KR20190122528A - Laser generator and laser manufacturing apparatus including the same - Google Patents

Abstract

Provided is a laser processing apparatus which comprises: a control unit; a processing unit emitting a laser beam and controlled by the control unit; and a chamber in which the laser beam emitted from the processing unit is transmitted, an internal space is maintained in a vacuum state, and a specimen welded by the laser beam can be accommodated. The processing unit comprises a laser generator generating a laser beam transmitted to the inside of the chamber through a head unit. The laser generator generates a plurality of laser beams, and the laser beams have a different wavelength from each other, and welding is performed by at least one of the laser beams.

Description

LASER GENERATOR AND LASER MANUFACTURING APPARATUS INCLUDING THE SAME}

The present invention relates to a laser generating unit and a laser processing apparatus including the same.

Welding is required for joining substrates such as electronic parts and joining elements made of materials such as metals. Such welding includes arc welding, electrogas welding, electron beam welding, resistance welding, gas welding, laser welding and friction welding. There is this. Among the above-mentioned welding, electron beam welding is concentrated at high density and irradiated with accelerated electron beam to the weldment at high speed in a vacuum, electrons moved at a speed of about 2/3 of the speed of light collide with the weldment to heat the kinetic energy of the electrons. To generate high heat locally. At this time, the principle of electron beam welding is to join the welded workpiece by heating and melting the welded part using the generated high energy as a heat source. In this type of welding, vacuum is applied to improve the quality of the weld (reduce the heat affected zone, reduce cracks, reduce voids, reduce oxidation, etc.), reduce the heat effects of the weld zone, and avoid oxidation reaction at high temperatures. Welding process can be performed in the environment. In this case, there is a need for a base material in the vacuum chamber and a device for performing welding by irradiating a laser into the vacuum chamber, and at the same time, a function for controlling the welding process through real-time monitoring through imaging and imaging during the welding process is required. .

Republic of Korea Patent Publication No. 2015-0028511 (2015. 03. 16)

An embodiment of the present invention provides a laser processing apparatus that can be expected to miniaturize the processing portion and shorten the welding time by using a processing unit that can transmit data, signals, and light to the specimen through the same path as the laser beam in the laser processing apparatus. It aims to do it.

In the embodiment of the present invention, the laser processing chamber reduces the time required for vacuum composition and maintains a higher degree of vacuum by reaching the vacuum state through staged pressure reduction including pre-decompression. It is an object to provide a device.

Control unit; A processing unit emitting a laser beam and controlled by a control unit; And a chamber in which the laser beam emitted from the processing unit is transmitted, and the chamber can hold the internal space in a vacuum state, and accommodates a specimen welded by the laser beam. The processing unit includes a laser beam transferred into the chamber through the head unit. Laser generating unit for generating a beam, comprising a plurality of laser beams generated by the laser generating unit, the plurality of laser beams having a different wavelength from each other, the laser processing apparatus for performing welding by one or more Is provided.

The wavelengths of the plurality of laser beams may include 1064 nm wavelength and 532 nm wavelength.

A laser generation unit capable of generating respective lasers having a plurality of wavelengths, and performing welding by irradiating each laser toward one or more specimens is provided.

The plurality of wavelengths may include a 1064 nm wavelength and a 532 nm wavelength.

In addition, the multi-beam generating unit further includes a multi-beam generating unit can be delivered by splitting one laser beam into a plurality of laser beams.

An embodiment of the present invention provides a laser processing apparatus that can be expected to miniaturize the processing portion and shorten the welding time by using a processing unit that can transmit data, signals, and light to the specimen through the same path as the laser beam in the laser processing apparatus. can do.

In the embodiment of the present invention, the laser processing chamber reduces the time required for vacuum composition and maintains a higher degree of vacuum by reaching the vacuum state through staged pressure reduction including pre-decompression. A device can be provided.

1 is a view showing a conceptual diagram of a laser processing apparatus according to an embodiment of the present invention,
2 is a perspective view of a laser processing apparatus according to an embodiment of the present invention;
3 is a view showing a light source emitted from a processing unit according to an embodiment of the present invention,
4 is a view showing the welding performance of the processing unit according to an embodiment of the present invention,
5 is a view showing the configuration of a chamber according to an embodiment of the present invention;
6 is a view showing embodiments of a second chamber according to an embodiment of the present invention, Figure 6 (a) is a view showing an embodiment of one transmission portion, Figure 6 (b) is implemented with two transmission portions An example drawing,
7 is a view showing a laser generating unit according to an embodiment of the present invention;
8 is a diagram illustrating embodiments of a multi-beam generator according to an embodiment of the present invention.
9 is a view showing an embodiment in which the contact tracking unit and the laser generating unit operating in a state where the specimens are superimposed according to an embodiment of the present invention;
FIG. 10 is a view showing embodiments of operating a contact tracking unit and a laser generating unit in a state where the specimens are in contact with each other according to an embodiment of the present invention; FIG.
11 is a view showing marking and patterning performed by a laser processing apparatus according to another embodiment of the present invention.

Hereinafter, specific embodiments of the present invention will be described with reference to the drawings. However, this is only an example and the present invention is not limited thereto.

In describing the present invention, when it is determined that the detailed description of the known technology related to the present invention may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted. In addition, terms to be described below are terms defined in consideration of functions in the present invention, which may vary according to the intention or custom of a user or an operator. Therefore, the definition should be made based on the contents throughout the specification.

The technical spirit of the present invention is determined by the claims, and the following embodiments are merely means for efficiently explaining the technical spirit of the present invention to those skilled in the art.

The present invention is a device for processing an object through a laser, the processing means to perform a process such as marking, patterning and welding the object by transmitting a laser beam. In addition, since the processing is performed in a vacuum state, it can be expected to increase durability by reducing the heat affected zone, crack generation, void generation (void), reduced oxidation, and the like. Among the types of processing (marking, patterning and welding), the following description will focus on welding with reference to FIGS. 1 to 10. However, the high energy is transmitted through a laser beam, and as shown in FIG. Of course, one or more of M) and the patterning P shown in FIG. 11 (b) may be performed on the object. The marking (M) and patterning (P) can also be performed by the control unit, it may be formed by embossing from the specimen using a separate melt. Of course, the heat effect may be applied to the specimen 10 to be discolored or formed by heating to the melting point, or may be formed intaglio from the specimen 10 by marking M or patterning P.

Welding, which will be described below, is performed by melting a part of one specimen to perform plastic working, by melting two or more of the same or different specimens and combining them by mixing a melt, an additive to one specimen, or the one specimen. Melting and bonding the specimen and the additive, and melting and bonding the additive and one or more of each specimen to each other to bond between two specimens, homogeneous or heterogeneous.

1 is a view showing a conceptual diagram of a laser processing apparatus according to an embodiment of the present invention, Figure 2 is a view showing a perspective view of the laser processing apparatus according to an embodiment of the present invention. In this case, the chamber 200 illustrated in FIG. 2 is the second chamber 220, and the first chamber 210 and the third chamber 230 connected to the second chamber 220 represent an embodiment of the present invention. The illustration is omitted for an intuitive understanding of the shape of the laser processing apparatus.

1 and 2, a laser processing apparatus according to an embodiment of the present invention may include a processing unit 100, a chamber 200, and a control unit 300. Here, the processing unit 100 may include a laser generating unit 140, an imaging unit 120, and a head unit 150. Hereinafter, the processing unit 100 may further include a contact tracking unit 110 and an illumination unit 130. As an example, the laser processing apparatus of the present invention will be described later.

The laser beam 1 emitted from the processing unit 100 is transmitted to the chamber 200. The chamber 200 may include one or more transmission units so that the transmitted laser beam 1 may be transmitted into the chamber 200. Here, the transmission part is a member through which light can pass, and may be a material such as glass. In addition, the transmission unit may minimize the refraction of the laser beam in the process of transmitting the laser beam. In addition, the chamber 200 may be formed of a metal material, and the permeable part may be permanently coupled to the chamber 200 or may be coupled to be detachable.

When a plurality of transmission parts are provided in the chambers 200 and 220, some of the transmission parts transmit the laser beam into the chamber 200 and 220, and the other transmission parts may be provided for replacement. For example, when any one of the transmission parts is damaged or contaminated to partially block the laser beam or a change in refractive index occurs, the damaged or contaminated transmission part may be replaced with a replacement transmission part among the plurality of transmission parts.

Furthermore, as various examples of the laser beam being transmitted, air may be positioned between the head part and the transmission part so that the air may be positioned in the delivery path of the laser beam, and the laser beam may have a vacuum environment in the space from the head part 100 to the transmission part. The laser beam may be delivered by being formulated. The laser beam 1 delivered to the inside in air reaches the specimen 10 in the chamber 200 and the specimen 10 may be welded by the energy generated by the laser beam 1.

 The control unit 300 may control the chamber 200 and the processing unit 100. The control unit 300 is connected to the processing unit 100 to control the operation of each component included in the processing unit 100, the rotation of the chamber 200 and the plate included in the chamber 200 (225 of FIG. 5). Can control the rotation and the like.

In detail, the processing unit 100 may include a contact tracking unit 110, an imaging unit 120, an illumination unit 130, a laser generation unit 140, and a head unit 150. Of course, a mirror and a beam expander for refraction or focusing of the laser other than the above configuration may be optionally included. The laser generator 140 may generate the laser beam 1. Furthermore, a beam attenuator that can externally adjust the output of the laser, for welding the object having a three-dimensional complex shape automatically focuses the laser beam according to the three-dimensional data of the object having a three-dimensional complex shape The configuration may further include an adjustable dynamic focusing module.

The laser beam 1 generated from the laser generator 140 may be transmitted to the head 150. The head unit 150 may be disposed to be steered to direct the laser beam 1 toward the chamber 200, and the laser beam 1 passing through the head unit 150 may be transmitted toward the chamber 200. Can be. At least a portion of a transmission medium (signal, data, light, etc.) of the contact tracking unit 110, the imaging unit 120, and the lighting unit 130 may be transferred along a path along which the laser beam 1 is generated and moved. . That is, the transmission medium is at least partially equal to the movement path of the laser beam 1 and may be moved toward the chamber 200 through the head part 150.

However, in the case of the lighting unit 130, since the image providing unit 120 provides the light required to secure the minimum brightness for the image processing, the light provided from the lighting unit 130 is the same as the laser beam (1). Although not necessarily transmitted along the section, it is preferable to irradiate toward the specimen (10). Therefore, the lighting unit 130 may be a configuration of the head unit 150 but may be a configuration of the chamber 200 accommodated in the chamber 200 or may irradiate light into the chamber 200 in a separate configuration. Can be arranged to be.

3 is a view showing a light source emitted from a processing unit according to an embodiment of the present invention.

The contact tracking unit 110 included in the processing unit 100 may include a light source, a light receiving unit, and a controller. The light source is a light emitter, and the irradiated light may be received by a light receiver such as a laser vision sensor or an infrared sensor to detect the specimen 10. In addition, depending on the shape of the light irradiated from the light source, a point shape, a linear shape, a multi-line shape (a form composed of a combination of several lines), an area sensor, or the like may be used (Single Line Light, Multi Line Light, Structured Light). Image processing and weld seam extraction algorithms may be applied to find the weld spot. The contact tracking unit 110 may be used by optical triangulation, member detection, joint type verification, welding seam tracking, welding seam tracking position detection, and the like. In an exemplary embodiment, the data filtered through the distance image information obtained by the reflection principle of the sensor light source may be used for welding seam tracking as shown in the following figures.

The image information may be basic information for recognizing the surface of the object to be processed (welded object). As shown in FIG. 9, the surface may include a portion overlapped with an object to be processed (a welding object) and a step is formed, and the shape of the portion may be recognized as a welding execution part by data. In addition, as shown in Figure 9 it can be recognized as a welding performed by forming a spaced part spaced apart a predetermined distance between the two base materials. For example, such a method may detect a welding execution part by position information on a point at which light irradiated from a light source arrives or position detection of the light by an infrared camera, for example. When the separation distance of the separation unit is previously input to the controller to perform the welding, and the recognized data is matched within the predetermined error range with the distance of the input separation unit, the welding may be performed as the welding unit. The stepped part may also be welded to the stepped part by recognizing the stepped part based on a change in data obtained from a difference or scan in the height direction.

When the point shape is adopted as the shape of the light irradiated by the light source, a single point as shown in FIG. 3 (c) or a plurality of point types as shown in FIG. 3 (a) may be employed, and a plurality of point types as the light source In this case, the position of each point may be arranged in a predetermined shape. In addition, in the case of the above-described linear form in which the light emitted from the light source is irradiated in the form of a line as shown in FIG. Furthermore, as shown in FIG. 3 (b), a plurality of linear lines may be irradiated in a form in which a plurality of linear lines are parallel to each other or cross each other. For example, when a plurality of lines are adopted in the line form, the lines cross each other to irradiate a light source in the form of a network. Here, the light is irradiated in the form of a point, a line, or the like and the light reflected on the specimen can be detected (recognize) the weld performing part.

4 is a view showing that the specimen 10, the object to be welded, the object to be processed by the processing unit 100 of one embodiment of the present invention.

Referring to FIG. 4, the processing unit 100 to perform welding may recognize a bonding force by welding by detecting a bead formed during the welding process. For example, information such as temperature, cross-sectional area and volume of the bead may be monitored through the imaging unit 120, and the bonding force may be sensed through the monitored bead information. For example, if the width of the bead should be generated by the predetermined width, but less than the width, the bead may be controlled to be formed thicker in real time by recognizing that the bonding force is less than the reference value.

Meaning of controlling the thickness of the beads in real time means that the workpiece (welding object) is scanned and monitored simultaneously with the welding from the light source. For example, when the welding direction is determined in a predetermined length direction, the head and the welding object (working object) are controlled to move in opposite directions from one side (for example, on a plane) to one side of the longitudinal direction. A plurality of functions may be simultaneously performed during the process of recognizing a weld, welding, and monitoring welded beads. That is, one or more of recognition of the welding portion by the contact tracking unit 110, welding by the laser beam generated from the laser generating unit, and monitoring of the welding bead by the imaging unit may be performed simultaneously or sequentially. .

Therefore, since the area-type light, which is an example shown through FIG. 3 (e), may be performed in a process of irradiating a scan once, it may not be employed when performed simultaneously, and may be applied to light source irradiation after surface recognition. Welding along the weld included in the recognized surface information may be made sequentially.

In more detail with respect to the monitoring process, the imaging unit 120, which is one of the CCD, CMOS, and infrared cameras for monitoring, needs to capture an image to generate data. If this occurs, it may be difficult to record the image. In the process of performing the welding by emitting the laser beam, light generated to be difficult to record an image is generated, and thus, the imaging unit includes an infrared camera to recognize the bead of the welding unit, so that imaging through infrared may be performed. In this case, welding is performed through a laser to generate light, but a large portion of the light can be canceled to recognize the shape of the bead, and further, the bead and the ambient temperature of the bead can be detected.

Of course, even when not using infrared rays when irradiating a light source for monitoring or surface recognition of the object, it is also possible to irradiate (chromatic light) of various colors. Irradiation of various lights has different reflectivity according to the color of light from the surface to which light reaches, so that the surface recognition can be recognized based on the overall result by reflecting reflectance according to various lights. have.

Meanwhile, in the case of the area sensor described above, the light source scans the surface information by irradiating the surface of the object to be welded in area units. In this case, the area unit is larger than the surface of the object to be welded or a substantial portion of the surface of the object to be welded ( For example, 30% or more), the light source may be scanned by area unit instead of being moved on the welding target. Here, a substrate such as a point sensor and a linear sensor means a sensor capable of sensing point light and linear light reflected after being irradiated.

The above-described scan is monitoring using an optical signal, and may also be used when processing into a laser beam based on information obtained through the scan. This may be performed by obtaining data on a specific wavelength or a total wavelength of the laser beam. Primarily, photodiodes or spectroscopy may be used, and as another example, laser processing may be monitored through an imaging unit including a CCD or CMOS camera.

Meanwhile, in the case of the imaging unit 120 included in the processing unit 100, the specimen 10 accommodated in the chamber 200 through the head unit 150 may be image-processed and analyzed. Here, the image processing includes capturing the specimen 10 in the chamber 200 through the head unit 150 and generating the captured image. The captured image may be analyzed by the imaging unit 120 included in the processing unit 100. The analysis means detecting and finding a contact, that is, a point to be welded. Predetermined criteria may be input for this detection. The predetermined criterion may be information related to a distance between two specimens 10 to be joined through a welding process. For example, since the welding is impossible when the distance between the two specimens 10 is far, it may be a function of the imaging unit 120 to perform a process of detecting a position spaced within a predetermined distance.

When the position where the weldable position is determined by the contact tracking unit 110 or the imaging unit 120 is determined, the movement of the head unit 150 or the chamber 200 may be performed so that the laser beam 1 may be emitted to reach the position. have. Here, the movement of the chamber 200 may be a movement by linear movement in three-dimensional space such as up, down, left, and right. In addition, the movement of the chamber 200 may be a movement by forward, backward, left, and right movements on the two-dimensional plane of the plate 225 in the chamber 200, or by a forward or reverse rotation of the plate 225 or the chamber 200. .

Of course, such movement may be performed by a control in which the control unit 300 operates to interwork with each other by receiving information of the chamber 200 and the processing unit 100.

On the other hand, the processing unit 100 may further include a device (not shown) for monitoring the weld quality and the bonding force of the real-time welding. Infrared cameras can be used for this purpose. It can be configured in the form of a microprocessor to compare the measured data against the data stored in the heat signal generated during welding.

5 is a view showing the configuration of the chamber 200 according to an embodiment of the present invention.

Referring to FIG. 5, the chamber 200 may include a first chamber 210, a second chamber 220, and a third chamber 220. The first chamber 210 and the second chamber 220 are partitioned into a first opening and closing portion 211 to selectively communicate, and the second chamber 220 and the third chamber 220 are second opening and closing portions 221. It is partitioned by to allow for selective communication. The specimen 10 may be seated or removed by opening and closing a door (not shown) in the second chamber 220. The door may be a double door. The double door is a window formed inside the chamber 200 so that light is completely transmitted, so that the inner space is visible from the outside of the chamber 200, and the window located outside the chamber 200 is welded by the laser beam 1. It can be a window to alleviate the brightness of the light generated in the window.

In order to describe another movement order of the specimen 10, the movement may be performed in the chamber 200 to the second chamber 220 and the third chamber 220 in the first chamber 210. When the specimen 10 is supplied to the first chamber 210 side, the first chamber 210 maintains hermeticity with the outside and the second chamber 220, and the air pressure decreases in the state where the hermetic state is maintained, thereby lowering the atmospheric pressure below atmospheric pressure. This can be formed. In this case, the airtight maintenance with the second chamber 220 may be performed while the first opening and closing part 211 is closed. Subsequently, in a state in which an atmospheric pressure condition of less than atmospheric pressure is formed, it may be moved to the second chamber 220 side. At this time, the first opening / closing portion 211 is opened and the specimen 10 moves in the chamber 200 to the second chamber 220. Can be. Here, the introduction of the specimen 10 into the chamber 200 may be achieved by seating on the plate 225, and the plate 225 may be one in each chamber 200, and one plate 225 is moved and the specimen ( 10) can be moved.

The specimen 10 moved into the second chamber 220 may first be placed in a vacuum state. That is, the space in the second chamber 220 may be equipped with a vacuum state. Although not shown, the pressure reduction or pressure increase in the chamber 200 may be controlled through pressure increasing means such as a pressure reducer or a pressure reducer connected to each chamber 200. The decompression in the second chamber 220 may have a different purpose than the decompression in the first chamber 210.

For example, decompression in the first chamber 210 may correspond to pre-decompression in order to create a vacuum state in the second chamber 220. Therefore, the pressure may be lowered to a pressure less than atmospheric pressure and moved to the second chamber 220. The pressure reduction in the second chamber 220 may be a pressure reduction for the purpose of improving the processing quality. The second chamber 220 may be formed in a vacuum state, and thus may not be affected by a material that promotes oxidation included in the atmosphere during welding in which heat is generated. As a result, the result of welding can be further improved.

Welding in the second chamber 220 is possible by transmitting the laser beam 1 into the second chamber 220. That is, the second chamber 220 may include a transmission portion through which the laser beam 1 may be transmitted. The transmission part may be one or more, and according to the present example, it may include two transmission parts, the first transmission part 222 and the second transmission part 223. In more detail, as an exemplary embodiment, the first penetrating unit 222 and the second penetrating unit 223 may be positioned at a predetermined distance from the center of the second chamber 220. For example, when the second chamber 220 is formed in a cylindrical shape (cylindrical) having a circular upper surface, it may be located eccentrically from the circular centrifugal. Therefore, in this case, the head portion 150 may be positioned above one of the first transmission portion 222 or the second transmission portion 223 to emit the laser beam 1, and through the one transmission portion, the laser beam ( 1) may reach the specimen 10.

The above description is not limited to the chamber (200) of the cylindrical (cylindrical) can be equally applied to the polygon (polygon). For example, the position of the transmission part may also be eccentrically centered on the centrifugal body.

Of course, welding may be performed in the same manner by the head portion 150 positioned above the other transmission portion by the movement of the head portion 150. Furthermore, when the head 150 is fixed above the first transmission part 222, the laser beam 1 is transferred into the chamber 200 through the first transmission part 222 to perform welding, and the second transmission part is performed. The specimen 10 seated on the plate 225 positioned below the 223 may be positioned below the first transmission part 222 by rotating the plate 225 to be welded by the laser beam 1. . In this case, the second penetrating unit 223 may optionally be used in place of the first penetrating unit 222. Of course, the welding target may be replaced with another specimen 10 through the rotation of the second chamber 220 or the chamber 200.

6 is a view showing embodiments of the second chamber 220 according to an embodiment of the present invention, Figure 6 (a) is an embodiment of the second chamber 220a having one transmission portion and Figure 6 (b) May be an embodiment of the second chamber 220 having two transmission parts.

6 (b) has been described with reference to FIG. 2, and thus, referring to FIG. 6 (a), one transmission part may be included in the second chamber 220a and the second chamber 220a may have a circular top surface. In the case of being formed in a cylindrical shape, the penetrating part may include a circular centrifugal or a circular concentric with the centrifugal. In this case, the plate 225 provided in the second chamber 220a may move the absolute coordinates of the specimen 10 seated through rotation or horizontal and horizontal movements in the plane, and the laser beam 1 may be moved by such movement. The plurality of specimens 10 in the second chamber 220a may be welded by continuously positioning the other specimen 10 at the position reached in the second chamber 220a.

7 is a view showing the laser generating unit 140 according to an embodiment of the present invention.

The laser generating unit according to an embodiment of the present invention may generate a laser to emit the laser beam 1. Here, the laser beam 1 basically means one laser beam 1, which may be transformed into a plurality of laser beams 1 spaced apart from each other.

Referring to FIG. 7, the laser generation unit may include a multi-beam generation unit 141. The multi-beam generator 141 is disposed on a path through which the single laser beam 1 is transmitted, and is arranged to allow the laser beam 1 to pass therethrough. One laser beam 1 having passed through the multi-beam generator may be divided into a plurality of laser beams 1. Splitting into a plurality of laser beams 1 means that they can be transmitted to individual laser beams 1 spaced apart from each other, and the transmission direction may be the same as that of one laser beam 1. However, since the energy density may be relatively low in the case where each of the laser beams 1 is divided into a plurality of laser beams 1 and focused for welding, the laser generation unit 140 generates a laser beam. When generating a higher power laser can be generated.

Specifically, this may be described later with reference to FIG. 8. 8 is a diagram illustrating embodiments of the multi-beam generator 141a according to an embodiment of the present invention. In the embodiment of FIG. 8A, two or more laser beams 1 may be formed by dividing one laser beam 1 into micro units. When the multi-beam generator 141a is a kind of lens, the shape of the lens disclosed in FIG. 8 (a) is largely shown to indicate that one laser beam 1 is divided into a plurality of laser beams 1. As an example, in reality, a curved portion facing the direction in which one laser beam 1 is incident may be provided in micro units.

In another embodiment, as shown in FIG. 8B, when one laser beam 1 is incident and passed through the multi-beam generator 141b, the laser beam 1 may be divided into a plurality of laser beams 1. 8 (b) is a multi-beam generator 141b having a triangular cross section, in which the laser beam 1 refracted through two upward facing surfaces may be transmitted to the weld through the focusing lens. Here, one laser beam 1 incident on the two surfaces is divided into two laser beams 1 directed in different directions through the two surfaces having different refractive angles, and the two divided beams are focused. Focusing through the lens can increase the energy density.

However, since the energy density is also reduced by the splitting of the laser beam 1, the output of the laser generated by the laser generator 140b may be higher.

In addition, the laser generation unit 140 may be a laser having two or more wavelengths in order to improve the welding quality and welding speed when welding the same material or different materials. For example, a laser having a wavelength of 1064 nm and a laser having a 532 nm wavelength may be used to generate laser beams having respective wavelengths simultaneously or sequentially to improve welding quality and welding speed.

Therefore, the reflectance of the laser may be different depending on the nature of each specimen to be welded. The laser reflectance of each specimen 10 is low, that is, a high absorption rate laser can be emitted to each specimen 10 to generate a high energy to melt the specimen. Therefore, the laser generator 140 allows the laser to generate each wavelength corresponding to each specimen 10. Thus, the specimen can be melted and bonded in a shorter time. Of course, even if the laser including a wavelength excluding the corresponding wavelength can be emitted energy can be delivered, but in order to deliver a higher energy can be emitted a laser including a wavelength corresponding to each specimen (10). However, because of the high cost of the laser including the corresponding wavelength, the specimen 10 emits a laser including the corresponding wavelength with high energy until the melting point, and after reaching the melting point, the wavelength except the corresponding wavelength is reached. It can emit a laser containing. The wavelengths corresponding to the specimens 10 and the wavelengths not corresponding to the specimens 10 have relatively different effects due to the elevation of energy, but the same result of melting and bonding the specimens to each other can be expected.

While the exemplary embodiments of the present invention have been described in detail above, those skilled in the art will appreciate that various modifications can be made to the above-described embodiments without departing from the scope of the present invention. . Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined by the claims below and equivalents thereof.

1: laser beam
10: Psalm
100: processing part
110: contact tracking unit
120: imaging unit
130: lighting unit
140: laser generation unit
141, 141a, and 141b: multi beam generator
150: head
200: chamber
210: first chamber
211: first opening and closing
222, 222a: first penetrating unit
223: second penetrating unit
220, 220a: second chamber
221: second opening and closing
225: plate
230: third chamber
300: control unit
M: Marking
P: Patterning

Claims (5)

Control unit;
A processing unit emitting a laser beam and controlled by the control unit; And
And a chamber in which the laser beam emitted from the processing unit is transferred, the internal space can be maintained in a vacuum state, and the chamber accommodates a specimen welded by the laser beam.
The processing unit,
And a laser generation unit configured to generate the laser beam transferred into the chamber through the head unit.
And a plurality of the laser beams generated by the laser generating unit, the plurality of the laser beams have wavelengths different from each other, and performing welding by one or more.
The method according to claim 1,
Wherein a wavelength of the plurality of laser beams comprises a 1064 nm wavelength and a 532 nm wavelength.

Each laser having a plurality of wavelengths can be generated,
A laser generating unit for performing welding by irradiating each of the laser toward one or more specimens.
The method according to claim 3,
The plurality of wavelengths include a 1064nm wavelength and 532nm wavelength, the laser generation unit.
The method according to claim 3,
The laser generation unit further comprises a multi-beam generator, and transmits the laser beam divided into a plurality of laser beams by the multi-beam generator.

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