KR20210026365A - Drop prevention apparatus using magnetic force in scribe head for dividing substrate - Google Patents

Abstract

The present invention relates to a fall prevention device for a substrate parting scribe head using magnetics.The fall prevention device for a substrate parting scribe head using magnetics comprises: a housing; a drive part mounted in the housing; an elevation unit which receives power transmitted from the drive part to move up and down; and a magnetic levitation part which applies upward magnetic levitation force to the elevation unit to prevent the elevation unit from falling when the drive part cannot operate. Accordingly, the fall prevention device for a substrate parting scribe head using magnetics is configured to provide elevation return force which is always equal in magnification by using the principle of magnetic levitation, so reliability is correspondingly good, the operation is superior in precision and can be greatly increased in efficiency, and no noise etc., is generated. Moreover, there is no variation in output in spite of long-period use, and there is no problem caused in terms of hysteresis to provide semi-permanent use. In addition, since a plane including a guide part for guiding the elevation of the elevation unit passes through a central axis of a ball screw, an eccentric force is not applied to the ball screw, so that precise control of a parting wheel is possible.

Description

Fall prevention device of scribe head for substrate division using magnetic {DROP PREVENTION APPARATUS USING MAGNETIC FORCE IN SCRIBE HEAD FOR DIVIDING SUBSTRATE}

The present invention relates to a device for preventing the fall of a scribe head for dividing a substrate, and more particularly, a lifting unit installed in the scribe head is magnetically lifted so that it is always floated using magnetic force, and in an emergency. The present invention relates to a fall prevention device for a scribe head for dividing a substrate using a magnetic that prevents free fall of an elevating unit.

A scribe apparatus is used as a dividing apparatus for dividing various brittle material substrates including glass thin plates into required sizes.

In general, a scribe device for dividing a substrate, etc. has a disc-shaped dividing wheel that runs on a substrate, and a dividing wheel that rolls while applying a load while the dividing wheel is press-welded to the substrate surface. It has a structure that allows scribe lines to be formed on the surface of the substrate. The scribe line is a notched groove remaining on the surface of the substrate, and is a division line that is divided when a bending force is applied to the substrate.

The dividing wheel is installed at the lower end of the scribe head so as to be capable of rolling, and repeatedly descends and ascends in the vertical direction by the action of a servo motor and a ball screw. A head 10 of a conventional scribing device is shown in Figs. 1A and 1B.

1A and 1B are views for explaining the problems of the conventional scribe head 10, and FIG. 1A is a state in which the dividing wheel 18 is raised, and FIG. 1B is that the dividing wheel 18 is lowered to come into contact with the upper surface of the substrate A. State.

As shown, the conventional scribe head 10 includes a housing 12, a servo motor 11, a coupling 13, a ball screw 14, a lifting unit 15, a tip holder 17, and a dividing wheel. (18), a tension spring (16) is provided.

The housing 12 operatively accommodates and supports the above components, and includes a vertical plate 12a, an upper plate 12b and a lower plate 12c fixed to the upper and lower portions of the vertical plate 12a, respectively. It is configured, and is connected to the main body of the scribe device (not shown).

The servomotor 11 fixed to the top plate 12b operates by a control signal transmitted from the outside to transmit rotational torque to the coupling 13, and the coupling 13 controls the rotational force of the servomotor 11 Receive it and rotate the ball screw (14) axially.

The lifting unit 15 has a screw holder 15a that meshes with the ball screw 14 and is moved up and down depending on the axial rotation of the ball screw 14.

1A is a state in which the lifting unit 15 is located at the top dead center, and FIG. 1B is a view at the bottom dead center.

The tip holder 17 and the dividing wheel 18 are mounted on the lower part of the lifting unit 15, and move up and down at the same time as the lifting unit 15 at the lower part of the lower plate 12c. When the lifting unit 15 rises, the dividing wheel 18 also rises as shown in FIG. 1A, and when the lifting unit 15 descends, the dividing wheel 18 also descends to come into contact with the surface of the waiting substrate A.

In addition, the tension spring 16, its upper end is connected to the upper hook portion (12d) of the upper plate (12b), the lower end is connected to the bracket (15b) of the lifting unit (15), the lifting unit (15) is always upward It plays a role of elastic support. That is to say, the lifting unit 15 is always pulled upwards, and the lifting unit 15 is operated to raise and return the lifting unit 15 to the top dead center.

The reason for applying the tension spring 16 is to reduce the load burden of the lifting unit 15 transmitted to the servomotor 11 and to prevent the lifting unit 15 from falling freely for abnormal reasons such as in an emergency. For example, if the power delivered to the servomotor 11 in operation is suddenly cut off due to a power failure or other reasons during operation, the elevating unit 15 falls freely due to its own weight, and this situation is prevented in advance. For.

That is, when the lifting unit 15 in operation freely falls for an abnormal reason, the tip holder 17 and the dividing wheel 18 freely fall vertically and are damaged by impact, as well as the substrate A waiting at the bottom. If present, there is a problem in that the defect rate of the substrate is increased due to the fact that the dividing wheel 18 momentarily descends against the substrate and the substrate is broken.

So, although a tension spring was applied to solve such a problem, in the conventional tension spring 16, the intrinsic elasticity of the spring itself changes according to the elevating position of the elevating unit 15, limiting fine load adjustment. There is, accordingly, has a large disadvantage that the thrust of the scribe head 10 cannot be stably secured. In addition, as the tension spring is used for a long time, it increases slightly due to the characteristics of the spring, causing a hysteresis problem.

Korean Patent Publication No. 10-1251896 (Scribing device for thin-film solar cells) Korean Patent Publication No. 10-2012-0009400 (scribe head) Korean Patent Publication No. 10-2019-0054226 (Multifunctional scribe head and scribe method using the same)

The present invention was created to solve the above problems, and the elastic force does not change even if it is used repeatedly for a long period of time, so that the precision of the operation is maintained as it is for the first time. An object of the present invention is to provide a fall prevention device using a magnetic in the scribe head for dividing the substrate, which has excellent operation accuracy of the dividing wheel because no eccentric force is applied, and stably secures the thrust of the scribe head.

The device for preventing the fall of the scribe head for dividing a substrate according to an embodiment of the present invention as a means of solving the problems for achieving the above object includes a housing, a driving unit mounted on the housing, and receiving power from the driving unit in a vertical direction. And a magnetic levitation unit configured to prevent a free fall of the elevating unit when the driving unit is inoperable by applying an upward magnetic levitation force to the lifting unit.

In addition, the elevating unit includes an elevating body having a passage extending in the vertical direction, the magnetic levitation portion, a fixed rod fixed to the housing and extending upward through the passage, and installed inside the passage And, it may be provided with a magnetic force output unit that magnetically lifts the lifting body.

In addition, the magnetic force output unit may include a fixed magnet part fixed to the fixed rod, and a lifting magnet part installed on an inward surface of the passage and interacting with the fixed magnet part.

In addition, the fixed magnet portion is fixed to the outer surface of the fixed rod, and includes a plurality of fixed magnet pieces symmetrical with respect to a central axis of the fixed rod, and the lifting magnet portion includes a plurality of one-to-one corresponding to the fixed magnet piece. It can be equipped with a lifting magnet.

In addition, the fixed magnet piece has a predetermined length in the vertical direction, and N poles and S poles are alternately arranged around the fixed rod, and the lifting magnet piece extends in the vertical direction, and the fixed magnet piece and It may be formed by maintaining a certain interval and alternately arranging S poles and N poles along the arrangement direction of the fixed magnet pieces.

In addition, the fixing rod may be a round bar or a polygonal bar having a polygonal cross section.

In addition, the driving unit includes a servo motor mounted on the upper portion of the housing, and a coupling having a ball screw connected to the lifting body and rotated axially by receiving the rotational force of the servo motor, and both sides of the lifting body , A cross roller guide may be installed which is located on the opposite side with the ball screw interposed therebetween and guides the lifting movement of the lifting body.

Since the scribe head for substrate division of the present invention made as described above always provides the same size of the lifting and return force to the lifting unit, it has good reliability and excellent operation precision, thus improving work efficiency, and stabilizing the thrust of the scribe head. Can be secured, and noise, dust, etc. are not generated.

In addition, even if it is used for a long period of time, there is no change in output and no hysteresis problem is caused, and semi-permanent use is possible. In addition, since the plane including the guide part for guiding the lifting movement of the lifting unit passes through the central axis of the ball screw, an eccentric force is not applied to the ball screw, so that precise control of the dividing wheel is possible.

1A and 1B are views for explaining a problem of a conventional scribe head.
2 is a partially cut-away perspective view of a scribe head for dividing a substrate according to an embodiment of the present invention.
3 is a view showing the internal structure of the scribe head shown in FIG.
4 is a side view of the scribe head shown in FIG. 3.
5 is a cut-away perspective view of the magnetic levitation portion shown in FIG. 3.
6 is a cross-sectional view of the magnetic levitation portion shown in FIG. 5.
7A and 7B are views for explaining the operation of a scribe head for dividing a substrate according to an embodiment of the present invention.
8A to 8C are cross-sectional views showing a modified example of a magnetic levitation unit according to an embodiment of the present invention.

Hereinafter, an embodiment according to the present invention will be described in more detail with reference to the accompanying drawings.

Basically, the device for preventing the fall of the scribe head for dividing a substrate according to an embodiment of the present invention has a feature in which a magnetic levitation part is mounted on the lifting unit.

The magnetic levitation unit of the present embodiment serves to constantly levitation the elevating unit upward.

In particular, the magnetic levitation unit prevents the free fall of the elevating unit when the driving unit of the scribe head for dividing the substrate is inoperable. As described above, in the past, a tension spring was used, but a magnetic levitation part was applied to solve various problems of the tension spring.

The device for preventing the fall of the scribe head for substrate division according to an embodiment of the present invention includes a housing, a driving unit mounted on the housing, a lifting unit that moves up and down while receiving power from the driving unit, and the lifting unit. It may include a magnetic levitation unit that applies an upward magnetic levitation force to the unit to prevent a free fall of the elevating unit when the driving unit is inoperable.

2 is a partially cut-away perspective view of a scribe head 30 for dividing a substrate having a fall prevention device according to an embodiment of the present invention, and FIG. 3 is a view showing the internal structure of the scribe head. 4 is a side view of the scribe head.

As shown, the scribe head 30 for dividing a substrate according to the present embodiment includes a housing 32, a servo motor 11, a coupling 13, an elevating unit 40, a tip holder 17, and It includes a dividing wheel 18, a magnetic levitation part 50, and a cross roller guide 61.

The housing 32 takes the form of a box providing an accommodation space 32a, and functions while being mounted on an external scribe equipment (not shown). In addition, the upper end of the housing 32 is provided with an upper plate 32b, and a lower end of the lower plate 32c.

The upper and lower end plates 32b and 32c are horizontal plate-like members, and the upper plate 32b supports the servomotor 11 and the coupling 13. The servo motor 11 and the coupling 13 constitute a driving part and are involved in the lifting of the lifting unit 40.

The servo motor 11 is mounted vertically on the upper part of the upper plate 32b, and operates by a control signal transmitted from the outside to output rotational torque to the lower part. The coupling 13 has a ball screw 14 installed on the bottom surface of the top plate 32b and extending vertically downward. The coupling 13 induces the rotational torque transmitted from the servomotor 11 to the ball screw 14 to axially rotate the ball screw 14 in a clockwise or counterclockwise direction.

The ball screw 14 extends vertically downward and engages the screw holder 15a provided in the lifting body 41. The axial rotational power of the ball screw 14 is transmitted to the lifting unit 40 through the screw holder 15a.

The elevating unit 40 includes an elevating body 41 having two vertical passages 41a extending vertically. The vertical passage 41a is a hole having a certain inner diameter and penetrated in the vertical direction. In addition, a tip holder 17 and a dividing wheel 18 are positioned below the lifting body 41. The tip holder 17 supports the dividing wheel 18 so as to be capable of rolling, and moves up and down at the same time as the lifting body 41.

The lifting unit 40 reciprocates between the top dead center and the bottom dead center by the servo motor 11. 7A shows a state in which the elevating body 41 is located at the top dead center, and FIG. 7B shows a state where the lifting body 41 is positioned at the bottom dead center.

In addition, cross roller guides 61 are installed on both sides of the lifting body 41. The cross roller guide 61 is located on the opposite side with the ball screw 14 interposed therebetween. That is, the virtual plane including the cross roller guides 61 on both sides passes through the center of the ball screw 14. In other words, the cross roller guides 61 on both sides are located on opposite sides in the 180-degree direction with respect to the central axis of the ball screw 14.

The cross roller guide 61 supports the elevating body 41 while being supported on the side wall of the housing 32 and guides the vertical movement of the elevating body 41. The elevating body 41 guides the elevating movement only in the vertical direction without fine vibration in the front and rear, left and right directions by the action of the cross roller guide 61.

On the other hand, the magnetic levitation unit 50 always applies an upward magnetic levitation force to the elevating unit 40, and in an emergency, for example, when the servomotor 11 is inoperable, the elevating unit ( It plays a role of preventing the fall of 40).

The minimum magnetic levitation force that can be output by the magnetic levitation unit 50 is equal to or greater than the self-weight of the lifting unit 40. For example, if the weight of the lifting unit 40 is 20 kg, the magnetic levitation unit is set to output a magnetic levitation force capable of magnetic levitation of 20 kg or more. The magnetic levitation force output from the magnetic levitation unit 50 may be determined by appropriately combining and designing permanent magnets.

Since the lifting unit 40 is a combination of a number of constituent parts and is heavy, it may be a burden to lift the lifting unit 40 with only the force of the servo motor 11. On the other hand, when the high horsepower servo motor 11 is applied, the load itself is reduced, but the weight of the scribe head 30 itself becomes heavier and the volume increases at the same time. However, in this embodiment, by including the magnetic levitation unit 50, it is possible to prevent overloading of the servomotor. In addition, for a substrate requiring a low pressure load such as thin glass, the conventional tension spring method has a problem in that it is difficult to finely adjust the load due to the tension error according to the elevating position of the scribe head, but in this embodiment, the magnetic levitation part ( By employing 50), the same tension can be maintained regardless of the elevating position of the scribe head, and the thrust of the scribe head can be stably secured.

In addition, if the servomotor 11 is not operated due to an emergency power failure or the like, the internal brake is also disabled, so the ball screw 14 is released and the lifting unit 40 immediately freely falls by its own weight. Therefore, it goes without saying that if the substrate A is standing at the bottom, the substrate collides with the dividing wheel 18 of the head 30 of the scribe and is broken. However, the magnetic levitation unit in this embodiment can also eliminate the risk of such a collision.

The magnetic levitation part 50 having such a function is fixed to the lower plate 32c of the housing 32 and extends upward through the vertical passage 41a of the lifting body 41, and the vertical It includes a magnetic force output unit installed inside the passage (41a).

The magnetic force output unit outputs a magnetic force that causes the lifting body 41 to float upward, and includes a fixed magnet part 52 and a lifting magnet part 55. The fixed magnet part 52 and the lifting magnet part 55 are composed of permanent magnets. Among the permanent magnets, neodymium magnets with strong magnetism can be applied.

The fixing rod 51 is a round bar-shaped member having a predetermined diameter, and its lower end is supported by the lower plate 32c through the fixing nut 57. The fixed rod 51 is made of a non-magnetic metal that does not respond to magnetic force.

In addition, a liner 54 is installed on the inner wall surface of the vertical passage 41a. The liner 54 is a material that supports the lifting magnet part 55 and prevents the magnetic force of the lifting magnet part 55 from leaking to the periphery, that is, to the lifting body 41 as much as possible.

5 is a partially cut-away perspective view of a magnetic levitation unit 50 according to an embodiment of the present invention, and FIG. 6 is a cross-sectional view thereof.

Referring to FIGS. 5 and 6 together with FIGS. 2 to 4, the fixed magnet part 52 is fixed to the outer circumferential surface of the fixed rod 51, and a plurality of fixed magnet pieces 52a, which are symmetrical with respect to the central axis of the fixed rod, 52b). Each of the fixed magnet pieces 52a and 52b has the same size, and has a predetermined length L in the vertical direction, that is, in the longitudinal direction of the fixed rod 51. It goes without saying that the cross-sectional shape of each of the fixed magnet pieces 52a and 52b takes the shape of an arc.

In addition, in the fixed magnet pieces 52a and 52b, the N pole and the S pole are alternately arranged along the circumferential direction of the fixed rod 51. That is, the N-pole fixed magnet pieces 52a and the S-pole fixed magnet pieces 52b are alternately positioned along the circumferential direction of the fixed rod 51. In the basic principle of a magnet, of course, one N-pole fixed magnet piece 52a and one S-pole fixed magnet piece 52b form one body.

The lifting magnet part 55 is fixed to the inner circumferential surface of the liner 54 and includes a plurality of lifting magnet pieces 55a and 55b corresponding to the fixed magnet pieces 52a and 52b on a one-to-one basis. The lifting magnet part 55 forms a concentric circle with respect to the central axis of the fixed rod 51.

Each of the lifting magnet pieces 55a and 55b extends in the vertical direction, that is, in the longitudinal direction of the fixed rod 51. The length (L) of the lifting magnet pieces (55a, 55b) is the same as the length (L) of the fixed magnet pieces (52a, 52b). In addition, the cross-sectional shape of each lifting magnet piece 55a, 55b takes the shape of an arc. In addition, it goes without saying that one N-pole lifting magnet piece 55a and one S-pole lifting magnet piece 55b form one body.

In particular, the S-pole lifting magnet piece (55b) corresponds to the N-pole fixed magnet piece (52a), the N-pole lifting magnet piece (55a) corresponds to the S-pole fixed magnet piece (52b) one-to-one, and there is a space 53 between them. Is formed. The space 53 is a passage through which lines of magnetic force pass.

Although the fixed magnet part 52 and the lifting magnet part 55 shown in FIGS. 5 and 6 are made up of three N poles and three S poles. It goes without saying that the number of fixed magnet pieces and lifting magnet pieces can vary depending on the case.

For example, as shown in FIG. 8A, one N-pole fixed magnet piece 52a and one S-pole fixed magnet piece 52b on the fixed rod 51, and one S-pole lifted inside the liner 54 The magnet piece 55b and one N-pole lifting magnet piece 55a may be applied.

In addition, the fixing rod 51 may take the shape of a square rod, as shown in FIG. 8B. Referring to FIG. 8B, S-pole fixed magnet pieces 52b are mounted on both sides of the square rod-shaped fixing rod 51, and N-pole fixed magnet pieces 52a are mounted on the upper and lower surfaces. In addition, the lifting magnet part 55 corresponding thereto also has a rectangular cross section. In this case, the vertical passage (41a) in which the lifting magnet part 55 is mounted is formed as a square hole, and the liner 54 is in a state in which the lifting magnet part 55 is in close contact and fixed to the inward surface of the rectangular vertical passage 41a. It is fixed and supported.

As another example, referring to FIG. 8C, the magnetic levitation part 50 is a twin-type fixed magnet part 52 disposed on each side of the rectangular fixed rod 51, and a twin-type fixed magnet part 52 is disposed on each side of the liner 54. The lifting magnet part 55 may be fixed and implemented. The fixed magnet part 52 provided in the fixed rod 51 and the lifting magnet part 55 fixed to the inner side of the liner 54 form a magnetic field in the direction of mutual pulling, and a function of magnetic levitation of the lifting unit 40 Perform.

7A and 7B are views for explaining the operation of the scribe head 30 for dividing a substrate according to an embodiment of the present invention.

Referring to FIG. 7A, it can be seen that the lifting unit 40 is located at the top dead center by the action of the servo motor 11 and the magnetic levitation unit 50. At this time, the magnetic flux density formed between the lifting magnet part 55 and the fixed magnet part 52 is maximized.

In the above state, even if the operation of the servomotor 11 is stopped due to reasons such as a power outage in an emergency and the internal brake function is released, constant magnetic attraction between the fixed magnet part and the lifting magnet part of the magnetic levitation part 50 Since this is acting, the problem that the lifting unit 40 suddenly freely falls does not occur.

In addition, when the servo motor 11 is operated to lower the lifting unit 40 to scribing the substrate, the dividing wheel 18 descends toward the substrate, and the lifting magnet part 55 with respect to the fixed magnet part 52 The facing area of is gradually reduced. That is, the magnetic flux density decreases.

And, as shown in FIG. 7B, when the lifting unit 40 reaches the bottom dead center, the magnetic flux density of the lifting magnet part 55 with respect to the fixed magnet part 52 becomes a minimum state. At this time, the elevation of the upper end of the lifting magnet part 55 is formed higher than the midpoint of the fixed magnet part 52. That is, even if the lifting magnet part 55 descends, the upper end of the lifting magnet part 55 is formed to be positioned higher than the middle point L/2 of the length L of the fixed magnet part 52. In this case, the lifting magnet part 55 acts as a magnetic attraction to match the fixed magnet part 52 and the fixed rod 51 in the same length L along the axial direction. Since this magnetic attraction maintains a constant tension regardless of the elevating position of the elevating unit 40, the tension of the tension spring is changed according to the elevating position of the elevating unit 40, so that fine adjustment of the load is not difficult, and the thrust of the scribe head Can be secured stably.

If the ball screw 14 is axially rotated through the servomotor 11 after scribing is completed while the lifting unit 40 is lowered, the lifting unit 40 moves upward under the action of the magnetic levitation unit 50. do. The lifting principle of the magnetic levitation part is due to the magnetic attraction that the magnets of the N and S poles located far away come close to each other. The lifting unit 40, which has risen completely, waits in the state of FIG. 7A and waits for the next processing.

In the above, the present invention has been described in detail through specific embodiments, but the present invention is not limited to the above embodiments, and various modifications are possible by those of ordinary skill within the scope of the technical idea of the present invention.

10: scribe head 11: servo motor
12: housing 12a: vertical plate
12b: top plate 12c: bottom plate
12d: upper hanger part 13: coupling
14: ball screw 15: lifting unit
15a: screw holder 15b: bracket
16: tension spring 17: tip holder
18: division wheel 30: scribe head
32: housing 32a: accommodating space
32b: top plate 32c: bottom plate
40: elevating unit 41: elevating body
41a: passage 50: magnetic levitation part
51: fixed rod 52: fixed magnet portion
52a, 52b: fixed magnet section 53: space
54: liner 55: elevating magnet
55a, 55b: lifting magnet 57: fixing nut
61: cross roller guide

Claims (7)

With the housing,
A driving unit mounted on the housing,
An elevating unit that receives power from the driving unit and moves up and down in the vertical direction,
A fall prevention device for a scribe head for dividing a substrate comprising a magnetic levitation unit that applies an upward magnetic levitation force to the lifting unit to prevent the lifting unit from falling when the driving unit is inoperable. The method of claim 1,
The elevating unit includes an elevating body having a passage extending in the vertical direction,
The magnetic levitation part,
A fixing rod fixed to the housing and extending upward through the passage,
A fall prevention device for a scribe head for dividing a substrate, which is installed inside the passage and has a magnetic force output unit that magnetically lifts the lifting body. The method of claim 2,
The magnetic force output unit,
A fixed magnet part fixed to the fixed rod,
A falling prevention device for a scribe head for dividing a substrate comprising a lifting magnet part installed on the inward surface of the passage and interacting with the fixed magnet part. The method of claim 3,
The fixed magnet part,
It is fixed to the outer surface of the fixed rod and includes a plurality of fixed magnet pieces symmetrical with respect to the central axis of the fixed rod,
The lifting magnet part,
A fall prevention device for a scribe head for dividing a substrate having a plurality of lifting magnet pieces corresponding to the fixed magnet pieces one-to-one. The method of claim 4,
The fixed magnet piece,
Having a certain length in the vertical direction, N poles and S poles are alternately arranged around the fixing rod,
For the above lift magnets,
A device for preventing a fall of a scribe head for dividing a substrate extending in the vertical direction, maintaining a predetermined distance from the fixed magnet piece, and alternately having S-poles and N-poles disposed along the arrangement direction of the fixed magnet pieces. The method of claim 2,
The fixed rod is a fall prevention device for a scribe head for dividing a substrate, which is a round bar or a polygonal seal having a polygonal cross section. The method of claim 2,
The driving unit,
It includes a servo motor mounted on the upper portion of the housing, and a coupling having a ball screw connected to the lifting body and axially rotated by receiving the rotational force of the servo motor,
A fall prevention device for a scribe head for dividing a substrate on both sides of the elevating body, located on opposite sides with the ball screw interposed therebetween, and having a cross roller guide for guiding the elevating movement of the elevating body.

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