KR20190081120A - Antistatic composition - Google Patents

Abstract

The present invention relates to an anti-static paint composition. The anti-static paint composition comprises: a main material including a fluoroolefin copolymer, an acrylic resin, titanium dioxide and an anti-static agent; and a curing agent including polyisocyanate and an organic solvent, thereby providing a paint having excellent chemical resistance and anti-static properties.

Description

ANTISTATIC COMPOSITION [0001]

The present invention relates to an antistatic coating composition.

In general, a process for manufacturing a semiconductor material is subjected to a process such as wafer fabrication-> oxidation-> photo process-> etching process-> stripping, cleaning process-> diffusion-> deposition-> polishing. At this time, since silicon (Si) is used for wafer fabrication, hydrofluoric acid and sulfuric acid are used in a photo process or an etching process.

Therefore, in the manufacturing and processing processes of liquid crystal display (LCD) and semiconductor, the surface of the manufacturing equipment is protected by coating the equipment for the purpose of aging by chemicals, prevention of contamination, and prevention of exposure of metallic materials. Conventionally, acryl urethane coatings and powder coatings are frequently used for surface protection purposes, and Korean Patent Registration No. 10-1468466 discloses a coating composition that can protect the surface.

However, since general acrylic urethane coatings and powder coatings are poor in acid resistance, the coating film surface is eroded slightly as the time elapses in the manufacture of semiconductors or LCDs which are subjected to a cleaning process with hydrofluoric acid or sulfuric acid. A situation has arisen.

On the other hand, precision electronic products such as semiconductor devices and LCDs are produced in a clean room from which fine dust and germs are removed. Fine dust and germs also have a big impact, so to increase the quality and yield of the product, fine dust must be removed from the air and kept clean.

If a portion of the coated film is eroded by the cleaning process and the metal portion is exposed, a trace amount of the metal powder may become dust in the air, which may adversely affect the yield and quality of the product.

In addition, since the basic skeleton of the coating is constituted like a plastic, the electrical insulation is high and there is a possibility of generating static electricity when rubbing. In general, an industrial clean room is equipped with a dust removal system by the circulation of outside air and internal air. Therefore, when static electricity is generated from the paint surface, the dust removal system may be defective .

In order to solve such a problem, various antistatic treatments are applied to the coated surface. As an attempt to suppress the static charge, the surface of the coated film is hydrophilized to absorb moisture, thereby controlling static electricity or applying a surface conductive material, A method of controlling static electricity is used.

However, conductive carbon has advantages in that it can be used irrespective of humidity, while it has a disadvantage in that it has a limited color, and conductive polymers (for example, polyaniline, polypyrrole, poly 3,4- Ethylene dioxythiophene) can be used regardless of humidity, but its use is limited due to its high price. And, nanoparticles (for example, ITO, ATO, silver) can be used irrespective of humidity, but they are expensive as the conductive polymer.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a coating material excellent in chemical resistance.

Another object of the present invention is to provide a paint excellent in antistatic property.

The present invention has been made in view of the above problems, and it is an object of the present invention to provide an apparatus and method for controlling the same.

To achieve this object, an antistatic paint composition according to one aspect of the present invention includes a fluoroolefin copolymer, an acrylic resin, a titanium dioxide and an antistatic agent; And a curing agent comprising a polyisocyanate and an organic solvent.

The subject further comprises 50 to 60 parts by weight of the fluoroolefin copolymer, 5 to 10 parts by weight of the acrylic resin, 5 to 10 parts by weight of the acrylic resin, Wherein the titanium dioxide is 20 to 30 parts by weight, the antistatic agent is 2 to 10 parts by weight, the dispersant is 1 to 5 parts by weight, the surface modifier is 0.3 to 0.5 parts by weight, the ester solvent is 5 to 15 parts by weight, The ketone-based solvent may be 5 to 15 parts by weight, and the aromatic solvent may be 5 to 15 parts by weight.

In addition, in the curing agent, the organic solvent may be a ketone-based solvent and an aromatic solvent, the polyisocyanate may be 60 to 80 parts by weight, the ketone-based solvent may be 10 to 20 parts by weight, and the aromatic solvent may be 10 to 20 parts by weight .

Also, the fluoroolefin copolymer is a copolymer of a fluorine compound and an alkyl vinyl ether compound, and the fluorine compound is at least one of vinyl fluoride, vinylidene fluoride, chlorotrifluoroethylene, tetrafluoroethylene, and hexafluoropropylene, or And the alkyl vinyl ether compound may be at least one of methyl vinyl ether, ethyl vinyl ether, butyl vinyl ether, and cyclohexyl vinyl ether.

The acrylic resin may be prepared as hydroxymethyl methacrylate.

In addition, the antistatic agent may be provided as a quaternary ammonium salt.

In addition, the surface modifier may be provided with a polyether-modified polydimethylsiloxane.

The solution of the above-mentioned problems is merely illustrative and should not be construed as limiting the present invention. In addition to the exemplary embodiments described above, there may be additional embodiments described in the Detailed Description of the Invention.

As described above, the present invention has the following effects.

First, the present invention is excellent in chemical resistance and weatherability such as acid resistance and alkali resistance, so that it can be used as a paint for protecting equipment which is vulnerable to acid and alkali. That is, when the coated film is formed on the adherend using the present invention, it has an excellent effect in preventing erosion or aging that may occur in the coating film in a washing environment using an acid or an alkaline solution.

Therefore, the present invention can be particularly useful as a surface protection application for semiconductor equipment, medical equipment, and the like.

Second, since the quaternary ammonium salt having a specific structure is used as an antistatic agent, the present invention is advantageous in that it is relatively inexpensive as compared with an expensive antistatic agent and has an excellent antistatic property to an adherend, .

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the claims.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The preferred embodiments of the present invention will now be described in more detail with reference to the following detailed description taken in conjunction with the accompanying drawings, in which: FIG.

In the following examples, the singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise.

In the following embodiments, terms such as inclusive or having mean that a feature or element described in the specification is present, and do not exclude the possibility that one or more other features or elements are added in advance.

In the following embodiments, when a part of a film, an area, a component or the like is on or on another part, not only the case where the part is directly on the other part but also another film, area, And the like.

The term "about," as used in reference to figures throughout the specification, when used in the figures or in close proximity to the numerical values when both manufacturing and material tolerances inherent in the stated sense are presented, Absolute numbers are used to prevent unauthorized exploitation by unauthorized intruders of the mentioned disclosure.

The antistatic coating composition according to an embodiment of the present invention may include a main component and a curing agent. First, the subject may include a fluoroolefin copolymer, an acrylic resin, titanium dioxide, and an antistatic agent.

In one embodiment, the fluoroolefin copolymer may be provided as a copolymer of a fluorine compound and an alkyl vinyl ether compound. Here, the fluorine compound is at least one of vinyl fluoride, vinylidene fluoride, chlorotrifluoroethylene, tetrafluoroethylene and hexafluoropropylene or a copolymer thereof, and the alkyl vinyl ether compound is at least one selected from the group consisting of methyl vinyl ether, ethyl vinyl ether, Butyl vinyl ether, and cyclohexyl vinyl ether.

The fluorine molecular structure in the fluoroolefin copolymer according to an embodiment ensures the durability, weatherability and chemical stability of the copolymer, and the vinyl ether structure can ensure transparency, gloss and elasticity of the coating.

The liquid coating formulation of the antistatic coating composition according to one embodiment can be cured at a moderately elevated temperature at room or ambient temperature and the main component of the liquid coating formulation can be applied as a polymer, organic solvent soluble or cross-linkable amorphous fluoropolymer .

It is preferable to use at least one of chlorotrifluoroethylene and tetrafluoroethylene among the fluorine compounds described above from the viewpoint of excellent dispersibility of the pigment, weather resistance of the paint, copolymerization and chemical resistance.

(Central Glass Company Limited), Fluonate (DIC Corporation), Zeffle (Daikin Industries Inc.), Unidyne (Dow Chemical Company), etc. Examples of commercially available fluoroolefin copolymers in one embodiment are Lumipulon (Asahi Glass Co.) (Daikin Industries), and the like.

The copolymerization between the hydroxyl group of the fluorine compound and the alkyl vinyl ether compound contributes to the solubility of the copolymer, the compatibility with the pigment, the crosslinking reactivity, the adhesion to the substrate, the hardness and the flexibility.

In another embodiment, the fluorine compound may be applied as a terpolymer. For example, the fluorine compound may be applied as a copolymer of vinylidene fluoride, tetrafluoroethylene, and hexafluoropropylene. When the fluorine compound is applied as a ternary copolymer of vinylidene fluoride, tetrafluoroethylene and hexafluoropropylene, it has excellent properties such as low processing temperature, ability to bond to elastomers and hydrocarbon-based plastics, flexibility and optical transparency There are advantages.

In one embodiment, the fluoroolefin copolymer may be applied in an amount of 50 to 60 parts by weight. As a specific example, the content of fluoroolefin copolymer is about 50 parts by weight, about 51 parts by weight, about 52 parts by weight, about 53 parts by weight, about 54 parts by weight, about 55 parts by weight, about 56 parts by weight, about 57 parts by weight , About 58 parts by weight, about 59 parts by weight or about 60 parts by weight. Further, the content of the fluoroolefin copolymer may be in the range of at least one of the above values and in one or less of the above values.

For example, the fluoroolefin copolymer content range is from about 50 parts by weight to about 52 parts by weight, from about 52 parts by weight to about 54 parts by weight, from about 54 parts by weight to about 56 parts by weight, from about 56 parts by weight to about 58 Parts by weight, about 58 parts by weight to about 60 parts by weight, or about 50 parts by weight to about 60 parts by weight. The fluoroolefin copolymer according to one embodiment can maintain excellent chemical resistance and mechanical properties of the coating film within the above range.

If the content of the fluoroolefin copolymer is less than 50 parts by weight, the chemical resistance may be deteriorated. If the fluoroolefin copolymer content exceeds 60 parts by weight, the chemical resistance of the coating material is excellent, while the hardness, The content of the fluoroolefin copolymer is preferably within the above-mentioned range.

In one embodiment, the acrylic resin is a resin having good compatibility with the polyolefin copolymer, has a high glass transition temperature, and can contribute to improvement of the hardness and gloss of the coating film. Further, in one embodiment, the acrylic resin may be applied as hydroxymethyl methacrylate. Hydroxymethyl methacrylate can improve the glossiness of the coating film, which may occur when the fluoroolefin copolymer is used alone, and the problem of lowering mechanical properties (for example, hardness), and can improve workability.

Examples of commercially available hydroxymethyl methacrylates in one embodiment include, but are not limited to, the AA480 product (Aekyung Chemical).

At this time, as the amount of the acrylic resin increases in the entire antistatic coating composition, the acid resistance and the chemical resistance can be relatively lowered. Therefore, it is important to control the content of the acrylic resin, and the acrylic resin according to one embodiment is 5-10 parts by weight Can be applied. As a specific example, the content of the acrylic resin may be about 5 parts by weight, about 6 parts by weight, about 7 parts by weight, about 8 parts by weight, about 9 parts by weight or about 10 parts by weight. Further, the content of the acrylic resin may be in a range of at least one of the above values and one or less of the above values.

For example, the content of acrylic resin may range from about 5 parts by weight to about 7 parts by weight, from about 7 parts by weight to about 9 parts by weight, from about 5 parts by weight to about 8 parts by weight, from about 7 parts by weight to about 10 parts by weight, And may be provided in a range of about 5 parts by weight to about 10 parts by weight. The acrylic resin according to one embodiment can maintain the chemical resistance and surface hardness of the coating film at the excellent level within the above range.

If the content of the acrylic resin is less than 5 parts by weight, the gloss of the coating film may be lowered and the hardness may be lowered. If the amount exceeds 10 parts by weight, the acid resistance, chemical resistance and weather resistance may be lowered. The content is preferably applied within the above-mentioned range.

In one embodiment, titanium dioxide can impart opacity and weatherability to the coating film as a pigment. It is preferable to use rutile type titanium dioxide in terms of economy and dispersibility.

According to the practice, the antistatic coating composition may further contain optional pigments and fillers. For example, it may further include carbon black, perylene pigment, dye, mica, polyamide powder, boron nitride, zinc oxide, aluminum oxide, silica, ultraviolet absorber, corrosion inhibitor and desiccant.

Here, the pigment, ultraviolet absorber and corrosion inhibitor can impart opacity and weatherability to the coating film, and the color of the coating film can be changed through carbon black, pigment and dye. The mica may be contained in the coating composition to impart flame retardancy, and may further include boron nitride, aluminum nitride, aluminum oxide, and the like to improve the thermal conductivity.

Examples of commercially available titanium dioxide in one embodiment include, but are not limited to, R-996 (LOMON).

In one embodiment, the titanium dioxide can be applied in 20 to 30 parts by weight. As a specific example, the titanium dioxide may include about 20 parts by weight, about 21 parts by weight, about 22 parts by weight, about 23 parts by weight, about 24 parts by weight, about 25 parts by weight, about 26 parts by weight, about 27 parts by weight, about 28 parts by weight , About 29 parts by weight or about 30 parts by weight. Also, the content of titanium dioxide may be in the range of at least one of the above values and less than or equal to one of the above values.

For example, the content of titanium dioxide may range from about 20 parts by weight to about 23 parts by weight, from about 23 parts by weight to about 26 parts by weight, from about 26 parts by weight to about 29 parts by weight, from about 25 parts by weight to about 30 parts by weight, May range from about 20 parts by weight to about 30 parts by weight. Titanium dioxide according to one embodiment can impart excellent opacity and weatherability to the coating film within the above range.

If the content of titanium dioxide is less than 20 parts by weight, it is difficult to secure a certain level of opacity and weatherability of the coating film. If the amount of titanium dioxide exceeds 30 parts by weight, the dispersibility may deteriorate, Is preferably carried out within the above-mentioned range.

In one embodiment, the antistatic agent remains on the surface of the formed coated film and can impart antistatic properties to the coated film. For example, the antistatic agent remains on the surface of the coating film so as to satisfy the condition of 10 ⁶ to 10 ⁹ Ω / sq, which is a surface resistance range in which charging phenomenon hardly occurs, and the antistatic property of the coating film can be maintained.

In one embodiment, the antistatic agent can be applied as a quaternary ammonium salt. The quaternary ammonium salt may be a compound having at least one quaternary ammonium salt group in the molecule. Nonlimiting examples of such antistatic agents include alkyl trimethyl ammonium chloride, alkyldimethyl benzyl ammonium chloride, and the like.

In one embodiment, Li-100 (Lubrizol Co.) or the like may be used as a compound having a quaternary ammonium salt as a commercially available antistatic agent, but the present invention is not limited thereto.

The antistatic agent according to one embodiment may be applied in an amount of 2 to 10 parts by weight. As a specific example, the antistatic agent may be present in an amount of about 2 parts by weight, about 3 parts by weight, about 4 parts by weight, about 5 parts by weight, about 6 parts by weight, about 7 parts by weight, about 8 parts by weight, about 9 parts by weight, By weight. In addition, the content of the antistatic agent may be in the range of at least one of the above values and one or less of the above values.

For example, the antistatic agent may be present in an amount ranging from about 2 parts by weight to about 4 parts by weight, from about 4 parts by weight to about 6 parts by weight, from about 6 parts by weight to about 8 parts by weight, from about 8 parts by weight to about 10 parts by weight, About 2 parts by weight to about 10 parts by weight. The antistatic agent according to one embodiment can maintain the antistatic property at a good level in the above range.

If the content of the antistatic agent is less than 2 parts by weight, the surface resistance of the coating film becomes high and the antistatic property is deteriorated. When the amount exceeds 10 parts by weight, the degree of improvement of the antistatic property is insufficient, The content of the antistatic agent is preferably within the above-mentioned range.

Meanwhile, the subject matter according to one embodiment may further include a dispersant, a surface conditioner, an ester solvent, a ketone solvent, and an aromatic solvent.

In one embodiment, the dispersing agent prevents the agglomeration phenomenon among the particles to improve the workability of coating, and may be applied in an amount of 1 to 5 parts by weight. As a specific example, the content of the dispersing agent may be about 1 part by weight, about 2 parts by weight, about 3 parts by weight, about 4 parts by weight or about 5 parts by weight. In addition, the content of the dispersant may be in the range of at least one of the above values and not more than one of the above values.

For example, the range of the dispersant may range from about 1 part by weight to about 3 parts by weight, from about 3 parts by weight to about 5 parts by weight, or from about 1 part by weight to about 5 parts by weight. The dispersing agent according to one embodiment can maintain the dispersibility and painting workability at the excellent level within the above range.

If the content of the dispersing agent is less than 1 part by weight, aggregation phenomenon occurs between the particles. When the amount of the dispersing agent is more than 5 parts by weight, compatibility with the coating material may be poor and the overall coating film property may be deteriorated. It is preferable to be carried out within the range.

In one embodiment, the surface control agent can be used to improve appearance such as leveling property, gloss, slipperiness, etc. of the coating film surface by floating on the coating film surface to improve the difference in surface tension. Here, as the surface conditioner, a silicone type or a non-silicone type can be largely used. Non-limiting examples of the silicone type surface condition adjusting agent include silicone polyether acrylate and silicone acrylate.

It is preferable to use a polyether-modified polydimethylsiloxane as a surface modifier according to one embodiment in view of maintaining the surface properties of the coating film at a good level.

Also, in one embodiment, the surface modifier may be applied in an amount of 0.3 to 0.5 parts by weight. If the content of the surface modifier is less than 0.3 part by weight, appearance defects such as gloss and slipperiness of the coating film may be caused. On the other hand, if the content of the surface modifier exceeds 0.5 parts by weight, silicone may float on the surface of the material, It is preferable that the content of the surface modifier is within the above-mentioned range.

In one embodiment, the subject may include three different solvents of different types in order to improve coating workability and to maintain good physical properties of the coating. That is, examples of the solvents included in the subject include ester solvents, ketone solvents, and aromatic solvents.

In one embodiment, since the ester solvent is a low boiling point solvent, it is easy to control the evaporation rate of the solvent, so that the evaporation rate of the solvent can be controlled quickly, thereby contributing to the improvement of the curability and the overall physical properties (e.g., acid resistance, weather resistance, , Hardness, etc.) can be maintained at an excellent level.

Further, since the ketone solvent has a high dissolving power for the resin, it is possible to improve the leveling property and the paintability in the coating operation.

In addition, since aroma solvents do not ignite the odor during operation and are low in cost, they have high solubility in resin and can control the rate of solvent evaporation, so they can be used together with ester solvents and ketone solvents, It can be maintained at an excellent level.

Specifically, the ester solvent may be used in an amount of 5 to 15 parts by weight, and examples of the ester solvent include propylene glycol monomethyl ether acetate, ethyl acetate, n-butyl acetate, 3-methoxybutyl acetate, have.

The ketone solvent may be used in an amount of 5 to 15 parts by weight, and examples of the ketone solvent include methyl isobutyl ketone, methylamine ketone, diisobutyl ketone, and methyl ethyl ketone.

The aromatic solvent may be used in an amount of 5 to 15 parts by weight, and examples of the aromatic solvent include toluene, butyl cellosolve, xylene, and the like.

If the content of each solvent is less than 5 parts by weight, the workability may be deteriorated. If it exceeds 15 parts by weight, the appearance of the coating film may be lowered or the solvent evaporation may be insufficient during curing, The content of the branching agent is preferably within the above-mentioned range.

The base may further contain 1 to 5 parts by weight of each of an antifoaming agent, a leveling agent, a slip agent, a thickener, and a wax as additives.

Meanwhile, in one embodiment, the curing agent is added for curing the coating film, and reacts with hydroxyl groups present in the subject to cause urethane bonding, and the curing agent may include a polyisocyanate and an organic solvent.

In one embodiment, the polyisocyanate can be used as a crosslinking agent for the formation of a coating film. Non-limiting examples of the polyisocyanate include 4,4'-diphenylmethane diisocyanate, 2,4'-diphenylmethane diisocyanate, hexamethylene diisocyanate, 1,4'-cyclohexane diisocyanate, 4,4'- At least one selected from the group consisting of dicyclohexylmethane diisocyanate and isophorone diisocyanate. However, other known polyisocyanate types may be used.

Examples of commercially available polyisocyanates in one embodiment include, but are not limited to, Desmodur N3300, N3800 (Bayer), DN-980S (DIC), and TPA-100 (Asahi Kasei). The polyisocyanate is preferably used in the non-yellowing type HDI-Isocyanurate in order to improve the weatherability of the coating film and the drying speed upon curing.

In one embodiment, the polyisocyanate may be applied in an amount of 60 to 80 parts by weight. As a specific example, the polyisocyanate content is about 60 parts by weight, about 62 parts by weight, about 64 parts by weight, about 66 parts by weight, about 68 parts by weight, about 70 parts by weight, about 72 parts by weight, about 74 parts by weight, about 76 About 78 parts by weight, or about 80 parts by weight. Further, the content of the polyisocyanate may be in the range of at least one of the above values and one or less of the above values.

For example, the polyisocyanate content ranges from about 60 parts by weight to about 64 parts by weight, from about 65 parts by weight to about 70 parts by weight, from about 71 parts by weight to about 75 parts by weight, from about 76 parts by weight to about 80 parts by weight, May range from about 60 parts by weight to about 80 parts by weight. The polyisocyanate according to one embodiment can maintain the curing property of the coating film and the coating workability at the excellent level within the above range.

If the content of the polyisocyanate is less than 60 parts by weight, the cross-linking reaction between the subject and the polyisocyanate is insufficient and the curability is poor. If the content of the polyisocyanate exceeds 80 parts by weight, the production cost is increased and unreacted materials are generated, , The content of the polyisocyanate is preferably within the above-mentioned range.

The antistatic coating composition according to one embodiment may be applied as a two-pack type acrylic urethane composition having a molar ratio of hydroxyl groups and polyisocyanates in the fluoroolefin copolymer in the range of 1: 0.8 to 1.2 when the subject and the curing agent are mixed.

However, when a part of the polyisocyanate reacts with moisture in the air, the content of the polyisocyanate required for the urethane bonding reaction is insufficient, so that the reaction between the hydroxyl group and the polyisocyanate may not be smoothly performed. Therefore, the equivalent ratio between the hydroxyl group and the polyisocyanate is 1: 1.2 It is more preferable in terms of reactivity to control the content of the polyisocyanate.

When mixing the base and the curing agent, the mixing ratio of the base and the curing agent may be mixed in a weight ratio of 5 to 10: 1. If the mixing ratio between the main component and the curing agent is out of the above-mentioned range, incomplete curing may occur, resulting in poor coating adhesion, and deterioration of physical properties such as stain resistance and weather resistance. From the viewpoints of chemical resistance and weather resistance of the coating film, it is more preferable to maintain the weight ratio between the base and the curing agent at 7: 1.

The organic solvent included in the curing agent according to one embodiment may be applied as a ketone solvent and an aromatic solvent. In the curing agent, the ketone solvent and the aromatic solvent may each be applied in an amount of 10 to 20 parts by weight.

If the amount of the ketone-based solvent and the aromatic solvent contained in the curing agent is less than 10 parts by weight, the curing reaction does not occur. If the amount exceeds 20 parts by weight, evaporation of the solvent during curing is insufficient and the overall physical properties of the coating film are deteriorated. The workability due to the smell may be lowered. Therefore, it is preferable that the content of the two solvents is applied within the above-mentioned range.

Meanwhile, the antistatic coating composition according to an embodiment of the present invention may further include conventional additives that can be used for paints such as surfactants, wetting agents, plasticizers, preservatives, pH adjusters, thickeners, etc., can do.

Hereinafter, the present invention will be described in more detail with reference to specific examples. The following examples are merely illustrative examples for the understanding of the present invention, and thus the scope of the present invention is not limited thereto or limited thereto.

Preparation of Examples and Comparative Examples

The contents and the curing agents were prepared in the contents shown in Table 1 (in grams). First, the respective components were mixed with the contents of Table 1, and the mixture was stirred at 1500 rpm for 30 minutes to perform pigment wetting. After wetting the pigment, the dispersion was dispersed at 3000 rpm using a ring mill, and the particle size of the dispersion was measured to prepare a substrate having a thickness of 10 탆 or less.

Then, each component was mixed with the content of Table 1 and stirred at 1500 rpm for 30 minutes to prepare a curing agent.

The thus prepared base and curing agent were added to a stirrer at a mixing ratio shown in Table 1 together with a thinner (a mixture of Propylene Glycol Monomethyl Ether Acetate, MIBK and Xylene), uniformly mixed at 1000 rpm for 10 minutes, and then subjected to a chromate pretreated aluminum panel Sprayed at a thickness of 30 占 퐉 on the surface of the coating film, followed by drying at 80 占 폚 for 30 minutes at room temperature for 15 minutes and crosslinking. Then, the physical properties of the coating film surface were evaluated.

division Example 1 Example 2 Example 3 Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 subject ¹ fluoroolefin copolymer 50 55 60 48 62 50 50
² Acrylic resin 10 7 5 12 3 10 10
³ Titanium Dioxide 30 25 20 32 18 30 30
⁴ Antistatic agent 2 6 10 12 0 2 2
⁵ Dispersant 5 3 One 0 7 5 5
⁶ Surface conditioner 0.3 0.4 0.5 0.1 0.7 0.3 0.3
⁷ ester solvent 5 10 15 17 3 5 5
⁸ ketone solvent 15 10 5 3 17 15 15
⁹ Aromatic Solvent 5 10 15 3 17 5 5
Hardener ¹⁰ polyisocyanate 60 70 80 82 58 60 60
¹¹ ketone solvent 20 15 10 8 22 20 20
¹² Aromatic Solvent 10 15 20 22 8 10 10
Mixture weight of base, hardener and thinner 7: 1: 3 7: 1: 3 7: 1: 3 7: 1: 3 7: 1: 3 4: 1: 3 7: 1: 3
week)
1: fluoroolefin copolymer - lumiflon (available from Asahi Glass Co., Ltd.)
2: Acrylic resin - Hydroxymethyl methacrylate (dim paint) was used in Examples 1 to 3 and Comparative Examples 1 and 3, Ethyl acrylate (dim paint) was used in Comparative Example 4,
3: Titanium dioxide - R-996 (LOMON)
4: Antistatic agent - Li-100 (manufactured by Lubrizol)
5: Dispersant - Byk-180 (BYK)
6: Surface modifier - Byk-307 (BYK)
7: ester solvent - Pm acetate (EASTMAN)
8: Ketone type solvent - MIBK (GS Caltex)
9: Aromatic solvent - Xylene (GS Caltex)
10: Polyisocyanate - Desmodur N3300, N3800 (Bayer)
11: Ketone type solvent - MIBK (GS Caltex)
12: Aromatic solvent - Xylene (GS Caltex)

Property evaluation method

With respect to the examples and comparative examples thus prepared, the acid resistance, weather resistance, alkali resistance, antistatic property and hardness of the coating film were evaluated, and the results are shown in Table 2.

1. Acid resistance

First acid test (sulfuric acid, hydrofluoric acid)

After drying the coating, it was carried out according to the method of ASTM D 1308: 2002. That is, the prepared sample was immersed in a 98% sulfuric acid solution and a 50% hydrofluoric acid solution at 23 DEG C for 30 minutes, and then the state of the coating film was visually evaluated after 1 hour recovery time.

Second acid test (nitric acid)

A 8-ounce inlet is filled with half a bottle of nitric acid in a wide bottle of 70% ACS reagent grade (the analysis of nitric acid is from FisherA 200 or equivalent; minimum 69.0% to maximum 71.0%). Place the test panel over the entire area of the bottle inlet with the painted side down for 30 minutes, rinse the sample with distilled water, and wipe dry. The color change of the film was measured after 1 hour recovery period.

As a result of the first acid test and the second acid test, the acid resistance was evaluated as good when all of the coating films were in good condition, and the acid resistance was evaluated as bad if any.

2. Weatherability

After drying the coating, the weathering test was carried out according to the method of ASTM D 2244, and the ΔE value was measured using a colorimeter (CM-7200 Model) manufactured by Minolta Co. to confirm the color difference. The closer to 0 the ΔE value was, the better the weatherability was.

3. Alkali resistance (mortar resistance)

After drying the coating, mortar resistance (24 hour mortar test) test was carried out by the method of AAMA 2605. Specifically, mortar is prepared by mixing 75 g (2.6 oz) of building lime and 225 g (7.9 oz) of dry sand, both of which are filled with approximately 100 g (3.5 oz) . Immediately after passing, approximately 1300 sq. Attach a small wet lump of mm (2 sq. in.) of mortar to a range of surface coatings. Stack the mortar with a thickness of 12 mm on colored aluminum specimens that have been applied for at least 24 hours. The test section is then exposed for 24 hours at 100% relative humidity at 38 DEG C (100 DEG F).

After 24 hours, the mortar is completely removed from the painted surface. The residue was removed with a damp cloth and 10% hydrochloric acid solution, and then the state of the coating film was visually inspected.

4. Antistatic after drying

After drying the coating film, the resistance value to the coating film surface was measured. The surface resistance (Ω / sq) was measured with a Digital MΩHiTESTER (3454-11) model manufactured by HIOKI of Japan.

5. Hardness evaluation

The hardness was evaluated by using a Mitsubishi pencil at an angle of 45 ° and applying a load of 1 kg to determine whether the coating was abnormal when moving 2 cm. The maximum pencil hardness value in the absence of scratches was recorded five times at the 5th evaluation.

division Example 1 Example 2 Example 3 Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Acid resistance Good Good Good Bad Bad Bad Good Weatherability ? E: 0.52 ? E: 0.53 ? E: 0.55 ? E: 3.85 ? E: 2.73 ? E: 1.21 ? E: 1.43 Alkali resistance Good Good Good Bad Bad Bad Good Antistatic property 10 ⁸ ~ 10 ⁹ 10 ⁸ ~ 10 ⁹ 10 ⁸ ~ 10 ⁹ 10 ⁸ ~ 10 ⁹ 10 ¹³ < 10 ⁸ ~ 10 ⁹ 10 ⁸ ~ 10 ⁹ Hardness F F F F F F HB

As shown in the experimental results of Table 2, it can be confirmed that the coating compositions of Examples 1 to 3 according to the present invention are excellent in acid resistance, weather resistance, alkali resistance, antistatic property and hardness. Further, through the experimental results of Comparative Examples 1 to 3, when the content of each component contained in the coating composition is more than or less than the amount of each component, or when the mixing ratio of the main component and the hardener is not appropriate, the surface properties of the coating film are deteriorated can confirm. In addition, the experimental results of Comparative Example 4 show that the mechanical properties of the coating film vary depending on the type of the acrylic resin.

As a result, the present invention is very suitable for use in manufacturing processes of semiconductor manufacturing equipment, and is superior in acid resistance, weather resistance, alkali resistance, and mechanical properties to existing coatings. Particularly, in the conventional production of semiconductor, the production yield is not good due to the generation of static electricity due to the surface resistance. Therefore, the present invention has a very advantageous effect of preventing the generation of static electricity due to the application of the antistatic function to the surface of the coating.

In addition, since the hardness of the coating film is excellent, the present invention can prevent cracking of the coating film due to impact that may occur when the equipment is bonded, thereby providing excellent equipment production yield in the design of semiconductor equipment, There is an effect of excellent workability, surface physical property and antistatic function.

Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims. And the scope of the present invention should be understood by the following claims and their equivalents.

Claims (7)

A subject comprising fluoroolefin copolymer, acrylic resin, titanium dioxide and an antistatic agent; And
A curing agent comprising a polyisocyanate and an organic solvent
Antistatic coating composition. The method according to claim 1,
The subject further includes a dispersant, a surface conditioner, an ester solvent, a ketone solvent, and an aromatic solvent,
Wherein the fluoroolefin copolymer is 50 to 60 parts by weight, the acrylic resin is 5 to 10 parts by weight, the titanium dioxide is 20 to 30 parts by weight, the antistatic agent is 2 to 10 parts by weight, the dispersant is 1 5 to 15 parts by weight of the ester-based solvent, 5 to 15 parts by weight of the ketone-based solvent, and 5 to 15 parts by weight of the aromatic solvent. To
Antistatic coating composition. The method according to claim 1,
In the curing agent, the organic solvent is a ketone solvent and an aromatic solvent,
Wherein the polyisocyanate is 60 to 80 parts by weight, the ketone solvent is 10 to 20 parts by weight, and the aromatic solvent is 10 to 20 parts by weight.
Antistatic coating composition. The method according to claim 1,
The fluoroolefin copolymer is a copolymer of a fluorine compound and an alkyl vinyl ether compound,
The fluorine compound is at least one of vinyl fluoride, vinylidene fluoride, chlorotrifluoroethylene, tetrafluoroethylene, and hexafluoropropylene, or a copolymer thereof,
Wherein the alkyl vinyl ether compound is at least one of methyl vinyl ether, ethyl vinyl ether, butyl vinyl ether and cyclohexyl vinyl ether
Antistatic coating composition. The method according to claim 1,
Wherein the acrylic resin is hydroxymethyl methacrylate
Antistatic coating composition. The method according to claim 1,
Wherein the antistatic agent is a quaternary ammonium salt.
Antistatic coating composition. 3. The method of claim 2,
Wherein the surface modifier is a polyether-modified polydimethylsiloxane
Antistatic coating composition.