KR20200141320A - A Clean Unit of apparatus for semiconductor fabrication improving an uniformity of fan speed - Google Patents

Abstract

Disclosed are a clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity, and a driving method thereof. To this end, the present invention measures an RPM value through a rotating shaft magnetic body in a fan driving unit and a Hall sensor of a second circuit unit, and drives each fan driving unit through pulse width modulation (PWM) control by receiving the RPM value from a main controller of the semiconductor manufacturing equipment. Therefore, even if the plurality of fan driving units exist, a uniform fan rotation speed can be maintained.

Description

TECHNICAL FIELD A clean unit of apparatus for semiconductor fabrication improving an uniformity of fan speed.

The present invention relates to a clean unit that enters equipment for manufacturing semiconductor devices, and more particularly, to improve the speed uniformity of a plurality of fan drives driven by AC power in a clean unit included in the semiconductor manufacturing equipment. It relates to a semiconductor device manufacturing equipment including a clean unit capable of.

Equipment that manufactures semiconductor devices is an EFEM (Equipment of Front End Module) used to proceed with the microfabrication process of wafers, or by separating individual semiconductor chips from the wafer after completing the wafer microprocessing process. It can be broadly classified as an Equipment of Back End Module (EBEM) used to make a finished semiconductor package. In general, the pre-processing device or the post-processing device must be strictly protected from small pollution in the atmosphere that may adversely affect the function of the semiconductor device. To this end, most semiconductor manufacturing equipment purifies the air entering the interior through clean units to prevent exposure of internal components of the semiconductor manufacturing equipment and semiconductor devices on which operations are performed to air pollution.

On the other hand, semiconductor device manufacturing equipment may cause fatal defects in the operation or function of the semiconductor device being processed if even a slight contamination or small particles are introduced into the device. For this reason, it can be said that the performance of the clean unit of semiconductor manufacturing equipment still has a lot of room for improvement in terms of its performance and operation.

Korean Patent Registration No. 10-1949144

The problem to be achieved by the technical idea of the present invention may be caused by air flowing into the semiconductor manufacturing equipment by uniformly taking the speed uniformity of the plurality of fan driving units included in the clean unit of the semiconductor manufacturing equipment driven by AC power. An object of the present invention is to provide a clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity that can suppress a problem.

Another problem to be achieved by the technical idea of the present invention is that the uniformity of the speed of a plurality of fan driving units is uniformly brought to the clean unit of the semiconductor manufacturing equipment driven by an AC power source, which can be caused by air flowing into the semiconductor manufacturing equipment. An object of the present invention is to provide a method of driving a clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity that can suppress problems.

A clean unit of a semiconductor manufacturing equipment having improved fan rotation uniformity according to an aspect of the present invention for achieving the above technical problem includes a semiconductor manufacturing equipment for processing semiconductor elements, and a clean unit mounted at an opening of one end of the semiconductor manufacturing equipment A support part, a filter part fixed to a lower part of the clean unit support part, a fan driving part fixed to the clean unit support part and provided on the filter part, and a magnetic material provided inside the upper part of the rotation shaft of the fan driving part A control panel unit including a rotating shaft magnetic part fixed by means of a pressure display means, a motor speed control switch, a fan driving alarm indicator, a power indicator and a power switch on the front surface exposed and exposed from one end of the clean unit support section to the outside. And, a first circuit part fixed to the clean unit support part and connected to the fan driving part and the control panel part, and including a fan driving circuit, a fan speed control circuit, a power display circuit, a fan driving state display circuit, and a pressure detection circuit therein. And, a second circuit part that is fixed to an upper end of the rotating shaft magnetic part and includes a hall sensor therein to detect the rotation speed of the fan driving part, and the fan speed is connected to the first circuit part and the second circuit part. It characterized in that it comprises a main controller of the semiconductor manufacturing equipment capable of controlling the rotation degree of the fan of the fan driving unit by receiving a signal from the circuit and Hall sensor.

According to an embodiment of the present invention, the number of fans of the fan driving unit is suitably at least one, and the rotating shaft magnetic portion includes an intaglio portion formed on an upper portion of the rotating shaft of the fan, a magnetic material embedded in the intaglio portion, and the magnetic material. It is suitable to include an adhesive means for embedding the intaglio buried at the same height as the surface of the rotating shaft.

In addition, according to a preferred embodiment of the present invention, the fan speed control circuit of the first circuit unit is preferably an AC power regulator or a pulse width modulation (PWM) circuit.

In this case, the control panel unit may further include a first connector capable of connecting power to the outside and a second connector capable of transmitting a signal to the outside.

Meanwhile, according to a preferred embodiment of the present invention, the second circuit unit may further include a third connector for exchanging power and signals to and from the outside.

A method for driving a clean unit of semiconductor manufacturing equipment having improved fan rotation uniformity according to an aspect of the present invention for achieving the above other technical problem, operates the fan driving unit by applying AC power to the clean unit of the semiconductor manufacturing equipment. And detecting a pressure generated inside the clean unit to operate a fan driving state alarm; and using a magnetic part of a rotating shaft of a fan driving part of the clean unit and a Hall sensor of a second circuit part. Egg of the driving part. blood. Measuring M (RPM) values, and the measured R. blood. Transmitting the RPM values to the main controller of the semiconductor manufacturing equipment through a third connector, and an R set in the main controller of the semiconductor manufacturing equipment. blood. M (RPM) value and measured egg. blood. Comparing the M (RPM) value, and the set R. blood. M (RPM) value and measured egg. blood. When a difference between the RPM values occurs, the main controller of the semiconductor manufacturing equipment adjusts a duty ratio for driving the fan driver to determine the number of fan driving units. blood. It characterized in that it comprises a step of uniformly maintaining the EM (RPM).

According to a preferred embodiment of the present invention, after the step of operating the fan driving state alarm, if an abnormal alarm operates, transmitting the signal to the main controller of the semiconductor manufacturing equipment, and the abnormal alarm from the main controller of the semiconductor manufacturing equipment. The method may further include displaying a display device of a semiconductor manufacturing equipment.

According to the present invention, first, the clean unit of the semiconductor manufacturing equipment having improved fan rotation uniformity according to the present invention, when abnormal operation of a plurality of fan driving units is detected due to various unbalanced causes inside the clean unit, the first and the first 2 The signal is transmitted to the main controller of the semiconductor manufacturing equipment through the second connector and the third connector of the circuit unit, and the rotation speed of each fan driving unit is adjusted by controlling the pulse width modulation (PWM) of the main controller of the semiconductor manufacturing equipment. Thus, it is possible to keep the rotation speed of the plurality of fan driving units in a uniform range.

In addition, according to the present invention, the rotational shaft magnetic part and the adjacent second circuit part are provided in the fan driving part operated by AC power to sense the rotational speed of the fan driving part, and the detected signal is transmitted to the semiconductor manufacturing equipment through the signal line. Can be transferred to the main controller.

Finally, the clean unit of the semiconductor manufacturing equipment with improved fan rotation uniformity according to the present invention displays an alarm signal on the control panel of the clean unit when an abnormal operation of the fan driving unit is detected, and at the same time, displays it on the display screen of the semiconductor manufacturing equipment. Thus, there is an advantageous advantage that can increase the efficiency of equipment operation.

1 is a schematic block diagram for explaining a clean unit of a semiconductor manufacturing equipment with improved fan rotation uniformity according to a preferred embodiment of the present invention.
FIG. 2 is a picture taken from the top of the clean unit in FIG. 1.
3 is a photograph of the front of the control panel in the clean unit of FIG. 2.
4 is a circuit diagram of a first circuit part built into the clean unit of FIG. 3.
5 is a photograph taken from the top of the fan driving unit in the clean unit of FIG. 2.
6 is a cross-sectional view illustrating an internal structure of a magnetic part of a rotation shaft in FIG. 5.
FIG. 7 is a photograph showing a support for installing a second circuit part provided on an upper part of the fan driving part among the clean unit support parts of FIG. 2.
8 is an actual photograph of a second circuit part installed on the support for installing the second circuit part of FIG. 7.
9 is a circuit diagram used in an actual second circuit unit of FIG. 8.
10 is a block diagram for explaining the operation of the fan driving unit and generation of an alarm signal by the operation of the first circuit unit in the clean unit.
11 is a block diagram illustrating a method of uniformly controlling a rotation degree of a fan for a plurality of fan driving units in a clean unit of a semiconductor manufacturing equipment.
12 is a block diagram illustrating a method of driving a clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity according to an exemplary embodiment of the present invention.

In order to fully understand the configuration and effects of the present invention, preferred embodiments of the present invention will be described with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and may be implemented in various forms and various modifications may be added. However, the description of the embodiments is provided to complete the disclosure of the present invention, and to fully inform the scope of the invention to those of ordinary skill in the art to which the present invention belongs.

Hereinafter, in the embodiments described below, terms such as first and second may be used to describe various components, but the components are not limited by the terms. These terms may be used only for the purpose of distinguishing one component from another component. Singular expressions include plural expressions, unless the context clearly indicates otherwise. For example, terms such as "comprises" or "have" are used to designate the existence of features, numbers, steps, actions, components, parts, or a combination thereof described in the specification, and one or more other features or numbers , Steps, actions, components, parts, or a combination thereof may be interpreted as being added.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person of ordinary skill in the art to which the present invention belongs. Terms as defined in a commonly used dictionary are interpreted as having a meaning consistent with the meaning in the context of the related technology, and are not interpreted as an ideal or excessively formal meaning unless explicitly defined in the present application. .

1 is a schematic block diagram for explaining a clean unit of a semiconductor manufacturing equipment with improved fan rotation uniformity according to a preferred embodiment of the present invention.

Referring to FIG. 1, the semiconductor manufacturing equipment 1000 on which the clean unit according to the present invention is mounted is an equipment used for fine processing of a wafer, or used to process individual semiconductor chips into a semiconductor package after wafer processing is completed. It can be a piece of equipment. The interior of the semiconductor manufacturing equipment 1000 may include components such as individual components 1 (210) and 2 (220) required for processing semiconductor devices.. Components such as component N (230) and main controller (200). have.

Meanwhile, an opening through which air can be introduced from outside is provided at one end of the semiconductor manufacturing equipment 1000, and a clean unit 100 is mounted in the opening. The clean unit 100 effectively cools the configuration 1 (210), configuration 2 (220).. configuration N (230) by introducing particles or pollutants contained in the external air into the semiconductor manufacturing equipment (1000). At the same time, it prevents the semiconductor device being processed from being affected by particles or contamination contained in the outside air.

The filter unit 110 is located inside the clean unit 100, which is the closest position to the internal components 210, 220, and 230 of the semiconductor manufacturing equipment 1000. The filter unit 100 may be equipped with a HEPA filter or another type of filter capable of blocking fine dust or viruses having a predetermined size or more. A fan driving unit 120 is provided outside the filter unit 110. The fan driving unit 120 may include one or more fans. Accordingly, air is introduced from the outside by the fan driving unit 120, and the introduced air is introduced into the semiconductor manufacturing equipment 1000 through the filter unit 110 again. The fan of the fan driving unit 120 may be operated by an alternating current (AC) power source, and a fan driven by a brushless direct current motor (BLDC) capable of self-sensing rotational force including a coil therein It is appropriate not.

At this time, the clean unit 100 is connected to the fan driving unit 120 and includes a control panel unit 140 exposed to the outside. The control panel unit 140 will be described in detail with reference to FIG. 3 that follows.

2 is a picture taken from the top of only the clean unit of FIG. 1.

Referring to FIG. 2, the clean unit includes a clean unit support part 100 capable of mounting various components. The drawing shows that three fan driving units 120 are installed. A filter unit 110 may be provided under the fan driving unit 120. In addition, a control panel unit 140 may be provided on the other side of the clean unit. In the drawing, various electronic components including a first circuit unit may be mounted on the rear surface of the control panel unit 140. The fan driving unit 120 receives driven power from the control panel unit 140.

3 is a photograph of the front of the control panel in the clean unit of FIG. 2.

Referring to FIG. 3, the control panel unit 140 is an area in which all means capable of operating or controlling a clean unit are provided. The pressure display unit 141 is a device that displays the internal pressure measured in the clean unit. The motor speed control switch 142 is a device that adjusts the motor speed of the fan driving unit when the fan speed control circuit illustrated in FIG. 4 is a phase control type AC power regulator. The fan alarm indicator 143 may be red, and when a problem occurs in the fan of the fan driving unit, it blinks and is used as a function of notifying the operator of the semiconductor manufacturing equipment of the problem of the equipment. Alternatively, the power indicator 144 is designed to blink through the on/off of the power switch 145.

Meanwhile, the first connector 146 for connecting an external power source for operating the fan driving unit, such as an AC power source (AC) to the clean unit, and various signals generated from the clean unit are transmitted to external devices of the clean unit, such as A second connector 147 corresponding to a signal line that can be transmitted to the main controller (FIG. 1 200) may also be included. In addition, other electronic control components not shown in the drawings may be additionally mounted on the control panel unit 140 according to the intention of the designer.

4 is a circuit diagram of a first circuit part built into the clean unit of FIG. 3.

Referring to FIG. 4, the first circuit part is the main circuits of the clean unit fixed to the clean unit support part and mounted on the control panel part (140 in FIG. 1), and external power through the first connector 146 For example, AC power supply AC is supplied into the first circuit unit. The supplied power is turned on/off through a power opening/closing circuit 145 corresponding to a fan driving circuit, and in the on state, the power display circuit 144, for example, green L. this. D (LED) can be flashed. The power passing through the power display circuit 144 drives a fan driver, which is an AC motor connected in series thereto, through a pulse width modulation (PWM) circuit, which is a fan speed control circuit 142.

Meanwhile, the fan driving circuit 142 may control the speed of the fan driving unit by using a phase control AC power regulator instead of a pulse width modulation circuit. In this case, the AC power regulator may be connected to the motor speed control switch (142 of FIG. 3) described in FIG. 3. When the fan driving unit is operated by the fan driving circuit 142, the pressure sensor, which is the pressure detection circuit 141, is operated. Accordingly, it is checked whether the pressure inside the clean unit is within the set normal range. When the fan driving unit does not operate normally and a pressure value outside the set normal range is detected through the pressure sensor, the fan driving alarm indicator (143 in FIG. 3) corresponding to the fan driving state display circuit 143 is flashed. In addition, when the pressure inside the clean unit measured through the pressure sensor is within a set normal range, a fan normal operation indicator (Fan runs) provided adjacent to the fan driving alarm indicator may flash.

The result of normal operation of the fan driving unit through the fan driving state display circuit 143 is transmitted to the second connector 147 through the relay connection unit 148 and transmitted to the main controller of the semiconductor manufacturing equipment. According to the present invention, the result of operating the fan driving unit may include a fan driving alarm display state. Accordingly, the fan driving alarm display state is displayed on a display device of the semiconductor manufacturing equipment, so that an operator operating the semiconductor manufacturing equipment can effectively monitor the operation state of the fan driving unit of the clean unit. Eggs generated by the rotating shaft magnetic body. blood. A method of measuring the RPM value will be described in detail with reference to FIGS. 5 to 9 that follow.

5 is a picture taken from the top of the fan driving unit in the clean unit of Fig. 2, Fig. 6 is a cross-sectional view for explaining the internal structure of the rotating shaft magnetic unit in Fig. 5, and Fig. 7 is a fan driving unit among the clean unit support units of Fig. 2 It is a photograph showing the support for installing the second circuit part provided on the upper part, and FIG. 8 is a real photograph of the second circuit part installed on the support for installing the second circuit part of FIG. 7.

5 to 8, the fan of the fan driving unit 120 driven by pulse width modulation circuits (PWM circuits) is divided into a rotation shaft 122 and a blade unit 123. In this case, according to the present invention, a rotation shaft magnetic part 121 is provided on the rotation shaft 122 of the fan driving part 120 as shown in FIG. 5. Looking at the structure of the rotating shaft magnetic part 121 through continuous FIG. 6, after forming an intaglio part at a predetermined depth on the surface of the rotating shaft 122, the magnetic body 124 and the magnetic body 124 can be fixed therein. The adhesive means may be filled in the intaglio portion so that the height of the fan has the same height as the surface of the rotating shaft 122 to prepare the rotating shaft magnetic portion 121.

A fan driving unit support 101 and a second circuit unit installation support 102 are provided on the upper part of the rotating shaft magnetic part 121 as shown in FIG. 7, and the movement of the rotating shaft magnetic body 121 as shown in FIG. blood. A second circuit unit 160 including a Hall sensor capable of detecting RPM may be installed in this area 102.

9 is a circuit diagram used in an actual second circuit unit of FIG. 8.

Referring to FIG. 9, a Hall sensor 162 capable of detecting a movement of a magnetic material is provided inside the second circuit unit. The Hall sensor 162 detects the magnetic field of the magnetic body of the rotating shaft, and the Al corresponding to the rotation angle of the motor. blood. It is a device that measures M. Egg of the magnetic body of the rotating shaft detected by the hall sensor 162 of the second circuit part. blood. The RPM value is sent to the third connector 164 through the signal line 165 inside, received from the main controller of the semiconductor manufacturing equipment, and applied to pulse width modulation control according to the procedure programmed in the main controller. Let it be.

Specifically, the main controller (200 in FIG. 1) of the semiconductor manufacturing equipment is transmitted through the third connector 164 according to an operation procedure programmed inside the main controller. blood. According to the value of M (RPM), AC power supplied to the first connector and the control of the pulse width modulation circuit (PWM) circuit (142 in Fig. 4) are used to control the fan driving unit. blood. By controlling the RPM value in each set range, even when a plurality of fan driving units are operated, the R. blood. The RPM value can be uniformly adjusted. Specifically, the internal state of the fan driving unit or semiconductor manufacturing equipment is unstable, so the fan driving unit is known. blood. Even if the RPM values are slightly different from each other, a uniform fan rotation speed can be realized in a plurality of fan driving units by a control method of the main controller of the semiconductor manufacturing equipment.

In the drawing, reference numeral 161 denotes L showing the normal operation state of the Hall sensor. this. D (LED) indicator, 163 is L. this. It is a register that protects the LED indicator, and reference numeral 166 corresponds to the power line. In this case, a mono capacitor for removing noise may be mounted on the power line 166 as shown in the drawing.

10 is a block diagram for explaining the operation of the fan driving unit and generation of an alarm signal by the operation of the first circuit unit in the clean unit.

Referring to FIG. 10, in the step before applying power, the range of the normal pressure value inside the clean unit may be set by a designer or operator, and the normal speed value (RPM) of the fan driving unit and the relay unit (Fig. 148) The definition of an alarm signal to be sent to the main controller of the semiconductor manufacturing equipment through adjustment may precede.

When power is applied to the clean unit (S100), the fan motor operates and an internal pressure of the fan filter unit (FFU) corresponding to the clean unit is generated (S110). The internal pressure generated in this way is measured through the pressure sensor described in FIG. 4 and then compared with a preset normal pressure value (S120).

Thereafter, if the measured internal pressure value is in the normal range, the fan run lamp shown in FIG. 4 is flashed (S130), and a signal sent from the relay unit 148 of FIG. 4 to the main controller of the semiconductor manufacturing equipment A separate fan driving alarm signal is not output to (S140), and a normal operation is performed (S150).

However, if the measured internal pressure value is out of the normal range, the fan driving alarm lamp shown in FIG. 4 flashes (S160), and the relay unit (148 in FIG. 4) is the main controller of the semiconductor manufacturing equipment. A fan driving alarm signal is output to the transmitted signal (S170) and an abnormal stop operation is performed (S180). The fan driving alarm signal generated in the step S170 is sent to the main controller of the semiconductor manufacturing equipment while turning on the fan driving alarm indicator (143 in FIG. 3) of the control panel of the clean unit to display a display device provided in the semiconductor manufacturing equipment. ) Is also displayed at the same time, so that the operator can efficiently identify the problems occurring in the equipment.

11 is a block diagram illustrating a method of uniformly controlling a rotation degree of a fan for a plurality of fan driving units in a clean unit of a semiconductor manufacturing equipment.

Referring to FIG. 11, power, for example, AC power (AC) is applied to the clean unit as shown in FIG. 4 (S100), and control by the main controller of the semiconductor manufacturing equipment in the pulse width modulation (PWM) circuit corresponding to the fan driving circuit (P100) occurs. At this time, the main controller of the semiconductor manufacturing equipment is an Al. blood. Control is achieved by receiving the RPM value.

Subsequently, the generated fan driving unit of the driving P110 of the AC motor connected to the fan driving circuit operates. In addition, by the operation of the rotating shaft magnetic body (Fig. 5 121) and the Hall sensor (162 of Fig. 9) provided in the fan driving unit to know the fan driving unit. blood. As the RPM value is extracted (P120), it is transmitted to the main controller of the semiconductor manufacturing equipment through the third connector.

After that, the main controller of the semiconductor manufacturing equipment has the received fan driver according to a pre-programmed procedure. blood. Egg with the set RPM value. blood. Comparing (S130)/determining whether the value of M (RPM) is within the range. At this time, if the number of fan driving units is more than one, the measured egg of each fan driving unit. blood. Each of the RPM values is compared with the set value in the normal range.

When the comparison result is the same as the normal range, AC power is applied to the pulse width modulation circuit without changing the duty ratio (P140) in the pulse width modulation (PWM) circuit. However, when the comparison result is out of the normal range, the duty ratio is changed in the pulse width modulation (PWM) circuit (P150), and AC power is applied to the pulse width modulation circuit. Accordingly, each of the plurality of fan driving units is known for various causes. blood. Even if the RPM values are different, the fan rotation speeds of all fan drives can be kept constant. Therefore, it is possible to improve equipment efficiency by a clean unit in semiconductor manufacturing equipment and reduce the defect rate of semiconductor devices being processed.

In general, the higher the duty ratio, the better. blood. The value of RPM increases. Therefore, even if a plurality of fan driving units are operated, according to the present invention, all fan driving units are preset. blood. Compared with the value of M (RPM), know it consistently. blood. Because it is a control method that maintains RPM, the same egg in the fan drive part of the clean unit in the process. blood. It may be suitable for semiconductor manufacturing equipment that requires RPM.

12 is a block diagram illustrating a method of driving a clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity according to an exemplary embodiment of the present invention.

Referring to FIG. 12, in the method for driving a clean unit of semiconductor manufacturing equipment having improved fan rotation uniformity according to the present invention, first, an AC power is applied to the clean unit of the semiconductor manufacturing equipment to operate the fan driving unit (P190). . Thereafter, the pressure generated inside the clean unit is detected to operate a fan driving state alarm (P192).

Subsequently, the plurality of fan driving units are known by using the magnetic rotating shaft of the fan driving unit of the clean unit and the Hall sensor of the second circuit unit. blood. M (RPM) values are measured (P194). The measured egg. blood. The RPM values are transmitted to the main controller of the semiconductor manufacturing equipment through the third connector (P196). And Al set in the main controller of the semiconductor manufacturing equipment. blood. M (RPM) value and measured egg. blood. M (RPM) value is compared (P198), and the set R. blood. M (RPM) value and measured egg. blood. When a difference in the RPM value occurs, a duty ratio of driving the fan driver is adjusted (P200) in the main controller of the semiconductor manufacturing equipment to detect the plurality of fan drivers. blood. Keep the RPM uniform.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those of ordinary skill in the art will appreciate that various modifications and other equivalent embodiments are possible therefrom. Therefore, the true scope of protection of the present invention should be determined only by the appended claims.

100: clean unit, 110: filter part,
120: fan driving unit, 121: magnetic rotating shaft,
140: control panel panel, 142: fan speed control circuit (PWM),
146: first connector, 147: second connector,
162: Hall sensor, 164: third connector,
200: main controller, 1000: semiconductor manufacturing equipment.

Claims (9)

Semiconductor manufacturing equipment for processing semiconductor devices;
A clean unit support part mounted on an opening of one end of the semiconductor manufacturing equipment;
A filter part fixed to a lower part of the clean unit support part;
A fan driving part fixed to the clean unit support part and provided above the filter part;
A rotating shaft magnetic part provided inside the upper part of the rotating shaft of the fan driving part and having a magnetic material fixed therein by an adhesive means;
A control panel unit including a pressure display means, a motor speed control switch, a fan driving alarm indicator, a power indicator, and a power switch on the exposed front surface from one end of the clean unit support portion;
A first circuit unit fixed to the clean unit support unit, connected to the fan driving unit and the control panel unit, and including a fan driving circuit, a fan speed control circuit, a power display circuit, a fan driving state display circuit, and a pressure detection circuit therein;
A second circuit unit fixed to an upper end of the rotating shaft magnetic unit and including a hall sensor therein to detect the rotation speed of the fan driving unit; And
Fan rotation, characterized in that it comprises a main controller of semiconductor manufacturing equipment connected to the first circuit unit and the second circuit unit to control the degree of rotation of the fan of the fan driving unit by receiving signals from a fan speed circuit and a hall sensor Clean unit of semiconductor manufacturing equipment with improved uniformity. The method of claim 1,
The number of fans of the fan driving unit is,
A clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity, characterized in that at least one. The method of claim 1,
The rotating shaft magnetic part,
An intaglio portion formed on an upper portion of the rotating shaft of the fan;
A magnetic material embedded in the intaglio portion; And
A clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity, comprising: an adhesive means for filling the intaglio portion in which the magnetic material is embedded at the same height as the surface of the rotation shaft. The method of claim 1,
The fan speed control circuit of the first circuit unit,
A clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity, characterized in that it is an AC power regulator. The method of claim 1,
The fan speed control circuit of the first circuit unit,
A clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity, characterized in that it is a Pulse Width Modulation (PWM) circuit. The method of claim 1,
The control panel part,
A first connector capable of connecting power to the outside; And
A clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity, further comprising a second connector capable of transmitting a signal to the outside. The method of claim 1,
The second circuit unit,
A clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity, further comprising a third connector for exchanging power and signals to and from the outside. Applying an alternating current (AC) power to a clean unit of semiconductor manufacturing equipment to operate a fan driving unit;
Operating a fan driving state alarm by detecting the pressure generated inside the clean unit;
Al. A plurality of fan driving units using a magnetic rotating shaft of the fan driving unit of the clean unit and a Hall sensor of the second circuit unit. blood. Measuring RPM values;
The measured egg. blood. Transmitting the RPM values to a main controller of the semiconductor manufacturing equipment through a third connector;
Al set in the main controller of the semiconductor manufacturing equipment. blood. M (RPM) value and measured egg. blood. Comparing the RPM values; And
The set al. blood. M (RPM) value and measured egg. blood. When a difference between the RPM values occurs, the main controller of the semiconductor manufacturing equipment adjusts a duty ratio for driving the fan driver to determine the number of fan driving units. blood. A method of driving a clean unit of a semiconductor manufacturing equipment with improved fan rotation uniformity, comprising the step of uniformly maintaining RPM. The method of claim 8,
After the step of operating the fan driving state alarm,
Transmitting the signal to a main controller of the semiconductor manufacturing equipment when an abnormal alarm operates; And
And displaying an abnormal alarm on a display device of the semiconductor manufacturing equipment by the main controller of the semiconductor manufacturing equipment. The method of driving a clean unit of semiconductor manufacturing equipment with improved fan rotation uniformity.

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