KR20180085642A - Electromagnetic wave radiator - Google Patents

Abstract

Disclosed is an electromagnetic wave radiator which radiates a circularly polarized millimeter wave/terahertz wave. The electromagnetic wave radiator comprises: a first metal layer; multiple metal side walls vertically protruding along an edge of the first metal layer; and a second metal layer suspended over the first metal layer. The second metal layer includes multiple ports which protrude to extend in a diameter direction from an edge of the second metal layer and multiple slots which partially penetrate the second metal layer in the diameter direction.

Description

[0001] Electromagnetic wave radiator [0002]

The disclosed embodiment relates to an electromagnetic wave radiator, and more particularly to an electromagnetic wave radiator that emits a circularly polarized millimeter wave / terahertz wave.

A millimeter wave is an electromagnetic wave having a wavelength of 1 to 10 millimeters and has a frequency of 30 to 300 GHz. Millimeter waves are used in various fields such as military and automobile radar, satellite communication, and radio navigation, and are expected to be used for large-capacity voice, image and data transmission in the next generation 5G ultra-wideband mobile communication network. The terahertz wave is an electromagnetic wave having a frequency of 0.3 to 3 THz, which is used for security and medical purposes and is expected to be used in the future.

Accordingly, various devices for efficiently transmitting and receiving millimeter waves and terahertz waves are being developed. For example, a millimeter wave / terahertz wave microstrip patch antenna has a large area and a low Q-factor. In order to improve this, devices such as a multi-port driving antenna, a slot-ring traveling-wave radiator, a multi-port driven antenna with a radiator core, It has been proposed as a Hertz wave. However, these devices are still not high enough for the Q-factor.

And provides an electromagnetic wave radiator that emits a circularly polarized millimeter wave / terahertz wave.

An electromagnetic wave radiator according to an embodiment includes: a first metal layer; A plurality of metal sidewalls vertically protruding along an edge of the first metal layer; And a second metal layer suspended over the first metal layer, wherein the second metal layer comprises a plurality of ports extending radially from an edge of the second metal layer and a plurality of ports extending radially from the edge of the second metal layer, 0.0 > and / or < / RTI >

The plurality of metal sidewalls may be spaced between two adjacent metal sidewalls, and each port may be arranged to pass through an interval between the adjacent two metal sidewalls.

The first metal layer and the second metal layer may have the same regular polygonal shape.

Each side wall is disposed at an edge of one side of the first metal layer perpendicular to the upper surface of the first metal layer, the length of each side wall is smaller than the length of one side of the first metal layer, The spacing between the side walls may be located at the apex of the first metal layer.

In another example, the first metal layer and the second metal layer may have the same circular shape as each other.

In this case, each side wall is disposed perpendicular to the upper surface of the first metal layer at the edge of the first metal layer, the length of each side wall is smaller than the diameter of the first metal layer, May be arranged at equal intervals along the edge of the first metal layer.

The plurality of ports each protrude in a radial direction of the second metal layer between a plurality of intervals between the plurality of sidewalls, and the plurality of slots are formed in the center of the second metal layer and the respective vertexes of the second metal layer As shown in FIG.

The plurality of ports protrude radially from respective vertices of the second metal layer and the plurality of slots may be disposed between the center of the second metal layer and the respective vertexes of the second metal layer.

The second metal layer may be disposed in a space surrounded by the plurality of sidewalls.

The second metal layer may further include an opening partially penetrating the central region of the second metal layer.

The electromagnetic wave radiator further includes an oscillator for providing signals to the plurality of ports, respectively, and the oscillator may be configured such that signals provided to the plurality of ports have mutually the same amplitude and different phases.

The phase differences between the signals applied to the two adjacent ports may all be the same.

The second metal layer has n ports, and the phase of the signal applied to the mth port is 2m? / N, where n is a natural number and m is 0, 1, ..., n-1.

A plurality of oscillators may be connected to the plurality of ports one to one.

One oscillator is connected to the plurality of ports through a plurality of conductors, and the plurality of conductors may have electrical lengths that provide different phase delays.

Wherein a space surrounded by the first metal layer, the plurality of metal sidewalls, and the second metal layer forms a cavity for resonance of an electromagnetic wave, the first metal layer, the plurality of metal sidewalls, and the second metal layer, And may be configured to perform the role of power combiner and radiation.

The electromagnetic wave radiator further comprises a plurality of amplifying circuits respectively disposed between two adjacent ports, and the plurality of amplifying circuits between the plurality of ports may be arranged in the form of a loop.

Each of the amplifying circuits includes an input matching unit, an intermediate matching unit, an output matching unit, a first common emitter transistor disposed between the input matching unit and the intermediate matching unit, and a second common emitter transistor disposed between the intermediate matching unit and the output matching unit. 2 < / RTI > common emitter transistors.

The first common emitter transistor and the second common emitter transistor may be the same.

For many ports, the port impedances may all be the same and the port admittances may be the same.

Each port admittance has a negative resistance that can offset the cavity load impedance at the resonant frequency and the total admittance of the electromagnetic wave emitter may have a negative real part at the resonant frequency.

The electromagnetic wave radiator may be configured to emit a circularly polarized millimeter wave / terahertz wave.

Further, the electromagnetic wave emitter array according to one embodiment may comprise a plurality of electromagnetic wave emitters arranged two-dimensionally. Here, each of the electromagnetic wave radiators includes: a first metal layer; A plurality of metal sidewalls vertically protruding along an edge of the first metal layer; And a second metal layer suspended over the first metal layer, wherein the second metal layer includes a plurality of ports extending radially from an edge of the second metal layer, and a plurality of ports extending radially from the edge of the second metal layer, 0.0 > and / or < / RTI >

Since the electromagnetic wave radiator according to the disclosed embodiment can perform a role of a slot antenna, a resonant tank, and a power combining network, the electromagnetic wave radiator can be manufactured in a very small size and can be used as a millimeter wave / terahertz wave transceiver Can be miniaturized. In addition, the electromagnetic wave radiator according to the disclosed embodiment can improve the Q-factor and achieve low phase noise and high efficiency oscillation.

1 schematically shows an exploded perspective view of an electromagnetic wave radiator according to one embodiment.
FIG. 2 is a perspective view of an electromagnetic wave radiator according to one embodiment and illustrates the phase of a signal applied to each port of the electromagnetic wave radiator as an example.
3 schematically shows an equivalent circuit of an electromagnetic wave radiator according to an embodiment.
Figure 4 illustrates an equivalent circuit for a resonant circuit at one port of an electromagnetic wave radiator by way of example.
5 shows an exemplary configuration of an amplifier circuit connected between two adjacent ports of an electromagnetic wave radiator.
6 is a graph exemplarily showing the frequency response characteristics for the real part and the imaginary part of the total admittance of the electromagnetic wave radiator.
7 is an exemplary graph showing a result of measuring a polarization pattern of an electromagnetic wave radiated from an electromagnetic wave radiator.
8 is an exemplary graph showing a result of measuring a radiation pattern of an electromagnetic wave radiated from an electromagnetic wave radiator.
9 is an exemplary graph showing a result of measuring spectral characteristics of an electromagnetic wave radiated from an electromagnetic wave radiator.
10 is an exemplary graph showing a result of measuring phase noise characteristics of an electromagnetic wave radiated from an electromagnetic wave radiator.
Figures 11A-11E schematically illustrate various embodiments of an electromagnetic wave radiator.
12A and 12B schematically illustrate various embodiments of the connection relationship of each oscillator with each port of the electromagnetic wave radiator.
13 schematically shows an electromagnetic wave radiator array according to another embodiment.

Hereinafter, the electromagnetic wave radiator will be described in detail with reference to the accompanying drawings. In the following drawings, like reference numerals refer to like elements, and the size of each element in the drawings may be exaggerated for clarity and convenience of explanation. Furthermore, the embodiments described below are merely illustrative, and various modifications are possible from these embodiments. Also, in the layer structures described below, the expressions "top" or "on top"

1 schematically shows an exploded perspective view of an electromagnetic wave radiator according to one embodiment. Referring to FIG. 1, an electromagnetic wave radiator 100 according to an embodiment includes a first metal layer 110 disposed on a semiconductor substrate 101, a plurality of first metal layers 110 vertically protruding along edges of the first metal layer 110, A second metal layer 130 suspended over the first metal layer 110, The semiconductor substrate 101 may be made of a material for a general semiconductor device such as silicon or a compound semiconductor. Although not shown, a circuit for exchanging signals with the electromagnetic wave radiator 100 may be formed on the semiconductor substrate 101. A support structure (not shown) for supporting the second metal layer 130 so as to be suspended with respect to the first metal layer 110 may be provided on the semiconductor substrate 101.

The first metal layer 110 may be a thin and flat metal plate and may be disposed on the semiconductor substrate 101. For example, the thickness of the first metal layer 110 may have a thickness in the range of about 0.3 to 0.6 um, and may have a diameter in the range of about 1 to 2 mm. In addition, the first metal layer 110 may have a circular or regular polygonal shape. Although the first metal layer 110 is shown as having a regular octagonal shape in FIG. 1, the first metal layer 110 may have other shapes depending on the number of phases of signals to be coupled.

The plurality of side walls 120 may be made of the same conductive metal as the first metal layer 110. When the first metal layer 110 has a regular polygonal shape, each side wall 120 may be disposed perpendicular to the upper surface of the first metal layer 110 at the edge of one side of the first metal layer 110. For example, each sidewall 120 may have a height in the range of about 12 to 16 um. The length of each sidewall 120 is less than the length of one side of the first metal layer 110 so that a gap may be formed between two adjacent sidewalls 120. For example, the spacing between two adjacent side walls 120 may be located at each vertex of the first metal layer 110. Alternatively, when the first metal layer 110 has a circular shape, the length of each sidewall 120 is less than the diameter of the first metal layer 110, and a plurality of spacings between the plurality of sidewalls 120 May be equally spaced along the edges of the first metal layer 110.

The second metal layer 130 is made of a thin and flat metal plate and may be made of the same conductive metal as the first metal layer 110. For example, the second metal layer 130 may have a thickness in the range of about 2 to 4 um. In addition, the second metal layer 130 may have the same circular or regular polygonal shape as the first metal layer 110. The size or diameter of the second metal layer 130 may be smaller than the size or diameter of the first metal layer 110 so that the second metal layer 130 may be disposed in a space surrounded by the plurality of side walls 120. As described above, the second metal layer 130 may be suspended over the first metal layer 110 by a support structure (not shown) provided on the semiconductor substrate 101. The distance between the first metal layer 110 and the second metal layer 130 may be slightly less than the height of the side wall 120.

The second metal layer 130 includes a plurality of ports 131 protruding from the edges of the second metal layer 130 in the radial direction and a plurality of slots 131 formed between the centers of the second metal layer 130 and the respective vertexes. A second metal layer 132, and an opening 133 formed in the center of the second metal layer 130. The plurality of ports 131 are for receiving a signal from an oscillator 150 (see FIGS. 12A and 12B) to be described later, and a signal generated by the oscillator is provided to the electromagnetic wave radiator 100 through a plurality of ports 131. Each port 131 extends from the respective vertex of the second metal layer 130 and may protrude out of the first metal layer 110 through an interval between two adjacent side walls 120. Each of the slots 132 partially formed through the second metal layer 130 is formed to be long in the radial direction between the center of each second metal layer 130 and each of the vertexes. Electromagnetic waves emitted by the electromagnetic wave radiator 100 may be emitted through the respective slots 132. In addition, the circular opening 133 partially formed through the central region of the second metal layer 130 can suppress noise. This electromagnetic wave radiator 100 has a radially symmetrical structure and a space surrounded by the first metal layer 110, the plurality of side walls 120 and the second metal layer 130 is filled with an electromagnetic wave, particularly a resonance of millimeter wave / A cavity may be formed.

FIG. 2 is a perspective view of an electromagnetic radiator 100 according to one embodiment and illustrates the phase of a signal applied to each port 131 of the electromagnetic radiator 100 as an example. 2, a two-stage amplifying circuit 140 may be disposed between two adjacent ports 131. A plurality of amplifying circuits 140 may be disposed between the ports 131 of the entire electromagnetic wave radiating apparatus 100, May be arranged in the form of a loop. Signals having a constant phase interval may be applied to the plurality of ports 131 of the electromagnetic wave radiator 100, respectively. That is, the phase difference between the signals applied to the two adjacent ports 131 in the electromagnetic wave radiator 100 is all the same. For example, when the electromagnetic wave radiator 100 has eight ports 131, a signal having a phase of 0 占 is applied to the port 131 at 12 o'clock, Signals having phases of 90 °, 135 °, 180 °, 225 °, 270 ° and 315 ° can be applied to the respective ports 131.

Signals having a constant phase difference applied through the plurality of ports 131 resonate in a cavity surrounded by the first metal layer 110, the plurality of side walls 120, and the second metal layer 130. That is, the electromagnetic wave radiator 100 is excited by the signals having a constant phase difference applied through the plurality of ports 131. Signals applied through the plurality of ports 131 can then be combined in the cavity. The cavity can contain a significant amount of electromagnetic wave energy by confining electromagnetic waves therein. Then, the electromagnetic wave corresponding to the resonance frequency can be emitted to the outside through the plurality of slots 132. The electromagnetic wave radiator 100 according to the present embodiment can also function as a slot antenna, a resonant tank, a power combining network, and a radiator. Therefore, since it is not necessary to use a separate coupling network or an antenna buffer, it is possible to fabricate the electromagnetic wave radiator 100 with a very small size, thereby enabling miniaturization of the millimeter wave / terahertz wave transceiver.

Since the signals having a constant phase difference are combined, the circularly polarized signal can be emitted from the electromagnetic wave radiator 100 according to the present embodiment. In addition, since signals having a predetermined phase difference are emitted after resonating in the cavity, a circularly polarized signal can be emitted without leakage in the substrate, and therefore a configuration such as a silicon lens is not required. Also, because the electromagnetic waves are distributed over a large confined area in the cavity, the cavity resonance can improve the Q-factor. As a result, the current density of the signal applied to the electromagnetic wave radiator 100 can be lowered, thereby reducing conduction loss. In addition, high Q-factor can achieve low phase noise and high efficiency oscillation.

3 schematically shows an equivalent circuit of an electromagnetic wave radiator 100 according to an embodiment. 3, the amplifier circuits 140 are arranged in the form of a loop between the ports 131 of the entire electromagnetic wave radiator 100, and the resonance circuit 141 is disposed in each port 131. [ As shown in FIG. 3, the electromagnetic wave radiator 100 may have a rotationally symmetrical cavity structure. Signals applied to the plurality of ports 131 of the electromagnetic wave radiator 100, such as a steady-state oscillation, have a constant phase interval and all have the same amplitude. In this structure, the port impedances at all the ports 131 of the electromagnetic wave radiator 100 may be the same.

4 illustrates an equivalent circuit for a resonant circuit at one port 131 of the electromagnetic wave radiator 100 by way of example. The values of L, C and R _T in the equivalent circuit of FIG. 4, which is shown as an RLC parallel resonant circuit, are determined by the size and thickness of the first metal layer 110, the side walls 120 and the second metal layer 130, The distance between the first metal layer 110 and the second metal layer 130 and the length of the slot 131 and may be appropriately selected according to the oscillation frequency of the electromagnetic wave radiator 100. [ For example, when L = 1.44 pH, C = 1.31 pF, and R _T = 40 Ω, the oscillation frequency of the electromagnetic wave radiator 100 may be about 116 GHz.

5 shows an exemplary configuration of an amplification circuit 140 connected between two adjacent ports 131 of the electromagnetic wave radiator 100. As shown in FIG. Referring to FIG. 5, each amplifying circuit 140 includes an input matching unit, an intermediate matching unit, and an output matching unit. In addition, a first common emitter transistor Q1 is disposed between the input matching unit and the intermediate matching unit, and a second common emitter transistor Q2 is disposed between the middle matching unit and the output matching unit. do. The amplifier circuits 140 of the electromagnetic wave radiator 100 may be provided on the semiconductor substrate 101 shown in Fig. 1, for example.

According to the present embodiment, when the gains of the first and second common emitter transistors Q1 and Q2 are denoted by A _V1 and A _V2 , respectively, the first and second common emitter transistors Q1 and Q2 have the same When having a voltage gain (i.e., A _V1 = A _V2 = A _OPT ), oscillation with maximum RF power can be achieved. In the case where the electromagnetic wave radiator 100 has, for example, eight ports 131, the input matching unit, the intermediate matching unit, and the output matching unit in each of the amplifying circuits 140 can be designed to have a phase difference of? / 4 have. Further, in each amplifying circuit 140, the input matching unit, the intermediate matching unit, and the output matching unit may be designed to suppress frequencies other than the resonance frequency.

Each of the amplifying circuits 140 arranged in a loop shape in the electromagnetic wave radiator 100 having a rotationally symmetric structure all have the same port admittance. Also, in order to sustain the oscillation, each port admittance has a negative resistance that can offset the cavity loading impedance at the resonant frequency. If the total admittance of the electromagnetic wave radiator 100 has a negative real part at the resonance frequency, the maximum oscillation power can be transmitted to the cavity.

For example, FIG. 6 is a graph exemplarily showing the frequency response characteristics for the real part and the imaginary part of the total admittance of the electromagnetic wave radiator 100. FIG. In the graph of FIG. 6, it is assumed that the electromagnetic wave radiator 100 has eight ports 131, a phase difference of? / 4 exists between two adjacent ports 131, and a resonance frequency is 115 GHz. 6, the real part of the total admittance is equal to or less than zero at the resonant frequency and the imaginary part is equal to zero. And at the frequencies other than the resonance frequency, the implementation of the total admittance is greater than zero.

FIG. 7 is an exemplary graph showing a result of measuring a polarization pattern of an electromagnetic wave radiated from the electromagnetic wave radiator 100, and FIG. 8 is an exemplary graph showing a result of measuring a radiation pattern of an electromagnetic wave radiated from the electromagnetic wave radiator. The graphs of Figs. 7 and 8 are the results measured in a plane having an azimuth angle phi of 0 DEG and a plane having 90 DEG. As shown in the graph of FIG. 7, it can be seen that the polarizing pattern of the electromagnetic wave radiated from the electromagnetic wave radiator 100 is a circularly polarized light having an axial ratio better than 0.8 dB. Also, as shown in the graph of Fig. 8, it can be seen that the radiation pattern of the electromagnetic wave radiated from the electromagnetic wave radiator 100 is a beam width of 25 degrees and is almost symmetrical with respect to the boresight.

FIG. 9 is an exemplary graph showing the results of measurement of spectral characteristics of electromagnetic waves radiated from the electromagnetic wave radiator 100, and FIG. 10 is a graph showing an example of the results of measurement of phase noise characteristics of electromagnetic waves radiated from the electromagnetic wave radiator 100. FIG. Graph. Referring to FIG. 9, the electromagnetic wave radiated from the electromagnetic wave radiator 100 has a peak at 114.1 GHz. The EIRP / P _DC was 5% and the DC-to-RF efficiency was 3.7% at a peak of 14 dBm, equivalent isotropically radiated power (EIRP). 10, the electromagnetic wave radiator 100 showed a phase noise of -99.3 dBc / Hz @ 1 MHz offset. This low phase noise is due to high Q factor through cavity resonance of the electromagnetic radiator 100 and noise suppression due to power coupling of the ports through the cavity. Also, the resonant frequency changed to less than 1.3GHz (1%) due to the high Q factor resonance even if the DC power varied greatly.

The number of the ports 131 of the electromagnetic wave radiator 100 is not necessarily limited to the number of the ports 131 of the electromagnetic wave radiator 100. For example, Figures 11A-11E schematically illustrate various embodiments of an electromagnetic wave radiator 100. [ Referring to FIG. 11A, the electromagnetic wave radiator 100 may have three ports 131. FIG. In this case, the first metal layer 110 and the second metal layer 130 may have a circular or regular triangle shape. The phase difference between the adjacent ports 131 may be 2? / 3. For example, a signal having a phase of 0 degrees is applied to the port 131 at 12 o'clock, and a signal having a phase of 120 degrees and 240 degrees along the counterclockwise direction is applied to each port 131 . Further, as shown in FIG. 11B, the electromagnetic wave radiator 100 may have four ports 131. FIG. In this case, the first metal layer 110 and the second metal layer 130 may have a circular or square shape, and the phase difference between the adjacent ports 131 may be? / 2. For example, a signal having a phase of 0 DEG is applied to the port 131 at 12 o'clock direction, and signals having phases of 90 DEG, 180 DEG and 270 DEG are transmitted to the ports 131, Lt; / RTI > 11C to 11E, the electromagnetic wave radiator 100 may have five, six or eight ports 131. In this case, In addition, the number of ports 131 of the electromagnetic wave radiator 100 can be selected as necessary.

12A and 12B schematically illustrate various embodiments of the connection relationship between each port 131 of the electromagnetic wave radiator 100 and the oscillator 150. FIG. As shown in FIG. 12A, the electromagnetic wave radiator 100 may include a plurality of oscillators 150a, 150b and 150c individually connected to a plurality of ports 131a, 131b and 131c, respectively. For example, if the electromagnetic wave radiator 100 has three ports 131a, 131b, and 131c, the electromagnetic wave radiator 100 may include three oscillators 150a, 150b, and 150c. In this case, the first oscillator 150a connected to the first port 131a may provide a signal having a phase of 0 °, and the second oscillator 150b connected to the second port 131b may provide a phase of 120 ° And the third oscillator 150c connected to the third port 131c may provide a signal having a phase of 240 °. The first to third oscillators 150a, 150b and 150c may be provided on the semiconductor substrate 101 shown in FIG.

Referring to FIG. 12B, the electromagnetic wave radiator 100 may include only one oscillator 150 connected to the plurality of ports 131a, 131b, and 131c. One oscillator 150 can supply signals to the plurality of ports 131a, 131b, and 131c through the plurality of conductors 151a, 151b, and 151c. In this case, the electrical lengths of the plurality of conductors 151a, 151b, and 151c can be adjusted to appropriately delay the phase of signals applied to the plurality of ports 131a, 131b, and 131c. That is, the plurality of conductors 151a, 151b, and 151c may have electrical lengths that provide different phase delays. For example, when the electromagnetic wave radiator 100 has three ports 131a, 131b and 131c, the second conductor 151b connected to the second port 131b is connected to the first conductor 131a connected to the first port 131a, The electrical length can be selected to have a phase delay of 120 degrees with respect to the first electrode 151a. Likewise, the third lead 151c connected to the third port 131c may be selected to have a phase delay of 120 degrees with respect to the second lead 151b connected to the second port 131b.

13 schematically shows an electromagnetic wave radiator array according to another embodiment. Referring to FIG. 13, the electromagnetic wave emitter array 200 may include a plurality of two-dimensionally arranged electromagnetic wave emitters 100. By using a plurality of electromagnetic radiators 100, the electromagnetic radiator array 200 can increase the overall output of the radiated millimeter wave / terahertz wave. In addition, the beam steering technique can adjust the direction of the main lobe of the millimeter wave / terahertz wave. For example, if the phases of the signals applied to the plurality of ports 131a, 131b, 131c, 131d, 131e, 131f, 131g and 131h in the electromagnetic wave emitter array 200 are the same for all the electromagnetic wave radiators 100, A millimeter wave / terahertz wave can travel toward the front of the electromagnetic wave emitter array 200. For example, a signal having a phase of 0 degrees is applied to the first port 131a of all the electromagnetic wave radiators 100, a signal having a phase of 45 degrees is applied to the second port 131b, A signal having a phase of 90 degrees is applied to the fourth port 131c, a signal having a phase of 135 degrees is applied to the fourth port 131d, and a signal having a phase of 180 degrees is applied to the fifth port 131e , A signal having a phase of 225 ° is applied to the sixth port 131f, a signal having a phase of 270 ° is applied to the seventh port 131g, and a signal having a phase of 315 ° is applied to the eighth port 131h When a signal is applied, a millimeter wave / terahertz wave can travel toward the front of the electromagnetic wave emitter array 200.

In addition, if the phase of the signal is slightly changed for each corresponding port of the plurality of electromagnetic wave radiators 100, the traveling direction of the millimeter wave / terahertz wave may be changed to the right or left side or the up / down direction. For example, a signal having a phase of 0 degrees is applied to the first port 131a of the electromagnetic wave radiators 100 disposed in the leftmost column in FIG. 13, and the electromagnetic wave radiator 100 A signal having a phase of 10 degrees is applied to the first port 131a of the electromagnetic wave radiators 100 arranged in the left third column and a signal having a phase of 20 degrees is applied to the first port 131a of the electromagnetic wave radiators 100 arranged in the left third column have. In this case, the phases of 55 °, 100 °, 145 °, 190 °, 235 °, 280 °, and 325 ° are set to the second to eighth ports 131b to 131h of the electromagnetic wave radiators 100 disposed in the second column on the left side Respectively. 110 °, 155 °, 200 °, 245 °, 290 °, and 335 ° are formed in the second to eighth ports 131b to 131h of the electromagnetic wave radiators 100 disposed in the left third column Respectively. Then, the millimeter wave / terahertz wave has a tilted wavefront when viewed toward the drawing, and can proceed in the right direction.

Although the electromagnetic wave radiator described above has been described with reference to the embodiments shown in the drawings, it is to be understood that various modifications and equivalent embodiments may be made by those skilled in the art without departing from the scope of the present invention. Therefore, the disclosed embodiments should be considered in an illustrative rather than a restrictive sense. The scope of the present invention is defined by the appended claims rather than by the foregoing description, and all differences within the scope of equivalents thereof should be construed as being included in the present invention.

100 ..... Electromagnetic wave radiator 101 ..... substrate
110 ..... first metal layer 120 ..... side wall
130 ..... second metal layer 131 ..... port
132 ..... slot 133 ..... opening
140 ..... amplifier circuit 150 ..... oscillator
151 ..... conductor 200 ..... electromagnetic wave radiator array

Claims (23)

A first metal layer;
A plurality of metal sidewalls vertically protruding along an edge of the first metal layer; And
And a second metal layer suspended over the first metal layer,
Wherein the second metal layer comprises a plurality of ports extending radially from an edge of the second metal layer and a plurality of slots partially penetrating the second metal layer along a radial direction. The method according to claim 1,
The plurality of sidewalls being spaced apart between two adjacent sidewalls, each port being arranged to pass through an interval between the adjacent two sidewalls. The method according to claim 1,
Wherein the first metal layer and the second metal layer have the same regular polygonal shape. The method of claim 3,
Each of the side walls is disposed at an edge of one side of the first metal layer perpendicular to the upper surface of the first metal layer, the length of each of the side walls is smaller than the length of one side of the first metal layer, Is located at a vertex of the first metal layer. The method of claim 3,
Wherein the plurality of ports project radially from respective vertices of the second metal layer and wherein the plurality of slots are disposed between the center of the second metal layer and the respective vertexes of the second metal layer. The method according to claim 1,
Wherein the first metal layer and the second metal layer have the same circular shape. The method according to claim 6,
Each side wall being disposed perpendicular to an upper surface of the first metal layer at an edge of the first metal layer, the length of each side wall being smaller than the diameter of the first metal layer, And is disposed at equal intervals along the edge of the first metal layer. The method according to claim 6,
Each of the plurality of ports protruding in a radial direction of the second metal layer between a plurality of intervals between the plurality of side walls, the plurality of slots being between a center of the second metal layer and a respective vertex of the second metal layer Disposed electromagnetic wave radiators. The method according to claim 1,
Wherein the second metal layer is disposed in a space surrounded by the plurality of side walls. The method according to claim 1,
Wherein the second metal layer further comprises an aperture partially through a central region of the second metal layer. The method according to claim 1,
Further comprising an oscillator providing a signal to each of the plurality of ports,
Wherein the oscillator is configured such that signals provided to the plurality of ports have mutually the same amplitude and different phases. 12. The method of claim 11,
An electromagnetic wave radiator having the same phase difference between signals applied to two adjacent ports. 13. The method of claim 12,
Wherein the second metal layer has n ports and the phase of the signal applied to the mth port is 2m? / N, where n is a natural number and m is 0, 1, ..., n-1. 12. The method of claim 11,
And a plurality of oscillators are connected to the plurality of ports in a one-to-one relationship with each other. 12. The method of claim 11,
Wherein one oscillator is coupled to the plurality of ports through a plurality of leads, each of the plurality of leads having an electrical length that provides a different phase delay. The method according to claim 1,
Wherein the cavity surrounded by the first metal layer, the plurality of sidewalls, and the second metal layer forms a cavity for resonance of electromagnetic waves, wherein the first metal layer, the plurality of sidewalls, and the second metal layer have a cavity, And an electromagnetic radiation emitter configured to perform the role of radiation. The method according to claim 1,
Further comprising a plurality of amplification circuits each disposed between two adjacent ports, wherein the plurality of amplification circuits are arranged in the form of a loop between the plurality of ports. 18. The method of claim 17,
Each of the amplifying circuits includes an input matching unit, an intermediate matching unit, an output matching unit, a first common emitter transistor disposed between the input matching unit and the intermediate matching unit, and a second common emitter transistor disposed between the intermediate matching unit and the output matching unit. 2 Electromagnetic wave emitter comprising a common emitter transistor. 19. The method of claim 18,
Wherein the first common emitter transistor and the second common emitter transistor have the same voltage gain. 18. The method of claim 17,
An electromagnetic radiator having the same port impedances and port admittances for multiple ports. 21. The method of claim 20,
Each port admittance having a negative resistance capable of canceling the cavity load impedance at the resonant frequency and wherein the total admittance of the electromagnetic radiator has a negative real part at the resonant frequency. The method according to claim 1,
Wherein the electromagnetic wave radiator is configured to emit a circularly polarized millimeter wave / terahertz wave. Comprising a plurality of two-dimensionally arranged electromagnetic radiators,
Each electromagnetic wave radiator comprises:
A first metal layer;
A plurality of metal sidewalls vertically protruding along an edge of the first metal layer; And
And a second metal layer suspended over the first metal layer,
Wherein the second metal layer comprises a plurality of ports extending radially from an edge of the second metal layer and a plurality of slots partially penetrating the second metal layer along a radial direction.

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