KR20210032693A - Filter housing for filter auto change system - Google Patents

Abstract

The present invention relates to a filter housing used for an automatic filter replacement system to surely couple an upper housing with a lower housing. According to an embodiment of the present invention, the filter housing for an automatic filter replacement system receives a filter filtering chemical in the internal space thereof and has a cylindrical shape. The filter housing comprises: a lower housing having an inlet through which chemical to be filtered is introduced, having an outlet through which the chemical, which is introduced through the inlet to be filtered while passing the filter, is discharged, allowing the filter to be mounted therein, and fixed to a base frame of the automatic filter replacement system; and an upper housing detachably coupled to the lower housing, allowing an upper surface to be coupled to an elevating frame provided in the automatic filter replacement system so that the upper housing is lifted when the elevating frame is lifted and separated from the lower housing, and lowered when the elevating frame is lowered and coupled to the lower housing. When coupled to the lower housing, the upper housing presses the lower housing with a predetermined pressing force.

Description

Filter housing for filter auto change system

The present invention relates to a filter housing for filtering out chemical impurities, and more particularly, to a filter housing used in an automatic filter replacement system.

In semiconductor factories and chemical factories, various types of chemicals are used in large quantities. Here, the chemical includes liquid substances such as hydrofluoric acid, sulfuric acid, hydrochloric acid, ammonia, hydrogen peroxide, plating solution, photoresist, developer, etc., or paste substances such as slurry used for chemical mechanical polishing (CMP).

These chemicals often contain components that are harmful to the human body or the environment, and are stored in containers such as tanks or drums, transported by tank lorries or trucks, and supplied to factories. On the other hand, these factories often require high cleanliness.

Therefore, when supplying the transported chemicals to the production equipment of semiconductors or chemical products of a factory, it is common to provide a chemical supply equipment separated from the production equipment and connect a chemical storage container to the supply equipment.

Chemical supply facilities are typically installed in the form of booths outside or inside the exterior walls of buildings that make up the production facilities. In addition, the chemical supply facility is equipped with a pipe that supplies chemicals to each production line of the production facility, a pump, and a valve for opening and closing these pipes, and a filter that filters impurities of the supplied chemical. There are cases.

As described above, since these chemicals contain many components that are harmful to the human body or the environment, when the chemical storage container is connected to the chemical supply facility to supply the chemical to the production facility, or when the supplied storage container is separated from the chemical supply facility, or When replacing the exhausted filter, careful attention should be paid to prevent accidents such as leakage of chemicals or exposure of workers to chemicals, and workers must wear fireproof clothing.

As described above, the chemical supply operation is a very cumbersome and dangerous operation, and in recent years, its automation has been promoted. In particular, a system for automatically exchanging filters has appeared, such as in Registered Patent Publication No. 10-1969466. The patent is an automatic filter replacement system applied and registered by the present applicant, and the automatic filter replacement system automatically replaces the waste filter existing in the filter housing with a new filter.

The filter housing included in the automatic filter replacement system is divided into an upper housing and a lower housing so as to be automatically closed by an opening/closing mechanism, and the upper housing is fixed to the lifting frame. In this way, while the upper housing is fixed to the lifting frame, when the lifting frame is raised, the upper housing is raised together to open the filter housing, and the filter accommodated in the filter housing is exposed to the outside. With the filter housing open, the filter replacement unit discharges the old filter (i.e., waste filter) from the inside of the filter housing, and mounts a new filter on the filter housing. When the new filter is mounted, the elevating frame is lowered and the upper housing is thus positioned above the lower housing.

The upper housing is located on the lower housing so that the upper housing and the lower housing are coupled, but there should not be a gap between the upper housing and the lower housing. However, when the chemical is supplied into the filter housing, the upper housing rises upward due to pressure or the like, a fine gap is generated between the upper housing and the lower housing, and there is a possibility that the chemical leaks through the fine gap.

Patent Document 1: Registered Patent Publication No. 10-1969466

The present invention has been proposed to solve this problem, and an object of the present invention is to provide a filter housing capable of more reliably coupling an upper housing and a lower housing in an automatic filter exchange system.

In addition, an object of the present invention is to provide a filter housing that can be more reliably and stably coupled with a lifting frame in an automatic filter exchange system.

Other objects and advantages of the present invention can be understood by the following description, and will be more clearly understood by examples of the present invention. In addition, it will be easily understood that the objects and advantages of the present invention can be realized by the means shown in the claims and combinations thereof.

According to the present invention for achieving the above object, the filter housing for an automatic filter replacement system, which accommodates a filter for filtering chemicals in an inner space and has a cylindrical shape, includes an inlet through which a chemical to be filtered is introduced, and through the inlet. A lower housing having an outlet through which the filtered chemical flows out while flowing through the filter, the filter mounted thereon, and fixed to a base frame of an automatic filter replacement system; And detachably coupled to the lower housing, and the upper surface is coupled to the elevating frame provided in the filter automatic replacement system to rise together when the elevating frame ascends to separate from the lower housing, and when the elevating frame descends. It includes an upper housing lowered together and coupled to the lower housing. At this time, the upper housing, when combined with the lower housing, presses the lower housing with a predetermined pressing force.

The upper surface of the upper housing may be coupled to the lifting frame through a bracket.

At least the upper surface of the upper housing may be made of synthetic resin, and a plurality of fastening holes to which the bracket is coupled by a metal bolt or male screw may be formed on the upper surface of the upper housing. A metal nut or female screw corresponding to the bolt or male screw may be inserted into each of the plurality of fastening holes by insert molding.

The nut or female screw may be formed of a heli-coil.

One or more coupling grooves having a predetermined depth and width are formed on the outer circumferential surface of the upper housing, and the lifting frame and the upper housing may be additionally coupled to each other through a fastening member surrounding the outer surface of the coupling groove.

The upper housing and the lower housing may be detachably coupled by one or more clamps.

When the first clamp disposed on the first side of the automatic filter replacement system and the second clamp disposed on the second side of the automatic filter replacement system move horizontally in the housing direction, the upper housing and the lower housing may be coupled, and When the first clamp and the second clamp horizontally move in a direction opposite to the housing, the upper housing and the lower housing may be separated.

A pipe fitting may be integrally formed at each of the inlet and outlet of the lower housing.

A plurality of fixing holes may be formed on a lower surface of the lower housing, and the lower housing may be fixed to the base frame through fastening between the fixing holes and the base frame.

According to the present invention, the upper surface of the filter housing is coupled to the lifting frame, and when chemicals are filtered in the filter housing, the upper housing is pressed downward to more strongly couple the upper housing and the lower housing. As a result, chemical leakage can be prevented.

According to the present invention, a metal nut or female screw is inserted into a fastening hole formed on the upper surface of a filter housing made of synthetic resin, and the upper housing is coupled to the lifting frame through a metal fastening member (eg, bolt or male screw) in the fastening hole. As a result, when a fastening member made of a metal material is fastened to the filter housing made of a synthetic resin, damage to the filter housing can be prevented and a stable coupling can be maintained.

In addition, according to the present invention, one or more coupling grooves that can be additionally coupled to the lifting frame are formed on the outer surface of the filter housing, and further coupled to the lifting frame through the coupling groove, the coupling between the filter housing and the lifting frame is further improved. It has the advantage of being strong and sure.

In addition, according to the present invention, the filter more easily by forming the lower housing so that the chemical input pipe and the chemical discharge pipe are directly connected to the lower housing without using an intermediate part (i.e., a pipe fitting) for connecting the pipe and the filter housing. The housing can be installed in the filter auto-replacement system.

The following drawings attached to the present specification illustrate preferred embodiments of the present invention, and serve to further understand the technical idea of the present invention along with specific details for carrying out the present invention, so the present invention is described in such drawings. It is limited to the matters and should not be interpreted.
1 is a perspective view of a filter housing according to an embodiment of the present invention.
2 is a cross-sectional view of the filter housing shown in FIG. 1.
3 is a perspective view of an upper housing among the filter housings shown in FIG. 1.
4 is a front view of FIG. 3.
5 is a plan view of FIG. 3.
6 is a perspective view showing a state in which the upper housing is coupled to the lifting frame through a bracket and a fastening member.
7 is a side view of FIG. 6.
FIG. 8 is a rear view of FIG. 6 with the lifting frame omitted.
9 and 10 are views showing a state before and after the upper housing and the lower housing are coupled.

The above-described objects, features, and advantages will become more apparent through the following detailed description in connection with the accompanying drawings, whereby those of ordinary skill in the technical field to which the present invention pertains can easily implement the technical idea of the present invention. There will be. In addition, in describing the present invention, when it is determined that a detailed description of a known technology related to the present invention may unnecessarily obscure the subject matter of the present invention, a detailed description thereof will be omitted. Hereinafter, a preferred embodiment according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view of a filter housing according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view thereof.

1 and 2, the filter housing 100 for a filter automatic replacement system according to an embodiment of the present invention has an internal space 115 for accommodating a filter F therein, and the filter F ) Through the inlet 122 is filtered and discharged to the outlet 123.

The filter (F) has a substantially cylindrical shape, and the inner space 115 of the filter housing 100 has a basic cylindrical shape so that the filter F is erected and accommodated, the width of the inner space 115 in the horizontal direction. The length in the vertical direction and is formed slightly larger than the diameter and length of the filter (F), respectively. In addition, as shown in FIG. 2, a plurality of ribs 114 protruding toward the center from the inner wall of the inner space 115 are formed on the upper portion of the inner space 115, so that the filter F is When accommodated in (115), it should be stably fixed.

The filter housing 100 includes an upper housing 110 and a lower housing 120 that are separable from each other. In addition, when the upper housing 110 and the lower housing 120 are coupled (closed), the filter housing 100 includes a sealing means 130 such as an O-ring that seals the upper housing 110 and the lower housing 120. ).

A seating area in which the filter F can be mounted is formed on the upper surface of the lower housing 120. In addition, a plurality of fixing holes 121 are formed on the lower surface of the lower housing 120 so as to be fixed on the base frame (not shown in the drawing) of the filter automatic exchange system. The fixing holes 121 may be formed at four corners of the lower surface of the lower housing 120, respectively. A stud bolt is inserted into the fixing hole 121 of the lower housing 120 to be combined with the base frame (not shown in the drawing) of the filter automatic exchange system, or various fastening members such as bolts/nuts, etc. It is coupled to the base frame through the lower housing 120 may be fixed on the base frame. As the lower housing 120 is coupled to the base frame, it is fixed without moving when the system is in operation.

In addition, an inlet 122 through which chemicals are introduced is formed on one side of the lower housing 120, and an outlet 123 through which filtered chemicals flow is formed on the other side of the lower housing 120. A pipe fitting 122a is integrally formed at the inlet 122 of the lower housing 120. Likewise, a pipe fitting 123a is integrally formed at the outlet 123 of the lower housing 120. In other words, when the lower housing 120 is injection-molded, the pipe fitting 122a of the inlet 122 and the pipe fitting 122a of the outlet 123 are integrally injection-molded with the lower housing 120.

In this way, as the pipe fitting 122a of the inlet 122 and the pipe fitting 123a of the outlet 123 are integrally formed in the lower housing 120, a chemical The input pipe (not shown in the drawing) may be directly coupled to the inlet 122, and the chemical discharge pipe (not shown in the drawing) may be directly coupled to the outlet port 123. That is, in the conventional automatic filter exchange system, in order to connect the filter housing to each of the chemical input pipe and the chemical discharge pipe, the inlet of the filter housing and one end of the first pipe fitting are coupled, and the other end of the first pipe fitting is connected to the chemical input pipe. In addition, the outlet of the filtering housing and one end of the second pipe fitting were coupled, and the other end of the second pipe fitting had to be coupled with the chemical discharge pipe. On the other hand, if the filter housing 100 according to the present invention is used, the chemical inlet pipe can be directly coupled to the inlet 122, and the chemical outlet pipe can be directly coupled to the outlet 123, so that labor in the coupling process This is reduced and the bonding becomes easier.

Meanwhile, the upper housing 110 has a cylindrical shape and includes a plurality of fastening holes 111 formed on an upper surface and one or more engaging grooves 113a and 113b formed on an outer surface. In addition, a cleaning liquid or dry gas inlet 112 may be formed at the upper end of the upper housing 110.

3 is a perspective view of an upper housing according to an embodiment of the present invention, FIG. 4 is a front view thereof, and FIG. 5 is a plan view thereof. In addition, FIG. 6 is a perspective view showing a state in which the upper housing is coupled to the lifting frame through brackets and fastening means, FIG. 7 is a side view thereof, and FIG. 8 is a rear view showing the lifting frame omitted.

1 to 8, a cleaning liquid or dry gas inlet 112 is formed at the upper end of the upper housing 110, and a cleaning liquid or dry gas inlet tube (shown in the drawing) is formed in the inlet 112. Not) is connected. The cleaning liquid or dry gas introduction pipe drains the chemicals remaining in the internal space 115 before replacing the filter F, and cleans and dry the inside of the filter housing 100 before installing a new filter after removing the waste filter. As a pipe used in the case, a cleaning liquid or a dry gas such as nitrogen is supplied to the inner space 115 of the filter housing 100 through an inlet 112 connected to the cleaning liquid or dry gas introduction pipe.

A plurality of fastening holes 111 are formed on the upper surface of the upper housing 110. The plurality of fastening holes 111 are fastened to the bracket 210 of the lifting frame 240 through fastening members such as bolts or male screws. The upper surface of the bracket 210 and the upper housing 110 are fastened so that the upper housing 110 can apply a predetermined pressing force to the lower housing 120 in a state in which the upper housing 110 and the lower housing 120 are coupled. do.

The upper housing 110 and the bracket 210 of the lifting frame 240 are coupled to each other by a metal bolt or male screw. However, when the filter housing is made of a synthetic resin material such as PVC (Poly Vinyl Chloride), and the upper housing and the bracket 210 of the elevating frame 240 are coupled using a metal bolt or male screw, the upper housing 110 This can be damaged. In particular, the bracket 210 of the lifting frame 240 presses the filter housing 100 for a long period of time, or the vibration according to the operation of the pump is repeated for a long time when filtering, or the upper housing 110 by the lifting frame 240 when the filter is replaced. ) Is repeatedly lifted, the stress applied to the upper housing 110 made of synthetic resin by a metal bolt or male screw accumulates and the fastening hole 111 of the upper housing 110 is damaged, and the upper housing 110, furthermore the filter housing (100) may no longer be available.

According to an embodiment of the present invention, a nut 111a or a female thread 111a made of a metal material is inserted into each of the fastening holes 111 by insert injection molding. Particularly, preferably, the metal nut 111a or the female screw 111a is made of a metal heli-coil in the form of a coil. Accordingly, when the upper surface of the upper housing 110 and the bracket 210 of the lifting frame 240 are fastened to each other through a fastening member (for example, a bolt or a male screw), the fastening member is a metal nut 111a or a female screw ( It is combined with the heli-coil) 111a and does not directly contact the upper housing made of synthetic resin, so that damage to the upper housing 110 is caused in the process of coupling the bracket 210 and the upper housing 110 through the fastening member. Is prevented.

In addition, at least one coupling groove (113a, 113b) having a predetermined width (W) and depth is formed on the outer surface of the upper housing (110), and a fastening member that surrounds and couples the outer surface of each coupling groove (113a, 113b). Through this, the lifting frame 240 and the upper housing 110 may be additionally coupled. The upper housing 110 may be coupled to clamps 220 and 230, which are fastening members surrounding the outer surfaces of the coupling grooves 113 and 113b, and fixed to the lifting frame.

6 to 8, the upper surface of the upper housing 110 is fastened with the bracket 210 of the lifting frame 240, and the bolt inserted into the fastening hole 211 on the side of the bracket 210 is lifted. By combining the main body (not shown in the drawing) of the frame 240 and the bracket 210, the upper housing 110 and the elevating frame 240 are coupled. In addition, clamps 220 and 230 are fastened to the coupling grooves 113a and 113b formed on the outer surface of the upper housing 110, and the bolts inserted into the fastening holes 221 and 231 of the clamps 220 and 230 are elevating frames. By coupling 240 and the clamps 220 and 230, the upper housing 110 and the lifting frame 240 are additionally coupled.

When the upper housing 110 is coupled to the elevating frame 240 through the bracket 210 and the clamps 220 and 230, the upper housing 110 can rise or descend together with the elevating frame 240. That is, when the lifting frame 240 rises, the upper housing 110 coupled with the lifting frame 240 also rises, and when the lifting frame 240 descends, the upper housing 110 also descends.

Meanwhile, the upper housing 110 and the lower housing 120 may be detachably coupled by one or more clamps.

9 and 10 are views showing a state before and after the upper housing and the lower housing are coupled.

9 and 10, the filter automatic exchange system includes a first clamp 250 and a second clamp 260 for coupling the upper housing 110 and the lower housing 120. In addition, the automatic filter replacement system includes a first horizontal moving member 270a for horizontally moving the first clamp 250 and a second horizontal moving member 270b for horizontally moving the second clamp 260. . The first clamp 250 is located on the first side and includes a first support member 251 having a shape of'└' and a first coupling member 252 coupled to a lower surface of the first support member 251, and , The second clamp 260 includes a second support member 261 located on the second side and having a'┘' shape, and a second coupling member 262 coupled to a lower surface of the second support member 261. .

One side of the first support member 251 is coupled to the first horizontal moving member 270a, so that the first clamp 250 moves with the housing 100 according to the horizontal movement of the first horizontal moving member 270a. It may move in the direction of the housing closer or in the opposite direction away from the housing 100. In addition, one side of the second support member 261 is coupled with the second horizontal moving member 270b, so that the second clamp 260 is moved to the housing 100 according to the horizontal movement of the second horizontal moving member 270b. ) Or in the opposite direction. Each of the inner surface of the first coupling member 252 and the inner surface of the second coupling member 262 is a semicircle so that the upper housing 110 and the lower housing 120 can be fixed by clamping the contact portion (a) in contact with each other. Has a shape. The first coupling member 252 and the second coupling member 262 are disposed in an automatic filter exchange system so that they can be horizontally moved in the direction of the contact portion (a).

The first clamp 250 and the second clamp 260 having such a structure operate in pairs with each other. That is, when separation of the upper housing 110 and the lower housing 120 is required to replace the filter (F), the first horizontal moving member 270a and the second horizontal moving member 270b are horizontally opposite to the housing. And thus, the first clamp 250 and the second clamp 260 do not come into contact with both the upper housing 110 and the lower housing 120, as shown in FIG. Direction). On the other hand, when the combination of the upper housing 110 and the lower housing 120 is required, the first horizontal moving member 270a and the second horizontal moving member 270b move horizontally in the inward direction (ie, the housing direction). And, accordingly, the first clamp 250 and the second clamp 260 wrap around and fix the contact portion (a) between the upper housing 110 and the lower housing 120 as shown in FIG. 110) and the lower housing 120 are clamped. By clamping the first clamp 250 and the second clamp 260, the coupling between the upper housing 110 and the lower housing 120 is maintained more strongly.

In the filter automatic replacement system to which the filter housing 100 configured as described above is applied, when the upper housing 110 rises together and is separated from the lower housing 120 by the rise of the lifting frame 240, the lower housing 120 The waste filter mounted on) is exposed to the outside so that the waste filter is recovered and a filter replacement operation is performed in which a new filter is mounted on the lower housing 120. When the new filter is mounted on the lower housing 120, the upper housing 110 is lowered again by the lowering of the elevating frame 240, and the upper housing 110 is in close contact with the lower housing 120 so that the interior space 115 ) To seal. In addition, the first clamp 250 and the second clamp 260 horizontally move in the direction of the filter housing and clamp the upper housing 110 and the lower housing 120 to each other, and the upper housing 110 and the lower housing 120 Keeps the bonds stronger.

As described above, in a state in which the upper housing 110 and the lower housing 120 are coupled, the upper housing 110 may apply a predetermined pressing force to the lower housing 120, so that the bracket 210 and the upper The upper surface of the housing 110 is fastened. In addition, in a state in which the upper housing 110 and the lower housing 120 are coupled to each other, the elevating frame 240 generates a predetermined lowering force so that a predetermined pressing force is applied to the lower housing 120. The lowering force is transmitted to the upper housing 110 through the bracket 210 and clamps 220 and 230, and accordingly, the upper housing 110 presses the lower housing 120 with a predetermined pressing force, and the upper housing 110 The coupling state between the and the lower housing 120 is stably maintained. In addition, the upper housing 110 and the lower housing 120 are clamp-coupled, so that the coupling state between the upper housing 110 and the lower housing 120 is more stably maintained.

The present invention described above, for those of ordinary skill in the art to which the present invention pertains, various substitutions, modifications and changes are possible within the scope of the technical spirit of the present invention. It is not limited by the drawings.

100: filter housing 110: upper housing
111: fastening hole 112: cleaning liquid or dry gas inlet
113a, 113b: coupling groove 114: rib
115: inner space 120: lower housing
121: fixing hole 122: inlet
122a: piping fitting 123: outlet
123a: pipe fitting 130: sealing means
210: bracket 220, 230: clamp
240: lifting frame 250: first clamp
251: first support member 252: first coupling member
260: second clamp 261: first support member
262: second coupling member 270a, 270b: horizontal moving member

Claims (9)

As a filter housing for an automatic filter replacement system, having a cylindrical shape and accommodating a filter for filtering chemicals in the inner space,
A lower housing having an inlet through which a chemical to be filtered is introduced, and an outlet through which the filtered chemical is discharged while flowing through the inlet and passing through the filter, the filter being mounted, and fixed to a base frame of an automatic filter replacement system; And
It is detachably coupled to the lower housing, and the upper surface is coupled to the elevating frame provided in the filter automatic replacement system, so that when the elevating frame rises, it rises together and separates from the lower housing, and when the elevating frame descends It includes an upper housing lowered and coupled to the lower housing,
The upper housing,
When combined with the lower housing, the filter housing for automatic filter replacement system, characterized in that pressing the lower housing with a predetermined pressing force. The method of claim 1,
A filter housing for an automatic filter replacement system, characterized in that the upper surface of the upper housing is coupled to the elevating frame through a bracket. The method of claim 2,
At least the upper surface of the upper housing is made of synthetic resin,
A plurality of fastening holes are formed on the upper surface of the upper housing to which the bracket is coupled by a metal bolt or male screw,
A filter housing for an automatic filter replacement system, wherein a metal nut or female thread corresponding to the bolt or male screw is inserted into each of the plurality of fastening holes by insert molding. The method of claim 3,
The nut or the female thread is a filter housing for automatic filter replacement system, characterized in that made of a heli-coil. The method of claim 1,
One or more coupling grooves having a predetermined depth and width are formed on the outer circumferential surface of the upper housing,
Filter housing for automatic filter replacement system, characterized in that the lifting frame and the upper housing are additionally coupled to each other through a fastening member surrounding the outer surface of the coupling groove. The method of claim 1,
The filter housing for an automatic filter replacement system, characterized in that the upper housing and the lower housing are detachably coupled by one or more clamps. The method of claim 6,
When the first clamp disposed on the first side of the automatic filter replacement system and the second clamp disposed on the second side of the automatic filter replacement system move horizontally in the housing direction, the upper housing and the lower housing are coupled, When the first clamp and the second clamp horizontally move in a direction opposite to the housing, the upper housing and the lower housing are separated. The method of claim 1,
A filter housing for an automatic filter replacement system, characterized in that a pipe fitting is integrally formed at each of the inlet and outlet of the lower housing. The method of claim 1,
A filter housing for an automatic filter replacement system, characterized in that a plurality of fixing holes are formed on a lower surface of the lower housing, and the lower housing is fixed to the base frame through fastening between the fixing holes and the base frame.

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