KR20180057338A - Composition for hard mask - Google Patents

Abstract

The present invention relates to a composition for a hard mask, wherein the composition for a hard mask comprises a polymer of an aromatic compound, a cross-linking agent containing at least one of the compounds represented by the general formula 1, general formula 2 or general formula 3, and a solvent. The hard mask having improved heat resistance and coating property at the same time can be formed by the crosslinking agent.

Description

COMPOSITION FOR HARD MASK [0001]

The present invention relates to a composition for a hard mask. More particularly, the present invention relates to compositions for hard masks comprising aromatic condensates or compounds.

For example, in the fields of semiconductor manufacturing, microelectronics, etc., the degree of integration of structures such as circuits, wiring lines, insulation patterns and the like is continuously improving. Accordingly, a photolithography process for fine patterning of the structures has been developed at the same time.

Generally, a photoresist is applied on a film to be etched to form a photoresist layer, and a photoresist pattern is formed through exposure and development. Then, the photoresist pattern is used as an etching mask to partially remove the etching target film to form a predetermined pattern. After the image transfer to the etch target film is performed, the photoresist pattern may be removed through an ashing and / or strip process.

An anti-reflection coating (ARC) layer may be formed between the etch target film and the photoresist layer to suppress the resolution degradation due to light reflection during the exposure process. In this case, the etching for the ARC layer is added, so that the consumption amount or the etching amount of the photoresist layer or the photoresist pattern can be increased. Further, when the thickness of the etching target film increases or the etching amount required for forming a desired pattern increases, sufficient etching resistance of the photoresist layer or the photoresist pattern may not be ensured.

Thus, a resist undercoat may be added between the etch target film and the photoresist layer to ensure etch resistance and etch selectivity of the photoresist for desired pattern formation.

The resist under film has heat resistance and chemical resistance to a high-temperature process and needs to be formed to have a uniform thickness by, for example, a spin-on coating process.

Korean Patent Laid-Open No. 10-2010-0082844 discloses an example of a composition for forming a resist lower film.

Korean Patent Publication No. 10-2010-0082844

An object of the present invention is to provide a composition for a hard mask capable of forming a hard mask having excellent mechanical and chemical properties.

1. Polymers of aromatic compounds; A crosslinking agent comprising at least one of compounds represented by the following general formula 1, general formula 2 or general formula 3; And a solvent.

[Formula 1]

[Formula 2]

(In the general formulas 1 and 2, Ar ₁ and Ar ₂ each represent an aromatic unit or a multi-ring aromatic unit, and n is an integer of 1 to 6)

[Formula 3]

(In the general formula (3), Ar ₁ , Ar ₂ and Ar ₃ each represent an aromatic unit or a multicyclic aromatic unit, n and m each represent an integer of 0 to 4, and any one of n and m is an integer of 1 or more).

2. A compound according to item 1, wherein in the general formulas 1 to 3, Ar ₁ and Ar ₂ And Ar < ₃ > are each independently selected from phenyl, naphthyl, anthracenyl, phenanthrenyl, pyrenyl, benzopyranyl or klycenyl.

3. The composition for hard mask according to 1 above, wherein n in formulas (1) and (2) is an integer of 2 to 4.

4. The hard mask composition according to item 1, wherein n and m in the general formula 3 are each an integer of 1 to 4, and the sum of n and m is an integer of 6 or less.

5. The hard mask composition according to 1 above, wherein the crosslinking agent is represented by the general formula 1 and comprises at least one of the compounds represented by the following general formulas (1) to (3)

[Chemical Formula 1]

(2)

(3)

.

.

6. The hard mask composition according to item 1, wherein the cross-linking agent is represented by the general formula 2 and comprises at least one of the compounds represented by the following formulas (4) to (6)

[Chemical Formula 4]

[Chemical Formula 5]

[Chemical Formula 6]

.

.

7. The hard mask composition according to item 1, wherein the crosslinking agent comprises the compound represented by the general formula (1) and the compound represented by the general formula (2).

8. The hard mask composition according to 1 above, wherein the polymer of the aromatic compound comprises the repeating unit represented by the following structural formula 1:

[Structural formula 1]

(In the structural formula 1, A ₁ is at least one selected from the following formulas A ₁ -1 to A _1-6 :

[A ₁ -1]

[A ₁ -2]

[A ₁ -3]

[Chemical Formula A ₁ -4]

[A ₁ -5]

[A _1-6 ]

A ₁ is unsubstituted or further substituted with an alkyl group having 1 to 6 carbon atoms, a hydroxy group, a methoxy group or a phenyl group,

Ra in the formula 1 of B) and (A ₁ -5 are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or an aryl group having 6 to 30 carbon atoms (aryl),

When B includes a benzene ring, the benzene ring is further substituted with an unsubstituted or alkyl group having 1 to 6 carbon atoms, a hydroxy group, a methoxy group or a phenyl group,

and n is an integer of 1 to 200).

9. The composition for a hard mask according to 1 above, wherein the polymer of the aromatic compound has a weight average molecular weight of 1,000 to 5,000.

10. The composition of claim 1, further comprising at least one of a catalyst or a surfactant.

A hard mask having both improved heat resistance and coating uniformity can be formed using the composition for a hard mask according to the embodiments of the present invention.

The composition for a hard mask according to the embodiments of the present invention includes an aromatic cross-linking agent having a high carbon content or a carbon content, and thus, the etching selectivity of the hard mask and the heat resistance Can be improved.

In addition, a high-resolution photolithography process can be realized using the hard mask formed from the composition for hard mask, and a target pattern having a desired fine line width can be formed.

Embodiments of the present invention provide a composition for a hard mask comprising a polymer of an aromatic compound, a cross-linking agent comprising an aromatic unit, and a solvent. The composition for a hard mask may be formed, for example, between a photoresist layer and a film to be etched to form a hard mask film utilized as a resist lower film. The hard mask film may be partially removed through a photoresist pattern to form a hard mask, and the hard mask may be used as an additional etching mask.

The hard mask film or the hard mask may be utilized, for example, as a spin-on hard mask (SOH).

Hereinafter, the composition for a hard mask according to embodiments of the present invention will be described in detail.

Polymers of aromatic compounds

In the composition for a hard mask according to the embodiments of the present invention, the polymer or resin material contained in the carbon-based SOH composition known in the art can be used without any particular limitation.

According to exemplary embodiments, at least one polymer of an aromatic compound (for example, a condensation polymer) may be used as a base material for the hard mask composition in order to ensure the heat resistance of the hard mask film.

In some embodiments, the polymer of the aromatic compound may comprise the repeating unit represented by Structural Formula (1).

[Structural formula 1]

In formula (1), A ₁ may be at least one selected from the following formulas (A ₁ -1) to (A ₁ -6). In addition, repeating units containing different A < ₁ > s may be arranged regularly or randomly.

[A ₁ -1]

[A ₁ -2]

[A ₁ -3]

[Chemical Formula A ₁ -4]

[A ₁ -5]

(Ra may include a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or an aryl group (Aryl) having 6 to 30 carbon atoms)

[A _1-6 ]

A ₁ may further be substituted with an alkyl group having 1 to 6 carbon atoms, a hydroxy group, a methoxy group or a phenyl group. B in the formula (1) may be a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or an aryl group having 6 to 30 carbon atoms. Further, when B contains a benzene ring, the benzene ring may be further substituted with an alkyl group having 1 to 6 carbon atoms, a hydroxy group, a methoxy group or a phenyl group. and n may be an integer of 1 to 200.

In some embodiments, the Formula A ₁ -1) to (A ₁ -5 can be derived from a compound represented by the formula p-1-1) to (1-5-p, respectively.

[Formula p-1-1]

[Formula p-1-2]

[Formula p-1-3]

[Formula p-1-4]

[Formula p-1-5]

In addition, the formula A _1-6 may be derived from a compound represented by the following formula (p-2-1) and / or (p-2-2), for example.

[Formula p-2-1]

[Formula p-2-2]

Each benzene ring of the formulas (p-2-1) and (p-2-2) may be independently substituted with an alkyl group having 1 to 6 carbon atoms, a methoxy group or a phenyl group.

In some embodiments, B in formula (1) may be derived from a compound of formula (p-3): < EMI ID =

[Formula p-3]

As described above, when B is a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or an aryl group having 6 to 30 carbon atoms, and when B contains a benzene ring, the benzene ring may be an alkyl group having 1 to 6 carbon atoms, a hydroxy group, Which may be further substituted with a phenyl group.

For example, the compound of the formula p-3 may be represented by the following formula (p-3-1).

[Formula p-3-1]

In one embodiment, the repeating unit represented by formula (1) or the polymer (copolymer) containing the repeating unit represented by formula (1) is obtained by condensation of a compound selected from the group consisting of the formulas (p-1-1) to (p- Reaction. ≪ / RTI >

In one embodiment, the repeating unit represented by formula (1) or the polymer (copolymer) containing the repeating unit represented by formula (1) is obtained by subjecting a compound selected from the group consisting of the formulas p-2-1 and p- Reaction. ≪ / RTI >

In one embodiment, the repeating unit represented by the formula (1) or the polymer (copolymer) containing the same is a compound selected from the group consisting of the formulas (p-1-1) to (p-1-5) p-2-2, and a compound of the formula (p-3).

As described above, the polymer according to exemplary embodiments comprises a condensate of an aromatic compound or a multicyclic aromatic compound, whereby the carbon content per unit molecule (C-contents: C%) can be increased. Thus, the etching resistance of the hard mask including the polymer to the etching gas or the etching liquid can be improved.

In embodiments of the present invention, the weight average molecular weight of the polymer can be from about 1,000 to 7,000, and preferably from about 1,000 to 5,000. When the weight average molecular weight of the polymer is less than about 1,000, the heat resistance of the hard mask is excessively lowered, which may cause cracks, etch damage, and the like. When the weight average molecular weight of the polymer exceeds about 7,000, the coating property of the composition is weakened, so that a hard mask layer or a hard mask having a uniform thickness or height may not be formed. When the polymer has a weight average molecular weight of about 5,000 or less, it may be preferable in terms of coatability of the hard mask composition.

The polydispersity index (PDI) (weight average molecular weight (Mw) / number average molecular weight (Mn)) of the polymer may be about 1.3 to 6.0, and preferably about 1.5 to 4.0. The coating property and the heat resistance of the composition for a hard mask can be improved in the range of the polydispersity index.

In some embodiments, the content of the polymer is not particularly limited, but may be about 5 to 15 wt% of the total weight of the composition. When the content of the polymer is less than about 5%, it is difficult to form a hard mask layer having a desired thickness, and the heat resistance of the hard mask may be deteriorated. If the content of the polymer exceeds about 15% by weight, the coating property of the composition may be deteriorated.

Cross-linking agent

The composition for a hard mask according to embodiments of the present invention further includes a crosslinking agent. The crosslinking reaction between the adjacent polymers or repeating units contained in the composition is induced by the crosslinking agent to further improve the mechanical properties such as heat resistance and crack resistance of the hard mask layer or the hard mask.

Further, even when a polymer having a relatively low molecular weight is used for improving the coating property, neighboring polymers are crosslinked with each other by the crosslinking agent, so that the heat resistance can be improved while securing a predetermined coating property.

According to embodiments of the present invention, the crosslinking agent may include an aromatic unit and a crosslinking reactive functional group. In some embodiments, the aromatic unit may be a multi-ring aromatic unit, and the cross-linking functional group may include a ketone group.

In one embodiment, the ketone group, for example, by a reducing agent such as NaBH ₄ may be converted to alcohol.

In exemplary embodiments, the crosslinking agent may comprise a compound represented by the following general formula (1).

[Formula 1]

In the general formula (1), Ar ₁ and Ar ₂ represent an aromatic unit or a multi-ring aromatic unit. Ar ₁ and Ar ₂ may be the same or different from each other. For example, Ar < ₁ > and Ar < ₂ > may each independently be phenyl, naphthyl, anthracenyl, phenanthrenyl, pyrenyl, benzopyranyl or klycenyl. n is an integer of 1 to 6;

In some embodiments, it may be desirable for n to be an integer greater than or equal to 2 to facilitate cross-linking reactions. Also, in consideration of the possibility of inhibiting the crosslinking reaction due to steric hindrance, n may preferably be an integer of 4 or less.

For example, Ar ₂ may be pyrene, and in this case, the crosslinking agent may include at least one of the compounds represented by Chemical Formulas 1 to 3 below.

[Chemical Formula 1]

(2)

(3)

In exemplary embodiments, the crosslinking agent may be present in the form of an alcohol as described above and may include a compound represented by the following general formula (2).

[Formula 2]

Ar ₁ , Ar ₂ and n are the same as defined in the above general formula (1).

For example, Ar ₂ may be pyrene, in which case the crosslinking agent may comprise at least one of the compounds represented by the following formulas (4) to (6).

[Chemical Formula 4]

[Chemical Formula 5]

[Chemical Formula 6]

In some embodiments, the crosslinking agent may comprise a compound represented by Formula 1 and a compound represented by Formula 2 together.

In some embodiments, the crosslinking agent may comprise a compound represented by the following general formula (3).

[Formula 3]

In the general formula (3), Ar ₁ , Ar ₂ , and Ar ₃ represent an aromatic unit or a multi-ring aromatic unit, and examples thereof include phenyl, naphthyl, anthracenyl, phenanthrenyl, pyrenyl, Lt; / RTI >

n and m are each an integer of 0 to 4, and any one of n and m may be an integer of 1 or more. In one embodiment, n and m may each be an integer from 1 to 4. In one embodiment, the sum of n and m may be 6 or less, preferably 4 or less.

As the crosslinking agent is included in the composition for a hard mask, the desired heat resistance of the hard mask can be secured even when a relatively low molecular weight polymer is used as described above. Accordingly, it is possible to improve the mechanical properties of the hard mask while improving the coating property of the composition for hard mask.

Further, the crosslinking agent includes an aromatic unit or a multi-ring aromatic unit, and thus may have a high carbon content (C%) structure. Thus, the resistance of the hard mask to etch gas or etchant is improved, and the etch selectivity of the etch process utilizing the hard mask can be increased.

As used herein, the term " carbon content " may refer to the ratio of carbon mass to total mass per molecule of a compound. In some embodiments, the carbon content of the crosslinking agent may be greater than about 85%. In one embodiment, the carbon content of the crosslinking agent may be greater than or equal to about 89%.

The content of the crosslinking agent may be about 0.1 to 20 parts by weight, and preferably about 1 to 20 parts by weight based on 100 parts by weight of the polymer. Within the above range, the heat resistance and the etching selectivity can be improved without inhibiting the coating property of the composition for a hard mask.

solvent

In the composition for a hard mask according to the embodiments of the present invention, an organic solvent capable of ensuring sufficient solubility of the above-mentioned polymer and cross-linking agent can be used as a solvent without particular limitation.

For example, propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monomethyl ether (PGME), cyclohexanone, ethyl lactate, gamma-butyrolactone (gamma- butyrolactone (GBL), and acetyl acetone. A solvent such as propylene glycol monomethyl ether acetate (PGMEA) may be preferably used as the solvent.

The content of the solvent is not particularly limited, and may be included as a balance excluding the above-mentioned components and other additive components. For example, about 50 to 95% by weight, preferably 80 to 95% by weight, of the total weight of the composition for a hard mask may be included considering the applicability, solubility, and dryness of the composition.

additive

In some embodiments, the composition for hardmask may further comprise a catalyst for promoting the crosslinking reaction of the repeating units of the polymer by a crosslinking agent. As the catalyst, an acid catalyst or a basic catalyst may be used.

A thermally activated acid catalyst may be used as the acid catalyst. Examples of the acid catalyst include an organic acid such as p-toluene sulfonic acid monohydrate, and a thermal acid generator (TAG) -based compound. Examples of the thermal acid generators include pyridinium p-toluene sulfonate, 2,4,4,6-tetrabromocyclohexadiene, benzoin tosylate, 2-nitrobenzyl tosylate, Alkyl esters of organic sulfonic acids, and the like.

For example, by the acid generated from the thermal acid generator, the crosslinking agent reacts with the hydroxyl group of the polymer to promote the crosslinking reaction.

NH ₄ OH or an ammonium hydroxide-based compound may be used as the basic catalyst.

For example, the content of the catalyst may be about 0.001 to 50 parts by weight, preferably about 0.1 to 20 parts by weight, and more preferably about 1 to 20 parts by weight based on 100 parts by weight of the polymer.

In some embodiments, the composition for hardmask may further comprise a surfactant. As the surfactant, for example, alkylbenzenesulfonic acid salts, alkylpyridinium salts, polyethylene glycols, ceramides ammonium salts and the like can be used. For example, the surfactant may be included in an amount of about 1 to 30 parts by weight based on 100 parts by weight of the polymer. Within this range, the hardness of the hard mask layer, the surface uniformity, and the like can be improved by the surfactant without deteriorating the optical characteristics of the hard mask.

Hereinafter, exemplary embodiments of the present invention will be described in order to facilitate understanding of the present invention. However, the present invention is not limited to the following claims, It will be apparent to those skilled in the art that various changes and modifications can be made in the embodiment within the scope of the category and the scope of the invention, and such variations and modifications are within the scope of the appended claims.

Examples and Comparative Examples

A composition for a hard mask of the composition and the content (% by weight) shown in Table 1 below was prepared.

division Polymer (A) The crosslinking agent (B) solvent
(C) The catalyst (D) additive
(E) ingredient content ingredient content C% content content content Example 1 A-1 10 B-1 One 89.74 87 One One Example 2 A-1 10 B-2 One 90.39 87 One One Example 3 A-1 10 B-3 One 89.87 87 One One Example 4 A-2 10 B-1 One 89.74 87 One One Example 5 A-3 10 B-1 One 89.74 87 One One Example 6 A-4 10 B-1 One 89.74 87 One One Example 7 A-5 10 B-1 One 89.74 87 One One Comparative Example 1 A-5 10 - - - 88 One One Comparative Example 2 A-1 10 B-4 One 45.28 87 One One Comparative Example 3 A-1 10 B-5 One 64.27 87 One One Comparative Example 4 A-1 10 B-6 One 61.07 87 One One

,

,

(몰비율: 90:10:10)의 축합반응(산촉매: 파라톨루엔술폰산(아릴알코올 화합물 대비 5mol%))으로 생성된 공중합체(중량평균분자량: 2400)A-1:

,

,

(Weight average molecular weight: 2400) produced by the condensation reaction (acid catalyst: paratoluenesulfonic acid (5 mol% based on the aryl alcohol compound)) of the compound (molar ratio: 90:10:10)

의 축합반응(산촉매: 파라톨루엔술폰산(아릴알코올 화합물 대비 5mol%))으로 생성된 공중합체(중량평균분자량: 2900)A-2:

(Weight average molecular weight: 2900) produced by the condensation reaction (acid catalyst: paratoluene sulfonic acid (5 mol% based on the aryl alcohol compound)

의 축합반응(산촉매: 파라톨루엔술폰산(아릴알코올 화합물 대비 5mol%))으로 생성된 공중합체(중량평균분자량: 4700)A-3:

(Weight average molecular weight: 4700) produced by condensation reaction (acid catalyst: para-toluenesulfonic acid (5 mol% based on aryl alcohol compound)

의 축합반응(산촉매: 파라톨루엔술폰산(아릴알코올 화합물 대비 5mol%))으로 생성된 pre-공중합체에

10mol%을 첨가하여 생성된 공중합체(중량평균분자량: 5500)A-4:

(Acid catalyst: para-toluenesulfonic acid (5 mol% based on the aryl alcohol compound)) of the pre-copolymer

(Weight average molecular weight: 5500) produced by adding 10 mol%

의 축합반응(산촉매: 파라톨루엔술폰산(아릴알코올 화합물 대비 5mol%))으로 생성된 pre-공중합체에

을 첨가하여 생성된 공중합체(중량평균분자량: 7600)A-5:

(Acid catalyst: para-toluenesulfonic acid (5 mol% based on the aryl alcohol compound)) of the pre-copolymer

(Weight average molecular weight: 7600)

B-1:

B-2:

B-3:

B-4:

B-5:

B-6:

C: Propylene glycol monomethyl ether acetate (PGMEA)

D: p-toluenesulfonic acid-pyridine salt

E: triethylene glycol

Experimental Example

The heat resistance, coating properties and etch selectivity of the hard mask layer or hard mask formed from the compositions of Table 1 were evaluated through the evaluation method described below. The evaluation results are shown in Table 2 below.

1. Evaluation of heat resistance

The compositions according to the examples and comparative examples in Table 1 were vacuum dried to remove the solvent and a portion of the sample was taken and the mass loss rate was measured while elevating the temperature to 800 DEG C using TGA (thermogravimetric analysis) under nitrogen.

Mass loss rate = {(initial mass - mass at 800 DEG C) / initial mass} x 100%

≪ Determination of heat resistance &

◎: mass loss rate less than 10%

?: Mass loss rate of 10% or more to less than 15%

DELTA: Mass loss rate: 15% or more to less than 25%

×: mass loss rate of 25% or more

2. Coating uniformity

The compositions according to the examples and comparative examples in Table 1 were spin-coated after drying to a thickness of 5 탆, dried at 100 캜 in a hot-air drier for 3 minutes, and then visually inspected.

≪ Coating uniformity determination &

○: Unevenness of coating surface is not visually confirmed.

?: Local irregularity was visually confirmed.

×: Unevenness on the front surface was visually confirmed.

3. Etch selectivity (E / S)

The compositions according to the examples and comparative examples in Table 1 were each coated on a silicon wafer by spin coating and baked at 200 DEG C for 60 seconds to form a film having a thickness of 1500 ANGSTROM. Each of the formed films was coated with ArF photoresist, baked at 110 ° C for 60 seconds, exposed using ASML (XT: 1450G, NA 0.93) exposure equipment, and developed with TMAH (2.38 wt% aqueous solution) A line-and-space pattern of 60 nm was obtained.

The patterned specimens obtained, and further cured at 110 ℃ 60 seconds, and the test piece using a CHF ₃ / CF ₄ gas mixture proceeds dry etching 20 seconds, respectively, and by observing the cross section by FE-SEM, respectively to measure the etching rate The etch resistance, i.e., etch selectivity, for the halogen plasma was determined.

≪ Evaluation of etching selectivity &

◎: Etching rate less than 10 A / sec

○: Etching rate 10 A / sec or more and less than 11 A / sec

DELTA: etching rate of 11 A / sec or more and less than 12 A / sec

×: etching rate of 12 A / sec or more

division Heat resistance coating
Uniformity etching
Selectivity Example 1 ◎ ○ ◎ Example 2 ◎ ○ ◎ Example 3 ◎ ○ ◎ Example 4 ◎ ○ ◎ Example 5 ◎ ○ ◎ Example 6 ◎ △ ◎ Example 7 ◎ △ ◎ Comparative Example 1 ○ × △ Comparative Example 2 × ○ × Comparative Example 3 × ○ △ Comparative Example 4 × ○ △

Referring to Table 2, in the examples including the crosslinking agent according to the embodiments of the present invention, remarkably excellent heat resistance, coating uniformity and etch selectivity results were obtained compared with the comparative examples.

In the case of a comparison 1 in which a crosslinking agent is not contained and a polymer having a relatively high molecular weight (Mw (A-5): 7600) is 1, the heat resistance is relatively good but the coating property is remarkably deteriorated.

In Comparative Examples 2 to 4 including a polymer having a relatively low molecular weight (Mw (A-1): 2,400), the heat resistance was deteriorated and the etching selectivity was not sufficiently improved even though a crosslinking agent was included. In particular, in Comparative Example 2 using a crosslinking agent (B-4) having a low carbon content and no aromatic unit, the etching selectivity was also markedly low.

On the other hand, in Examples 6 and 7, as the molecular weight of the polymer increased, the coating properties were somewhat reduced. Particularly, in the case of Example 7 in which the polymer molecular weight exceeds 7000, the increase of the non-uniform regions was visually confirmed.

In addition, each of the crosslinking agents used in Examples 1 to 3 was reduced through NaBH ₄ , and the same test was repeated. The evaluation results are shown in Table 3 below.

division Heat resistance coating
Uniformity etching
Selectivity Example 1-1
(Crosslinking agent B-1-1) ◎ ○ ◎ Example 2-1
(Crosslinking agent B-2-1) ◎ ○ ◎ Example 3-1
(Crosslinking agent B-3-1) ◎ ○ ◎

B-1-1:

B-2-1:

B-3-1:

As a result of evaluation, substantially the same results as those of Examples 1 to 3 were obtained in Examples 1-1 to 1-3 using the cross-linking agents of the alcohol structure, and all of the heat resistance, coating uniformity and etch selectivity results .

Claims (10)

Polymers of aromatic compounds;
A crosslinking agent comprising at least one of compounds represented by the following general formula 1, general formula 2 or general formula 3; And
A composition for a hard mask, comprising a solvent:
[Formula 1]

[Formula 2]

(In the general formulas 1 and 2, Ar ₁ and Ar ₂ each represent an aromatic unit or a multi-ring aromatic unit, and n is an integer of 1 to 6)
[Formula 3]

(In the general formula (3), Ar ₁ , Ar ₂ and Ar ₃ each represent an aromatic unit or a multicyclic aromatic unit, n and m each represent an integer of 0 to 4, and any one of n and m is an integer of 1 or more).
The compound according to claim 1, wherein in the general formulas 1 to 3, Ar ₁ , Ar ₂ And Ar < ₃ > are each independently selected from phenyl, naphthyl, anthracenyl, phenanthrenyl, pyrenyl, benzopyranyl or klycenyl.
2. The hard mask composition according to claim 1, wherein n in formulas (1) and (2) is an integer of 2 to 4.
The composition for a hard mask according to claim 1, wherein in the general formula (3), n and m are each an integer of 1 to 4, and the sum of n and m is an integer of 6 or less.
The composition for a hard mask according to claim 1, wherein the crosslinking agent comprises at least one compound represented by the general formula (1) and represented by the following general formulas (1) to (3)
[Chemical Formula 1]

(2)

(3)

.
The composition for a hard mask according to claim 1, wherein the cross-linking agent comprises at least one compound represented by the general formula (2) and represented by the following general formulas (4) to (6)
[Chemical Formula 4]

[Chemical Formula 5]

[Chemical Formula 6]

.
The composition for a hard mask according to claim 1, wherein the crosslinking agent comprises the compound represented by the general formula (1) and the compound represented by the general formula (2).
The composition for a hard mask according to claim 1, wherein the polymer of the aromatic compound comprises a repeating unit represented by the following structural formula 1:
[Structural formula 1]

(In the structural formula 1, A ₁ is at least one selected from the following formulas A ₁ -1 to A _1-6 :
[A ₁ -1]

[A ₁ -2]

[A ₁ -3]

[Chemical Formula A ₁ -4]

[A ₁ -5]

[A _1-6 ]

A ₁ is unsubstituted or further substituted with an alkyl group having 1 to 6 carbon atoms, a hydroxy group, a methoxy group or a phenyl group,
Ra in the formula 1 of B) and (A ₁ -5 are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or an aryl group having 6 to 30 carbon atoms (aryl),
When B contains a benzene ring, the benzene ring is further substituted with an unsubstituted or alkyl group having 1 to 6 carbon atoms, a hydroxy group, a methoxy group or a phenyl group,
and n is an integer of 1 to 200).
The composition for a hard mask according to claim 1, wherein the polymer of the aromatic compound has a weight average molecular weight of 1,000 to 5,000.
The composition of claim 1, further comprising at least one of a catalyst or a surfactant.