KR20200005256A - Stretchable electrode structure and manufacturing method for stretchable electrode structure - Google Patents

Abstract

Disclosed is a stretchable electrode structure which is flexible and stretchable without resistance value changes. The stretchable electrode structure comprises: a closed figure pattern unit including a first closed figure member, a second closed figure member enclosing the outside of the first closed figure member, and a third closed figure member enclosing the outside of the second closed figure member; and a radial pattern unit including a plurality of first connection members separated from each other and arranged in a circumferential direction between the first and the second closed figure member to connect the first and the second closed figure member, and a plurality of second connection members separated from each other and arranged in the circumferential direction between the second and the third closed figure member to connect the second and the third closed figure member. The first, the second, and the third closed figure member each includes a serpentine structure bent multiple times to be stretched in the circumferential direction and is a member extended in the circumferential direction to form a closed figure. The plurality of first connection members and the plurality of second connection members are arranged in a serpentine structure form bent one or more times to be stretched in the radial direction.

Description

STRETCHABLE ELECTRODE STRUCTURE AND MANUFACTURING METHOD FOR STRETCHABLE ELECTRODE STRUCTURE}

The present application relates to a stretchable electrode structure and a method of manufacturing the stretchable electrode structure.

Conventional electronic devices use plastic or glass substrates, and thus have low flexibility, thereby limiting their application range. Accordingly, in recent years, flexible electronic devices manufactured to be bent using a flexible substrate instead of a plastic or glass substrate have been developed. However, when the conventional flexible electronic device is used as a biometric sensor and attached to the skin of a person, it is difficult to obtain accurate data because the resistance value changes according to the movement of the person. Therefore, there is a need for an electronic device capable of obtaining accurate values even in a bent or stretched environment.

Background art of the present application is disclosed in Korea Patent Publication No. 10-1200798.

The present invention is to solve the above-mentioned problems of the prior art, an object of the present invention to provide a flexible stretchable stretchable electrode structure and a stretchable electrode structure for manufacturing the same without changing the resistance value.

However, the technical problem to be achieved by the embodiments of the present application is not limited to the technical problems as described above, and other technical problems may exist.

As a technical means for achieving the above technical problem, the stretchable electrode structure according to the first aspect of the present application, the first closed member, the second closed member surrounding the outer side of the first closed member, and the first A closed drawing pattern portion including a third closed drawing member surrounding an outer side of the closed drawing member; And a plurality of first connection members arranged at intervals along the circumferential direction between the first closed member and the second closed member so as to connect the first closed member and the second closed member. A radial direction comprising a plurality of second connecting members arranged at intervals along the circumferential direction between the second closed-shaped member and the third closed-shaped member so as to connect the second closed-shaped member and the third closed-shaped member. A first portion, the second closed portion, and the third closed portion, each having a serpentine structure that is bent and stretched in a circumferential direction and extends along the circumferential direction. And a plurality of first connecting members and the plurality of second connecting members each bent at least once to be stretchable in the radial direction. It may be provided in crude form.

In addition, the manufacturing method of the stretchable electrode structure according to the second aspect of the present application, (a) forming an electrode layer on the substrate; (b) patterning the electrode layer to form a stretchable electrode structure according to the first aspect of the present disclosure; And (c) separating the stretchable electrode structure from the substrate.

The above-mentioned means for solving the problems are merely exemplary and should not be construed as limiting the present application. In addition to the above-described exemplary embodiments, additional embodiments may exist in the drawings and detailed description of the invention.

According to the above-described problem solving means of the present application, through the stable spider web shape (spider web) form implemented by the closed drawing pattern portion and the radial pattern portion, it is possible to secure a wide measuring range and be engineeringally stable, in addition, Since the figure pattern portion and the radial pattern portion include a serpentine structure, the figure pattern portion and the radial pattern portion may be deformed (stretched, bent, etc.) into 2D or 3D shapes according to the applied external force, and are flexible without changing the resistance value against the applied external force. A stretchable electrode structure that can be stretchably deformed can be implemented. Accordingly, the stretchable electrode structure may be attached to an object in which a movement occurs, for example, a human body, and may be applied as a biosensor that is deformed in response to the movement of the object without changing a resistance value even when the movement of the object occurs, and obtains accurate data. Can be implemented.

1 is a plan view of a stretchable electrode structure according to an exemplary embodiment of the present disclosure.
2A to 2D are schematic conceptual views for explaining deformation due to stress of the stretchable electrode structure according to the exemplary embodiment.
3 is a cross-sectional view of the stretchable electrode structure according to the example embodiment.
4A and 4B are photographs for explaining deformation according to stress of the stretchable electrode structure according to the exemplary embodiment.
5 is a flow chart of a method of manufacturing a stretchable electrode structure according to an embodiment of the present application.
6A to 6J are schematic conceptual views illustrating a method of manufacturing a stretchable electrode structure according to an exemplary embodiment of the present disclosure.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present disclosure will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present disclosure. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted for simplicity of explanation, and like reference numerals designate like parts throughout the specification.

Throughout this specification, when a portion is "connected" to another portion, this includes not only "directly connected" but also "electrically connected" with another element in between. do.

Throughout this specification, when a member is said to be located on another member "on", "upper", "top", "bottom", "bottom", "bottom", this means that any member This includes not only the contact but also the presence of another member between the two members.

Throughout this specification, when a part is said to "include" a certain component, it means that it can further include other components, without excluding the other components unless specifically stated otherwise.

The present application relates to a stretchable electrode structure and a method of manufacturing the stretchable electrode structure.

First, a stretchable electrode structure (hereinafter, referred to as “the stretched electrode structure”) according to an exemplary embodiment of the present application will be described.

The stretchable electrode structure relates to a design for application to stretchable and flexible devices, and includes a kirigami, spiderweb, and serpntine in a 2D device. By applying a structure-mixed pattern (kirigami + spiderweb + serpntine) patterning design, 3D stretching, relatively wide measuring range, stress relief, and spherical curved surfaces can be achieved. You can suggest a design that you can. It will be described in more detail below.

1 is a plan view of a stretchable electrode structure according to an embodiment of the present application, Figures 2a to 2d is a schematic conceptual diagram for explaining the deformation according to the stress of the stretchable electrode structure according to an embodiment of the present application, Figure 3 is 4 is a cross-sectional view of a stretchable electrode structure according to an exemplary embodiment of the present disclosure, and FIGS. 4A and 4B are photographs for explaining deformation due to stress of the stretchable electrode structure according to the exemplary embodiment of the present disclosure.

Referring to FIG. 1, the stretchable electrode structure includes a closed pattern portion. The closed drawing pattern part may include a plurality of closed drawing members 1a, 1b, 1c, 1d, and 1e. Specifically, the closed patterned pattern portion is formed to surround the outside of the first closed member 1a, the second closed member 1b surrounding the outside of the first closed member 1a, and the second closed member 1b. The enclosing third closed member 1c is included. Each of the first to third closed drawing members 1a, 1b, and 1c extends along the circumferential direction to form a closed drawing. The number of closed drawing members including the closed drawing pattern part is not limited to three, and referring to FIG. 1, the closed drawing pattern part may include three or more different shapes. For example, FIG. 1 includes the first to third closed-shaped members 1a, 1b, and 1c and two other closed-shaped members (the fourth closed-shaped member 1d and the fifth closed-shaped member 1e). In other words, a closed patterned pattern portion including five closed shaped members is shown.

In addition, referring to FIG. 1, at least one of the plurality of closed drawing members may include a serpentine structure. Specifically, each of the first closed-shaped member 1a, the second closed-shaped member 1b, and the third closed-shaped member 1c includes a serpentine structure bent a plurality of times so as to be stretchable in the circumferential direction. The serpentine structure may comprise a zigzag shaped portion. In addition, the serpentine structure (ie, zigzag shape) may be formed in-plane in two dimensions. Accordingly, the closed member 1a, 1b, 1c, 1d, 1e can be stretched by bending the bent portion of the serpentine structure. In addition, referring to FIG. 1, in the serpentine structure, the bent portion (bent portion) may have a curved (curved) shape. Accordingly, the serpentine structure may have a curvature. The closed drawing members 1a, 1b, 1c, 1d, and 1e include such serpentine structures so that the bent portions of the serpentine structure can be stretched according to the curvature and length of the serpentine structure. It is possible to build.

In addition, the stretchable electrode structure includes a radial pattern portion. The radial pattern portion is spaced along the circumferential direction between the first closed-shaped member 1a and the second closed-shaped member 1b so as to connect the first closed-shaped member 1a and the second closed-shaped member 1b. A plurality of first connecting members 2a arranged, and a second closing member 1b and a third closing member 1c to connect the second closing member 1b and the third closing member 1c. And a plurality of second connecting members 2b arranged at intervals along the circumferential direction therebetween. In addition, referring to FIG. 1, the radial pattern portion connects the first to third closed-shaped members 1a, 1b, and 1c with another closed-shaped member (eg, removes the third closed-shaped member 1c). 3rd connection member 2c which connects with 4 closing member 1d, or the connection member (for example, 4th closing member 1d and 5th closing member which connects between other closed member) It may include a fourth connecting member (2d) connecting 1e). For reference, in the present application, the radial direction refers to a center point of the closed pattern pattern portion, for example, a direction from the center point of the first closed pattern member 1a positioned at the innermost side of the closed pattern pattern portion to the outside and the closed pattern. It may be a direction concept encompassing all the directions from the outside of the pattern portion toward the center point (inside) of the closed pattern pattern portion. Accordingly, the first connecting member 2a and the second connecting member 2b connect the closed drawing member located on the inner side and the closed drawing member located on the outer side (more specifically, the first closing member 1a and the second connecting member 2a). The second closed drawing member 1b is connected or the second closed drawing member 1b and the third closed drawing member 1c are connected to each other so as to extend in the inner and outer directions (radial and radial directions) of the closed drawing pattern portion. In this regard, the pattern portion including the first connecting member 2a and the second connecting member 2b may be referred to as a radial pattern portion.

In addition, the radial pattern portion may include a serpentine structure.

Specifically, referring to FIG. 1, each of the plurality of first connecting members 2a and the plurality of second connecting members 2b may be provided in the form of a serpentine structure that is bent one or more times so as to be stretchable in the radial direction. For example, the serpentine structure may include a bent portion bent one or more times. In addition, the serpentine structure (that is, the bent portion) may be formed in-plane in two dimensions. Accordingly, the serpentine structure can be stretched by bending the bent portion. In addition, as described above, the bent portion (bent portion) in the serpentine structure may have a curved (curved) shape, and thus the serpentine structure may have a curvature. The first connecting member 2a and the second connecting member 2b include such a serpentine structure, so that the bent portion of the serpentine structure is stretched according to the curvature and length of the serpentine structure. It is possible and flexible. In addition, the other connecting members 2c and 2d may include a serpentine structure, and the other connecting members 2c and 2d including the serpentine structure may be different from the first and second connecting members 2a and 2b. The same action and effect will be possible.

As described above, referring to FIG. 1, the stretchable electrode structure may include a spider web pattern. The spider web pattern may mean a pattern formed by connecting the closed pattern pattern portion and the closed pattern pattern portion by the connecting members 2a, 2b, 2c, and 2d. Such a pattern may be called a spider web pattern because it may have a spider web shape. According to such a spider web pattern (spider wire structure), a stretchable electrode structure that can be engineered to be stable and minimizes empty space can be implemented. Accordingly, when the stretchable electrode structure is applied to a biometric sensor, a biosignal value is accurately obtained. Can lose.

As described above, the stretchable electrode structure may be deformable (expandable) in an in-plane direction and an out-plane direction. For example, since the closed-shaped members 1a, 1b, 1c, 1d, 1e and the connecting members 2a, 2b, 2c, 2d include a serpentine structure, the bent portion of the serpentine structure (bent portion) ) Can be stretched in the circumferential direction of the closed pattern portion in the form of unfolding. In addition, referring to FIG. 2A, the stretchable electrode structure may be stretched in a plane direction, referring to FIG. 2B, may be stretched in a point direction, and referring to FIG. 2C, may be stretched in a vertical direction. have. In addition, referring to Figure 2d, it can be complexly stretched in the point direction and the plane direction. Accordingly, the stretchable electrode structure can stretch in 2D and 3D and can stretch in the vertical direction.

In addition, as described above, the stretchable electrode structure includes a serpentine structure, and by the serpentine structure, it is possible to minimize the stress applied to the stretchable electrode structure when stretching the stretchable electrode structure. In addition, the stretch can be adjusted according to the curvature and length of the serpentine structure.

In addition, the stretchable electrode structure may include a Kirigami pattern (A). The Kirigami pattern A may mean that the connecting member is arranged to be radially offset from the neighboring connecting member in the radial direction.

For example, referring to FIG. 1, at least a part of the plurality of first connecting members 2a may be arranged to be displaced without coinciding with all of the plurality of second connecting members 2b with respect to the radial direction. Accordingly, the first closed member 1a, the second closed member 1b, and the third closed member 1c may be connected in a Kirigami pattern A.

According to the Kirigami pattern A, the range in which the stretching in the out-plane direction is made larger than the Kirigami pattern A is not included. For example, according to the Kirigami pattern A, not only the connecting members 2a, 2b and 2c at the time of stretching in the out-plane direction of the connecting members 2a, 2b and 2c forming the Kirigami pattern A. Since the closed drawing members 1a, 1b, 1c, 1d, and 1e connected to the connecting members 2a, 2b and 2c forming the Kirigami pattern A can be stretched while being lifted out of the plane, the present stretching The stretching range in the out-of-plane direction (vertical direction) of the electrode structure can be increased.

For reference, referring to FIG. 1, at least some of the second connection members 2b may be arranged to correspond to the radial direction with the at least one third connection member 2c with respect to the radial direction. In addition, at least a part of the third connecting main drain 2c may be arranged to be offset from the radial direction with the at least one fourth connecting member 2d with respect to the radial direction.

In addition, referring to FIG. 1, the stretchable electrode structure may include a terminal portion 3. The terminal portion 3 can connect the present stretched electrode structure (specifically, a portion including the closed pattern portion and the radial pattern portion) with other devices.

In addition, referring to FIG. 1, the stretchable electrode structure may include a third connecting member 4 connecting the closed pattern pattern part and the terminal part 3. The third connecting member may connect the outermost (outermost) closed drawing member 1e and the terminal portion 3 to the closed box pattern portion. The third connecting member 4 may include a serpentine structure that is bent one or more times. Accordingly, the third connection member 4 may be stretchable and flexible in cooperation with the closed pattern portion and the radial pattern portion.

In addition, referring to FIG. 3, the stretchable electrode structure may include a metal layer 91 and a polymer film layer 92 formed on at least one of one surface and the other surface of the metal layer 91. In exemplary embodiments, the polymer film layer 92 may be formed of a material including at least one of polyimide, PVDF, and the like. In addition, the metal layer 91 may include one or more layers, for example, the metal layer 91 may include a first layer 911 and a second layer 912, and the first layer 911. Silver may be a material including Ti, and the second layer 912 may be a material including Au. The material included in the stretchable electrode structure may not have a flexible nature and a stretchable nature. On the other hand, the stretchable electrode structure includes the above-described structural form, and thus can exhibit not only flexible characteristics but also stretchable characteristics.

In summary, the stretchable electrode structure is engineered in the form of a spider web (spider web structure) and can measure current over a wide range without relatively empty space. In addition, when the stretchable electrode structure is stretched (stretched) due to the serpentine structure, that is, when the shape is deformed, a change in resistance value may not occur. In other words, deformation (stretching, bending, etc.) is possible in response to the stress applied thereto without changing the resistance value. In addition, in relation to the deformation of the stretchable electrode structure, the serpentine structure is generally difficult to stretch in the vertical direction, but the stretchable electrode structure may be expanded to be deformed in a hemispherical shape by complexing the Kirigami pattern (A). In addition, it is possible to stretch in various other directions. As such, referring to FIG. 4A, the stretchable electrode structure is capable of 2D and 3D stretching, may be stretched in the vertical direction, and may be bent. Referring to FIG. 4B, the stretchable electrode structure may be a hemispherical shape. Since it can be stretched, it can be attached to a device that is stretched in the form of a circle or sphere, it is possible not only to have a flexible characteristic (extensible characteristics), but also to design a stretchable device can be presented.

In addition, when the stretchable electrode structure is applied to the electronic device, that is, when the stretchable and flexible design of the stretched nationwide structure is applied to the fabrication of the electronic device, even if the shape is deformed by an external force acting, Values (EMG, ECG, EOG, EGG) can be measured accurately. Accordingly, the electronic device may be attached to the entire body part that needs to be stretched, and data analysis may be performed so that the resistance value does not change even when stretched. In addition, due to the design of the stretchable electrode structure, it can be applied to various stretchable / flexible substrates (for example, ecoflexible, siibionie, PDMS, etc.), and can be applied to applications suitable for the purpose.

In addition, the stretchable electrode structure may include a polymer film layer 92 and a metal layer 91 of a material including a polyimide. In general, the polyimide and the metal layer may be difficult to exhibit flexible and stretchable properties. Can be. On the other hand, the stretchable electrode structure can exhibit not only flexible characteristics but also stretchable characteristics through the above-described structural form.

In addition, the stretchable electrode structure may be formed in a curved shape. In addition, as described above, it may be stretched in various directions. Further, the curvature of serpentine, the thickness of the closed drawing members 1a, 1b, 1c, 1d and 1e or the thickness of the connecting members 2a, 2b, 2c and 2d closed drawing members 1a, 1b, 1c, 1d and 1e. The stretching percentage may be adjusted according to the number of the plurality of connecting members 2a, 2b, 2c, and 2d, the number of the connecting members 2a, 2b, 2c, and 2d which are arranged to be offset from the radial direction. In addition, since the stretchable electrode structure viewed in various directions can be 2D or 3D stretching, stretching in the vertical direction, etc., a relatively wide measurement range can be secured. In addition, the stretching ratio (% of stretching) may be adjusted according to the thickness, width, and the like of the stretchable electrode structure.

In addition, as described above, since the stretchable electrode structure can be stretched in a hemispherical shape (as it can be stretched), the stretchable electrode structure can be attached to equipment that extends in a circular shape, and even when removed, the stress relaxation can be performed. As a result, the effect of stress fracture on the stretchable electrode structure can be reduced. Accordingly, when the stretched electrode structure is applied to the biometric sensor, the elastic electrode structure is attached to various body parts so that the resistance value does not change even when the movement of the attachment site occurs. I can lose it.

The stretchable electrode structures described above can be applied to flexible, stretchable and wearable electronic devices. Accordingly, an electronic device that is attached to the skin of the person and is extended to the movement of the person and is not damaged may be implemented.

Meanwhile, hereinafter, a method of manufacturing the stretchable electrode structure according to the exemplary embodiment of the present application (hereinafter referred to as 'the present manufacturing method') is described. However, the present manufacturing method is applicable to manufacturing the above-described stretchable electrode structure, and shares the same or corresponding technical features and configurations as the stretchable electrode structure. Therefore, descriptions overlapping with those described in the stretchable electrode structure will be briefly or omitted, and the same reference numerals will be used for the same or similar components.

The present manufacturing method may relate to a process of using a laser without using a photolithography process in manufacturing a stretchable electrode structure (electronic device). More specifically, the patterning of metalized thin / thick film, the patterning of polymer thin / thick film, pattering of polymer / metal / polymer, may be related to an easy process method that can be easily transferred.

Specifically, according to the present manufacturing method, a method for solving a complicated process procedure which is a disadvantage of the conventional manufacturing method of a flexible and stretchable stretchable electrode structure (biosignal sensor) can be provided. In addition, according to the present manufacturing method, a method for reducing a problem such as cracking of an electrode or a pattern generated during transfer to another substrate may be provided. In addition, according to the present manufacturing method, a method in which various patterning processes are performed in one process may be provided. In addition, according to the present manufacturing method, a method capable of manufacturing various sizes (sizes, standards) and shapes (forms) of the stretchable electrode structure may be provided. In addition, according to the present manufacturing method, a method that can be easily used can be provided because no complicated technique is required when using the equipment such as photolithography. In addition, the present manufacturing method may be provided a method capable of polymer patterning (polyimide, PVDF) as well as metal patterning. In addition, according to the present manufacturing method, it is possible to provide a method that can form a neutral plane with a polyimide transfer film on the upper and lower portions of the stretchable electrode structure to alleviate the stability of the structure and the external stress during transfer. In addition, the present manufacturing method may propose a method of manufacturing a stretchable electrode structure applicable to confirming bio signals (EMG, ECG, EEG, EOG). It will be described in more detail below.

5 is a flowchart illustrating a method of manufacturing the stretchable electrode structure according to the exemplary embodiment of the present disclosure, and FIGS. 6A to 6J are schematic conceptual views illustrating a method of manufacturing the stretchable electrode structure according to the exemplary embodiment of the present disclosure.

Referring to FIG. 5, the manufacturing method includes forming an electrode layer on a substrate (S100).

Referring to FIG. 3, the stretchable electrode structure according to the present manufacturing method may include a metal layer 91 and a polymer film layer 92 formed on at least one of one side and the other side of the metal layer 91. More specifically, the stretchable electrode structure according to the present manufacturing method includes the metal layer 91, the polymer film layer 92 formed on one surface of the metal layer 91, and the polymer film layer 92 formed on the other surface of the metal layer 91. ) May be included. The polymer film layer 92 may be a material including one or more of polyimide, PVDF, and the like. In addition, the metal layer 91 may include one or more layers, for example, the metal layer 91 may include a first layer 911 and a second layer 912, and the first layer 911. Silver may be a material including Ti, and the second layer 912 may be a material including Au.

In this case, in step S100, the polymer film layer 92 is formed on the substrate, the metal layer 91 is formed on the formed polymer film layer 92, and the polymer film layer 92 is formed on one surface of the metal layer 91. Can be formed. It demonstrates more concretely below.

6A to 6C, in operation S100, a polymer film layer 92 may be formed on a substrate. In this case, the polymer film layer 92 may be formed by applying a liquid polymer (see FIG. 6A) and then drying (see FIG. 6B) (see FIG. 6C). For reference, the substrate may be one of a glass substrate and a SiO ₂ substrate.

In addition, in step S100, the metal layer 91 may be formed on the polymer film layer 92 formed on the substrate. The metal layer 91 may be formed by depositing a metal. In addition, as described above, the metal layer 91 may include one or more layers. When the first layer 911 and the second layer 912 are included, the material of the material forming the first layer 911 may be included. (Metal, for example, a material including Ti) is deposited to form a first layer 911, and a material of a material (metal, eg, forming a second layer 912 on one surface of the first layer 911) For example, a material including Au may be deposited to form a metal layer 912 including the first layer 911 and the second layer 912.

In addition, the metal layer 91 may be deposited by an E-beam. In addition, the metal layer 91 may be deposited by a spin coater. For example, each of the first layer 911 and the second layer 912 may be deposited by one or more of an E-beam and a spin coater. Also, for example, the first layer 911 may be deposited to have a thickness of 20 nm, and the second layer 912 may be deposited to have a thickness of 100 nm.

In addition, the manufacturing method includes a step (S300) of forming the stretchable electrode structure described above by patterning the electrode layer. In other words, in operation S300, the electrode layer may be patterned to have a pattern corresponding to the stretchable electrode structure described above. For reference, the result formed by the step S300 may be referred to as a free standing film.

As described above, the stretchable electrode structure includes the first closed-shaped member 1a, the second closed-shaped member 1b surrounding the outside of the first closed-shaped member 1a, and the second closed-shaped member 1b. The closed figure pattern part including the 3rd closed figure member 1c which surrounds the outer side of FIG. Each of the first to third closed drawing members 1a, 1b, and 1c extends along the circumferential direction to form a closed drawing. In addition, each of the first closed-shaped member 1a, the second closed-shaped member 1b, and the third closed-shaped member 1c includes a serpentine structure bent a plurality of times so as to be stretchable in the circumferential direction. In addition, the serpentine structure (ie, zigzag shape) may be formed in-plane in two dimensions.

In addition, the stretchable electrode structure includes a radial pattern portion. The radial pattern portion is spaced along the circumferential direction between the first closed-shaped member 1a and the second closed-shaped member 1b so as to connect the first closed-shaped member 1a and the second closed-shaped member 1b. A plurality of first connecting members 2a arranged, and a second closing member 1b and a third closing member 1c to connect the second closing member 1b and the third closing member 1c. And a plurality of second connecting members 2b arranged at intervals along the circumferential direction therebetween. Each of the plurality of first connecting members 2a and the plurality of second connecting members 2b is provided in the form of a serpentine structure that is bent at least once so as to be able to stretch in the radial direction. The serpentine structure (ie, the bent portion) may be formed in-plane in two dimensions.

In addition, in the stretchable electrode structure, at least a part of the plurality of first connecting members 2a may be arranged so as not to coincide with all of the plurality of second connecting members 2b with respect to the radial direction. In addition, the stretchable electrode structure may include a terminal portion 3. In addition, the stretchable electrode structure may include a terminal connection member 4 connecting the closed pattern portion and the terminal portion 3 to each other. In addition, the terminal connecting member 4 may include a serpentine structure that is bent one or more times.

In addition, referring to Figure 6d, step S300 may be patterned using laser irradiation. For example, in operation S300, the electrode layer may be disposed on the stage of the patterning device. In addition, the polymer film layer 92 on one surface of the metal layer 91 among the electrode layers formed on the substrate may be etched by inputting a dimension and a design to be patterned into the patterning device and scanning a laser beam through the laser oscillator. In this case, the light detection means may selectively detect only light having a specific wavelength among the light emitted when the polymer film layer 92 is etched, convert it into an electrical signal proportional to the amount of light detected, and transmit the light to the microprocessor. The output of the laser beam may be adjusted by controlling the laser generator according to the magnitude of the electric signal transmitted from the light detecting means through the microprocessor. For reference, a pulse laser may be used as the laser.

In addition, the laser is directed from one side (see FIG. 3, generally toward 12 o'clock) to the other side (see FIG. 3, generally toward 6 o'clock) of the polymer film layer 92 formed on one surface of the metal layer 91. Can be investigated. Further, the laser reaches the metal layer 91, and heat generated in the metal layer 91 by the irradiation thereof is transferred to the polymer film layer 92 formed on the other surface of the metal layer 91, and the metal layer 91 by the heat. The polymer film layer 92 formed on the other side of the substrate may have an output for patterning. In other words, in step S300, the metal layer 91 and the polymer film layer 92 on one surface of the metal layer 91 are etched by a laser, and the polymer film layer 92 on the other surface of the metal layer 91 is etched. The electrode layer may be patterned by setting one or more of the output and the band of the laser to a predetermined value so as to be patterned by the heat transmitted from 91. For example, the setting value for the irradiation of the laser may include one or more of the time the laser is irradiated, the power percentage, the laser frequency, the marking speed, and the like. In this case, the time for which the laser is irradiated may be 5 minutes to 19 minutes, preferably 12 minutes, the power may be 100%, the frequency may be 10KHz to 30Khz, preferably 20Khz, the marking speed is 0.5mm / s to 1.5 mm / s, preferably 1 mm / s. In addition, laser irradiation may be performed with a Pulse Duration 4ns (based on INYA-20 laser), and may have an average power of 0.8 W and a pulse energy of 0.04 mJ.

6E and 6F, the manufacturing method includes a step S500 of separating the stretchable electrode structure from the substrate. For example, the step S500 may use a water soluble tape. For example, the stretched electrode structure may be separated from the substrate by immersing the patterned electrode layer in water.

6H to 6J, after the step S300, the manufacturing method may include disposing a flexible substrate on one of the one side and the other side of the stretchable electrode structure. The flexible substrate can be stretchable and flexible. That is, in the manufacturing method, the stretchable electrode structure separated from the substrate may be transferred to the stretchable and flexible substrate after the step S300. In addition, when performing such transfer, the present production method can transfer using a roller so that the stretchable electrode structure is not damaged. In addition, the present manufacturing method can form a neutral plane with polyimide so that the stretchable electrode structure is prevented from being damaged.

The prior art is a technique for patterning only a thin film of a laminated structure, there is no solution to the method of transferring in making a free standing flim (Polymer) after patterning the thin film, there was a limit that the thin film can be broken.

On the other hand, according to the present manufacturing method, since laser patterning is used, a complicated and expensive photolithography process is not required, and since a mask does not need to be manufactured, much time and cost can be saved. In addition, since the present manufacturing method is driven softly, the length and width of the patterning can be freely adjusted without restriction. In the photolithography process, a nicking solution suitable for the metal material should be used, but according to the present production method, the process can be performed regardless of the material. In addition, according to the present manufacturing method, it can be very excellent in terms of precision and thickness control which is the limit of ink-jet print. In addition, according to the present manufacturing method, after all processes are completed, transfer to another substrate can be easily performed on the flexible and stretchable substrate. In addition, the present manufacturing method, because it uses a water soluble, thermal release tape, can be easily transferred, the damage of the stretchable electrode structure during the transfer can be prevented (can not be broken). In addition, according to the present production method, the neutral plane can be formed of polyimide, and the electrode can be prevented from being broken during transfer.

As described above, the present manufacturing method may be related to a patterning method of a multilayer thin film using a laser. In the present manufacturing method, a patterning method using a laser is applied in performing a patterning process for a device having a multilayer thin film structure, and the other thin film (the other surface of the metal layer 91) is caused by energy irradiated using the spectral information of each layer thin film. Only one side of the thin film (the polymer film layer 92 or the metal layer 91 on one surface of the metal layer 91) may be selectively patterned while minimizing damage to the polymer film layer 92 of the phase.

The conventional photolithography process is complicated, requires a different mask every time a design change is required, not only is it expensive due to expensive equipment, but also requires a lot of time and technology. In addition, the yield is low because it is necessary to focus directly on the person's hand and adjust its position. On the other hand, according to the present manufacturing method, since the patterning can be made by laser cutting, a free standing film, a pattern of metal can be obtained, and because the expensive lithography equipment is not required, the price can be made with one laser equipment. It is inexpensive and can save time because it does not require a process such as PR and nicking. In addition, size control and intensity control can be used to fabricate stretchable electrode structures in a variety of dimensions, and can be easily transferred to flexible, stretchable, or rigid substrates with elaborate films with a minimum processing unit set to tens of micrometers. Can be.

The above description of the present application is intended for illustration, and it will be understood by those skilled in the art that the present invention may be easily modified in other specific forms without changing the technical spirit or essential features of the present application. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

The scope of the present application is indicated by the following claims rather than the above description, and it should be construed that all changes or modifications derived from the meaning and scope of the claims and their equivalents are included in the scope of the present application.

1a: first closed member
1b: second closed drawing member
1c: third closed-conducting member
1d: fourth closed drawing member
1e: fifth closed drawing member
2a: first connecting member
2b: second connecting member
2c: third connecting member
2d: fourth connecting member
3: terminal
4: terminal connection member
91: metal layer
911: first floor
912: the second layer
92: polymer film layer

Claims (15)

As a stretchable electrode structure,
A closed pattern pattern portion including a first closed member, a second closed member surrounding the outside of the first closed member, and a third closed member surrounding the outside of the second closed member; And
A plurality of first connection members arranged at intervals along the circumferential direction between the first closed member and the second closed member such that the first closed member and the second closed member are connected; 2 A radial pattern comprising a plurality of second connecting members arranged at intervals along the circumferential direction between the second closed member and the third closed member so as to connect the second closed member and the third closed member. Including wealth,
Each of the first closed-shaped member, the second closed-shaped member, and the third closed-shaped member includes a serpentine structure which is bent in a plurality of times so as to be stretchable in the circumferential direction and extends along the circumferential direction to form a closed figure. It is absence to say,
Each of the plurality of first connection members and the plurality of second connection members is provided in the form of a serpentine structure bent at least once so as to be able to stretch in the radial direction. The method of claim 1,
At least a portion of the plurality of first connecting members is arranged so as not to coincide with all of the plurality of second connecting members with respect to the radial direction and is arranged to be offset. The method of claim 1,
The serpentine structure is to be formed in-plane (In-Plane) two-dimensional, stretchable electrode structure. The method of claim 1,
Further comprising a terminal connection member for connecting the closed pattern pattern portion and the terminal portion,
The terminal connecting member is provided in the form of a serpentine structure bent one or more times, stretchable electrode structure. The method of claim 4, wherein
And further comprising the terminal portion. As a manufacturing method of a stretchable electrode structure,
(a) forming an electrode layer on the substrate;
(b) patterning the electrode layer to form the stretchable electrode structure according to claim 1; And
(c) separating the stretchable electrode structure from the substrate. The method of claim 6,
At least a part of the plurality of first connecting members is arranged to be displaced without being coincident with all of the plurality of second connecting members with respect to a radial direction. The method of claim 6,
The zigzag shape and the bent shape is a two-dimensional in-plane (In-Plane) is formed, the manufacturing method of the stretchable electrode structure. The method of claim 6,
The stretchable electrode structure further includes a third connection member connecting the closed-type closed turn part and the terminal part,
The third connecting member is provided in the form of a serpentine structure bent one or more times, the manufacturing method of the stretchable electrode structure. The method of claim 9,
The stretchable electrode structure further comprises the terminal portion. The method of claim 6,
The step (a) is to form a polymer film layer on one side of the substrate, a metal layer on one side of the polymer film layer, and to form a polymer film layer on one side of the metal layer, stretchable electrode Method of making a structure. The method of claim 11,
In the step (a),
The polymer film layer is a method of manufacturing a stretchable electrode structure, which is formed by applying a liquid polymer and then dried. The method of claim 11,
In the step (a),
The metal layer is a method of manufacturing a stretchable electrode structure, which is formed by depositing a metal. The method of claim 11,
Step (b), but patterning using laser irradiation,
The laser,
Irradiated from one side of the polymer film layer formed on one surface of the metal layer to the other side,
The heat that reaches the metal layer and, in response to its irradiation, is transferred to the polymer film layer formed on the other surface of the metal layer so that the polymer film layer formed on the other surface of the metal layer is patterned by the heat. What has, the manufacturing method of a stretchable electrode structure. The method of claim 6,
After step (c),
The method of claim 1, further comprising disposing a flexible substrate on one side and the other side of the stretchable electrode structure.

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