KR20190110883A - Pipeline module for storaging ultra high purity gas and method of manufactruing the same - Google Patents

Abstract

Disclosed are a pipeline module for storing gas with an ultrahigh purity and a method of manufacturing the same, which are designed to be able to store liquefied gas (7N), which is stored in an ultra-large first gas storage tank, as gas with an ultrahigh purity (6N) in a gaseous status in a small-to-medium-sized second gas storage tank. According to the present invention, the pipeline module for storing gas with an ultrahigh purity aims to transfer the liquefied gas stored in the first gas storage tank into the second gas storage tank, which has an accommodation space smaller than that of the first gas storage tank, keeping the ultrahigh purity having a concentration of 99.9999% or higher in the gaseous status. The pipeline module comprises: one or more pipelines, whose one end is connected to the first gas storage tank, and whose other end is connected to the second gas storage tank; one or more valves installed in the pipeline to control a supply volume of the gas passing through the pipelines; fastening members which connect the pipelines and connect the pipelines to the valves; and graphene-coated layers formed on one or more surfaces of the pipelines, valves, and fastening members.

Description

PIPELINE MODULE FOR STORAGING ULTRA HIGH PURITY GAS AND METHOD OF MANUFACTRUING THE SAME

The present invention relates to a pipeline module and a method for manufacturing the same. More specifically, the liquefied gas (7N) stored in the first large gas storage tank of the ultra-high purity gas (6N) in the gaseous state to the second small and medium gas storage tank The present invention relates to a pipeline module for ultra-high purity gas storage designed to be able to store a) and a method of manufacturing the same.

As the market for semiconductors, liquid crystal displays (LCDs), and organic light emitting diodes (OLEDs) grows, the technology becomes more intensively integrated, and the amount of ultra high purity liquefied gas used in the above process also increases in large quantities. The trend is. In addition, the demand for ultra-pure liquefied gas is increasing in various fields such as optical fiber, marine, medical, nonferrous metal, steel, welding, and aerospace.

Recently, in the fields of semiconductors, LCDs, OLEDs, and the like, the micropattern spacing of wires is rapidly decreasing from micro to nano units for the design of microcircuits, so that ultra-pure gas is stably stored and transported to realize micropatterns. It was necessary.

However, when a liquefied gas having a concentration of 99.99999% (7N) is transferred to a small and medium gas storage tank and stored in an ultra-large gas storage tank, other gases such as oxygen, nitrogen, and argon may be mixed to lower the purity of the gas. Due to this, there was a difficulty in supplying ultra high purity gas of more than 99.9999% (6N) required by the industry.

Related prior arts are Korean Patent Laid-Open Publication No. 10-2015-0036704 (published on April 7, 2015), which discloses a reactor system and a method for producing polycrystalline silicon using the same.

An object of the present invention is to provide an ultra high purity gas storage designed to store gaseous ultra high purity gas 6N stored in a second gas storage tank of liquefied gas 7N stored in a large first gas storage tank. To provide a pipeline module and a method of manufacturing the same.

Pipeline module for ultra-high purity gas storage according to an embodiment of the present invention for achieving the above object is a second gas storage tank having a receiving space smaller than the first gas storage tank for the liquefied gas stored in the first gas storage tank A pipeline module for transporting while maintaining an ultra high purity state having a concentration of at least 99.9999% of a gaseous state, wherein at least one pipe is connected to the first gas storage tank and the other end is connected to the second gas storage tank. line; At least one valve is installed in the pipeline, the valve for controlling the supply amount of the gas passing through the pipeline; A fastening member connecting the pipelines to each other and the pipeline and the valve; And a graphene coating layer coated on at least one surface of the pipeline, the valve, and the fastening member.

Pipeline module manufacturing method for ultra-high purity gas storage according to an embodiment of the present invention for achieving the above object comprises the steps of: (a) coating a graphene solution on the inner surface of the pipeline module component by spray coating; And (b) performing a post treatment to cure the pipeline module component coated with the graphene solution by heat treatment or ultraviolet irradiation to form a graphene coating layer.

The pipeline module for ultra-high purity gas storage according to the present invention and a method for manufacturing the ultra-high purity liquefied gas having a concentration of 99.99999% (7N) stored in the first ultra-large gas storage tank is another gas storage tank of small and medium-sized 2 The internal gas of the pipeline module is leaked by coating the graphene on the inner surface of the pipeline module used as a transport means for storing in the gas storage tank and post-treatment to form a graphene coating layer, By blocking the inflow of impurities such as oxygen, nitrogen, argon, etc. from the outside, it is possible to store ultra-high purity gas having a concentration of 99.9999% (6N) or more in the second gas storage tank.

1 is a schematic diagram showing a pipeline module for ultra-high purity gas storage according to an embodiment of the present invention.
Figure 2 is an enlarged perspective view of the cut surface of the pipeline of Figure 1;
Figure 3 is a process flow diagram showing a pipeline module manufacturing method for ultra-high purity gas storage according to an embodiment of the present invention.

Advantages and features of the present invention, and methods for achieving them will be apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various forms, and only the present embodiments are intended to complete the disclosure of the present invention, and the general knowledge in the art to which the present invention pertains. It is provided to fully convey the scope of the invention to those skilled in the art, and the present invention is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Hereinafter, a pipeline module for ultra-high purity gas storage and a manufacturing method thereof according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic diagram showing a pipeline module for ultra-high purity gas storage according to an embodiment of the present invention, Figure 2 is an enlarged perspective view showing a cut surface of the pipeline of FIG.

1 and 2, the pipeline module 100 for ultra-high purity gas storage according to an embodiment of the present invention uses liquefied gas stored in the first gas storage tank 10 as compared with the first gas storage tank 10. The small second gas storage tank 20 is designed to be transported while maintaining an ultrapure state having a concentration of at least 99.9999% (6N) in the gaseous state.

The first gas storage tank 10 may be a large gas storage tank, and the second gas storage tank 20 may be a small and medium gas storage tank. The ultra-high purity liquefied gas having a concentration of 99.99999% (7N) is stored in the first gas storage tank 10, and the liquefied gas may include one or more selected from oxygen, hydrogen, argon, nitrogen, helium, and the like. have. Although not shown in the drawings, the pump for pumping the ultra-pure liquefied gas having a concentration of 99.99999% (7N) stored inside the first gas storage tank 10 is further included in the discharge of the first gas storage tank 10. It may be installed.

To this end, the pipeline module 100 for ultra-high purity gas storage according to an embodiment of the present invention includes a pipeline 120, a valve 140, a fastening member 160 and a graphene coating layer 180.

One end of the pipeline 120 is connected to the first gas storage tank 10, and the other end thereof is connected to the second gas storage tank 20. At least one of the pipelines 120 may be coupled by a butt welding method or a joint coupling method by the fastening member 160.

In this case, the pipeline 120 is a passage through which the liquefied gas having a concentration of 99.99999% (7N) stored in the first gas storage tank 10 is stored in the second gas storage tank 20. A metal material having excellent corrosion resistance can be used, and it is preferable to use a SUS material among the metal materials.

At least one valve 140 is installed in the pipeline 120 and is mounted to adjust the supply amount of ultra-high purity liquefied gas having a concentration of 99.99999% (7N) passing through the interior of the pipeline 120. .

The fastening member 160 serves to connect the pipelines 120 to each other and to the pipeline 120 and the valve 160. The fastening member 160 may include a fastening screw, a fastening nut, an O-ring, and the like. At this time, it is preferable that the fastening member 160 uses a SUS material having excellent corrosion resistance similarly to the pipeline 120 and the valve 140.

As shown in FIG. 2, the graphene coating layer 180 is coated on at least one surface of the pipeline 120, the valve 140, and the fastening member 160. More preferably, the graphene coating layer 180 is preferably coated on the pipeline 120, the valve 140, and the fastening member 160, respectively. In this case, the graphene coating layer 180 is preferably coated to cover the entire inner diameter surface of the pipeline 120 through which the gas passes.

That is, it is preferable that the graphene coating layer 180 is formed on the entire inner diameter surface of the pipeline 120 so that the gas passing into the pipeline 120 does not directly contact the pipeline 120. Accordingly, since the pipeline 120 may be protected by the graphene coating layer 180 through which oxygen and nitrogen are difficult to penetrate, ultra-high purity gas passing through the inside of the pipeline 120 is leaked to the outside, or The external gas is blocked from flowing into the pipeline 120, so that it is possible to transfer the ultra high purity gas without degrading the purity.

In other words, in the present invention, the ultra-high purity liquefied gas having a concentration of 99.99999% (7N) stored in the first large gas storage tank 10 is stored in the second gas storage tank 20 of small and medium size, which is another gas storage tank. Coating and post-treatment of graphene so as to block the gas inside the pipeline module 100 used as a transfer means for preventing or to introduce impurities such as oxygen, nitrogen, argon from the outside The pin coating layer 180 was formed. At this time, in addition to graphene, it can be considered for Teflon, carbon, silicon, etc., but it was confirmed that it is not preferable because the hardness and surface roughness is not as good as graphene.

In particular, in the present invention, when graphene is spray-coated on at least one or more surfaces of the pipeline 120, the valve 140, and the fastening member 160, and the post-treatment process is performed under optimum conditions, a hardness of 2H or more and 10 nm are performed. It was confirmed that the graphene coating layer 180 having the following average surface roughness is formed.

Table 1 below shows the comparison of physical properties according to the preparation method of graphene.

TABLE 1

As shown in Table 1, the graphene may be prepared by any one of thermal-chemical vapor deposition (CVD), SiC epitaxy, graphite oxidation preparation, and graphite intercalation. Among them, it is more preferable to use the one produced by the graphite interlayer compound peeling method which is low in production cost and easy in post-synthesis.

Such graphene has a high hardness and has flexibility so that no defects such as cracks occur. In addition, since graphene has a hexagonal structure that is difficult to penetrate oxygen, nitrogen, etc., it can exert a long lifespan effect and prevents heat transfer, and thus has excellent resistance to temperature and humidity.

The graphene coating layer 180 preferably has a thickness of 0.1 ~ 10mm. When the thickness of the graphene coating layer 180 is less than 0.1 mm, the thickness of the graphene coating layer 180 is too thin. Therefore, the external gas penetrates into the pipeline module component to supply the ultra-high purity liquefied gas supplied to the pipeline module component. There is a risk of deterioration. On the contrary, when the thickness of the graphene coating layer 180 exceeds 10mm, the graphene coating layer 180 may cause an increase in cost due to an increase in the amount of graphene without any further effect.

The pipeline module for ultra-high purity gas storage according to the embodiment of the present invention described above is a medium-sized medium that is a high-purity liquefied gas having a concentration of 99.99999% (7N) stored in the first ultra-large gas storage tank. The internal gas of the pipeline module is leaked by coating graphene on the inner surface of the pipeline module used as a transfer means for storing in the second gas storage tank and post-treatment to form a graphene coating layer. By blocking the introduction of impurities such as oxygen, nitrogen, and argon from the outside, ultra-high purity gas having a concentration of 99.9999% (6N) or more can be stored in the second gas storage tank.

Hereinafter, a method for manufacturing a pipeline module for ultra high purity gas storage according to an embodiment of the present invention will be described with reference to the accompanying drawings.

Figure 3 is a process flow chart showing a pipeline module manufacturing method for ultra-high purity gas storage according to an embodiment of the present invention.

As shown in Figure 3, the pipeline module manufacturing method for ultra-high purity gas storage according to an embodiment of the present invention includes a coating step (S110), after-treatment step (S120) and assembly step (S130).

coating

In the coating step (S110), the graphene solution is coated on the inner surface of the pipeline module component by spray coating.

In this step, the spray coating is preferably carried out at a spray pressure of 3 ~ 10MPa at 400 ~ 700 ℃.

In spray coating, when the coating temperature is less than 400 ℃ or the injection pressure is less than 3MPa, the temperature is low and the injection pressure is insufficient may cause coating failure. On the contrary, in the case of spray coating, when the coating temperature is higher than 700 ° C. or the injection pressure is higher than 10 MPa, it is difficult to control the coating amount of the graphene material, so that it may be difficult to secure the coating thickness uniformly.

After treatment

In the post-treatment step (S120), a graphene coating layer is formed by performing post-treatment of the pipeline module component coated with the graphene solution by heat treatment and ultraviolet irradiation.

In this step, the heat treatment is preferably carried out for 1 to 30 minutes at 50 ~ 150 ℃. If the heat treatment temperature is less than 50 ° C or the heat treatment time is less than 1 minute, the graphene solution may not be sufficiently cured and may be peeled off from the pipeline module component. On the contrary, when the heat treatment temperature exceeds 150 ° C., or when the heat treatment time exceeds 30 minutes, the graphene coating layer may be cracked due to over-curing and cracking may occur, thereby degrading adhesion.

In addition, the ultraviolet irradiation is preferably carried out for 10 ~ 300sec in the light amount condition of 3 ~ 7 J / ㎠. In this case, the light source for irradiating ultraviolet light may be selected from metal halide lamp, medium pressure mercury lamp, high pressure mercury lamp and the like.

When the amount of ultraviolet irradiation light is less than 3 J / cm 2 or when the ultraviolet irradiation time is less than 10 sec, it is difficult to properly exhibit an effect of improving hardness and surface roughness. On the contrary, when the amount of UV irradiation light exceeds 7 J / cm 2, or when the UV irradiation time exceeds 300 sec, it may act as a factor of increasing the manufacturing cost and time without further increasing the effect, which is not economical.

Thus, by performing post-treatment at optimum conditions after spray coating, the graphene coating layer can have a hardness of 2H or more and an average surface roughness of 10 nm or less.

Assembly

In the assembling step (S130), assembling between the pipeline module components in which the graphene coating layer is formed.

In the above, the pipeline module manufacturing method for ultra-high purity gas storage according to an embodiment of the present invention can be terminated.

As described above, the pipeline module manufacturing method for ultra-high purity gas storage according to an embodiment of the present invention is graphene on the inner surface of the pipeline module component (pipeline, valve, fastening member) in direct contact with the gas By coating, and performing a post-treatment to be cured by heat treatment and ultraviolet irradiation to form a graphene coating layer, the ultra-high purity liquefied gas having a concentration of 99.99999% (7N) stored in the first large gas storage tank of small and medium Inflow of impurities during the transfer to the second gas storage tank is essentially blocked, so that the ultra-high purity gas having a concentration of 99.9999% (6N) or more can be stored in the second gas storage tank.

Example

Hereinafter, the configuration and operation of the present invention through the preferred embodiment of the present invention will be described in more detail. However, this is presented as a preferred example of the present invention and in no sense can be construed as limiting the present invention.

Details that are not described herein will be omitted since those skilled in the art can sufficiently infer technically.

Table 2 shows the physical property test results for the pipeline module according to Example 1 and Comparative Examples 1 to 3. At this time, the pipeline module according to Example 1 and Comparative Examples 1 to 3 is spray coating the coating material shown in Table 2 to the pipeline with a thickness of 5mm, heat-treated at 120 ℃ for 20 minutes to prepare a coating layer, respectively, The gas filling concentration after storing the first large gas storage tank to the second large gas storage tank is measured.

TABLE 2

As shown in Table 2, as shown in Example 1, when using the graphene as a coating material it was confirmed that it can be used for ultra-high purity by showing a gas filling concentration of 99.9999%.

In addition, as in Example 1, graphene is a coating material capable of storing ultra-high purity gas, and unlike Comparative Examples 1 to 3, graphene has a high hardness of 2H and shows that the average surface roughness shows a considerably low value of 8 nm. It can be seen that the change rate for temperature and humidity is also very low.

Although the above has been described with reference to the embodiments of the present invention, various changes and modifications can be made at the level of those skilled in the art. Such changes and modifications can be said to belong to the present invention without departing from the scope of the technical idea provided by the present invention. Therefore, the scope of the present invention will be determined by the claims described below.

100: pipeline module
120: pipeline
140: valve
160: fastening member
180: graphene coating layer
S110: Coating Step
S120: post-processing step
S130: Assembly Step

Claims (10)

A pipeline module for transferring liquefied gas stored in a first gas storage tank to a second gas storage tank having a smaller receiving space than the first gas storage tank while maintaining an ultrapure state having a concentration of 99.9999% or more of a gaseous state. ,
At least one pipeline having one end connected to the first gas storage tank and the other end connected to the second gas storage tank;
At least one valve is installed in the pipeline, the valve for controlling the supply amount of the gas passing through the pipeline;
A fastening member connecting the pipelines to each other and the pipeline and the valve; And
A graphene coating layer coated on at least one surface of the pipeline, valve and fastening member;
Pipeline module for ultra-high purity gas storage comprising a.
The method of claim 1,
Each of the pipelines, valves and fastening members
Pipeline module for ultra-high purity gas storage, characterized in that the SUS material.
The method of claim 1,
The graphene coating layer is
Pipeline module for ultra-high purity gas storage, characterized in that having a thickness of 0.1 ~ 10mm.
The method of claim 1,
The graphene coating layer is
A pipeline module for ultra-high purity gas storage, characterized by having a hardness of 2H or more and an average surface roughness of 10nm or less.
(a) coating the graphene solution on the inner surface of the pipeline module component by spray coating; And
(b) performing a post-treatment of the pipeline module component coated with the graphene solution by heat treatment and ultraviolet irradiation to form a graphene coating layer;
Pipeline module manufacturing method for ultra-high purity gas storage comprising a.
The method of claim 5,
In the step (a),
The spray coating
Pipeline module manufacturing method for ultra-high purity gas storage, characterized in that carried out at 400 ~ 700 ℃ 3 to 10MPa injection pressure conditions.
The method of claim 5,
In step (b),
The heat treatment is
Pipeline module manufacturing method for ultra-high purity gas storage, characterized in that carried out for 1 to 30 minutes at 50 ~ 150 ℃.
The method of claim 5,
The ultraviolet irradiation
Pipeline module manufacturing method for ultra-high purity gas storage, characterized in that carried out under a light quantity condition of 3 ~ 7 J / ㎠.
The method of claim 5,
After step (b),
The graphene coating layer is
A pipeline module manufacturing method for ultra-high purity gas storage, characterized by having a hardness of 2H or more and an average surface roughness of 10nm or less.
The method of claim 5,
After step (b),
(C) the pipeline module manufacturing method for ultra-high purity gas storage, characterized in that it further comprises the step of assembling the pipeline module components formed with the graphene coating layer.

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