KR20180136929A - Quartz heater - Google Patents

Abstract

The present invention relates to a quartz heater capable of uniformly heating a supported substrate. To this end, the quart heater comprises: a base plate coupled to a shaft; a plurality of plates laminated and coupled to the base plate, and each formed with a heating body insertion groove in a predetermined pattern along an inner zone and an outer zone; and a cover plate laminated and coupled to one plate of the plates, wherein an outer zone thermocouple insertion groove for detecting the temperature of the outer zone is formed, and the base plate, the plates, and the cover plate are composed of quartz.

Description

Quartz Heater

The present invention relates to a quartz heater, and more particularly, to a quartz heater capable of uniformly heating a supported substrate.

Generally, a semiconductor manufacturing apparatus includes a chamber having an inner space, a quartz heater installed in the chamber for supporting the substrate, and a raw material spraying portion for spraying the substrate processing raw material on the substrate. The quartz heater includes a base plate, a heating element plate, and a cover plate disposed on the upper portion of the base plate and on which the substrate is placed. When power is applied to the heating element in the substrate support, thermal energy is generated in the heating element, and the substrate is heated to a predetermined temperature by heat transferred after the thermal energy is transmitted to the cover plate.

Here, the base plate, the heating element plate, and the cover plate are manufactured using quartz (SiO2), which has good transmittance and excellent heat resistance. The heating element is installed on the heating element plate so that the heating element, which is a resistor, is bent a plurality of times to occupy a predetermined area. In this quartz heater, heat generated in the heating element is transmitted through the quartz plate to the substrate. At this time, the quartz has a high heat transmittance but a low thermal conductivity.

On the other hand, the quartz heater usually has a single layer of heating plate, but may have a plurality of layers (or a multilayer structure) if necessary. When a heating plate is formed in a multi-layer structure, each layer has a heating element arranged in the inner zone, Are arranged in a pattern by heating elements arranged in the zones. In this case, when the temperatures of the inner zone and the outer zone of the quartz heater are not uniform, the temperature of the substrate is not uniformly heated or distributed over the entire area of the substrate. Such unevenness in the substrate temperature may cause various process failures by preventing the process performed on the substrate from being performed uniformly. Therefore, there is a need for an invention that can accurately heat the temperature of the substrate and uniformly heat the temperature of the inner zone and the outer zone.

Japanese Unexamined Patent Application Publication No. 2007-335425 (2007.27. 2007) Korean Patent Publication No. 10-2010-0004691 (Jan. 13, 2010) Japanese Patent Application Laid-Open No. 2001-163629 (Jun. 19, 2001) Korean Patent Publication No. 10-2012-0052102 (May 23, 2012) Korean Registered Patent No. 10-1333631 (November 31, 2013)

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in an effort to solve the problems as described above, and it is an object of the present invention to provide an apparatus for uniformly heating a substrate disposed in a quartz heater over a whole area, .

However, the objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

The above object of the present invention can be also achieved by a heat exchanger comprising a base plate coupled to a shaft, a plurality of plates laminated on a base plate, the heat generating element insertion grooves being respectively formed in a predetermined pattern along the inner zone and the outer zone, An outer zone thermocouple insertion groove for sensing the temperature of the outer zone is formed, and the base plate, the plurality of plates, and the cover plate are made of quartz. Quot; quartz " heater.

In addition, the plurality of plates have a multilayer structure as the first and second heating plate, and the inner zone thermocouple sensing the temperature of the inner zone is disposed in the central region, thereby sensing the temperatures of the inner zone and the outer zone.

1, 3, and 5,

The first and second heating element insertion grooves are formed in the first and second heating element insertion grooves for inserting the first and second heating elements.

1,

The heat reflecting plate is formed in the same shape as the base plate, and the heat reflecting plate has an outer zone thermocouple insertion groove formed therein.

In addition, the outer-zone thermocouple insertion grooves may include a first thermocouple insertion groove formed in the lower region of the base plate so as to have a groove toward the upper side, and a second thermocouple insertion groove formed in the heat- And a second thermocouple insertion groove formed therein.

When the second thermocouple insertion groove is formed on the upper surface of the heat reflecting plate, the second thermocouple insertion groove is inserted into the outer zone thermocouple insertion groove, Is inserted into the thermocouple tube.

3,

The outer zone thermocouple insertion groove is formed in the base plate.

When the outer zone thermocouple insertion groove is formed on the upper surface of the base plate, the outer zone thermocouple insertion groove is inserted into the outer zone thermocouple insertion groove, and the outer zone thermocouple insertion groove is inserted into the outer zone thermocouple insertion groove. Is inserted into the thermocouple tube.

In addition, when the outer zone thermocouple insertion groove is formed on the upper surface of the base plate, the outer zone thermocouple insertion groove includes a first thermocouple insertion groove in which a groove is formed upward from a lower region of the base plate, And a second thermocouple insertion groove in which a groove is formed on the base plate from one end toward the outside of the base plate.

In addition, when the outer zone thermocouple insertion groove is formed on the lower surface of the base plate, the outer zone thermocouple insertion groove is formed in a groove toward the outward direction from the central region of the lower surface of the base plate.

5,

The heat reflecting plate or the heat reflecting plate insertion groove is formed in the same pattern as the heat emitting body or the heat emitting body insertion groove disposed at a relatively close position to the heat reflecting plate in the heat reflecting plate insertion groove formed on one surface of the base plate .

The apparatus further includes an intermediate plate disposed between the base plate and the first heating plate disposed relatively close to the base plate among the plurality of plates.

Further, the intermediate plate is made of quartz, and the intermediate plate is formed with an outer zone thermocouple insertion groove.

In addition, the outer zone thermocouple insertion groove has a first thermocouple insertion groove in which a groove is formed in the lower region of the base plate toward the upper side, and a second thermocouple insertion groove in which the groove is formed on the intermediate plate from the one end of the first thermocouple insertion groove toward the outside of the intermediate plate. And a second thermocouple insertion groove formed therein.

When the second thermocouple insertion groove is formed on the upper surface of the intermediate plate, the second thermocouple insertion groove is formed in the upper surface, the lower surface, and the entire surface of the intermediate plate. When the second thermocouple insertion groove is formed on the upper surface of the intermediate plate, Is inserted into the thermocouple tube.

In addition, the thermocouple tube is formed of quartz or ceramic, and is in the form of a " Lambda or "

6 and 8,

The first and second heating element insertion grooves are formed in the first and second heating element insertion grooves for inserting the first and second heating elements, and the opening of the first and second heating element insertion grooves is formed in an upward direction on the upper surface.

The apparatus also includes a lower cover plate disposed between the cover plate and the second heating element plate disposed relatively close to the cover plate of the plurality of plates,

The lower cover plate may be electrically connected to the second heat generating element disposed on the second heat generating plate and the heat transfer member so as to be electrically connected to the heat transfer member. Do not touch.

Also, referring to FIG. 6,

The outer zone thermocouple insertion groove is formed in the base plate.

Further, the outer zone thermocouple insertion groove is formed on either the upper surface, the lower surface, or the entire surface of the base plate.

In addition, when the outer zone thermocouple insertion groove is formed on the upper surface of the base plate, the outer zone thermocouple insertion groove has a first thermocouple insertion groove in which a groove is formed upward from a lower region of the base plate, And a second thermocouple insertion groove in which a groove is formed on the base plate toward the outside of the base plate.

In addition, when the outer zone thermocouple insertion groove is formed on the lower surface of the base plate, the outer zone thermocouple insertion groove is formed in the outward direction from the central region of the lower surface of the base plate.

Also, referring to FIG. 8,

The outer zone thermocouple insertion groove is formed in the first heating plate disposed relatively close to the base plate among the plurality of plates.

In addition, the outer zone thermocouple insertion groove includes a first thermocouple insertion groove in which a groove is formed toward the upper side in the lower region of the base plate, and a second thermocouple insertion groove formed in the outer side of the first heating element plate from the one end of the first thermocouple insertion groove, And a second thermocouple insertion groove on which a groove is formed.

Further, the second thermocouple insertion groove is formed on the lower surface of the first heating element plate.

According to the present invention as described above, the temperature of the inner zone and the outer zone can be precisely detected, thereby heating the entire region of the substrate disposed in the quartz heater uniformly.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate preferred embodiments of the invention and, together with the description, serve to further the understanding of the technical idea of the invention, It should not be construed as limited.
1 is a cross-sectional view of a quartz heater according to a first embodiment of the present invention, and FIG.
2 is an exploded perspective view of a quartz heater according to a first embodiment of the present invention,
3 is a cross-sectional view of a quartz heater according to a second embodiment of the present invention,
4 is an exploded perspective view of a quartz heater according to a second embodiment of the present invention,
5 is a cross-sectional view of a quartz heater according to a third embodiment of the present invention, and FIG.
6 is a cross-sectional view of a quartz heater according to a fourth embodiment of the present invention, and FIG.
7 is an exploded perspective view of a quartz heater according to a fourth embodiment of the present invention,
8 is a cross-sectional view of a quartz heater according to a fifth embodiment of the present invention.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. In addition, the embodiment described below does not unduly limit the content of the present invention described in the claims, and the entire structure described in this embodiment is not necessarily essential as the solution means of the present invention. In addition, the description of the prior art and those obvious to those skilled in the art may be omitted, and the description of the omitted components and the function may be sufficiently referred to within the scope of the technical idea of the present invention.

A substrate processing apparatus according to an embodiment of the present invention is a device for uniformly heating a semiconductor substrate to deposit a thin film on a semiconductor wafer. Such a substrate processing apparatus roughly comprises a base plate, a plurality of plates, and a cover plate, and each plate is formed of quartz. Various methods for applying uniform heat to the semiconductor wafer placed on the upper surface of the cover plate are disclosed. In an embodiment of the present invention, a thermocouple is inserted into the inner zone and the outer zone, respectively, So that uniform heat can be applied by independently controlling the temperatures of the heating elements disposed in the zones. The inner zone thermocouple is disposed in the central region of the substrate support, and the outer zone thermocouple is disposed in the outer region of the substrate support. Accordingly, various embodiments for inserting a thermocouple in an outer zone are described below.

(First embodiment of substrate support)

The substrate support 100 according to the first embodiment includes a base plate 110, a plurality of plates 120 and 130, a cover plate 150, and a cover plate 150 on which a substrate (or a wafer) And a heat transfer member 140 disposed inside the first and second heat generating bodies 122 and 132 to uniformly transfer heat generated from the first and second heat emitting bodies 122 and 132 to the substrate. Further, it further includes a heat reflecting plate 180 disposed inside the base plate 110. At this time, the base plate 110, the plurality of plates 120 and 130, and the cover plate 150 are all made of quartz.

A shaft 10 is joined to the lower side of the base plate 110 and a first heating plate 120 is joined to the upper surface of the base plate 310. The base plate 110 is manufactured in a plate shape having an area larger than an area capable of supporting the substrate, and can be manufactured in the same shape as the shape of the substrate. For example, the base plate 110 may have a circular plate shape. Of course, the present invention is not limited thereto, but can be modified into various shapes.

The base plate 110 has a heat reflection plate insertion groove 111 and a heat reflection plate 180 is seated in the heat reflection plate insertion groove 111. The heat reflector insertion grooves 111 are formed as grooves except for the outer rim of the base plate 110 as shown in Fig. Accordingly, the base plate 110 and the first heating plate 120 are bonded to each other along the outer frame. The heat reflecting plate 180 is preferably formed in the same shape as the base plate 110, and has a circular plate shape as an example. The heat reflecting plate 180 can prevent the heat emitted from the heat generating member from being transmitted in the lower direction and reduce the heat loss by allowing the heat of the heater to proceed in a direction other than the downward direction (preferably upward). Therefore, it is preferable that the heat reflecting plate 180 is disposed in the lower direction of the heat generating element. The heat reflecting plate 180 is preferably smaller than the thickness and diameter of the base plate 110. Further, it is preferable that the diameter of the heat reflecting plate 180 is made to cover up to the position of the first heating element 122 located at the outermost position. That is, it is preferable that the distance from the center of the first heating element plate to the first heating element 122 located at the outermost position and the diameter of the thermal reflector 180 are equal to each other, or at least the diameter of the thermal reflector 180 is larger.

The heat reflecting plate 180 is made of a material having excellent heat radiation function. For example, it can be made of a (porous) material containing a plurality of pores. At this time, by using a porous material, heat radiated to the outside can be reduced. That is, the heat generated from the heating element scatters heat emitted in the lower direction of the thermal reflector 180 by the thermal reflector 180 having a plurality of pores, thereby reducing the heat wavelength and decreasing the transmittance, . Accordingly, the heat generated in the heating element can be prevented from being discharged to the lower side of the heat reflecting plate 180, and the thermal efficiency used for heating the substrate can be increased. Porous quartz is used in the embodiment of the present invention as a material for manufacturing the heat reflector 180, but the present invention is not limited thereto, and various members such as silicon carbide (SiC) can be used. Further, the heat reflecting plate 180 may be omitted if necessary.

The heat reflecting plate 180 is inserted and seated in the heat reflecting plate insertion groove 111 of the base plate 110 as described above. At this time, an outer zone thermocouple insertion groove 160 is formed in the heat reflector 180 for inserting the outer zone thermocouple. 2, the outer zone thermocouple insertion groove 160 includes a first thermocouple insertion groove 161 in which a groove is formed upward from the lower central region of the base plate 110, And a second thermocouple insertion groove 162 in which a groove is formed on the thermal reflector 180 from one end of the thermocouple insertion groove 161 toward the outside of the thermal reflector 180. The thermocouple tube 170 is inserted into the outer zone thermocouple insertion groove 160. An outer zone thermocouple is inserted into the thermocouple tube (170). The outer zone thermocouple is inserted from below the hollow shaft 10 toward the base plate.

On the other hand, the second thermocouple insertion groove 162 is formed in the heat reflecting plate 180. At this time, when the second thermocouple insertion groove 162 is formed on the upper surface or the entire surface of the thermal reflector 180, the first thermocouple insertion groove 121 formed in the first heating element plate 120 when the outer zone thermocouple is inserted Insertion interference occurs. Therefore, it is preferable that the thermocouple tube 170 is inserted into the outer zone thermocouple insertion groove 160. When the second thermocouple insertion groove 162 is formed on the lower surface of the heat reflecting plate 180, the thermocouple tube 170 is not necessary because insertion interference does not occur. 1 and 2 illustrate that the second thermocouple insertion groove 162 is formed on the entire surface of the heat reflecting plate 180. As shown in Fig.

It is preferable that the inner zone thermocouple is disposed on the upper side of the heat reflecting plate 180 and disposed in a substantially central region of the first heating plate 120. Therefore, the inner zone thermocouple senses the temperature of the inner zone, and at the same time, the outer zone thermocouple can sense the temperature of the outer zone. By simultaneously sensing the temperature of the inner zone and the temperature of the outer zone, the heat transmitted to the substrate can be uniformly transmitted.

The thermocouple tube 170 is made of a quartz or ceramic material and is preferably formed of quartz, which is the same material as the respective plates 110, 120, 130 and 150. The thermocouple tube 170 is formed to have a substantially "cross-shaped" cross-section as shown in FIG.

The plurality of plates are formed as a first and a second heating plate 120, 130 having a multi-layer structure for pattern-arranging heaters in the inner zone and the outer zone, respectively. 1 and 2, the first heating element 122 disposed on the first heating element plate 120 is formed in the inner zone and the second heating element 132 disposed on the second heating element plate 130 Is formed in the outer zone. However, if necessary, the first heating element 122 may be formed in the outer zone and the second heating element 132 may be formed in the inner zone.

The first and second heating element insertion grooves 121 and 131 are patterned in the first and second heating element plates 120 and 130. The openings of the first and second heating element insertion grooves 121 and 131 are formed in the lower surface of the lower surface of each plate. If an opening is formed on the upper surface of each plate as shown in FIGS. 6 and 8, a lower cover plate is further needed to prevent electrical contact between the second heating element and a heat transfer member described later . 6, the lower cover plate is disposed between the cover plate 450 and the second heating plate 430 and bonded to each other with an adhesive.

The first heating element insertion groove 121 is patterned in the inner zone and the second heating element insertion groove 131 is formed in the outer zone in a pattern. However, as described above, the first heating element insertion groove 121 may be patterned in the outer zone and the second heating element insertion groove 131 may be patterned in the inner zone. The first and second heating elements 122 and 132 inserted into the first and second heating element insertion grooves 121 and 131 may be formed to extend over the heating wire which is a resistor to bend a plurality of times and occupy a predetermined area. Here, it is preferable that the heat generating element is a heat line (or a heater) capable of emitting heat, and when arranged on the first and second plates 120 and 130, the heat generating elements are arranged to be patterned and spaced from each other. However, the patterning of the heating element is not limited to the pattern shown in the drawing, but can be modified into various shapes. For example, the heating element may be patterned by adjusting the spacing distance in various ways depending on the environmental conditions of the process, the characteristics of the process, the heating purpose of the substrate, and the like. As an example of the patterning, a heating element may be arranged so that heat is concentrated on an edge area as compared with a central area of the substrate, or a heating element may be provided so that the heating element is opposite. That is, in the above example, the heating line of the heating element may be arranged in a position corresponding to the edge of the substrate (tightly), and the heating line may be disposed in a position corresponding to the center area. The heating element generates heat capable of heating the substrate. A heating element, which is a resistor capable of converting electrical energy into heat, is used as a heating element. At this time, the heating wire can use various materials that can act as resistors such as tungsten, silicon carbide (SiC), and carbon.

A substrate is disposed on the upper region (or upper surface) of the cover plate 150. The cover plate 150 is joined to the second heating plate 130. The cover plate 150 is manufactured in the shape of a circular plate having an area larger than an area where the substrate can be supported, and is preferably formed in the same shape as the shape of the substrate. Of course, the present invention is not limited thereto, but can be modified into various shapes. As shown in FIG. 2, the cover plate 150 has a rim protruding upward along the circumferential direction at its outer end. That is, the cover plate 150 becomes a receiving space in which the other region except the rim provided in the outer circumferential direction can house the heat transfer member 140 inside. The heat transfer member 140 is placed in the accommodation space. The lower cover plate 330 has a circular plate shape in cross section. However, the present invention is not limited thereto and can be manufactured in various shapes.

The base plate 110, the plurality of plates 120 and 130, and the cover plate 150 may be made of quartz (or quartz). The quartz used here has excellent heat permeability but low thermal conductivity. That is, heat generated in the heating elements 122 and 132 is transmitted through the lid plate 150 to the substrate positioned above the lid plate 150, but heat transfer in the horizontal direction is not easy. Generally, quartz heaters have more heat loss in the outer zone (outer zone of the heating body) under the same conditions than the inner zone (central zone of the heating body) on the same plane due to various environmental conditions. Therefore, there is a problem that the temperature uniformity of the inner zone and the outer zone of the quartz heater are not uniform (inducing poor deposition of wafers), and the plate is made of quartz and heat transfer in the horizontal direction is not easy. The problem becomes even higher. The heat transfer member 140 to be described later is inserted into the cover plate 150 to spread the heat in the horizontal direction to uniformly heat the substrate by adjusting the temperature uniformity of the inner zone and the outer zone of the quartz heater .

Referring to FIG. 2, the heat transfer member 140 spreads heat generated in the first and second heat generating elements 122 and 132 in a horizontal direction. The heat transfer member 140 is disposed in the receiving space of the cover plate 150. The cover plate 150 has a rim protruding upwardly in the circumferential direction of the rim of the cover plate 150, thereby providing a receiving space in which the heat transfer member 140 can be placed. 1 and 2, the thickness of the heat transfer member 140 may be less than or equal to the rim height of the cover plate or the height of the embossing 151 described later. Accordingly, a space may be formed between the heat transfer member 140 and the cover plate 150, which compares the thermal expansion of the heat transfer member 140. That is, when the heat transfer member 140 is inserted into the cover plate 150 without forming a space between the heat transfer member 140 and the cover plate 150, the thermal expansion of the cover plate 150 due to the thermal expansion of the heat transfer member 140, There is a risk of breakage. However, if a space is provided between the heat transfer member 140 and the cover plate 150, even if the heat transfer member 140 expands according to the thermal expansion coefficient, there is a predetermined clearance in the accommodation space in the cover plate 150 It is possible to prevent the problem that the cover plate 150 is cracked due to pressure from the inside. The heat transfer member 140 is formed into a circular plate shape corresponding to the shape of the substrate and the cover plate 150, respectively. However, the present invention is not limited thereto and can be variously modified. In addition, the heat transfer member 140 may be in the form of a continuous plate (not shown) or a mesh shape having an embossed insertion groove 141 as shown in FIG. The heat transfer member 140 may be made of various materials having higher thermal conductivity than quartz. In particular, a metal material may be used for the heat transfer member 140, for example, platinum, oxidized nickel, or the like.

An embossing 151 protruding upward is patterned and arranged on the cover plate 150. The patterning of the embossing 151 is formed to correspond to the patterning of the embossing insertion groove 141 of the heat transfer member 140 described above. Here, the number and arrangement of the embossings 151 may be variously changed. For example, when the number of the embossings 151 is one, the embossing 151 may be disposed at the center of the cover plate 150. Also, when the number of embossings 151 is two, they may be disposed apart from each other by the same distance from the center on an arbitrary straight line passing through the center of the cover plate 150. Further, when the number of the embossings 151 is three, they can be arranged on the vertexes of any triangles apart from each other by the same distance from the center. In this manner, the cover plate 150 can include the embossing 151 to maintain a constant patterning interval from its center position. As a result, a cover plate 150 including a plurality of protrusions (or embossings) as shown in FIG. 2 can be manufactured.

(Second embodiment of substrate support)

The substrate support according to the second embodiment will be described with reference to Figs. 3 to 4. Fig. The second embodiment differs from the first embodiment in that the outer-zone thermocouple insertion grooves 260 are formed on the base plate 210 without the heat reflecting plate, and the first and second heating plate 220 and 230, The cover plate 240, and the cover plate 250, which are not described in the second embodiment, will be replaced by the description of the first embodiment described above.

The outer-zone thermocouple insertion groove 260 according to the second embodiment is formed on the base plate 210. As shown in FIG. 3, the outer zone thermocouple insertion groove 260 includes a first thermocouple insertion groove 261 and a first thermocouple insertion groove 261 formed in the lower central region of the base plate 210 in the upward direction, And a second thermocouple insertion groove 262 in which a groove is formed on the base plate 210 from one end of the base plate 210 toward the outside of the base plate 210. The thermocouple tube 270 is inserted into the outer zone thermocouple insertion groove 260. An outer zone thermocouple is inserted into the thermocouple tube (270).

When the second thermocouple insertion groove 262 is formed on the upper surface or the entire surface of the base plate 210, the first thermocouple insertion groove 221 formed in the first heat generator plate 220 when the outer zone thermocouple is inserted Insertion interference occurs. Therefore, it is preferable that the thermocouple tube 270 is inserted into the outer zone thermocouple insertion groove 260 and the outer zone thermocouple is inserted into the thermocouple tube 270. When the second thermocouple insertion groove 262 is formed on the lower surface of the base plate 210, insertion interference does not occur. Therefore, the thermocouple tube 270 is not necessary and can be inserted as needed.

(Third embodiment of substrate support)

The substrate support according to the third embodiment will be described with reference to FIG. The third embodiment is provided with a heat reflecting plate 380 and an intermediate plate 315 which are formed in the same pattern as the first heat emitting body 322 in comparison with the first and second embodiments. Furthermore, the outer zone thermocouple insertion grooves 360 are formed in the base plate 310 and the intermediate plate 315, respectively. The description of the contents not described in the second embodiment will be omitted from the description of the first embodiment described above.

First, the heat reflecting plate 380 and the heat reflecting plate insertion groove 311 are formed in the same pattern as the first heat emitting body 322 or the first heat emitting body insertion groove 321. A heat reflector insertion groove 311 is formed on the base plate 310. [ At this time, the opening of the heat reflection plate insertion groove is formed to face upward on the upper surface of the base plate 310. The opening of the first heating element insertion groove 321 is formed so as to face downward on the lower surface of the first heating element plate 320 and the opening of the heat reflection plate insertion groove is formed on the upper surface of the base plate 310 An intermediate plate 315 is required to form the outer zone thermocouple insertion groove 360. [

The intermediate plate 315 is made of quartz, and is disposed between the first heating plate 320 and the base plate 310 and bonded to each other. As shown in FIG. 5, the outer zone thermocouple insertion groove 360 has a first thermocouple insertion groove 361 and a first thermocouple insertion groove 361, which are grooves formed upward from the lower central region of the base plate 310, And a second thermocouple insertion groove 362 in which a groove is formed on the intermediate plate 315 from the one end of the intermediate plate 315 toward the outside of the intermediate plate 315. The thermocouple tube 370 is inserted into the outer zone thermocouple insertion groove 360. An outer zone thermocouple is inserted into the thermocouple tube (370).

When the second thermocouple insertion groove 362 is formed on the upper surface or the entire surface of the intermediate plate 315, the first thermocouple insertion groove 321 formed in the first heat generating plate 320 when the outer zone thermocouple is inserted Insertion interference occurs. Therefore, it is preferable that the thermocouple tube 370 is inserted into the outer zone thermocouple insertion groove 360, and the outer zone thermocouple is inserted into the thermocouple tube 370. When the second thermocouple insertion groove 362 is formed on the lower surface of the intermediate plate 315, insertion interference does not occur. Therefore, the thermocouple tube 370 is not necessary and can be inserted as needed.

(Fourth Embodiment of Substrate Supporting Member)

The substrate support according to the fourth embodiment will be described with reference to FIGS. 6 and 7. FIG. The fourth embodiment differs from the first to third embodiments in that the openings of the first and second heating element insertion grooves 421 and 431 are formed on the upper surfaces of the first and second heating element plates 420 and 430 in the upward direction. Since the opening is formed on the upper surface of the second heating element plate 430, the lower cover plate is disposed between the cover plate 450 and the second heating element plate 440 in order to prevent electrical contact between the second heating element 432 and the heat transfer member 440. [ (430) and bonded together. The description of the contents not described in the fourth embodiment will be omitted from the description of the embodiments described above.

As shown in FIG. 6, since the opening of the first heating element insertion groove 421 is formed on the upper surface of the first heating element plate 420, a thermocouple tube is basically not required. That is, insertion interference does not occur when the outer zone thermocouple is inserted from the lower side of the shaft 10 toward the base plate 410.

6, the outer zone thermocouple insertion groove 460 is formed on the base plate 410 in the same manner as in the second embodiment. The outer plate thermocouple insertion groove 460 is formed on the upper surface, the lower surface, or the entire surface of the base plate 410 Can be formed on one side. As another example, the outer zone thermocouple insertion groove may be formed in a circular plate-like heat reflecting plate as in the first embodiment. That is, the base plate 410 is formed with a heat reflecting plate insertion groove in which a heat reflection plate is inserted and received, and an outer zone thermocouple insertion groove may be formed on the heat reflecting plate and the base plate. The description of the embodiment will be omitted.

(Fifth Embodiment of Substrate Supporting Member)

The substrate support according to the fifth embodiment will be described with reference to FIG. The fifth embodiment is different from the fourth embodiment in that the second thermocouple insertion groove 562 of the outer zone thermocouple insertion groove 560 is formed on the lower surface of the first heating element plate 520. In other words, the outer zone thermocouple insertion groove 560 includes a first thermocouple insertion groove 561 in which a groove is formed toward the upper side in the lower region of the base plate 510, and a first thermocouple insertion groove 561, And a second thermocouple insertion groove (562) in which a groove is formed on the first heating plate (520) toward the outside of the heating plate (520). At this time, the second thermocouple insertion groove 562 is formed on the lower surface of the first heating element plate 520. 8, when the second thermocouple insertion grooves 562 are formed on the lower surface of the first heat generator plate 520 (that is, when a certain gap exists between the second thermocouple insertion grooves and the first heat generating element insertion grooves) In the case where the second thermocouple insertion groove 562 is formed to penetrate the first heat generating element insertion groove 521, the thermocouple tube may be inserted in the outer zone to prevent insertion interference when the outer zone thermocouple is inserted, Is inserted into the thermocouple insertion groove (560).

Since the second thermocouple insertion groove 562 is formed on the lower surface of the first heating element plate 520, the base plate 510 may be provided with a heat reflecting plate in a circular plate shape as in the first embodiment, Alternatively, the heat reflecting plate may be pattern-arranged in the same pattern as the first heating element 522 or the first heating element insertion groove 521 as in the third embodiment. The description of the contents not described in the fourth embodiment is to be replaced with the description of the embodiments described above.

In the various embodiments described above, a thermal coupler (or thermocouple, TC) may be disposed in the inner zone and the outer zone, respectively, to sense the temperature of the inner zone and the outer zone. That is, in order to sense the temperature of the inner zone, the inner zone thermocouple is disposed in any one region of the first heating plate (preferably, the central region of the first heating plate). In order to sense the temperature of the outer zone, An outer zone thermocouple is disposed in any one region of the plate (preferably, the outer region of the first heating plate).

Meanwhile, although the outer-zone thermocouple insertion grooves are formed in one direction in the various embodiments described above, the outer-thermocouple insertion grooves may be formed in a plurality of radial directions. For example, four pieces may be formed in the directions of the north, south, east, and west sides of the base plate.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, As is well known to those skilled in the art. Accordingly, it is intended that the present invention cover the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.

It is to be understood that both the foregoing general description and the following detailed description of the present invention are exemplary and explanatory and are intended to be exemplary only and are not restrictive of the invention, It will be possible.

The configuration and functions of the above-described components have been described separately from each other for convenience of description, and any of the components and functions may be integrated with other components or may be further subdivided as needed.

Although the present invention has been described with reference to the embodiment thereof, the present invention is not limited thereto, and various modifications and applications are possible. In other words, those skilled in the art can easily understand that many variations are possible without departing from the gist of the present invention. In the following description, well-known functions or constructions relating to the present invention as well as specific combinations of the components of the present invention with respect to the present invention will be described in detail with reference to the accompanying drawings. something to do.

10: Shaft
110: base plate
111: Heat reflecting plate insertion groove (or seating groove)
120: first heating element plate
121: first heating element insertion groove
122: first heating element
130: second heating element plate
131: second heating element insertion groove
132: second heating element
140: heat transfer member (or thermal diffusion member or thermal equilibrium member)
141: embossing insertion groove
150: cover plate
151: embossing (or projection)
160: Outer zone thermocouple insertion groove
161: first thermocouple insertion groove
162: second thermocouple insertion groove
170: thermocouple tube
180: Heat reflector (or thermal barrier)
210: Base plate
220: first heating element plate
221: first heating element insertion groove
222: first heating element
230: second heating element plate
231: second heating element insertion groove
232: second heating element
240: heat transfer member (or thermal diffusion member or thermal equilibrium member)
241: embossing insertion groove
250: cover plate
251: embossing (or projection)
260: outer zone thermocouple insertion groove
261: first thermocouple insertion groove
262: second thermocouple insertion groove
270: thermocouple tube
310: Base plate
311: Heat reflection plate insertion groove (or seating groove)
315: intermediate plate
320: first heating element plate
321: first heating element insertion groove
322: first heating element
330: second heating element plate
331: second heating element insertion groove
332: second heating element
340: heat transfer member (or thermal diffusion member or thermal equilibrium member)
341: embossing insertion groove
350: cover plate
351: embossing (or projection)
360: outer zone thermocouple insertion groove
361: first thermocouple insertion groove
362: second thermocouple insertion groove
370: Thermocouple tube
380: Heat reflector (or thermal barrier)
410: base plate
420: first heating plate
421: first heating element insertion groove
422: first heating element
430: second heating element plate
431: second heating element insertion groove
432: second heating element
440: heat transfer member (or thermal diffusion member or thermal equilibrium member)
441: embossing insertion groove
450: cover plate
451: embossing (or projection)
460: outer zone thermocouple insertion groove
461: first thermocouple insertion groove
462: second thermocouple insertion groove
510: Base plate
520: first heating element plate
521: first heating element insertion groove
522: first heating element
530: second heating plate
531: second heating element insertion groove
532: Second heating element
540: heat transfer member (or thermal diffusion member or thermal equilibrium member)
541: embossing insertion groove
550: cover plate
551: Embossing (or protrusion)
560: Outer zone thermocouple insertion groove
561: first thermocouple insertion groove
562: second thermocouple insertion groove

Claims (16)

A base plate coupled with the shaft,
A plurality of plates laminated on the base plate and each having a heating element insertion groove formed in a predetermined pattern along an inner zone and an outer zone,
An outer zone thermocouple insertion groove for sensing the temperature of the outer zone is formed, and the base plate, the plurality of plates, and the cover plate are made of quartz
An inner zone thermocouple, which senses the temperature of the inner zone, is located in the central zone to sense the temperatures of the inner and outer zones,
The first and second heating element insertion grooves are formed in the first and second heating element insertion grooves for inserting the first and second heating elements.
The opening of the first heating element insertion groove formed in the first heating element plate is brought into contact with the outer zone thermocouple insertion groove and the thermocouple tube is inserted into the outer zone thermocouple insertion groove, (1) so as not to interfere with each other with respect to the heat generating element insertion groove.
The method according to claim 1,
And a heat reflecting plate received and seated in the heat reflecting plate insertion groove formed on one surface of the base plate,
The heat reflection plate or the heat reflection plate insertion groove is formed in the same pattern as the heat emission body or the heat emission body insertion groove disposed relatively close to the heat reflection plate,
Further comprising an intermediate plate disposed between the base plate and the first heating plate disposed relatively close to the base plate of the plurality of plates.
3. The method of claim 2,
Wherein the intermediate plate is made of quartz,
In the intermediate plate,
And the outer zone thermocouple insertion groove is formed.
The method of claim 3,
Wherein the outer zone thermocouple insertion groove comprises:
A first thermocouple insertion groove in which a groove is formed in an upward direction in a lower region of the base plate,
And a second thermocouple insertion groove in which a groove is formed on the intermediate plate from one end of the first thermocouple insertion groove toward the outside of the intermediate plate.
5. The method of claim 4,
Wherein the second thermocouple insertion groove is formed on one of an upper surface, a lower surface, and an entire surface of the intermediate plate,
And a thermocouple tube inserted into the outer zone thermocouple insertion groove to insert the outer zone thermocouple when the second thermocouple insertion groove is formed on the upper surface of the intermediate plate.
6. The method of claim 5,
Wherein the thermocouple tube is formed of quartz or ceramic and has a "LR or" shape.
A base plate coupled with the shaft,
A plurality of plates formed of a first and a second heating plate of a multilayer structure, laminated on the base plate, wherein the heating element insertion grooves are formed in a predetermined pattern along the inner zone and the outer zone,
A heat transfer member which is accommodated in the accommodating space of the cover plate to uniformly transfer heat generated in the heat generating element to the substrate, and
An outer zone thermocouple insertion groove for sensing the temperature of the outer zone is formed, and the base plate, the plurality of plates, and the cover plate are made of quartz
An inner zone thermocouple, which senses the temperature of the inner zone, is located in the central zone to sense the temperatures of the inner and outer zones,
The first and second heating element insertion grooves are formed in the first and second heating element insertion slots. The openings of the first and second heating element insertion grooves are formed on the upper surface of the first and second heating element insertion grooves, So as not to be in electrical contact with each other between the second heating element disposed in the first heating element and the heat transfer member.
8. The method of claim 7,
Further comprising a lower cover plate disposed between the cover plate and the second heat generating plate disposed relatively close to the cover plate among the plurality of plates.
9. The method of claim 8,
Wherein the lower cover plate prevents electrical contact between the second heating element disposed on the second heating element plate and the heat transfer member.
8. The method of claim 7,
Wherein the outer zone thermocouple insertion groove comprises:
Wherein the base plate is formed on the base plate.
11. The method of claim 10,
Wherein the outer zone thermocouple insertion groove is formed on one of an upper surface, a lower surface, and an entire surface of the base plate.
12. The method of claim 11,
When the outer zone thermocouple insertion groove is formed on the upper surface of the base plate,
A first thermocouple insertion groove in which a groove is formed in an upward direction in a lower region of the base plate,
And a second thermocouple insertion groove in which a groove is formed on the base plate from an end of the first thermocouple insertion groove toward an outward direction of the base plate.
12. The method of claim 11,
When the outer zone thermocouple insertion groove is formed on the lower surface of the base plate,
And a groove is formed in a direction toward the outside from a central region of the lower surface of the base plate.
8. The method of claim 7,
Wherein the outer zone thermocouple insertion groove comprises:
Wherein the base plate is formed on a first heat generating plate disposed relatively close to the base plate among the plurality of plates.
15. The method of claim 14,
Wherein the outer zone thermocouple insertion groove comprises:
A first thermocouple insertion groove in which a groove is formed in an upward direction in a lower region of the base plate,
And a second thermocouple insertion groove in which a groove is formed on the first heating element plate from one end of the first thermocouple insertion groove toward the outside of the first heating element plate.
16. The method of claim 15,
And the second thermocouple insertion groove is formed on the lower surface of the first heating plate.

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