invention, and well-known components will be briefly described or omitted, but the present invention It should not be construed as being excluded from the embodiment of

1 shows an embodiment of a process factor management system by a smart sensor according to the present invention.

Referring to FIG. 1 , the process factor management system includes: a plurality of sensor groups 11 including at least one smart sensor 11_1 to 11_N; a reader module 12 for starting the operation of at least one smart sensor 11_1 to 11_N and receiving detection information from each smart sensor 11_1 to 11_N; and a relay module 13 for transmitting the detection information received from the reader module 12 to an operation detection server (FDC) 141 or a management server 142, wherein the at least one smart sensor 11_1 to 11_N is initiated by the reception of an RF signal, and transmits detection information through the operation antenna.

The sensor group 11 may include at least one smart sensor 11_1 to 11_N, and a plurality of sensor groups 11 are located in different locations of equipment, equipment or devices for power supply or process. can be attached. Each of the smart sensors 11_1 to 11_N may be made of, for example, a label structure having a thickness of 0.5 to 20 mm while having a horizontal and vertical length of 50 to 100 mm × 15 to 30 mm. Each of the smart sensors 11_1 to 11_N may be made in the form of a label, sticker, or tab, and may have a structure that can be simply attached to various locations of equipment, equipment, or devices. Each of the smart sensors 11_1 to 11_N may be a synthetic resin or metal molding depending on an application temperature or an attachment target, and may have various attachment means.

A detection means, an antenna or an electronic chip (IC chip) capable of detecting temperature, humidity, or water leakage may be disposed in each of the smart sensors 11_1 to 11_N. The smart sensors 11_1 to 11_N may be operated in an energy harvesting manner, for example, may be operated by receiving an ultra-high frequency (UHF) radio signal. Specifically, the smart sensors 11_1 to 11_N may operate by receiving a wireless signal of 100 to 1,000 MHz, and may include a detection circuit for detecting temperature or humidity. As such, the smart sensors 11_1 to 11_N may have a smart passive structure in which temperature or humidity can be precisely detected by a detection circuit or similar detection means disposed therein while operating without a battery or similar power supply means. there is. A plurality of sensor groups 11 including at least one smart sensor 11_1 to 11_N may be attached to the measurement target, and each sensor group 11 may each have a unique code, and each sensor group ( Each of the smart sensors 11_1 to 11_N belonging to 11) may have a unique address.

The reader module 12 transmits an RF signal from each smart sensor 11_1 to 11_N to initiate operation, and has a function of receiving a detection signal transmitted from an antenna of each smart sensor 11_1 to 11_N. . Specifically, the reader module 12 transmits an RFID signal to each smart sensor 11_1 to 11_N to activate each smart sensor 11_1 to 11_N, and detects information from each smart sensor 11_1 to 11_N. It can have the ability to receive. The reader module 12 may identify different detection information by a unique code of the sensor group 11 and a unique address of each smart sensor 11_1 to 11_N, and the unique address may include a unique code. The detection information received by the reader module 12 may be transmitted to the relay module 13 .

The relay module 13 may be, for example, Ethernet or a similar local area network (LAN) for processing information in the form of an electric signal, and may be connected to the reader module 12 to enable data communication. A plurality of reader modules 12 may be disposed, and each reader module 12 may be connected to at least one relay module 13 to enable data communication. The reader module 12 and the relay module 13 may be connected by wire or wirelessly, and the reader module 12 is a relay module ( 13) can be transmitted. The plurality of sensor groups 11 may be disposed at various locations in a facility, equipment, or device, and each sensor group 11 may be connected to at least one reader module 12 . A plurality of reader modules 12 may be disposed at positions where radio frequency (RF) communication with the same or different sensor groups 11 is possible. Alternatively, the reader module 12 may be made of a portable and movable structure. In addition, the reader module 12 may be connected to at least one relay module 13 to enable short-range communication. However, the reader module 12 and the relay module 13 may be made of one electronic device structure, and the present invention is not limited by the structures of the reader module 12 and the relay module 13 .

The relay module 13 may transmit the received detection information to a fault detection and classification server 141 or a management server 142 . The operation detection server 141 or the management server 142 may have a PC computer or a similar computer structure, and may include a display unit that processes and displays the signal transmitted from the reader module 12 . In addition, it may include a detection information database for storing detection information and processing means or alarm means capable of analyzing the detection information and taking action accordingly. And it may include a communication means for transmitting the analysis result or the processing result to a predetermined portable electronic device, such as a smart phone. The operation detection server 141 or the management server 142 may analyze the detection information transmitted from the sensor group 11 to analyze process parameters affecting the detection result. In addition, process parameters may be controlled to suit predetermined process conditions, and detection information may be received and analyzed again according to the controlled conditions.

Analysis and control of process parameters can be accomplished in a variety of ways and is not limited to the examples presented.

According to one embodiment of the present invention, the reader module 12 may be operated by a portable electronic device such as a smart phone, or the reader module 12 may be made of a portable terminal structure. The reader module 12 may be disposed at a predetermined position and may be started by a portable electronic device. In addition, detection information received from each of the smart sensors 11_1 to 11_N may be transmitted to the portable electronic device. A plurality of smart sensors 11_1 to 11_N may be attached to different positions of the measurement target. The reader module 12 may be made of a portable structure, and the reader module 12 may be operated by being moved to a position to which the smart sensors 11_1 to 11_N are attached. And the detection information received from the reader module 12 may be transmitted to the relay module 13 or the portable electronic device. The reader module 12 may be connected to the relay module 13 or the portable electronic device by Wi-Fi communication or short-range wireless communication, but is not limited thereto. The reader module 12 can be made in a structure capable of data communication with various electronic devices by being made in various structures, and is not limited to the presented embodiment.

2 shows an embodiment of a smart sensor according to the present invention.

Referring to FIG. 2 , each of the at least one smart sensor 11_1 to 11_N includes a detection unit 211 ; working chip 212; and a label or sticker structure comprising pattern antennas 213a and 213b electrically connected to the detection unit 211 .

The smart sensor includes: a detection unit 211 formed in the center of the attachment body of the sticker or label structure; and an operation chip 212 for operating the detection unit 211 . The attachment body may have a detachable attachment structure while being in the form of a label as a whole. Also, for example, while having a width and a length of 50 to 100 mm × 15 to 30 mm and a thickness of 0.5 to 20 mm, one side may be an attachment surface. The detection unit 211 may include a detection circuit in which a circuit pattern capable of detecting a resistance or a magnetic field is formed, and the inside may be sealed by acrylic, polyester, or a similar material. Alternatively, it may be molded with a metal or non-metal component depending on the conditions of use. The operation chip 212 and the detection unit 211 having an integrated circuit structure may be disposed in the center of the attachment body, and the pattern antennas 213a and 213b may be disposed on both sides of the operation chip 212 in a planar shape. there is. The smart sensor may have an overall rectangular or similar polygonal shape, or a circular or similar oval shape, but is not limited thereto. The pattern antennas 213a and 213b may have a symmetrical shape with respect to the operating chip 212 , and a pattern may be formed in a planar shape. The pattern antennas 213a and 213b may be made of copper, chrome, or similar materials, and the smart sensor detects temperature, humidity or water leakage based on, for example, a Fatal Event Rate/Received Signal Strength Indicator (FER/RSSI) value. can be detected The operation chip 212 may include a password unit, a detection processing unit, or a memory. When an RF signal is transmitted along with the password from the reader module, it is confirmed by the password unit, and can be activated by the RF signal received by the pattern antennas 213a and 213b. And the detection unit 211 detects the temperature or humidity from the temperature sensor circuit or the humidity sensor circuit, the detection information is converted into a signal transmittable by the detection processing unit is stored in the memory, or pattern antennas 213a and 213b It can be transmitted to the reader module in the form of an RF signal through

The smart sensor may be made in various structures suitable for a measurement target and is not limited to the presented embodiment.

3 shows an embodiment of a process in which process parameters are controlled by a smart sensor according to the present invention.

Referring to FIG. 3 , a plurality of sensor groups 31_1 to 31_N may be disposed at various locations in a process device such as a semiconductor processing facility, for example, and the plurality of sensor groups 31_1 to 31_N may be related to one another. of the sensor module 31 can be formed. As described above, each of the sensor groups 31_1 to 31_N may include at least one smart sensor. Each smart sensor may have a unique address, and the location of each smart sensor with a unique address may be identified by the location information unit 35 . The location information of each smart sensor may be confirmed in various ways, may be determined in advance, may be confirmed by reception sensitivity of an RF signal, or an image acquisition means may be disposed for position confirmation. The location information unit 35 may check and store the location of each sensor group 31_1 to 31_N and the location of each smart sensor belonging to each sensor group 31_1 to 31_N. And the location information of each smart sensor stored in the location information unit 35 may be transmitted to the information data monitoring unit 32 , the process parameter detection unit 33 , and the process control unit 34 . The plurality of sensor groups 31_1 to 31_N may be attached to one or more devices having process relevance, and information detected from the plurality of sensor groups 31_1 to 31_N is transmitted via the reader module or relay module described above. information may be transmitted to the data monitoring unit 32 . The information data monitoring unit 32 may confirm the unique address and location information of each detection information and transmit it to the process parameter detection unit 33 . The process parameter detection unit 33 has a function of detecting a process parameter affecting temperature, humidity or leakage. In addition, the process parameter detection unit 33 may have a function of determining whether the current detection information corresponds to an appropriate level. In addition, the detection information and information on the related process parameters or a result of determining whether the process parameters are appropriate may be transmitted to the process control unit 34 . And the process control unit 34 may appropriately control the process conditions based on the information transmitted by the process parameter detection unit 33 .

Determination of process parameters or control of process parameters according to detection information may be set appropriately for various process equipment.

4 shows an embodiment in which the system according to the present invention is applied to a process chamber.

Referring to FIG. 4 , the plurality of smart sensors 11_1 to 11_N may be attached to a plurality of process chambers 41_1 to 41_K of the process equipment 40 in which a process for a process material 43 such as a wafer is performed. . At least one smart sensor 11_1 to 11_N may be disposed in each of the process chambers 41_1 to 41_K, and at least one smart sensor 11_L may be disposed in the transport path 42 through which the process material 43 is transported. can be placed. Detection such as temperature in real time from each of the smart sensors 11_1 to 11_N while the process is in progress in each of the process chambers 41_1 to 41_K or when the process material 43 is transported along the transport path 42 Information may be sent to the reader unit 44 . The reader unit 44 may transmit an RF signal for initiating operation to each of the smart sensors 11_1 to 11_N, and each of the smart sensors 11_1 to 11_N starts operation according to the reception of the RF signal, Process information, such as temperature, can be detected at a location and transmitted to the reader unit 44 along with a unique address. The reader unit 44 may convert the received detection information into a processable signal and transmit it to the temperature data unit 45 . The temperature data unit 45 combines the temperature information for each of the process chambers 41_1 to 41_K, the temperature information of the transfer path 42 or the temperature information of other process locations with information about the measurement time, the measurement location and the unique address. to the temperature analysis unit 46 . The temperature analysis unit 46 may analyze a temperature change of the process material 43 such as a wafer during a process or transfer process. The analysis result may be transmitted to the parameter matching unit 47 to search for an optimal process parameter for the process for the process material 43 , and the search result may be transmitted to the process temperature control unit 48 . The process temperature control unit 48 may control a process temperature corresponding to a process parameter so that each of the process chambers 41_1 to 41_K is in an optimal process condition.

5 shows an embodiment in which the system according to the present invention is applied to a chemical handling process.

At least one smart sensor 11_1 to 11_N may be attached to each of the supply tanks 51_1 to 51_L in which various chemicals used in the process are stored in the storage area 50 , and also various Smart sensors 11_1 to 11_N may be disposed at positions. Temperature, humidity and leakage need to be detected for the supply tanks 51_1 to 51_L of the chemical, and the storage area 50 and the supply tanks 51_1 to 51_L need to be maintained at a predetermined temperature or humidity condition. Each of the smart sensors 11_1 to 11_N may detect temperature and humidity information of an attachment location and transmit it to the reader unit 44 . The reader unit 44 may transmit the temperature and humidity information to the temperature data unit 45 and the leak detection unit 55, and the leak detection unit 55 detects the humidity and at the same time detects a leak from the detected humidity information. can do.

The temperature data unit 45 and the leak detection unit 55 may classify the temperature information and the humidity information and transmit them to the temperature analysis unit 561 and the operation analysis unit 562 . The temperature analysis unit 561 and the operation analysis unit 562 may have data for predetermined conditions for the predetermined storage zone 50 and the supply tanks 51_1 to 51_K, each temperature or humidity being a chemical substance. can have data on the condition of the In addition, process parameter values for optimal process conditions may be searched for by the temperature analysis unit 561 and the operation analysis unit 562 and transmitted to the process parameter setting unit 57 . And the process parameter setting unit 57 may adjust the conditions for the storage zone 50 and each of the supply tanks 51_1 to 51_L based on the transmitted process parameter values.

6 shows an embodiment in which the system according to the present invention is applied to clean equipment.

Referring to FIG. 6 , a plurality of smart sensors 11_1 to 11_N may be disposed in the cleaning liquid supply tank 61 of the clean chamber 60 of the clean equipment, and also smart in the transfer conduit for the supply of distilled water (DI). Sensors 11_1 to 11_N may be disposed. The temperature of the clean chamber 60 and the cleaning liquid supply tank 61 needs to be precisely managed, and for this purpose, the temperature or humidity needs to be point-managed. Point management is one while installing smart sensors 11_1 to 11_N at multiple locations that can be in different temperature states, for example in the clean chamber 60, multiple locations of the washing liquid supply tank 61, or multiple locations of the transfer conduit It means detecting that the temperature change of one location affects the temperature change of another location. To this end, it is necessary to simultaneously measure the temperatures of multiple locations in real time, and the temperature information measured in real time may be transmitted to the reader unit 44 . The temperature information detected by the reader unit 44 may be transmitted to the internal temperature data detection unit 62 . The internal temperature data detection unit 62 may classify the temperature information for each location according to time and transmit it to the temperature-process parameter correlation analysis unit 63 . The temperature-process parameter correlation analysis unit 63 may analyze the effect of the temperature change on the process parameter at different positions and transmit it to the fine process point analysis unit 64 . The fine process point analysis unit 64 may analyze the effect of the temperature change on the overall process parameters at each point to search for an optimal process condition and transmit it to the process control unit 34 . Thereafter, the process control unit 34 may set and control the process conditions according to the transmitted process conditions.

7 shows an embodiment in which the system according to the present invention is applied to a conveying conduit.

Referring to FIG. 7 , for example, a plurality of smart sensors 11_1 to 11_N may be disposed in a supply tube 71 for distilled water (DI) or similar thereto, and a peripheral environment facility 70 in which the supply tube 71 is disposed. ) may also be arranged with smart sensors 11_1 to 11_N. In addition, temperature information detected from each of the smart sensors 11_1 to 11_N may be transmitted to the location temperature data unit 72 via the reader unit 44 . The position temperature data unit 72 may classify the temperature at different positions of the supply tube 71 at the same time or different time, and transmit it to the transport section detection and analysis unit 73 together with the ambient temperature. The transfer section detection and analysis unit 73 may analyze the effect of temperature change at different locations and transmit it to the transfer liquid detection unit 74 . The conveyed liquid state detection unit 74 may search for a temperature condition in which the conveyed liquid can be conveyed in an optimal condition and transmit it to the process control unit 34 .

8 shows an embodiment in which the system according to the present invention is applied to a process furnace.

Referring to FIG. 8 , a smart sensor module may be applied to detect the temperature of a process furnace 81 for manufacturing a boat for wafer carriers. A plurality of smart sensors 11_1 to 11_N may be disposed in various positions of the process furnace 81, and temperature information detected from each smart sensor 11_1 to 11_N is transmitted through the reader unit 44 to the temperature monitoring unit ( 83) can be transmitted. The temperature of the process furnace 81 may be changed by the heating unit 82 , the process temperature for the manufacture of the boat BT may be monitored by the temperature monitoring unit 83 , and the monitoring information may be transmitted to the furnace temperature analysis unit (84). The furnace temperature analysis unit 84 may analyze the temperature change at different locations in the process furnace 81 according to the heating level of the heating unit 82 and transmit it to the furnace condition detection unit 85 . The furnace state detection unit 85 may have a function of detecting the optimum process condition of the process furnace 81 while detecting whether the process furnace 81 is normal according to temperature changes in different parts. Then, the searched optimal process conditions are transmitted to the process control unit 86 and the operation of the heating unit 82 can be adjusted accordingly.

9 shows an embodiment in which the system according to the present invention is applied to a process material such as a wafer.

Referring to FIG. 9 , a plurality of smart sensors 11_1 to 11_N may be attached to different portions of a process material 91 such as a wafer. In each process or in the transfer process, temperatures of different parts of the process material 91 may be transmitted to the part temperature data unit 92 via the reader unit 44 . The temperature information classified by the part temperature data unit 92 may be transmitted to the processor temperature data unit 93 to analyze temperature changes of different parts of the process material in each process process. And the analysis result may be transmitted to the processor-temperature correlation detection unit 94 . The processor-temperature correlation detection unit 94 detects the optimal process parameters for the process material 91 in each processor, and determines whether the process material 91 is normal according to the analysis of temperature changes in different parts. It may have a detection function. And the detection result may be transmitted to the process control unit 34 .

The system according to the present invention can be applied to various devices, equipment, devices or materials, and is not limited to the presented embodiment.

When the process material 91 shown in FIG. 9 becomes a wafer, the temperature change of the wafer may be tracked in real time during the process in the vacuum chamber including the transfer path by the smart sensors 11_1 to 11_N. For example, temperature information may be received from the smart sensors 11_1 to 11_N in the process of being disposed on a loading unit, a transfer unit, and a chuck for inducing the vacuum chamber to track the temperature change. Since electromagnetic waves are blocked inside the vacuum chamber, a separate relay antenna may be installed in the form of penetrating the vacuum chamber for receiving temperature information when the wafer is located inside the vacuum chamber. In addition, an RF signal may be exchanged between the wafer positioned in the vacuum chamber and the reader unit 44 through the relay antenna.

The smart sensors 11_1 to 11_N may be attached to various structures, equipment, facilities, devices, materials, or similar process means to receive detection information, and the present invention is not limited thereto. For example, the system according to the invention can be applied to an exhaust installation of a vacuum chamber. Specifically, the vacuum chamber may be connected to the first conduit, and a vacuum pump may be installed in the first conduit. The vacuum pump may be connected to the scrubber by two conduits, and an exhaust conduit may be connected to the scrubber. In such a structure, when foreign substances are accumulated inside the second conduit and the gas is not discharged at a predetermined rate, the pressure of the second conduit increases, which may cause an accident such as an explosion. In this case, a plurality of smart sensors 11_1 to 11_N are attached around the 1st conduit or 2nd conduit to monitor the temperature change over time. 2 When the pressure rises due to the accumulation of foreign substances inside the conduit, the temperature change increases and this may cause the temperature to deviate from the predetermined range. If the temperature range is out of a predetermined range, an alarm can be generated or the foreign object can be removed in an appropriate way.

The system according to the present invention can be applied to various uses and is not limited to the presented embodiment.

10 shows an embodiment of a method in which a process parameter is adjusted by the system according to the present invention.

Referring to FIG. 10 , the process of adjusting process parameters based on information detected from a plurality of smart sensors includes selecting a process site or process material to which each of the plurality of smart sensors is to be attached (S11); A step (S12) in which a unique address of each smart sensor is assigned together with attachment location information; A step of setting the detection period of each smart sensor (S13); Step (S14) of operating the RF reader for the operation of each smart sensor according to the set detection cycle; Steps in which each smart sensor is operated to detect temperature, humidity or leakage (S151, S152); The detection information is transmitted through the antenna of each smart sensor and received by the reader module (S16); analyzing the detection information (S17); a step of analyzing the process-time-temperature/humidity relationship according to the analysis result (S18); A step of analyzing the correlation between the detection information and the process parameters (S19); and a step (S20) of searching for process conditions for optimal process conditions according to the analysis result.

A plurality of smart sensors can be made of a label, sticker or tag structure, and can transmit information detected at the attachment location to the reader module in real time. The transmitted detection information is analyzed and process parameters affecting process conditions can be adjusted based on the analysis.

The system according to the invention can be operated in a variety of ways and is not limited to the embodiments presented.

The system according to the present invention detects a temperature or liquid leakage of a monitoring point of a device or facility that generates heat according to power consumption by a plurality of smart passive sensors. The smart passive sensor operates without a separate battery or similar power supply means, and has the advantage of simplifying the measurement equipment and operation structure by allowing detection information to be transmitted wirelessly through an antenna. For example, in semiconductor equipment, a smart passive sensor is attached to a key part where safety must be secured, so that the temperature is constantly monitored in real time, so that heat can be detected in advance. A smart passive sensor is attached to the end of the main power load of the main power supply unit (Main Rack) for power supply so that a risk such as a fire that may occur due to an increase in load is prevented in advance. By detecting the temperature or the occurrence of fire in this way, the actual temperature at a predetermined point in the operating state is accurately detected while measuring is simple compared to the known detection method of periodically detecting the temperature or the occurrence of a fire by a device such as an infrared camera. In addition, the system according to the present invention is attached to various points where leaks may occur, for example in semiconductor equipment, so that leaks can be checked in real time. The method according to the present invention sets a management point in advance and attaches a smart passive sensor to detect temperature or water leakage, thereby enabling the detection of a temperature change characteristic in real time while enabling leak detection. Accordingly, when a known thermoelectric (TC) sensor or a water leak sensor is applied, a separate communication line must be arranged, the unit price is high, and the problem of an increase in size or an increase in cost according to the use of a battery can be solved. In addition, the system according to the present invention enables the management of process parameters by installing a plurality of smart sensors at a point requiring measurement and transmitting detection information in real time.

Although the present invention has been described in detail with reference to the presented embodiments, those skilled in the art can make various modifications and modified inventions without departing from the technical spirit of the present invention with reference to the presented embodiments. . The present invention is not limited by such variations and modifications, but only by the claims appended hereto.

11: sensor group 11_1 to 11_N: smart sensor
12: reader module 13: relay module
31: sensor modules 31_1 to 31_N: sensor group
32: information data monitoring unit 33: process parameter detection unit
34: process control unit 35: position information unit
40: process equipment 41_1 to 41_K: process chamber
42: transport path 43: process material
44: reader unit 45: temperature data unit
46: temperature analysis unit 47: matching unit
48: process temperature control unit 50: storage area
51_1 to 51_L: supply tank 55: leak detection unit
57: process parameter setting unit 60: chamber
61: cleaning liquid supply tank 62: internal temperature data detection unit
63: temperature-process parameter correlation analysis unit
64: fine process point analysis unit 70: environmental equipment
71: supply tube 72: position temperature data unit
73: transfer section detection analysis unit 74: transfer liquid state detection unit
81: process furnace 82: heating unit
83: temperature monitoring unit 84: furnace temperature analysis unit
85: furnace condition detection unit 86: process control unit
91: process material 92: area temperature data unit
93: processor temperature data unit 94: processor-temperature correlation detection unit
141: operation detection server 142: management server
211: detection unit 212: operation chip
213a, 213b: patterned antenna 561: temperature analysis unit
562: operational analysis unit BT: boat

Claims (1)

a plurality of sensor groups 11 including at least one smart sensor 11_1 to 11_N whose operation is started by reception of an RF signal;
a reader module 12 for transmitting an RF signal to at least one smart sensor 11_1 to 11_N to initiate an operation, and receiving detection information from each smart sensor 11_1 to 11_N; and
a relay module 13 for transmitting the detection information received from the reader module 12 to an operation detection server (FDC) 141 or a management server 142;
Each of the at least one smart sensor 11_1 to 11_N includes a detection unit 211; working chip 212; And the detection unit 211 and the pattern antenna (213a, 213b) electrically connected to the label or sticker form, having a detachable attachment structure at any position of the measurement target by confirming the password transmitted from the reader module (12) It works in a harvesting way,
Each smart sensor of the plurality of sensor groups 11 is disposed at different locations of the measurement target to detect temperature information or leakage information in real time, and the location of each sensor group and each smart sensor belonging to each sensor group The correlation between the detection information and the process parameter according to the location of is detected by the process parameter detection unit 33 to control the process condition,
a location information unit 35 for identifying and storing the location of each sensor group and the location of each smart sensor belonging to each sensor group and having a unique address;
The plurality of sensor groups 11 include at least one process chamber 41_1 to 41_K, at least one supply tank 51_1 to 51_L, and a clean chamber 60 ; supply tube 71; Processing Furnace (81); Or a process factor management system by a smart sensor, characterized in that it is disposed on the process material (91).

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