KR20200120490A - Flat Type Lamp for Photoionization Detector and Method for Manufacturing the same - Google Patents

Abstract

A disclosed flat lamp for a photoionization detector comprises: a first plate provided in a plate shape and having a first surface in which a plurality of discharge cavities are formed; a second plate sealed against the first plate on the first surface of a lower plate to isolate the plurality of discharge cavities from the outside; electrodes provided on the first and second plates, respectively, and provided to face each other; and a discharge gas filled in the plurality of discharge cavities and generating vacuum ultraviolet rays by electric force applied through the electrodes.

Description

Flat Type Lamp for Photoionization Detector and Method for Manufacturing the same}

The present invention (Disclosure) relates to a lamp for a flat plate type photo-ionization detector and a method for manufacturing the same, specifically, it is easy to large or small, and can be mass-produced with uniform characteristics, and when applied to a photoionization sensor, The present invention relates to a lamp for a plate-type photo-ionization detector capable of improving sensitivity by increasing the ionization cross-sectional area of a measurement gas since it is possible to irradiate vacuum ultraviolet rays for photo-ionization, and a manufacturing method thereof.

Here, background technology related to the present invention is provided, and these do not necessarily mean known technology (This section provides background information related to the present disclosure which is not necessarily prior art).

Photoionization, a kind of photoelectric effect that releases valence electrons that absorb photons when light is illuminated with a certain frequency or higher, is when atoms are ionized according to photoionization by using ionized atoms. , The electrical detection of the atom becomes easy. That is, by forming an electrical circuit with ionized atomic nuclei or electrons, a specific substance can be detected.

Photo-ionization detector (Poto-Ionization Detector, hereinafter referred to as PID), which uses this photo-ion phenomenon, and a PID lamp that generates light that ionizes atoms is the most important key component.

A typical PID lamp has a structure in which discharge gas is filled in a sealed glass tube, and the discharge gas is excited by direct current (DC) or radio frequency (RF).

The wavelength of the emitted light varies according to the type of discharge gas, and a general PID lamp emits vacuum ultraviolet rays (VUV) having a wavelength of 10 nm to 200 nm, which is sufficiently higher than the ionization energy of the material to be detected.

A conventional PID lamp is manufactured by forming a vacuum inside a glass tube structure, filling a discharge gas in that state, and then fusing the glass tube.

Due to this manufacturing method, since conventional PID lamps are individually produced one by one, mass production is difficult, and it is difficult to maintain uniform characteristics.

In addition, since the conventional PID lamp is limited in size by the diameter of the tube, there is a problem in that the size change is limited. In particular, there is a limitation in reducing the diameter of the tube for vacuuming the inside of the tube and injecting discharge gas.

In addition, since conventional PID lamps are virtually impossible to irradiate with vacuum ultraviolet rays for photoionization in a wide area when applied to a photoionization sensor, there is a limit to increasing the sensitivity of the photoionization sensor.

1. Korean Registered Patent Publication No. 10-2015-0070445

An object of the present invention is to provide a lamp for a plate-type photo-ionization detector and a method for producing the same, which is easy to be large or small and can be mass-produced with uniform characteristics.

The present invention (Disclosure) provides a flat plate-type photo-ionization detector lamp capable of irradiating vacuum ultraviolet light for photo-ionization in a wide area to improve sensitivity by increasing the ionization cross-sectional area of a measurement gas when applied to a photo-ionization sensor, and a manufacturing method thereof. Is for work purposes.

Here, a summary of the present invention is provided, and this section provides a general summary of the disclosure and is not a comprehensive disclosure of its full scope or all of its features).

In order to solve the above problems, the lamp for a plate-type photo-ionization detector according to any one of the various aspects describing the present invention is provided in a plate shape, and a plurality of discharge cavities are formed. A first plate having one side; A second plate material that is sealed against the first plate material at the first surface of the lower plate to isolate the plurality of discharge cavities from the outside; Electrodes provided on the first and second plates, respectively, and provided to face each other; And a discharge gas that is filled in the plurality of discharge cavities and generates vacuum ultraviolet rays by electric force applied through the electrodes.

In the lamp for a plate-type photo-ionization detector according to any one of the various aspects describing the present invention, the plurality of discharge cavities may include a thickness of the first plate from the first surface of the first plate. It is formed by depression in the direction.

In the lamp for a plate-type photo-ionization detector according to any one of several aspects describing the present invention, the plurality of discharge cavities are provided by being bonded on the first surface of the first plate, and the first It is formed by spacers that divide one surface into a plurality of regions.

In the lamp for a plate-type photo-ionization detector according to any one of the various aspects describing the present invention, the discharge gas is isolated from the outside and the second plate material is the second plate in the chamber filled with the discharge gas. It is bonded to one plate and simultaneously filled in the plurality of discharge cavities.

In the lamp for a plate-type photo-ionization detector according to any one of the various aspects describing the present invention, the discharge gas is provided in any one of the first and second plates, and the plurality of discharge cavities The plurality of discharge cavities are filled in the plurality of discharge cavities through a filling injection tube in communication with the filling tube, and an end of the filling injection tube is sealed and provided.

In the lamp for a plate-type photo-ionization detector according to any one of several aspects describing the present invention, the plurality of discharge cavities are sealed so as not to communicate with each other by the second plate material.

In the lamp for a plate-type photo-ionization detector according to one of the various aspects describing the present invention, the first and second plates are cut and provided to include at least one of the plurality of discharge cavities.

A method of manufacturing a lamp for a plate-type photo-ionization detector according to another aspect of the various aspects describing the present invention includes the steps of preparing the first and second plates (S10); Forming electrodes on the first and second plate materials to face each other with the plurality of discharge cavities therebetween (S20); Forming the plurality of discharge cavities on the first surface of the first plate (S30); Forming a sealing material for sealing with the second plate material on the first surface of the first plate material excluding inner surfaces of the plurality of discharge cavities (S40); Stacking and disposing the first and second plates in a chamber that can selectively isolate the inner space from the outside (S50); Separating the inner space of the chamber from the outside and evacuating the inner space (S60); Supplying the discharge gas to the inner space to form the inner space into an atmosphere with the discharge gas (S70); And curing the sealing material to seal the plurality of discharge cavities from the outside (S80).

In the method of manufacturing a lamp for a plate-type photo-ionization detector according to another aspect of the various aspects describing the present invention, one of the first and second plates is vacuum ultraviolet rays generated from the plurality of discharge cavities. And forming a reflective layer that functions as a window that emits radiation and reflects the vacuum ultraviolet rays to the window on the other side (S31).

In a method of manufacturing a lamp for a plate-type photo-ionization detector according to another aspect of the various aspects describing the present invention, heating the first plate material to remove internal impurities in the plurality of discharge cavities Step (S32); has.

In the method of manufacturing a lamp for a plate type photo-ionization detector according to another aspect of the various aspects describing the present invention, cutting the first and second plate materials to include at least one of the plurality of discharge cavities Step S90; has.

According to the present invention, since a plurality of discharge cavities between the first and second plates provided in a plate shape are filled with a discharge gas to have a plate-shaped lamp structure in which a plurality of discharge cells are integrated, the size of the lamp can be adjusted freely and particularly downsized. Is advantageous to In addition, it is possible to mass-produce lamps with uniform characteristics.

Due to the miniaturization of the lamp, there is an advantage that the photoionization sensor to which the lamp according to the present invention is applied can be miniaturized.

According to the present invention, since the generated vacuum ultraviolet rays are irradiated using a plurality of discharge cavities arranged in a plate shape, when applied to a photoionization sensor, the ionization cross-sectional area of the measurement gas can be increased, thereby improving sensitivity.

1 is a view showing an embodiment of a lamp for a plate-type photo-ionization detector according to the present invention.
2 is a view showing a modified example of FIG.
3 is a view showing another modified example of FIG.
4 is a view showing an embodiment of a method of manufacturing a lamp for a flat-type photo-ionization detector according to the present invention.
5 is a view for explaining a main part of FIG. 4.

Hereinafter, with reference to the drawings, a detailed description will be given of an embodiment in which a lamp for a plate-type photo-ionization detector and a method of manufacturing the same according to the present invention are implemented.

However, the intrinsic technical idea of the present invention cannot be said to be limited by the embodiments to be described below, and the intrinsic technical idea of the present invention is given below by a person skilled in the art. It turns out to cover the range that can be easily proposed by a method of substitution or change of the embodiment described in FIG.

In addition, since the terms used below are selected for convenience of description, in grasping the intrinsic technical idea of the present invention, it is not limited to the dictionary meaning and is appropriately interpreted as a meaning consistent with the technical idea of the present invention. Should be.

1 is a diagram showing an embodiment of a lamp for a flat plate type photo-ionization detector according to the present invention.

Referring to FIG. 1, the lamp 100 for a flat plate type photo-ionization detector according to the present embodiment includes first and second plate materials 110 and 120, a plurality of discharge cavities 111, electrodes 130, and discharge gas. do.

The first and second plate materials 110 and 120 are provided in a plate shape, and any material capable of transmitting vacuum ultraviolet rays may be used (eg, Glass, MgF ₂ ).

The first plate 110 has a plurality of discharge cavities 111 formed on the first surface 110a.

The plurality of discharge cavities 111 are formed by being depressed from the first surface 110a of the first plate 110 in the thickness direction of the first plate 110.

The shape of the plurality of discharge cavities 111 is not limited if they are partitioned from each other, but is preferably provided in a lattice shape in order to improve the degree of integration.

The plurality of discharge cavities 111 have a groove shape formed by removing a part of the first plate 110, and a physical etching method such as chemical etching or sand blasting may be applied as a method of forming the plurality of discharge cavities 111.

The plurality of discharge cavities 111 are isolated from the outside by sealing the second plate material 120 by abutting the first surface 110a of the first plate material 110.

Here, sealing means hermetic sealing.

In addition, for sealing, a sealing material 140 (e.g., ultraviolet resin, frit, bonding metal) is applied or deposited on the first and second plates 110 and 120, and laser, RF, microwave, IR A lamp is used, and adhesion is strengthened to improve sealing.

Meanwhile, the electrodes 130 are provided on the first and second plates 110 and 120, respectively, and are provided to face each other with each of the plurality of discharge cavities 111 interposed therebetween. The electrode 130 may be formed through vapor deposition.

The discharge gas is provided by being filled in a discharge space formed by the plurality of discharge cavities 111 and the second plate 120, and an inert gas that generates vacuum ultraviolet rays by electric force applied through the electrode 130 ( Example: Xe, Kr).

In this embodiment, the discharge gas is filled in the plurality of discharge cavities 111 simultaneously with the bonding process of the first plate material 110 and the second plate material 120 in which the plurality of discharge cavities 111 are formed.

To understand this, it is unnecessary to form filling holes in the first and second plates 110 and 120 to fill the discharge gas into each of the plurality of discharge cavities 111 or to form a glass tube for filling. In addition, since the density of the discharge gas filled in the plurality of discharge cavities 111 is uniform, a plurality of lamps having the same discharge characteristics can be manufactured.

This can be solved by bonding the first and second plates 110 and 120 in a chamber in a discharge gas atmosphere.

Specifically, after placing the first and second plates 110 and 120 in the chamber 160 isolated from the outside and filled with discharge gas, the inside of the chamber 160 is vacuumed, and then discharge gas is injected into the chamber 160 to remove the The second plate material 120 is bonded to the first plate material 110 while the first and second plates 110 and 120 are placed in a discharge gas atmosphere.

In this process, the discharge gas is uniformly injected into the plurality of discharge cavities 111 at the same time as the bonding of the second plate 120 and the first plate 110.

On the other hand, in this embodiment, the plurality of discharge cavities 111 are sealed by the second plate member 120 so as not to communicate with each other. Accordingly, the first and second plate materials 110 and 120 can be cut to individualize the lamp 100.

In this case, the individualized lamp 100 may be individually activated to include one or several of the plurality of discharge cavities 111 according to the shape of the photoionization sensor or the needs of the designer.

On the other hand, in this embodiment, while the first and second plate members 110 and 120 are sealed, all or part of the plurality of discharge cavities 111 may be provided to communicate with each other.

This can be formed by slightly lowering the height of the wall partitioning the plurality of discharge cavities 111 in the process of forming the plurality of discharge cavities 111.

Accordingly, it has the advantage of uniformly maintaining the density of the discharge gas filled in the plurality of individualized discharge cavities 111.

2 is a view showing a modified example of FIG. 1.

Referring to FIG. 2, the lamp 100 for a flat plate type photo-ionization detector according to the present embodiment is the embodiment described above except that a spacer 113 is provided to form a plurality of discharge cavities 111. Is the same as

The spacer 113 is a structure bonded to the first surface 110a of the first plate material 110 and divides the first surface into a plurality of regions.

Thereby, in order to form a plurality of discharge cavities 111, it differs from the previous embodiment in which the first plate material 110 is removed.

3 is a view showing another modified example of FIG. 1.

Referring to FIG. 3, in order to fill the discharge gas in the plurality of discharge cavities 111, except for having a filling injection tube 150 communicating with the plurality of discharge cavities 111, Is the same.

The filling injection pipe 150 extends from one side of the first and second plate materials 110 and 120 and is integrally formed of the same material as the first and second plate materials 110 and 120. In addition, the filling injection pipe 150 has a configuration in which one side is in communication with a plurality of discharge cavities 111 and the other side is connected to a device for vacuum exhaust and discharge gas supply.

For this reason, the filling of the discharge gas is completed in the plurality of discharge cavities 111, and the end of the filling injection pipe 150 needs to be sealed.

In addition, a plurality of discharge cavities 111 are provided to communicate with each other.

As a matter of course, by providing a plurality of filling injection tubes 150, a plurality of discharge cavities 111 may be divided into groups, and each group may be provided to communicate with each other.

In the case of this embodiment, large size or miniaturization is easy, mass production is possible with uniform characteristics, and when applied to a photoionization sensor, vacuum ultraviolet irradiation for photoionization is possible on a wide surface, so that the ionization cross-sectional area of the measurement gas is increased. Maintains the advantage of improving sensitivity.

FIG. 4 is a view for explaining a method of manufacturing a lamp for a flat plate type photo-ionization detector according to the present invention, and FIG. 5 is a view for explaining a main part of FIG. 4.

Referring to FIGS. 4 and 5, the method of manufacturing a lamp for a plate-type photo-ionization detector according to the present embodiment includes the steps of preparing the first and second plates 110 and 120 (S10), and the first and second plates 110 and 120 Forming the electrode 130 so as to face each other with the plurality of discharge cavities 111 therebetween (S20), a plurality of discharge cavities 111 on the first surface 110a of the first plate 110 Forming (S30), forming a second plate 120 and a sealing material for sealing on the first surface 110a of the first plate 110 excluding the inner surface of the plurality of discharge cavities 111 ( S40), the step of stacking and arranging the first and second plates 110 and 120 in the chamber 160 that can selectively isolate the inner space from the outside (S50), and isolate the inner space of the chamber 160 from the outside, Evacuating the internal space (S60), supplying discharge gas to the internal space, forming the internal space into an atmosphere with discharge gas (S70), curing the sealing material 140, and a plurality of discharge cavities 111 It includes a step (S80) of sealing from the outside.

In step S30, the plurality of discharge cavities 111 are formed by forming grooves on the first surface 110a by physical etching such as chemical etching or sandblasting, as described above, or using the spacer 113 It can be formed on the surface (110a).

According to this, as shown in Fig. 3, it has a differentiated feature in that there is no filling injection tube 150.

In this embodiment, one of the first and second plates 110 and 120 functions as a window emitting vacuum ultraviolet rays generated in the plurality of discharge cavities 111, and the other forms a reflective layer that reflects the vacuum ultraviolet rays as a window. It is preferable to have a step (S31).

Further, in this embodiment, it is preferable to have a step (S32) of heating the first plate material 110 in order to remove internal impurities in the plurality of discharge cavities 111.

To this end, it is preferable that the heater 180 is provided on the bottom surface on which the first plate 110 is mounted in the chamber 160.

Further, in this embodiment, a step (S90) of cutting the first and second plate members 110 and 120 to include at least one of the plurality of discharge cavities 111 is provided.

This is a process for individualization of the lamp described above.

Claims (1)

A first plate formed in a plate shape and having a first surface on which a plurality of discharge cavities are formed;
A second plate material that is sealed against the first plate material at the first surface of the lower plate to isolate the plurality of discharge cavities from the outside;
Electrodes provided on the first and second plates, respectively, and provided to face each other; And
Discharge gas that is filled in the plurality of discharge cavities and generates vacuum ultraviolet rays by electric force applied through the electrodes.

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