KR20210077307A - Vibrating Actuator - Google Patents

Abstract

According to one embodiment of the present invention, provided is a vibration actuator capable of changing a resonance point, which includes: a first elastic unit whose rigidity is changed according to application of an electric field; a first electrode unit disposed above the first elastic unit; a second electrode unit disposed under the first elastic unit; a second elastic unit disposed under the second electrode unit and compressed according to the application of an electric field; and a third electrode unit disposed under the second electrode unit.

Description

Vibrating Actuator

The present invention relates to a vibration actuator, and more particularly, to a vibration actuator capable of changing a resonance point.

Vibration actuators are installed in recent portable electronic devices, virtual reality devices, training simulators, and the like to provide various and vivid tactile feedback to users.

The vibration actuator as described above includes various types such as an eccentric rotating mass (ERM), a linear resonant actuator (LRA), a piezoelectric device actuator, and an electroactive polymer actuator. There is this.

On the other hand, Korean Patent Publication No. 2019-0059259 discloses a shock-type vibration actuator having a permanent magnet inserted between stoppers and disposed to be surrounded by a linear guide, wherein the permanent magnet reciprocates according to voltage application. .

However, the shock-type vibration generating device as described above needs to have a separate stopper insertion part in the permanent magnet in order to insert the permanent magnet into the stopper, and the stopper inserted for each stopper insertion part according to the change in attractive force and repulsive force applied to the permanent magnet When the permanent magnet collides with it, an excessive impact may be applied to the permanent magnet.

Patent Publication No. 2019-0059259

An object of the present invention is to provide a vibration actuator capable of providing various vibrations to a user by changing a resonance point by applying an electric field to an elastic body.

A vibration actuator according to an embodiment of the present invention includes a first elastic part whose rigidity is changed according to application of an electric field, a first electrode part disposed on the first elastic part, and a lower part of the first elastic part. and a second electrode part, a second elastic part disposed under the second electrode part and compressed according to application of an electric field, and a third electrode part disposed under the second elastic part.

Preferably, the first electrode part and the second electrode part are connected to a first voltage applying part, and when a voltage is applied from the first voltage applying part, an electrostatic attraction between the first electrode part and the second electrode part This is generated and the first elastic part is compressed.

Preferably, the second electrode part and the third electrode part are connected to a second voltage applying part, and when a voltage is applied from the second voltage applying part, an electrostatic attraction between the second electrode part and the third electrode part This is generated and the second elastic part is compressed.

Preferably, the voltage applied to the first electrode part and the second electrode part is an alternating voltage, and according to the application and release of the voltage, the rigidity of the first elastic part is periodically changed, and the rigidity of the first elastic part is changed periodically. It is characterized in that the elastic modulus of the vibration actuator is periodically changed according to the change.

Preferably, the voltage applied to the second electrode part and the third electrode part is an alternating voltage, and compression and restoration of the second elastic part are periodically performed according to the application and release of the voltage, and the second elastic part is periodically performed. It is characterized in that the vibration actuator is periodically vibrated according to the compression or restoration of the negative.

A vibration actuator according to a second embodiment of the present invention includes a first elastic part whose rigidity is changed according to application of an electric field, a first electrode part disposed on the first elastic part, and a lower part of the first elastic part a second electrode part to be formed, a second elastic part disposed under the second electrode part and compressed according to application of an electric field, a third electrode part disposed under the second elastic part, both sides of the first elastic part, and the and a third elastic part disposed between the first electrode part and the second electrode part.

Preferably, the first electrode part and the second electrode part are connected to a first voltage applying part, and when a voltage is applied from the first voltage applying part, an electrostatic attraction between the first electrode part and the second electrode part is generated and the first elastic part and the third elastic part are compressed.

Preferably, the second electrode part and the third electrode part are connected to a second voltage applying part, and when a voltage is applied from the second voltage applying part, an electrostatic attraction between the second electrode part and the third electrode part This is generated and the second elastic part is compressed.

Preferably, the voltage applied to the first electrode part and the second electrode part is an alternating voltage, and according to the application and release of the voltage, the rigidity of the first elastic part is periodically changed, and the rigidity of the first elastic part is changed periodically. It is characterized in that the elastic modulus of the vibration actuator is periodically changed according to the change.

Preferably, the voltage applied to the first electrode part and the second electrode part is an alternating voltage, and compression and restoration of the third elastic part are periodically performed according to the application and release of the voltage, and the second elastic part is periodically performed. It is characterized in that the height of both sides of the first electrode part is periodically changed according to the compression or restoration of the part.

Preferably, the voltage applied to the second electrode part and the third electrode part is an alternating voltage, and compression and restoration of the second elastic part are periodically performed according to the application and release of the voltage, and the second elastic part is periodically performed. It is characterized in that the vibration actuator is periodically vibrated according to the compression or restoration of the negative.

A vibration actuator according to a third embodiment of the present invention includes a first elastic part whose rigidity is at least partially changed according to application of an electric field, a first electrode part disposed on the first elastic part, and the first elastic part A second electrode portion disposed under the second electrode portion, a second elastic portion disposed under the second electrode portion and compressed according to the application of an electric field, a third electrode portion and the first electrode portion disposed under the second elastic portion It is characterized in that it comprises at least one insulating portion formed therein.

Preferably, the first electrode part and the second electrode part are connected to a first voltage applying part, and when a voltage is applied from the first voltage applying part, between at least a part of the first electrode part and the second electrode part Electrostatic attraction is generated and at least a portion of the first elastic part is compressed.

Preferably, the second electrode part and the third electrode part are connected to a second voltage applying part, and when a voltage is applied from the second voltage applying part, an electrostatic attraction between the second electrode part and the third electrode part This is generated and the second elastic part is compressed.

Preferably, the insulating part divides the first electrode part into a plurality of sections, and a voltage is selectively applied to the plurality of sections of the first electrode part.

Preferably, the voltage applied to the first electrode part and the second electrode part is an alternating voltage, and the rigidity of at least a portion of the first elastic part is periodically changed according to the application and release of the voltage, and the first It is characterized in that the elastic modulus of the vibration actuator is periodically changed according to the change in the stiffness of the elastic part.

Preferably, the voltage applied to the second electrode part and the third electrode part is an alternating voltage, and compression and restoration of the second elastic part are periodically performed according to the application and release of the voltage, and the second elastic part is periodically performed. It is characterized in that the vibration actuator is periodically vibrated according to the compression or restoration of the negative.

According to the first to third embodiments of the present invention, the polarities of the first electrode part and the second electrode part are different from each other, and the polarities of the first electrode part and the third electrode part are the same.

According to the first to third embodiments of the present invention, at least one dielectric particle is disposed in the first elastic part.

According to the first to third embodiments of the present invention, the first electrode part, the second electrode part and the third electrode part are flexible electrodes.

According to an embodiment of the present invention, the resonance point of the vibration actuator is changed according to the change in the vibration and elastic modulus of the vibration actuator generated by the application of an electric field, thereby providing more various vibrations to the user.

1 is a view showing a vibration actuator according to an embodiment of the present invention.
2 is a view showing an operating principle of a vibration actuator according to an embodiment of the present invention.
3 is a view showing a change in the resonance point of the vibration actuator according to an embodiment of the present invention.
4 is a view showing a modified example of the vibration actuator according to an embodiment of the present invention.
5 is a view showing a vibration actuator according to a second embodiment of the present invention.
6 is a view showing a vibration actuator according to a third embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. First of all, it should be noted that in adding reference numerals to the components of each drawing, the same components are given the same reference numerals as much as possible even if they are indicated on different drawings. In addition, in describing the present invention, if it is determined that a detailed description of a related known configuration or function may obscure the gist of the present invention, the detailed description thereof will be omitted. In addition, preferred embodiments of the present invention will be described below, but the technical spirit of the present invention is not limited thereto and may be variously implemented by those skilled in the art without being limited thereto.

1 is a view showing a vibration actuator 100 according to an embodiment of the present invention, FIG. 2 is a view showing an operating principle of the vibration actuator 100 according to an embodiment of the present invention, and FIG. 3 is a view showing the present invention It is a view showing a change in the resonance point of the vibration actuator 100 according to an embodiment of the.

Referring to FIG. 1 , a vibration actuator 100 according to an embodiment of the present invention includes a first elastic part 10 whose rigidity is changed according to application of an electric field, and a first disposed on the first elastic part 10 . The electrode part 13, the second electrode part 14 disposed under the first elastic part 10, and the second elastic part 11 disposed under the second electrode part 14 and compressed according to the application of an electric field ) and a third electrode part 15 disposed under the second elastic part 11 .

Meanwhile, although not shown, the above-described vibration actuator 100 may be located in a housing, and the housing may be a non-magnetic material.

Also, the first elastic part 10 may be a type of electrorheological elastomers (ERE).

The above-described electrorheological elastomer may be a material having a property that an electric field is generated between an anode and a cathode by a voltage applied from the outside, and the viscosity or stiffness is changed according to the generated electric field.

As shown in FIG. 1 , inside the first elastic part 10, at least one particle (C) may be disposed in a widely spread form. In addition, the particle (C) in one embodiment of the present invention may be a dielectric particle.

The second elastic part 11 may be a type of dielectric elastomer.

The dielectric elastomer may refer to a material that is compressed and expanded in an area direction by applying a compressive force in a thickness direction when a voltage is applied to both ends of a dielectric film positioned between two electrodes.

In addition, the first electrode unit 13 , the second electrode unit 14 , and the third electrode unit 15 described above may be flexible electrodes that are easily deformable.

In addition, the polarities of the first electrode part 13 and the second electrode part 14 in an embodiment of the present invention may be different from each other, and the polarities of the first electrode part 13 and the third electrode part 15 are may be identical to each other. In addition, the first electrode part 13 and the third electrode part 15 may be an anode electrode, and the second electrode part 14 may be a cathode electrode, but is not limited thereto.

Referring to FIG. 2A , the first electrode part 13 and the second electrode part 14 may be electrically connected to the first voltage applying part 16 , and the second electrode part 14 and the third electrode part 14 may be electrically connected to each other. The electrode unit 15 may be electrically connected to the second voltage applying unit 17 . Here, FIG. 2A shows an initial state in which no voltage is applied to the vibration actuator 100 from the first voltage applying unit 16 and the second voltage applying unit 17 .

FIG. 2B shows a state in which a voltage is applied from the first voltage application unit 16 to the first electrode unit 13 and the second electrode unit 14 .

As shown in FIG. 2B , when a voltage is applied from the first voltage applying unit 16 to the first electrode unit 13 and the second electrode unit 14 , an electric field is generated, and accordingly, the first electrode unit Electrostatic attraction is generated between (13) and the second electrode part 14, so that the mutual distance between the particles (C) inside the first elastic part 10 may be shortened.

At this time, the rigidity of the first elastic part 10 may be changed due to the compression of the first elastic part 10 (the rigidity of the first elastic part 10 may be stronger than the initial state).

At this time, the voltage applied from the first voltage applying unit 16 may be an AC voltage, and when the rigidity of the first elastic unit 10 is increased, the elastic modulus of the vibration actuator 100 may also be increased.

Meanwhile, FIG. 2C shows a state in which voltage is applied from the second voltage applying unit 17 to the second electrode unit 14 and the third electrode unit 15 . Like the first voltage application unit 16 , the voltage applied from the second voltage application unit 17 may also be an AC voltage.

As shown in FIG. 2( c ), when a voltage is applied from the second voltage applying unit 17 to the second electrode unit 14 and the third electrode unit 15 , an electric field is generated, and accordingly, the second electrode unit ( 14) and the third electrode part 15 may generate an electrostatic attraction, so that the second elastic part 11 may be compressed.

In addition, as shown in FIG. 2( d ), the first electrode part 13 , the second electrode part 14 , and the third electrode part from the first voltage application part 16 and the second voltage application part 17 . When a voltage is applied to (15) at the same time, the stiffness of the first elastic part 10 (increasing the elastic modulus of the vibration actuator 100) and the compression of the second elastic part 11 can be simultaneously made.

At this time, if an AC voltage is applied from the first voltage applying unit 16 to the first electrode unit 13 and the second electrode unit 14 , the rigidity of the first elastic unit 10 is increased according to the application and release of the voltage. It may change periodically, and the elastic modulus of the vibration actuator 100 may also be changed periodically according to a change in the stiffness of the first elastic part 10 .

In addition, when an AC voltage is applied from the second voltage application unit 17 to the second electrode unit 14 and the third electrode unit 15 , the second elastic unit 11 is compressed and restored according to the application and release of the voltage. This may be done periodically, and the vibration actuator 100 may vibrate periodically according to compression or restoration of the second elastic part 11 .

At this time, the change period of the stiffness and the elastic modulus of the first elastic part 10 may vary depending on the frequency of the AC voltage applied to the first electrode part 13 and the second electrode part 14, and the first elastic modulus Changes in the stiffness and elastic modulus of the part 10 may vary depending on the strength of the voltage applied to the first electrode part 13 and the second electrode part 14 .

In addition, the compression and restoration cycle (vibration cycle of the vibration actuator 100) of the second elastic part 11 varies depending on the frequency of the AC voltage applied to the second electrode part 14 and the third electrode part 15. The magnitude of the compression amount and the restoration amount of the second elastic part 11 (vibration intensity of the vibration actuator 100) is the intensity of the voltage applied to the second electrode part 14 and the third electrode part 15 It may vary depending on

On the other hand, as described above, as the strength of the electric field applied to the first elastic part 10 increases, the rigidity of the first elastic part 10 may increase, so that the elastic modulus of the vibration actuator 100 may be increased.

When the modulus of elasticity of the vibration actuator 100 is increased, the vibration actuator 100 according to the vibration of the vibration actuator 100 generated by periodic compression or restoration of the second elastic part 11 as shown in FIG. 3 . The position of the resonance point of may be changed to a higher frequency position.

Therefore, it is possible to change the resonance point while periodically vibrating the vibration actuator 100 according to the generation period and strength of the electric field applied to the first elastic part 10 and the second elastic part 11, so that it is more convenient for the user. Various vibrations can be provided.

4 is a view showing a modified example of the vibration actuator 100 according to an embodiment of the present invention.

4, the second elastic part 11 of the vibration actuator 100 has a wavy shape as shown in FIG. 4(a), a groove structure as shown in FIG. 4(b), or FIG. 4(c). ) as shown in the sponge structure.

As described above, since the second elastic part 11 can be configured in various shapes and the center of gravity of each second elastic part 11 is different when the shape of the second elastic part 11 is changed, the second elastic part ( 11), the user can feel more various vibrations during compression and restoration.

5 is a view showing a vibration actuator 200 according to a second embodiment of the present invention.

Referring to FIG. 5 , the vibration actuator 200 according to the second embodiment of the present invention includes a first elastic part 20 whose rigidity is changed according to the application of an electric field, and is disposed on the first elastic part 20 . The first electrode part 23, the second electrode part 24 disposed under the first elastic part 20, and the second elastic part disposed under the second electrode part 24 and compressed according to the application of an electric field (21) and the third electrode part 25 and the first elastic part 20 disposed under the second elastic part 21, both sides and between the first electrode part 23 and the second electrode part 24 It may include a third elastic part 22 disposed.

The vibration actuator 200 according to the second embodiment of the present invention may be located in a housing (not shown) like the vibration actuator 100 according to the first embodiment, and the housing may be a non-magnetic material.

In addition, the first elastic part 20 may be a type of an electrorheological elastic body, similar to the first elastic part 10 of the first embodiment, and the second elastic part 21 and the third elastic part 22 are dielectric elastic bodies. It can be all day of

In addition, the first electrode part 23 , the second electrode part 24 , and the third electrode part 25 may be flexible electrodes that are easily deformable like the first embodiment.

In addition, the polarities of the first electrode part 23 and the second electrode part 24 in the second embodiment of the present invention may be different from each other, and the polarities of the first electrode part 23 and the third electrode part 25 may be different from each other. may be equal to each other. In addition, the first electrode part 23 and the third electrode part 25 may be an anode electrode, and the second electrode part 24 may be a cathode electrode, but is not limited thereto.

Referring to FIG. 5A , the first electrode part 23 and the second electrode part 24 may be electrically connected to the first voltage applying part 26 , and the second electrode part 24 and the third electrode part 24 may be electrically connected to each other. The electrode unit 25 may be electrically connected to the second voltage applying unit 27 . Here, FIG. 5A shows an initial state in which no voltage is applied to the vibration actuator 200 from the first voltage applying unit 26 and the second voltage applying unit 27 .

FIG. 5B shows a state in which a voltage is applied from the first voltage application unit 26 to the first electrode unit 23 and the second electrode unit 24 .

Meanwhile, unlike the vibration actuator 100 in the first embodiment, the vibration actuator 200 in the second embodiment is between both sides of the first elastic part 20 and the first electrode part 23 and the second electrode part 24 . It may further include a third elastic part 22 disposed on the.

As described later with this structure, the second elastic part 22 positioned between the second electrode part 24 and the third electrode part 25 repeats compression and restoration according to the application and release of the AC voltage. may cause vibration.

In addition, the elastic modulus of the first elastic part 20 positioned between the first electrode part 23 and the second electrode part 24 is periodically changed according to the application and release of the AC voltage, so that the vibration actuator 200 The resonance point may be changed, and the shape of the vibration actuator 200 may be changed according to compression and restoration of the third elastic part 22 .

In detail, as shown in FIG. 5B , when a voltage is applied from the first voltage applying unit 26 to the first electrode unit 23 and the second electrode unit 24 , an electric field is generated, and accordingly An electrostatic attraction is generated between the first electrode part 23 and the second electrode part 24 , so that the mutual distance between the particles C inside the first elastic part 20 may be shortened.

At this time, the rigidity of the first elastic part 20 may be changed due to the compression of the first elastic part 20 (the rigidity of the first elastic part 20 may be stronger than the initial state).

At this time, the voltage applied from the first voltage applying unit 26 may be an AC voltage, and when the rigidity of the first elastic unit 20 is increased, the modulus of elasticity of the vibration actuator 200 may also be increased.

In addition, as shown in FIG. 5B , when a voltage is applied from the first voltage application unit 26 to the first electrode unit 23 and the second electrode unit 24 , an electric field is generated, and accordingly, the first An electrostatic attraction may be generated between the electrode part 23 and the second electrode part 24 to compress the third elastic part 22 .

Meanwhile, as shown in FIG. 5( b ), the third elastic part 22 may be disposed on both sides of the first elastic part 20 . When the rigidity of the first elastic part 20 is increased according to the application of an electric field, the third elastic part 22 is The third elastic part 22 disposed on both sides of the first elastic part 20 may be compressed.

Accordingly, when a voltage is applied from the first voltage applying unit 26 to the first electrode unit 23 and the second electrode unit 24 , the first electrode unit 23 is compressed by the third elastic unit 22 . The positions of both side portions (the first electrode portion 23 disposed on the upper portion of the third elastic portion 22) may be lowered compared to the initial state of FIG. 5(a) .

Therefore, in the second embodiment of the present invention, when a voltage is applied from the first voltage applying unit 26 to the first electrode unit 23 and the second electrode unit 24 , the first elastic unit 20 vibrates due to a change in stiffness. While changing the resonance point of the actuator 200 , the shape of the vibration actuator 200 may be changed according to compression and restoration of the third elastic part 22 .

Meanwhile, although not shown, as shown in FIG. 2( c ) of the first embodiment, the vibration actuator 200 of the second embodiment also receives the second electrode part 24 and the third electrode from the second voltage applying part 27 . When a voltage is applied to the part 25 , an electric field is generated, and as a result, an electrostatic attraction is generated between the second electrode part 24 and the third electrode part 25 so that the second elastic part 21 can be compressed. have.

In addition, as shown in FIG. 2(d) of the first embodiment, the vibration actuator 200 of the second embodiment also receives the first electrode part 23 from the first voltage application unit 26 and the second voltage application unit 27 . ), when a voltage is simultaneously applied to the second electrode part 24 and the third electrode part 25, the rigidity of the first elastic part 20 (increase in the elastic modulus of the vibration actuator 200) and the second elastic part ( 21) and compression of the third elastic part 22 may be simultaneously performed.

At this time, when an AC voltage is applied from the first voltage applying unit 26 to the first electrode unit 23 and the second electrode unit 24 , the rigidity of the first elastic unit 20 is increased according to the application and release of the voltage. It may change periodically, and the elastic modulus of the vibration actuator 200 may also be changed periodically according to a change in the stiffness of the first elastic part 20 .

In addition, when an AC voltage is applied from the second voltage application unit 27 to the second electrode unit 24 and the third electrode unit 25 , the second elastic unit 21 is compressed and restored according to the application and release of the voltage. This may be done periodically, and the vibration actuator 200 may vibrate periodically according to compression or restoration of the second elastic part 21 .

In addition, when an AC voltage is applied from the first voltage application unit 26 to the first electrode unit 23 and the second electrode unit 24 , the third elastic unit 22 is compressed and restored according to the application and release of the voltage. This may be done periodically, and the height of both sides of the first electrode part 23 may be periodically changed according to the compression or restoration of the third elastic part 22 .

At this time, the period of change of the stiffness and the elastic modulus of the first elastic part 20 may vary depending on the frequency of the AC voltage applied to the first electrode part 23 and the second electrode part 24 , and the first elasticity Changes in the stiffness and elastic modulus of the part 20 may vary depending on the strength of the voltage applied to the first electrode part 23 and the second electrode part 24 .

In addition, the compression and restoration period of the second elastic part 21 (the vibration period of the vibration actuator 200 ) varies depending on the frequency of the AC voltage applied to the second electrode part 24 and the third electrode part 25 . The magnitude of the compression amount and the restoration amount of the second elastic part 21 (vibration intensity of the vibration actuator 200) is the intensity of the voltage applied to the second electrode part 24 and the third electrode part 25 It may vary depending on

In addition, the compression and restoration cycle of the third elastic part 22 (the shape change cycle of the vibration actuator 200 ) depends on the frequency of the AC voltage applied to the first electrode part 23 and the second electrode part 24 . may vary, and the magnitude of the compression amount and the restoration amount of the third elastic part 22 (the magnitude of the shape change of the vibration actuator 200 ) is the voltage applied to the first electrode part 23 and the second electrode part 24 . may vary depending on the age of

On the other hand, like the vibration actuator 100 of the first embodiment, as the strength of the electric field applied to the first elastic part 20 increases, the rigidity of the first elastic part 20 increases, so that the elastic modulus of the vibration actuator 200 increases. can be

When the modulus of elasticity of the vibration actuator 200 is increased, as shown in FIG. 3 , the vibration actuator 200 according to the vibration of the vibration actuator 200 generated by periodic compression or restoration of the second elastic part 21 . The position of the resonance point of may be changed to a higher frequency position.

In addition, in the vibration actuator 200 of the second embodiment, the height of both sides of the first electrode part 23 is changed by the electric field applied to the third elastic part 22, so compared to the vibration actuator 100 of the first embodiment The surface of the vibration actuator 200 may be felt more diversely.

Therefore, the vibration actuator 200 according to the second embodiment of the present invention is the vibration actuator 200 according to the generation period and the strength of the electric field applied to the first elastic part 20 and the second elastic part 21 . The resonance point can be changed while periodically vibrating the , and the shape of the vibration actuator 200 can be changed according to the generation period of the electric field applied to the third elastic part 22 and the strength of the electric field, so that the user can provide more diverse vibrations. may provide stimulation.

6 is a view showing a vibration actuator 300 according to a third embodiment of the present invention.

Referring to FIG. 6 , the vibration actuator 300 according to the third embodiment of the present invention includes a first elastic part 30 whose rigidity is changed according to the application of an electric field, and is disposed on the first elastic part 30 . The first electrode part 33, the second electrode part 34 disposed under the first elastic part 30, and the second elastic part disposed under the second electrode part 34 and compressed according to the application of an electric field 31 , and a third electrode part 35 disposed under the second elastic part 31 and at least one insulating part 38 formed in the first electrode part 33 .

The vibration actuator 300 according to the third embodiment of the present invention may be located in a housing (not shown) like the vibration actuator 100 according to the first embodiment, and the housing may be a non-magnetic material.

Also, like the first elastic part 10 of the first embodiment, the first elastic part 30 may be a type of an electrorheological elastic body, and the second elastic part 31 may be a type of dielectric elastic body.

In addition, the first electrode part 33 , the second electrode part 34 , and the third electrode part 35 may be flexible electrodes that are easily deformable like the first embodiment.

In addition, the polarities of the first electrode part 33 and the second electrode part 34 in the third embodiment of the present invention may be different from each other, and the polarities of the first electrode part 33 and the third electrode part 35 may be different from each other. may be equal to each other. In addition, the first electrode part 33 and the third electrode part 35 may be an anode electrode, and the second electrode part 34 may be a cathode electrode, but is not limited thereto.

Referring to FIG. 6A , the first electrode part 33 and the second electrode part 34 may be electrically connected to the first voltage applying part 36 , and the second electrode part 34 and the third electrode part 34 may be electrically connected to each other. The electrode part 35 may be electrically connected to the second voltage applying part 37 . Here, FIG. 6A shows an initial state in which no voltage is applied to the vibration actuator 300 from the first voltage applying unit 36 and the second voltage applying unit 37 .

FIG. 6B shows a state in which a voltage is applied from the first voltage application unit 36 to the first electrode unit 33 and the second electrode unit 34 .

Meanwhile, unlike the vibration actuator 100 in the first embodiment, the vibration actuator 200 in the third embodiment may further include at least one insulating part 38 formed in the first electrode part 33 . .

The insulating part 38 may divide the first electrode part 33 into a plurality of compartments, as shown in FIG. 6( a ), and includes a plurality of the first electrode parts 33 divided by the insulating part 38 . A voltage may be selectively applied to the section of , through the first voltage applying unit 36 .

In detail, as shown in FIG. 6B , a voltage is applied from the first voltage applying unit 36 to a part of the first electrode unit 33 divided into a plurality of sections and the second electrode unit 34 . When an electric field is generated, an electrostatic attraction is generated between a part of the first electrode part 33 and the second electrode part 34 to which a voltage is applied, and is located inside a part of the first elastic part 30 . The mutual spacing between the particles (C) may be shortened.

At this time, the rigidity of a portion of the first elastic portion 30 may be changed due to compression of a portion of the first elastic portion 30 (the stiffness of a portion of the first elastic portion 30 may be stronger than the initial state) ), and may be harder than the initial state.

At this time, the voltage applied from the first voltage applying unit 36 may be an AC voltage, and when the rigidity of a portion of the first elastic unit 30 is increased, the modulus of elasticity of the vibration actuator 300 may also be increased. .

In addition, in the case of the first elastic part 30 located below the first electrode part 33 to which the voltage is not applied from the first voltage applying part 36, the electric field is not applied, so the rigidity does not change, and thus the electric field is not applied. Compared to the applied first elastic part 30 , the rigidity may be relatively low and may be in a soft state.

Meanwhile, although not shown, as shown in FIG. 2C of the first embodiment, the vibration actuator 300 of the third embodiment also receives the second electrode part 34 and the third electrode from the second voltage applying part 37 . When a voltage is applied to the part 35, an electric field is generated, and as a result, an electrostatic attraction is generated between the second electrode part 34 and the third electrode part 35, so that the second elastic part 31 can be compressed. have.

In addition, as shown in Fig. 2(d) of the first embodiment, the vibration actuator 300 of the third embodiment also receives the first electrode part 33 from the first voltage application unit 36 and the second voltage application unit 37 . ), when a voltage is simultaneously applied to the second electrode part 34 and the third electrode part 35, the stiffness of a part of the first elastic part 30 (increase in the elastic modulus of the vibration actuator 300) and the second Compression of the two elastic parts 31 may be performed simultaneously.

At this time, when an AC voltage is applied from the first voltage applying unit 36 to a part of the first electrode part 33 and the second electrode part 34 , the first elastic part 30 is selected according to the application and release of the voltage. A portion of stiffness may be periodically changed, and the modulus of elasticity of the vibration actuator 300 may also be periodically changed according to a change in stiffness of a portion of the first elastic part 30 .

In addition, when an AC voltage is applied from the second voltage application unit 37 to the second electrode unit 34 and the third electrode unit 35 , the second elastic unit 31 is compressed and restored according to the application and release of the voltage. This may be done periodically, and the vibration actuator 300 may vibrate periodically according to compression or restoration of the second elastic part 31 .

At this time, in the case of the first elastic part 30 , which is stiffened (hardened) due to the application of an electric field, vibration generated by periodic compression and restoration of the second elastic part 31 is applied to the upper direction of the vibration actuator 300 . can be transmitted smoothly.

However, in the case of the first elastic part 30 whose rigidity is not changed (soft and soft) due to no application of an electric field, vibrations generated by periodic compression and restoration of the second elastic part 31 may be absorbed.

At this time, the change period of the stiffness and elastic modulus of a portion of the first elastic portion 30 to which the electric field is applied depends on the frequency of the AC voltage applied to the portion of the first electrode portion 33 and the second electrode portion 34 . and changes in the stiffness and modulus of some of the first elastic parts 30 may vary depending on the strength of the voltage applied to the first electrode part 33 and the second electrode part 34 .

In addition, the compression and restoration period of the second elastic part 31 (the vibration period of the vibration actuator 300 ) varies depending on the frequency of the AC voltage applied to the second electrode part 34 and the third electrode part 35 . The magnitude of the compression amount and the restoration amount of the second elastic part 31 (vibration intensity of the vibration actuator 300) is the intensity of the voltage applied to the second electrode part 34 and the third electrode part 35 It may vary depending on

On the other hand, like the vibration actuator 100 of the first embodiment, as the strength of the electric field applied to a part of the first elastic part 30 increases, the rigidity of the first elastic part 30 increases, so that the elastic modulus of the vibration actuator 300 is increased. can be increased.

When the modulus of elasticity of the vibration actuator 300 is increased, as shown in FIG. 3 , the vibration actuator 300 according to the vibration of the vibration actuator 300 generated by periodic compression or restoration of the second elastic part 31 . The position of the resonance point of may be changed to a higher frequency position.

Therefore, the vibration actuator 300 according to the third embodiment of the present invention is a vibration actuator according to the generation period and strength of the electric field applied to some of the first elastic part 30 and the second elastic part 31 ( 300) can be periodically vibrated to change the resonance point.

In addition, in the third embodiment of the present invention, the rigidity of the first elastic part 30 to which the electric field is not applied does not change, and accordingly, the first elastic part 30 to which the electric field is not applied absorbs vibrations, so the insulating part By selectively applying a voltage to a part or all of the first electrode part 33 partitioned by 38, the rigidity of a specific part of the first elastic part 30 is changed to provide a user with a more diverse vibration pattern. have.

The above description is merely illustrative of the technical idea of the present invention, and various modifications, changes, and substitutions are possible within the range that does not depart from the essential characteristics of the present invention by those of ordinary skill in the art to which the present invention pertains. will be. Accordingly, the embodiments disclosed in the present invention and the accompanying drawings are for explaining, not limiting, the technical spirit of the present invention, and the scope of the technical spirit of the present invention is not limited by these embodiments and the accompanying drawings. . The protection scope of the present invention should be construed by the following claims, and all technical ideas within the equivalent range should be construed as being included in the scope of the present invention.

100, 200, 300: Vibration actuator
10, 20, 30: first elastic part
11, 21, 31: second elastic part
22: third elastic part
13, 23, 33: first electrode part
14, 24, 34: second electrode part
15, 25, 35: third electrode part
16, 26, 36: first voltage applying unit
17, 27, 37: second voltage applying unit
38: insulation
C: particle

Claims (20)

a first elastic part whose rigidity is changed according to the application of an electric field;
a first electrode part disposed on the first elastic part;
a second electrode part disposed under the first elastic part;
a second elastic part disposed under the second electrode part and compressed according to the application of an electric field; and
and a third electrode part disposed under the second elastic part. The method of claim 1,
The first electrode part and the second electrode part are connected to a first voltage applying part,
When a voltage is applied from the first voltage applying part, an electrostatic attraction is generated between the first electrode part and the second electrode part, and the first elastic part is compressed. The method of claim 1,
The second electrode part and the third electrode part are connected to a second voltage applying part,
When a voltage is applied from the second voltage applying part, an electrostatic attraction is generated between the second electrode part and the third electrode part, and the second elastic part is compressed. 3. The method of claim 2,
The voltage applied to the first electrode part and the second electrode part is an alternating voltage,
The rigidity of the first elastic part is periodically changed according to the application and release of the voltage,
The vibration actuator, characterized in that the elastic modulus of the vibration actuator is periodically changed according to a change in the stiffness of the first elastic part. 4. The method of claim 3,
The voltage applied to the second electrode part and the third electrode part is an alternating voltage,
Compression and restoration of the second elastic part are periodically performed according to the application and release of the voltage,
Vibration actuator, characterized in that the vibration actuator is periodically vibrated according to the compression or restoration of the second elastic part. a first elastic part whose rigidity is changed according to the application of an electric field;
a first electrode part disposed on the first elastic part;
a second electrode part disposed under the first elastic part;
a second elastic part disposed under the second electrode part and compressed according to the application of an electric field;
a third electrode part disposed under the second elastic part; and
and a third elastic part disposed on both sides of the first elastic part and between the first electrode part and the second electrode part. 7. The method of claim 6,
The first electrode part and the second electrode part are connected to a first voltage applying part,
When a voltage is applied from the first voltage applying part, an electrostatic attraction is generated between the first electrode part and the second electrode part, and the first elastic part and the third elastic part are compressed. 7. The method of claim 6,
The second electrode part and the third electrode part are connected to a second voltage applying part,
When a voltage is applied from the second voltage applying part, an electrostatic attraction is generated between the second electrode part and the third electrode part, and the second elastic part is compressed. 8. The method of claim 7,
The voltage applied to the first electrode part and the second electrode part is an alternating voltage,
The rigidity of the first elastic part is periodically changed according to the application and release of the voltage,
The vibration actuator, characterized in that the elastic modulus of the vibration actuator is periodically changed according to a change in the stiffness of the first elastic part. 8. The method of claim 7,
The voltage applied to the first electrode part and the second electrode part is an alternating voltage,
Compression and restoration of the third elastic part are periodically performed according to the application and release of the voltage,
A vibration actuator, characterized in that the height of both sides of the first electrode part is periodically changed according to the compression or restoration of the second elastic part. 9. The method of claim 8,
The voltage applied to the second electrode part and the third electrode part is an alternating voltage,
Compression and restoration of the second elastic part are periodically performed according to the application and release of the voltage,
Vibration actuator, characterized in that the vibration actuator is periodically vibrated according to the compression or restoration of the second elastic part. a first elastic part whose rigidity is at least partially changed according to the application of an electric field;
a first electrode part disposed on the first elastic part;
a second electrode part disposed under the first elastic part;
a second elastic part disposed under the second electrode part and compressed according to the application of an electric field;
a third electrode part disposed under the second elastic part; and
and at least one insulating part formed in the first electrode part. 13. The method of claim 12,
The first electrode part and the second electrode part are connected to a first voltage applying part,
An electrostatic attraction is generated between at least a part of the first electrode part and the second electrode part when a voltage is applied from the first voltage applying part, and at least a part of the first elastic part is compressed. 13. The method of claim 12,
The second electrode part and the third electrode part are connected to a second voltage applying part,
When a voltage is applied from the second voltage applying part, an electrostatic attraction is generated between the second electrode part and the third electrode part, and the second elastic part is compressed. 13. The method of claim 12,
The insulating part divides the first electrode part into a plurality of compartments,
A vibration actuator, characterized in that a voltage is selectively applied to the plurality of sections of the first electrode part. 16. The method of claim 15,
The voltage applied to the first electrode part and the second electrode part is an alternating voltage,
The rigidity of at least a portion of the first elastic part is periodically changed according to the application and release of the voltage,
The vibration actuator, characterized in that the elastic modulus of the vibration actuator is periodically changed according to a change in the stiffness of the first elastic part. 15. The method of claim 14,
The voltage applied to the second electrode part and the third electrode part is an alternating voltage,
Compression and restoration of the second elastic part are periodically performed according to the application and release of the voltage,
Vibration actuator, characterized in that the vibration actuator is periodically vibrated according to the compression or restoration of the second elastic part. 13. The method of any one of claims 1, 6 and 12,
The first electrode part and the second electrode part have different polarities, and the first electrode part and the third electrode part have the same polarity. 13. The method of any one of claims 1, 6 and 12,
At least one dielectric particle is disposed in the first elastic part. 13. The method of any one of claims 1, 6 and 12,
The first electrode portion, the second electrode portion and the third electrode portion is a vibration actuator, characterized in that the flexible electrode.

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