KR20190065049A - Apparatus for inspecting a foreign matter of a mask and inspection method thereof - Google Patents

Abstract

An impurity inspection system according to an embodiment of the present invention comprises: an optical unit which receives an input light source to form a first light source, and controls an optical path such that the first light source is provided to an object to be irradiated; a phase retardation plate which receives a second light source reflected from the object to be irradiated which is provided with the first light source, and polarizes the reflected light to a third light source and a fourth light source; and a polarization beam splitter which receives and reflects or transmits the third light source and the fourth light source, and separates the light source into a first optical signal and a second optical signal. The impurity inspection system can simultaneously detect image information of a surface of the object to be irradiated and chemical spectral information of the surface of the object to be irradiated by means of one light source through the phase retardation plate and the polarization beam splitter.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a foreign matter inspection system and an inspection method thereof,

More particularly, the present invention relates to a foreign body inspection system and an inspection method thereof, and more particularly, to a system and method for inspecting a foreign body by separating light reflected from an object to be irradiated with an input light source and simultaneously detecting imaging information of the object to be irradiated and chemical spectroscopic information of the surface of the irradiated object And an inspection method thereof.

An organic light emitting diode (OLED) device is a device in which holes and electrons provided from an anode and a cathode are combined with each other in an organic light emitting layer positioned between the electrodes, , Characters, and the like.

In the organic light emitting display, an intermediate layer such as an organic light emitting layer, an electron injection layer, an electron transport layer, a hole transport layer, and a hole injection layer is formed between the electrodes to obtain high efficiency light emission.

Generally, the organic light emitting layer and the intermediate layer are formed using a mask including a fine metal mask (FMM) having deposition patterns. When a fine metal mask is used to form the deposition pattern, a plurality of organic substances are deposited on the regions other than the openings of the fine metal mask, and the organic light emitting layer and the intermediate layers are cleaned and used.

When cleaning is performed to remove the organic substance, all the foreign substances may not be cleaned and residual foreign matter may be generated. In other words, if a fine metal mask is used that does not clean the vaporized organic material and remains as a foreign substance, it may cause direct product defects because unevenness occurs when the organic light emitting display is implemented.

Therefore, cleaning for the above reasons can be a necessary condition for forming a fine pattern. Furthermore, as the area of the openings and non-openings of the fine metal mask becomes finer to realize a fine pattern, the cleaning process becomes more important.

However, the process of detecting the current foreign object is limited to the time of capturing the image data, and thus it is limited to detect minute foreign objects.

Therefore, there is a need for improvement in a foreign matter detecting apparatus and method that can detect foreign matter more accurately than image detection performed in the eyes by taking into consideration microscopic foreign matter formed on the mask.

The object of the present invention is to provide a foreign object inspection system and method for simultaneously detecting imaging information of a surface of an object to be irradiated and chemical spectroscopic information of the surface of the irradiated object by separating light reflected from the irradiated object with one input light source .

In addition, it is possible to control the intensity ratio of the image and the spectroscopic collecting signal by passing the light source reflected from the surface of the irradiated object to the phase delay plate and the polarization beam splitter, so that the microscopic foreign objects can be detected, .

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not intended to limit the invention to the precise form disclosed. There will be.

According to an aspect of the present invention, there is provided an object inspection system comprising: an optical unit for receiving an input light source to form a first light source, the optical unit controlling the optical path such that the first light source is provided on an object to be irradiated; A phase retardation plate for receiving a second light source reflected from the irradiated object provided with the first light source and polarizing the reflected light to a third light source and a fourth light source, and a third retardation plate for receiving the third light source and the fourth light source And a polarization beam splitter for separating the first and second optical signals into a first optical signal and a second optical signal. Here, the particle inspection system may simultaneously detect the imaging information of the surface of the irradiated object and the chemical spectroscopic information of the surface of the irradiated object with the input light source through the phase delay plate and the polarization beam splitter.

An imaging device for receiving the first optical signal and providing imaging information of the surface of the living body, and a spectroscope for receiving the second optical signal to provide chemical spectroscopic information of the surface of the living body.

The optical unit may be any one selected from a dichroic mirror, a dichroic filter, and a unit obtained by mixing them.

The input unit may output an input light source, and the input light source may be ultraviolet (UV) light having a wavelength ranging from 250 nm to 400 nm.

The optical unit is disposed on an optical path of the input light source, and the first light source may be formed by receiving the input light source.

When the first light source is a second light source formed by being reflected on a foreign object formed on the irradiated object, the first light source may be reflected at a wavelength different from that of the first light source.

The third light source and the fourth light source may be formed of any one selected from linearly polarized light, circularly polarized light, and elliptically polarized light, and the third light source and the fourth light source may be formed in different polarization states from each other.

The phase delay plate may control the ratio of the components of the third light source and the fourth light source, and may control intensity of the first optical signal and the second optical signal in the polarization beam splitter.

An objective lens is disposed between the irradiated object and the optical unit, and the objective lens unit can form an enlarged image of the surface of the irradiated object.

A tube lens may be disposed between the objective lens unit and the phase delay plate.

An extension lens is disposed on the tube lens, and a lens adapter connecting the extension lens and the tube lens may be disposed between the tube lens and the extension lens.

Wherein the phase delay plate is disposed between the tube lens and the elongated lens and the elongated lens disposed on the phase delay plate prevents the third light source and the fourth light source polarized in the phase delay plate from leaking to the outside can do.

According to another aspect of the present invention, there is provided a method for inspecting a foreign object inspection system, comprising: providing an input light source to an optical unit to form a first light source and providing the first light source to an object; Forming a third light source and a fourth light source having different polarization wavelengths by providing the second light source to the phase delay plate by reflecting the first light source on the object to be formed, And providing a fourth light source to the polarization beam splitter to separate into a first optical signal and a second optical signal, providing the first optical signal to the imaging device and providing the second optical signal to the spectroscope, Acquiring imaging information of the surface of the object on the imaging device and acquiring chemical spectroscopic information of the surface of the object on the spectroscopy device. Here, the inspection method of the foreign body inspection system can simultaneously detect the imaging information of the surface of the living body and the chemical spectroscopic information of the surface of the living body.

The phase delay plate may control the ratio of the components of the third light source and the fourth light source, and may control intensity of the first optical signal and the second optical signal in the polarization beam splitter.

An objective lens is disposed between the irradiated object and the optical unit, a tube lens is disposed between the objective lens unit and the phase delay plate, an extended lens is disposed on the tube lens, The phase delay plate is disposed between the extended lenses, and the extended lens disposed on the phase delay plate can prevent the third light source and the fourth light source polarized in the phase delay plate from leaking to the outside.

According to an embodiment of the present invention, a foreign matter inspection system and an inspection method thereof can separate light reflected from an object to be irradiated with an input light source and simultaneously detect imaging information of the surface of the object and chemical spectroscopic information of the surface of the irradiated object It is effective.

Further, by passing the light source reflected from the surface of the living body through the phase delay plate and the polarizing beam splitter, the intensity ratio of the image and the spectroscopic collecting signal can be controlled, so that the microscopic foreign objects can be detected.

It should be understood that the effects of the present invention are not limited to the above effects and include all effects that can be deduced from the detailed description of the present invention or the configuration of the invention described in the claims.

1 is a schematic view showing a foreign matter inspection system according to an embodiment of the present invention.
2 is a cross-sectional view illustrating a foreign matter inspection system according to an embodiment of the present invention.
3 is a graph illustrating an example of detecting an optical signal in a foreign matter inspection system according to an embodiment of the present invention.
4 and 5 are sectional views showing specific detection examples of the foreign object inspection system according to the embodiment of the present invention
FIG. 6 is a view showing a mask manufactured to measure the performance of a foreign object inspection system according to an embodiment of the present invention.
FIG. 7 is an optical microscope photograph of the mask manufactured in FIG.
FIG. 8 is a graph of spectroscopic analysis measured by a particle inspection system according to an embodiment of the present invention.
9 is a flowchart illustrating an inspection method of a foreign matter detection system according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

Throughout the specification, when a part is referred to as being "connected" (connected, connected, coupled) with another part, it is not only the case where it is "directly connected" "Is included. Also, when an element is referred to as "comprising ", it means that it can include other elements, not excluding other elements unless specifically stated otherwise.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, the terms "comprises" or "having" and the like refer to the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic view showing a foreign matter inspection system according to an embodiment of the present invention. FIG. 2 is a sectional view showing a foreign matter inspection system according to an embodiment of the present invention. Fig. 2 is a graph showing an example of detecting an optical signal of the system. Fig.

1 and 2, an object inspection system 10 according to an embodiment of the present invention includes an input unit 50 for outputting an input light source 55, an optical unit 100 for receiving the input light source 55, An object 1000 for reflecting the light provided from the light source unit 100 and a phase retardation plate 300 for polarizing the reflected light, a polarization beam splitter for separating the polarized light, , 400).

The foreign body inspection system 10 can simultaneously detect the imaging information of the surface of the living body 1000 and the chemical spectroscopic information of the surface of the living body 1000 with the single input light source 55.

The foreign body inspection system 10 may further include an image device 500 and a spectroscopic device 600 that receive the separated light.

First, the foreign object inspection system 10 according to the embodiment of the present invention can detect foreign objects that may be formed on the surface of the object 1000. Typically, the workpiece 1000 may be a fine metal mask (FMM) for forming an organic light emitting display device. However, the substrate 1000 may be a fine metal mask including a sapphire substrate, a glass substrate, an acrylic substrate, Lt; RTI ID = 0.0 > and / or < / RTI >

The foreign object inspection system 10 according to the embodiment of the present invention may include an input unit 50 for outputting an input light source 55. Here, the input light source 55 output from the input unit 50 may be ultraviolet (UV) light in the range of 250 nm to 400 nm.

Here, the short wavelength of ultraviolet rays is provided to the input light source 55 because the failure that can be formed on the surface of the irradiated object 1000 absorbs ultraviolet rays of which the water is the input light source 55 and emits fluorescence or phosphorescent light To be able to do so.

The optical unit 100 may be disposed on the optical path of the input light source 55. The optical unit 100 may receive the input light source 55 to form the first light source 110 and control the optical path such that the first light source 110 is provided to the object 1000. [

The optical unit 100 may be any one selected from a dichroic mirror, a dichroic filter, and a unit obtained by mixing them. Here, a dichroic mirror or a dichroic filter can reflect or transmit only the target wavelength. The dichroic mirror or the dichroic filter can be set to transmit only the wavelength range of 250 nm to 400 nm provided by the input unit 50.

In other words, the optical unit 100 selectively reflects or transmits only light of a certain wavelength, thereby removing a light wavelength provided at the periphery, and can provide only a certain wavelength to the irradiated object 1000. Accordingly, a dichroic mirror or a dichroic filter can improve the accuracy of the foreign object inspection system 10 according to the embodiment of the present invention.

An objective lens 150 may be disposed between the object 1000 and the optical unit 100. The objective lens unit 150 can form an enlarged image of the surface of the object 1000. [ Accordingly, the objective lens unit 150 may be composed of a plurality of lenses to sufficiently correct various aberrations. Further, a ring holder capable of supporting / fixing the objective lens unit 150 may be further disposed.

The foreign matter inspection system 10 according to the embodiment of the present invention may include a third light source 330 receiving the second light source 210 reflected from the irradiated object 1000 provided with the first light source 110, And a phase retardation plate 300 for polarizing the light emitted from the light source 340 into four light sources 340.

The first light source 110 may be changed to a second light source 210 having a wavelength different from that of the first light source 110 by being reflected from the surface of the irradiated object 1000. [ When the first light source 110 is reflected from the surface of the irradiated object 1000, the second light source 210 may be reflected at the same wavelength as that of the first light source 110, The second light source 210 may be reflected at a wavelength different from that of the first light source 110. In this case, This will be described in detail later.

As described above, the second light source 210 formed by reflecting from the surface of the irradiated object 1000 passes through the phase retardation plate 300 and is polarized by the third light source 330 and the fourth light source 340, .

In other words, the phase retardation plate 300 may polarize the components of the second light source 210 to form the third light source 330 and the fourth light source 340. Here, the third light source 330 and the fourth light source 340 may be formed of any one selected from linearly polarized light, circularly polarized light, and elliptically polarized light, and the third light source 330 and the fourth light source 340 may be formed in different polarization states .

For example, when the third light source 330 is linearly polarized light, the fourth light source 340 may be elliptically polarized light or circularly polarized light, and when the fourth light source 340 is linearly polarized light, Polarized or elliptically polarized.

In this manner, the phase retardation plate 300 changes the reflected second light source 210 to different polarization states, so that the progressive speeds of the third light source 330 and the fourth light source 340 are different from each other, It is possible to control the components of the third light source 330 and the fourth light source 340 to be easily separated from each other.

Meanwhile, a tube lens 250 may be disposed between the objective lens unit 150 and the phase delay plate 300. The tube lens 250 is disposed between the objective lens of the optical system and the imaging device (CCD), and can collect light onto the imaging device (CCD) through an infinity-corrected objective lens to form an image. And an extension lens 290 may be disposed on the tube lens 250. A lens adapter 270 connecting the extension lens 290 and the tube lens 250 may be disposed between the tube lens 250 and the extension lens 290. The phase delay plate 30 may be disposed within the extension lens 290.

Specifically, a phase delay plate 300 may be disposed between the tube lens 250 and the extended lens 290. More specifically, the extended lens 290 disposed on the phase delay plate 300 can prevent the third light source 330 and the fourth light source 340 polarized in the phase delay plate 300 from leaking to the outside have.

In other words, since the polarized third light source 330 and the fourth light source 340 extract polarized light components of the second light source 210, the light intensity may be weak. For example, when the polarized third light source 330 and the fourth light source 340 are polarized by? / 2, the third light source 330 and the fourth light source 340 are half Of light intensity.

Therefore, as described above, the extended lens 290 can prevent the leakage of the third light source 330 and the fourth light source 340, which are polarized by the phase delay plate 300, to maintain the light intensity.

The foreign matter inspection system 10 according to an embodiment of the present invention receives and reflects or transmits the third light source 330 and the fourth light source 340 to generate a first optical signal 410 and a second optical signal 420 And a polarizing beam splitter 400 separating the polarized beam splitter 400 and the polarizing beam splitter 400.

The polarizing beam splitter 400 can serve to transmit and reflect the target wavelength. In other words, the polarizing beam splitter 400 selectively transmits only a polarizing element having a target wavelength with respect to the third light source 330 and the fourth light source 340, which are formed in different polarization states, and reflects a part thereof, 330 and the fourth light source 340 to extract the first optical signal 410 and the second optical signal 420.

The first optical signal 410 may be provided to the imaging device 500 to extract imaging information of the surface of the living body 1000.

The second optical signal 420 may be provided to the spectroscopic apparatus 600 to extract the chemical spectroscopic information of the surface of the irradiated object 1000.

The particle inspection system 10 according to the embodiment of the present invention can detect the imaging information of the surface of the living organism 1000 with the single input light source 55 through the phase delay plate 300 and the polarization beam splitter 400, And the chemical spectroscopic information of the surface of the living body 1000 can be simultaneously detected.

3, when the first light source 110 is irradiated on the surface of the irradiated object 100, the second light source 210 passes through the phase delay plate 300 and the polarizing beam splitter 400, And can be detected at the same wavelength as that of the light source 110.

However, when a foreign substance exists on the surface of the irradiated object 1000 and the first light source 110 is irradiated to the foreign substance 1200, the foreign substance 1200 absorbs the first light source 110, It is possible to emit phosphorescence light. That is, the wavelength changed from the first light source 110 to the second light source 210 passes through the phase delay plate 300 and the polarization beam splitter 400, and the second light source 210 is different from the first light source 110 Can be detected as a wavelength.

For example, when an organism emitting RGB color light exists in the living body 1000 as a foreign body 1200, the foreign body 1200 may emit a wavelength of a visible light region due to fluorescence and phosphorescence.

The emitted light as described above may be collected in the spectroscopic apparatus 600 to analyze the spectroscopic information of the foreign substance 1200 to detect the characteristic of the foreign substance 1200. As shown in the figure, the organic matter as the foreign material 1200 emits light corresponding to RGB, and the wavelength measured in the spectroscopic apparatus 600 is measured at a wavelength corresponding to the peak of RGB, The components can be analyzed and analyzed. That is, the spectroscopic apparatus 600 can detect the second optical signal 420 that is inverted from the foreign substance 1200.

The ratio of the components of the third light source 330 and the fourth light source 340 in the phase delay plate 300 is controlled so that the first optical signal 410 and the second optical signal 420 in the polarization beam splitter 400 Can be controlled.

As described above, the foreign body inspection system 10 according to the embodiment of the present invention separates the light reflected from the living body 1000 with one input light source 55 to separate the imaging information of the surface of the living body 1000 and the imaging information 1000) surface can be detected at the same time.

The intensity ratio of the image and the spectral collected signal can be controlled by passing the light source reflected from the surface of the irradiated object 1000 to the phase delay plate 300 and the polarization beam splitter 400, have.

FIG. 4 and FIG. 5 are cross-sectional views showing specific detection examples of the foreign object inspection system according to the embodiment of the present invention.

4 and 5 avoid duplicate description and will be described with reference to Figs. 1 to 3 for ease of explanation.

4, a foreign body inspection system 10 according to an embodiment of the present invention includes a microscopic foreign substance 1100 formed on an organism 1000, a general foreign matter 1200, and a surface defect 1300 Can be detected.

Since the general foreign object 1200 can be detected by a visual system or a video apparatus as described above, it will be omitted.

In the case where the fine foreign object 1100 is formed on the surface of the object 1000 to be inspected, there is a limit to detect the foreign object 1100 because it is necessary to detect the foreign object through the neck or the imaging device. That is, there was a difficulty in detecting defects with respect to the size of the foreign object (1100) below the image resolution limit.

However, the foreign object inspection system 10 according to the embodiment of the present invention can detect the microscopic foreign object 1100, which is difficult to detect even through the imaging device 500, through the spectroscopic device 600.

Specifically, in the case of the fine foreign object 1100, the measurement wavelength is changed in the region where the fine foreign matter 1100 is formed, and it is possible to detect that the minute foreign matter 1100 exists. That is, the foreign body inspection system 10 according to the embodiment of the present invention can detect minute defects, thereby securing information that can easily clean the surface of the living body 1000. Furthermore, the kind of the foreign object 1100 can be distinguished through the spectroscopic analysis of the foreign object 1100, so that the countermeasure for removing the foreign object 1100 can be easily performed.

Meanwhile, the foreign object inspection system 10 according to the embodiment of the present invention can detect surface defects of the object 1000. In the prior art, since it is detected through a visual system or a video device, it is possible to judge that the surface defect (1300) of the living body 1000 is foreign matter.

However, the foreign object inspection system 10 according to the embodiment of the present invention can detect surface defects (1300) of the object, not foreign objects, through spectral analysis and image analysis. That is, it is possible to reduce unnecessary attempts to remove the surface defects 1300 of the living body.

5, when the foreign object 1400 is formed on the front surface of the living body 1000, the foreign body inspection system 10 according to the embodiment of the present invention includes the spectroscopic device 600 and the image device 500, A defect can be detected.

In the past, a comparative object was required to detect a defective whole surface (1400), and a defective foreign object could be detected through the inspection.

However, the foreign object inspection system 10 according to the present invention can detect the front foreign object 1400 without a comparison object by detecting the component of the foreign object 1400 formed on the front face of the body 1000 through spectral analysis.

As described above, the foreign body inspection system 10 according to the embodiment of the present invention separates the light reflected from the living body by one input light source 55 and transmits the imaging information of the surface of the living body 1000, Can be detected.

The intensity ratio of the image and the spectral collected signal can be controlled by passing the light source reflected from the surface of the irradiated object 1000 to the phase delay plate 300 and the polarization beam splitter 400, have.

FIG. 6 is a view showing a mask manufactured to measure the performance of a foreign object inspection system according to an embodiment of the present invention, FIG. 7 is an optical microscope photograph of the mask manufactured in FIG. 6, FIG. 5 is a graph of spectroscopic analysis measured through a foreign object inspection system according to an embodiment of the present invention. FIG.

6 to 8 avoid duplicate description and will be described with reference to Figs. 1 to 3 for ease of explanation.

Referring to FIGS. 6 and 7, a mask 700 is prepared and an organic material deposition is performed on the substrate 710 using the mask 700 described above.

Here, an organic material of Alq3 was used as the organic material, and the line material 750 was formed of the organic material.

The line pattern 750 was photographed using an optical microscope (SEM). Here, the pattern defect region Z is visually seen on the line pattern 750 and the mask 700 in the region where the pattern defect region Z is formed is subjected to spectroscopic analysis to determine the wavelength in the pattern defect region Z Change was measured.

Referring to FIG. 8, the graph shown in blue is a graph in which the wavelength of the input light source 55 is measured, and the graph shown in orange is provided in the spectroscopic device 600 in the second optical signal 420, Lt; / RTI >

The second optical signal 420 inverted in the pattern defect region Z is slightly shifted to the right since it is a reflected wavelength in comparison with the input light source 55. [ It can be seen that the spectral change in the pattern defect region Z is clearly detected at a wavelength of 500 to 600 nm, specifically at a wavelength of 550 nm. It can be seen that the foreign matter in the pattern defect region Z is formed of a material emitting green light. In other words, the foreign object inspection system according to the embodiment of the present invention can identify the foreign fault component.

As described above, the foreign body inspection system 10 according to the embodiment of the present invention separates the light reflected from the living body 1000 with one input light source 55 to separate the imaging information of the surface of the living body 1000 and the imaging information 1000) surface can be detected at the same time.

Further, by passing a light source reflected from the surface of the irradiated object 100 to the phase delay plate 300 and the polarization beam splitter 400, the intensity ratio of the image and the spectral collected signal can be controlled, have.

9 is a flowchart illustrating an inspection method of a foreign matter detection system according to an embodiment of the present invention.

Here, FIG. 9 will be described with reference to FIGS. 1 to 8 for the avoidance of duplicate description and for ease of explanation.

9, an inspection method of a foreign matter detection system according to an embodiment of the present invention includes providing an input light source 55 to an optical unit 100 to form a first light source 110, The first light source 110 is reflected by the irradiated object 1000 to form a second light source 210 and the second light source 210 is disposed in a phase The third light source 330 and the fourth light source 340 may be formed by forming a third light source 330 and a fourth light source 340 having different polarized wavelengths on the retard plate 300, (S300) of providing the first optical signal (410) to the polarization beam splitter (400) to divide the optical signal into a first optical signal (410) and a second optical signal (420) (S500) of acquiring imaging information on the surface of the living body (1000) in the imaging device (500) and providing the second optical signal (420) to the spectroscopic device (600) And acquiring chemical spectroscopic information on the surface of the living body 1000 (S600). Here, the imaging information of the surface of the living body 1000 and the chemical spectroscopic information of the surface of the living body can be simultaneously detected.

In the step S100 of providing the input light source 55 to the optical unit 100 to form the first light source 110 and providing the first light source 110 to the object 1000, ) May be a dichroic filter or a dichroic mirror.

The optical unit 100 is disposed on the optical path of the input light source 55 and may form the first light source 110 by receiving the input light source 55. The input unit 50 outputs an input light source 55, and the input light source 55 may be an ultraviolet (UV) light having a wavelength ranging from 250 nm to 400 nm.

The second light source 210 formed by reflecting the first light source 110 on the foreign object formed on the irradiated object may be reflected at a wavelength different from that of the first light source 110.

The first light source 110 is reflected by the irradiated object 1000 to form a second light source 210 and the second light source 210 is provided to the phase delay plate 300 to transmit different polarized wavelengths A third light source 330 and a fourth light source 340 are formed (S200).

The second light source 210 formed by reflecting the first light source 110 on the foreign object formed on the irradiated object may be reflected at a wavelength different from that of the first light source 110.

The third light source 330 and the fourth light source 340 may be formed of any one selected from linearly polarized light, circularly polarized light, and elliptically polarized light, and the third light source 330 and the fourth light source 340 may be formed of polarized light . ≪ / RTI >

The phase delay plate 300 may control the ratio of the components of the third light source 330 and the fourth light source 340.

The third light source 330 and the fourth light source 340 are provided to the polarizing beam splitter 400 and separated into a first optical signal 410 and a second optical signal 420 in step S300.

The polarization beam splitter 400 may control the intensity of the first optical signal 410 and the second optical signal 420.

A step S400 of providing the first optical signal 410 to the imaging device 500 and providing the second optical signal 420 to the spectroscopic device 600 is performed.

An objective lens 150 is disposed between the object 1000 and the optical unit 100 and a tube lens 250 is interposed between the objective lens unit 150 and the phase delay plate 300. An extended lens 290 is disposed on the tube lens 250 and the phase delay plate 300 is disposed between the tube lens 250 and the extended lens 290.

The extended lens 290 disposed on the phase delay plate 300 prevents the third light source 330 and the fourth light source 340 polarized in the phase delay plate 300 from leaking to the outside .

In operation S500, imaging information on the surface of the living body 1000 is acquired in the imaging device 500 and acquisition of chemical spectroscopic information on the surface of the living body 1000 in the spectroscopic device 600 ).

Therefore, the imaging information of the surface of the living body 1000 and the chemical spectroscopic information of the surface of the living body can be simultaneously detected.

As described above, the foreign body inspection system 10 according to the embodiment of the present invention separates the light reflected from the living body 1000 with one input light source 55 to separate the imaging information of the surface of the living body 1000 and the imaging information 1000) surface can be detected at the same time.

Further, by passing a light source reflected from the surface of the irradiated object 100 to the phase delay plate 300 and the polarization beam splitter 400, the intensity ratio of the image and the spectral collected signal can be controlled, have.

It will be understood by those skilled in the art that the foregoing description of the present invention is for illustrative purposes only and that those of ordinary skill in the art can readily understand that various changes and modifications may be made without departing from the spirit or essential characteristics of the present invention. will be. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included within the scope of the present invention.

10: Foreign body inspection device
50: Input section
55: input light source
100: Optical unit
110: first light source
150: Objective lens unit
210: a second light source
250: tube lens
300: phase retardation plate
330: third optical signal
340: fourth optical signal
400: polarization beam splitter
410: first optical signal
420: second optical signal
500: Imaging device
600: Spectroscopic device

Claims (15)

An optical unit that receives an input light source to form a first light source, and controls the optical path such that the first light source is provided to an object to be irradiated;
A phase retardation plate for receiving a second light source reflected from the irradiated object provided with the first light source and polarizing the second light source into a third light source and a fourth light source; And
And a polarization beam splitter for receiving the third light source and the fourth light source to reflect or transmit the first and second light signals into a first optical signal and a second optical signal,
And simultaneously detects the imaging information on the surface of the irradiated object and the chemical spectroscopic information on the surface of the irradiated object with the input light source through the phase delay plate and the polarization beam splitter. The method according to claim 1,
An imaging device for receiving the first optical signal and providing imaging information of the surface of the object to be imaged,
Further comprising a spectroscopic device receiving the second optical signal and providing chemical spectroscopic information of the surface of the irradiated object. The method according to claim 1,
Wherein the optical unit is any one selected from a dichroic mirror, a dichroic filter, and a unit in which the optical unit is mixed. The method according to claim 1,
The input unit outputs an input light source,
Wherein the input light source is ultraviolet (UV) light in the range of 250 nm to 400 nm. The method according to claim 1,
Wherein the optical unit is disposed on an optical path of the input light source and is provided with the input light source to form the first light source. The method according to claim 1,
Wherein the first light source is reflected at a wavelength different from that of the first light source when the first light source is a second light source formed by being reflected on a foreign object formed on the living body. The method according to claim 1,
Wherein the third light source and the fourth light source are formed of any one selected from linearly polarized light, circularly polarized light, and elliptically polarized light,
Wherein the third light source and the fourth light source are formed in different polarization states from each other. The method according to claim 1,
Wherein the phase delay plate controls the ratio of the components of the third light source to the fourth light source,
Wherein the intensity of the first optical signal and the intensity of the second optical signal are controlled by the polarization beam splitter. The method according to claim 1,
An objective lens is disposed between the irradiated object and the optical unit,
Wherein the objective lens unit forms an enlarged image of the surface of the irradiated object. 10. The method of claim 9,
And a tube lens is disposed between the objective lens unit and the phase delay plate. 11. The method of claim 10,
An extension lens is disposed on the tube lens, and a lens adapter connecting the extension lens and the tube lens is disposed between the tube lens and the extension lens Wherein the foreign matter inspection system comprises: 12. The method of claim 11,
Wherein the phase delay plate is disposed between the tube lens and the elongated lens and the elongated lens disposed on the phase delay plate prevents the third light source and the fourth light source polarized in the phase delay plate from leaking to the outside And the foreign matter inspection system. Providing an input light source to an optical unit to form a first light source and providing said first light source to an object;
Forming a second light source by reflecting the first light source on the object and providing the second light source to the phase delay plate to form a third light source and a fourth light source having different polarized wavelengths;
Providing the third light source and the fourth light source to a polarizing beam splitter and separating the third light source and the fourth light source into a first optical signal and a second optical signal;
Providing the first optical signal to an imaging device and providing the second optical signal to a spectroscopic device, respectively;
Acquiring imaging information of the exposed surface of the object in the imaging device; And
And acquiring chemical spectroscopic information of the surface of the irradiated object on the spectroscopic device,
Wherein the imaging information of the surface of the living body and the chemical spectroscopic information of the surface of the living body are simultaneously detected. 14. The method of claim 13,
Wherein the phase delay plate controls the ratio of the components of the third light source to the fourth light source,
Wherein the intensity of the first optical signal and the intensity of the second optical signal are controlled by the polarization beam splitter. 14. The method of claim 13,
An objective lens is disposed between the irradiated object and the optical unit, a tube lens is disposed between the objective lens unit and the phase delay plate, an extended lens is disposed on the tube lens, The phase delay plate is disposed between the extended lenses,
Wherein the extended lens disposed on the phase delay plate prevents leakage of the third light source and the fourth light source polarized in the phase delay plate to the outside.

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