KR20180115583A - large diameter rotary gantry valve - Google Patents

Abstract

According to the present invention, a large diameter rotary gantry valve comprises: a base plate having a flow hole where fluid flows; a rotational shaft disposed at a center of the base plate; an opening and closing unit rotating the rotational shaft; a first sill plate connected to the rotational shaft and rotated with the rotational shaft to open and close a partial area of the flow hole; and at least one second sill plate opening and closing the remaining area of the flow hole opened and closed by the first sill plate. The lightweight large diameter rotary gantry valve is manufactured through a simple configuration to reduce manufacturing costs and minimize vibration to minimize generation of particles to improve reliability of a process.

Description

Large diameter rotary gantry valve < RTI ID = 0.0 >

The present invention relates to a large-diameter rotary gantry valve, and more particularly, to a large-diameter rotary gantry valve installed between a chamber and a pump to control the flow of a fluid.

The processor chamber used for semiconductor manufacturing, display manufacturing, and the like may be a chamber such as a turbo molecular pump (TMP), a cryo pump, or the like to form a vacuum atmosphere inside the chamber or to discharge foreign materials inside the chamber to the outside. And connected to a high vacuum pump. At this time, a gate valve for interrupting the fluid is installed between the processor chamber and the pump.

Such gate valves have already been disclosed in Korean Patent Registration No. 1425811, "Large-Scale Rotating Gantry Valves with Back Pressure Corresponding to Reverse Pressure with Structure Constituting High-Speed Pressure Control and Particle Generation". The patent discloses a body having a circular opening formed therein, and a seal plate having a diameter larger than that of the opening is configured to open and close the opening while pivoting while rotating around a rotation axis.

The pendulum gate valve as in the above patent has the following problems.

First, since the rotation radius of the seal plate necessary for opening and closing the gate valve must be secured, there is a problem that the size of the entire gate valve is increased and the weight is heavy.

Secondly, since the rotation radius of the seal plate is increased when the gate valve is opened and closed, particles due to vibration are generated.

Third, the manufacturing cost of the gate valve is increased.

Fourth, there is a problem that the durability of the gate valve is lowered and the service life is shortened.

The above-mentioned problems are that, when a pump having a relatively large capacity such as a turbo pump or a cryo pump is used, since a large-diameter pipe is used to connect the chamber and the pump, It appears to be prominent.

Korean Registered Patent No. 1425811 (Announcement of 2014. 08. 05)

A first object of the present invention is to provide a lightweight large-diameter rotary gantry valve with a simple structure.

A second object of the present invention is to provide a large-diameter rotating gantry valve that minimizes the generation of particles by minimizing vibration.

A third object of the present invention is to provide a large-diameter rotating gantry valve for reducing manufacturing costs.

A fourth object of the present invention is to provide a large-diameter rotating gantry valve for improving durability.

A large-diameter rotary gantry valve according to the present invention includes: a base plate having a flow hole through which a fluid flows; a rotation shaft disposed at the center of the base plate; an opening and closing drive unit for rotating the rotation shaft; A first seal plate which is driven to open and close a part of the flow hole and at least one second seal plate which opens and closes the remaining area of the flow hole opened and closed by the first seal plate.

The large-diameter rotary gantry valve may further include a traction driver for traversing the second seal plate as the one-seal plate is rotationally driven to rotate the second seal plate together with the first seal plate.

The pulling driving unit includes a pulling pin which is coupled to the second seal plate and protrudes toward the first seal plate, and a pulling guide hole to which the pulling pin is inserted to restrain the pulling pin, And a traction plate rotatably driven together with the first seal plate.

The large diameter gantry valve may further include a side wall protruding from a rim of the base plate to form a housing of the cylindrical body, and the second seal plate may be disposed between the base plate and the first seal plate have.

Wherein the large diameter gantry valve is supported on the side wall and after the first seal plate and the second seal plate completely close the flow hole, the first seal plate is pressed toward the base plate, And a closing and maintaining unit that keeps the plate and the second seal plate in a state of closing the flow hole.

The closed holding portion may include a plurality of cylinders supported on the side walls and spaced apart at a uniform interval from each other in the circumferential direction of the side walls to press the first seal plate.

Wherein the closing and maintaining unit further includes a pressure detecting sensor for detecting the pressure of the plurality of cylinders and a pressure distributor for individually controlling the pressure supplied to the plurality of cylinders in accordance with the pressure of the plurality of cylinders detected by the pressure detecting sensor can do.

The large-diameter rotary gantry valve is disposed between the base plate and the second seal plate to perform a damping action between the base plate and the second seal plate. The airtight seal between the base plate and the second seal plate And a second seal plate disposed between the first seal plate and the second seal plate and acting as a buffer between the first seal plate and the second seal plate, And a second seal that maintains airtightness between the plates.

The large-diameter rotary gantry valve further includes a separation drive unit for separating the second seal plate from the base plate and separating the first seal plate from the second seal plate as the pressing of the first seal plate is released can do.

The spacing driver may include a first elastic body for elastically supporting the second seal plate and a second elastic body for elastically supporting the first seal plate.

The large-diameter rotary gantry valve according to the present invention can produce a lightweight large-diameter rotary gantry valve with a simple structure, thereby reducing manufacturing cost.

Also, the large-diameter rotary gate valve according to the present invention minimizes the vibration, minimizes the generation of particles, and improves the reliability of the process.

Further, the large-diameter rotary gate valve according to the present invention has an effect of improving the durability and providing convenience of maintenance, management, and repair.

1 is a perspective view showing an appearance of a large-diameter rotary gantry valve according to the present embodiment.
FIG. 2 is an exploded perspective view showing a coupling relationship of the large-diameter rotary gate valve according to the present embodiment.
3 is an exploded perspective view showing a coupling relationship between the base plate and the first and second seal plates in the large-diameter rotary gate valve according to the present embodiment.
4 is a cross-sectional perspective view showing a part of a large-diameter rotary gate valve according to the present embodiment.
5 is a conceptual diagram for explaining a fully opened state of the large-diameter rotary gantry valve according to the present embodiment.
6 is a conceptual view for explaining a partially closed state of the large-diameter rotary gantry valve according to the present embodiment.
7 is a conceptual diagram for explaining a fully closed state of the large-diameter rotary gantry valve according to the present embodiment.
8 is a conceptual diagram for explaining an operation of switching the flow hole to a partially opened state in the fully closed state of the large diameter rotating gantry valve according to the present embodiment.
9 is a conceptual diagram for explaining an operation of switching from a partly closed state to a fully opened state of the large diameter rotating gantry valve according to the present embodiment.

The terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary terms and the inventor may appropriately define the concept of the term in order to best describe its invention It should be construed as meaning and concept consistent with the technical idea of the present invention. Therefore, the embodiments described in the present specification and the configurations shown in the drawings are only examples of the present invention, and are not intended to represent all of the technical ideas of the present invention, so that various equivalents and modifications may be made thereto .

In the following description, for the convenience of description and convenience, the number of components will be described with reference to the accompanying drawings, and the directions of arrangement of the components shown in the drawings will be described with the upper, lower, left, and right . It is to be understood that the present invention is not limited to the number and arrangement direction of the respective components described above, Will be.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a large diameter rotating gantry valve according to the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a perspective view showing the outer appearance of a large-diameter rotary gantry valve according to the present embodiment, FIG. 2 is an exploded perspective view showing a coupling relationship of the large- FIG. 4 is an exploded perspective view showing a part of a large-diameter rotary gate valve according to an embodiment of the present invention. FIG. 4 is an exploded perspective view showing a connection relationship between the base plate and the first and second seal plates.

1 to 4, a large-diameter rotary gate valve (hereinafter, referred to as a "gantry valve") according to the present embodiment includes a housing 10, a first seal plate 100, a second seal plate 200 A rotation shaft 300, an opening and closing driving part 400, and a tow driving part 500. [

The housing (10) forms the appearance of the gantry valve (1). The housing 10 may include a base plate 11 and side walls 13. The base plate 11 may be provided as a disc. The side wall 13 can protrude from the rim of the base plate 11 in a cylindrical shape.

A flow hole 15 may be formed in the base plate 11. The flow hole 15 allows the fluid to flow into and out of the gantry valve 1. The distribution hole 15 divides the base plate 11 radially into three regions with respect to the center of the base plate 11 and divides the region of the base plate 11 into two regions of approximately 240 Lt; RTI ID = 0.0 > of < / RTI >

Since the flow hole 15 is opened at an angle of about 240 with respect to the center of the base plate 11, if a single seal plate is used to open and close the flow hole 15, A seal plate provided at an angle of 240 DEG or more relative to the center of the plate 11 should be provided. However, if the single seal plate is provided at an angle of 240 DEG or more with respect to the center of the base plate 11, the flow hole 15 can not be fully opened when the gantry valve 1 is closed. Therefore, the gantry valve 1 can allocate areas for opening and closing the flow holes 15 in the first seal plate 100 and the second seal plate 200, respectively.

The first seal plate 100 may be provided as a disc. The first seal plate 100 is disposed inside the housing 10. A part of the flow hole (15) can be opened and closed in the first seal plate (100). That is, in the first seal plate 100, a first communication hole 110 communicating with the flow hole 15 is formed. The first communicating hole 110 is opened in the same area as the communicating hole 15 and the first seal plate 100 is disposed in a region excluding the first communicating hole 110 Approximately 120 [deg.]) Can be closed.

The second seal plate 200 may be provided as a disc. The second seal plate 200 is disposed inside the housing 10. The second seal plate 200 can open and close the remaining area of the flow hole 15 which is opened and closed by the first seal plate 100. That is, in the second seal plate 200, a second communication hole 210 communicating with the flow hole 15 is formed. The second communicating hole 210 is opened in the same area as the communicating hole 15 and the second seal plate 200 is opened in the remaining region except for the second communicating hole 210 Approximately 120 [deg.]) Can be closed.

As a result, the first seal plate 100 and the second seal plate 200 are formed in the same shape, and the second seal plate 200 is disposed on the base plate 11, A one-seal plate 100 may be disposed.

It is preferable that the first and second seal plates 110 and 200 are formed to have a plurality of ribs protruding between the plates in order to realize a light weight and ensure durability.

On the other hand, the rotary shaft 300 may be disposed at the center of the base plate 11. The rotary shaft 300 sequentially passes through the base plate 11, the second seal plate 200 and the first seal plate 100 so that the upper end thereof is exposed on the upper side of the first seal plate 100, 11). The rotary shaft 300 is rotationally driven by the open / close driving unit 400, which will be described later. The upper end of the rotary shaft 300 is fastened to the first seal plate 100 and the first seal plate 100 can be rotated together with the rotary shaft 300.

The opening and closing drive unit 400 drives the rotary shaft 300 to rotate. The opening and closing drive unit 400 may be disposed outside the housing 10. The opening and closing drive unit 400 may include a rotary actuator 410, a drive pulley (not shown), a driven pulley 430, and a belt 450.

The rotary actuator 410 is supported on the outer surface of the housing 10. The drive pulley (not shown) is connected to the output end of the rotary actuator 410. The driven pulley 430 is connected to the lower end of the rotary shaft 300. The belt 450 connects the driving pulley (not shown) and the driven pulley 430 to transmit the rotary power of the rotary actuator 410 to the rotary shaft. In order to minimize the generation of particles, the belt 450 is preferably made of stainless steel.

In the above description, the opening and closing drive unit 400 is described as being composed of the rotary actuator 410, the drive pulley (not shown), the driven pulley 430, and the belt 450, The driving unit 400 may use any driving device capable of rotationally driving the rotary shaft 300 such as a rack and pinion.

In this way, the rotation shaft 300 is rotated by the opening / closing drive unit 400, and the first seal plate 100 is coupled to the rotation shaft 300 and rotated together with the rotation shaft 300.

When the first seal plate 100 is rotated, the pulling drive unit 500 causes the second seal plate 200 to be pulled and rotated in a direction in which the first seal plate 100 is rotated. The traction drive 500 may include a traction pin 510 and a traction plate 530.

The pull pin 510 may be coupled to the second seal plate 200 and protrude toward the first seal plate 100. The traction plate 530 is fastened to the first seal plate. The pulling plate 530 is formed with a pulling guide hole 531 through which a pulling pin 510 is inserted to restrain the pulling pin 510. The pulling guide hole 531 is opened at 120 °. Accordingly, when the first seal plate 100 is rotated at an angle of less than 120 degrees, the second seal plate 200 is not rotated. When the first seal plate 100 is rotated by 120 degrees or more, The first seal plate 100 can be rotated in the direction in which the first seal plate 100 is rotated. The pulling pin 510 and the pulling guide hole 531 are provided in at least one pair so that the first and second seal plates 100 and 200 can rotate stably while maintaining the flatness of the first seal plate 100 and the second seal plate 200, It is preferably arranged to be symmetrical.

The pulling operation of the second seal plate 200 will be described later in more detail with reference to a separate drawing.

The gantry valve 1 may further include a closing and holding part 600 and a separation driving part 700.

The closure holding portion 600 allows the first seal plate 100 and the second seal plate 200 to firmly maintain the closed state of the flow hole 15 after the gantry valve 1 is closed. Closure retaining portion 600 may include a plurality of cylinders 610, a plurality of pressure detection sensors 630, and a pressure distributor 650.

The plurality of cylinders 610 may be disposed inside the side wall 13. The plurality of cylinders 610 press the first seal plate 100 toward the base plate 11 after the gantry valve 1 is closed. Accordingly, the first seal plate 100 may be in close contact with the second seal plate 200, and the second seal plate 200 may be in close contact with the base plate 11.

The plurality of cylinders 610 are preferably spaced apart from each other at a uniform interval in the circumferential direction of the side wall 13 in order to press the rim of the first seal plate 100 at a uniform pressure. In addition, a plurality of pressure detection sensors 630 detect the pressures of the plurality of cylinders 610, respectively. The pressure values of the plurality of cylinders 610 detected by the plurality of pressure detection sensors 630 are transmitted to a control unit (not shown), and the control unit (not shown) And distributes the pressure supplied to the plurality of cylinders 610 by controlling the distributor 650.

Thus, after the gantry valve 1 is closed, the gantry valve 1 presses the first seal plate 100 with a uniform pressure so that the gantry valve 1 is closed So that it can be maintained firmly.

A first seal ring 810 is disposed between the base plate 11 and the second seal plate 200 and a second seal seal 810 is provided between the second seal plate 200 and the first seal plate 100. [ 820 may be disposed.

The first seal 810 maintains airtightness between the base plate 11 and the second seal plate 200. The first seal 810 has a buffering action between the base plate 11 and the second seal plate 200 when the first seal plate 100 is pressed by the closing and holding unit 600.

The second seal 820 maintains airtightness between the second seal plate 200 and the first seal plate 100. The second seal 820 also acts as a buffer between the first seal plate 100 and the second seal plate 200 when the first seal plate 100 is pressed by the closing and holding part 600 .

When the closing and holding portion 600 releases the pressure of the plurality of cylinders 610 in order to open the gantry valve 1, the spacing drive portion 700 disengages the first seal plate 100 from the second seal plate 200, and the second seal plate 200 is spaced from the base plate 11. The spacing driver 700 may include a first elastic body 710 and a second elastic body 720.

The first elastic body 710 may be supported by the base plate 11 and disposed between the base plate 11 and the second seal plate 200. The second elastic body 720 is inserted into the hollow 310 formed in the rotary shaft 300. The second elastic body 720 is supported by the elastic body supporting tube 330 fastened to the pulling plate 530 and is indirectly fastened to the first thread plate 100. As a result, it can be seen that the first seal plate 100 is supported by the base plate 11 and has the same function as that disposed between the base plate 11 and the first seal plate 100. The first elastic body 710 and the second elastic body 720 exert an elastic force toward the first seal plate 100 from the base plate 11. As the first elastic body 710 and the second elastic body 720, a compression coil spring that exerts an elastic force toward the first seal plate 100 from the base plate 11 can be used.

Hereinafter, the operation of the large-diameter rotary gate valve according to the present embodiment will be described.

5 is a conceptual diagram for explaining a fully opened state of the large-diameter rotary gantry valve according to the present embodiment.

5, when the gantry valve 1 is opened, the flow hole 15, the first communication hole 110, and the second communication hole 210 are all communicated. That is, both the first seal plate 100 and the second seal plate 200 are arranged such that the first communication hole 110 and the second communication hole 210 are concentric with the flow hole 15, 15) can be opened in the entire area.

At this time, the first elastic body 710 separates the second seal plate 200 from the base plate 11, and the second elastic body 720 separates the first seal plate 100 from the second seal plate 200 .

The gantry valve 1 is provided with the flow hole 15, the first communication hole 110, the second communication hole 210, the base plate 11, Since the fluid flows into and out of the gantry valve 1 through the spacing space of the second seal plate 200 and the spaces between the second seal plate 200 and the first seal plate 100, .

6 is a conceptual view for explaining a state in which a part of the flow hole is partially closed by the first seal plate of the large-diameter rotary gate valve according to the present embodiment.

Referring to FIG. 6, in order to close the gantry valve 1, the opening and closing drive unit 400 drives the rotary shaft 300 to rotate. As the rotary shaft 300 rotates, the first seal plate 100 rotates together with the rotary shaft 300.

When the first seal plate 100 is rotated by approximately 120 DEG, a part (approximately 0 DEG to 120 DEG) of the flow hole 15 can be closed. At this time, the pull pin 510 is located inside the pull guide hole 531, and the pressure of the pull plate 530 does not act on the pull pin 510. Therefore, the second seal plate 200 can be held at the same position as when the gantry valve 1 is opened.

7 is a conceptual diagram for explaining a fully closed state of the large-diameter rotary gantry valve according to the present embodiment.

7, when the rotary shaft 300 is continuously rotated and the first seal plate 100 is rotated by an angle of more than 120 degrees, the pull pin 510 is brought into contact with the inner surface of the pull guide hole 531, The plate 530 pulls the pull pin 510. As the traction pin 510 is pulled, the second seal plate 200 fastened to the traction pin 510 rotates together with the first seal plate 100.

Subsequently, when the first seal plate 100 is rotated at an angle of approximately 240 °, the first seal plate 100 closes a partial area (approximately 120 ° to 240 °) of the flow hole 15, The seal plate 200 closes the first seal plate 100 and closes the remaining area (approximately 0 ° to 120 °) of the remaining flow hole 15.

Thus, when the flow hole 15 is rotated by the first seal plate 100 and the second seal plate 200, the gantry valve 1 is completely closed and the flow of the fluid is blocked.

Thereafter, the closing and maintaining unit 600 supplies pressure to the plurality of cylinders 610, and the plurality of cylinders 610 presses the first seal plate 100. The first seal plate 100 is brought into close contact with the second seal plate 200 and the second seal plate 200 is brought into close contact with the base plate 11 as the first seal plate 100 is pressed. The first seal 810 maintains the airtightness between the base plate 11 and the second seal plate 200 while the second seal 820 maintains the seal between the second seal plate 200 and the first seal plate 100 To maintain the confidentiality of.

Conversely, for the opening of the gantry valve 1, the closed holding portion 600 releases the pressure supplied to the plurality of cylinders 610, and the pressurized state of the first seal plate 100 is released. The first elastic body 710 separates the second seal plate 200 from the base plate 11 and the second elastic body 720 separates the first seal plate 100 from the second seal plate 200.

8 is a conceptual diagram for explaining an operation of switching the flow hole to a partially opened state in the fully closed state of the large diameter rotating gantry valve according to the present embodiment.

Referring to FIG. 8, the opening and closing drive unit 400 drives the rotation shaft 300 in the reverse direction. As the rotary shaft 300 is driven in the reverse direction, the first seal plate 100 rotates together with the rotary shaft 300 in the reverse direction.

When the first seal plate 100 is rotated at approximately -120 DEG, a part (approximately 240 DEG to 120 DEG) of the flow hole 15 can be opened. At this time, the pull pin 510 is located inside the pull guide hole 531, and the pressure of the pull plate 530 does not act on the pull pin 510. Therefore, the second seal plate 200 can be held at the same position as that of the gantry valve 1 when it is closed.

9 is a conceptual diagram for explaining an operation of switching from a partly closed state to a fully opened state of the large diameter rotating gantry valve according to the present embodiment.

9, when the rotary shaft 300 is continuously rotated in the reverse direction and the first seal plate 100 is rotated below an angle of -120 °, the pull pin 510 contacts the inner side surface of the pull guide hole 531 And the traction plate 530 pulls the traction pin 510. As the traction pin 510 is pulled, the second seal plate 200 fastened to the traction pin 510 rotates together with the first seal plate 100.

Subsequently, when the first seal plate 100 is rotated at an angle of approximately -240 DEG, the first seal plate 100 is aligned so that the first communication hole 110 is concentric with the flow hole 15, The two-chamber plate (200) is aligned so that the second communication hole (120) is concentric with the flow hole (15).

The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention as long as they are obvious to those skilled in the art.

1: Large diameter rotary gate valve 10: Housing
11: base plate 13: side wall
15: Distribution hole 100: First seal plate
110: first communication hole 200: second seal plate
210: second communicating hole 300: rotating shaft
310: Hollow 330: Elastic support tube
400: opening / closing drive part 410: rotary actuator
430: driven pulley 450: belt
500: pull drive part 510: pull pin
530: Traction plate 531: Traction guide hole
600: Closure maintaining part 610: Cylinder
630: Pressure detection sensor 650: Pressure distributor
700: a spacing driver 710: a first elastic member
720: second elastic body 810: first sealing
820: Second sealing

Claims (10)

A base plate on which a fluid flow hole is formed;
A rotating shaft disposed at the center of the base plate;
An open / close driving unit for rotating the rotation shaft;
A first seal plate connected to the rotating shaft and rotatably driven together with the rotating shaft to open and close a part of the flow hole;
And at least one second seal plate for opening and closing the remaining area of the flow hole opened and closed by the first seal plate. The method according to claim 1,
Further comprising a traction driver for traversing the second seal plate and rotating the second seal plate together with the first seal plate as the one seal plate is rotationally driven. 3. The method of claim 2,
The traction drive
A pull pin coupled to the second seal plate and projecting toward the first seal plate;
And a pulling plate formed with a pulling guide hole through which the pulling pin is inserted to restrain the pulling pin and which is coupled to the first threading plate and rotated together with the first threading plate. Tree valve. The method according to claim 1,
And a side wall protruding from a rim of the base plate to form a housing of the cylindrical body,
And the second seal plate is disposed between the base plate and the first seal plate. 5. The method of claim 4,
The first seal plate and the second seal plate being supported on the side wall and completely closing the flow hole,
Further comprising a closing and holding portion that presses the first seal plate toward the base plate to maintain a state in which the first seal plate and the second seal plate close the flow hole, . 6. The method of claim 5,
The closed-
And a plurality of cylinders supported on the side walls and spaced apart from each other at a uniform interval in the circumferential direction of the side wall to press the first seal plate. The method according to claim 6,
The closed-
A pressure detection sensor for detecting pressure of the plurality of cylinders;
And a pressure distributor for individually controlling pressures supplied to the plurality of cylinders in accordance with pressures of the plurality of cylinders detected by the pressure detection sensor. 6. The method of claim 5,
A first seal disposed between the base plate and the second seal plate to provide a buffer action between the base plate and the second seal plate and to maintain airtightness between the base plate and the second seal plate;
And a second seal plate disposed between the first seal plate and the second seal plate to perform a buffering action between the first seal plate and the second seal plate to maintain airtightness between the first seal plate and the second seal plate And a second sealing for sealing the large-diameter rotating gantry valve. 6. The method of claim 5,
Further comprising a spacing driver for separating the second seal plate from the base plate and separating the first seal plate from the second seal plate as the pressing of the first seal plate is released, Gantry valve. 10. The method of claim 9,
The spacing driver
A first elastic body elastically supporting the second seal plate;
And a second elastic body for elastically supporting the first seal plate.

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