KR20200129680A - Plasma generator - Google Patents

Plasma generator Download PDF

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KR20200129680A
KR20200129680A KR1020190054456A KR20190054456A KR20200129680A KR 20200129680 A KR20200129680 A KR 20200129680A KR 1020190054456 A KR1020190054456 A KR 1020190054456A KR 20190054456 A KR20190054456 A KR 20190054456A KR 20200129680 A KR20200129680 A KR 20200129680A
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plate
protruding
coupled
conductive
bottom plate
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KR1020190054456A
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Korean (ko)
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황원진
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황원진
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/22—Ionisation
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/015—Disinfection, sterilisation or deodorisation of air using gaseous or vaporous substances, e.g. ozone
    • F24F3/166—
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/192—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by electrical means, e.g. by applying electrostatic fields or high voltages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/20—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by sterilisation
    • F24F8/24—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by sterilisation using sterilising media
    • F24F8/26—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by sterilisation using sterilising media using ozone
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/40—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by ozonisation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
    • A61L2209/20—Method-related aspects
    • A61L2209/21—Use of chemical compounds for treating air or the like
    • A61L2209/212—Use of ozone, e.g. generated by UV radiation or electrical discharge
    • F24F2003/1671—
    • F24F2003/1685—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/10—Treatment of gases
    • H05H2245/15—Ambient air; Ozonisers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/30—Medical applications
    • H05H2245/36—Sterilisation of objects, liquids, volumes or surfaces

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Plasma & Fusion (AREA)
  • Epidemiology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Physics & Mathematics (AREA)
  • Veterinary Medicine (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

The present invention relates to a plasma generator, which comprises: a bottom plate member made of an insulator; a first upper protruding plate coupled to the bottom plate member, protruding upward from an upper surface of the bottom plate member, having a plurality of through holes, and made of an insulator; a first upper conductive plate made of a conductor and coupled to a side surface of the first upper protruding plate; a conductive protrusion protruding from the first upper conductive plate, provided in plural, and passing through the through hole of the first upper protruding plate to protrude from the first upper protruding plate; a second upper protruding plate coupled to the bottom plate member, protruding upward from the upper surface of the bottom plate member, spaced apart from the first upper protruding plate and positioned to face the first upper protruding plate; a second upper conductive plate made of a conductor, coupled to a side surface of the second upper protruding plate, and coupled to a direction in which the conductive protrusion is located; a control member that applies electricity to each of the first upper conductive plate and the second upper conductive plate to control electricity and voltage; a transformer capable of controlling the voltage provided to the control member, and thus the plasma generator efficiently generates plasma, thereby providing an effect of generating much ozone, having a little risk of failure, requiring less manufacturing costs with a simple structure, and being installed in a narrow space.

Description

플라즈마 발생장치{Plasma generator}Plasma generator {Plasma generator}

본 발명은 플라즈마 발생장치에 관한 것으로, 더욱 상세하게는 플라즈마를 효율적으로 발생시킴으로써 오존의 생성을 많이 할 수 있으며, 고장이 발생할 염려가 적으며, 구조가 간단하여 제조 비용이 저렴하게 소요되며, 좁은 공간에도 설치할 수 있는 플라즈마 발생장치에 관한 것이다. The present invention relates to a plasma generating apparatus, and more particularly, by efficiently generating plasma, ozone can be generated a lot, there is little risk of failure, and the structure is simple, so the manufacturing cost is low and the narrow It relates to a plasma generating device that can be installed in space.

일반적으로 일반병원이나 요양병원 등의 병실에는 각종의 병원균이나, 인체에 유해한 세균이 존재할 수밖에 없다. In general, in hospital rooms such as general hospitals and nursing hospitals, various pathogens and bacteria harmful to the human body are bound to exist.

따라서, 이러한 병원균이나 인체에 유해한 세균을 단시간 내에 살균 및 멸균하여야 하는데, 이러한 장치는 고가이거나 적당한 살균 및 멸균 장치가 없다고 하는 것이 현 실정이다. Therefore, such pathogens or bacteria harmful to the human body must be sterilized and sterilized within a short period of time, but such devices are expensive or there is no suitable sterilization and sterilization device.

한편, 실내에 오존을 이용한 살균 장치로서 대한민국 등록특허 제10-1632158호(이하 "종래 개시기술"이라고 한다)가 개시된 바 있다. On the other hand, as a sterilization device using ozone indoors, Korean Patent Registration No. 10-1632158 (hereinafter referred to as "prior art") has been disclosed.

그러나, 상기 종래 개시기술은 일정한 농도 이상이 실내에 존재하면 인체에 유해한 오존을 회수 및 정제하는 구성이 포함되지 않음으로써 인체의 건강을 해칠 수 있다는 문제점이 있었다. However, the prior art disclosed has a problem in that it may harm human health by not including a configuration for recovering and purifying ozone harmful to the human body if a certain concentration or more exists indoors.

또한, 종래 개시기술은 구조가 복잡하고 장치의 가격이 비싸다고 하는 문제점이 있었다. In addition, the conventional disclosed technology has a problem that the structure is complex and the cost of the device is high.

본 발명은 상기한 바와 같은 제반 문제점을 해결하기 위하여 제안된 것으로, 그 목적은 플라즈마를 효율적으로 발생시킴으로써 오존의 생성을 많이 할 수 있으며, 고장이 발생할 염려가 적으며, 구조가 간단하여 제조 비용이 저렴하게 소요되며, 좁은 공간에도 설치할 수 있는 플라즈마 발생장치를 제공하는데 그 목적이 있다. The present invention has been proposed to solve the above-described problems, and its purpose is to generate a large amount of ozone by efficiently generating plasma, less fear of failure, and a simple structure to reduce manufacturing cost. An object thereof is to provide a plasma generating device that is inexpensive and can be installed in a narrow space.

상기와 같은 목적을 달성하기 위한 본 발명에 따른 플라즈마 발생장치는, 절연체로 이루어지는 바닥판부재와, 상기 바닥판부재와 결합되며, 상기 바닥판부재의 상면에서 상방을 향하여 돌출되며, 복수개의 관통공을 가지며, 절연체로 이루어지는 제1상방돌출판과, 도전체로 이루어지며, 상기 제1상방돌출판의 측면에 결합되는 제1상방도전판과, 상기 제1상방도전판으로부터 돌출되며, 복수개로 구비되며, 상기 제1상방돌출판의 관통공을 통과하여 상기 제1상방돌출판으로부터 돌출되는 도전돌기부와, 상기 바닥판부재와 결합되며, 상기 바닥판부재의 상면에서 상방을 향하여 돌출되며, 상기 제1상방돌출판과 이격되어 상기 제1상방돌출판과 대향되게 위치되는 제2상방돌출판과, 도전체로 이루어지며, 상기 제2상방돌출판의 측면에 결합되되 상기 도전돌기부가 위치된 방향에 결합되는 제2상방도전판과, 상기 제1상방도전판과 상기 제2상방도전판에 각각 전기를 인가하며, 전기 및 전압을 컨트롤하는 컨트롤부재와, 상기 컨트롤부재에 제공되는 전압을 조절할 수 있는 변압기를 포함하는 것을 특징으로 한다. The plasma generating apparatus according to the present invention for achieving the above object includes a bottom plate member made of an insulator, coupled to the bottom plate member, and protruding upward from the top surface of the bottom plate member, and a plurality of through holes And a first upper protruding plate made of an insulator, a first upper conductive plate made of a conductor and coupled to a side surface of the first upper protruding plate, protruding from the first upper conductive plate, and provided in plural. , A conductive protrusion that passes through the through hole of the first upper protrusion and protrudes from the first upper protrusion, and is coupled to the floor plate member and protrudes upward from the upper surface of the floor plate member, and the first A second upper protruding plate spaced apart from the upper protruding plate and positioned opposite to the first upper protruding plate, and a conductor, and coupled to the side surface of the second upper protruding plate, and coupled to the direction in which the conductive protrusion is positioned. A second upper conductive plate, a control member for applying electricity to each of the first and second upper conductive plates, and controlling electricity and voltage, and a transformer capable of adjusting the voltage provided to the control member. It characterized in that it includes.

또한, 본 발명에 따른 플라즈마 발생장치에서, 상기 제1상방돌출판과 상기 제2상방돌출판 사이의 거리는, 2 센치미터 내지 3 센치미터이며, 상기 컨트롤부재는 상기 제1상방도전판과 제2상방도전판에 15000 볼트, 60 헤르츠(Hz)의 전기를 인가하는 것을 특징으로 한다. In addition, in the plasma generating apparatus according to the present invention, a distance between the first upper protruding plate and the second upper protruding plate is 2 cm to 3 cm, and the control member comprises the first upper conductive plate and the second upper conductive plate. It is characterized by applying 15000 volts, 60 hertz (Hz) of electricity to the upper conductive plate.

본 발명에 따른 플라즈마 발생장치에 의하면, 플라즈마를 효율적으로 발생시킴으로써 오존의 생성을 많이 할 수 있으며, 고장이 발생할 염려가 적으며, 구조가 간단하여 제조 비용이 저렴하게 소요되며, 좁은 공간에도 설치할 수 있는 효과가 있다. According to the plasma generating device according to the present invention, it is possible to generate a lot of ozone by efficiently generating plasma, there is little risk of failure, and the structure is simple, so manufacturing cost is low and can be installed in a narrow space. There is an effect.

본 발명은 첨부된 도면에 도시된 실시 예를 참고로 설명되나, 이는 예시적인 것이며, 당해 분야에서 통상의 지식을 가진 자라면 이로부터 다양한 변형 및 균등한 실시예가 가능하다는 점을 이해할 수 있을 것이다. 따라서 본 발명의 진정한 보호범위는 첨부된 청구범위에 의해서만 정해져야 할 것이다. The present invention is described with reference to the embodiments shown in the accompanying drawings, but these are exemplary, and those of ordinary skill in the art will appreciate that various modifications and equivalent embodiments are possible therefrom. Therefore, the true scope of protection of the present invention should be determined only by the appended claims.

도 1은 본 발명의 실시예에 따른 플라즈마 발생장치의 구성을 도시한 도면
도 2는 도 1에 도시된 플라즈마 발생장치에서 제1상방도전판과 도전돌기부 부위를 도시한 도면1 is a view showing the configuration of a plasma generating apparatus according to an embodiment of the present invention
FIG. 2 is a view showing a first upper conductive plate and a conductive protrusion in the plasma generating apparatus shown in FIG. 1

이하, 본 발명의 바람직한 실시예에 따른 플라즈마 발생장치를 첨부된 도면에 의거하여 상세히 설명한다. Hereinafter, a plasma generating apparatus according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

도 1 내지 도 2는본 발명의 실시예에 따른 플라즈마 발생장치를 도시한 것으로, 도 1은 본 발명의 실시예에 따른 플라즈마 발생장치의 구성을 도시한 도면을, 도 2는 도 1에 도시된 플라즈마 발생장치에서 제1상방도전판과 도전돌기부 부위를 도시한 도면을 각각 도시한 것이다. 1 to 2 are views showing a plasma generating apparatus according to an embodiment of the present invention, FIG. 1 is a diagram showing the configuration of a plasma generating apparatus according to an embodiment of the present invention, and FIG. 2 is a plasma diagram shown in FIG. Each of the drawings showing the first upper conductive plate and the conductive protrusion in the generator is shown.

상기 도면에 도시된 바와 같이, 본 발명의 실시예에 따른 플라즈마 발생장치(200)는, 바닥판부재(10)와, 제1상방돌출판(20)과, 제1상방도전판(30)과, 도전돌기부(40)와, 제2상방돌출판(50)과, 제2상방도전판(60)과, 컨트롤부재(70)와, 변압기(80)를 포함한다. As shown in the drawing, the plasma generating apparatus 200 according to the embodiment of the present invention includes a bottom plate member 10, a first upper protruding plate 20, a first upper conductive plate 30, and , A conductive protrusion 40, a second upper protrusion plate 50, a second upper conductive plate 60, a control member 70, and a transformer 80.

상기 바닥판부재(10)는 절연체로 이루어지는 것이다. The bottom plate member 10 is made of an insulator.

상기 제1상방돌출판(20)은 상기 바닥판부재(10)와 결합되며, 상기 바닥판부재(10)의 상면에서 상방을 향하여 돌출되며, 복수개의 관통공(22)을 가지며, 절연체로 이루어지는 것이다. The first upper protrusion plate 20 is coupled to the bottom plate member 10, protrudes upward from the top surface of the bottom plate member 10, has a plurality of through holes 22, and is made of an insulator. will be.

상기 제1상방도전판(30)은 도전체로 이루어지며, 상기 제1상방돌출판(20)의 측면에 결합되는 것이다. The first upper conductive plate 30 is made of a conductor, and is coupled to a side surface of the first upper protruding plate 20.

상기 도전돌기부(40)는 상기 제1상방도전판(30)으로부터 돌출되며, 복수개로 구비되며, 상기 제1상방돌출판(20)의 관통공을 통과하여 상기 제1상방돌출판(20)으로부터 돌출되는 것이다. The conductive protrusions 40 protrude from the first upper conductive plate 30, are provided in plural, pass through the through holes of the first upper protrusion plate 20, and pass through the first upper protrusion plate 20. It protrudes.

상기 제2상방돌출판(50)은 상기 바닥판부재(10)와 결합되며, 상기 바닥판부재(10)의 상면에서 상방을 향하여 돌출되며, 상기 제1상방돌출판(20)과 이격되어 상기 제1상방돌출판(20)과 대향되게 위치되는 것이다. The second upper protrusion plate 50 is coupled to the bottom plate member 10, protrudes upward from the upper surface of the bottom plate member 10, and is spaced apart from the first upper protrusion plate 20 to be It is positioned to face the first upper protruding plate (20).

상기 제2상방도전판(60)은 도전체로 이루어지며, 상기 제2상방돌출판(50)의 측면에 결합되되 상기 도전돌기부(40)가 위치된 방향에 결합되는 것이다. The second upper conductive plate 60 is made of a conductor, and is coupled to a side surface of the second upper protruding plate 50 and is coupled to a direction in which the conductive protrusion 40 is positioned.

상기 컨트롤부재(70)는 상기 제1상방도전판(30)과 상기 제2상방도전판(60)에 각각 전기를 인가하며, 전기 및 전압을 컨트롤하는 것이다. The control member 70 applies electricity to the first upper conductive plate 30 and the second upper conductive plate 60, respectively, and controls electricity and voltage.

상기 변압기(80)는 상기 컨트롤부재(70)에 제공되는 전압을 조절하는 것이다. The transformer 80 controls a voltage provided to the control member 70.

한편, 본 실시예에서 상기 제1상방돌출판(20)과 상기 제2상방돌출판(50) 사이의 거리는, 2 센치미터 내지 3 센치미터로 구성하는 것이 바람직하다. On the other hand, in this embodiment, the distance between the first upper protruding plate 20 and the second upper protruding plate 50 is preferably composed of 2 cm to 3 cm.

그리고, 상기 컨트롤부재(70)는 상기 제1상방도전판(30)과 제2상방도전판(60)에 15000 볼트, 60 헤르츠(Hz)의 전기를 인가하는 것이 바람직하다. In addition, it is preferable that the control member 70 applies electricity of 15000 volts and 60 hertz (Hz) to the first upper conductive plate 30 and the second upper conductive plate 60.

상기와 같은 구성을 가지는 플라즈마 발생장치(100)는 다음과 같이 사용된다. The plasma generating apparatus 100 having the above configuration is used as follows.

먼저, 상기 변압기(80)와 컨트롤부재(70)를 통해서 상기 제1상방도전판(30)과 제2상방도전판(60)에 전기를 각각 인가한다. First, electricity is applied to the first upper conductive plate 30 and the second upper conductive plate 60 through the transformer 80 and the control member 70, respectively.

예를 들어 플러스(＋)선은 상기 제1상방도전판(30)에 인가하고, 마이너스(－)선은 상기 제2상방도전판(60)에 인가하면 되는 것이다. For example, a positive (+) line is applied to the first upper conductive plate 30, and a negative (-) line is applied to the second upper conductive plate 60.

그러면, 상기 컨트롤부재에 의해서 15000 볼트(Volt)의 고압이 흐르게 되므로 상기 도전돌기부(40)에 플라즈마가 발생이 되는 것이다. Then, since a high pressure of 15000 volts flows by the control member, plasma is generated in the conductive protrusion 40.

상기 제1상방돌출판(20)과 상기 제2상방돌출판(50) 사이의 거리는, 상기 도전돌기부의 수량과 전기적 용량에 따라서 다르다. The distance between the first upper protrusion plate 20 and the second upper protrusion plate 50 varies depending on the quantity and electrical capacity of the conductive protrusions.

본 실시예에서는 15000 볼트의 전압이 인가되므로 2 센치미터 내지 3 센치미터로 구성하는 것이 바람직하다. 이는 다양한 거리를 두고 실험하여 나온 결과이다. In this embodiment, since a voltage of 15000 volts is applied, it is preferable to configure it in 2 cm to 3 cm. This is the result of experiments at various distances.

10. 바닥판부재 20. 제1상방돌출판
22. 관통공 30. 제1상방도전판
40. 도전돌기부 50. 제2상방돌출판
60. 제2상방도전판 70. 컨트롤부재
80. 변압기10. Bottom plate member 20. First upper protrusion plate
22. Through hole 30. First upper conductive plate
40. Conductive protrusion 50. Second upper protrusion publication
60. The second upper conductive plate 70. Control member
80. Transformer

Claims (2)

절연체로 이루어지는 바닥판부재(10);
상기 바닥판부재(10)와 결합되며, 상기 바닥판부재(10)의 상면에서 상방을 향하여 돌출되며, 복수개의 관통공(22)을 가지며, 절연체로 이루어지는 제1상방돌출판(20);
도전체로 이루어지며, 상기 제1상방돌출판(20)의 측면에 결합되는 제1상방도전판(30);
상기 제1상방도전판(30)으로부터 돌출되며, 복수개로 구비되며, 상기 제1상방돌출판(20)의 관통공을 통과하여 상기 제1상방돌출판(20)으로부터 돌출되는 도전돌기부(40);
상기 바닥판부재(10)와 결합되며, 상기 바닥판부재(10)의 상면에서 상방을 향하여 돌출되며, 상기 제1상방돌출판(20)과 이격되어 상기 제1상방돌출판(20)과 대향되게 위치되는 제2상방돌출판(50);
도전체로 이루어지며, 상기 제2상방돌출판(50)의 측면에 결합되되 상기 도전돌기부(40)가 위치된 방향에 결합되는 제2상방도전판(60);
상기 제1상방도전판(30)과 상기 제2상방도전판(60)에 각각 전기를 인가하며, 전기 및 전압을 컨트롤하는 컨트롤부재(70);
상기 컨트롤부재(70)에 제공되는 전압을 조절할 수 있는 변압기(80);를 포함하는 것을 특징으로 하는 플라즈마 발생장치.
A bottom plate member 10 made of an insulator;
A first upper protruding plate 20 coupled to the bottom plate member 10, protruding upward from an upper surface of the bottom plate member 10, having a plurality of through holes 22, and made of an insulator;
A first upper conductive plate 30 made of a conductor and coupled to a side surface of the first upper protruding plate 20;
A conductive protrusion 40 protruding from the first upper protruding plate 20, protruding from the first upper conductive plate 30, provided in plurality, and protruding from the first upper protruding plate 20 through a through hole of the first upper protruding plate 20 ;
It is coupled to the bottom plate member 10, protrudes upward from the upper surface of the bottom plate member 10, is spaced apart from the first upper protrusion plate 20 and faces the first upper protrusion plate 20 A second upper protrusion plate 50 positioned to be positioned;
A second upper conductive plate 60 made of a conductor and coupled to a side surface of the second upper protruding plate 50 and coupled to a direction in which the conductive protrusion 40 is positioned;
A control member 70 that applies electricity to the first upper conductive plate 30 and the second upper conductive plate 60 and controls electricity and voltage;
And a transformer (80) capable of adjusting a voltage provided to the control member (70).
 제 1 항에 있어서,
상기 제1상방돌출판(20)과 상기 제2상방돌출판(50) 사이의 거리는, 2 센치미터 내지 3 센치미터이며,
상기 컨트롤부재(70)는 상기 제1상방도전판(30)과 제2상방도전판(60)에 15000 볼트, 60 헤르츠(Hz)의 전기를 인가하는 것을 특징으로 하는 플라즈마 발생장치.
The method of claim 1,
The distance between the first upper protruding plate 20 and the second upper protruding plate 50 is 2 cm to 3 cm,
Wherein the control member (70) applies electricity of 15000 volts and 60 hertz (Hz) to the first upper conductive plate (30) and the second upper conductive plate (60).
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