KR20180076855A - Testing apparatus and testing method for organic light emitting display device - Google Patents

Abstract

According to an embodiment of the present invention, a testing device comprises a stage storing an object to be tested; a probe unit coming in contact with the object to be tested and transmitting an electrical signal; a first measuring instrument measuring the luminance or color coordinates of the object to be tested; a pattern generator for optical compensation of the luminance or color coordinates; and a second measuring instrument measuring the optically compensated luminance or color coordinates. Accordingly, the productivity of a product can be improved by improving accuracy of a test for defects of an organic light emitting display device and preventing leakage of the defects.

Description

TECHNICAL FIELD [0001] The present invention relates to an inspection apparatus and an inspection method for an organic light emitting display,

The present invention relates to an inspection apparatus and an inspection method for an organic light emitting display.

As the era of information age approaches, there is a rapid development of a display device field for visually displaying electrical information signals, and studies for developing performance such as thinning, lightening, and low power consumption for various display devices are continuing. Such a display device may include a liquid crystal display device (LCD), a plasma display panel (PDP), a field emission display device (FED), an electro-wetting device Display Device (EWD), and Organic Light Emitting Display Device (OLED).

In recent years, organic light emitting display devices are self light emitting type display devices that do not require a separate light source, so that they can be manufactured to be lighter and thinner and are advantageous from the viewpoint of power consumption by driving at a low voltage. And it is most popular as a next-generation display device.

As the organic light emitting display device receives the spot light, it is an important issue for the manufacturer of the display device to manage the quality of the organic light emitting display product. Various inspection devices are introduced to prevent the defective product And to keep the quality level of the products sold in the market constant.

An on-off test is a typical example of an inspection for an organic light emitting display. The lighting test tests the electrical characteristics of the OLED display by applying an electrical signal through the test pads included in the display.

[Related Technical Literature]

One. A thin film transistor substrate inspection apparatus (Korean Patent Application No. 10-2014-0035980)

Since the lighting test of the organic light emitting display device proceeds after the module process, it is not judged to be defective although the deviation of luminance and chromaticity coordinates can not be taken into account and it is judged to be defective.

The inventor of the present invention has recognized the above-mentioned problems and invented an inspection apparatus and an inspection method using the same that can efficiently detect defects of a display device before a module process.

The solutions according to the embodiments of the present invention are not limited to the above-mentioned problems, and other problems not mentioned can be clearly understood by those skilled in the art from the following description.

The inspection apparatus according to the embodiment of the present invention includes a stage on which an object to be inspected is placed, a probe unit for transmitting an electrical signal to the object to be inspected, a first meter for measuring luminance or color coordinates of the object to be inspected, A pattern generator for delivering the compensated luminance or chromaticity coordinates to the object to be inspected, and a second meter for measuring the optically compensated luminance or chromaticity coordinates.

An inspection apparatus according to an embodiment of the present invention includes a meter for measuring a luminance or a color coordinate of an object to be inspected and optically compensates the luminance or chromaticity coordinates of the object to be inspected measured through a meter, .

An inspection apparatus according to an embodiment of the present invention includes loading an inspection object onto an inspection apparatus, transferring an electrical signal to the inspection object using the probe unit, inspecting the defect of the inspection object with a camera, Measuring a color coordinate with a first measuring instrument, calculating an optical compensation value of luminance or chromaticity coordinates by an optical compensation meter, applying an optical compensation value to an inspection object by a pattern generator, A step of detecting whether the brightness or the color coordinate of the object to be inspected is poor or not, and the step of unloading the object to be inspected from the inspection apparatus.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to improve the productivity of a product by preventing the leakage of defects by increasing the accuracy of the inspection with respect to defects of the organic light emitting display device.

Further, the present invention can detect defects of the organic light emitting display device before the module process, so that defects after the module process can be minimized.

Further, since the present invention can compensate the brightness or color coordinates of the organic light emitting display before the module process, it is possible to minimize defects due to brightness or color coordinates of the organic light emitting display after the module process.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the following description.

The scope of the claims is not limited by the matters described in the contents of the invention, as the contents of the invention described in the problems, the solutions to the problems and the effects to be solved do not specify essential features of the claims.

1 is a view of an organic light emitting display device to be inspected by a testing apparatus according to an embodiment of the present invention.
2 is a cross-sectional view of a pixel included in the organic light emitting diode display.
3 is a perspective view of a testing apparatus according to an embodiment of the present invention.
4A is a view of a probe unit of an inspection apparatus according to an embodiment of the present invention.
4B is a diagram of an inspection unit of an inspection apparatus according to an embodiment of the present invention.
5 is a flowchart illustrating an inspection method according to an embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and the manner of achieving them, will be apparent from and elucidated with reference to the embodiments described hereinafter in conjunction with the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims.

The shapes, sizes, ratios, angles, numbers, and the like disclosed in the drawings for describing the embodiments of the present invention are illustrative, and thus the present invention is not limited thereto. Like reference numerals refer to like elements throughout the specification. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail. Where the terms "comprises", "having", "done", and the like are used in this specification, other portions may be added unless "only" is used. Unless the context clearly dictates otherwise, including the plural unless the context clearly dictates otherwise.

In interpreting the constituent elements, it is construed to include the error range even if there is no separate description.

In the case of a description of the positional relationship, for example, if the positional relationship between two parts is described as 'on', 'on top', 'under', and 'next to' Or " direct " is not used, one or more other portions may be located between the two portions.

The first, second, etc. are used to describe various components, but these components are not limited by these terms. These terms are used only to distinguish one component from another. Therefore, the first component mentioned below may be the second component within the technical spirit of the present invention.

It is to be understood that each of the features of the various embodiments of the present invention may be combined or combined with each other, partially or wholly, technically various interlocking and driving, and that the embodiments may be practiced independently of each other, It is possible.

1 is a view of an organic light emitting display device to be inspected by a testing apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the OLED display 100 includes an image processor 110, a timing controller 120, a data driver 130, a gate driver 140, and a display panel 150.

The image processing unit 110 outputs a data enable signal DE together with a data signal DATA supplied from the outside. The image processing unit 110 may output at least one of a vertical synchronization signal, a horizontal synchronization signal, and a clock signal in addition to the data enable signal DE.

The timing controller 120 receives a data enable signal DE or a data signal DATA in addition to a drive signal including a vertical synchronization signal, a horizontal synchronization signal, and a clock signal from the image processing unit 110. The timing controller 120 generates a gate timing control signal GDC for controlling the operation timing of the gate driver 140 and a data timing control signal DDC for controlling the operation timing of the data driver 130 based on the drive signal. .

The data driver 130 samples and latches the data signal DATA supplied from the timing controller 120 in response to the data timing control signal DDC supplied from the timing controller 120 and converts the sampled data signal into a gamma reference voltage .

The gate driver 140 outputs a gate signal while shifting the level of the gate voltage in response to the gate timing control signal GDC supplied from the timing controller 120.

The substrate 150 includes a display area A / A in which a pixel 180 that actually emits light is disposed through a thin film transistor and an organic light emitting device, and a non-display area A / (Non-Active Area) (N / A).

The display area A / A includes a pixel 480 and a data line 170 for transmitting an externally generated data signal to the pixel 180 and a gate line 160 for transmitting a gate signal to the pixel 180 do.

The gate signal and the data signal input from the outside of the substrate 150 are transmitted to the pixel 180 through the gate line 160 and the data line 170 via the circuit unit 190 in which various circuits are disposed, do.

The data driver 130 or the gate driver 140 may be attached to the substrate 150 by an anisotropic conductive film (ACF) applied to a pad portion disposed on one side of the circuit portion 190, Flexible Printed Citcuit (FPC). At this time, the pad unit may include a test pad to which an electric signal is applied in contact with the probe block during the lighting test.

In the OLED display 100, the pixel 180 includes an organic light emitting diode. In this case, the organic light emitting device includes an emissive layer (EML) using organic materials between two electrodes made of an anode and a cathode, injecting a hole in the anode into the light emitting layer, Injected into the light emitting layer, the injected electrons and the holes are recombined with each other to form an exciton in the light emitting layer and emit light.

A host material and a dopant material are included in the light emitting layer of the organic light emitting device to utilize the interaction of the two materials. In this case, the host generates excitons from electrons and holes and transfers energy to the dopant. The dopant is a dye organic material to which a small amount of energy is added, and receives energy from the host to convert the light into light.

An organic light emitting element included in the OLED display 100 will be described with reference to FIG.

2 is a cross-sectional view of a pixel included in the organic light emitting diode display.

Referring to FIG. 2, the OLED display 200 includes a substrate 210, a thin film transistor 220, and an organic light emitting diode 240.

The substrate 210 supports and protects the main components of the organic light emitting diode display 200 disposed thereon. In recent years, a plastic substrate such as a polyimide having flexible characteristics can be formed.

The thin film transistor 220 disposed on the substrate 210 includes a gate electrode 222, a source electrode 224, a drain electrode 226, and a semiconductor layer 228.

The semiconductor layer 228 has a higher mobility than amorphous silicon or amorphous silicon and has low energy consumption and excellent reliability and can be applied to polycrystalline silicon ), An oxide semiconductor such as ZnO (Zinc Oxide) or IGZO (Indium-Gallium-Zinc Oxide), which is excellent in mobility and uniformity characteristics, but the present invention is not limited thereto.

The semiconductor layer 228 may include a source region including a p-type or an n-type impurity, a drain region, and a channel between the source region and the drain region, A low concentration doped region may be included between the source region and the drain region.

The gate insulating layer 231 is an insulating layer composed of a single layer or a plurality of layers of silicon oxide (SiOx) or silicon nitride (SiNx), and is arranged such that a current flowing in the semiconductor layer 228 does not flow to the gate electrode 222.

The gate electrode 222 serves as a switch for turning on or off the TFT 220 based on an electric signal transmitted from the outside through the gate line. The gate electrode 222 is formed of a conductive metal such as Cu, Al, Mo, Cr, Au, Ti, Ni, Or an alloy thereof, but it is not limited thereto.

The source electrode 224 and the drain electrode 226 are connected to the data line and an electric signal transmitted from the outside is transmitted from the thin film transistor 220 to the organic light emitting diode 240. The source electrode 224 and the drain electrode 226 may be formed of a conductive metal such as copper, aluminum, molybdenum, chromium, gold, titanium, nickel, And neodymium (Nd), or an alloy thereof, but it is not limited thereto.

An interlayer insulating layer 233 composed of a single layer or a plurality of layers of silicon oxide (SiOx) or silicon nitride (SiNx) is formed between the gate electrode 222 and the source electrode 224 and the drain electrode 226, The gate electrode 222 and the source electrode 224 and between the gate electrode 222 and the drain electrode 226.

A passivation layer 235 composed of an insulating film such as silicon oxide (SiO x) or silicon nitride (SiN x) is disposed on the thin film transistor 220 to prevent unnecessary electrical connection between the elements of the thin film transistor 220, It is possible to prevent contamination or damage of the battery.

The thin film transistor 220 may be classified into an inverted staggered structure and a coplanar structure depending on the positions of the constituent elements of the thin film transistor 220. In the thin film transistor of the inverted staggered structure, the gate electrode is located on the opposite side of the source electrode and the drain electrode with respect to the semiconductor layer.

2, the thin film transistor 220 of the coplanar structure has the gate electrode 222 positioned on the same side as the source electrode 224 and the drain electrode 226 with respect to the semiconductor layer 228. Although the thin film transistor 220 of the coplanar structure is illustrated in FIG. 2, the organic light emitting display may include a thin film transistor having an inverted staggered structure.

In order to reduce the parasitic capacitance between the thin film transistor 220 and the gate line and the data line and between the organic light emitting devices 240, The planarization layer 237 may be disposed on the transistor 220. FIG. At this time, the planarization layer 237 may be formed of an organic material such as polyimide, photo acryl, or benzocyclobutene (BCB).

The organic light emitting device 240 disposed on the planarization layer 237 includes an anode 242, a light emitting portion 244, and a cathode 246.

The anode 242 is disposed on the planarization layer 237. The anode 242 is an electrode serving to supply holes to the light emitting portion 244 and may be electrically connected to the thin film transistor 220 through a contact hole disposed in the planarization layer 237.

The anode 242 may be formed of indium tin oxide (ITO), indium zinc oxide (IZO) or the like, which is a transparent conductive material, but is not limited thereto.

When the organic light emitting diode display 200 is in the top emission mode in which the cathode 246 is disposed, the anode 242 emits light emitted from the light emitting portion 244 to the anode 242 And may further include a reflective layer so that the cathode 246 can be more smoothly reflected and emitted in an upward direction in which the cathode 246 is disposed. The anode 242 may have a two-layer structure in which a transparent conductive layer composed of a transparent conductive material and a reflective layer are sequentially stacked or a three-layer structure in which a transparent conductive layer, a reflective layer, and a transparent conductive layer are sequentially stacked, Ag) or an alloy including silver.

The bank 250, which is disposed on the anode 242 and the planarization layer 237, actually defines a region for emitting light. At this time, the material of the bank 450 may be one of polyimide, photoacrylic, and benzocyclobutene (BCB).

A pixel emitting light in the organic light emitting diode display 200 may include a sub pixel emitting one color, and each sub pixel may emit light of a different color. For example, red light may be emitted in the first pixel, green light may be emitted in the second pixel, and blue light may be emitted in the third sub-pixel. Thus, one pixel can be formed by combining sub-pixels emitting light of different colors.

And the light emitting portion 244 is disposed between the anode 242 and the cathode 246. The light emitting portion 244 for emitting light may include at least one layer in the hole injecting layer, the hole transporting layer, the light emitting layer, the electron transporting layer, and the electron injecting layer. Some layers included in the light emitting portion 244 may be omitted depending on the structure and characteristics of the organic light emitting diode display 200.

The hole injecting layer and the hole transporting layer are disposed between the anode 242 and the light emitting layer to smoothly move the holes from the anode 242 to the light emitting layer.

The hole injection layer is disposed on the anode 242 to facilitate the injection of holes, and HAT-CN (dipyrazino [2,3-f: 2 ', 3'-h] quinoxaline- 10.11-hexacarbonitrile), CuPc (phthalocyanine), and NPD (N, N'-bis (naphthalene-1-yl) -N, N'-bis can do.

The hole transport layer is disposed on the hole injection layer to allow holes to be smoothly transferred to the light emitting layer, and NPD (N, N'-bis (naphthalene-1-yl) -N, N'- -dimethylbenzidine), TPD (N, N'-bis- (3-methylphenyl) -N, N'- bis- (phenyl) benzidine), s-TAD (2,2 ', 7,7'- tetrakis , N-dimethylamino) -9,9-spirofluorene, and MTDATA (4,4 ', 4 "-Tris (N-3-methylphenyl-N-phenylamino) -triphenylamine) .

The micro cavity is a structure in which light is repeatedly reflected between two layers separated by an optical length so that light of a specific wavelength is amplified by constructive interference, Since the wavelengths of light are different from each other in the case of emitting different light for each sub-pixel, in order to realize a micro cavity, in order to set the resonance distance for each wavelength of light in each sub-pixel differently, the thickness of the hole- Can be adjusted.

The light emitting layer is disposed on the hole transporting layer and can emit light of a specific color including a substance capable of emitting light of a specific color. At this time, the light emitting material uses a phosphor or a fluorescent material. Alternatively, the light emitting layer may include a quantum dot (QD).

When the light emitting layer emits red light, it includes a host material containing CBP (4,4'-bis (carbazol-9-yl) biphenyl) or mCP (1,3- (acetylacetonate) iridium, bis (1-phenylisoquinoline) acetylacetonate iridium, PQIr acac bis (1-phenylquinoline) acetylacetonate iridium, PQIr (1-phenylquinoline) iridium and PtOEP (octaethylporphyrin platinum) Or a phosphor containing at least one dopant. Or a fluorescent material containing PBD: Eu (DBM) 3 (Phen) or Perylene.

When the light emitting layer emits green light, it may be formed of a phosphorescent material including a dopant material such as an Ir complex including a host material including CBP or mCP and containing Ir (ppy) ₃ (tris (2-phenylpyridine) iridium) have. Further, it can be formed of a fluorescent material containing Alq ₃ (tris (8-hydroxyquinolino) aluminum).

When the light-emitting layer emits blue light, a dopant material containing a host material including CBP or mCP and containing FIrPic (bis (3,5-difluoro-2- (2-pyridyl) phenyl- (2-carboxypyridyl) iridium) (4,4'-bis (2,2-diphenyl-ethen-1-yl) biphenyl), DSA (1-4-di- [4- N, N-di-phenyl) amino] styryl-benzene, PFO (polyfluorene) based polymer and PPV (polyphenylenevinylene) based polymer.

The electron transporting layer and the electron injecting layer are disposed between the light emitting layer and the cathode 246 to facilitate the movement of electrons from the cathode 246 to the light emitting layer.

The electron transport layer is disposed on the light-emitting layer, and electrons are transferred from the electron-injection layer to the light-emitting layer, and Liq (8-hydroxyquinolinolato-lithium), PBD (2- (4-biphenyl) 3,4-oxadiazole), TAZ (3- (4-biphenyl) 4-phenyl-5-tert-butylphenyl-1,2,4-triazole), spiro-PBD, BCP (2,9- -diphenyl-1,10-phenanthroline) and BAlq (bis (2-methyl-8-quinolinolate) -4- (phenylphenolato) aluminum).

The electron injection layer is disposed on the electron transport layer, to facilitate the electron injection from the cathode 246 and BaF2, LiF, NaCl, CsF, Li ₂ O and a metal inorganic compound, such as BaO or HAT-CN (dipyrazino [2, 3-f: 2 ', 3'-h] quinoxaline-2,3,6,7,10,11-hexacarbonitrile), CuPc (phthalocyanine) and NPD (N, N'-bis (naphthalene- -N, N'-bis (phenyl) -2,2'-dimethylbenzidine).

The cathode 246 is disposed on the light emitting portion 244 and supplies electrons to the light emitting portion 244 and is made of a metal material such as magnesium (Mg), silver-magnesium (Ag: Mg) But the present invention is not limited thereto.

When the OLED display 200 is a top emission type, the cathode 246 may be formed of indium tin oxide (ITO), indium zinc oxide (IZO), indium tin zinc oxide (ITZO), zinc oxide Zinc Oxide (ZnO), and tin oxide (TiO 2) -based transparent conductive oxide.

When the organic light emitting diode 240 is formed, a lighting test is performed using an inspection apparatus according to an embodiment of the present invention. At this time, an inspection apparatus and an inspection method for the lighting inspection will be described with reference to FIG. 3 to FIG.

3 is a perspective view of a testing apparatus according to an embodiment of the present invention.

3, the inspection apparatus 300 of the present invention includes a stage 310, a probe unit 320, and an inspection unit 340.

1 and 2, organic light emitting devices are formed in the form of a plurality of cells 20 on a mother substrate, which is a general substrate 10, The lighting inspection is performed using the inspection apparatus 300 according to the embodiment of the present invention.

Thereafter, the plurality of cells 20 formed on the primary substrate 10 are cut by the scribing process, each of the cells 20 cut on the primary substrate 10 are bonded to the upper substrate, A driving circuit for driving the OLED display, and a module process in which various configurations are combined, and finally, the OLED display is finally completed.

The stage 310 places the inspection target, which is the primary substrate 10, on the inspection apparatus 300 for lighting inspection. At this time, the stage 310 is formed on the main substrate 10, and an inspection pad, which is in contact with the probe block, is exposed so that the stage 310 is exposed to the top. 300), or move in the y-axis or z-axis direction for movement for inspection. The substrate 10 is preferably inspected in a nitrogen (N ₂ ) atmosphere, but is not limited thereto.

The object to be inspected may be a component of the organic light emitting display device, specifically, a substrate on which the organic light emitting device is deposited.

The probe unit 320 includes a plurality of probe pins which are in contact with the inspection pads on the flexible substrate 10. The probe unit 320 is mounted on the first support 325 and moves to the inspection position on the first substrate 10 to apply an electrical signal to the inspection pad of the first substrate 10.

The probe unit 320 is mounted on a first support 325 moving in the y-axis direction along a moving rail 390 disposed on both sides of the stage 310 so as to face each other, And can be moved up and down along the z-axis direction by the first support table 325 to make contact with the ledge board 10. It may also move along the x-axis direction of the first support table 325 as necessary.

Details of movement and inspection of the probe unit 320 will be described with reference to FIG. 4A.

The inspection unit 340 inspects the characteristics of the cells 20 contained on the primary substrate 10 when an electrical signal is applied to the inspection pads of the primary substrate 10 by the probe unit 320. [

The inspection unit 340 may include an inspection camera 345, a first meter 350 and a second meter 355. The inspection unit 340 may be mounted on the second support 360 to detect the inspection position . ≪ / RTI >

At this time, items to be inspected in the components of the organic light emitting display device can be selectively set during the manufacturing process.

The inspection camera 345 may examine the Point Defect or Line Defect of the cell 20, but is not limited thereto. A point defect is a defect that one or more pixels do not operate normally and appear to be lighter or darker than other pixels around the defect, and a line defect is a phenomenon that a defect occurs in a gate line or a data line unit. At this time, the inspection camera 345 may use a TDI (Time Delay Integration) camera, but the present invention is not limited thereto.

The first and second measuring instruments 350 and 355 measure luminance or color coordinates in a plurality of cells 20 included in the first substrate 10 and check for defects that deviate from the upper and lower limits. It is also possible to check the staining of the organic layers or inorganic layers generated in the cell 20.

A color coordinate is a color or a color irritation in which the brightness is ignored in a color stimulus. A color coordinate is called a color coordinate. Luminance refers to the amount of brightness of a light source with a certain width and uses a unit called nit or steel (sb).

The cell 20 to be inspected during the lighting test may have different brightness and color coordinates from the finished product of the organic light emitting display device. Thus, before the module process, optical compensation is performed through the first and second meters 350 and 355 and then the optically compensated brightness or color coordinates are checked.

The optical compensation can proceed, for example, through Gamma setting, current calculation or color temperature correction of the organic light emitting display.

The organic light emitting display device can not accurately detect defects due to variations in luminance and color coordinates generated after the manufacturing process when the inspection is performed without performing optical compensation because the luminance and chromaticity coordinates of each manufacturing process are large. Therefore, the inspection apparatus 300 according to the embodiment of the present invention has the effect of accurately checking the defective product by optically compensating the front substrate 10 and measuring the optically compensated luminance and chromaticity coordinates. The deficiency of the organic light emitting display device can be minimized by compensating the luminance and chromaticity coordinates in the cell 20 to be the same as the luminance and chromaticity coordinates of the completed organic light emitting display device. If defects such as luminance and chromaticity coordinates or stains are present, feedback can be fed back to the manufacturing process to improve defects, thereby reducing the disposal cost of the OLED display due to defects after the module process.

The optical compensation of the inspection unit 340 will be described with reference to FIG.

The inspection unit 340 can freely move on the main substrate 10 to efficiently inspect the plurality of cells 20 included in the main substrate 10. [ Similar to the probe unit 320, the inspection unit 340 moves along the moving rail 390 disposed on both sides of the stage 320 in the y-axis direction and moves along the second support table 360 in the x- As shown in FIG.

4A is a view of a probe unit of an inspection apparatus according to an embodiment of the present invention.

Referring to FIG. 4A, a plurality of cells 20 including an inspection pad 30 are arranged in rows and columns in a matrix form. As shown in FIG. 3, the main substrate 10 aligns with the inspection position through the stage 310 included in the inspection apparatus 400.

The probe unit 420 mounted on the first support table 425 moves on the first substrate 10 and applies electrical signals to the inspection pads 30 of the plurality of cells 20. [

The probe unit 420 includes a plurality of probe blocks 423. The probe block 423 is disposed along the probe unit 420, and each probe block 423 includes a plurality of probe pins. At this time, the probe block 423 is disposed at a position corresponding to the test pad 30 included in each cell 20. The plurality of probe pins are disposed along the probe block 423 and can be formed of a material having excellent electrical conductivity.

The probe unit 420 including the plurality of probe blocks 423 moves onto the primary substrate 10 and contacts the test pads 30 included in each of the plurality of cells 20 to apply an electrical signal can do.

3, probe unit 420 moves freely by first support 425 and sequentially applies an electrical signal to a plurality of cells 20 disposed on the first substrate 10.

For example, the probe units 423 mounted on the first support 425 move sequentially along the movement rails 490 disposed on both sides in the direction of the arrow in FIG. 4A, An electrical signal is applied to the test pad (30) of the cell (20).

Inspection of each cell 20 of the ledge board 10 to which an electrical signal is applied through the probe unit 420 through the inspection unit will be described with reference to FIG. 4B.

4B is a diagram of an inspection unit of an inspection apparatus according to an embodiment of the present invention.

As described with reference to FIG. 4A, each cell 20 is turned on in response to the electrical signal when the electrical signal is applied through the probe unit 420. At this time, an inspection unit 440 attached to the second support 460 moves along the movement rail 490 for each lit cell 20, and the cell (s) 20 are normally performed, and it is possible to determine whether each cell 20 is defective or not.

The inspection unit 440 may include an inspection camera 445, a first meter 450 and a second meter 455. [ At this time, each of the inspection units 440 may be mounted to the second support 460 in plural or may move along the second support 460 according to the inspection needs.

First, the inspection camera 445 inspects point defects or line defects of a plurality of cells 20 included in the substrate 10. At this time, the inspection camera 445 may use a TDI (Time Delay Integration) camera, but is not limited thereto.

The first and second measuring instruments 450 and 455 measure the brightness or color coordinates of the plurality of cells 20 included in the first substrate 10 and measure the upper limit value Check for defects in luminance or color coordinates outside the lower limit and for stains.

At this time, the first meter 450 measures the chromaticity coordinates and the luminance for optical compensation, and the second meter 455 accurately detects the color coordinates and the brightness of each cell 20 as well as the stain of each cell 20, do. The inclusion of both types of instruments may be desirable for efficient inspection, but it is also possible to use a single instrument that can include both functions.

The inspector 40 calculates the optical compensation value by the optical compensation meter 470 with respect to the luminance and chromaticity coordinates of the plurality of cells 20 transmitted through the first meter 450. The pattern generator 480 receiving the optically compensated value transmits the electrical signal to the pattern generator 480 again and applies the electrical signal to the pattern generator 480 again to each of the cells 20, A value having a color coordinate is turned on. Accordingly, the pattern generator 480 transmits the luminance and chromaticity coordinates calculated by the optical compensation meter 470 to the cell 20 to be inspected so as to have the luminance and the chromaticity coordinates corresponding to the cell 20. As a result, the luminance and the color coordinate of the cell 20 become the same as the luminance and chromaticity coordinates of the organic light emitting display after the module process, so that defects due to variations in luminance and chromaticity coordinates after the module process can be minimized.

5 is a flowchart illustrating an inspection method according to an embodiment of the present invention.

First, the inspection object is loaded on the inspection apparatus.

As described with reference to FIGS. 3 and 4A, when the object to be inspected is aligned at an appropriate position of the inspection apparatus, the probe unit of the inspection apparatus is contacted with the object to be inspected and an electrical signal is applied (S510).

Then, the defect of the inspection object is inspected with a camera. Defects to be inspected may be line defects or point defects.

Next, as described with reference to FIG. 3 and FIG. 4B, a color coordinate and luminance of the inspection object are measured using a meter (S520). The optical compensation value is calculated by the optical compensation meter with respect to the measured color coordinates and luminance of the inspection object (S530), and the optical compensation value is applied to the inspection object again through the pattern generator (S540). The color coordinates and luminance of the optically compensated inspection object are measured through a meter to determine whether the inspection object is defective (S550).

When the inspection is completed, the inspection target is unloaded from the inspection apparatus.

Then, the module process is performed, and the OLED display device is finally manufactured through an inspection process.

The inspection apparatus according to the embodiment of the present invention includes a stage on which an object to be inspected is placed, a probe unit for transmitting an electrical signal to the object to be inspected, a first meter for measuring luminance or color coordinates of the object to be inspected, A pattern generator for delivering the compensated luminance or chromaticity coordinates to the object to be inspected, and a second meter for measuring the optically compensated luminance or chromaticity coordinates.

An inspection object of an inspection apparatus according to an embodiment of the present invention is a component of an organic light emitting display.

An inspection object of an inspection apparatus according to an embodiment of the present invention is a substrate on which an organic light emitting device is deposited in an organic light emitting display.

An inspection apparatus according to an embodiment of the present invention includes a camera disposed adjacent to a first meter or a second meter for inspecting line defects or point defects to be inspected.

The camera of the inspection apparatus according to the embodiment of the present invention is a time delay integration (TDI) camera.

The inspection object of the inspection apparatus according to the embodiment of the present invention is inspected in a nitrogen (N2) atmosphere.

An inspection apparatus according to an embodiment of the present invention includes a meter for measuring a luminance or a color coordinate of an object to be inspected and optically compensates the luminance or chromaticity coordinates of the object to be inspected measured through a meter, .

An inspection object of an inspection apparatus according to an embodiment of the present invention is a component of an organic light emitting display.

An inspection object of an inspection apparatus according to an embodiment of the present invention is a substrate on which an organic light emitting device is deposited in an organic light emitting display.

An inspection apparatus according to an embodiment of the present invention includes a camera disposed adjacent to a first meter or a second meter for inspecting line defects or point defects to be inspected.

The camera of the inspection apparatus according to the embodiment of the present invention is a time delay integration (TDI) camera.

The inspection object of the inspection apparatus according to the embodiment of the present invention is inspected in a nitrogen (N2) atmosphere.

An inspection apparatus according to an embodiment of the present invention includes loading an inspection object onto an inspection apparatus, transferring an electrical signal to the inspection object using the probe unit, inspecting the defect of the inspection object with a camera, Measuring a color coordinate with a first measuring instrument, calculating an optical compensation value of luminance or chromaticity coordinates by an optical compensation meter, applying an optical compensation value to an inspection object by a pattern generator, A step of detecting whether the brightness or the color coordinate of the object to be inspected is poor or not, and the step of unloading the object to be inspected from the inspection apparatus.

An inspection object of an inspection apparatus according to an embodiment of the present invention inspects the components of the organic light emitting display.

An inspection object of an inspection apparatus according to an embodiment of the present invention inspects a substrate on which an organic light emitting device is deposited in an organic light emitting display.

The camera of the inspection apparatus according to the embodiment of the present invention is inspected with a TDI (Time Delay Integration) camera.

The inspection object of the inspection apparatus according to the embodiment of the present invention is inspected in a nitrogen (N2) atmosphere.

Although the embodiments of the present invention have been described in detail with reference to the accompanying drawings, it is to be understood that the present invention is not limited to those embodiments and various changes and modifications may be made without departing from the scope of the present invention. . Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. Therefore, it should be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of protection of the present invention should be construed according to the claims, and all technical ideas within the scope of equivalents should be interpreted as being included in the scope of the present invention.

10, 150, 210: substrate
20: cell
30: Inspection pads
100, 200: organic light emitting display
110:
120: Timing controller
130: Data driver
140: gate driver
160: gate line
170: Data line
180: pixel
190:
220: thin film transistor
222: gate electrode
224: source electrode
226: drain electrode
228: Semiconductor layer
231: Gate insulating layer
233: Interlayer insulating layer
235: Passivation layer
237: planarization layer
240: organic light emitting element
242: anode
244:
246: cathode
250: Bank
300, 400: Inspection device
310: stage
320, 420: probe unit
325, 425: first support
340, 440: Inspection unit
345, 445: inspection camera
350, 450: First measuring instrument
355, 455: Second measuring instrument
360, 460: second support
390, 490: moving rails
423: Probe block
470: Optical Compensation Meter
480: Pattern generator
A / A: display area
N / A: Non-display area

Claims (16)

A stage on which an object to be inspected is seated;
A probe unit for transmitting an electrical signal to the object to be inspected;
A first measuring unit for measuring a luminance or a color coordinate of the inspection object;
A pattern generator for optically compensating the luminance or chromaticity coordinates and transmitting the optically compensated luminance or chromaticity coordinates to the inspected object; And
And a second meter for measuring the optically compensated luminance or chromaticity coordinates. The inspection apparatus according to claim 1, wherein the object to be inspected is a component of an organic light emitting display. The inspection apparatus according to claim 2, wherein the object to be inspected is the substrate on which the organic light emitting diode is deposited in the organic light emitting display. The inspection apparatus according to claim 1, further comprising a camera disposed adjacent to the first meter or the second meter for inspecting a line defect or a point defect of the inspection object. The inspection apparatus according to claim 4, wherein the camera is a TDI (Time Delay Integration) camera. The inspection apparatus according to claim 1, wherein the inspection object is inspected in a nitrogen (N ₂ ) atmosphere. And a meter for measuring a luminance or a color coordinate of an object to be inspected;
And an optical compensator for optically compensating the luminance or the chromaticity coordinates of the inspection object measured through the meter to check whether the luminance or the chromaticity coordinates of the optically compensated inspection object are defective. The inspection apparatus according to claim 7, wherein the inspection object is a component of the organic light emitting display device. The inspection apparatus according to claim 8, wherein the inspection object is a substrate on which the organic light emitting diode is deposited in the organic light emitting display. 8. The inspection apparatus according to claim 7, further comprising a camera disposed adjacent to the meter and inspecting a line defect or a point defect of the inspection object, wherein the camera is a TDI (Time Delay Integration) camera. The inspection apparatus according to claim 7, wherein the inspection object is inspected in a nitrogen (N ₂ ) atmosphere. Loading an object to be inspected into the inspection apparatus;
Transmitting an electrical signal to the object using the probe unit;
Inspecting the defect of the inspection object with a camera;
Measuring a brightness or color coordinate of the inspection object with a first meter;
Calculating an optical compensation value of the brightness or color coordinate by an optical compensation meter;
Applying the optical compensation value to the inspection object by a pattern generator;
Measuring the optically compensated brightness or chromaticity coordinates with a second meter to detect whether the brightness or color coordinate of the inspection object is defective;
And unloading the inspection object from the inspection apparatus. 13. The inspection method according to claim 12, wherein the inspection object is a component of an organic light emitting display. 14. The inspection method according to claim 13, wherein the inspection object is the substrate on which the organic light emitting diode is deposited in the organic light emitting display. 13. The inspection method according to claim 12, wherein the camera is a TDI (Time Delay Integration) camera. The method of claim 12, wherein the test object is a test method for testing in a nitrogen (N ₂₎ atmosphere.

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