KR20200099796A - System and Method for Generating source code of SECS Message - Google Patents

Abstract

The present invention relates to a system for automatically generating a source code of an SECS message corresponding to an SECS communication protocol defined in any semiconductor or display production line and a method thereof. According to the present invention, the system for automatically generating a source code of an SECS message, which generates a source code of an SECS message executable in a computer on the basis of on the SECS message expressed in an SECS message language (SML), comprises: an SML message storage module for storing an SECS message expressed in an SML input from a user; and a source code generating module for interpreting the SECS message expressed in the SML, extracting an input error, and generating a class and a variable on the basis of the SECS message expressed in the SML. The source code generating module reads a data unit and a head unit of the SECS message expressed in the SML and detects an error, sets a class name on the basis of information on the head unit, generates a main class, reflects attributes of an element in response to a data item element of the data unit, and generates a variable having the same name as that of a data item in the main class.

Description

SECS message source code automatic generation system and method {System and Method for Generating source code of SECS Message}

The present invention relates to a system and method for automatically generating a SECS message source code, and more particularly, a system and method for automatically generating a message source code corresponding to the SECS communication protocol defined in an arbitrary semiconductor or display production line. It is about.

In general, since the semiconductor or display industry is a device-intensive industry, not only very many types of process equipment are used in the manufacturing process, but also various types of equipment such as assembly equipment, test equipment, and inspection equipment are used in addition to the process equipment.

In the semiconductor or display production line, the system is from a plurality of equipments 111, 112, 113 that perform various work processes on a product and the plurality of equipments 111, 112, 113, as shown in FIG. A host 130 that monitors the production process and provides data necessary to proceed with each process, and a plurality of devices that correspond to each of the devices 111, 112, and 113 to interconnect each device and the host 130 Computer Intergrated Manufacturing (CIM) PCs (121, 122, 123) are included.

The host 130 controls the corresponding devices 111, 112, 113 through a plurality of CIM PCs 121, 122, 123, and for this, a standardized communication protocol between the host and the CIM PC is essential. . At this time, the protocol used is the SECS (Semiconductor Equipment Communications Standard) protocol, which is a semiconductor manufacturing equipment communication standard.

When a semiconductor product or display product manufacturer builds a new production line, a SECS communication protocol that is applied to the production line is created and distributed to each CIM PC manufacturer, and each CIM PC manufacturer sends a SECS communication message based on the corresponding SECS communication protocol. Program. When the production line is in operation, the host and each CIM PC exchange data using the SECS communication message in the format defined in the SECS communication protocol.

In other words, the CIM PC must be able to interpret the SECS communication message transmitted from the host to the device according to the SECS communication protocol, and must be able to transmit the process process and result message of the device to the host according to the SECS communication protocol. For this, the SECS message source code must be executed on the CIM PC.

The SECS message source code was manually produced by the programmer of the CIM PC manufacturer. The process of producing the SECS message source code in the CIM PC manufacturer is as shown in FIG. 2.

First, the product manufacturer distributes the SECS communication protocol set defined in the new production line, and the CIM PC manufacturer receives it (S21). Since this SECS communication protocol contains all message protocols for communication with all types of equipment connected to the production line, the CIM PC manufacturer extracts only the SECS messages required for the relevant equipment from the SECS communication protocol. Defined (S22). Thereafter, the source code is manually generated by coding the SECS message defined by reflecting the SECS communication protocol in C# programming language (S23). The generated SECS message source code is installed and executed on the CIM PC after the simulation test (S24).

In the related art, since SECS messages are manually coded in C# programming language based on the SECS communication protocols distributed in the production line, it requires a skilled technician and a lot of time, and there is a high risk of input errors. Such an input error cannot be detected during coding, and is detected during a simulation test, so that a lot of time and effort are consumed in the process of finding an error in the completed source code.

Korean Patent Registration No. 10-0872740 Republic of Korea Patent Publication No. 2017-0127348

The object of the present invention, conceived to solve the problems of the prior art, is a source code automatic generation system that automatically generates a SECS message in C# programming language based on the SECS communication protocol defined in any semiconductor or display production line, and To provide a way.

The SECS message source code automatic generation system according to the present invention for achieving the above-described object automatically generates SECS message source codes executable in a computer based on SECS messages expressed in SML (SECS Message Language). In the generation system,

An SML message storage module for storing a SECS message expressed in SML input from a user;

A source code generation module that interprets the SECS message expressed in the SML, extracts an input error, and generates a class and a variable based on the SECS message expressed in the SML,

The source code generation module reads the head part and the data part of the SECS message expressed in the SML, detects an error, sets a class name based on the information of the head part, and creates a main class, and the data item of the data part In response to the element, a variable reflecting the attribute of the element and having the same name as the data item is created in the main class.

The method for automatically generating SECS message source codes according to this invention is a source that generates SECS message source codes executable in a computer based on SECS messages that are loaded into a memory and executed by a processor unit, and expressed in SML (SECS Message Language). In the method for automatically generating SECS message source code in a computer including a code generation module,

A first step of the processor unit reading the head part and the data part of the SECS message expressed in the SML and detecting an error,

A second step in which the processor unit sets a class name based on the information of the head and generates a main class,

And a third step of generating, by the processor unit, a variable having the same name as the data item in the main class, reflecting the attribute of the element corresponding to the data item element of the data unit.

As described above, according to this invention, since the C# program source code corresponding to the SECS message is automatically generated by reading the SECS communication protocol, it is possible to shorten time and manpower, and that occurs in the process of digitizing the SECS communication protocol. Since input errors can be automatically detected, time and effort required for error detection can be saved.

1 is a block diagram of a general semiconductor or display production line.
2 is a flowchart illustrating a conventional SECS message source code generation process.
3 is a block diagram of a computer terminal including a system for automatically generating a SECS message source code according to the present invention.
4 is a flowchart illustrating a method of automatically generating a SECS message source code according to the present invention.
5 is a diagram showing an example of the SECS source code of a C# program automatically generated according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In describing the present invention, when it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, a detailed description thereof will be omitted. In addition, terms to be described later are terms defined in consideration of functions in the present invention, which may vary according to the intention or custom of users or operators. Therefore, the definition should be made based on the contents throughout this specification.

Before describing the present invention, a SECS communication protocol will be described. The message of the SECS communication protocol consists of a stream value representing the category of similar messages and a function value, which is a number representing a specific message in each stream, and the SECS message is displayed according to the stream value and function value. The purpose is determined.

Table 1 below is a table illustrating the message usage and the corresponding message transmission direction (message transmission direction between the host and the device) corresponding to some stream (S) values and function (F) values.

Stream, Function Message purpose direction
H (host), E (equipment) S1F1 Are You There Request H ↔ E ... ... ... S1F3 Selected Equipment Status Request H ← E ... ... ... S2F2 Trace Send H → E ... ... ...

Table 2 below is an example of an arbitrary SECS message expressed in SML (SECS Message Language).

<S2F28 TraceInitializeSend
<LIST 6
<ASCⅡ22 MODULEID>
<UINT2 1 TRID>
<ASCⅡ10 DISPER>
<UINT2 1 TOTSMP>
<UINT2 1 REPGSZ>
<LIST n SVList
<UINT2 1 SVID>
>
>
>

In this way, the SECS message expressed in SML is composed of a head part composed of a stream value ('S2'), a function value ('F28'), and a purpose of the message ('TraceInitializeSend'), and a data part. An opening parenthesis ('<') is written at the beginning of the head and the beginning of the data.

In the data part,'LIST' and number ('List 6') are written first, which means that the number of elements in the main block constituting the SECS message is six.

Each element is written between a pair of parentheses ('<','>'), and for each element, the data item name and the attribute (letter/number, size) of the data item are expressed. In the above example,'MODULEID','TRID','DISPER','TOTSMP','REPGSZ', etc. are data item names,'ASCⅡ' is a character attribute,'UINT2' is a numeric attribute, '22', ' 1', '10', etc. mean size properties, respectively. Information on various data items is defined in the Data Item Dictionary of SECS communication protocol.

As one element constituting the main block of the SECS message, sub-blocks may be included. In the above example, "'<LIST n SVList''<UINT2 1 SVID>''>'" is a sub-block. As one element of the main block, a sub-block having n arbitrary sub-elements (an unspecified number) is included, and the sub-element is a 2-byte SVID. Sub-elements are written between a pair of parentheses ('<','>'), and a sub-block is also written between a pair of parentheses ('<','>').

After all the elements of the main block are written, parentheses ('>') closing the data part are written, and then parentheses ('>') closing the head part are written.

This invention proposes a method of receiving the SECS message expressed in SML as described above and generating it as a C# program source code.

The system for automatically generating the SECS message source code according to the present invention is implemented with a conventional computer terminal.

3 is a block diagram of a computer terminal including a system for automatically generating a SECS message source code according to the present invention.

Typically, this computer terminal includes a memory 210, a processor unit 220, and a plurality of peripheral devices. As a peripheral device, a communication unit 230, a monitor 240, an input unit 250, a camera 260, and a microphone 270 may be included.

The processor unit 220 includes a memory interface 221, one or more processors 222, and a peripheral device interface 223. In some cases, the entire processor unit is also referred to as a processor. The memory interface 221, one or more processors 222, and/or the peripheral device interface 223 may be separate components or may be integrated into one or more integrated circuits. The processor 222 executes various software programs and executes a specific software module (instruction set) stored in the memory 210 to perform various functions corresponding to the module. The peripheral device interface 223 connects various peripheral devices to the processor 222 and memory (via a memory interface) 210.

The memory 210 stores a software program. In the software, the operating system module 211, the communication module 212, the graphic module 213, the user interface module 214, the SML message storage module 215, and the source code generating the SML version of the SECS message as a source code are generated. Module 216 is included. Since a module, which is a software component, can be expressed as a set of instructions, a module is sometimes expressed as an instruction set or a program.

The operating system module 211 includes various software components that control general system operation. For example, control of general system operations means memory management and control, storage hardware control and management, and power control and management. The operating system module 211 performs a function of facilitating communication between various hardware devices and software components. The communication module 212 enables communication with an external communication network through the communication unit 230. The graphic module 213 includes various software components for graphically displaying various contents and software GUIs on the monitor 240. The user interface module 214 includes various software components related to the user interface. It includes information on how the state of the user interface changes or under what conditions the state of the user interface changes.

The SML message storage module 215 stores the SECS message expressed in SML input from the user. The SECS message expressed in this SML is shown in Table 2, and since it is usually handwritten by a notepad program, an input error may be included.

The source code generation module 216 interprets the SECS message expressed in SML, extracts an input error, and generates a C# programming language class based on the SECS message expressed in SML. A process in which the source code generation module 216 generates a class based on the SML-based SECS message is illustrated in FIG. 4.

4 is a flowchart illustrating a method of automatically generating a SECS message source code according to the present invention.

The source code generation module 216 reads the SECS message expressed in SML from the SML message storage module 215, and the corresponding SECS message includes a head opening parenthesis, a head unit, a data unit opening parenthesis, and at least a pair of element parentheses. It is detected whether the data part, the data closing parenthesis, and the head part closing parenthesis are included (S401). If all elements are included in step S401 (S402), the process proceeds to step S403, and if not included, it is recognized as an error of the SECS message (S404).

The source code generation module 216 extracts stream values, function values, and message usage information from the head of the SECS message (S403), and detects a LIST number written in the main block of the data portion (S405). This LIST number must match the number of elements included in the main block.

The source code generation module 216 detects the number of elements based on a pair of parentheses included in the main block of the data unit (S406).

If the LIST number detected in step S405 and the number of elements detected in step S406 match (S407), the source code generation module 216 proceeds to step S408, and if not, recognizes the SECS message as an error (S404).

If it is determined that there is no error in the SECS message expressed in SML in steps S402 and S407, the source code generation module 216 stores head information, that is, stream value, function value, and message usage information, as shown in FIG. Based on the class name ('S2F23_TraceInitializeSend_Model'), the main class 51 of the corresponding class name is created (S408).

In addition, the source code generation module 216 sequentially extracts elements of the data unit, and detects whether the corresponding element type is a data item or a sub-block (S409). Each element of the data part can be extracted based on a pair of parentheses.

If the type of the extracted element is a data item (S410), the source code generation module 216 creates a variable reflecting the attribute information of the element in the main class, and sets the name of this variable as the data item name of the element (S411). ). That is, for'MODULEID' and'DISPER' among the data items listed in Table 2, as shown in FIG. 5, a variable of a string attribute having the same name in the main class 51 is created, respectively, and'TRID' and ' For TOTSMP' and'REPGSZ', as shown in FIG. 5, variables of numeric string properties having the same name in the main class 51 are respectively generated.

If the type of the extracted element is not a data item but a sub-block (S410), the source code generation module 216 creates a LIST variable in the main class, and a sub-element consisting of variables reflecting attribute information of sub-elements included in the sub-block. A class 52 is created, and the LIST variable of the main class is set to refer to the subclass (S412). In FIG. 5, a LIST variable called'SVList' is created in the main class 51, a subclass 52 called'S2F23_TraceInitializeSend_SVList' is created, and a source code in which the LIST variable refers to the subclass is described.

Steps S409 to S412 are repeatedly performed for all elements (S413).

The SECS message source code generated in this way is executed by a program developer after a program development work, and then a simulation test is performed as before, and is installed and executed on the CIM PC.

In the above, the technical idea of the present invention has been described together with the accompanying drawings, but this is illustrative of the best embodiment of the present invention, but does not limit the present invention. In addition, it is a clear fact that anyone of ordinary skill in the art can perform various modifications and imitations without departing from the scope of the technical idea of the present invention.

210: memory 211: operating system module
212: communication module 213: graphic module
214: user interface module 215: SML message storage module
216: source code generation module 220: processor unit

Claims (8)

In the SECS message source code automatic generation system that generates a SECS message source code executable in a computer based on the SECS message expressed in SML (SECS Message Language),
An SML message storage module for storing a SECS message expressed in SML input from a user;
A source code generation module that interprets the SECS message expressed in the SML, extracts an input error, and generates a class and a variable based on the SECS message expressed in the SML,
The source code generation module reads the head part and the data part of the SECS message expressed in the SML, detects an error, sets a class name based on the information of the head part, and creates a main class, and the data item of the data part The system for automatically generating SECS message source code, comprising generating a variable in the main class that reflects the attribute of the element and has the same name as the data item corresponding to the element. The subclass of claim 1, wherein the source code generation module generates a LIST variable in the main class in response to a sub-block element of the data unit, and includes a variable reflecting attribute information of sub-elements included in the sub-block. And setting the LIST variable of the main class to refer to the subclass. SECS message source code in a computer including a source code generation module that is loaded into memory and executed by the processor unit and generates SECS message source code executable in a computer based on the SECS message expressed in SML (SECS Message Language). In the automatic generation method,
A first step of the processor unit reading the head part and the data part of the SECS message expressed in the SML and detecting an error,
A second step in which the processor unit sets a class name based on the information of the head and generates a main class,
Automatic SECS message source code, characterized in that the processor unit includes a third step of reflecting the attribute of the element in correspondence with the data item element of the data unit and generating a variable having the same name as the data item in the main class. Creation method. The method of claim 3,
The processor unit generates a LIST variable in the main class, corresponding to the sub-block element of the data unit, and creates a sub-class consisting of variables reflecting attribute information of the sub-elements included in the sub-block, and the LIST of the main class The method of automatically generating SECS message source code, further comprising a fourth step of setting a variable to refer to the subclass. The method of claim 3,
In the first step, the processor unit receives the SECS message expressed in the SML as a head opening parenthesis, a head unit, a data unit opening parenthesis, a data unit including at least a pair of element parentheses, a data closing parenthesis, and a head closing parenthesis. SECS message source code automatic generation method, characterized in that detecting whether parentheses are included. The method of claim 3,
In the first step, the processor unit automatically generates a SECS message source code, wherein the processor unit detects whether the LIST number written in the main block of the data unit matches the number of elements included in the main block. The method of claim 3,
The second step is, wherein the processor unit sets the class name based on the stream value, function value, and message usage information of the head unit. The method of claim 3,
The attribute of the element is a letter or number, and the variable is a string variable or a numeric string variable.

Images