KR20190114732A - X-ray source apparatus and controlling method thereof - Google Patents

Abstract

The present invention relates to an X-ray source device and a control method thereof. According to the present invention, the X-ray source device comprises: an emitter formed on an upper surface of a cathode electrode for electron emission; an anode electrode formed to be spaced apart from the cathode electrode by a predetermined distance; a gate electrode positioned between the emitter and the anode electrode and formed of a metal electrode having at least one opening; a focusing lens positioned between the gate electrode and the anode electrode and focusing electron beams electronically emitted from the emitter onto the anode electrode; and a control module for performing two-dimensional matrix control with respect to the emitter and the gate electrode to adjust dose of X-rays for each position of a subject. The emitter is arranged in a first direction, the gate electrode is arranged in a second direction, and the first and second directions are vertically crossed. The control module determines the dose of the X-rays in accordance with the scale of the arrangement.

Description

X-ray source device and its control method {X-RAY SOURCE APPARATUS AND CONTROLLING METHOD THEREOF}

The present invention relates to an X-ray source apparatus and a control method thereof, in which an array of cathode electrodes and a gate electrode is arranged to enable matrix control so that dose control can be performed according to a position of a subject.

The characteristics of the X-ray source are determined by the dose, energy, and focus of the X-ray. In order to obtain an X-ray source required for medical or industrial inspection, an electron source of high brightness and high current is required. In this case, the electron emission characteristic is evaluated as luminance, and the luminance is increased when electrons are emitted at a high density in a specific direction.

In general, a cold cathode X-ray source draws an electron beam from a carbon nanotube electron emission source by applying a voltage to the gate electrode, and then concentrates the electron beam at high density through the focusing electrode to guide the anode. In addition, when a high voltage is applied between the cathode electrode and the anode electrode, electrons are accelerated toward the anode electrode, and strongly collide with the anode electrode to generate X-rays from the anode electrode.

Conventional X-ray sources operate by hot electron emission, use a reflective anode electrode, and X-rays are emitted radially from a point light source, which makes it difficult to control the dose and makes the intensity of X-rays uneven.

In addition, in the conventional cold cathode electron emission source, CNT is mainly used as an electron emission material, and CNT is mixed with a conductive organic material to form a paste to produce an electron emission source. The CNT paste electron emission source can be contaminated from unwanted organic materials by the field emission source CNT during the manufacturing process, and it is very difficult to orient the CNT in a vertical direction. In addition, the CNT paste electron emission source causes serious problems such as the generation of gas by organic materials and the degree of vacuum in the device, which reduces the field emission efficiency and the life of the field electron emission device. do.

In addition, the conventional X-ray source used a hot electron emission-based point light source. In this case, it is difficult to control the X-ray dose, X-rays are generated radially, and thus the energy of X-rays is not uniform, and the size of the focal point of the electron beam colliding with the anode electrode is large, which limits the resolution of the X-ray image.

Korea Patent Registration No. 10-1239395 (Invention name: field emission source and device using the same and method for manufacturing the same)

An embodiment of the present invention is to produce an emitter using a CNT thin film, a graphene thin film or a nano-carbon material thin film to increase the field emission efficiency, so that X-rays are emitted to the subject in the form of a surface light source using the anode of the transmission type In addition, an object of the present invention is to provide an X-ray source apparatus and a method of controlling the X-ray source that can be irradiated with optimized X-ray dose for each position of a subject by driving the electron beam emitted from the emitter by matrix control.

However, the technical problem to be achieved by the embodiment of the present invention is not limited to the technical problem as described above, and other technical problems may exist.

As an technical means for achieving the above technical problem, an X-ray source device according to an aspect of the present invention, the X-ray source device for emitting X-rays to the subject, the emitter formed on the upper surface of the cathode electrode for electron emission; An anode formed to be spaced apart from the cathode by a predetermined distance; A gate electrode formed between the emitter and the anode electrode and formed of a metal electrode having at least one opening formed therein; A focusing lens positioned between the gate electrode and the anode electrode and focusing an electron beam emitted from the emitter to the anode electrode; And a control module for controlling X-ray dose for each position of the subject by performing two-dimensional matrix control on the emitter and the gate electrode, wherein the emitters are arranged in an array in a first direction and the gate electrode is in a second direction. The first direction and the second direction intersect vertically, and the control module determines the X-ray dose according to the size of the array array.

According to another aspect of the present invention, there is provided a method of controlling an X-ray source apparatus. The method of controlling an X-ray source apparatus that emits X-rays to a subject, wherein the X-ray source apparatus has an emitter arranged on an upper surface of a cathode electrode in a first direction. The gate electrodes are arrayed in a second direction perpendicular to the first direction and interposed between the emitter and the anode electrodes, and performing 2-dimensional matrix control on the arrayed emitters and gate electrodes. And adjusting the X-ray dose for each position of the subject, wherein the X-ray dose for each position of the subject is determined according to the size of the array array.

According to the above-described problem solving means of the present invention, the two-dimensional matrix control of the cathode electrode and the gate electrode can be controlled to irradiate the X-ray dose optimized for each position of the subject to prevent the irradiation of more X-rays to the subject than necessary In addition, there is an effect of obtaining a high resolution and high quality X-ray image.

As described above, since X-ray dose control is easily performed through the two-dimensional matrix control and X-rays are uniformly irradiated onto the subject, a high-resolution surface light source X-ray source having a small dependence on the electron beam focal size can be produced.

In addition, the present invention by producing a CNT thin film using only the CNT material containing no organic matter by vacuum filtration method to produce an emitter by processing the CNT thin film in the form of points or lines, graphene thin film or nano-carbon material thin film After the emitter is manufactured by using the emitter, the emitter is arranged in an array and used as a cold cathode electron emission source, thereby generating a dot or plane-shaped electron beam in various sizes, and the magnitude of the emission current. It is possible to adjust the, and the electron beam transmittance and high density of the X-ray source can be produced.

In this case, the present invention uses a CNT thin film as an emitter instead of a CNT paste cold cathode electron emission source, and thus a strong bonding force in the CNT thin film, which is a nanomaterial, and a strong electrical force between the CNT emitter and the cathode electrode without a paste or other adhesive containing an organic material. It is possible to manufacture X-ray source with high field emission efficiency and excellent lifespan while solving the problem of deterioration of vacuum caused by organic material because it can secure mechanical adhesive property.

1 is a view illustrating an X-ray source apparatus according to an embodiment of the present invention.
FIG. 2 is a diagram illustrating an X-ray source apparatus capable of 2D matrix control according to an embodiment of the present invention.
3 is a flowchart illustrating a control method of an X-ray source apparatus according to an exemplary embodiment of the present invention.
4 is a flow chart illustrating a method of forming the CNT emitter of FIG. 3.
FIG. 5 is a diagram illustrating a CNT thin film in which a network of CNTs is formed by FIG. 4.
FIG. 6 is a diagram illustrating a CNT thin film processed into a polygon by FIG. 4.
7 is a view for explaining various examples of the CNT emitter processed in the form of points or planes by FIG.
FIG. 8 is a diagram illustrating an array arrangement state of the CNT emitters formed by FIG. 7.
9 is a flowchart illustrating a method of forming the gate electrode of FIG. 3.
FIG. 10 is a diagram illustrating a process of transferring the graphene thin film onto the metal electrode of FIG. 9.
FIG. 11 is a view for explaining an example of the gate electrodes arrayed by FIG. 9.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and like reference numerals designate like parts throughout the specification.

Throughout the specification, when a part is said to be "connected" to another part, it includes not only "directly connected" but also "electrically connected" between other elements in between. . In addition, when a part is said to "include" a certain component, which means that it may further include other components, except to exclude other components, unless specifically stated otherwise, one or more other features It is to be understood that the present invention does not exclude the possibility of adding or presenting numbers, steps, operations, components, parts, or combinations thereof.

In the present specification, the term 'unit' includes a unit realized by hardware or software, and a unit realized by using both, and one unit may be realized by using two or more pieces of hardware. The above unit may be realized by one piece of hardware.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a diagram illustrating an X-ray source apparatus according to an exemplary embodiment of the present invention, and FIG. 2 is a diagram illustrating an X-ray source apparatus capable of 2D matrix control according to an exemplary embodiment of the present invention.

1 and 2, the X-ray source apparatus 100 that emits X-rays to a subject includes a cathode electrode 101, an emitter 110, an anode electrode 120, a gate electrode 130, and a focusing lens 140. ), An electron beam collimator 150.

The cathode electrode 101, the anode electrode 120, and the gate electrode 130 may be connected to an external power source (not shown) for applying an electric field. For example, the cathode electrode 101 is connected with a negative voltage source or a positive voltage source, and the anode electrode 120 and the gate electrode 130 are relatively higher than the potential of the voltage source connected to the cathode electrode 101. It can be connected to a voltage source capable of applying a potential.

The emitter 110 is formed on the cathode electrode 101 and used as a cold cathode electron emission source from which electrons are emitted. That is, the emitter 110 may emit electrons by an electric field formed by voltages applied to the cathode electrode 101, the anode electrode 120, and the gate electrode 130. The emitter 110 manufactured using the carbon nanotube (CNT) thin film may process the CNT thin film in a point shape or a line shape to generate an electron beam having a point shape or a surface shape.

In this case, the emitter 110 uses a CNT thin film to provide a low threshold electric field and a high field emission current density, but in addition to the CNT thin film, a graphene thin film or a nano carbon material thin film (for example, a nano graphite thin film) is used. It is also possible to use emitters having high performance field emission characteristics manufactured using.

The anode electrode 120 is formed to be spaced apart from the cathode electrode 101 by a predetermined distance in the direction in which the electron beam is emitted.

The gate electrode 130 may be located between the emitter 110 and the anode electrode 120 and may be spaced apart above the emitter 110. The gate electrode 130 is formed by transferring a graphene thin film made of at least one layer on top of the metal electrode having at least one opening.

In addition, the gate electrode 130 may be formed of a metal plate having a hole or a metal mesh having a polygonal shape as a metal electrode, or a graphene thin film attached to an upper portion of the metal electrode, at least between two metal electrodes. One or more of the graphene thin films may be formed into one of the shapes inserted.

In this case, the emitter 110 and the gate electrode 130 are arranged in an array form. For example, the plurality of emitters 110 spaced apart from each other side by side are arranged in an array so as to be arranged side by side at equal intervals along the first direction, and the gate electrodes 130 are parallel at equal intervals along the second direction. The array is arranged in such a way that the first direction and the second direction may vertically intersect.

The focusing lens 140 is positioned between the gate electrode 130 and the anode electrode 120 to focus the electron beam emitted from the emitter 110 to the anode electrode 120.

The electron beam collimator 150 is positioned between the focusing lens 140 and the anode electrode 120 to direct the electron beam passing through the focusing lens 140 to focus on the anode electrode 120. The electron beam collimator 150 may further improve the straightness of the electron beam passing through the focusing lens 140.

As illustrated in FIG. 2, the X-ray source apparatus 100 performs two-dimensional matrix control on the emitter 110 and the gate electrode 130 arranged in an array through the control module 160. In this case, the two-dimensional matrix control is a control method of controlling the generation density of the electron beam for each portion necessary for the human body by adjusting the voltage magnitude between the emitter 110 and the gate electrode 130 for each position. In the two-dimensional matrix control method, since the density of the electron beam is changed, the density of X-rays generated by the anode electrode 120 is changed, thereby making it possible to adjust the X-ray density according to the bone thickness of the human body.

The control module 160 generates X-rays by appropriately adjusting the X-ray dose for each position of the subject 200. Since the size of the X-ray source can be adjusted according to the size of the array array, the control module 160 can realize a large-area X-ray source. do.

Meanwhile, the control module 160 collects characteristic information such as gender, age, and body information of the subject 200, and according to the characteristic information of the collected subject 200, the photographing site, the location of the bone, the thickness of the bone, and the like. Accordingly, the emission information on the X-ray dose may be locally specified and output.

For example, since the location of the bones and the thickness distribution of the bones are different for each user, the amount of local X-ray emission is adjusted accordingly. To this end, collect characteristic information such as gender, age, body information (height, weight, body type, etc.) of the subject 200 or additional information for distinguishing each subject, and position or bone of each subject 200. Collect anatomical information, such as the thickness of, and combine them. By using the characteristic information of the subject as described above, anatomical structural information about the bone position or the thickness of the bone can be estimated only by the characteristic information of the subject 200 such as gender, age, and body information, and the estimated bone thereafter. Based on the anatomical structure information of the position or thickness of the X-ray dose emission information can be determined for each location.

Meanwhile, when the emission information of the X-ray dose is determined for each position, two-dimensional matrix control is performed on the emitter 110 and the gate electrode 130 to perform addressing on the X-ray source device 100, and the cathode electrode. The amount of voltage applied to the 101 and the gate electrode 130 is adjusted to adjust the amount of X-ray emission for each position of the emitter 110.

In this case, the control module 160 is an intelligent terminal that supports communication, automatic control, data processing, image information processing, and the like, and a smartphone capable of installing and executing a plurality of applications (ie, applications) desired by a user. It may be a handheld-based wireless communication device of any kind, such as a tablet PC, or may be a wired communication device such as a PC that may be connected to another terminal or server through a network.

As such, the X-ray source apparatus 100 includes an emitter 110 arrayed on the cathode electrode 101 and an array arrayed to implement a cold cathode X-ray source that irradiates X-rays optimized for each location on the subject 200. The gate electrode 130, the focusing lens 140, the electron beam collimator 150, and the anode electrode 120 are vacuum mounted with glass or ceramic.

3 is a flowchart illustrating a control method of an X-ray source apparatus according to an exemplary embodiment of the present invention.

Referring to FIG. 3, the control method of the X-ray source apparatus generates X-rays by appropriately adjusting X-ray dose for each position of a subject by performing two-dimensional matrix control on arrayed emitters and gate electrodes.

To this end, the X-ray source device arrays the emitters in the first direction when an emitter is formed that does not contain an organic material by vacuum filtration to emit electrons on the top surface of the cathode (S110). In this case, the emitter may use an emitter manufactured using any one of a graphene thin film or a nano-carbon material thin film in addition to the CNT emitter manufactured using the CNT thin film.

The anode electrode is formed to be spaced apart from the cathode electrode by a predetermined distance (S120), and the second electrode in which the gate electrode crosses perpendicularly to the first direction between the emitter and the anode using a graphene thin film composed of at least one layer. It is formed in the direction (S130). At this time, the anode electrode is manufactured in a transmissive form by depositing a thin tungsten thin film on the beryllium metal plate. The transmissive anode electrode thus manufactured can generate surface light source X-rays.

A focusing lens is formed between the gate electrode and the anode electrode to focus the electron beam emitted from the emitter to the anode electrode (S140), and the electron beam collimator improves the straightness of the electron beam passing through the focusing lens between the focusing lens and the anode electrode. It is additionally installed (S150). In this case, the focusing lens may be manufactured using a general hole shape, or may be manufactured by transferring one or more layers of graphene on the lens. In addition, one or two focusing lenses can be used.

An X-ray source device arranged in an array so that the emitter and the gate electrode vertically cross each other may be a large area emitter and gate electrode capable of two-dimensional matrix control.

The X-ray source device collects characteristic information such as gender, age, and body information of the subject, and locally emits emission information on X-ray dose according to the photographing site, bone location, bone thickness, etc. according to the collected characteristic information of the subject. To be specified and output (S160). That is, when the emission information of the X-ray dose is determined for each position, the X-ray source device performs addressing through two-dimensional matrix control on the arrayed emitter and the gate electrode, and the magnitude of the voltage applied to the cathode electrode and the gate electrode. By adjusting the respective, the X-rays are emitted by adjusting the amount of X-rays for each emitter position (S170).

4 is a flowchart illustrating a method of forming the CNT emitter of FIG. 3, FIG. 5 is a view illustrating a CNT thin film in which a network of CNTs is formed by FIG. 4, and FIG. 6 is processed into a polygon by FIG. 4. It is a figure explaining a CNT thin film. FIG. 7 is a view for explaining various examples of the CNT emitters processed in the form of dots or planes by FIG. 4, and FIG. 8 is a view for explaining an array arrangement state of the CNT emitters formed by FIG. 7.

4 to 8, the CNT emitter 110 disperses 200 mg of sodium dodecyl sulfate (SDS) and 4 mg of single-walled carbon nanotube in 200 ml of distilled water (DI Water). To prepare a CNT dispersion aqueous solution (S410). The CNT dispersion aqueous solution is subjected to the sonication process (S420) and the centrifugation process (S430) for 65 minutes, and then the CNT dispersion solution is filtered through an aluminum anodized membrane (AAO membrane) to pass only distilled water. Becomes stacked form (S440).

As shown in FIG. 5, the CNTs hung on the AAO membrane are strongly entangled with each other by van der Waals forces, and then, when the AAO membrane is dissolved using sodium hydroxide solution (NaOH), a network of CNTs is formed. It becomes (S450). At this time, the CNT thin film is immersed in isopropyl alcohol solution (IPA) by performing a densification process, and then dried by removing the CNT thin film so that each CNT is more densely entangled. When the surface of the CNT thin film 111 subjected to the densification process is analyzed with a scanning electron microscope, the CNTs form a network and can be seen to be densely entangled.

The CNT thin film 111 thus formed is cut into polygons such as triangles or squares, and then compressed into a flat plate to form an electron emission source, and a CNT emitter ( 110 is formed (S460). At this time, the CNT emitter 110 performs a carbonization process to operate more stably. In the carbonization process, when a CNT thin film 111 is coated with a polymer organic material, that is, a carbon-based material, and heat-treated at a high temperature and a vacuum, a carbon-based material is inserted between the CNTs in the network of CNTs to fill a void. This process can enhance the binding between the CNTs.

As shown in FIG. 7, the CNT thin film may be manufactured as a CNT emitter 110 having a point shape or a line shape according to a cutting method. When the CNT thin film 111 is cut into a fan or triangle shape, In the case of cutting into a rectangular shape, the upper part may be in the shape of converging to a line.

In addition, as shown in FIG. 8, when the plurality of CNT thin films 111 are processed into a point shape or a line shape, the CNT emitters 110 arranged in the array are inserted between the cathode electrodes 101 to form CNT emitters. The emitter may generate an electron beam having a point shape or a plane shape in various sizes according to the cutting method of the CNT thin film.

FIG. 9 is a flowchart illustrating a method of forming the gate electrode of FIG. 3, and FIG. 10 is a diagram illustrating a process of transferring the graphene thin film onto the metal electrode in FIG. 9, and FIG. 11 is an array arranged by FIG. 9. It is a figure explaining an example of a gate electrode.

9 to 11, a method of manufacturing a gate electrode may be obtained by synthesizing graphene by thermal CVD (chemical vapor deposition) on a copper foil, and then using a spin coater on a graphene (polymethylmethacrylate). , PMMA) (①).

Then, the copper foil is etched using the copper etching solution (②), and the remaining copper foil is removed by washing in distilled water (③). By repeating this process several times, several layers of graphene thin films are stacked, and one or more layers of graphene thin films are transferred onto the metal electrode as shown in FIG. 10 (④, ⑤, ⑥, and ⑦). . In this case, the metal electrode may be a metal plate having a circular hole, or a metal mesh such as a square, a circle, a hexagon, or the like.

Oh, yes pins thin film 131 after the transfer pins on the metal electrode thin film 131 was dipped in a dry, remove the acetone solution to remove the methacrylic resin remaining on, in a vacuum environment of less than 10 ^-5 Torr 300 By proceeding the heat treatment at ℃ it can be produced a gate electrode 130 to which the graphene thin film is transferred stably (⑧, ⑨). In addition, as shown in FIG. 11, the gate electrodes 130 may be arrayed and manufactured as a large area gate electrode capable of matrix control. In this case, the gate electrode may be manufactured by inserting one or more layers of graphene thin films between two metal electrodes.

The gate electrode manufactured by using at least one layer of graphene thin film may have an electric field uniformly applied to improve the linearity of the electron beam, and since graphene is an atomic scale mesh, the transmission efficiency of the electron beam may be increased. Graphene having excellent heat transfer efficiency can effectively dissipate heat generated by electron beam collision, thereby improving thermal stability of the gate electrode itself.

Meanwhile, the focusing lens may be manufactured by transferring one or more layers of graphene to a metal plate or a metal mesh like the gate electrode, or may be manufactured by sandwiching at least one graphene thin film on two focusing lenses.

As described above, the X-ray source apparatus and the control method thereof according to an embodiment of the present invention may use a cold cathode electron emission source using a CNT thin film, and irradiate a X-ray in the form of a surface light source to a subject through a transmissive anode electrode. By driving the electron beam generated from the CNT emitter by matrix control, the optimized X-ray dose may be irradiated for each position of the subject.

The method for manufacturing an X-ray source and the matrix control method implemented by the X-ray source apparatus according to the embodiments of the present invention described above are in the form of a recording medium including instructions executable by a computer, such as a program module executed by a computer. It can also be implemented. Such recording media includes computer readable media, and computer readable media can be any available media that can be accessed by a computer and includes both volatile and nonvolatile media, removable and non-removable media. In addition, computer readable media includes computer storage media, which are volatile and nonvolatile implemented in any method or technology for storage of information such as computer readable instructions, data structures, program modules or other data. Both removable and non-removable media.

The above description of the present invention is intended for illustration, and a person of ordinary skill in the art may understand that the present invention can be easily modified in other specific forms without changing the technical spirit or essential features of the present invention. will be. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

In addition, while the methods and systems of the present invention have been described in connection with specific embodiments, some or all of their components or operations may be implemented using a computer system having a general purpose hardware architecture.

The scope of the present invention is shown by the following claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included in the scope of the present invention. .

100: X-ray source device
101 cathode electrode 110 emitter
120: anode electrode 130: gate electrode
140: focusing lens 150: electron beam collimator
160: control module

Claims (13)

An X-ray source device for emitting X-rays to a subject,
An emitter formed on the top surface of the cathode electrode for electron emission;
An anode formed to be spaced apart from the cathode by a predetermined distance;
A gate electrode formed between the emitter and the anode electrode and formed of a metal electrode having at least one opening formed therein;
A focusing lens positioned between the gate electrode and the anode electrode and focusing an electron beam emitted from the emitter to the anode electrode; And
It includes a control module for controlling the X-ray dose for each position of the subject by performing a two-dimensional matrix control for the emitter and the gate electrode,
The emitters are arrayed in a first direction, the gate electrodes are arrayed in a second direction, the first direction and the second direction intersect vertically,
And the control module determines the X-ray dose according to the size of the array of arrays. The method of claim 1,
The control module is to perform a two-dimensional matrix control for controlling the generation density of the electron beam for each portion necessary for the human body by adjusting the voltage magnitude between the emitter and the gate electrode. The method of claim 1,
And an electron beam collimator further positioned between the focusing lens and the anode electrode to direct the electron beam passing through the focusing lens to focus on the anode electrode. The method of claim 1,
The emitter is manufactured using a CNT thin film manufactured by vacuum filtration,
The CNT thin film is an X-ray source apparatus manufactured by a densification process using an alcohol solution or a carbonization process in which heat treatment is performed at a high temperature and a vacuum state after coating a polymer organic material. The method of claim 4, wherein
The emitter is manufactured by processing the CNT thin film in the form of points (points) or lines (line),
Cutting at least one CNT thin film into a polygon and then compressing the cut polygonal CNT thin film into a flat plate and inserting it between the cathode electrodes. The method of claim 1,
The gate electrode may be formed using a metal plate or polygonal metal mesh having a hole as a metal electrode, a graphene thin film is attached to an upper portion of the metal electrode, and at least one graphene between two metal electrodes. X-ray source device that is formed in any one of the form of a thin film inserted. The method of claim 1,
The focusing lens is manufactured in the form of a hole, or at least one graphene thin film is manufactured in the form of being transferred, X-ray source device. The method of claim 1,
The emitter is an X-ray source device that is manufactured using any one of the CNT thin film, graphene thin film or nano carbon material thin film. The method of claim 1,
The X-ray source apparatus is to sequentially arrange the emitter, the gate electrode, the focusing lens, the collimator, the anode electrode in a vacuum container formed of any one of a glass material, a ceramic material or a metal material. In the control method of the X-ray source device for emitting X-rays to the subject,
In the X-ray source device, emitters are arrayed in a first direction on a top surface of a cathode electrode, and gate electrodes are arrayed in a second direction perpendicular to the first direction between the emitter and the anode electrode. ,
And controlling X-ray dose for each position of the subject by performing 2-dimensional matrix control on the arrayed emitter and the gate electrode.
The X-ray dose for each position of the subject is determined according to the size of the array array, the control method of the X-ray source device. The method of claim 10,
The control module performs a two-dimensional matrix control to adjust the generation density of the electron beam for each region necessary for the human body by adjusting the voltage magnitude between the emitter and the gate electrode. The method of claim 10,
The emitter is a point-type or line-type electron emission produced by cutting any one of the CNT thin film, graphene thin film or nano-carbon material thin film in a polygonal shape and then press the cut polygon to a flat plate That is, the control method of the X-ray source device. The method of claim 10,
The X-ray source device is to sequentially arrange the emitter, gate electrode, focusing lens, collimator, anode in a vacuum container formed of any one of a glass material, a ceramic material or a metal material, Control method.

Images