KR20200031027A - Scanner, scanner module, and electronic apparatus including the same - Google Patents

Abstract

The present invention relates to a scanner, to a scanner module, and to an electronic device providing the same. The scanner for a vehicle of the present invention comprises: a mirror rotating about a first axis in a direct manner; first and second mirror support members respectively connected to first and second sides of the mirror; first and second mirror springs respectively connected to the first and second mirror support members; a plurality of combs supplying constant power-based rotational force to the mirror; and a substrate formed spaced apart from the outside of the mirror. A distance between the center of the mirror and the substrate based on the second axis intersecting the first axis is 1.41 to 4.41 times the radius of the mirror. Accordingly, wide-angle scanning is possible.

Description

Scanner, scanner module, and electronic apparatus including the same

The present invention relates to a scanner, a scanner module and an electronic device having the same, and more particularly, to a scanner capable of wide-angle scanning, a scanner module and an electronic device having the same.

Optical-based MEMS scanners have been developed for projector-based displays, and have recently been adopted in riders, etc. for the detection of users in robots, drones, vehicles, driving aids, or home appliances. .

When the MEMS scanner is used for driving assistance or user detection, research has been conducted in consideration of the lowest frequency, driving angle, and mirror size to secure reliability.

An object of the present invention is to provide a scanner capable of wide-angle scanning, a scanner module, and electronic devices having the same.

Another object of the present invention is to provide a scanner, a scanner module and an electronic device having the same, which can reduce the element size while reducing optical interference.

Another object of the present invention is to provide a scanner, a scanner module, and an electronic device having the same, with improved horizontal and vertical resolution and beam reflection performance.

A vehicle scanner according to an embodiment of the present invention for achieving the above object, a scanner module and an electronic device having the same, a mirror rotating about a first axis in a direct manner, and first and second mirrors First and second mirror support members connected to the side, first and second mirror springs respectively connected to the first and second mirror support members, and a plurality of combs for supplying a rotational force based on constant power to the mirror ( comb) and a substrate formed spaced apart from the outside of the mirror, and the distance between the center of the mirror and the substrate on the basis of the second axis intersecting the first axis is 1.41 to 4.41 times the radius of the mirror.

On the other hand, when rotating about the first axis of the mirror, the size of the rotation angle compared to the second axis is 25 to 40 degrees.

On the other hand, a step is formed on the substrate, and the difference between the center of the mirror or the center of the top of the mirror and the step of the substrate may be within 0.53 times the radius of the mirror.

On the other hand, a step is formed on the substrate, and the substrate may be formed lower than the center of the mirror with respect to the second axis.

On the other hand, the height of the stepped substrate may increase as the distance from the mirror increases.

On the other hand, the distance between the mirror and the substrate on the basis of the second axis intersecting the first axis may be 0.41 to 3.41 times the radius of the mirror.

To achieve the above object, a scanner according to another embodiment of the present invention, a scanner module, and an electronic device equipped with the same, the mirror rotating about the first axis in a direct manner, and the first and second sides of the mirror, respectively A first axis and a second mirror spring connected to each other, and at least one coil connected to the first and second mirror springs, and a substrate formed spaced apart from the outside of the mirror, the second axis intersecting the first axis The distance between the center of the mirror and the substrate is 1.41 to 4.41 times the radius of the mirror.

On the other hand, when rotating about the first axis of the mirror, the size of the rotation angle compared to the second axis is 25 to 40 degrees.

On the other hand, a step is formed on the substrate, and the difference between the center of the mirror or the center of the top of the mirror and the step of the substrate is within 0.53 times the radius of the mirror.

Meanwhile, a step is formed on the substrate, and the substrate is formed lower than the center of the mirror with respect to the second axis.

On the other hand, the height of the substrate on which the step is formed increases as the distance from the mirror increases.

Meanwhile, a first pattern and a second pattern attached to the first and second sides of the mirror are further included on the rear surface of the mirror.

On the other hand, the distance between the mirror and the substrate on the basis of the second axis intersecting the first axis is 0.41 to 3.41 times the radius of the mirror.

On the other hand, it further includes a rim connected to the mirror, the first and second mirror springs.

Meanwhile, the third and fourth mirror springs further connected to the first and second mirror springs and extending in the second axis direction crossing the first axis.

Meanwhile, the widths of the third and fourth mirror springs are larger than the widths of the first and second mirror springs.

A vehicle scanner according to an embodiment of the present invention, a scanner module, and an electronic device having the same, include a mirror that rotates about a first axis in a direct manner, and are connected to first and second sides of the mirror, respectively. The first and second mirror support members, the first and second mirror springs respectively connected to the first and second mirror support members, and a plurality of combs for supplying a rotational force based on constant power to the mirror, and The distance between the center of the mirror and the substrate on the basis of the second axis intersecting the first axis including the substrate formed spaced apart from the outside is 1.41 to 4.41 times the radius of the mirror. Accordingly, wide-angle scanning becomes possible.

On the other hand, when rotating about the first axis of the mirror, the size of the rotation angle compared to the second axis is 25 to 40 degrees. Accordingly, wide-angle scanning becomes possible.

On the other hand, a step is formed on the substrate, and the difference between the center of the mirror or the center of the top of the mirror and the step of the substrate may be within 0.53 times the radius of the mirror. Accordingly, wide-angle scanning becomes possible.

On the other hand, a step is formed on the substrate, and the substrate may be formed lower than the center of the mirror with respect to the second axis. Accordingly, wide-angle scanning becomes possible.

On the other hand, the height of the stepped substrate may increase as the distance from the mirror increases. Accordingly, wide-angle scanning becomes possible.

On the other hand, the distance between the mirror and the substrate on the basis of the second axis intersecting the first axis may be 0.41 to 3.41 times the radius of the mirror. Accordingly, wide-angle scanning becomes possible.

On the other hand, it further includes a rim connected to the mirror, the first and second mirror springs. Accordingly, wide-angle scanning becomes possible.

Meanwhile, the third and fourth mirror springs further connected to the first and second mirror springs and extending in the second axis direction crossing the first axis. Accordingly, stress applied to the first and second mirror springs can be reduced.

Meanwhile, the widths of the third and fourth mirror springs are larger than the widths of the first and second mirror springs. Accordingly, stress applied to the first and second mirror springs can be reduced.

To achieve the above object, a scanner according to another embodiment of the present invention, a scanner module, and an electronic device equipped with the same, the mirror rotating about the first axis in a direct manner, and the first and second sides of the mirror, respectively A first axis and a second mirror spring connected to each other, and at least one coil connected to the first and second mirror springs, and a substrate formed spaced apart from the outside of the mirror, the second axis intersecting the first axis The distance between the center of the mirror and the substrate is 1.41 to 4.41 times the radius of the mirror. Accordingly, wide-angle scanning becomes possible.

On the other hand, when rotating about the first axis of the mirror, the size of the rotation angle compared to the second axis is 25 to 40 degrees. Accordingly, wide-angle scanning becomes possible.

On the other hand, a step is formed on the substrate, and the difference between the center of the mirror or the center of the top of the mirror and the step of the substrate is within 0.53 times the radius of the mirror. Accordingly, wide-angle scanning becomes possible.

Meanwhile, a step is formed on the substrate, and the substrate is formed lower than the center of the mirror with respect to the second axis. Accordingly, wide-angle scanning becomes possible.

On the other hand, the height of the substrate on which the step is formed increases as the distance from the mirror increases. Accordingly, wide-angle scanning becomes possible.

Meanwhile, a first pattern and a second pattern attached to the first and second sides of the mirror are further included on the rear surface of the mirror. Accordingly, through the scanner, horizontal resolution and vertical resolution and beam reflection performance can be improved.

On the other hand, the distance between the mirror and the substrate on the basis of the second axis intersecting the first axis is 0.41 to 3.41 times the radius of the mirror. Accordingly, wide-angle scanning becomes possible.

On the other hand, it further includes a rim connected to the mirror, the first and second mirror springs. Accordingly, wide-angle scanning becomes possible.

Meanwhile, the third and fourth mirror springs further connected to the first and second mirror springs and extending in the second axis direction crossing the first axis. Accordingly, stress applied to the first and second mirror springs can be reduced.

Meanwhile, the widths of the third and fourth mirror springs are larger than the widths of the first and second mirror springs. Accordingly, stress applied to the first and second mirror springs can be reduced.

1 is a view showing the appearance of an electronic device having a scanner according to an embodiment of the present invention.
2A illustrates an internal block diagram of an optical output unit having a scanner according to an embodiment of the present invention.
FIG. 2B is a diagram illustrating a scanning method during light projection of the scanner module of FIG. 2A.
2C is a view for explaining the operation of a conventional horizontal incidence scanner.
Figure 3a is a view showing the front of the scanner according to an embodiment of the present invention.
3B is a view showing the rear surface of the scanner of FIG. 3A.
3C to 3E are diagrams showing various examples of a constant power type scanner according to an embodiment of the present invention.
4A to 5D are views referred to in the description of FIGS. 3A to 3E.
6 is a side view of a scanner module according to an embodiment of the present invention.
7A is a view showing the front side of a scanner according to another embodiment of the present invention.
7B is a view showing the back surface of the scanner of FIG. 7A.
7C to 7E are diagrams showing various examples of an electromagnetic force type scanner according to an embodiment of the present invention.
8A to 8D are views referred to in the description of FIGS. 7A to 7E.
9A is a view showing the front side of a scanner according to another embodiment of the present invention.
9B is a view showing the rear surface of the scanner of FIG. 9A.
10A is a view showing the front side of a scanner according to another embodiment of the present invention.
10B is a view showing the rear surface of the scanner of FIG. 10A.

Hereinafter, the present invention will be described in more detail with reference to the drawings.

The suffixes "modules" and "parts" for components used in the following description are given simply by considering the ease of writing the present specification, and do not give meanings or roles particularly important in themselves. Therefore, the "module" and the "unit" may be used interchangeably.

The electronic devices described in this specification include robots, drones, vehicles, and the like, which can be used for driving, and, for the detection of users, refrigerators, washing machines, air conditioners, electronic doors, and automatic temperature control devices And home appliances.

On the other hand, the scanner described in this specification is a scanner employed in Lidar or the like, and outputs light in front.

1 is a view showing an electronic device having a scanner according to an embodiment of the present invention.

Referring to the drawing, the electronic device 200 may include a light output unit 205 for forward light output. Meanwhile, the light output unit 205 may be implemented as a scanner.

Meanwhile, the light output unit 205 may each include a scanner according to an embodiment of the present invention.

For example, the scanner in the light output unit 205 may output the scanned light OL to the front, approximately a few meters to several hundred meters ahead.

Meanwhile, the light output from the light output unit 205 is infrared light, and may have a wavelength of approximately 900-1550 nm.

2A illustrates an internal block diagram of an optical output unit having a scanner according to an embodiment of the present invention.

Referring to the drawings, the light output unit 205 may output light scanned outside the electronic device.

It is preferable that the light output unit 205 uses a laser diode having good straightness as a light source in order to output the scanned light OL from approximately a few meters to several hundred meters forward.

Meanwhile, the light output unit 205 includes a light source unit 210 for outputting infrared light and a driving unit 286 for driving the light source unit 210.

For example, the light source unit 210 may output infrared light having a wavelength of approximately 900 to 1550 nm.

Meanwhile, the light source unit 210 may be driven by an electric signal from the driving unit 286, and an electric signal from the driving unit 286 may be generated by control of the processor 170.

The infrared light output from the light source unit 210 is collimated through each collimator lens in the light collecting unit 212.

The light reflection unit 220 reflects the infrared light output from the light source unit 210 or the condensing unit 212, and outputs the path-changed infrared light in one direction. To this end, the light reflection unit 220 may include a 1D MEMS mirror.

For example, the light reflection unit 220 reflects the infrared light output from the light source unit 210 or the light collecting unit 212, and outputs the path-changed infrared light in the direction of the scanner module 240.

Meanwhile, the line beam forming unit 222 may form light from the light reflection unit 220 as a line beam. To this end, when the light reflection unit 220 is provided as a 1D MEMS, the line beam forming unit 222 may be excluded.

In particular, the line beam forming unit 222 may form and output a line beam having a straight line shape in consideration of the scanner module 240, which is capable of only one-way scanning.

Next, the light reflection unit 256 may reflect the line beam from the line beam forming unit 222 in the direction of the scanner module 240. To this end, the light reflection unit 256 may be provided with Total Mirror (TM).

Meanwhile, the scanner module 240 may scan the line beam reflected from the light reflection unit 256 in the first direction.

That is, the scanner module 240 may sequentially and repeatedly perform input line beam scanning in the first direction. Thereby, the scanned light OL corresponding to infrared light may be output to the outside.

FIG. 2B is a diagram illustrating a scanning method during light projection of the scanner module of FIG. 2A.

Referring to the drawings, light from the light source unit 210 is input to the scanner module 240 through the light reflection unit 220, the line beam forming unit 222, the light reflection unit 256, and the like, and the scanner module The 240 may sequentially and repeatedly perform the first direction scanning on the input light or line beam. .

As shown in the figure, the scanner module 240 may perform scanning from the left to the right in a diagonal direction or a horizontal direction, which is a first direction, with respect to the external area 40, centering on a scanable area. In addition, the scanning operation may be repeatedly performed on the entire external area 40.

By this scanning operation, it is possible to output infrared light scanned outside.

Meanwhile, the outer region 40 may be divided into a first region 42 and a second region 44, as shown in FIG. 2cb. Here, the first area 42 may be an area including the external object 43, that is, an active area 42, and the second area 44 does not include the external object 43 It may be a non-existing area, that is, a blank area 44.

Accordingly, the entire scanning section also includes a first scanning section corresponding to an active area 42 that is an area where an external object is present, and a blank area 44 which is an area where no external object is present. It may be divided into a second scanning section corresponding to.

2C is a view for explaining the operation of a conventional horizontal incidence scanner.

The conventional horizontal incidence method has been applied in a scanner 410x having an optical angle of 60 degrees or less, due to the failure limit of a silicon-based mirror spring at a large-diameter mirror, a high driving frequency, and a wide driving angle.

Referring to the drawing, the horizontal incidence method is a method in which the second axis (Axisx) and the third axis (Axisz) enter at a predetermined angle with respect to the third axis (Axisz).

On the other hand, the scanner 410x with an optical angle of 60 degrees according to the conventional horizontal incidence method mirrors the incident light OLx incident at an angle of at least 15 degrees based on the third axis (Axisz) to avoid light interference with the light source (MRx) By rotation of the, it is possible to provide a mirror (MRx) to output in one direction.

Accordingly, the incident light OLx incident at an angle of 15 degrees from the right with respect to the third axis (Axisz) is based on the incident light when the mirror is rotated 15 degrees to the left and right based on the center (MRC) of the mirror MRx To the left, reflected light (OLxa) is output.

In the drawing, it is shown that the optical angle of the mirror MRx is 60 degrees, which is the sum of 15 degrees on the right and 45 degrees on the left, compared to the third axis (Axisz).

That is, according to the conventional horizontal incidence-type scanner 410x of FIG. 2C, the minimum angle of incidence to avoid light interference between the incident light and the scanning reflected light must be secured, and the larger the optical angle of the scanner, the larger the horizontal The angle of incidence must be secured. However, as the horizontal angle of incidence and the rotation angle of the mirror increase, the effective area of the mirror decreases from the point of view of the incident light, and thus the light efficiency decreases, which is not preferable for wide-angle applications.

Accordingly, in the present invention, a vertical incidence method is used instead of a horizontal incidence method to implement a wide-angle scanner.

The vertical incidence method is a method in which light enters at a predetermined angle with the third axis (Axisz) or the third axis (Axisz) in a plane formed by the first axis (Axisy) and the third axis (Axisz). Accordingly, a wide angle can be realized without light interference between incident light and reflected light.

Depending on the vertical incidence method, in the vicinity of the third axis (Axisz) or the third axis (Axisz), light is incident in the mirror direction, and reflected light is output in both left and right directions based on the center of the mirror (MRC). do. In particular, symmetrical reflected light may be output in both left and right directions. When outputting symmetrically, it is possible to construct an optical system without optical interference of incident light in the third axis (Axisz) by using a transflective mirror or the like. This will be described with reference to FIG. 3A and below.

3A is a view showing the front of the scanner according to an embodiment of the present invention, and FIG. 3B is a view showing the back of the scanner of FIG. 3A.

Referring to the drawings, the scanner 410 according to an embodiment of the present invention may be a constant power based direct type scanner.

To this end, the scanner 410 is a first and second mirrors (MR) that rotates with respect to the first axis (Axisy) in a direct manner, and are respectively connected to the first and second sides of the mirror (MR) Mirror support members (SPa, SPb), first and second mirror springs (MSa, MSb) connected to the first and second mirror support members (SPa, SPb), respectively, and a constant power-based rotational force (MR) It includes a plurality of combs (CMBMa to CMBMd, CMBNa to CMBNd) supplied to), and a substrate SLC formed spaced apart from the outside of the mirror MR.

The substrate SLC is spaced apart from the mirror MR, and may be formed in a square shape outside the mirror MR.

Openings OPoa and OPob may be formed between the substrate SLC and the mirror MR. At this time, the openings OPoa and OPob may have a donut shape of a circular shape or an oval shape, as illustrated.

The first comb CMBMa to CMBMd among the plurality of combs is a movable comb, connected to the mirror MR, and capable of transmitting a constant power-based rotational force to the mirror MR.

Meanwhile, the second combs CMBNa to CMBNd among the plurality of combs are disposed corresponding to the first combs CMBMa to CMBMd, and may be fixed combs.

The rotational force is generated by the constant power between the first comb CMBMa to CMBMd and the second comb CMBNa to CMBNd, and the generated rotational force can be transmitted to the mirror MR.

On the other hand, in the drawing, in the first axis (Axisy) direction, the first and second mirror support members SPa and SPb are connected to the first and second sides of the mirror MR, and the first and second mirrors are connected. Although the first and second mirror springs MSa and MSb are respectively connected to the support members SPa and SPb, various modifications are possible.

For example, the scanner 410 further includes third and fourth mirror springs (not shown) connected to the first and second mirror support members SPa and SPb and symmetrically extending in the second axial direction. can do. Accordingly, it is possible to alleviate the stress of the first and second mirror springs MSa and MSb by the third and fourth mirror springs (not shown).

On the other hand, the mirror MR can be rotated in a direct manner around the first axis Axis where the first and second mirror springs MSa and MSb are disposed.

3A shows the front surface MRF of the mirror MR, and FIG. 3B shows the back surface MSB of the mirror MR.

Meanwhile, the first pattern PTa and the second pattern PTb attached to the first and second sides of the mirror MR may be further included on the rear surface MSB of the mirror MR. Accordingly, through the scanner 410, horizontal resolution and vertical resolution and beam reflection performance can be improved.

Meanwhile, the first pattern PTa and the second pattern PTb may have an arc shape spaced apart from the circumference of the mirror MR. Accordingly, through the scanner 410, horizontal resolution and vertical resolution and beam reflection performance can be improved.

3C to 3E are diagrams showing various examples of a constant power type scanner according to an embodiment of the present invention.

Referring to the drawings, the scanners 410ab to 410ad of FIGS. 3C to 3E rotate similar to the scanner 410 of FIG. 3A or 3B with respect to a first axis in a constant power-based direct manner. The mirror MR, the first and second mirror support members SPa and SPb respectively connected to the first and second sides of the mirror MR, and the first and second mirror support members SPa and SPb ) And the first and second mirror springs (MSa, MSb) connected to each, and a plurality of combs (CMBMa to CMBMd, CMBNa to CMBNd,) supplying a rotational force based on constant power to the mirror (MR), It may include a substrate (SLC) formed spaced apart from the outside of the mirror (MR).

However, the scanners 410ab to 410ad in FIGS. 3C to 3E have a difference in that a step is formed on the substrate SLC.

3C to 3E illustrate that a step is formed on the substrate SLC in the second axis (Axisx) direction. According to this structure, the substrate SLC is formed lower than the center MRC of the mirror MR based on the second axis Axis.

Accordingly, even if the mirror MR is rotated with respect to the first axis Axis, the possibility of optical loss decreases due to the step formed on the substrate SLC positioned closely. Therefore, wide-angle scanning in one direction becomes possible.

FIG. 3C illustrates a scanner 410ab in which the steps EDaa and EDba are formed by etching the entire substrate in the second axis (Axisx) direction around the mirror MR. At this time, the height of the substrate on which the steps EDaa and EDba are formed may be constant.

FIG. 3D illustrates a scanner 410ac having a step EDba, EDbb formed by etching a portion of the substrate in the second axis Axis direction around the mirror MR. At this time, the height of the substrate on which the steps EDba and EDbb are formed may be constant.

3E illustrates a scanner 410ad in which steps (EDac, EDbc) are formed by etching a part of the substrate in the second axis (Axisx) direction around the mirror MR. As an example, the optical angle of the mirror MR may be etched. Accordingly, the height of the substrate on which the steps EDac and EDbc are formed may increase as the distance from the mirror MR increases.

4A to 5D are views referred to in the description of FIGS. 3A to 3E.

First, in FIGS. 4A to 4C, when the distance or distance between the center MRC of the mirror MR and the end line or the extension line LInb of the substrate SLC is Dxa, the mirror MR rotates Illustrate the case.

4A to 4C, when the distance or distance between the end MRED of the mirror MR and the extension line Linb of the end or end of the substrate SLC is Dxa1, the mirror MR rotates Illustrate the case.

First, FIG. 4A illustrates that the mirror MR of the scanner 410x rotates by an angle of θ in a downward direction with respect to the second axis Axis.

At this time, when the distance or distance between the center MRC of the mirror MR and the end GBED of the substrate SLC is Dxa, or the end MRED of the mirror MR and the end of the substrate SLC When the distance or distance between (GBED) is Dxa1, the incident light OLi incident on the mirror MR is reflected from the mirror MR, but due to the substrate SLC positioned closer, some optical paths Blocked, resulting in optical loss.

Next, FIG. 4B illustrates that the mirror MR of the scanner 410x rotates by θx smaller than the θ angle in a downward direction, relative to the second axis Axis.

When the distance or distance between the center MRC of the mirror MR and the end GBED of the substrate SLC is Dxa, or the end MRED of the mirror MR and the end GBED of the substrate SLC Although the distance or distance between) is Dxa1, incident light OLi incident on the mirror MR is reflected by the mirror MR, and is output without loss. However, in this case, there is a disadvantage that the scanning angle of the mirror MR becomes smaller as θx.

Next, in FIG. 4C, the mirror MR of the scanner 410xb rotates by a θy angle smaller than θ and greater than θx in a downward direction, relative to the second axis Axisx, and a step is formed on the substrate SLCbx. , It is illustrated that the substrate SLCbx is formed lower than the center MRC of the mirror MR based on the second axis Axis.

In this case, unlike in FIG. 4B, even if the mirror MR of the scanner 410xb rotates in a downward direction, relative to the second axis Axisx, by an angle of θy greater than θx, the height of the substrate SLCbx is the second Since it is lower than the axis Axisx, the light reflected and output from the mirror MR is not blocked by the substrate SLCbx, and light loss may not occur.

However, since the distance or distance between the center MRC of the mirror MR and the end GBEDb of the substrate SLCbx is Dxa, light loss by the substrate SLCbx occurs again at an angle slightly larger than the θy angle. The disadvantage is that.

Accordingly, the present invention proposes a scanner capable of wide-angle scanning in a vehicle scanner.

On the other hand, as shown in Figure 2d, the optical angle of the mirror MRx in the conventional horizontal incidence type scanner 410x was 60 degrees or less.

On the other hand, in order to realize a large-diameter mirror, a high driving frequency, and a wide driving angle in a horizontal incidence method, when the optical angle of the mirror MRx is designed to be 60 degrees or more, in order to avoid optical interference, the incident light angle is a third axis ( Axisz) standards should be increased further.

At this time, as the angle of the incident light with respect to the third axis (Axisz) increases, and as the rotation angle of the mirror increases, the effective area of the mirror decreases in terms of the incident light, thereby deteriorating light efficiency. In addition, as the rotation angle of the mirror MRx increases, there is a problem such that the silicon-based mirror spring is easily damaged.

However, in the present invention, the scanner 410 having a high driving frequency and a wide driving angle is designed while reducing the possibility of damage such as a silicon-based mirror spring.

In particular, depending on the vertical incidence method, in the vicinity of the third axis (Axisz) or the third axis (Axisz), light is incident in the mirror direction, and based on the center of the mirror (MRC), in both left and right directions, reflected light Output. In particular, symmetrical reflected light is output in both left and right directions.

Accordingly, in the present invention, in a plane formed by the first axis (Axisy) and the third axis (Axisz), the third axis (Axisz) or the third axis (Axisz) with a predetermined angle, the mirror (MR) Let light enter.

This method is a vertical incidence method, compared to the horizontal incidence method of FIG. 2C, and has the advantage of being advantageous for wide-angle implementation without light interference.

On the other hand, according to the rotation of the mirror MR of the scanner 410, the angle of the reflected light is changed. In the present invention, in consideration of the rotation of the mirror MR, the angle of the reflected light in the left direction compared to the incident light is at least 45 degrees. , Set the angle of the reflected light in the right direction to the incident light at least 45 degrees.

That is, according to the embodiment of the present invention, it is preferable to set the optical angle of the mirror MR of the scanner 410 to be at least 90 degrees.

This corresponds to the output of the reflected light OLxa at 45 degrees to the left of the vertical axis (Axisz) of FIG. 2D.

According to this, the minimum optical angle in the vertical incidence method according to the embodiment of the present invention corresponds to the reflected light path of 45 degrees to the left of FIG. 2C. Therefore, the reflected light path abnormality of the left 45 degrees in FIG. 2C is set as a wide-angle scanner.

On the other hand, when the optical angle of the mirror MR of the scanner 410 is less than 90 degrees, this is a case where the rotation angle of the mirror MR becomes small, which makes it impossible to perform wide-angle scanning.

On the other hand, when the optical angle of the mirror MR is 90 degrees, it is preferable that the final optical angle of the mirror MR is 100 degrees in consideration of 10 degrees of the margin optical angle. Therefore, in the present invention, a scanner 410 with a final optical angle of the mirror MR of 100 degrees is proposed.

That is, when the mirror MR is rotated with respect to the first axis (Axisy), the rotation angle is greater than or equal to 22.5 degrees relative to the second axis (Axisx), and considering the 2.5 degree as the margin driving angle, finally, the second A scanner 410 in which the final rotation angle with respect to the axis (Axisx) is 25 degrees or more is proposed. According to this, it is preferable that the final optical angle of the mirror MR is 100 degrees or more.

On the other hand, as the final optical angle of the mirror MR increases, there is a disadvantage in that the loss of light due to the substrate located on the path of the reflected light or the size of the scanner increases due to the spaced apart arrangement of the substrate.

On the other hand, electronic devices employing lidars employ wide-angle cameras to obtain more image information, for example, wide-angle cameras with a maximum viewing angle of approximately 150 degrees. Therefore, for the overlap verification with a camera in an electronic device employing a lidar, it is preferable that the maximum angle of the optical angle of the mirror MR in the scanner 410 for use in the lidar of the present invention is 150 degrees.

On the other hand, it is preferable that the maximum value of the final optical angle of the mirror MR is 160 degrees, further considering the margin optical angle of 10 degrees to 150 degrees, which is the maximum value of the optical angle of the mirror MR. Therefore, in the present invention, a scanner in which the maximum value of the final optical angle of the mirror MR is 160 degrees is proposed.

That is, when the reference rotation of the first axis (Axisy) of the mirror MR, the maximum value of the rotation angle compared to the second axis (Axisx) is 37.5, and considering the margin driving angle of 2.5 degrees, finally, the second axis (Axisx) ) We propose a scanner with a maximum rotation angle of 40 degrees. According to this, it is preferable that the maximum value of the final optical angle of the mirror MR is 160 degrees.

On the other hand, when the maximum value exceeds 160 degrees, as the final optical angle of the mirror MR increases, light loss occurs due to the substrate located on the reflected light path and surrounding structures, or the silicon-based mirror spring is damaged. There is a disadvantage in that the risk is significantly increased, or the size of the scanner or scanner module is increased due to the separation of the substrate and surrounding structures.

Consequently, in the present invention, a scanner in which the size of the final optical angle of the mirror MR is 100 to 160 degrees is proposed.

That is, in the present invention, in consideration of the margin driving angle, when the reference rotation of the first axis (Axisy) of the mirror MR, the size of the final rotation angle compared to the second axis (Axisx) is 25 to 40 degrees. Suggest.

Particularly, in the present invention, as a direct type scanner applicable to both a constant power method and an electromagnetic force method, a scanner in which the final optical angle of the mirror MR is 100 degrees to 160 degrees is proposed. This will be described with reference to FIG. 5A.

5A to 5D are views referred to in the description of FIGS. 3A to 3E.

First, FIG. 5A illustrates a case where the mirror MR rotates when the distance or distance between the substrate SLC and the mirror MR is Da, which is farther than Dxa.

In particular, FIG. 5A illustrates that the mirror MR rotates by a θ angle in a downward direction, relative to the second axis Axis.

At this time, since the distance or distance between the center MRC of the mirror MR and the end GBED of the substrate SLC is Da, which is farther than Dx, the incident light OLi incident on the mirror MR is a mirror ( MR), and is output to the outside without loss of light by the substrate SLC.

On the other hand, the distance or distance Da between the center (MRC) of the mirror (MR) and the end (GBED) of the substrate (SLC) to prevent light loss can be calculated by the following equation (1).

[Equation 1]

Da = Rcos (θ) + Rsin (θ) tan (2θ)

Here, R is the radius of the mirror MR, and θ corresponds to the rotation angle of the mirror MR relative to the second axis Axis.

On the other hand, since the distance or distance between the end MRED of the mirror MR and the end GBED of the substrate SLC is Da1, which is farther than Dxa1, the incident light OLi incident on the mirror MR is a mirror ( MR), and is output to the outside without loss due to the mirror MR.

Meanwhile, Da1, which is the distance or distance between the end MRED of the mirror MR and the end GBED of the substrate SLC, may be calculated by Equation 2 below.

[Equation 2]

Da1 = Rcos (θ) + Rsin (θ) tan (2θ) -R

On the other hand, according to FIG. 5A, compared to FIG. 4B, since the scanning angle of the mirror MR becomes larger as θ, there is an advantage that wide-angle scanning is possible.

According to this principle, for a wide-angle scanning, the distance or distance between the substrate SLC and the mirror MR may be better as the distance increases.

However, if the distance or distance between the substrate SLC and the mirror MR becomes too far, optical interference decreases, but there is a disadvantage that the size of the substrate increases.

On the other hand, if the distance or distance between the substrate SLC and the mirror MR becomes too small, the size of the substrate decreases, but there is a disadvantage in that optical interference of the mirror MR occurs.

As a result, in order to reduce optical interference and scan at a wide angle, it is preferable that the distance between the substrate SLC and the mirror MR is within a predetermined range.

On the other hand, based on Equation 1, the distance between the center MRC of the mirror MR and the substrate SLC, which corresponds to the optical angle 100 of the mirror MR, is the radius R of the mirror MR. The distance between the center (MRC) of the mirror (MR) and the substrate (SLC), corresponding to 1.41 times, and the optical angle of 160 degrees of the mirror (MR), is 4.41 times the radius (R) of the mirror (MR). To respond.

Accordingly, according to an embodiment of the present invention, the distance between the center (MRC) of the mirror (MR) and the substrate (SLC) relative to the second axis (Axisx) intersecting the first axis (Axisy) is the mirror (MR) It is preferable that it is 1.41 times to 4.41 times the radius of (R).

On the other hand, based on Equation 2, the distance between the mirror MR and the substrate SLC, which corresponds to the optical angle of 100 degrees of the mirror MR, corresponds to 0.41 times the radius R of the mirror MR, , The distance between the mirror MR and the substrate SLC, corresponding to the optical angle 160 degrees of the mirror MR, corresponds to 3.41 times the radius R of the mirror MR.

Therefore, according to an embodiment of the present invention, the distance between the mirror MR and the substrate SLC, based on the second axis Axis that intersects the first axis Axis, is the radius R of the mirror MR It is preferably from 0.41 to 3.41 times.

On the other hand, in Fig. 5B, as in Fig. 5A, the gap or distance between the substrate SLCm and the mirror MR is Da, but there is a difference in that a step is formed on the substrate SLCm.

5B, the mirror MR of the scanner 410b rotates by a θ angle in a downward direction, relative to the second axis Axisx, and a step is formed on the substrate SLCm, so that the second axis Axisxi Based on), it is illustrated that the substrate SLCm is formed lower than the center MRC of the mirror MR. That is, it is illustrated that the substrate SLCm is formed lower than the second axis Axisx.

In this case, as shown in FIG. 5A, even if the mirror MR of the scanner 410b rotates in the downward direction, θ angle, relative to the second axis Axisx, the height of the substrate SLCm is the second axis Axisxi ), The light reflected and output from the mirror MR may not be blocked by the substrate SLCm, and light loss may not occur.

Therefore, without increasing the distance or distance Da between the center MRC of the mirror MR and the end GBEDm of the substrate SLCm, light loss by the substrate SLCm does not occur to an angle greater than the θ angle. It has the advantage of not. Therefore, wide-angle scanning in one direction is possible without increasing the size of the substrate.

On the other hand, the difference between the end GBEDm of the substrate SLCm closest to the mirror MR and the second axis Axisx is hb.

The difference hb between the end GBEDm of the substrate SLCm closest to the mirror MR and the second axis Axisx may be calculated by the following Equation (3).

[Equation 3]

hb = Rsin (θ) -Da2 / tan (2θ),

Da2 = Da-Rcos (θ)

On the other hand, in the present invention, without increasing the size of the substrate, by a step of the hb, the optical angle of the mirror (MR) from 100 degrees to 160 degrees, without loss of light, a method to enable wide-angle scanning is sought.

The distance between the center (MRC) of the mirror (MR) and the end (GBEDm) of the substrate (SLCm) corresponding to the case where the minimum optical angle of the mirror (MR) is 100 degrees, Da is 1.41 of the radius (R) of the mirror (MR) On the ship, when hb is 0.53 times the radius of the mirror MR, the same effect occurs as the maximum optical angle of the mirror MR 160 when there is no step. That is, wide-angle scanning is possible without increasing the distance between the center MRC of the mirror MR and the end GBEDm of the substrate SLCm.

Accordingly, the range of hb, which is the difference between the end (GBEDm) of the substrate SLCm and the second axis (Axisx) closest to the mirror MR, is considered by considering the maximum optical angle of the mirror MR 160 degrees, It is preferably within 0.53 times the radius of (MR). Therefore, light loss is reduced, and wide-angle scanning is possible.

Next, FIG. 5C, similar to FIG. 5B, the mirror MR of the scanner 410c rotates by a θ angle in a downward direction, relative to the second axis Axis, and a step is formed on the substrate SLCc , It is illustrated that the substrate SLCc is formed lower than the center MRC of the mirror MR based on the second axis Axis.

On the other hand, unlike FIG. 5B, the difference is that the height of the substrate SLCc increases as the distance from the mirror MR increases.

That is, the difference between the end GBEDb of the substrate SLCc closest to the mirror MR and the second axis Axisx is hb, and the end GBEDc of the substrate SLCc farthest from the mirror MR is The difference between the second axes (Axisx) is hc.

At this time, the difference between the center MRC of the mirror MR and the step difference of the substrate SLCc, that is, the center MRC of the mirror MR or the center MRC of the upper end of the mirror MR, and the substrate ( It is preferable that hb which is a difference between the ends GBEDb of SLCc) is within 0.53 times the radius of the mirror MR. Therefore, wide-angle scanning is possible without increasing the size of the substrate. In addition, the difference between the end GBEDc of the substrate SLCc farthest from the mirror MR and the second axis Axisx, hc is also preferably within 0.53 times.

In this case, unlike in FIG. 5A, the mirror MR of the scanner 410c has the height of the substrate SLCc, in the downward direction, to an angle greater than the θ angle, compared to the second axis Axisx, the second axis Since it is lower than (Axisx), light reflected and output from the mirror MR may not be blocked by the substrate SLCc, and light loss may not occur.

Next, FIG. 5D shows a cross-sectional shape of a substrate that can be formed by various etching methods. On the other hand, in addition to the cross-sectional shape of the substrate illustrated in Figure 5d, various cross-sectional shape variations can be implemented.

6 is a side view of a scanner module according to an embodiment of the present invention.

Referring to the drawings, the scanner module 240 according to an embodiment of the present invention, the electromagnetic force type scanner 410 including a mirror (MR) reflecting light, a magnet disposed on the back of the scanner 410 ( magnet, 420, 430), the lower case 450 forming a storage space for storing the magnets 420, 430, the yoke 460 corresponding to the magnets 420, 430, and the light reflected from the scanner pass through An upper case 440 having an opening 442 may be included.

The scanner module 240 according to an embodiment of the present invention may further include a transparent cover part 470 formed of a transparent member to cover the opening 442.

That is, the transparent cover part 470 is disposed on the front surface of the scanner 410, and may be formed of a transparent member so that light can pass while sealing the opening 442.

On the other hand, the upper case 440 may be provided with an inclined portion 441 that contacts a part of the scanner 410 and extends in a direction from the contact surface with the scanner 410 toward the mirror surface MR.

Referring to the drawings, the upper case 440 according to an embodiment of the present invention, the central portion of the scanner, that is, the inclined portion 441 extending in the direction toward the mirror (MR) surface and the mirror surface (MR) is reflected An opening 442 having a predetermined size may be included to output light to the outside.

In this case, the size of the opening 442 can be designed to a minimum size that does not interfere with the output of light to the outside.

Further, the front surface of the inclined portion 441 may be designed to have an inclined surface at a predetermined angle so as not to interfere with output of light to the outside.

The yoke 460 may be disposed on the rear surface of the lower case 450 forming a storage space for storing the magnets 420 and 430.

The shape of the yoke 460 may correspond to the shape of the magnets 420 and 430, and may be formed of a soft magnetic material. On the other hand, the yoke 460 may be a passage of a magnetic flux formed when a current is applied.

 The transparent cover 470 may seal the scanner module 240 so that external dust or the like does not flow through the opening 442.

Accordingly, it is possible to minimize the frequency of exposure of the scanner 410 and the mirror surface MR with external foreign substances.

Meanwhile, the transparent cover part 470 may be inclined to have a predetermined inclination angle with respect to the scanner 410 and coupled to the upper case 440.

Meanwhile, the electromagnetic force type scanner 410 according to an embodiment of the present invention may be implemented in a rectangular shape, as shown in the drawing.

Meanwhile, the description of the electromagnetic force type scanner 410 according to an embodiment of the present invention will be described in more detail with reference to FIG. 7A and below.

7A is a view showing the front of the scanner according to another embodiment of the present invention, and FIG. 7B is a view showing the back of the scanner of FIG. 7A.

Referring to the drawings, the scanner 410m according to an embodiment of the present invention may be a direct-type scanner based on electromagnetic force.

To this end, the scanner 410m includes first and second mirrors MR that rotate in a direct manner with respect to the first axis Axis and first and second sides of the mirror MR, respectively. It includes a mirror spring (MSa, MSb), at least one coil (CLa) connected to the first and second mirror springs (MSa, MSb), and a substrate (SLC) formed spaced apart from the outside of the mirror (MR) do.

The substrate SLC is spaced apart from the mirror MR, and may be formed in a square shape outside the mirror MR.

Openings OPoa and OPob may be formed between the substrate SLC and the mirror MR. At this time, the openings OPoa and OPob may have a donut shape of a circular shape or an oval shape, as illustrated.

Meanwhile, at least one coil CLa may be connected to the first and second mirror springs MSa and MSb, respectively.

In the drawing, although four lines of coil CLa are connected to the first mirror spring MSa, and through the mirror MR, to the second mirror spring MSB, various modifications are possible. . For example, the coil may be formed on the mirror MR through the first mirror spring MSa and connected to the first mirror spring MSa again, and the number of coil turns formed on the mirror MR may include multiple turns. Can form. When multiple coil turns are formed, a multi-layered coil path can be formed through a via hole using a dielectric layer. In addition, the number and path of the coils CLa formed in the mirror MR may be formed by symmetric or asymmetric reference to the first axis.

When an electrical signal is applied to at least one coil CLa, the electrical signal may be transmitted to the mirror MR through the first and second mirror springs MSa and MSb.

Meanwhile, a magnetic field may be formed by the magnets 420 and 430 and the at least one coil CLa, and accordingly, a driving force input through the at least one coil CLa may be transmitted to the mirror MR. .

Therefore, the mirror MR can be rotated in a direct manner around the first axis Axis where the first and second mirror springs MSa and MSb are disposed.

7A shows the front surface MRF of the mirror MR, and FIG. 7B shows the back surface MSB of the mirror MR.

Meanwhile, the first pattern PTa and the second pattern PTb attached to the first and second sides of the mirror MR may be further included on the rear surface MSB of the mirror MR. Accordingly, through the scanner 410m, horizontal resolution and vertical resolution and beam reflection performance can be improved.

Meanwhile, the first pattern PTa and the second pattern PTb may have an arc shape spaced apart from the circumference of the mirror MR. Accordingly, through the scanner 410m, horizontal resolution and vertical resolution and beam reflection performance can be improved.

7C to 7E are diagrams showing various examples of an electromagnetic force type scanner according to an embodiment of the present invention.

7C to 7E are diagrams showing various examples of an electromagnetic force type scanner according to an embodiment of the present invention.

Referring to the drawings, the scanners 410mb to 410md of FIGS. 7C to 7E rotate similarly to the first axis (Axisy) in an electromagnetic force-based direct manner, similar to the scanner 410 of FIG. 7A or 7B. Connected to the mirror MR, the first and second mirror springs MSa, MSb and the first and second mirror springs MSa, MSb respectively connected to the first and second sides of the mirror MR It includes at least one coil (CLa) and a substrate (SLC) formed to be spaced apart from the outside of the mirror (MR).

However, the scanners 410mb to 410md in FIGS. 7C to 7E differ in that a step is formed on the substrate SLC.

7C to 7E illustrate that a step is formed on the substrate SLC in the second axis (Axisx) direction. According to this structure, the substrate SLC is formed lower than the center MRC of the mirror MR based on the second axis Axis.

Accordingly, even if the mirror MR is rotated with respect to the first axis Axis, the possibility of optical loss decreases due to the step formed on the substrate SLC positioned closely. Therefore, wide-angle scanning in one direction becomes possible.

7C illustrates the scanner 410mb in which the steps EDaa and EDba are formed by etching the entire substrate in the second axis (Axisx) direction around the mirror MR. At this time, the height of the substrate on which the steps EDaa and EDba are formed may be constant.

7D illustrates a scanner 410mc in which a part of the substrate in the second axis (Axisx) direction around the mirror MR is etched to form steps EDba and EDbb. At this time, the height of the substrate on which the steps EDba and EDbb are formed may be constant.

7E illustrates a scanner 410md having a stepped EDac and EDbc formed by etching a part of the substrate in the second axis Axis direction around the mirror MR. As an example, the optical angle of the mirror MR may be etched. Accordingly, the height of the substrate on which the steps EDac and EDbc are formed may increase as the distance from the mirror MR increases.

8A to 8D are views referred to in the description of FIGS. 7A to 7E.

8A to 8D are views referred to in the description of FIGS. 7A to 7E.

First, FIG. 8A illustrates a case where the mirror MR rotates when the distance or distance between the substrate SLC and the mirror MR of the scanner 410m is greater than Dxa and is Da.

In particular, FIG. 8A illustrates that the mirror MR rotates by a θ angle in a downward direction, relative to the second axis Axis.

At this time, since the distance or distance between the center MRC of the mirror MR and the end GBED of the substrate SLC is Da, which is farther than Dx, the incident light OLi incident on the mirror MR is a mirror ( MR), and is output to the outside without loss of light by the substrate SLC.

On the other hand, the distance or distance Da between the center (MRC) of the mirror (MR) and the end (GBED) of the substrate (SLC) to prevent light loss can be calculated by Equation 1 above.

On the other hand, since the distance or distance between the end MRED of the mirror MR and the end GBED of the substrate SLC is Da1, which is farther than Dxa1, the incident light OLi incident on the mirror MR is a mirror ( MR), and is output to the outside without loss due to the mirror MR.

Meanwhile, Da1, which is an interval or distance between the end MRED of the mirror MR and the end GBED of the substrate SLC, may be calculated by Equation 2 above.

On the other hand, according to FIG. 8A, compared to FIG. 4B, since the scanning angle of the mirror MR becomes larger as θ, there is an advantage that wide-angle scanning is possible.

According to this principle, for a wide-angle scanning, the distance or distance between the substrate SLC and the mirror MR may be better as the distance increases.

However, if the distance or distance between the substrate SLC and the mirror MR becomes too far, optical interference does not occur, but there is a disadvantage that the size of the substrate increases.

On the other hand, if the distance or distance between the substrate SLC and the mirror MR becomes too small, the size of the substrate becomes small, but there is a disadvantage in that optical interference occurs.

As a result, in order to reduce optical interference and scan at a wide angle, it is preferable that the distance between the substrate SLC and the mirror MR is within a predetermined range.

On the other hand, based on Equation 1, the distance between the center MRC of the mirror MR and the substrate SLC, which corresponds to the optical angle 100 of the mirror MR, is the radius R of the mirror MR. The distance between the center (MRC) of the mirror (MR) and the substrate (SLC), corresponding to 1.41 times, and the optical angle of 160 degrees of the mirror (MR), is 4.41 times the radius (R) of the mirror (MR). To respond.

Accordingly, according to an embodiment of the present invention, the distance between the center (MRC) of the mirror (MR) and the substrate (SLC) relative to the second axis (Axisx) intersecting the first axis (Axisy) is the mirror (MR) It is preferable that it is 1.41 times to 4.41 times the radius of (R).

On the other hand, based on Equation 2, the distance between the mirror MR and the substrate SLC, which corresponds to the optical angle of 100 degrees of the mirror MR, corresponds to 0.41 times the radius R of the mirror MR, , The distance between the mirror MR and the substrate SLC, corresponding to the optical angle 160 degrees of the mirror MR, corresponds to 3.41 times the radius R of the mirror MR.

Therefore, according to an embodiment of the present invention, the distance between the mirror MR and the substrate SLC, based on the second axis Axis that intersects the first axis Axis, is the radius R of the mirror MR It is preferably from 0.41 to 3.41 times.

On the other hand, in Fig. 8B, as in Fig. 8A, the gap or distance between the substrate SLCm and the mirror MR is Da, but there is a difference in that a step is formed on the substrate SLCm.

That is, FIG. 8B, the mirror MR of the scanner 410mb rotates by an angle of θ in a downward direction, relative to the second axis Axisx, and a step is formed on the substrate SLCm, so that the second axis AxisX Based on), it is illustrated that the substrate SLCm is formed lower than the center MRC of the mirror MR. That is, it is illustrated that the substrate SLCm is formed lower than the second axis Axisx.

In this case, as shown in FIG. 8A, even if the mirror MR of the scanner 410mb rotates in the downward direction, θ angle, relative to the second axis Axisx, the height of the substrate SLCm is the second axis AxisX ), The light reflected and output from the mirror MR may not be blocked by the substrate SLCm, and light loss may not occur.

Therefore, light loss by the substrate SLCm occurs to an angle greater than θ angle without increasing Da, which is the distance or distance between the center MRC of the mirror MR and the end GBEDm of the substrate SLCm. It has the advantage of not. Therefore, wide-angle scanning in one direction is possible without increasing the size of the substrate.

On the other hand, the difference between the end GBEDm of the substrate SLCm closest to the mirror MR and the second axis Axisx is hb.

On the other hand, based on Equation 3, the distance between the center MRC of the mirror MR and the end GBEDm of the substrate SLCm corresponding to the case where the minimum optical angle of the mirror MR is 100 degrees, Da is the mirror ( At 1.41 times the radius R of MR), when hb is 0.53 times the radius of the mirror MR, the same effect occurs when the maximum optical angle of the mirror MR is 160 degrees when there is no step. That is, wide-angle scanning is possible without increasing the distance between the center MRC of the mirror MR and the end GBEDm of the substrate SLCm.

Accordingly, the range of hb, which is the difference between the end (GBEDm) of the substrate SLCm and the second axis (Axisx) closest to the mirror MR, is considered by considering the maximum optical angle of the mirror MR 160 degrees, It is preferably within 0.53 times the radius of (MR). Therefore, light loss is reduced, and wide-angle scanning is possible.

Next, in FIG. 8C, similar to FIG. 8B, the mirror MR of the scanner 410mc rotates by a θ angle in the downward direction, relative to the second axis Axis, and a step is formed on the substrate SLCc , It is illustrated that the substrate SLCc is formed lower than the center MRC of the mirror MR based on the second axis Axis.

On the other hand, unlike FIG. 8B, the difference is that the height of the substrate SLCc increases as the distance from the mirror MR increases.

That is, the difference between the end GBEDb of the substrate SLCc closest to the mirror MR and the second axis Axisx is hb, and the end GBEDc of the substrate SLCc farthest from the mirror MR is The difference between the second axes (Axisx) is hc.

At this time, the difference between the center MRC of the mirror MR and the step difference of the substrate SLCc, that is, the center MRC of the mirror MR or the center MRC of the upper end of the mirror MR, and the substrate ( It is preferable that hb which is a difference between the ends GBEDb of SLCc) is within 0.53 times the radius of the mirror MR. Therefore, wide-angle scanning is possible without increasing the size of the substrate.

In this case, unlike in FIG. 8A, even if the mirror MR of the scanner 410mc is rotated in a downward direction, to an angle greater than the θ angle, compared to the second axis Axis, the height of the substrate SLCc is Since it is lower than the two axes Axis, the light reflected and output from the mirror MR may not be blocked by the substrate SLCc and light loss may not occur.

Next, FIG. 8D shows a cross-sectional shape of a substrate that can be formed by various etching methods. On the other hand, in addition to the cross-sectional shape of the substrate illustrated in FIG. 8D, various cross-sectional shape variations can be implemented.

9A is a view showing the front of the scanner according to another embodiment of the present invention, and FIG. 9B is a view showing the back of the scanner of FIG. 9A.

Referring to the drawings, the scanner 410n of FIGS. 9A and 9B is an electromagnetic force-based direct type scanner, similar to the scanner 410m of FIGS. 7A and 7B.

That is, the scanner 410n includes a mirror MR rotating about the first axis Axis in a direct manner, and first and second mirrors connected to the first and second sides of the mirror MR, respectively. It includes a spring (MSa, MSb), at least one coil (CLa) connected to the first and second mirror springs (MSa, MSb), and a substrate (SLC) formed spaced apart from the outside of the mirror (MR) .

Meanwhile, the scanner 410n of FIGS. 9A and 9B further includes a mirror MR, and a rim RM connected to the first and second mirror springs MSa and MSb. This is different from the scanner 410m in FIG. 7B.

On the other hand, in the scanner 410n of FIGS. 9A and 9B, the distance between the center MRC of the mirror MR and the substrate SLC is 1.41 to 4.41 times the radius of the mirror MR, as described above. desirable.

On the other hand, in the scanner 410n of Figs. 9A and 9B, the difference between the center (MRC) of the mirror (MR) or the center (MRC) of the top of the mirror (MR) and the step of the substrate (SLC) is the mirror (MR) ) Is preferably within 0.53 times the radius.

In Fig. 9A, the front surface MRF of the mirror MR is shown, and in Fig. 9B, the rear surface MSB of the mirror MR is shown.

Meanwhile, the first pattern PTa and the second pattern PTb attached to the first and second sides of the mirror MR may be further included on the rear surface MSB of the mirror MR. Accordingly, through the scanner 410n, horizontal resolution and vertical resolution and beam reflection performance can be improved.

On the other hand, the rim (RM), in addition to the electromagnetic force method, may be arranged in a constant-power type scanner.

Accordingly, the scanner 410 of FIG. 3A may further include a mirror MR and a rim RM connected to the first and second mirror support members SPa and SPb.

10A is a view showing the front of the scanner according to another embodiment of the present invention, and FIG. 10B is a view showing the back of the scanner of FIG. 10A.

Referring to the drawings, the scanner 410o of FIGS. 10A and 10B is an electromagnetic force-based direct scanner, and is similar to the scanner 410m of FIGS. 7A and 7B.

That is, the scanner 410o includes a mirror MR rotating about the first axis Axis in a direct manner, and first and second mirrors connected to the first and second sides of the mirror MR, respectively. It includes a spring (MSa, MSb), at least one coil (CLa) connected to the first and second mirror springs (MSa, MSb), and a substrate (SLC) formed spaced apart from the outside of the mirror (MR) .

Meanwhile, the scanner 410o of FIGS. 10A and 10B is connected to the first and second mirror springs MSa and MSb, and extends in the second axis (Axisx) direction intersecting the first axis (Axisy). In addition to the third and fourth mirror springs MSc and MSd, there is a difference from the scanner 410m in FIGS. 7A and 7B.

As a result, stress applied to the first and second mirror springs MSa and MSb can be transmitted to the third and fourth mirror springs MSc and MSd.

At this time, it is preferable that the widths WPb of the third and fourth mirror springs MSc and MSd are larger than the widths WPa of the first and second mirror springs MSa and MSb. As a result, stress applied to the first and second mirror springs MSa and MSb can be significantly transmitted to the third and fourth mirror springs MSc and MSd.

Meanwhile, in the scanner 410o of FIGS. 10A and 10B, the distance between the center MRC of the mirror MR and the substrate SLC is 1.41 to 4.41 times the radius of the mirror MR, as described above. desirable.

Meanwhile, in the scanner 410o of FIGS. 10A and 10B, the difference between the center MRC of the mirror MR or the center MRC of the upper end of the mirror MR and the step difference of the substrate SLC is: It is preferred to be within 0.53 times the radius of MR).

In FIG. 10A, the front surface MRF of the mirror MR is shown, and in FIG. 10B, the rear surface MSB of the mirror MR is shown.

Meanwhile, the first pattern PTa and the second pattern PTb attached to the first and second sides of the mirror MR may be further included on the rear surface MSB of the mirror MR. Accordingly, through the scanner 410o, horizontal resolution and vertical resolution and beam reflection performance can be improved.

On the other hand, the third and fourth mirror springs MSc and MSd may be disposed in a constant-power type scanner in addition to the electromagnetic force type.

Accordingly, the scanner 410 of FIG. 3A is connected to the first and second mirror support members SPa and SPb and extends symmetrically in the second axis direction intersecting the first axis Axis. The fourth mirror springs MSc and MSd may be further included. The third and fourth mirror springs MSc and MSd are connected to the first and second mirror springs MSa and MSb and extend in the direction of the second axis Axis that intersects the first axis Axis. It can contain.

In the above, preferred embodiments of the present invention have been illustrated and described, but the present invention is not limited to the specific embodiments described above, and it is usually in the technical field to which the present invention belongs without departing from the gist of the present invention claimed in the claims. Of course, various modifications can be implemented by a person having knowledge of these, and these modifications should not be understood individually from the technical idea or prospect of the present invention.

Claims (20)

A mirror rotating about the first axis in a direct manner;
First and second mirror support members connected to the first and second sides of the mirror, respectively;
First and second mirror springs respectively connected to the first and second mirror support members;
A plurality of combs that supply a rotational force based on a constant power to the mirror;
It includes; a substrate formed to be spaced apart from the outside of the mirror,
The scanner is characterized in that the distance between the center of the mirror and the substrate relative to the second axis intersecting the first axis is 1.41 to 4.41 times the radius of the mirror. According to claim 1,
When the rotation of the mirror about the first axis, the size of the rotation angle compared to the second axis is 25 to 40 degrees. According to claim 1,
A step difference is formed on the substrate, and the difference between the center of the mirror or the center of the top of the mirror and the step of the substrate is within 0.53 times the radius of the mirror. According to claim 1,
A scanner having a step formed on the substrate, wherein the substrate is formed lower than the center of the mirror with respect to the second axis. According to claim 4,
The height of the substrate on which the step is formed is increased as the distance from the mirror increases. According to claim 1,
And a first pattern and a second pattern attached to the first and second sides of the mirror on the rear surface of the mirror. According to claim 1,
And a distance between the mirror and the substrate relative to a second axis intersecting the first axis is 0.41 to 3.41 times the radius of the mirror. According to claim 1,
And a third and fourth mirror spring connected to the first and second mirror springs and extending in a second axis direction intersecting the first axis. A mirror rotating about the first axis in a direct manner;
First and second mirror springs respectively connected to the first and second sides of the mirror;
At least one coil connected to the first and second mirror springs;
It includes; a substrate formed to be spaced apart from the outside of the mirror,
The scanner is characterized in that the distance between the center of the mirror and the substrate relative to the second axis intersecting the first axis is 1.41 to 4.41 times the radius of the mirror. The method of claim 9,
When the rotation of the mirror about the first axis, the size of the rotation angle compared to the second axis is 25 to 40 degrees. The method of claim 9,
A step difference is formed on the substrate, and the difference between the center of the mirror or the center of the top of the mirror and the step of the substrate is within 0.53 times the radius of the mirror. The method of claim 9,
A scanner having a step formed on the substrate, wherein the substrate is formed lower than the center of the mirror with respect to the second axis. The method of claim 12,
The height of the substrate on which the step is formed is increased as the distance from the mirror increases. The method of claim 9,
And a first pattern and a second pattern attached to the first and second sides of the mirror on the rear surface of the mirror. The method of claim 9,
And a distance between the mirror and the substrate relative to a second axis intersecting the first axis is 0.41 to 3.41 times the radius of the mirror. The method of claim 9,
And a rim connected to the mirror and the first and second mirror springs. The method of claim 9,
And a third and fourth mirror spring connected to the first and second mirror springs and extending in a second axis direction intersecting the first axis. The method of claim 17,
And a width of the third and fourth mirror springs is greater than that of the first and second mirror springs. The scanner of any one of claims 9 to 18;
A magnet disposed on the back side of the scanner;
A lower case forming a storage space accommodating the magnet;
And an upper case having an opening through which light reflected from the scanner passes. An electronic device comprising: a scanner according to any one of claims 1 to 18.

Images