KR20190117596A - Metal materials for electronic components and manufacturing methods thereof, connector terminals, connectors and electronic components using the same - Google Patents

Metal materials for electronic components and manufacturing methods thereof, connector terminals, connectors and electronic components using the same Download PDF

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KR20190117596A
KR20190117596A KR1020197026268A KR20197026268A KR20190117596A KR 20190117596 A KR20190117596 A KR 20190117596A KR 1020197026268 A KR1020197026268 A KR 1020197026268A KR 20197026268 A KR20197026268 A KR 20197026268A KR 20190117596 A KR20190117596 A KR 20190117596A
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layer
electronic components
metal material
constituent
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사토루 엔도
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제이엑스금속주식회사
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    • H01ELECTRIC ELEMENTS
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Abstract

저응착 마모성을 갖는 전자 부품용 금속 재료를 제공한다. 전자 부품용 금속 재료는, 기재와, 기재 상에 형성된, Ni, Cr, Mn, Fe, Co 및 Cu로 이루어지는 군인 A 구성 원소군에서 선택된 1종 또는 2종 이상으로 구성된 하층과, 하층 상에 형성된 중간층과, 중간층 상에 형성된, Sn 및 In으로 이루어지는 군인 B 구성 원소군에서 선택된 1종 또는 2종과, Ag, Au, Pt, Pd, Ru, Rh, Os 및 Ir로 이루어지는 군인 C 구성 원소군에서 선택된 1종 또는 2종류 이상의 합금으로 구성된 상층과, 상층 상에 형성된, C의 함유량이 60at% 이상이고, 또한 O의 함유량이 30at% 이하인 처리층을 구비한다. 중간층이, A 구성 원소군에서 선택된 1종 또는 2종 이상과, B 구성 원소군에서 선택된 1종 또는 2종으로 구성되어 있고, 250℃에서 30초 가열 후의 처리층의 표면에 부착된 산화물 입자의 면적률이 0.1% 이하이다.Provided is a metal material for electronic parts having low adhesion wear. The metal material for an electronic component is formed on the base material, the lower layer comprised from the 1 type (s) or 2 or more types chosen from the group of military A constituent elements which consist of Ni, Cr, Mn, Fe, Co, and Cu formed on the base material, and the lower layer In the intermediate layer, one or two selected from the group of soldier B constituent elements composed of Sn and In formed on the intermediate layer, and in the group of soldier C constituent elements composed of Ag, Au, Pt, Pd, Ru, Rh, Os and Ir The upper layer which consists of a selected 1 type, or 2 or more types of alloys, and the processing layer formed on the upper layer with C content of 60 at% or more and O content of 30 at% or less are provided. The intermediate layer is composed of one or two or more selected from the A constituent group and one or two selected from the B constituent group, and the oxide particles adhered to the surface of the treated layer after heating at 250 ° C. for 30 seconds. The area ratio is 0.1% or less.

Description

전자 부품용 금속 재료 및 그 제조 방법, 그것을 사용한 커넥터 단자, 커넥터 및 전자 부품Metal materials for electronic components and manufacturing methods thereof, connector terminals, connectors and electronic components using the same

본 발명은, 전자 부품용 금속 재료 및 그 제조 방법, 그것을 사용한 커넥터 단자, 커넥터 및 전자 부품에 관한 것이다.TECHNICAL FIELD This invention relates to the metal material for electronic components, its manufacturing method, the connector terminal using this, a connector, and an electronic component.

민간용 및 차량 탑재용 전자 기기용 접속 부품인 커넥터에는, 황동이나 인청동의 표면에 Ni나 Cu의 하지 도금을 실시하고, 그 위에 Sn 또는 Sn 합금 도금을 더 실시한 재료가 사용되고 있다. Sn 또는 Sn 합금 도금은, 일반적으로 저접촉 저항 및 고땜납 습윤성이라고 하는 특성이 요구되고, 또한 근년 도금재를 프레스 가공으로 성형한 수형 단자 및 암형 단자 끼워 맞춤 시의 삽입력의 저감화가 요구되고 있다.As a connector which is a connection part for civilian and vehicle-mounted electronic devices, the material which carried out the plating of Ni or Cu on the surface of brass or phosphor bronze, and further performed Sn or Sn alloy plating on it is used. In general, Sn or Sn alloy plating is required to have characteristics such as low contact resistance and high solder wettability, and in recent years, reduction in insertion force at the time of fitting male and female terminals formed by press forming a plating material has been required. .

이에 대해, 특허문헌 1에는, 도전성을 갖는 기재와, 상기 기재에 형성된 피복층을 구비한 피복재에 있어서, 상기 피복층은 적어도 표면측에, Sn과, 귀금속의 금속간 화합물을 포함하는 것을 특징으로 하는 피복재가 개시되어 있다. 그리고 이것에 의하면, 접촉 저항이 낮고, 저마찰 계수를 가져 삽입력의 저감에 유효한 것이 기재되어 있다.In contrast, Patent Literature 1 discloses a coating material having a base material having conductivity and a coating layer formed on the base material, wherein the coating layer includes at least a surface side of Sn and an intermetallic compound of a noble metal. Is disclosed. According to this, it is described that contact resistance is low and it has a low friction coefficient and is effective in reducing an insertion force.

일본 특허 공개 제2005-126763호 공보Japanese Patent Laid-Open No. 2005-126763

특허문헌 1에 기재된 기술에서는, 피복층이 Sn과, 귀금속의 금속간 화합물을 포함하고 있고, Sn과 귀금속의 금속간 화합물(Ag3Sn)을 포함하는 Ag-Sn 합금층의 두께가 바람직하게는 1㎛ 이상 3㎛ 이하로 되어 있다. 그러나 본 발명자들의 평가에서는, 이 두께로는 충분히 삽입력을 낮출 수 없었다. 또한, 이 합금층은 Sn 매트릭스 중에 금속간 화합물 입자가 분산된 상태로 되어 있으므로, Sn이 노출된 상태로 되어 있다. 그러나 부식 환경하에서는 이 표면은 부식될 가능성이 있다. 이것은 전기 저항의 상승으로 이어진다.In the technique described in Patent Literature 1, the coating layer contains Sn and an intermetallic compound of a noble metal, and the thickness of the Ag-Sn alloy layer containing Sn and an intermetallic compound (Ag 3 Sn) of a noble metal is preferably 1 It is set to more than 3 micrometers. However, in the evaluation of the present inventors, the insertion force could not be sufficiently lowered at this thickness. In addition, this alloy layer is in a state where Sn is exposed because the intermetallic compound particles are dispersed in the Sn matrix. However, under corrosive environments, this surface is likely to corrode. This leads to an increase in electrical resistance.

이와 같이, 종래의 Sn-Ag 합금/Ni 하지 도금 구조를 갖는 전자 부품용 금속 재료에는 아직 충분히 삽입력을 낮출 수 없다고 하는 문제가 남아 있었다.Thus, the problem that the insertion force cannot fully be lowered still remains in the metal material for electronic components which has the conventional Sn-Ag alloy / Ni base plating structure.

본 발명은 상기한 과제를 해결하기 위해 이루어진 것이며, 저응착 마모성을 갖는 전자 부품용 금속 재료, 그것을 사용한 커넥터 단자, 커넥터 및 전자 부품을 제공하는 것을 과제로 한다. 또한, 응착 마모라 함은 고체 사이의 실제 접촉 면적을 구성하는 응착 부분이, 마찰 운동에 의해 전단되는 것에 기인하여 발생하는 마모 현상을 말한다. 이 응착 마모가 커지면, 수형 단자와 암형 단자를 끼워 맞추었을 때의 삽입력이 높아진다.This invention is made | formed in order to solve the said subject, and makes it a subject to provide the metal material for electronic components which has a low adhesion wear property, the connector terminal, the connector, and the electronic component using the same. In addition, adhesion wear means the wear phenomenon which arises because the adhesion part which comprises the actual contact area between solids is sheared by frictional motion. As the adhesion wear increases, the insertion force when the male terminal and the female terminal are fitted together increases.

본 발명자는, 예의 검토한 결과, 기재 상에 소정의 금속에 의해 하층과 중간층과 상층과 처리층을 마련하고, 당해 처리층의 가열 후의 표면의 산화물 입자의 부착량을 제어함으로써, 저응착 마모성을 갖는 전자 부품용 금속 재료를 제작할 수 있는 것을 발견하였다.MEANS TO SOLVE THE PROBLEM As a result of earnestly examining, by providing a lower metal, an intermediate | middle layer, an upper layer, and a processing layer with the predetermined metal on a base material, and controlling the adhesion amount of the oxide particle of the surface after heating of the said processing layer, it has low adhesive abrasion property. It discovered that the metal material for electronic components can be manufactured.

이상의 지견을 기초로 하여 완성한 본 발명은 일 측면에 있어서, 기재와, 상기 기재 상에 형성된, Ni, Cr, Mn, Fe, Co 및 Cu로 이루어지는 군인 A 구성 원소군에서 선택된 1종 또는 2종 이상으로 구성된 하층과, 상기 하층 상에 형성된 중간층과, 상기 중간층 상에 형성된, Sn 및 In으로 이루어지는 군인 B 구성 원소군에서 선택된 1종 또는 2종과, Ag, Au, Pt, Pd, Ru, Rh, Os 및 Ir로 이루어지는 군인 C 구성 원소군에서 선택된 1종 또는 2종류 이상의 합금으로 구성된 상층과, 상기 상층 상에 형성된, C의 함유량이 60at% 이상이고, 또한 O의 함유량이 30at% 이하인 처리층을 구비하고, 상기 중간층이, 상기 A 구성 원소군에서 선택된 1종 또는 2종 이상과, 상기 B 구성 원소군에서 선택된 1종 또는 2종으로 구성되어 있고, 250℃에서 30초 가열 후의 상기 처리층의 표면에 부착된 산화물 입자의 면적률이 0.1% 이하인 전자 부품용 금속 재료이다.The present invention completed based on the above findings, in one aspect, includes one or two or more selected from a base material and a group of military A constituent elements consisting of Ni, Cr, Mn, Fe, Co, and Cu formed on the base material. At least one selected from the group consisting of a lower layer consisting of a lower layer, an intermediate layer formed on the lower layer, and a group B constituent element group consisting of Sn and In formed on the intermediate layer, Ag, Au, Pt, Pd, Ru, Rh, An upper layer composed of one or two or more alloys selected from the group of constituent C constituents composed of Os and Ir, and a treatment layer having a content of C formed on the upper layer of 60 at% or more and an O content of 30 at% or less; And the intermediate layer is composed of one or two or more selected from the group A constituents, and one or two selected from the group B constituents, wherein the intermediate layer is heated at 250 ° C. for 30 seconds. Oxidation attached to the surface The area ratio of particles with a metal material for electronic parts than 0.1%.

본 발명의 전자 부품용 금속 재료는 일 실시 형태에 있어서, 상기 처리층이, 또한, S, P 및 N 로 이루어지는 군에서 선택된 1종 이상을 포함한다.In one embodiment, the metal material for electronic components of this invention WHEREIN: The said processing layer contains 1 or more types chosen from the group which consists of S, P, and N further.

본 발명은 다른 일 측면에 있어서, 기재와, 상기 기재 상에 형성된, Ni, Cr, Mn, Fe, Co 및 Cu로 이루어지는 군인 A 구성 원소군에서 선택된 1종 또는 2종 이상으로 구성된 하층과, 상기 하층 상에 형성된 중간층과, 상기 중간층 상에 형성된, Sn 및 In으로 이루어지는 군인 B 구성 원소군에서 선택된 1종 또는 2종과, Ag, Au, Pt, Pd, Ru, Rh, Os 및 Ir로 이루어지는 군인 C 구성 원소군에서 선택된 1종 또는 2종류 이상의 합금으로 구성된 상층을 구비하고, 또한 상기 중간층이, 상기 A 구성 원소군에서 선택된 1종 또는 2종 이상과, 상기 B 구성 원소군에서 선택된 1종 또는 2종으로 구성된 금속 재료를, 인산에스테르계 처리액을 2.5∼5.0g/L 함유하는 처리액 중에 마련하고, 초음파 교반함으로써 상기 금속 재료의 표면에 C의 함유량이 60at% 이상이고, 또한 O의 함유량이 30at% 이하인 처리층을 형성하는 공정을 포함하는, 전자 부품용 금속 재료의 제조 방법이다.According to another aspect of the present invention, there is provided a substrate, a lower layer composed of one or two or more selected from the group of constituent A constituents consisting of Ni, Cr, Mn, Fe, Co, and Cu formed on the substrate, One or two selected from the group B constituent element group consisting of an intermediate layer formed on the lower layer, and a group of Sn and In formed on the intermediate layer, and a soldier formed of Ag, Au, Pt, Pd, Ru, Rh, Os and Ir. An upper layer composed of one or two or more kinds of alloys selected from the C constituent element groups, wherein the intermediate layer is one or two or more selected from the A constituent element groups, and one or more selected from the B constituent element groups, or The content of C is 60 at% or more and the content of O on the surface of the said metal material by providing the metal material consisting of two types in the process liquid containing 2.5-5.0 g / L of phosphate ester process liquids, and ultrasonically stirring. 30 at% or less Comprising a step of forming a process layer, a method of manufacturing the metallic material for an electronic component.

본 발명의 전자 부품용 금속 재료의 제조 방법은 일 실시 형태에 있어서, 상기 인산에스테르계 처리액이, 하기 일반식〔1〕 및 〔2〕로 표시되는 인산에스테르 중 적어도 1종과, 하기 일반식〔3〕 및 〔4〕로 표시되는 환상 유기 화합물 군에서 선택되는 적어도 1종을 함유하는 인산에스테르계 액이다.In one Embodiment, the manufacturing method of the metal material for electronic components of this invention is the said phosphate ester process liquid, At least 1 sort (s) of the phosphate ester represented by following General formula [1] and [2], and the following general formula It is a phosphate ester liquid containing at least 1 sort (s) chosen from the cyclic organic compound group shown by [3] and [4].

[화학식 1][Formula 1]

Figure pct00001
Figure pct00001

[화학식 2][Formula 2]

Figure pct00002
Figure pct00002

(식〔1〕, 〔2〕에 있어서, R1 및 R2는 각각 치환 알킬을 나타내고, M은 수소 또는 알칼리 금속을 나타냄)(In formula [1] and [2], R <1> and R <2> represents substituted alkyl, and M represents hydrogen or an alkali metal.)

[화학식 3][Formula 3]

Figure pct00003
Figure pct00003

[화학식 4][Formula 4]

Figure pct00004
Figure pct00004

(식〔3〕, 〔4〕중, R1은 수소, 알킬 또는 치환 알킬을 나타내고, R2는 알칼리 금속, 수소, 알킬 또는 치환 알킬을 나타내고, R3은 알칼리 금속 또는 수소를 나타내고, R4는 -SH, 알킬기나 아릴기로 치환된 아미노기, 또는 알킬 치환 이미다졸릴알킬을 나타내고, R5 및 R6은 -NH2, -SH 또는 -SM(M은 알칼리 금속을 나타냄)을 나타냄), R 1 of the (formula [3], [4] is a hydrogen, alkyl or substituted alkyl, R 2 represents an alkali metal, hydrogen, alkyl or substituted alkyl, R 3 represents an alkali metal or hydrogen, R 4 Represents -SH, an amino group substituted with an alkyl or aryl group, or an alkyl substituted imidazolylalkyl, and R 5 and R 6 represent -NH 2 , -SH or -SM (M represents an alkali metal)

본 발명은 또 다른 일 측면에 있어서, 본 발명의 전자 부품용 금속 재료를 접점 부분에 구비한 커넥터 단자이다.In yet another aspect, the present invention is a connector terminal provided with a contact portion of the metal material for electronic component of the present invention.

본 발명은 또 다른 일 측면에 있어서, 본 발명의 커넥터 단자를 구비한 커넥터이다.In yet another aspect, the present invention is a connector provided with the connector terminal of the present invention.

본 발명은 또 다른 일 측면에 있어서, 본 발명의 전자 부품용 금속 재료를 접점 부분에 구비한 FFC 단자이다.In yet another aspect, the present invention is an FFC terminal provided with a metal material for an electronic component of the present invention in a contact portion.

본 발명은 또 다른 일 측면에 있어서, 본 발명의 전자 부품용 금속 재료를 접점 부분에 구비한 FPC 단자이다.In yet another aspect, the present invention is an FPC terminal provided with a contact portion of the metal material for electronic component of the present invention.

본 발명은 또 다른 일 측면에 있어서, 본 발명의 FFC 단자를 구비한 FFC이다.In yet another aspect, the present invention is an FFC having an FFC terminal of the present invention.

본 발명은 또 다른 일 측면에 있어서, 본 발명의 FPC 단자를 구비한 FPC이다.In yet another aspect, the present invention is an FPC provided with an FPC terminal of the present invention.

본 발명은 또 다른 일 측면에 있어서, 본 발명의 전자 부품용 금속 재료를 외부 접속용 전극에 구비한 전자 부품이다.In yet another aspect, the present invention is an electronic component provided with an electrode for external connection with the metal material for electronic component of the present invention.

본 발명은 또 다른 일 측면에 있어서, 하우징에 설치하는 장착부의 일방측에 암형 단자 접속부가, 타방측에 기판 접속부가 각각 마련되고, 상기 기판 접속부를 기판에 형성된 스루홀에 압입하여 상기 기판에 설치하는 압입형 단자에, 본 발명의 전자 부품용 금속 재료를 구비한 전자 부품이다.According to another aspect of the present invention, a female terminal connecting portion is provided on one side of a mounting portion provided in a housing, and a board connecting portion is provided on the other side, and the substrate connecting portion is pressed into a through hole formed in the substrate and installed on the substrate. It is an electronic component provided with the metal material for electronic components of this invention in a press-fit terminal.

본 발명에 따르면, 저응착 마모성을 갖는 전자 부품용 금속 재료를 제공할 수 있다.According to the present invention, it is possible to provide a metal material for an electronic component having low adhesion wear.

도 1은 본 발명의 실시 형태에 관한 전자 부품용 금속 재료의 구성을 도시하는 모식도이다.BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the structure of the metal material for electronic components which concerns on embodiment of this invention.

이하, 본 발명의 실시 형태에 관한 전자 부품용 금속 재료에 대해 설명한다. 도 1에 도시하는 바와 같이, 실시 형태에 관한 전자 부품용 금속 재료(10)는, 기재(11) 상에 하층(12)이 형성되고, 하층(12) 상에 중간층(13)이 형성되고, 중간층(13) 상에 상층(14)이 형성되어 있다.EMBODIMENT OF THE INVENTION Hereinafter, the metal material for electronic components which concerns on embodiment of this invention is demonstrated. As shown in FIG. 1, in the metal material for electronic component 10 according to the embodiment, a lower layer 12 is formed on a base material 11, an intermediate layer 13 is formed on a lower layer 12, The upper layer 14 is formed on the intermediate layer 13.

<전자 부품용 금속 재료의 구성><Configuration of Metal Material for Electronic Components>

(기재)(materials)

기재(11)로서는, 특별히 한정되지 않지만, 예를 들어 구리 및 구리 합금, Fe계 재, 스테인리스, 티타늄 및 티타늄 합금, 알루미늄 및 알루미늄 합금 등의 금속 기재를 사용할 수 있다. 또한, 금속 기재에 수지층을 복합시킨 것이어도 된다. 금속 기재에 수지층을 복합시킨 것이라 함은, 예로서 FPC 또는 FFC 기재 상의 전극 부분 등이 있다.Although it does not specifically limit as the base material 11, For example, metal base materials, such as copper and a copper alloy, Fe type material, stainless steel, titanium and a titanium alloy, aluminum and an aluminum alloy, can be used. Moreover, what combined the resin layer with the metal base material may be sufficient. The composite of the resin layer on the metal substrate includes, for example, an electrode portion on the FPC or FFC substrate.

(상층)(Upper floor)

상층(14)은, Sn 및 In으로 이루어지는 군인 B 구성 원소군에서 선택된 1종 또는 2종과, Ag, Au, Pt, Pd, Ru, Rh, Os 및 Ir로 이루어지는 군인 C 구성 원소군에서 선택된 1종 또는 2종류 이상의 합금으로 구성되어 있다.The upper layer 14 is one or two selected from the group of soldier B constituent elements composed of Sn and In, and one selected from the group of soldier C constituent elements composed of Ag, Au, Pt, Pd, Ru, Rh, Os, and Ir. It consists of a species or two or more types of alloys.

Sn 및 In은, 산화성을 갖는 금속이기는 하지만, 금속 중에서는 비교적 유연하다고 하는 특징이 있다. 따라서, Sn 및 In 표면에 산화막이 형성되어 있어도, 예를 들어 전자 부품용 금속 재료를 접점 재료로 하여 수형 단자와 암형 단자를 끼워 맞출 때, 용이하게 산화막이 깎여, 접점이 금속끼리가 되므로, 저접촉 저항이 얻어진다.Sn and In, although oxidizing metals, have the feature of being relatively flexible among metals. Therefore, even if the oxide films are formed on the Sn and In surfaces, the oxide films are easily cut and the contacts become metals, for example, when the male terminal and the female terminal are fitted with the metal material for electronic components as the contact material. Contact resistance is obtained.

또한, Sn 및 In은 염소 가스, 아황산 가스, 황화수소 가스 등의 가스에 대한 내가스 부식성이 우수하고, 예를 들어 상층(14)에 내가스 부식성이 떨어지는 Ag, 하층(12)에 내가스 부식성이 떨어지는 Ni, 기재(11)에 내가스 부식성이 떨어지는 구리 및 구리 합금을 사용한 경우에는, 전자 부품용 금속 재료의 내가스 부식성을 향상시키는 작용이 있다. 또한 Sn 및 In에서는, 후생 노동성의 건강 장애 방지에 관한 기술 지침에 기초하여, In은 규제가 엄격하므로, Sn이 바람직하다.Sn and In are excellent in gas corrosion resistance to gases such as chlorine gas, sulfurous acid gas, and hydrogen sulfide gas, for example, Ag having poor gas corrosion resistance in the upper layer 14, and gas corrosion resistance in the lower layer 12. When copper which is inferior to gas corrosion resistance and copper alloy are used for falling Ni and the base material 11, it has the effect | action which improves the gas corrosion resistance of the metal material for electronic components. In Sn and In, Sn is preferable because In is strictly regulated based on the technical guidelines for the prevention of health disorders of the Ministry of Health, Labor and Welfare.

Ag, Au, Pt, Pd, Ru, Rh, Os, Ir은, 금속 중에서는 비교적 내열성을 갖는다고 하는 특징이 있다. 따라서 기재(11)나 하층(12)의 조성이 상층(14)측으로 확산되는 것을 억제하여 내열성을 향상시킨다. 또한, 이 금속들은, 상층(14)의 Sn이나 In과 화합물을 형성하여 Sn이나 In의 산화막 형성을 억제하여, 땜납 습윤성을 향상시킨다. 또한, Ag, Au, Pt, Pd, Ru, Rh, Os, Ir 중에서는, 도전율의 관점에서 Ag가 더 바람직하다. Ag는 도전율이 높다. 예를 들어 고주파의 신호 용도로 Ag를 사용한 경우, 표피 효과에 의해, 임피던스 저항이 낮아진다.Ag, Au, Pt, Pd, Ru, Rh, Os, Ir are characterized by having relatively heat resistance among metals. Therefore, the composition of the base material 11 and the lower layer 12 is suppressed from spreading to the upper layer 14 side, and heat resistance is improved. In addition, these metals form a compound with Sn or In of the upper layer 14 to suppress the oxide film formation of Sn and In, thereby improving solder wettability. Further, among Ag, Au, Pt, Pd, Ru, Rh, Os, and Ir, Ag is more preferable from the viewpoint of conductivity. Ag has high conductivity. For example, when Ag is used for high frequency signal use, the impedance resistance is lowered due to the skin effect.

상층(14)에, Sn을 11.8∼22.9at% 포함하는 SnAg 합금인 ζ(제타)상이 존재하는 것이 바람직하다. 당해 ζ(제타)상이 존재함으로써 내가스 부식성이 향상되어, 가스 부식 시험을 행해도 외관이 변색되기 어려워진다.It is preferable that the ζ (zeta) phase which is SnAg alloy containing 11.8-22.9 at% Sn exists in the upper layer 14. By the presence of the ζ (zeta) phase, the gas corrosion resistance is improved, and even when the gas corrosion test is performed, the appearance is less likely to be discolored.

상층(14)에, ζ(제타)상과, Ag3Sn인 ε(입실론)상이 존재하는 것이 바람직하다. ε(입실론)상의 존재에 의해, 상층(14)에 ζ(제타)상만이 존재하는 경우와 비교하여 피막이 단단해져 응착 마모가 저하된다. 또한 상층(14)의 Sn 비율이 많아짐으로써 내가스 부식성이 향상된다.It is preferable that the ζ (zeta) phase and the epsilon (epsilon) phase which is Ag 3 Sn exist in the upper layer 14. Due to the presence of the epsilon (epsilon) phase, the film is harder than in the case where only the zeta (zeta) phase is present in the upper layer 14, and the adhesion wear decreases. In addition, since the Sn ratio of the upper layer 14 increases, the gas corrosion resistance is improved.

상층(14)에, Ag3Sn인 ε(입실론)상만이 존재하는 것이 바람직하다. 상층(14)에 ε(입실론)상이 단독으로 존재함으로써, 상층(14)에 ζ(제타)상과 Ag3Sn인 ε(입실론)상이 존재하는 경우와 비교하여 피막이 더 단단해져 응착 마모가 저하된다. 또한 상층(14)의 Sn 비율이 더 많아짐으로써 내가스 부식성도 향상된다.In the upper layer 14, it is preferable that only the epsilon (epsilon) phase which is Ag 3 Sn exists. Since the ε (epsilon) phase alone exists in the upper layer 14, the film becomes harder as compared with the case where the ζ (zeta) phase and the ε (epsilon) phase, which is Ag 3 Sn, exist in the upper layer 14, resulting in reduced adhesive wear. In addition, as the Sn ratio of the upper layer 14 increases, the gas corrosion resistance also improves.

상층(14)에, Ag3Sn인 ε(입실론)상과, Sn 단상인 βSn이 존재하는 것이 바람직하다. Ag3Sn인 ε(입실론)상과, Sn 단상인 βSn이 존재함으로써, 상층(14)에 ε(입실론)상만이 존재하는 경우와 비교하여 상층의 Sn 비율이 보다 더 많아짐으로써 내가스 부식성이 향상된다.The upper layer 14, it is preferable that the phase of ε (epsilon) Ag 3 Sn and, Sn single phase in the presence βSn. By the presence of the ε (epsilon) phase, which is Ag 3 Sn, and βSn, which is the Sn single phase, the Sn ratio of the upper layer is higher than that in the case where only the ε (epsilon) phase is present in the upper layer 14, thereby improving gas corrosion resistance. do.

상층(14)에, Sn을 11.8∼22.9at% 포함하는 SnAg 합금인 ζ(제타)상과, Ag3Sn인 ε(입실론)상과, Sn 단상인 βSn이 존재하는 것이 바람직하다. ζ(제타)상과, Ag3Sn인 ε(입실론)상과, Sn 단상인 βSn이 존재함으로써, 내가스 부식성이 향상되어, 가스 부식 시험을 행하여도 외관이 변색되기 어렵고, 응착 마모가 저하된다. 이 구성은 확산 과정에서 발생하는 것이었던, 평형 상태의 구조는 아니다.In the upper layer 14, a ζ (zeta) phase, which is a SnAg alloy containing 11.8-22.9 at% Sn, an ε (epsilon) phase, which is Ag 3 Sn, and βSn, which is a single Sn phase, are preferably present. By the presence of the ζ (zeta) phase, the ε (epsilon) phase of Ag 3 Sn, and βSn, which is a Sn single phase, the gas corrosion resistance is improved, and the appearance is hardly discolored even after performing a gas corrosion test, and adhesion wear is reduced. . This configuration is not an equilibrium structure that occurred during diffusion.

상층(14)이 βSn 단독으로는 존재해서는 안 된다. βSn 단독으로 존재하는 경우에는, 응착 마모가 커, 위스커도 발생하고, 내열성 및 내프레팅 마모성 등이 떨어진다.The upper layer 14 should not exist by βSn alone. When βSn alone is present, adhesion wear is large, whiskers are also generated, and heat resistance and fretting wear resistance are inferior.

상층(14)은, B 구성 원소군의 금속을 10∼50at% 함유하는 것이 바람직하다. B 구성 원소군의 금속이 10at% 미만이면, 내가스 부식성이 나빠, 가스 부식 시험을 행하면 외관이 변색되는 경우가 있다. 한편, B 구성 원소군의 금속이 50at%를 초과하면, 상층(14)에 있어서의 B 구성 원소군의 금속 비율이 커져 응착 마모가 커지고, 또한 위스커도 발생하기 쉬워진다. 게다가 내프레팅 마모성이 나쁜 경우도 있다.It is preferable that the upper layer 14 contains 10-50 at% of metals of the B structural element group. If the metal of the group B constitutes less than 10 at%, the gas corrosion resistance is poor, and the appearance may be discolored when the gas corrosion test is performed. On the other hand, when the metal of the B component element group exceeds 50 at%, the metal ratio of the B component element group in the upper layer 14 becomes large, adhesion wear increases, and whiskers also tend to occur. In addition, fretting wear may be poor.

(처리층)(Treatment layer)

상층(14) 상에는, C의 함유량이 60at% 이상이고, 또한 O의 함유량이 30at% 이하인 처리층이 마련되어 있다. 당해 처리층은, 상층(14)을 형성한 후에 행하는 봉공 처리 등의 표면 처리에 의해 형성되는 것이며, 상기 처리층이 포함하는 C는, 당해 봉공 처리 등의 표면 처리 기인의 성분이다. 처리층은, 또한, S, P 및 N으로 이루어지는 군에서 선택된 1종 이상을 포함해도 된다. 처리층의 C의 함유량이 60at% 이상이고, 또한 O의 함유량이 30at% 이하이면, 윤활성이 향상된다.On the upper layer 14, the processing layer whose content of C is 60at% or more and content of O is 30at% or less is provided. The treatment layer is formed by a surface treatment such as a sealing treatment performed after the upper layer 14 is formed, and C included in the treatment layer is a component that is a surface treatment group such as the sealing treatment. The treatment layer may further include one or more selected from the group consisting of S, P, and N. Lubricity improves that C content of a process layer is 60 at% or more and O content is 30 at% or less.

처리층에 대해, 250℃에서 30초간 가열한 후에, 당해 처리층의 표면에 부착된 산화물 입자의 면적률이 0.1% 이하가 되도록 제어되어 있다. 당해 가열 후의 처리층 표면에 부착되는 산화물 입자는, 전자 부품용 금속 재료의 응착 마모성에 악영향을 미치므로, 당해 산화물 입자의 면적률을 0.1% 이하로 제어함으로써, 저응착 마모성을 갖는 전자 부품용 금속 재료가 얻어진다.After heating at 250 degreeC for 30 second with respect to a process layer, it is controlled so that the area ratio of the oxide particle adhering to the surface of the said process layer may be 0.1% or less. Since the oxide particles adhering to the surface of the treated layer after the heating adversely affect the adhesion wear property of the metal material for electronic parts, the metal parts for electronic parts having low adhesion wear properties are controlled by controlling the area ratio of the oxide particles to 0.1% or less. Material is obtained.

(중간층)(Middle floor)

중간층(13)은, Ni, Cr, Mn, Fe, Co 및 Cu로 이루어지는 군인 A 구성 원소군에서 선택된 1종 또는 2종 이상과, Sn 및 In으로 이루어지는 군인 B 구성 원소군에서 선택된 1종 또는 2종으로 구성되어 있다. 이러한 구성에 의하면, 내열성이나 땜납 습윤성을 향상시킨다고 하는 효과를 갖는다. 또한, 이 경우, 중간층(13)의 두께가 0.01㎛ 이상 0.40㎛ 미만인 것이 바람직하다. Sn 및 In은 염소 가스, 아황산 가스, 황화수소 가스 등의 가스에 대한 내가스 부식성이 우수하고, 예를 들어 하층(12)에 내가스 부식성이 떨어지는 Ni, 기재(11)에 내가스 부식성이 떨어지는 구리 및 구리 합금을 사용한 경우에는, 전자 부품용 금속 재료의 내가스 부식성을 향상시키는 작용이 있다. Ni, Cr, Mn, Fe, Co 및 Cu는, Sn이나 In과 비교하여 피막이 단단하므로 응착 마모가 발생하기 어려워, 기재(11)의 구성 금속이 상층(14)으로 확산되는 것을 방지하고, 내열성 시험이나 땜납 습윤성 열화를 억제하는 등의 내구성을 향상시킨다.The intermediate layer 13 is at least one selected from the group A constituent elements composed of Ni, Cr, Mn, Fe, Co, and Cu, and at least one selected from the group B constituent elements composed of Sn and In. It is composed of species. According to such a structure, it has the effect of improving heat resistance and solder wettability. In this case, the thickness of the intermediate layer 13 is preferably 0.01 µm or more and less than 0.40 µm. Sn and In are excellent in gas corrosion resistance to gases such as chlorine gas, sulfurous acid gas, hydrogen sulfide gas, and the like, for example, Ni which is poor in gas corrosion resistance in the lower layer 12, and copper which is poor in gas corrosion resistance to the base material 11. And when a copper alloy is used, it has the effect | action which improves the gas corrosion resistance of the metal material for electronic components. Ni, Cr, Mn, Fe, Co, and Cu have a harder film than Sn or In, so that adhesion wear is less likely to occur, preventing the constituent metal of the base material 11 from diffusing to the upper layer 14, and the heat resistance test. And durability such as suppressing solder wettability deterioration.

중간층(13)의 두께가 0.01㎛ 미만이면 피막이 단단해져 응착 마모가 감소할 우려가 있다. 한편, 중간층(13) 두께가 0.40㎛ 이상이면 굽힘 가공성이 저하되고, 또한 기계적 내구성이 저하되어, 도금 절삭이 발생하는 경우도 있다.When the thickness of the intermediate | middle layer 13 is less than 0.01 micrometer, there exists a possibility that a coating may become hard and adhesive wear may reduce. On the other hand, when the thickness of the intermediate | middle layer 13 is 0.40 micrometer or more, bending workability will fall, mechanical durability will fall, and plating cutting may generate | occur | produce.

Sn 및 In 중에서는, 후생 노동성의 건강 장애 방지에 관한 기술 지침에 기초하여, In은 규제가 엄격하므로, Sn이 바람직하다. 또한 Ni, Cr, Mn, Fe, Co 및 Cu 중에서는 Ni가 바람직하다. 이것은 Ni가 단단하여 응착 마모가 발생하기 어렵고, 또한 충분한 굽힘 가공성이 얻어지기 때문이다.Among Sn and In, Sn is preferable because In is strictly regulated based on technical guidelines on the prevention of health disorders of the Ministry of Health, Labor and Welfare. Moreover, Ni is preferable among Ni, Cr, Mn, Fe, Co, and Cu. This is because Ni is hard and adhesion wear hardly occurs, and sufficient bending formability is obtained.

중간층(13)에 있어서 B 구성 원소군의 금속이 35at% 이상인 것이 바람직하다. Sn이 35at% 이상으로 됨으로써 피막이 단단해져 응착 마모가 감소하는 경우가 있다.In the intermediate layer 13, it is preferable that the metal of B constituent group is 35 at% or more. When Sn becomes 35at% or more, a film may become hard and adhesive wear may reduce.

중간층(13)은, Ni3Sn과 Ni3Sn2로 구성되어 있어도 되고, Ni3Sn2 또는 Ni3Sn4 단독으로 구성되어 있어도 된다. Ni3Sn, Ni3Sn2, Ni3Sn4가 존재함으로써 내열성이나 땜납 습윤성이 향상되는 경우가 있다.The intermediate layer 13 may be composed of Ni 3 Sn and Ni 3 Sn 2 , or may be composed of Ni 3 Sn 2 or Ni 3 Sn 4 alone. The presence of Ni 3 Sn, Ni 3 Sn 2 , and Ni 3 Sn 4 may improve the heat resistance and the solder wettability.

중간층(13)에, Ni3Sn4와, Sn 단상인 βSn이 존재하는 것이 바람직하다. 이들이 존재함으로써 내열성이나 땜납 습윤성은, Ni3Sn4와 Ni3Sn2가 존재하는 경우와 비교하여 내열성이나 땜납 습윤성이 향상되는 경우가 있다.It is preferable that Ni 3 Sn 4 and βSn which is a single phase Sn exist in the intermediate layer 13. When these exist, heat resistance and solder wettability may improve heat resistance and solder wettability compared with the case where Ni 3 Sn 4 and Ni 3 Sn 2 are present.

또한, 이 경우, 상층(14)의 두께가 0.02㎛ 이상 1.00㎛ 미만인 것이 바람직하다. 상층(14)의 두께가 0.02㎛ 미만이면, 내가스 부식성이 나빠, 가스 부식 시험을 행하면 외관이 변색된다. 한편, 상층(14)의 두께가 1.00㎛ 이상이면, 단단한 기재(11) 또는 하층(12)에 의한 박막 윤활 효과가 저하되어 응착 마모가 커진다. 또한 기계적 내구성이 저하되어, 도금 절삭이 발생하기 쉬워진다. 상층(14)의 두께는 0.50㎛ 미만인 것이 바람직하다.In this case, the thickness of the upper layer 14 is preferably 0.02 µm or more and less than 1.00 µm. If the thickness of the upper layer 14 is less than 0.02 micrometer, gas corrosion resistance will worsen, and an external appearance will discolor when a gas corrosion test is performed. On the other hand, when the thickness of the upper layer 14 is 1.00 micrometers or more, the thin film lubrication effect by the hard base material 11 or the lower layer 12 will fall, and adhesive wear will increase. Moreover, mechanical durability falls and plating cutting becomes easy to generate | occur | produce. It is preferable that the thickness of the upper layer 14 is less than 0.50 micrometer.

(하층)(substratum)

하층(12)은, Ni, Cr, Mn, Fe, Co 및 Cu로 이루어지는 군인 A 구성 원소군에서 선택된 1종 또는 2종 이상으로 구성되어 있다. 이러한 구성에 의해, 기재(11)의 금속 원소가 중간층(13)이나 상층(14)으로 확산되는 것을 억제할 수 있다.The lower layer 12 is comprised from 1 type (s) or 2 or more types chosen from the group of the group A structural elements which consist of Ni, Cr, Mn, Fe, Co, and Cu. By this structure, the metal element of the base material 11 can be suppressed from spreading to the intermediate | middle layer 13 and the upper layer 14. FIG.

하층(12)의 두께는 0.05㎛ 이상인 것이 바람직하다. 하층(12)의 두께가 0.05㎛ 미만이면, 단단한 하층에 의한 박막 윤활 효과가 저하되어 응착 마모가 커질 우려가 있다. 기재(11)의 구성 금속은 상층(14)으로 확산되기 쉬워져, 내열성이나 땜납 습윤성이 떨어질 우려가 있다. 한편, 하층(12)의 두께는 5.00㎛ 미만인 것이 바람직하다. 두께가 5.00㎛ 이상이면 굽힘 가공성이 나쁠 우려가 있다.It is preferable that the thickness of the lower layer 12 is 0.05 micrometer or more. When the thickness of the lower layer 12 is less than 0.05 µm, the thin film lubrication effect due to the hard lower layer is lowered, and there is a fear that the adhesion wear increases. The constituent metal of the base material 11 tends to diffuse to the upper layer 14, and there exists a possibility that heat resistance and solder wettability may fall. On the other hand, it is preferable that the thickness of the lower layer 12 is less than 5.00 micrometers. When thickness is 5.00 micrometers or more, there exists a possibility that bending workability may be bad.

(하층의 그 밖의 조성)(Other composition of the lower layer)

하층(12)이, A 구성 원소군의 금속의 총량이 50mass% 이상, 또한 B, P, Sn 및 Zn으로 이루어지는 군이 선택된 1종 또는 2종 이상의 금속의 총량이 50mass% 미만인 조성을 가져도 된다. 하층(12)의 합금 조성이 이러한 구성으로 됨으로써, 하층(12)이 보다 경화되어, 더욱 박막 윤활 효과가 향상되어 더욱 응착 마모가 저하되고, 하층(12)의 합금화는 기재(11)의 구성 금속이 상층으로 확산되는 것을 더욱 방지하여, 내열성이나 땜납 습윤성 등의 내구성을 향상시키는 경우가 있다.The lower layer 12 may have a composition in which the total amount of metals in the A constituent element group is 50 mass% or more, and the total amount of one or two or more metals selected from the group consisting of B, P, Sn, and Zn is less than 50 mass%. By the alloy composition of the lower layer 12 being such a structure, the lower layer 12 is more hardened, the thin film lubrication effect is further improved, and adhesion wear is further lowered, and the alloying of the lower layer 12 is made of the constituent metal of the base 11. Diffusion to this upper layer may be further prevented to improve durability such as heat resistance and solder wettability.

(상층의 그 밖의 조성)(Other composition of the upper layer)

상층(14)이, B 구성 원소군 및 C 구성 원소군의 금속의 총량이 50mass% 이상, 또한 As, Bi, Cd, Co, Cr, Cu, Fe, Mn, Mo, Ni, Pb, Sb, W 및 Zn으로 이루어지는 군이 선택된 1종 또는 2종 이상의 금속의 총량이 50mass% 미만인 조성을 가져도 된다. 이러한 구성에 의해 더욱 응착 마모가 적게 하고, 또한 위스커의 발생을 억제하여, 더욱 내열성이나 땜납 습윤성 등의 내구성을 향상시키는 경우가 있다.In the upper layer 14, the total amount of metals in the B component group and the C component group is 50 mass% or more, and As, Bi, Cd, Co, Cr, Cu, Fe, Mn, Mo, Ni, Pb, Sb, W And Zn may have a composition in which the total amount of one or two or more metals selected from the group consisting of Zn is less than 50 mass%. Such a structure may further reduce adhesion wear, suppress the occurrence of whiskers, and further improve durability, such as heat resistance and solder wettability.

(중간층의 그 밖의 조성)(Other compositions of the middle layer)

중간층(13)이, C 구성 원소군의 금속의 총량이 50mass% 이상, 또한 Bi, Cd, Co, Cu, Fe, In, Mn, Mo, Ni, Pb, Sb, Se, Sn, W, Tl 및 Zn으로 이루어지는 군이 선택된 1종 또는 2종 이상의 금속의 총량이 50mass% 미만인 조성을 가져도 된다. 이러한 구성에 의해 더욱 응착 마모가 적게 하고, 또한 위스커의 발생을 억제하여, 더욱 내열성이나 땜납 습윤성 등의 내구성을 향상시키는 경우가 있다.In the intermediate layer 13, the total amount of metals of the C constituent element group is 50 mass% or more, and Bi, Cd, Co, Cu, Fe, In, Mn, Mo, Ni, Pb, Sb, Se, Sn, W, Tl and The group consisting of Zn may have a composition in which the total amount of one or two or more metals selected is less than 50 mass%. Such a structure may further reduce adhesion wear, suppress the occurrence of whiskers, and further improve durability, such as heat resistance and solder wettability.

(전자 부품용 금속 재료의 제조 방법)(Method for producing metal material for electronic parts)

본 발명의 전자 부품용 금속 재료의 제조 방법은, 먼저, 기재와, 상기 기재 상에 형성된, Ni, Cr, Mn, Fe, Co 및 Cu로 이루어지는 군인 A 구성 원소군에서 선택된 1종 또는 2종 이상으로 구성된 하층과, 상기 하층 상에 형성된 중간층과, 상기 중간층 상에 형성된, Sn 및 In으로 이루어지는 군인 B 구성 원소군에서 선택된 1종 또는 2종과, Ag, Au, Pt, Pd, Ru, Rh, Os 및 Ir로 이루어지는 군인 C 구성 원소군에서 선택된 1종 또는 2종류 이상의 합금으로 구성된 상층을 구비하고, 또한 상기 중간층이, 상기 A 구성 원소군에서 선택된 1종 또는 2종 이상과, 상기 B 구성 원소군에서 선택된 1종 또는 2종으로 구성된 금속 재료를 준비한다. 당해 금속 재료는, 습식(전기, 무전해) 도금, 건식(스퍼터, 이온 플레이팅 등) 도금 등을 사용하여 형성할 수 있다.First, the method for producing a metal material for an electronic component of the present invention includes one or two or more selected from a base material and a group of military A constituent elements consisting of Ni, Cr, Mn, Fe, Co and Cu formed on the base material. At least one selected from the group consisting of a lower layer consisting of a lower layer, an intermediate layer formed on the lower layer, and a group B constituent element group consisting of Sn and In formed on the intermediate layer, Ag, Au, Pt, Pd, Ru, Rh, An upper layer composed of one or two or more kinds of alloys selected from the group of constituent C constituents composed of Os and Ir, and the intermediate layer is one or two or more selected from the group A constituents, and the B component A metal material composed of one or two selected from the group is prepared. The metal material can be formed by wet (electrophoresis, electroless) plating, dry (sputtering, ion plating, etc.) plating, or the like.

상층(14), 중간층(13) 및 하층(12)이, 기재(11) 상에 A 구성 원소군에서 선택된 1종 또는 2종 이상을 성막하고, 그 후, B 구성 원소군에서 선택된 1종 또는 2종을 성막하고, 그 후, C 구성 원소군에서 선택된 1종 또는 2종류 이상을 성막하고, B 구성 원소군 및 C 구성 원소군의 각 원소가 확산됨으로써 각각 형성되어 있어도 된다. 예를 들어 B 구성 원소군의 금속이 Ag, C 구성 원소군의 금속이 Sn인 경우, Sn으로의 Ag의 확산은 빨라, 자연 확산에 의해 Sn-Ag 합금층을 형성한다. 합금층 형성에 의해 Sn의 응착력을 한층 작게 하고, 또한 저위스커성 및 내구성도 더욱 향상시킬 수 있다.The upper layer 14, the intermediate layer 13, and the lower layer 12 form one or two or more kinds selected from the A constituent element groups on the substrate 11, and thereafter, one or more selected from the B constituent element groups. Two types of films may be formed, and then, one or two or more types selected from the C constituent element groups may be formed, and the respective elements of the B constituent element group and the C constituent element group may be formed, respectively. For example, when the metal of the B component group is Ag and the metal of the C component element group is Sn, the diffusion of Ag into Sn is rapid, and a Sn-Ag alloy layer is formed by natural diffusion. By forming an alloy layer, Sn adhesion force can be further reduced, and low whisker property and durability can be further improved.

상층(14)을 형성시킨 후에 더욱 응착 마모 억제하고, 또한 저위스커성 및 내구성을 더욱 향상시킬 목적으로 열처리를 실시해도 된다. 열처리에 의해 상층의 B 구성 원소군의 금속과 C 구성 원소군의 금속이 확산되어 합금층을 보다 형성하기 쉬워져, Sn의 응착력을 한층 작게 하고, 또한 저위스커성 및 내구성도 더욱 향상시킬 수 있다. 또한, 당해 열처리를 환원성 분위기 또는 비산화성 분위기로 행해도 된다.After forming the upper layer 14, heat treatment may be performed for the purpose of further suppressing adhesion wear and further improving low whisker property and durability. The heat treatment diffuses the metal of the B component group and the metal of the C component group in the upper layer to form an alloy layer more easily, further reducing the adhesion of Sn and further improving the low whisker property and durability. have. In addition, the heat treatment may be performed in a reducing atmosphere or a non-oxidizing atmosphere.

또한, 이 열처리에 대해서는, 처리 조건(온도×시간)은 적절하게 선택할 수 있다. 또한, 특히 이 열처리는 하지 않아도 된다. 또한, 열처리를 B 구성 원소군의 금속 융점 이상에서 행하고, B 구성 원소군에서 선택된 1종 또는 2종 및 A 구성 원소군에서 선택된 1종 또는 2종 이상의 합금층, 및 B 구성 원소군에서 선택된 1종 또는 2종 및 C 구성 원소군에서 선택된 1종 또는 2종류 이상의 합금층을 형성하면, 당해 합금층을 보다 양호하게 형성하기 쉬워진다. 또한, 열처리를 B 구성 원소군의 금속의 융점 이상에서 행하고, C 구성 원소군에서 선택된 1종 또는 2종류 이상 및 B 구성 원소군에서 선택된 1종 또는 2종의 합금층을 형성하면, 당해 합금층을 보다 양호하게 형성하기 쉬워진다.In addition, about this heat processing, processing conditions (temperature x time) can be selected suitably. In addition, this heat treatment is not particularly necessary. Further, the heat treatment is performed at the metal melting point or higher of the B constituent group, and at least one alloy layer selected from the B constituent group and one or two alloy layers selected from the A constituent group, and 1 selected from the B constituent group. Formation of one or two or more kinds of alloy layers selected from species or two kinds and C constituent element groups facilitates formation of the alloy layer more favorably. In addition, when the heat treatment is performed at the melting point or more of the metals of the B component element group, and one or two or more kinds of alloy layers selected from the C component element group and one or two kinds of alloy layers selected from the B component element group are formed, the alloy layer It becomes easy to form more satisfactorily.

다음으로, 상층(14) 상에, 또는 상층(14) 상에 열처리를 실시한 후에, 더욱 응착 마모성을 저하시키고, 또한 저위스커성 및 내구성도 향상시킬 목적으로 후처리를 실시하고, 이에 의해 처리층을 형성한다. 당해 후처리로서는, 인산에스테르계 처리액을 2.5∼5.0g/L 함유하는 처리액 중에 마련하고, 초음파 교반함으로써 상기 금속 재료의 표면에 C의 함유량이 60at% 이상이고, 또한 O의 함유량이 30at% 이하인 처리층을 형성한다.Next, after heat treatment is performed on the upper layer 14 or on the upper layer 14, post-treatment is performed for the purpose of further lowering the adhesive wear property and also improving the low whisker property and durability. To form. As the post-treatment, the treatment solution containing 2.5 to 5.0 g / L of the phosphate ester-based treatment liquid is prepared, and the content of C is 60 at% or more on the surface of the metal material by ultrasonic stirring, and the content of O is 30 at%. The treatment layer which is below is formed.

본 발명의 전자 부품용 금속 재료의 제조 방법에서는, 이와 같이 금속 재료의 표면(상층의 표면)에 마련하는 처리층의 형성에서, 인산에스테르계 처리액을 2.5∼5.0g/L라고 하는 고농도로 함유하는 처리액을 사용하여, 봉공 성분을 초음파 교반에 의해 처리액 중에 미세 분산시킴으로써, 강고한 봉공막을 생성하고, 열처리 등에 의한 산화를 방지함으로써 처리층의 가열 후의 표면에 부착된 산화물 입자의 면적률을 0.1% 이하로 제어할 수 있다. 인산에스테르계 처리액의 농도가 2.5g/L 미만이면 농도가 옅어 내식성, 내열성에 문제가 있고, 5.0g/L를 초과하면 응착 마모성이 높아진다. 인산에스테르계 처리액의 농도는, 3.0∼4.0g/L인 것이 보다 바람직하다. 또한, 처리층 형성 시의 전해 전위는 2.0∼3.5V인 것이 바람직하다. 당해 전해 전위가 2.0V 미만이면 강고한 봉공막이 만들어지지 않아 내식성, 내열성에 문제가 발생할 우려가 있고, 3.5V를 초과하면 변색의 문제가 발생할 우려가 있다. 또한, 당해 전해 전위는, 3.0∼3.5V인 것이 보다 바람직하다.In the manufacturing method of the metal material for electronic components of this invention, in the formation of the process layer provided in the surface (surface of an upper layer) of a metal material in this way, it contains a phosphate ester process liquid at high concentration of 2.5-5.0 g / L. By using the treating solution to finely disperse the sealing component in the treatment liquid by ultrasonic stirring, a firm sealing film is formed and the oxidation rate by heat treatment or the like is prevented, thereby reducing the area ratio of the oxide particles adhered to the surface after heating of the treatment layer. 0.1% or less can be controlled. If the concentration of the phosphate ester-based treatment liquid is less than 2.5 g / L, the concentration is low and there is a problem in corrosion resistance and heat resistance. If it exceeds 5.0 g / L, adhesion wear is increased. As for the density | concentration of a phosphate ester process liquid, it is more preferable that it is 3.0-4.0 g / L. In addition, it is preferable that the electrolysis potential at the time of forming a process layer is 2.0-3.5V. If the electrolytic potential is less than 2.0 V, a firm sealing film may not be formed, which may cause problems in corrosion resistance and heat resistance, and when it exceeds 3.5 V, there may be a problem of discoloration. Moreover, it is more preferable that the said electrolysis potential is 3.0-3.5V.

또한, 후처리에 의해 응착 마모성의 저하 외에, 윤활성이 향상되고, 내열성이나 땜납 습윤성 등의 내구성을 향상시킬 수도 있다. 구체적인 후처리로서는 인히비터를 사용한, 인산염 처리가 있고, 또한 윤활 처리, 실란 커플링 처리 등이 있다. 또한, 이 열처리에 대해서는, 처리 조건(온도×시간)은 적절하게 선택할 수 있다.In addition, by post-treatment, in addition to the decrease in adhesion wear resistance, the lubricity can be improved, and the durability such as heat resistance and solder wettability can be improved. Specific post-treatments include phosphate treatment using an inhibitor, lubrication treatment, silane coupling treatment, and the like. In addition, about this heat processing, processing conditions (temperature x time) can be selected suitably.

후처리 전에, 열처리에 의해 산화된 표면에 대해 산화물 제거를 행하는 것이 바람직하다. 당해 산화물의 제거는, 산세, 또는 후처리액과 동일한 액으로 역전해함으로써 행해도 된다. 이에 의해, 산화되어 있지 않은, 프레시한 합금면이 노출된다. 여기에, 후처리 성분이 흡착된다. 산화물이 노출된 표면보다, 합금이 노출된 표면에는 보다 많은 특정 구조를 가진 유기물이 부착되므로, 윤활성, 내구성이 더욱 향상될 것이 기대된다. 물론, 환원성 분위기에서 열처리를 행하면, 상기 산화물 제거 처리는 하지 않아도 된다.Before the post-treatment, it is preferable to perform oxide removal on the surface oxidized by heat treatment. The removal of the oxide may be performed by pickling or reverse electrolysis with the same liquid as the post-treatment liquid. Thereby, the fresh alloy surface which is not oxidized is exposed. Here, the aftertreatment component is adsorbed. It is expected that the lubricity and durability will be further improved because more organic matters having a specific structure are attached to the surface where the alloy is exposed than the surface where the oxide is exposed. Of course, when the heat treatment is performed in a reducing atmosphere, the oxide removal treatment may not be performed.

후처리로서는, 상층(14) 표면을, 1종 또는 2종 이상의 인산에스테르와, 환상 유기 화합물의 1종 또는 2종 이상을 함유하는 수용액(인산에스테르계 액이라고 칭함)을 사용하여 행하는 것이 바람직하다. 인산에스테르계 액에 첨가되는 인산에스테르는, 도금의 산화 방지제 및 윤활제로서의 기능을 행한다. 본 발명에 사용되는 인산에스테르는, 일반식〔1〕 및 〔2〕로 표시된다. 일반식〔1〕로 표시되는 화합물 중 바람직한 것을 들면, 라우르산성 인산 모노에스테르 등이 있다. 일반식〔2〕로 표시되는 화합물 중 바람직한 것을 들면, 라우르산성 디인산에스테르 등이 있다.As a post-treatment, it is preferable to perform the surface of the upper layer 14 using 1 type, or 2 or more types of phosphate ester, and the aqueous solution containing 1 type, or 2 or more types of cyclic organic compounds (called phosphate ester type | system | group liquid). . The phosphate ester added to the phosphate ester-based liquid functions as an antioxidant and a lubricant for plating. Phosphoric acid ester used for this invention is represented by General formula [1] and [2]. Among the compounds represented by the general formula [1], preferred are lauric acid phosphate monoesters. A lauric acid diphosphate ester etc. are mentioned among the compounds represented by General formula [2].

[화학식 5][Formula 5]

Figure pct00005
Figure pct00005

[화학식 6][Formula 6]

Figure pct00006
Figure pct00006

(식〔1〕, 〔2〕에 있어서, R1 및 R2는 각각 치환 알킬을 나타내고, M은 수소 또는 알칼리 금속을 나타냄)(In formula [1] and [2], R <1> and R <2> represents substituted alkyl, and M represents hydrogen or an alkali metal.)

인산에스테르계 액에 첨가되는 환상 유기 화합물은, 도금의 산화 방지제로서의 기능을 행한다. 본 발명에 사용되는 환상 유기 화합물의 군을 일반식〔3〕 및 〔4〕로 나타낸다. 일반식〔3〕 및 〔4〕로 나타내는 환상 유기 화합물 군 중 바람직한 것을 들면, 예를 들어 머캅토벤조티아졸, 머캅토벤조티아졸의 Na염, 머캅토벤조티아졸의 K염, 벤조트리아졸, 1-메틸트리아졸, 톨릴트리아졸, 트리아진계 화합물 등이 있다.The cyclic organic compound added to a phosphate ester liquid functions as an antioxidant of plating. The group of cyclic organic compounds used for this invention is shown by General formula [3] and [4]. Examples of the cyclic organic compound group represented by the general formulas [3] and [4] include, for example, mercaptobenzothiazole, Na salt of mercaptobenzothiazole, K salt of mercaptobenzothiazole, and benzotriazole. , 1-methyltriazole, tolyltriazole, triazine compounds and the like.

[화학식 7][Formula 7]

Figure pct00007
Figure pct00007

[화학식 8][Formula 8]

Figure pct00008
Figure pct00008

(식〔3〕, 〔4〕중, R1은 수소, 알킬 또는 치환 알킬을 나타내고, R2는 알칼리 금속, 수소, 알킬 또는 치환 알킬을 나타내고, R3은 알칼리 금속 또는 수소를 나타내고, R4는 -SH, 알킬기나 아릴기로 치환된 아미노기 또는 알킬 치환 이미다졸릴알킬을 나타내고, R5 및 R6은 -NH2, -SH 또는 -SM(M은 알칼리 금속을 나타냄)을 나타냄), R 1 of the (formula [3], [4] is a hydrogen, alkyl or substituted alkyl, R 2 represents an alkali metal, hydrogen, alkyl or substituted alkyl, R 3 represents an alkali metal or hydrogen, R 4 Represents -SH, an amino group substituted with an alkyl group or an aryl group or an alkyl substituted imidazolylalkyl, and R 5 and R 6 represent -NH 2 , -SH or -SM (M represents an alkali metal)

후처리 후에 상층(14) 표면에 P와 N이 모두 존재하도록 처리를 행하는 것이 더욱 바람직하다. 도금 표면에 P가 존재하지 않으면 납땜성이 떨어지기 쉬워지고, 또한 도금재의 윤활성도 나빠진다. 한편 Sn 또는 Sn 합금 도금 표면에 N이 존재하지 않으면, 고온 환경하에서 도금재의 접촉 저항이 상승하기 쉬워지는 경우가 있다.It is more preferable to perform the treatment so that both P and N are present on the upper layer 14 surface after the post treatment. If P does not exist in the plating surface, solderability will fall easily and also the lubricity of a plating material will worsen. On the other hand, when N does not exist in Sn or Sn alloy plating surface, the contact resistance of a plating material may rise easily in a high temperature environment.

<전자 부품용 금속 재료의 특성><Characteristics of Metallic Materials for Electronic Components>

상층(14)의 표면의 최대 높이(Rz)는 3㎛ 이하인 것이 바람직하다. 상층(14)의 표면의 최대 높이(Rz)가 3㎛ 이하이면 비교적 부식되기 쉬운 볼록부가 적어져 평활해지므로, 내가스 부식성이 향상된다.It is preferable that the maximum height Rz of the surface of the upper layer 14 is 3 micrometers or less. If the maximum height Rz of the surface of the upper layer 14 is 3 micrometers or less, since the convex part which is easy to corrode becomes small and becomes smooth, gas corrosion resistance will improve.

<전자 부품용 금속 재료의 용도><Use of Metallic Materials for Electronic Components>

본 발명의 전자 부품용 금속 재료의 용도는 특별히 한정하지 않지만, 예를 들어 전자 부품용 금속 재료를 접점 부분에 구비한 커넥터 단자, 전자 부품용 금속 재료를 접점 부분에 구비한 FFC 단자 또는 FPC 단자, 전자 부품용 금속 재료를 외부 접속용 전극에 구비한 전자 부품 등을 들 수 있다. 또한, 단자에 대해서는, 압착 단자, 납땜 단자, 프레스 피트 단자 등, 배선측과의 접합 방법에 구애받지 않는다. 외부 접속용 전극에는, 탭에 표면 처리를 실시한 접속 부품이나 반도체의 언더 범프 메탈용에 표면 처리를 실시한 재료 등이 있다.Although the use of the metal material for electronic components of this invention is not specifically limited, For example, the connector terminal provided with the metal material for electronic components in a contact part, the FFC terminal or FPC terminal provided with the metal material for electronic components in a contact part, The electronic component etc. which provided the metal material for electronic components with the electrode for external connection are mentioned. In addition, about a terminal, it does not depend on the joining method with a wiring side, such as a crimp terminal, a soldering terminal, and a press-fit terminal. Examples of the external connection electrode include a connection component having a surface treatment on a tab, a material having a surface treatment on an under bump metal of a semiconductor, and the like.

또한, 이와 같이 형성된 커넥터 단자를 사용하여 커넥터를 제작해도 되고, FFC 단자 또는 FPC 단자를 사용하여 FFC 또는 FPC를 제작해도 된다.In addition, a connector may be manufactured using the connector terminal formed in this way, and FFC or FPC may be produced using an FFC terminal or an FPC terminal.

또한 본 발명의 전자 부품용 금속 재료는, 하우징에 설치하는 장착부의 일방측에 암형 단자 접속부가, 타방측에 기판 접속부가 각각 마련되고, 당해 기판 접속부를 기판에 형성된 스루홀에 압입하여 당해 기판에 설치하는 압입형 단자에 사용해도 된다.In the metal material for electronic components of the present invention, a female terminal connecting portion is provided on one side of the mounting portion provided in the housing, and a board connecting portion is provided on the other side, and the substrate connecting portion is pressed into the through hole formed in the substrate, You may use for the press-fit terminal provided.

커넥터는 수형 단자와 암형 단자의 양쪽이 본 발명의 전자 부품용 금속 재료여도 되고, 수형 단자 또는 암형 단자 중 한쪽만이어도 된다. 또한 수형 단자와 암형 단자의 양쪽을 본 발명의 전자 부품용 금속 재료로 함으로써, 저삽발성이 더욱 향상된다.As for a connector, the metal material for electronic components of this invention may be sufficient as both a male terminal and a female terminal, and only one of a male terminal and a female terminal may be sufficient as it. In addition, by using both the male terminal and the female terminal as the metal material for electronic components of the present invention, low insertion efficiency is further improved.

실시예Example

이하, 본 발명의 실시예 및 비교예를 함께 나타내지만, 이것들은 본 발명을 더 잘 이해하기 위해 제공하는 것이며, 본 발명이 한정되는 것을 의도하는 것은 아니다.Hereinafter, although the Example and comparative example of this invention are shown together, these are provided in order to understand this invention better, and it does not intend that this invention is limited.

실시예 1∼7, 비교예 1∼6으로서, 전해 탈지, 산세, 표 1에 나타내는 조건에서, 제1 도금, 제2 도금, 제3 도금, 열처리를 행한 후, 산세 또는 캐소드 전해로 금속 산화층(산화주석층)을 제거하고, 애노드 전해를 행하였다. 또한, 환원성 분위기에서 열처리를 행하면 이러한 금속 산화층은 형성되지 않아, 그 경우, 당해 산화물 제거 공정은 행할 필요가 없다.As Examples 1-7 and Comparative Examples 1-6, after performing electrolytic degreasing, pickling, and 1st plating, 2nd plating, 3rd plating, and heat processing, the metal oxide layer ( The tin oxide layer) was removed and anode electrolysis was performed. In addition, when the heat treatment is performed in a reducing atmosphere, such a metal oxide layer is not formed. In that case, the oxide removal step does not need to be performed.

(소재)(Material)

(1) 판재: 두께 0.30㎜, 폭 30㎜, 성분 Cu-30Zn(1) Plate: 0.30 mm thick, 30 mm wide, component Cu-30Zn

(2) 수형 단자: 두께 0.64㎜, 폭 2.3㎜, 성분 Cu-30Zn(2) Male terminal: Thickness 0.64 mm, Width 2.3 mm, Component Cu-30Zn

(3) 압입형 단자: 도키와쇼코 제조, 프레스 피트 단자 PCB 커넥터, R800(3) Press-fit terminal: manufactured by Tokiwa Shoko, Press-fit terminal PCB connector, R800

(제1 도금 조건)(1st plating condition)

(조건 1) 반광택 Ni 도금(Condition 1) Semi-gloss Ni Plating

표면 처리 방법: 전기 도금Surface treatment method: electroplating

도금액: 술팜산 Ni 도금액+사카린Plating Solution: Sulfamnic Acid Ni Plating Solution + Saccharin

도금 온도: 55℃Plating temperature: 55 ℃

전류 밀도: 0.5∼4A/dm2 Current Density: 0.5 to 4 A / dm 2

(조건 2) 광택 Ni 도금(Condition 2) Polished Ni Plating

표면 처리 방법: 전기 도금Surface treatment method: electroplating

도금액: 술팜산 Ni 도금액+사카린+첨가제Plating solution: sulfamic acid Ni plating solution + saccharin + additive

도금 온도: 55℃Plating temperature: 55 ℃

전류 밀도: 0.5∼4A/dm2 Current Density: 0.5 to 4 A / dm 2

(조건 3) Ni-Co 도금(Condition 3) Ni-Co Plating

표면 처리 방법: 전기 도금Surface treatment method: electroplating

도금액: 술팜산욕+황산코발트Plating solution: sulfamic acid bath + cobalt sulfate

도금 온도: 55℃Plating temperature: 55 ℃

전류 밀도: 0.5∼4A/dm2 Current Density: 0.5 to 4 A / dm 2

(조건 4) 무광택 Ni 도금(Condition 4) Matte Ni Plating

표면 처리 방법: 전기 도금Surface treatment method: electroplating

도금액: 술팜산 Ni 도금액Plating solution: sulfamic acid Ni plating solution

도금 온도: 55℃Plating temperature: 55 ℃

전류 밀도: 0.5∼4A/dm2 Current Density: 0.5 to 4 A / dm 2

(조건 5) Ni-P 도금(Condition 5) Ni-P Plating

표면 처리 방법: 전기 도금Surface treatment method: electroplating

도금액: 술팜산 Ni 도금액+아인산염Plating solution: sulfamic acid Ni plating solution + phosphite

도금 온도: 55℃Plating temperature: 55 ℃

전류 밀도: 0.5∼4A/dm2 Current Density: 0.5 to 4 A / dm 2

(제2 도금 조건)(2nd plating condition)

Ag 도금Ag plating

표면 처리 방법: 전기 도금Surface treatment method: electroplating

도금액: 시안화 Ag 도금액Plating Solution: Cyanide Ag Plating Solution

도금 온도: 40℃Plating temperature: 40 ℃

전류 밀도: 0.2∼4A/dm2 Current density: 0.2-4 A / dm 2

(제3 도금 조건)(Third plating condition)

Sn 도금Sn plating

표면 처리 방법: 전기 도금Surface treatment method: electroplating

도금액: 메탄술폰산 Sn 도금액Plating Solution: Methanesulfonic Acid Sn Plating Solution

도금 온도: 40℃Plating temperature: 40 ℃

전류 밀도: 0.5∼4A/dm2 Current Density: 0.5 to 4 A / dm 2

(열처리)(Heat treatment)

열처리는 핫 플레이트에 샘플을 놓고, 핫 플레이트의 표면이 소정의 온도가 된 것을 확인하고 실시하였다.The heat treatment was performed by placing a sample on a hot plate and confirming that the surface of the hot plate became a predetermined temperature.

(중간 처리)(Intermediate processing)

열처리 후의 샘플을 희황산(10g/1L)에 5초 침지시켰다. 그 후 순수에 5초 침지시켰다.The sample after heat treatment was immersed in dilute sulfuric acid (10 g / 1 L) for 5 seconds. Then, it was immersed in pure water for 5 seconds.

(후처리)(After treatment)

또한 표면 처리액으로서 표 2에 나타내는 농도의 A-12: 인산에스테르계 처리액을 사용하여, 양극 전해(표 2에 기재된 전해 전위, 정전압 전해)를 2초 행하고, 도금 표면에 표면 처리를 행하였다. 실시예 1∼7 및 비교예 2, 4∼6에 대해서는, 처리액 건욕 시에 초음파 교반을 행하고, 그것으로부터 당해 전해를 실시하였다. 처리액의 초음파 교반 조건은, 초음파 분산기에 의한 교반(초음파 주파수: 20㎑, 초음파 출력: 500W로 10분간 실시)으로 하였다. 이들의 처리 후에, 시료를 2초간 침지 후, 온풍에 의해 건조하였다.In addition, using the A-12: phosphate ester treatment liquid of the concentration shown in Table 2 as the surface treatment liquid, anodic electrolysis (electrolysis potential shown in Table 2, constant voltage electrolysis) was performed for 2 seconds, and surface treatment was performed to the plating surface. . About Examples 1-7 and Comparative Examples 2, 4-6, ultrasonic stirring was performed at the time of treatment liquid drying, and the said electrolysis was performed from it. Ultrasonic stirring conditions of the processing liquid were made into stirring by an ultrasonic disperser (ultrasound frequency: 20 Hz, ultrasonic output: 500 W for 10 minutes). After these treatments, the samples were immersed for 2 seconds and then dried by warm air.

(상층, 중간층 및 하층의 두께 측정, 상층의 조성 및 구조의 결정)(Measurement of thickness of upper layer, middle layer and lower layer, determination of composition and structure of upper layer)

얻어진 시료의 상층 및 중간층의 두께 측정, 상층의 조성 결정은, STEM(주사형 전자 현미경) 분석에 의한 선 분석으로 행하였다. 분석한 원소는, 상층, 중간층 및 하층의 조성과, C, S 및 O이다. 이 원소들을 지정 원소로 한다. 또한, 지정 원소의 합계를 100%로 하여, 각 원소의 농도(at%)를 분석하였다. 두께는, 선 분석(또는 면 분석)으로부터 구한 거리에 대응한다. STEM 장치는, 니혼덴시 가부시키가이샤 제조 JEM-2100F를 사용하였다. 본 장치의 가속 전압은 200㎸이다.The thickness measurement of the upper layer and the intermediate | middle layer of the obtained sample, and the composition determination of the upper layer were performed by the line analysis by STEM (scanning electron microscope) analysis. The analyzed elements are the composition of the upper layer, the middle layer, and the lower layer, and C, S, and O. Make these elements the designated element. Moreover, the sum total of the designated element was made into 100%, and the density | concentration (at%) of each element was analyzed. The thickness corresponds to the distance obtained from the line analysis (or surface analysis). Nippon Denshi Corporation JEM-2100F was used for the STEM apparatus. The acceleration voltage of this device is 200 kW.

상층의 구조의 결정은, STEM에 의해 결정한 조성을 상태도와 대조함으로써 결정하였다.The determination of the structure of the upper layer was determined by comparing the composition determined by STEM with the state diagram.

또한, 하층의 두께는, 형광 X선 막 두께 측정기(Seiko Instruments 제조 SEA5100, 콜리메이터 0.1㎜Φ)로 측정하였다.In addition, the thickness of the lower layer was measured by the fluorescent X-ray film thickness measuring instrument (Seiko Instruments SEA5100, a collimator 0.1 mmΦ).

상층, 중간층 및 하층의 두께 측정, 상층의 조성 및 구조의 결정은, 임의의 10점에 대해 평가를 행하여 평균화하였다.The thickness measurement of the upper layer, the intermediate | middle layer, and the lower layer, the composition of the upper layer, and the determination of the structure were evaluated and averaged about arbitrary ten points.

(평가)(evaluation)

각 시료에 대해 이하의 평가를 행하였다.The following evaluation was performed about each sample.

·처리층의 C 농도C concentration of treated layer

이하의 방법에 의해 처리층의 C 농도를 측정하였다.The C concentration of the treated layer was measured by the following method.

알박 파이 가부시키가이샤 제조 XPS 분석 장치(형식: PHI5000 Versa Probe II)를 사용하여, 이하의 조건에서 XPS에 의한 측정을 행하였다. 이에 의해, 최표면에 있어서의 C 농도를 측정하였다.The XPS analyzer (model: PHI5000 Versa Probe II) manufactured by Albac Pie Co., Ltd. was used to measure XPS under the following conditions. Thereby, C density | concentration in the outermost surface was measured.

(측정 조건)(Measuring conditions)

도달 진공도: 2.2×10-7Reach vacuum degree: 2.2 × 10 -7

여기원: 단색화 AlKHere: Monochrome AlK

출력: 25WOutput: 25W

검출 면적: 100㎛φDetecting Area: 100㎛φ

입사각: 90도Incident angle: 90 degrees

취출각: 45도Blowout angle: 45 degrees

중화총: 없음Chinese Guns: None

(스퍼터 조건)(Sputter condition)

이온종: Ar+ Ionic species: Ar +

가속 전압: 2㎸Acceleration voltage: 2 kW

스위프 영역: 3㎜×3㎜Sweep area: 3 mm x 3 mm

레이트: 0.4㎚/min(SiO2 환산)Rate: 0.4 nm / min (SiO 2 equivalent)

·처리층의 가열 후의 표면에 부착된 산화물 입자의 면적률Area ratio of oxide particles adhered to the surface after heating of the treatment layer

이하의 방법에 의해 250℃에서 30초 가열 후의 처리층의 표면에 부착된 산화물 입자의 면적률을 측정하였다.The area ratio of the oxide particle adhering to the surface of the process layer after 30 second heating at 250 degreeC was measured with the following method.

히타치 하이테크놀러지즈사 제조 주사 전자 현미경(형식: SU-70)을 사용하여, EDS 면 분석을 행하여, 산화물인 것을 확인하고, NSS(Noran System Six) 입자 해석 소프트웨어를 사용하여, 2차 전자상에 있어서 82% 이상의 휘도를 갖는 것을 산화물 입자로서 인식하고, 면적률을 산출하였다.EDS surface analysis was performed using a scanning electron microscope (model: SU-70) manufactured by Hitachi High Technologies, Inc. to confirm that the oxide was oxide. The thing which has 82% or more of brightness | luminance is recognized as oxide particle, and the area ratio was computed.

또한, 가열은 핫 플레이트에 샘플을 놓고, 핫 플레이트의 표면이 250℃가 된 후 30초 가열하였다.In addition, the heating put the sample on the hot plate, and heated for 30 second after the surface of the hot plate became 250 degreeC.

·응착 마모성Adhesion wear

응착 마모성은, 시판되고 있는 Sn 리플로 도금 암형 단자(090형 스미토모 TS/야자키 090II 시리즈 암형 단자 비방수/F090-SMTS)를 사용하여 도금을 실시한 수형 단자와 삽발 시험함으로써 평가하였다.Adhesion wear property was evaluated by the male terminal which plated using the commercially available Sn reflow-plated female terminal (090 type Sumitomo TS / Yazaki 090II series female terminal non-water-resistant / F090-SMTS), and the insertion test.

시험에 사용한 측정 장치는, 아이코 엔지니어링 제조 1311NR이며, 수형 핀의 미끄럼 이동 거리 5㎜로 평가하였다. 샘플 수는 5개로 하고, 응착 마모는 삽입력을 사용하여 평가하였다. 삽입력은, 각 샘플의 최댓값을 평균한 값을 채용하였다. 응착 마모의 블랭크재로서는, 비교예 1의 샘플을 채용하고, 당해 비교예 1의 샘플에 대한 응착 마모성에 대해 평가하였다.The measuring device used for the test was 1311NR manufactured by Aiko Engineering, and was evaluated at a sliding distance of 5 mm for the male pin. The number of samples was five, and adhesive wear was evaluated using the insertion force. The insertion force employ | adopted the value which averaged the maximum value of each sample. As a blank material of adhesive wear, the sample of the comparative example 1 was employ | adopted, and the adhesive wear property with respect to the sample of the said comparative example 1 was evaluated.

상기 시험 조건 및 시험 결과를 표 1∼2에 나타낸다.The test conditions and test results are shown in Tables 1-2.

Figure pct00009
Figure pct00009

Figure pct00010
Figure pct00010

(평가 결과)(Evaluation results)

실시예 1∼7은, 우수한 저응착 마모성을 갖는 전자 부품용 금속 재료였다.Examples 1-7 were the metal materials for electronic components which have the outstanding low adhesion wear property.

비교예 1, 3은, 처리층을 형성할 때의 전해액을 초음파 교반하지 않았으므로, 산화물 입자의 면적률이 많아, 응착 마모성이 높았다.Since Comparative Examples 1 and 3 did not ultrasonically stir the electrolyte solution when forming the treatment layer, the area ratio of the oxide particles was large, and adhesion adhesion was high.

비교예 2는, A-12의 농도가 낮고, 처리층을 형성할 때의 전해 전위가 낮으므로, 처리층의 C 농도가 낮아, 즉 충분한 봉공막이 얻어지지 않아 산화물 입자가 많아졌다. 이 때문에, 응착 마모성이 높았다.In Comparative Example 2, since the concentration of A-12 was low and the electrolytic potential at the time of forming the treatment layer was low, the C concentration of the treatment layer was low, that is, a sufficient sealing film was not obtained, resulting in increased oxide particles. For this reason, adhesion wear property was high.

비교예 4는, A-12의 농도는 높지만, 처리층을 형성할 때의 전해 전위가 낮으므로, 처리층의 C 농도가 낮아, 즉 충분한 봉공막이 얻어지지 않아 산화물 입자가 많아졌다. 이 때문에, 응착 마모성이 높았다.In Comparative Example 4, the concentration of A-12 was high, but the electrolytic potential at the time of forming the treatment layer was low. Therefore, the C concentration of the treatment layer was low, that is, a sufficient sealing film was not obtained, resulting in a large amount of oxide particles. For this reason, adhesion wear property was high.

비교예 5는, A-12의 농도가 낮으므로, 처리층의 C 농도가 낮아, 즉 충분한 봉공막이 얻어지지 않아 산화물 입자가 많아졌다. 이 때문에, 응착 마모성이 높았다.Since the density | concentration of A-12 was low, the comparative example 5 had low C density | concentration of a process layer, ie, sufficient sealing film was not obtained and many oxide particles increased. For this reason, adhesion wear property was high.

비교예 6은, A-12의 농도가 낮아, 처리층의 C 농도가 낮아져, 즉 충분한 봉공막이 얻어지지 않아 산화물 입자가 많아졌다. 이 때문에, 응착 마모성이 높았다.In the comparative example 6, the density | concentration of A-12 was low, C density | concentration of the process layer became low, ie, sufficient sealing film was not obtained, and oxide particle increased. For this reason, adhesion wear property was high.

10 : 전자 부품용 금속 재료
11 : 기재
12 : 하층
13 : 중간층
14 : 상층
10: metal material for electronic components
11: description
12: lower layer
13: middle layer
14: upper floor

Claims (12)

기재와,
상기 기재 상에 형성된, Ni, Cr, Mn, Fe, Co 및 Cu로 이루어지는 군인 A 구성 원소군에서 선택된 1종 또는 2종 이상으로 구성된 하층과,
상기 하층 상에 형성된 중간층과,
상기 중간층 상에 형성된, Sn 및 In으로 이루어지는 군인 B 구성 원소군에서 선택된 1종 또는 2종과, Ag, Au, Pt, Pd, Ru, Rh, Os 및 Ir로 이루어지는 군인 C 구성 원소군에서 선택된 1종 또는 2종류 이상의 합금으로 구성된 상층과,
상기 상층 상에 형성된, C의 함유량이 60at% 이상이고, 또한 O의 함유량이 30at% 이하인 처리층을
구비하고,
상기 중간층이, 상기 A 구성 원소군에서 선택된 1종 또는 2종 이상과, 상기 B 구성 원소군에서 선택된 1종 또는 2종으로 구성되어 있고,
250℃에서 30초 가열 후의 상기 처리층의 표면에 부착된 산화물 입자의 면적률이 0.1% 이하인, 전자 부품용 금속 재료.
With the base material,
A lower layer composed of one or two or more selected from the group of constituent A constituents consisting of Ni, Cr, Mn, Fe, Co, and Cu formed on the substrate;
An intermediate layer formed on the lower layer,
1 or 2 selected from the group B constituent elements composed of Sn and In formed on the intermediate layer, and 1 selected from the group C constituent elements composed of Ag, Au, Pt, Pd, Ru, Rh, Os, and Ir. An upper layer composed of one or two or more alloys,
The treated layer formed on the upper layer, the content of C is 60 at% or more, and the content of O is 30 at% or less
Equipped,
The intermediate layer is composed of one kind or two or more kinds selected from the A constituent element group, and one kind or two kinds selected from the B constituent element group,
The metal material for electronic components whose area ratio of the oxide particle adhering to the surface of the said processing layer after 30 second heating at 250 degreeC is 0.1% or less.
제1항에 있어서,
상기 처리층이, 또한, S, P 및 N 로 이루어지는 군에서 선택된 1종 이상을 포함하는, 전자 부품용 금속 재료.
The method of claim 1,
The metal material for electronic components which the said processing layer contains further 1 or more types chosen from the group which consists of S, P, and N further.
기재와,
상기 기재 상에 형성된, Ni, Cr, Mn, Fe, Co 및 Cu로 이루어지는 군인 A 구성 원소군에서 선택된 1종 또는 2종 이상으로 구성된 하층과,
상기 하층 상에 형성된 중간층과,
상기 중간층 상에 형성된, Sn 및 In으로 이루어지는 군인 B 구성 원소군에서 선택된 1종 또는 2종과, Ag, Au, Pt, Pd, Ru, Rh, Os 및 Ir로 이루어지는 군인 C 구성 원소군에서 선택된 1종 또는 2종류 이상의 합금으로 구성된 상층을
구비하고, 또한
상기 중간층이, 상기 A 구성 원소군에서 선택된 1종 또는 2종 이상과, 상기 B 구성 원소군에서 선택된 1종 또는 2종으로 구성된 금속 재료를, 인산에스테르계 처리액을 2.5∼5.0g/L 함유하는 처리액 중에 마련하고, 초음파 교반함으로써 상기 금속 재료의 표면에 C의 함유량이 60at% 이상이고, 또한 O의 함유량이 30at% 이하인 처리층을 형성하는 공정을 포함하는, 전자 부품용 금속 재료의 제조 방법.
With the base material,
A lower layer composed of one or two or more selected from the group of constituent A constituents consisting of Ni, Cr, Mn, Fe, Co, and Cu formed on the substrate;
An intermediate layer formed on the lower layer,
1 or 2 selected from the group B constituent elements composed of Sn and In formed on the intermediate layer, and 1 selected from the group C constituent elements composed of Ag, Au, Pt, Pd, Ru, Rh, Os, and Ir. The upper layer composed of two or more alloys
Equipped, and
The intermediate layer contains 2.5 to 5.0 g / L of a phosphate ester-based treatment liquid of a metal material composed of one or two or more selected from the A component group and one or two selected from the B component group. It manufactures in the to-be-processed liquid, and manufactures the metal material for electronic components which includes the process of forming the processing layer whose content of C is 60at% or more and the content of O is 30at% or less on the surface of the said metal material by ultrasonic stirring. Way.
제3항에 있어서,
상기 인산에스테르계 처리액이, 하기 일반식〔1〕 및 〔2〕로 표시되는 인산에스테르 중 적어도 1종과, 하기 일반식〔3〕 및 〔4〕로 표시되는 환상 유기 화합물 군에서 선택되는 적어도 1종을 함유하는 인산에스테르계 액인, 전자 부품용 금속 재료의 제조 방법.
[화학식 1]
Figure pct00011

[화학식 2]
Figure pct00012

(식〔1〕, 〔2〕에 있어서, R1 및 R2는 각각 치환 알킬을 나타내고, M은 수소 또는 알칼리 금속을 나타냄)
[화학식 3]
Figure pct00013

[화학식 4]
Figure pct00014

(식〔3〕, 〔4〕중, R1은 수소, 알킬 또는 치환 알킬을 나타내고, R2는 알칼리 금속, 수소, 알킬 또는 치환 알킬을 나타내고, R3은 알칼리 금속 또는 수소를 나타내고, R4는 -SH, 알킬기나 아릴기로 치환된 아미노기 또는 알킬 치환 이미다졸릴알킬을 나타내고, R5 및 R6은 -NH2, -SH 또는 -SM(M은 알칼리 금속을 나타냄)을 나타냄)
The method of claim 3,
At least one of the phosphate ester treatment liquid selected from at least one of phosphate esters represented by the following general formulas [1] and [2] and a cyclic organic compound group represented by the following general formulas [3] and [4] The manufacturing method of the metal material for electronic components which is a phosphate ester liquid containing 1 type.
[Formula 1]
Figure pct00011

[Formula 2]
Figure pct00012

(In formula [1] and [2], R <1> and R <2> respectively represent substituted alkyl and M represents hydrogen or an alkali metal.)
[Formula 3]
Figure pct00013

[Formula 4]
Figure pct00014

, R 1 of the (formula [3], [4] is a hydrogen, alkyl or substituted alkyl, R 2 represents an alkali metal, hydrogen, alkyl or substituted alkyl, R 3 represents an alkali metal or hydrogen, R 4 Represents -SH, an amino group or an alkyl substituted imidazolylalkyl substituted with an alkyl group or an aryl group, R 5 and R 6 represent -NH 2 , -SH or -SM (M represents an alkali metal)
제1항 또는 제2항에 기재된 전자 부품용 금속 재료를 접점 부분에 구비한, 커넥터 단자.The connector terminal provided with the contact part with the metal material for electronic components of Claim 1 or 2. 제5항에 기재된 커넥터 단자를 구비한, 커넥터.The connector provided with the connector terminal of Claim 5. 제1항 또는 제2항에 기재된 전자 부품용 금속 재료를 접점 부분에 구비한, FFC 단자.The FFC terminal provided with the contact material with the metal material for electronic components of Claim 1 or 2. 제1항 또는 제2항에 기재된 전자 부품용 금속 재료를 접점 부분에 구비한, FPC 단자.The FPC terminal provided with the contact part with the metal material for electronic components of Claim 1 or 2. 제7항에 기재된 FFC 단자를 구비한, FFC.An FFC provided with the FFC terminal according to claim 7. 제8항에 기재된 FPC 단자를 구비한, FPC.The FPC provided with the FPC terminal of Claim 8. 제1항 또는 제2항에 기재된 전자 부품용 금속 재료를 외부 접속용 전극에 구비한, 전자 부품.The electronic component provided with the electrode for external connection with the metal material for electronic components of Claim 1 or 2. 하우징에 설치하는 장착부의 일방측에 암형 단자 접속부가, 타방측에 기판 접속부가 각각 마련되고, 상기 기판 접속부를 기판에 형성된 스루홀에 압입하여 상기 기판에 설치하는 압입형 단자에, 제1항 또는 제2항에 기재된 전자 부품용 금속 재료를 구비한, 전자 부품.The female terminal connection part is provided in one side of the mounting part installed in a housing, and the board connection part is provided in the other side, respectively, The press-type terminal which press-fits the said board connection part to the through-hole formed in the board | substrate, and installs in the said board | substrate, Claim 1 or The electronic component provided with the metal material for electronic components of Claim 2.
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