KR20200010879A - Optical probe - Google Patents

Abstract

The present invention relates to an optical probe, which directly uses a light signal from a light source. The optical probe according to an embodiment of the present invention can comprise: a light source emitting light; a first condensing lens condensing light of the light source in a first direction; and a plurality of second condensing lenses condensing light collected in a first direction in a second direction crossing the first direction; a plurality of waveguides extending from the plurality of second condensing lenses, respectively, and transmitting light collected in a second direction to an object; and a plurality of electrodes configured to receive electrical signals generated when the object is stimulated or suppressed by the light transmitted to the object.

Description

Optical probe {OPTICAL PROBE}

Hereinafter, embodiments relate to an optical probe.

Background Art Conventional neural probes have been developed that stimulate nerve cells using optical signals and obtain electrical signals from the stimulated nerve cells. For example, US Patent Publication No. 2013/0030274 discloses an integrated optical nerve probe. The probe disclosed herein is known as "Michigan Probe". The “Michigan Probe” has a structure in which a light source and an electrode pad are installed together on the surface of the nerve probe, and the electrode pad senses an electrical signal generated from the nerve cell as the light source installed in the nerve probe stimulates the nerve cell. However, "Michigan Probe" has a structure that transmits the optical signal of a single light source located at the inlet of a plurality of elongated shanks to the ends of the plurality of elongated shanks through an optical fiber based waveguide. The light transmission efficiency may be low.

An object according to an embodiment is to provide an optical probe that directly uses the optical signal of the light source.

An object according to an embodiment is to provide an optical probe that improves the transmission efficiency of the optical signal to the object.

According to an embodiment, an optical probe may include a light source emitting light; A first condenser lens for condensing light of the light source in a first direction; And a plurality of second condensing lenses for condensing light collected in a first direction in a second direction crossing the first direction; A plurality of waveguides extending from the plurality of second condensing lenses, respectively, and configured to transmit light collected in a second direction to an object; And a plurality of electrodes configured to receive an electrical signal generated when the object is stimulated or suppressed by the light transmitted to the object.

The plurality of second condensing lenses may be separated from each other.

The direction in which the light of the light source is incident on the first condensing lens may cross the optical axis of the first condensing lens.

An optical axis of the first condensing lens may be in a skewed position with respect to each optical axis of the plurality of second condensing lenses.

The first condensing lens may have a rod shape extending in a direction crossing the direction in which the plurality of waveguides extends to cover the plurality of second condensing lenses.

Each of the edges of the plurality of second condensing lenses may have an arc shape at the side facing the first condensing lens.

The light source, the first condensing lens, and the plurality of second condensing lenses may be arranged in a line along a path through which light travels.

The first condensing lens, the plurality of second condensing lenses, and the plurality of waveguides may form an interface structure, and the interface structure may be coupled to the light source to be detachable with respect to the light source.

A portion of the first condenser lens is embedded in the interface structure such that a light path from the light source to the plurality of waveguides is formed via the first condenser lens and the plurality of second condenser lenses. Two condensing lenses and the plurality of waveguides may be formed on the interface structure.

The plurality of second condensing lenses may be integrally formed at an end portion adjacent to the light source among a plurality of waveguides respectively corresponding thereto.

The optical probe may further include a substrate on which the plurality of waveguides are installed and including silicon, each of the waveguides including a core and a cladding, wherein the core may be surrounded by the substrate and the cladding.

According to one embodiment, an optical probe includes a single light source emitting light; A first condensing lens extending in one direction; A plurality of second condensing lenses adjacent to a portion of the first condensing lens and a plurality of first condensing lenses respectively extending from the plurality of second condensing lenses in a direction crossing the direction in which the first condensing lens extends; A first interface structure comprising waveguides; And a plurality of additional second condensing lenses adjacent to another portion of the second condensing lens, and a plurality of second condensing lenses respectively extending from the plurality of second condensing lenses in a direction crossing the direction in which the first condensing lens extends. A second interface structure comprising two second waveguides, the second interface structure stacked on the first interface structure, the plurality of second condensing lenses of the first interface structure and the plurality of second interface structures The second condensing lenses may form a two dimensional array.

The first condensing lens may include a plurality of convex portions arranged in a line in a direction intersecting a direction in which the first condensing lens extends and a direction in which the plurality of second condensing lenses extend, respectively. One of the convex portions is adjacent to the plurality of second condensing lenses of the first interface structure, and the other of the convex portions of the plurality of convex portions is adjacent to the plurality of second condensing lenses of the second interface structure. Can be.

An optical probe according to an embodiment may directly use an optical signal of a light source.

The optical probe according to an embodiment may improve the efficiency of transmitting the optical signal to the object.

The effect of the optical probe according to one embodiment is not limited to those mentioned above, other effects that are not mentioned will be clearly understood by those skilled in the art from the following description.

1 is a schematic perspective view of an optical probe according to an exemplary embodiment.
FIG. 2 is a cross-sectional view of a portion of the optical probe seen in 2-2 of FIG. 1.
3A is a side cross-sectional view schematically illustrating an optical probe according to an embodiment.
3B is a side cross-sectional view schematically illustrating a part of an optical probe according to an exemplary embodiment in which a path along which light travels is displayed.
4A is a top view schematically illustrating an optical probe according to an embodiment.
4B is a schematic top view of a portion of an optical probe according to an exemplary embodiment in which a path along which light travels is displayed.
5 is a side cross-sectional view schematically showing another example of an optical probe according to an embodiment.
6 is a side cross-sectional view schematically showing still another example of an optical probe according to an embodiment.
7 is a side cross-sectional view schematically illustrating integrated components of an optical probe according to another embodiment.

Hereinafter, embodiments will be described in detail with reference to exemplary drawings. In adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are used to refer to the same components as much as possible, even if displayed on different drawings. In addition, in describing the embodiment, when it is determined that the detailed description of the related well-known configuration or function interferes with the understanding of the embodiment, the detailed description thereof will be omitted.

In addition, in describing the components of the embodiment, terms such as first, second, A, B, (a), and (b) may be used. These terms are only for distinguishing the components from other components, and the nature, order or order of the components are not limited by the terms. If a component is described as being "connected", "coupled" or "connected" to another component, that component may be directly connected or connected to that other component, but there is another component between each component. It will be understood that may be "connected", "coupled" or "connected".

Components included in any one embodiment and components including common functions will be described using the same names in other embodiments. Unless stated to the contrary, the description in any one embodiment may be applied to other embodiments, and detailed descriptions thereof will be omitted in the overlapping range.

1 is a schematic perspective view of an optical probe according to an exemplary embodiment, and FIG. 2 is a cross-sectional view of a part of the optical probe viewed from 2-2 of FIG. 1.

3A is a side cross-sectional view schematically illustrating an optical probe according to an embodiment, and FIG. 3B is a side cross-sectional view schematically illustrating a part of the optical probe according to an embodiment in which a path along which light travels is displayed.

4A is a top view schematically illustrating an optical probe according to an embodiment, and FIG. 4B is a top view schematically illustrating a part of an optical probe according to an embodiment in which a path along which light travels is displayed.

1, 2, 3A, 3B, 4A, and 4B, an optical probe 1 according to an embodiment includes a two-stage optical structure that focuses light in different directions. The transmission efficiency of light from the light source to the object may be improved. Here, the subject may include nerve cells.

The optical probe 1 may include a power source 11 and an interface structure 12. The interface structure 12 is configured to connect with the object.

The power source 11 may include a light source for emitting light. For example, the light source may include a light emitting diode (LED). In one example, the light source including the light emitting diode may emit light having a single wavelength. In another example, a light source including a light emitting diode can emit light having at least two wavelengths.

The power source 11 and the interface structure 12 may be detachably coupled to each other. For example, power source 11 may be a reusable portion, and interface structure 12 may be a disposable portion. When the power source 11 includes a light source composed of a light emitting diode (LED), the optical probe 1 may be configured as a wireless system by integrating a driving circuit, a battery, a communication circuit, and the like for driving the light source in the power source 11. Can be.

The interface structure 12 includes a substrate 121, a first collecting lens 122, at least one second collecting lens 123, a waveguide 124, an electrical connection 125, an electrode 126, and an electrical lead 127. ) May be included.

The substrate 121 is configured such that the condenser lenses 122, 123, the waveguide 124, the electrical connection 125, the electrode 126, and the electrical lead 127 are integrated thereon. For example, the substrate 121 may be a silicon substrate.

The substrate 121 may include a body 1211, an extension 1212, a tip 1213, and a groove 1214. The main body 1211 may have a plate shape. The first condensing lens 122, the at least one second condensing lens 123, a part of the waveguide 124, a part of the electrical connection 125, and a part of the electric lead 127 may be installed on the main body 1211. . Extension 1212 may extend from body 1211 to tip 1213. The extension part 1212 may be designed in consideration of the shape, number, and the like of the waveguide 124. The tip 1213 may be formed on the opposite side of the main body 1211 of the extension 1212. A plurality of electrodes 126 may be formed on the tip 1213. Groove 1214 may be formed in body 1211. The groove 1214 is configured to receive a portion of the first condenser lens 122.

The first condensing lens 122 is configured to condense the light of the light source, and the at least one second condensing lens 123 is configured to condensate the light condensed by the first condensing lens 122 secondaryly. The direction in which the first condensing lens 122 and the at least one second condensing lens 123 condense light is set to cover all directions of light.

In one embodiment, the first condenser lens 122 is configured to condense the light of the light source in the first direction, and the at least one second condenser lens 123 is in the first direction by the first condenser lens 122. The light may be configured to focus the collected light in a second direction crossing the first direction. Here, the first direction and the second direction may be set to be orthogonal to each other. For example, the first direction may be set in the z-axis direction, and the second direction may be set in the y-axis direction.

3B and 4B, the light of the light source incident on the first condenser lens 122 is condensed in the first direction (e.g. z-axis direction) by the first condenser lens 122. The light collected in the first direction is incident on the second condensing lens 123. Light incident on the second condensing lens 123 (collected in the first direction) is condensed by the second condensing lens 123 in the second direction (e.g. y-axis direction). Thereafter, light condensed sequentially in the first direction and the second direction is transmitted to the object (e.g. nerve cell) through the waveguide 124. In a preferred example, the center of the first condenser lens 122 and the center of the second condenser lens 123 may be located on the same plane.

In one embodiment, the direction in which the light of the light source is incident on the first condensing lens 122 may intersect with the optical axes A-A of the first condensing lens 122. In a preferred embodiment, the direction in which the light of the light source is incident on the first condensing lens 122 may be substantially orthogonal to the optical axes A-A of the first condensing lens 122.

In one embodiment, the optical axis A-A of the first condensing lens 122 may be in a skewed position with respect to the optical axis B-B of the at least one second condensing lens 123. Here, the term "twisted position" refers to a state in which two lines do not meet each other and are not parallel to each other. In other words, the optical axis AA of the first condensing lens 122 and the optical axis BB of the at least one second condensing lens 123 do not meet each other and are not parallel to each other. The second condensing lens 123 may be disposed.

For example, the first condenser lens 122 may be disposed to cover at least one or more second condenser lenses 123. In a preferred example, the first condenser lens 122 may have a shape extending in a direction crossing the extension direction of the waveguide 124 extending from the at least one second condenser lens 123. In a more preferred example, the first condenser lens 122 may have a cylindrical rod shape.

In one example, the at least one second condensing lens 123 may be formed such that the edge 1231 on the side facing the first condensing lens 122 has an arc shape. In a preferred example, the at least one second condensing lens 123 has an edge 1232 on the side facing the waveguide 124 as well as the edge 1231 on the side facing the first condensing lens 122 on the substrate 121. ) May also be formed to have an arc shape. In a more preferred example, at least one second condensing lens 123 may have a substantially disc shape.

In one embodiment, the light sources, the first condensing lens 122 and the at least one second condensing lens 123 may be arranged in a line along the path along which the light travels. Here, the meaning that the light is arranged in a line along the movement path means that the light movement path is formed substantially in one direction so that the light source, the first condensing lens 122 and the at least one second condensing lens 123 are disposed. Means to be arranged along that path. For example, the light sources, the first condensing lens 122, and the at least one second condensing lens 123 may be arranged in a line along the x-axis direction. This arrangement may be suitable for manufacturing the optical probe 1 in a two-dimensional structure. Therefore, the optical probe 1 of the two-dimensional structure can be manufactured by using the MEMS process, which is generally known to be difficult to implement a three-dimensional structure.

In one embodiment, at least one second condensing lens 123 may be a plurality. The light finally collected by the plurality of second condensing lenses 123 is transmitted to the object through the waveguide 124. Here, the plurality of second condensing lenses 123 may be separated from each other. Here, "separated from each other" means a state in which the plurality of second condensing lenses 123 are spaced apart from each other without being connected, coupled or connected to each other. According to such a structure, since the light finally collected by each of the plurality of second condensing lenses 123 is transmitted to the object through the waveguide 124 corresponding to each of the plurality of second condensing lenses 123, Loss of light transmitted from the light source to the object may be reduced.

The waveguide 124 is configured to transmit the light finally collected by the at least one second condensing lens 123 to the object. The waveguide 124 may extend from at least one second condensing lens 123. The waveguide 124 may have a suitable structure or may be made of a suitable material for delivering light of a light source to the object.

In a preferred embodiment, waveguide 124 may have a structure that utilizes light directly without using optical fibers. For example, waveguide 124 may include core 1241 and cladding 1242 surrounding at least a portion of core 1241. In a preferred example, the three directions of the surface of the core 1241 may be surrounded by the cladding 1242, and the remaining one direction of the core 1241 may be surrounded by the substrate 121.

In one example, core 1241 may include SU-8, an epoxy based photoresist. In one example, cladding 1242 may comprise a polymer. In another example, core 1241 and cladding 1242 may be made of a metal or ceramic such as silicon oxide, silicon nitride, silicon oxynitride, or a combination thereof. have.

In one embodiment, there may be a plurality of waveguides 124. The plurality of waveguides 124 may transmit light to a plurality of objects, eg, nerve cells. Accordingly, the optical probe 1 may simultaneously stimulate or suppress a plurality of objects through the plurality of waveguides 124 and collect various electrical signals generated from the objects as light is transmitted to the objects. have.

In a preferred embodiment, at least one second condenser lens 123 may be integrally formed with the waveguide 124. The at least one second condensing lens 123 may be integrally formed at an end portion of the waveguide 124 where the waveguide 124 faces the light source and the first condensing lens 122.

The electrical connection 125 may transmit an electrical signal received by the electrode 126 to the power source 11. For example, the electrical connection 125 can include an electrically conductive material such as a metal. The electrode 126 is configured to receive an electrical signal that is generated when the object is stimulated or suppressed by the light delivered to the object. The electrode 126 may be formed on the tip 1213 of the substrate 121. In a preferred example, electrode 126 may comprise a material having a low impedance-iridium, carbon nanotubes, and the like. The electrical lead 127 is configured to electrically connect the electrical connection 125 and the electrode 126. The electrical lead 127 may be installed on the substrate 121. The electrode 126 is connected to the electrical connection 125 through an electrical lead 127 located on one side of the waveguide 124, and the electrical connection 125 is connected to the power source 11 through a lead (not shown). Can be.

5 is a side cross-sectional view schematically showing another example of an optical probe according to an embodiment.

Referring to FIG. 5, the optical probe 2 according to an embodiment may implement a two-dimensional M × N matrix structure by configuring a plurality of interface structures 12 in a stack form. For example, the plurality of interface structures 12 may be stacked in a first direction (e.g. z-axis direction).

In a preferred example, the power source 11 may comprise a single light source. A single light source can be used to transmit light to the condenser lenses 122 and 123 in the form of a two-dimensional array of the plurality of interface structures 12, and the transmitted light stimulates or suppresses the response of a greater number of objects. As a result, various electrical signals may be collected.

6 is a side cross-sectional view schematically showing still another example of an optical probe according to an embodiment.

Referring to FIG. 6, the optical probe 3 according to the exemplary embodiment may configure a plurality of interface structures 12 in a stack form, and may use a single first condenser lens 322.

The first condenser lens 322 may have a shape extending in a direction in which the plurality of interface structures 12 are stacked.

In one embodiment, the first condensing lens 322 may include a plurality of convex portions 3221 arranged in a line along a stacking direction of the plurality of interface structures 12. Each of the plurality of block portions 3221 may be disposed to be adjacent to at least one corresponding second condensing lens 123. In an example not shown, each of the plurality of convex portions 3221 may be provided in the plurality of interface structures 12 to be adjacent to the corresponding at least one or more second condensing lenses 123.

7 is a side cross-sectional view schematically illustrating integrated components of an optical probe according to another embodiment.

Referring to FIG. 7, there is shown a structure in which a waveguide for transmitting an optical signal is integrated in a substrate according to another embodiment. According to the structure 421 according to an embodiment, stress compensation and electrical insulation are performed on a silicon-on-insulator (SOI) wafer 4211 in which a silicon oxide (eg SiO ₂ ) is located in the middle. A triple layer 4216 is deposited. In one example, the triple layer 4216 may have a form in which silicon oxide, silicon nitride, and silicon oxide are sequentially stacked. On the deposited triple layer 4216, low impedance electrodes receiving electrical signals, pad-shaped electrical connections, and chromium / gold (Cr / Au) materials 4217 for electrical leads connecting them are lifted off. -off) Silicon oxide or triple layer 4215 is again deposited over deposited triple layer 4216 and chromium / gold material 4217, and a portion of the deposited silicon oxide or triple layer 4215 is patterned in an etch-like manner. At the portion patterned in the same manner as the etching, the recording electrode 426 of titanium / iridium (Ti / Ir) material is positioned. A core 4241 of SU-8 material is patterned over the deposited triple layer 4216 and the chromium / gold material 4217. The structure 421 as shown in FIG. 7 may be applied to the interface structure of FIGS. 1 to 6 described above.

Although the embodiments have been described by the limited embodiments and the drawings as described above, various modifications and variations are possible to those skilled in the art from the above description. For example, the described techniques may be performed in a different order than the described method, and / or components of the described systems, structures, devices, circuits, etc. may be combined or combined in a different form than the described method, or other components. Or, even if replaced or substituted by equivalents, an appropriate result can be achieved.

Claims (13)

A light source emitting light;
A first condenser lens for condensing light of the light source in a first direction;
A plurality of second condensing lenses for condensing light collected in a first direction in a second direction crossing the first direction;
A plurality of waveguides extending from the plurality of second condensing lenses, respectively, and configured to transmit light collected in a second direction to an object; And
A plurality of electrodes configured to receive electrical signals generated when the object is stimulated or suppressed by light transmitted to the object;
Optical probe comprising a.
The method of claim 1,
And the plurality of second condensing lenses are separated from each other.
The method of claim 1,
And a direction in which light from the light source is incident on the first condensing lens to cross an optical axis of the first condensing lens.
The method of claim 3,
And the optical axis of the first condensing lens is in a twisted position with respect to each optical axis of the plurality of second condensing lenses.
The method of claim 1,
And the first condenser lens has a rod shape extending in a direction crossing the direction in which the plurality of waveguides extends to cover the plurality of second condenser lenses.
The method of claim 1,
An edge of each of the plurality of second condensing lenses has an arc shape at a side facing the first condensing lens.
The method of claim 1,
And the light source, the first condenser lens, and the plurality of second condenser lenses are arranged in a line along a path through which light travels.
The method of claim 1,
The first condensing lens, the plurality of second condensing lenses, and the plurality of waveguides form an interface structure,
And the interface structure is coupled to the light source to be detachable with respect to the light source.
The method of claim 8,
A portion of the first condenser lens is embedded in the interface structure such that a light path from the light source to the plurality of waveguides is formed via the first condenser lens and the plurality of second condenser lenses. And a plurality of condensing lenses and the plurality of waveguides are formed above the interface structure.
The method of claim 1,
And the plurality of second condensing lenses are integrally formed at an end adjacent to the light source among a plurality of waveguides respectively corresponding thereto.
The method of claim 1,
The plurality of waveguides is further provided and further comprises a substrate comprising silicon;
Each of the waveguides comprises a core and a cladding,
The core is surrounded by the substrate and the cladding.
A single light source emitting light;
A first condensing lens extending in one direction;
A plurality of second condensing lenses adjacent to a portion of the first condensing lens and a plurality of first condensing lenses respectively extending from the plurality of second condensing lenses in a direction crossing the direction in which the first condensing lens extends; A first interface structure comprising waveguides; And
A plurality of additional second condensing lenses adjacent to other portions of the second condensing lens, and a plurality of second condensing lenses respectively extending from the plurality of second condensing lenses in a direction crossing the direction in which the first condensing lens extends; A second interface structure comprising second waveguides;
Including,
The second interface structure is stacked on the first interface structure,
And the plurality of second condensing lenses of the first interface structure and the plurality of second condensing lenses of the second interface structure form a two-dimensional array.
The method of claim 12,
The first condensing lens includes a plurality of convex portions arranged in a line in a direction intersecting a direction in which the first condensing lens extends and a direction in which the plurality of second condensing lenses extend, respectively.
Any one of the plurality of convex portions is adjacent to a plurality of second condensing lenses of the first interface structure,
Another convex portion of the plurality of convex portions is adjacent to the plurality of second condensing lenses of the second interface structure.

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